CN201081540Y - Silicone fluid overflow protection system for poly-silicon ingot furnace - Google Patents
Silicone fluid overflow protection system for poly-silicon ingot furnace Download PDFInfo
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- CN201081540Y CN201081540Y CNU2007201136146U CN200720113614U CN201081540Y CN 201081540 Y CN201081540 Y CN 201081540Y CN U2007201136146 U CNU2007201136146 U CN U2007201136146U CN 200720113614 U CN200720113614 U CN 200720113614U CN 201081540 Y CN201081540 Y CN 201081540Y
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- silicon liquid
- liquid overflow
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- silicon
- receiving container
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Abstract
The utility model provides a silicon liquid overflow protection system for polysilicon casting furnace, belonging to the polysilicon casting furnace design and manufacture technical field; the utility model mainly comprises a furnace body (1) of which the rock wool(10) is arranged on the bottom part, a heat insulation cage body (5) which is arranged in the furnace body and of which the bottom part is provided with a heat insulation bottom board (6), a heat exchange platform (4) which is arranged in the heat insulation cage body and provided with a quartz crucible (2) and a graphite crucible (3), a center jacket (12) and a convex platform sleeve (11) arranged in the middle of the rock wool, diversion ditches (13) arranged on both sides of the bottom part of the graphite crucible, diversion holes (14) arranged on both sides of the heat insulation bottom board, a silicon liquid overflow receiving container (7) which is arranged on the rock wool (10) on the bottom part of the furnace body and corresponds to the diversion holes and a metal blown fuse (8) which is arranged in the silicon liquid overflow receiving container and provided with a controller (9), etc.; under the action of the affluxion and diversion system formed by the diversion ditches, the diversion holes and the silicon liquid overflow receiving container with metal blown fuse, the damage of the silicon liquid to the furnace body can be effectively avoided.
Description
Technical field
The utility model relates to a kind of silicon liquid overflow protective system of polycrystalline silicon ingot or purifying furnace, belongs to the design and the manufacturing technology field of polycrystalline silicon ingot or purifying furnace.
Background technology
Silicon Si is most important a kind of basic material in the photovoltaic industry, and silicon content in the earth's crust is abundant, is only second to oxygen, reaches 25.7%.1414 ℃ of pure silicon fusing points are used for solar-grade polysilicon purity generally more than 99.99%.Silicon is in high melt, sintering, general used container mostly is silica crucible, near 1414 ℃ of the fusing points of silicon, it is soft that the quartz material of crucible can become, the support of the rigid shell crucible of therefore need be outside silica crucible making with refractory material or by high purity graphite again makes it have enough temperature and clean degree characteristic.
Existing polycrystalline silicon ingot or purifying furnace in the protection of silicon hydrorrhea stream, mainly adopts Metal Melting fracture of wire resist technology.Be that warming plate is all around around the fixing metal fusible link below crucible in the concrete operations, when the silicon hydrorrhea flowed, the silicon drop was attached to above the fusible link, wire fusing is produced report to the police, thereby remind the user to take measures.In the practical application, there are numerous unreliable factors in this resist technology: at first, there is deviation in the Metal Melting circuit wire position that is laid on bottom of furnace body or is moved the origin-location in long-term the use and is not repaired, and when the silicon hydrorrhea flows, can not guarantee that silicon liquid accurately and timely drops in above the fusible link; Next is when crucible breaks the occurrence of large-area overflow, the Metal Melting fracture of wire even silicon liquid has fused, but a large amount of silicon liquid accumulates in bottom of furnace body, very likely the body of heater metal parts is caused damage, and serious words can cause the substantial equipment accident, even personal safety.
Summary of the invention
The purpose of this utility model provides a kind of reasonable in design, can effectively avoid the silicon liquid overflow protective system of silicon liquid to the polycrystalline silicon ingot or purifying furnace of body of heater damage.
The utility model is the silicon liquid overflow protective system of polycrystalline silicon ingot or purifying furnace; comprise body of heater; place the Thermal insulation cage body of body of heater inner bottom part band insulation base plate; place the heat exchange platform of being with silica crucible and graphite crucible in the Thermal insulation cage body; the both sides, bottom that it is characterized in that graphite crucible offer curb; the both sides of insulation base plate offer pod apertures, and the bottom of body of heater and the correspondence position of pod apertures are provided with silicon liquid overflow receiving container, are provided with the Metal Melting fracture of wire of tape controller in the silicon liquid overflow receiving container.
The bottom of described body of heater also can be provided with rock wool, and silicon liquid overflow receiving container places on the rock wool, with the protection effect of further raising to body of heater.
