CN201087172Y - Ultra-thin glass substrate laser cutting machine - Google Patents
Ultra-thin glass substrate laser cutting machine Download PDFInfo
- Publication number
- CN201087172Y CN201087172Y CNU2006200496883U CN200620049688U CN201087172Y CN 201087172 Y CN201087172 Y CN 201087172Y CN U2006200496883 U CNU2006200496883 U CN U2006200496883U CN 200620049688 U CN200620049688 U CN 200620049688U CN 201087172 Y CN201087172 Y CN 201087172Y
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Laser Beam Processing (AREA)
Abstract
The utility model discloses a laser cutting machine of an ultra thin glass foundation plate, which comprises a machine body and a laser device. The utility model is characterized in that the laser cutting machine also comprises a beam shaping and servo focusing system, a portal-shaped type two-dimensional air-flotation high speed platform, a glass pre-cutting device, a cooled air spraying nozzle, an air bottle, a 90-degrees air-flotation rotating platform, and a negative pressure adsorbing platform; the laser device is connected with the beam shaping and servo focusing system, and arranged on an X axle moving platform device of the portal-shaped type two-dimensional air-flotation high speed platform; the glass pre-cutting device is arranged in front of the beam shaping and servo focusing system; the cooled air spraying nozzle is connected with the air bottle through an air line, and arranged behind the beam shaping and servo focusing system; the 90-degrees air-flotation rotating platform is arranged on a Y axle moving platform device of the portal-shaped type two-dimensional air-flotation high speed platform, and the negative pressure adsorbing platform is fixed on the 90-degrees air-flotation rotating platform. The utility model can increase the rate of finished products of the glass foundation plates greatly, and can be extensively applied in the liquid crystal display industry and the glass processing industry.
Description
Technical field:
The utility model relates to a kind of laser cutting system, is specifically related to a kind of ultra-thin glass substrate (laser large format high-speed cutting machine of the cutting of thickness＜1.1mm) that is applied to.
Background technology:
The ultra-thin glass substrate cut that is applied to liquid-crystal display and multiple flat display apparatus at present adopts traditional cut mechanically device of diamant or Wimet wheel mostly, tend to produce irregular tiny crack at glass edge, and inevitably produce chip, influence yield of products, and need interpolation to clean, optional equipments such as polishing increase processing link.If thickness is less than the glass substrate of 0.7mm, the tradition cutting then is difficult to cutting, and yield rate is extremely low.
Summary of the invention
The purpose of this utility model is the shortcoming that has now at the used shut-off device of cutting ultra thin glass substrate in order to overcome, and a kind of high speed laser cutting machine tool that the ultra-thin glass substrate can be cut on request little rectangular dimension and have good section effect and rim stress is provided.
The technical solution of the utility model is: a kind of ultra-thin glass substrate laser cutting machine, comprise: body, laser apparatus, be characterized in the planer-type bidimensional air supporting high speed platform that it also comprises beam shaping and servo focusing system, be made up of X-axis exemplary motion stage device, Y-axis exemplary motion stage device, glass precut device, cooling gas nozzle, gas cylinder, 90 ° of air-float turntables, negative-pressure adsorption platform; Laser apparatus is connected with servo focusing system with beam shaping, places on the X-axis exemplary motion stage device of planer-type bidimensional air supporting high speed platform; The glass precut device is positioned at beam shaping and servo focusing system the place ahead; The cooling gas nozzle is connected with gas cylinder by gas circuit and is positioned at beam shaping and servo focusing system rear; 90 ° of air-float turntables are loaded on the Y-axis exemplary motion stage device of bidimensional air supporting high speed platform, and the negative-pressure adsorption platform is fixed on 90 ° of air-float turntables.
Described optical shaping and focusing servosystem are configured to by beam expanding lens, collimating mirror, total reflective mirror, shaping lens group, focusing drawtube group, laser beam is injected the shaping lens group that arrives Z-direction through collimating mirror, total reflective mirror from beam expanding lens, the final ellipse light spot that produces is as the thermal source of cutting machine.
