CN200972456Y - Hydrogen sensitive probe for sputtered Pd film on surface of optical-fibre circle - Google Patents
Hydrogen sensitive probe for sputtered Pd film on surface of optical-fibre circle Download PDFInfo
- Publication number
- CN200972456Y CN200972456Y CN 200620032152 CN200620032152U CN200972456Y CN 200972456 Y CN200972456 Y CN 200972456Y CN 200620032152 CN200620032152 CN 200620032152 CN 200620032152 U CN200620032152 U CN 200620032152U CN 200972456 Y CN200972456 Y CN 200972456Y
- Authority
- CN
- China
- Prior art keywords
- hydrogen
- optical fiber
- fiber
- film
- multimode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The utility model discloses a hydrogen sensitive probe that sputters Pd film on the conical surface of optic fiber, which comprises a broad light source, a spectrometer and computer, multimode fiber, an optical fiber coupler, a probe of fiber optic cone, and layers of Pd film and reflective films. The hydrogen sensitive probe of optical fiber cone is connected with the optical fiber coupler and the multimode optical fiber is connected with the broad light source and the computer respectively. After passing the multimode optical fiber and optical fiber coupler, the broad light source radiates the hydrogen sensitive areas of the optical fiber and excites the free electrons to generate surface waves, which, under the changes of the hydrogen concentration, generate resonance of surface ions and lead to the loss of light waves. The light beams reflected back by the reflective layer is transmitted to the receptions by the spectrometer and computer through the optical fiber coupler and multimode optic fiber. The computer analyzes the spectrum information after the changes of the hydrogen concentration and the hydrogen concentration value is derived by the changes of the spectrum information. The implementation of this technique elevates the sensitivity to the hydrogen sensitivity and the performance of the testing system is reliable and highly precise.
Description
(1) technical field under
The utility model relates to hydrogen sensitive technology, coating technique, optical fiber process technology and SPR spectrum test technology, particularly processes a kind of compound hydrogen sensor in straight sensitizing range and awl circle sensitizing range that has in optical fiber end.
(2) background technology
In the hydrogen sensitive technology, generally adopt Pd to make catalytic specie, work as H
2Gas runs at first to be adsorbed then behind the Pd film and is absorbed, and this catalytic reaction is reversible.The Pd film of inhaling behind the hydrogen has two kinds of solid solution to exist usually, show as α mutually with β mutually, it is relevant with the concentration of hydrogen that α arrives the conversion of β phase mutually.Out of phase lattice parameter differs greatly, and absorption repeatedly and desorption can cause the dislocation of metal lattice, causes the Pd film to stand all after dates of several hydrogen sucting discharging hydrogens and just can twist so that damaged, and this distortion is relevant with the thickness and the temperature of Pd film.In order to slow down the transformation that α arrives the β phase mutually effectively, must strictly control the thickness of Pd film and the correction of realization temperature.At present, be to plate one or more layers Pd/Si using maximum aspect the research of optical fiber hydrogen sensor at one section of optical fiber end or fiber end face, Pd/SiO and Pd/Ag alloy film make it to constitute the normal probe and the optical fibre microlens hydrogen sensor probe of optical fiber hydrogen sensor; Use Pd film and non-crystal WO in addition
3Making the hydrogen catalyzer also is one of early stage scheme, promptly except fiber end face plating Pd film, plates one deck WO again
3Film, because this sensor can produce strong absorption to the light wave of 800nm, so this method has very high sensitivity to the sensitivity of hydrogen, but that unique deficiency is a response speed is slow.In recent years, about having report at the hydrogen sensor of optical fiber surface generation plasma resonance ripple (SPR) structure and the hydrogen sensor of evanescent wave (Evanescent) structure, these methods all have in various degree raising to the sensitivity of hydrogen sensitivity, but measuring accuracy generally is difficult to reach 0.1%, therefore require than higher occasion at measuring accuracy, be higher than 0.05% occasion as the responsive precision of hydrogen, optical taper circle SPR probe is first-selected scheme, the high several times of the responsive remolding sensitivity optical fiber normal probe of its hydrogen.Remove a segment protect layer and the covering of optical fiber end 20mm; on one section fibre core of optical fiber end 10mm, be processed into the awl circle; the fiber section that to remove covering is scraped on planning machine then; adopt the Pd film of sputter coating process evaporation one deck 50nm on fiber core layer; evaporation Ag film promptly constitutes optical fiber awl circle hydrogen sensor probe as reflectance coating on the fiber end face after process is scraped.