The middle part of described rock wool also can be provided with central sheath and boss sleeve pipe, can prevent further that silicon liquid from contacting with the direct of body of heater.
The utility model is reasonable in design, the effect of the flow guide system that confluxes that constitutes by silicon liquid overflow receiving container by curb, pod apertures, band Metal Melting fracture of wire, the crucible that can effectively prevent to take up silicon liquid is breaking or other reason when causing the silicon hydrorrhea to go out, the silicon liquid that flows to bottom of furnace body is piled up at bottom of furnace body, high temperature silicon liquid heat energy burns the body of heater steel plate, thereby the phenomenon that causes catastrophic failure takes place.Avoided of the damage of silicon liquid to body of heater.
Description of drawings
Fig. 1 is an overall structure cutaway view of the present utility model;
Fig. 2 is the structure for amplifying schematic diagram of A part shown in Figure 1;
Fig. 3 is the structure for amplifying schematic diagram of B part shown in Figure 1;
Structure cutaway view when Fig. 4 is the utility model user mode.
The specific embodiment
The utility model is mainly by the body of heater 1 of bottom band rock wool 10, place the Thermal insulation cage body 5 of body of heater 1 inner bottom part band insulation base plate 6, place the heat exchange platform 4 of being with silica crucible 2 and graphite crucible 3 in the Thermal insulation cage body 5, place the central sheath 12 and the boss sleeve pipe 11 at rock wool 10 middle parts, be opened in the curb 13 on both sides, graphite crucible 3 bottom, be opened in the pod apertures 14 on insulation base plate 6 both sides, place on the rock wool 10 of body of heater 1 bottom the silicon liquid overflow receiving container 7 with pod apertures 14 correspondence positions, place Metal Melting fracture of wire 8 formations such as grade of tape controllers 9 in the silicon liquid overflow receiving container 7.Controller 9 places outside the body of heater 1; Graphite crucible 3 is made by high purity graphite, can bear more than 2,000 degree centigrade high temperature, in the fusing of silicon liquid, supports silica crucible 2 simultaneously and at high temperature falls because of ruckbildung is unlikely to take place paralysis.
During use, silica crucible 2 is put into graphite crucible 3, in silica crucible 2, fill polysilicon raw material 15, the silica crucible 2 and the graphite crucible 3 that will install polysilicon raw material 15 with go-cart are sent in the body of heater 1, and put and be placed on the heat exchange platform 4, adjust the position and allow silica crucible 2 and graphite crucible 3 be positioned between two parties above the heat exchange platform 4, align substantially with the pod apertures 14 above the following insulation base plate 6 to guarantee the curb 13 above the graphite crucible 3.After shove charge finishes, close tight body of heater 1, cover Thermal insulation cage body 5, proceed next step operation by the ordinary production technological process.
Heat after tens of hours, this moment, silica crucible 2 interior polysilicon raw material 15 were fused into silicon liquid fully, and as errorless, silicon liquid will enter crystallization stage.Silicon hydrorrhea stream in fusing and two stages of crystallization, takes place in general polysilicon easily in the ingot casting process, as because of certain reason, the silicon liquid temp is too high, boiling can take place spill or glow; Or the preceding roads of silica crucible 2 are when handling defectives or the quality problems of silica crucible own or the like defect problem and failing in time to find, high temperature can impel silica crucible to break.If can not in time find, consequence was with hardly imaginable when this emergency situation took place! This moment, the utility model role was: when the silicon hydrorrhea flows, silicon liquid is pressed the direction of arrow shown in the accompanying drawing 4 toward dirty along silica crucible 2 outer walls, under the guiding of confluxing of graphite crucible 3 base plate curbs 13, pod apertures 14 along insulation base plate 6 flows in the silicon liquid overflow receiving container 7, this moment, high temperature silicon liquid fuse metal fusible link 8, the i.e. fusing of Metal Melting fracture of wire 8 one fusing is reported to the police, be notified to controller 9, controller 9 sends the buzzing chimes of doom, notify the user to come to handle, controller 9 also can correspondingly be made the automation emergent management simultaneously.When entering silicon hydrorrhea stream emergent management, under controller 9 effects, mention Thermal insulation cage body 2 immediately, and charge into a large amount of refrigerating gases from the body of heater top (be generally inert gas: argon gas, helium), force cooling can make silicon liquid by the about 10 ℃ of speed cooling of per minute.When a large amount of silicon liquid from the silica crucible that breaks 2 when dirty, be arranged in and be incubated the silicon liquid that base plate 6 following silicon liquid overflow receiving containers 7 can hold inflow fully, even have part silicon liquid to fail to be undertaken in the silicon liquid overflow receiving container 7 but flow to the center along body of heater 1 bottom, at this moment, because the buffer action of central sheath 12 has also avoided silicon liquid to contact with the direct of body of heater.In urgent cooling procedure subsequently, silicon liquid on rock wool 10 and insulation base plate 6, become curing shape 16 silicon liquid overflow receiving container 7 in, thereby avoid because of high temperature silicon liquid directly and body of heater 1 come in contact, cause burn through body of heater material, cause cooling water to be exposed in the high-temperature low-pressure furnace chamber, sharply the explosion accident of gasification initiation.