Described X-axis exemplary motion stage device comprises the X-axis motor, X-axis aerostatic slide, X-axis air supporting gas circuit, the X-axis motion platform, the X-axis leading screw, the X-axis motor output shaft is connected with the X-axis leading screw, the X-axis motion platform is fixed on the X-axis aerostatic slide, X-axis aerostatic slide and the engagement of X-axis leading screw.
Described Y-axis exemplary motion stage device comprises y-axis motor, the Y-axis aerostatic slide, Y-axis air supporting gas circuit, 90 ° of air-float turntables, negative-pressure adsorption platform, Y-axis leading screw, the y-axis motor output shaft is connected with the Y-axis leading screw, the negative-pressure adsorption platform is fixed on 90 ° of air-float turntables, and 90 ° of air-float turntables are fixed on the Y-axis aerostatic slide, Y-axis aerostatic slide and the engagement of Y-axis leading screw.
The beneficial effects of the utility model are that generating non-focusing ellipse light spot by optical shaping and focusing system shines in the ultra-thin glass substrate surface, are equipped with the pressure cooling gas, and it is poor to produce appropriate thermal stresses, thereby reach the controlled fracture of ultra-thin glass substrate.Can increase substantially the yield rate of glass substrate, can in liquid-crystal display industry and glass processing industry, obtain to use widely
Description of drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is the utility model optical shaping and focusing servo system structure synoptic diagram;
Fig. 3 is the utility model X-axis exemplary motion stage device structural representation;
Fig. 4 is the utility model Y-axis exemplary motion stage device structural representation.
Wherein: body 1, laser apparatus 2, optical shaping and servo focusing system 3, X-axis exemplary motion stage device 4, glass precut device 5, cooling gas nozzle 6,7,90 ° of air-float turntables 8 of gas cylinder, Y-axis exemplary motion stage device 9, negative-pressure adsorption platform 10, beam expanding lens 11, collimating mirror 12, total reflective mirror 13, shaping lens group 14, focusing drawtube group frame 15, X-axis motor 16, X-axis aerostatic slide 17, X-axis air supporting gas circuit 18, X-axis motion platform 19, X-axis leading screw 20, y-axis motor 21, Y-axis aerostatic slide 22, Y-axis air supporting gas circuit 23, Y-axis leading screw 24.
Embodiment
As Fig. 1, Fig. 2, Fig. 3, shown in Figure 4, ultra-thin glass substrate laser cutting machine comprises: body 1; Laser apparatus 2; Be characterized in planer-type bidimensional air supporting high speed platform, glass precut device 5, cooling gas nozzle 6,7,90 ° of air-float turntables 8 of gas cylinder, negative-pressure adsorption platform 10 that it also comprises beam shaping and servo focusing system 3, is made up of X-axis exemplary motion stage device 4, Y-axis exemplary motion stage device 9; , laser apparatus 2 is connected with servo focusing system 3 with beam shaping, is loaded on the X-axis exemplary motion stage device 4 of planer-type bidimensional air supporting high speed platform; Glass precut device 5 is positioned at beam shaping and servo focusing system 3 the place aheads; Cooling gas nozzle 6 is connected with gas cylinder 7 by gas circuit and is positioned at beam shaping and servo focusing system 3 rears; 90 ° of air-float turntables 8 are loaded on the Y-axis exemplary motion stage device 9 of bidimensional air supporting high speed platform, and negative-pressure adsorption platform 10 is fixed on 90 ° of air-float turntables 8.
Body of the present utility model has industrial computer interface and operating panel.Air supporting gas circuit, cooling gas circuit and laser power supply are connected by the intravital peripheral hardware of drag chain and machine with control signal wire.The utility model by industrial computer be provided with the cutting initial initial point, the input cutting path after, by industrial computer configure cut in advance the action and the laser power parameter.Crossbeam direction laser apparatus opens the light after arriving cutting path, by producing heating source after the beam shaping system, cooperate the cold gas comprehensive action of relevant pressure flow velocity to produce controlled crackle in the ultra-thin glass surface, the negative-pressure adsorption platform is cutting off glass substrate perpendicular to crossbeam direction high-speed motion as the bogey of ultra-thin glass on the one dimension direction, 90 ° of air-float turntables repeat the rectangle small pieces cutting that cutting action can form bidimensional again with negative-pressure adsorption platform half-twist.
By shown in Figure 2, described optical shaping and focusing servosystem 3 are made of beam expanding lens 11, collimating mirror 12, total reflective mirror 13, shaping lens group 14, focusing drawtube group frame 15, laser beam is injected the shaping lens group 14 that arrives Z-direction through collimating mirror 12, total reflective mirror 13 from beam expanding lens 11, the final ellipse light spot that produces is as the thermal source of cutting machine.
As shown in Figure 3, the X-axis exemplary motion stage device comprises X-axis motor 16, X-axis aerostatic slide 17, X-axis air supporting gas circuit 18, X-axis motion platform 19, X-axis leading screw 20.X-axis motor 16 output shafts are connected with X-axis leading screw 20, and X-axis motion platform 19 is fixed on the X-axis aerostatic slide 17, X-axis aerostatic slide 17 and 20 engagements of X-axis leading screw.
As shown in Figure 4, the Y-axis exemplary motion stage device comprises y-axis motor 21, Y-axis aerostatic slide 22,23,90 ° of air-float turntables 8 of Y-axis air supporting gas circuit, negative-pressure adsorption platform 10, Y-axis leading screw 24.Y-axis motor 21 output shafts are connected with Y-axis leading screw 24, and negative-pressure adsorption platform 10 is fixed on 90 ° of air-float turntables 8, and 90 ° of air-float turntables 8 are fixed on the Y-axis aerostatic slide 22, Y-axis aerostatic slide 22 and 24 engagements of Y-axis leading screw.
The utility model laser apparatus adopts radio frequency CO2 laser apparatus, range of frequency 5K～20K, duty ratio modulation, be output as 10.6 microns infrared lights of ultra-thin glass substrate high-absorbility, through cooperating with the cold gas of corresponding discharge after the focusing shaping, in the ultra-thin glass body, produce stable controlled crackle, thereby the cutting path according to program setting forms the cutting effect that section does not neatly have chip with crack growth, glass section rim stress is strengthened because of cold quenching simultaneously, is beneficial to the back road utilization of glass substrate.The utility model cutting accuracy height, cross section quality is good, can significantly improve the yield rate of glass substrate, and reduces follow-up link, can obtain to use widely in liquid-crystal display industry and glass processing industry.
Claims (6)
1. a ultra-thin glass substrate laser cutting machine comprises: body (1); Laser apparatus (2); It is characterized in that planer-type bidimensional air supporting high speed platform, glass precut device (5), cooling gas nozzle (6), gas cylinder (7), 90 ° of air-float turntables (8), negative-pressure adsorption platform (10) that it also comprises beam shaping and servo focusing system (3), is made up of X-axis exemplary motion stage device (4), Y-axis exemplary motion stage device (9); , laser apparatus (2) is connected with servo focusing system (3) with beam shaping, is loaded on the X-axis exemplary motion stage device (4) of planer-type bidimensional air supporting high speed platform; Glass precut device (5) is positioned at beam shaping and servo focusing system (3) the place ahead; Cooling gas nozzle (6) is connected with gas cylinder (7) by gas circuit and is positioned at beam shaping and servo focusing system (3) rear; 90 ° of air-float turntables (8) are loaded on the Y-axis exemplary motion stage device (9) of bidimensional air supporting high speed platform, and negative-pressure adsorption platform (10) is fixed on 90 ° of air-float turntables (8).
2. ultra-thin glass substrate laser cutting machine according to claim 1, it is characterized in that, described optical shaping and focusing servosystem (3) are made of beam expanding lens (11), collimating mirror (12), total reflective mirror (13), shaping lens group (14), focusing drawtube group frame (15), laser beam is injected the shaping lens group (14) that arrives Z-direction through collimating mirror (12), total reflective mirror (13) from beam expanding lens (11), the final ellipse light spot that produces is as the thermal source of cutting machine.
3. ultra-thin glass substrate laser cutting machine according to claim 1, it is characterized in that, described X-axis exemplary motion stage device (4) comprises X-axis motor (16), X-axis aerostatic slide (17), X-axis air supporting gas circuit (18), X-axis motion platform (19), X-axis leading screw (20), X-axis motor (16) output shaft is connected with X-axis leading screw (20), and X-axis motion platform (19) is fixed on the X-axis aerostatic slide (17), X-axis aerostatic slide (17) and X-axis leading screw (20) engagement.
4. ultra-thin glass substrate laser cutting machine according to claim 1, it is characterized in that described Y-axis exemplary motion stage device (9) comprises y-axis motor (21), Y-axis aerostatic slide (22), Y-axis air supporting gas circuit (23), 90 ° of air-float turntables (8), negative-pressure adsorption platform (10), Y-axis leading screw (24), y-axis motor (21) output shaft is connected with Y-axis leading screw (24), negative-pressure adsorption platform (10) is fixed on 90 ° of air-float turntables (8), 90 ° of air-float turntables (8) are fixed on the Y-axis aerostatic slide (22), Y-axis aerostatic slide (22) and Y-axis leading screw (24) engagement.
5. ultra-thin glass substrate laser cutting machine according to claim 1 is characterized in that described laser apparatus (2) adopts radio frequency CO2 laser apparatus, range of frequency 5K～20K, and duty ratio modulation is output as 10.6 microns infrared lights of ultra-thin glass substrate high-absorbility.
6. ultra-thin glass substrate laser cutting machine according to claim 1 is characterized in that described body (1) is equipped with industrial computer interface and operating panel
Air supporting gas circuit, cooling gas circuit and laser power supply are connected by the intravital peripheral hardware of drag chain and machine with control signal wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006200496883U CN201087172Y (en) | 2006-12-28 | 2006-12-28 | Ultra-thin glass substrate laser cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006200496883U CN201087172Y (en) | 2006-12-28 | 2006-12-28 | Ultra-thin glass substrate laser cutting machine |
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| Publication Number | Publication Date |
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| CN201087172Y true CN201087172Y (en) | 2008-07-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNU2006200496883U Expired - Fee Related CN201087172Y (en) | 2006-12-28 | 2006-12-28 | Ultra-thin glass substrate laser cutting machine |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102060438A (en) * | 2009-11-17 | 2011-05-18 | 郅健斌 | Laser rapid cutting device for solar energy glass tube |
| CN102248302A (en) * | 2011-01-13 | 2011-11-23 | 苏州德龙激光有限公司 | Device and method for abnormally cutting toughened glass by ultra-short pulse laser |
| CN102249527A (en) * | 2011-01-13 | 2011-11-23 | 苏州德龙激光有限公司 | Apparatus for cutting glass, and method thereof |
| WO2012141962A1 (en) * | 2011-04-11 | 2012-10-18 | Corning Incorporated | Methods and apparatuses for applying a handling tab to continuous glass ribbons |