The quick sensing principle of hydrogen that the SPR that uses the optical taper circle to constitute pops one's head in is: the Pd film of sputter 50nm on fiber core layer, H
2Be adsorbed very soon also and then absorption generation PdHx after meeting the Pd film, the PdHx of generation produces change of refractive with the variation of density of hydrogen.When the light of wide spectrum by fiber-optic illuminated hydrogen sensitizing range to optical fiber Pd film, produce surface plasma-wave at the react compound layer of the PdHx that generates of Pd film and hydrogen, when density of hydrogen changes, can excitating surface ripple generation surface plasma resonance.Resonant wavelength λ
0Relevant with density of hydrogen, set up the relation between resonant wavelength and the density of hydrogen, can obtain the value of density of hydrogen by the variation of spectral information.
(3) utility model content
In order to improve the sensitivity of optical fiber Pd film hydrogen sensitivity, reduce the influence of external environment to test macro, the invention provides a kind of at optical taper circular surfaces sputter Pd film hydrogen sensing probe.
The technical scheme that technical matters adopted that the utility model solves is: use optical taper circle probe to constitute hydrogen sensor, sputter Pd film on the optical taper circle, and adopt a kind of spectral modulation method that the SPR spectral information of probe is analyzed, to improve the measuring accuracy and the sensitivity of hydrogen.Optical taper circle SPR hydrogen sensor as shown in Figure 1, be coated with the Pd film on the optical taper circle and constitute hydrogen sensitive optical fibre SPR probe, a kind of example based on the spectral modulation device as shown in Figure 2, it comprises fiber coupler, optical taper circle probe, wide light source and spectrometer and computing machine etc.Optical taper circle hydrogen sensor is linked to each other with fiber coupler, one root multimode fiber links to each other with computing machine with spectrometer, another root multimode fiber is connected with wide light source, wide light source shines the hydrogen sensitizing range of optical fiber after by optical fiber and fiber coupler, the light beam that reflective coating reflects receives by spectrometer, and spectrometer connects computing machine.Spectral information after the Computer Analysis density of hydrogen changes is obtained the density of hydrogen value by the variation of spectral information.
The beneficial effect that the utility model had is:
Its sensitivity to the hydrogen sensitivity is improved, and the test macro dependable performance, strong interference immunity, precision height.
(4) description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is hydrogen sensitive optical fibre awl circle sonde configuration figure of the present utility model, the 1st, and optical fiber, the 2nd, fiber cores, the 3rd, Pd rete, the 4th, reflective coating.
Fig. 2 is that a kind of optical fiber hydrogen sensor of spectral modulation detects example, the 3rd, and Pd film, the 4th, reflective coating, the 5th, optical taper circle probe, the 6th, fiber coupler, 7,8th, multimode optical fiber, the 9th, wide light source, the 10th, spectrometer and computing machine.
(5) embodiment
In hydrogen sensitive optical fibre awl circle probe shown in Figure 1; adopt protective seam and covering on the mechanical means removal optical fiber 1; make fiber cores 2; one section with fiber cores 2 is drawn into taper; justify sputter Pd film 3 on the section at the straight-line segment of optical fiber and the awl of fiber cores; the thickness of Pd film is between 10nm-50nm, at the end face sputter reflective coating 4 formation catoptrons of optical fiber.。
Optical fiber hydrogen sensor in spectral modulation shown in Figure 2 detects in the example, optical taper circle hydrogen sensor mechanism is surface plasma resonance, and Pd film 3 has double action here, both reacts with hydrogen, cause the refractive index of PdHx compound to change, again as the metal that produces surface wave.The quick sensing probe 5 of optical taper circle hydrogen is linked to each other with fiber coupler 6, multimode optical fiber 7 links to each other with computing machine 10 with spectrometer, multimode optical fiber 8 is connected with wide light source 9, wide light source 9 shines the hydrogen sensitizing range of optical fiber after by multimode optical fiber 8 and fiber coupler 6, excite the free electron in the Pd film 3 to produce surface wave, surface wave produces surface plasma resonance under the variation of density of hydrogen, cause the light wave loss.The light beam that reflective coating 4 reflects transfers to spectrometer by fiber coupler 6 and multimode optical fiber 7 and computing machine 10 receives.Spectral information after the Computer Analysis density of hydrogen changes is obtained the density of hydrogen value by the variation of spectral information.
Claims (2)
1. one kind at optical taper circular surfaces sputter Pd film hydrogen sensing probe, by optical fiber 1, and fiber cores 2, Pd rete 3, reflective coating 4 is formed; It is characterized in that:, make catoptron at fiber end face plating reflective coating 4 and constitute the hydrogen sensor probe at the straight-line segment and the responsive Pd rete 3 of awl circular surfaces sputter hydrogen of fiber core layer.