As can be seen, the flow guide system that confluxes can in time produce warning when the overflow of silicon liquid generation small size from foregoing description, reminds the user in time to take measures, and avoids bigger overflow accident to take place; When the occurrence of large-area overflow, silicon liquid overflow receiving container 7 has avoided silicon liquid to contact with the large tracts of land of body of heater 1 and the accident that causes.The central sheath 12 of body of heater 1 bottom also can be isolated contacting with the direct of body of heater of silicon liquid.
Claims (3)
1. the silicon liquid overflow protective system of a polycrystalline silicon ingot or purifying furnace; comprise body of heater (1); place the Thermal insulation cage body (5) of body of heater (1) inner bottom part band insulation base plate (6); place the heat exchange platform (4) of being with silica crucible (2) and graphite crucible (3) in the Thermal insulation cage body (5); the both sides, bottom that it is characterized in that graphite crucible (3) offer curb (13); the both sides of insulation base plate (6) offer pod apertures (14); the correspondence position of the bottom of body of heater (1) and pod apertures (14) is provided with silicon liquid overflow receiving container (7), is provided with the Metal Melting fracture of wire (8) of tape controller (9) in the silicon liquid overflow receiving container (7).
2. by the silicon liquid overflow protective system of the described polycrystalline silicon ingot or purifying furnace of claim 1, it is characterized in that the bottom of described body of heater (1) also is provided with rock wool (10), silicon liquid overflow receiving container (7) places on the rock wool (10).
3. by the silicon liquid overflow protective system of the described polycrystalline silicon ingot or purifying furnace of claim 2, it is characterized in that the middle part of described rock wool (10) also is provided with central sheath (12) and boss sleeve pipe (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201136146U CN201081540Y (en) | 2007-08-23 | 2007-08-23 | Silicone fluid overflow protection system for poly-silicon ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201136146U CN201081540Y (en) | 2007-08-23 | 2007-08-23 | Silicone fluid overflow protection system for poly-silicon ingot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201081540Y true CN201081540Y (en) | 2008-07-02 |
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ID=39615209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201136146U Expired - Fee Related CN201081540Y (en) | 2007-08-23 | 2007-08-23 | Silicone fluid overflow protection system for poly-silicon ingot furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201081540Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102383183A (en) * | 2011-11-04 | 2012-03-21 | 湖南顶立科技有限公司 | Crystalline silicon ingot casting furnace |
-
2007
- 2007-08-23 CN CNU2007201136146U patent/CN201081540Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102383183A (en) * | 2011-11-04 | 2012-03-21 | 湖南顶立科技有限公司 | Crystalline silicon ingot casting furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: ZHEJIANG JINGGONG SCIENCE + TECHNOLOGY CO., LTD. Free format text: FORMER NAME: ZHEJIANG JINGGONG SCIENCE + TECHNOLOGY CO.,LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Co-patentee after: Shaoxing Jinggong Electronic Research Institute Co., Ltd. Patentee after: Zhejiang Jinggong Science & Technology Co., Ltd. Address before: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Co-patentee before: Shaoxing Fine Electromechanical Institute Co., Ltd. Patentee before: Zhejiang Jinggong Science & Technology Co.,Ltd. |
|
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Co-patentee after: Hangzhou Jinggong Mechanical & Electrical Research Institute Co., Ltd. Patentee after: Zhejiang Jinggong Science & Technology Co., Ltd. Address before: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Co-patentee before: Shaoxing Jinggong Electronic Research Institute Co., Ltd. Patentee before: Zhejiang Jinggong Science & Technology Co., Ltd. |
|
| ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: HANGZHOU JINGGONG MECHANICAL + ELECTRICAL INSTITUTE CO., LTD. |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20110607 Address after: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Patentee after: Zhejiang Jinggong Science & Technology Co., Ltd. Address before: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Co-patentee before: Hangzhou Jinggong Mechanical & Electrical Research Institute Co., Ltd. Patentee before: Zhejiang Jinggong Science & Technology Co., Ltd. |
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| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080702 Termination date: 20120823 |