| CN103212841A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Processing equipment for laser wet cutting and detecting of SMT (Surface Mounting Technology) template |
| CN103217505A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | SMT screen plate detection device |
| CN103420600A (en) * | 2013-08-27 | 2013-12-04 | 武汉帝尔激光科技有限公司 | Laser cutting machining method and system for transparent workpiece |
| CN103466930A (en) * | 2013-07-25 | 2013-12-25 | 武汉帝尔激光科技有限公司 | Cutting system and cutting method for glass panel |
| CN103539343A (en) * | 2012-07-09 | 2014-01-29 | 三和科技有限公司 | Mixed machining method for colored glass |
| CN104071974A (en) * | 2014-06-20 | 2014-10-01 | 武汉先河激光技术有限公司 | Laser equipment for cutting glass and cutting method |
| CN109195332A (en) * | 2018-10-13 | 2019-01-11 | 芜湖市传世信息技术有限公司 | A kind of electronic product productive power road plate cutter device |
| CN109354397A (en) * | 2018-10-25 | 2019-02-19 | 深圳市华星光电半导体显示技术有限公司 | Panel cutting apparatus |
| CN111018334A (en) * | 2019-12-28 | 2020-04-17 | 深圳中科光子科技有限公司 | Laser processing method and laser processing device for fluorescent glass ceramic |
-
2006
- 2006-12-28 CN CNU2006200496883U patent/CN201087172Y/en not_active Expired - Fee Related
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102060438A (en) * | 2009-11-17 | 2011-05-18 | 郅健斌 | Laser rapid cutting device for solar energy glass tube |
| CN102060438B (en) * | 2009-11-17 | 2013-03-27 | 郅健斌 | Laser rapid cutting device for solar energy glass tube |
| CN102248302A (en) * | 2011-01-13 | 2011-11-23 | 苏州德龙激光有限公司 | Device and method for abnormally cutting toughened glass by ultra-short pulse laser |
| CN102249527A (en) * | 2011-01-13 | 2011-11-23 | 苏州德龙激光有限公司 | Apparatus for cutting glass, and method thereof |
| WO2012141962A1 (en) * | 2011-04-11 | 2012-10-18 | Corning Incorporated | Methods and apparatuses for applying a handling tab to continuous glass ribbons |
| CN103217505B (en) * | 2012-01-19 | 2016-04-27 | 昆山思拓机器有限公司 | SMT screen plate detection device |
| CN103217505A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | SMT screen plate detection device |
| CN103212841A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Processing equipment for laser wet cutting and detecting of SMT (Surface Mounting Technology) template |
| CN103212841B (en) * | 2012-01-19 | 2016-07-06 | 昆山思拓机器有限公司 | SMT template laser wet cutting and detection process equipment |
| CN103539343A (en) * | 2012-07-09 | 2014-01-29 | 三和科技有限公司 | Mixed machining method for colored glass |
| CN103466930A (en) * | 2013-07-25 | 2013-12-25 | 武汉帝尔激光科技有限公司 | Cutting system and cutting method for glass panel |
| CN103420600A (en) * | 2013-08-27 | 2013-12-04 | 武汉帝尔激光科技有限公司 | Laser cutting machining method and system for transparent workpiece |
| CN104071974A (en) * | 2014-06-20 | 2014-10-01 | 武汉先河激光技术有限公司 | Laser equipment for cutting glass and cutting method |
| CN104071974B (en) * | 2014-06-20 | 2016-04-13 | 武汉先河激光技术有限公司 | A kind of laser equipment for glass cutting and cutting method |
| CN109195332A (en) * | 2018-10-13 | 2019-01-11 | 芜湖市传世信息技术有限公司 | A kind of electronic product productive power road plate cutter device |
| CN109354397A (en) * | 2018-10-25 | 2019-02-19 | 深圳市华星光电半导体显示技术有限公司 | Panel cutting apparatus |
| WO2020082591A1 (en) * | 2018-10-25 | 2020-04-30 | 深圳市华星光电半导体显示技术有限公司 | Panel cutting apparatus |
| CN111018334A (en) * | 2019-12-28 | 2020-04-17 | 深圳中科光子科技有限公司 | Laser processing method and laser processing device for fluorescent glass ceramic |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080716 Termination date: 20101228 |