2. according to claim 1 a kind of at optical taper circular surfaces sputter Pd film hydrogen sensing probe, it is characterized in that: the quick sensing probe 5 of optical taper circle hydrogen is linked to each other with fiber coupler 6, multimode optical fiber 7 links to each other with computing machine 10 with spectrometer, multimode optical fiber 8 is connected with wide light source 9, wide light source 9 shines the hydrogen sensitizing range of optical fiber after by multimode optical fiber 8 and fiber coupler 6, excite the free electron in the Pd film 3 to produce surface wave, surface wave produces surface plasma resonance under the variation of density of hydrogen; The light beam that reflective coating 4 reflects transfers to spectrometer and computing machine 10 by fiber coupler 6 and multimode optical fiber 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620032152 CN200972456Y (en) | 2006-06-01 | 2006-06-01 | Hydrogen sensitive probe for sputtered Pd film on surface of optical-fibre circle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620032152 CN200972456Y (en) | 2006-06-01 | 2006-06-01 | Hydrogen sensitive probe for sputtered Pd film on surface of optical-fibre circle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200972456Y true CN200972456Y (en) | 2007-11-07 |
Family
ID=38883711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620032152 Expired - Fee Related CN200972456Y (en) | 2006-06-01 | 2006-06-01 | Hydrogen sensitive probe for sputtered Pd film on surface of optical-fibre circle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200972456Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109540179A (en) * | 2018-12-21 | 2019-03-29 | 南京信息工程大学 | Optical fiber taper sensing probe based on surface plasma body resonant vibration and preparation method thereof |
-
2006
- 2006-06-01 CN CN 200620032152 patent/CN200972456Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109540179A (en) * | 2018-12-21 | 2019-03-29 | 南京信息工程大学 | Optical fiber taper sensing probe based on surface plasma body resonant vibration and preparation method thereof |
| CN109540179B (en) * | 2018-12-21 | 2024-05-17 | 南京信息工程大学 | Optical fiber conical sensing probe based on surface plasma resonance and manufacturing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105158213A (en) | Device and method for detecting glucose based on optical fiber surface plasma resonance | |
| CN203824907U (en) | Surface plasma resonance optical fiber pH sensing chip and detecting system | |
| US10845303B2 (en) | Apparatus, system and method for gas detection, and apparatus manufacturing method | |
| CN105651738A (en) | Helical-core optical fiber SPR sensor | |
| AU2011229130A1 (en) | A sensor and a method for characterising a dielectric material | |
| Shah et al. | SPR based fiber optic sensor with bi layers of indium tin oxide and platinum: a theoretical evaluation | |
| Wang et al. | Barium titanate film based fiber optic surface plasmon sensor with high sensitivity | |
| CN103852428A (en) | Humidity sensor based on multimode fiber core and fiber grating and preparation method of humidity sensor | |
| Mitsushio et al. | Sensor properties and surface characterization of aluminum-deposited SPR optical fibers | |
| CN102095719A (en) | Optical fiber type sensor system based on surface plasma resonance and stimulated Raman scattering | |
| CN112146690A (en) | Multi-parameter measuring device based on double-clad optical fiber | |
| CN207318351U (en) | Solution concentration detection system based on SPR sensor | |
| Wei et al. | Optimization of tapered optical fiber sensor based on SPR for high sensitivity salinity measurement | |
| CN200972456Y (en) | Hydrogen sensitive probe for sputtered Pd film on surface of optical-fibre circle | |
| CN2911757Y (en) | Intelligent optical membrane full automatic monitoring system | |
| CN110470633B (en) | Multi-core fiber grating refractive index sensitive sensor with in-situ self-compensation characteristic | |
| Li et al. | Experimental study of SPR sensor performance enhancement by metal oxides | |
| CN1180282C (en) | Temperature compensation sensing apparatus for sputtering palladium on optical fibre grating | |
| Kumar et al. | Modelling of surface plasmon resonance sensor for detection of mass concentration of ethanol and methanol in a binary mixture | |
| Cennamo et al. | A green slab waveguide for plasmonic sensors based on bacterial cellulose | |
| CN208860739U (en) | Sensor based on hydrogen in MZ interference inclined optical fiber grating measuring transformer | |
| CN220251726U (en) | Metal and metal oxide based composite reinforced Z-type optical fiber sensor | |
| CN111122456A (en) | Dislocation heterostructure optical fiber surface plasma resonance sensor | |
| CN111289480A (en) | Optical fiber corrosion sensor based on surface plasma resonance technology | |
| CN105115943A (en) | Gold seed growth based preparation method of terminal reflective optical fiber surface plasmon resonance sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |