CN1996620A - 基于碳纳米管薄膜的太阳能电池及其制备方法 - Google Patents

基于碳纳米管薄膜的太阳能电池及其制备方法 Download PDF

Info

Publication number
CN1996620A
CN1996620A CNA2006101698270A CN200610169827A CN1996620A CN 1996620 A CN1996620 A CN 1996620A CN A2006101698270 A CNA2006101698270 A CN A2006101698270A CN 200610169827 A CN200610169827 A CN 200610169827A CN 1996620 A CN1996620 A CN 1996620A
Authority
CN
China
Prior art keywords
carbon nano
film
tube
solar cell
tube film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2006101698270A
Other languages
English (en)
Other versions
CN100405617C (zh
Inventor
贾怡
韦进全
舒勤科
王昆林
庄大明
张弓
刘文今
骆建彬
王志诚
吴德海
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Priority to CNB2006101698270A priority Critical patent/CN100405617C/zh
Publication of CN1996620A publication Critical patent/CN1996620A/zh
Priority to US12/521,691 priority patent/US20100078067A1/en
Priority to PCT/CN2007/003863 priority patent/WO2008086709A1/zh
Application granted granted Critical
Publication of CN100405617C publication Critical patent/CN100405617C/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • H10K30/81Electrodes
    • H10K30/82Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
    • H10K30/821Transparent electrodes, e.g. indium tin oxide [ITO] electrodes comprising carbon nanotubes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022466Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035272Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
    • H01L31/035281Shape of the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884Manufacture of transparent electrodes, e.g. TCO, ITO
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/30Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
    • H10K30/35Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains comprising inorganic nanostructures, e.g. CdSe nanoparticles
    • H10K30/352Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains comprising inorganic nanostructures, e.g. CdSe nanoparticles the inorganic nanostructures being nanotubes or nanowires, e.g. CdTe nanotubes in P3HT polymer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/30Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/50Photovoltaic [PV] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221Carbon nanotubes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nanotechnology (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Materials Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Photovoltaic Devices (AREA)

Abstract

基于碳纳米管薄膜的太阳能电池及其制备方法,属于太阳能电池及纳米材料应用技术领域。本发明的技术特点是采用碳纳米管薄膜为光电转换材料,碳纳米管薄膜同时作为上电极;或在碳纳米管薄膜上设有透明导电薄膜,碳纳米管薄膜作为光电转换材料,透明导电薄膜作为上电极。本发明以碳纳米管薄膜作为太阳能电池的光电转换材料,不仅进一步提高了其光电转换效率和使用寿命,而且电池的制备方法简单,制造成本低廉。

Description

基于碳纳米管薄膜的太阳能电池及其制备方法
技术领域
本发明涉及太阳能电池及其制备技术,尤其涉及一种碳纳米管薄膜作为光电转换材料太阳能电池及其制备方法,属于太阳能电池及纳米材料应用技术领域。
背景技术
太阳能是当今最清洁的能源,取之不尽、用之不竭。地球每40秒接收到的太阳能就相当于210亿桶石油的能量,相当于目前全球一天所消耗的能源总和。太阳能的利用方式包括光能—热能转换、光能—电能转换、光能—化学能转换。太阳能电池是光能—电能转换的典型例子,是利用半导体材料的光生伏特原理制成的。根据半导体光电转换材料种类不同,太阳能电池可以分为硅基太阳能电池、砷化镓太阳能电池、铜铟镓硒薄膜太阳能电池、有机薄膜太阳能电池等。目前,市场上太阳能电池以硅基为主,占90%以上,包括单晶硅太阳能电池、多晶硅太阳能电池、非晶硅薄膜太阳能电池、多晶硅薄膜太阳能电池。理论上,单晶硅太阳能电池的转换效率可以达26%。但是,实际应用的硅基太阳能电池的光转换效率要远低于理论值,而国内产业化生产的太阳能电池的效率通常小于15%。
为了提高硅基太阳能电池的转换效率,人们采用了背表电场、浅结、绒面、减反射膜等技术可以提高太阳能电池的转换效率。1999年澳大利亚新南威尔士大学Green MA等人(GreenMA et al.,IEEE Trans.Electron Devices,1999,46:1940-1947)所制备的钝化发射区单晶硅太阳能电池转换效率为24.7%,已接近硅太阳能电池的理论上限。多晶硅太阳能电池的制造成本低于单晶硅太阳能电池,但其晶界对转化效率有一定的影响,1999年澳大利亚新南威尔士大学Zhao JH等人(Zhao JH et al.,IEEE Trans.Electron Devices,1999,46:1978-1983)所制备的钝化发射区多晶硅太阳能电池转换效率达19.8%。非晶硅对太阳光的吸收系数高,降低了硅材料的使用量,通过研究,实验室所制备的单结、双结和多结非晶硅太阳能电池的转换效率可以分别达到6~8%,10%和13%(赵玉文.物理,2004,33:99-105)。多晶硅薄膜太阳能电池既具有晶体硅太阳能电池高效、稳定的优点,同时又具有薄膜太阳能电池节省材料的优点,目前实验室效率可达18%,北京太阳能研究所许颖等人(Xu Y et al.,Acta Energiae Solaris Sinica,2002,23:108-110)采用快速热化学气相沉积技术在模拟非硅衬底上制备了多晶硅薄膜电池,并制作减反射膜,其转换效率可达10.21%。
目前,硅基太阳能电池制造工艺复杂,完全使用硅作为光电转换的材料,要获得高转换效率的硅太阳能电池,需要制备出高纯度的原料硅。目前原料硅的制备工艺远不能满足太阳能电池发展的需要,并且制备原料硅需要消耗大量的电能,这提高了硅太阳能电池的成本,并且对环境产生很大的污染。因此发展其他类型的太阳能电池,减少太阳能电池中的硅用量就具有重要的战略意义。人们对有机及塑料太阳能电池进行了研究。1998年Gratzel M等人(Bach U et al.,Nature,1998,395:583-585)利用OMeTAD作为空穴传输材料,得到0.74%的光电转换效率。高分子材料具有易于加工的特点,部分高分子材料具有光电活性,人们根据这方面的特点研制了聚合物的太阳能电池。1993年,Sariciftci NS等人(Sariciftci NS etal.,Appl.Phys.Lett.,1993,62:585-587)研制成功了第一个聚合物/C60的太阳能电池。
碳纳米管是由一层或者数层石墨层片按照一定螺旋角卷曲而成的一维纳米材料。理论计算和实测结果表明,根据碳纳米管的几何结构不同,碳纳米管既可能是导体,也可能是半导体。Satio等人(Satio R,et al.,Mater.Sci.Eng.B,19:185-191)经过理论分析表明,约有1/3的单壁碳纳米管是导体性的,而2/3的是半导体性的。研究发现,碳纳米管的能隙宽度可以从0改变到与硅的相当,这表明了碳纳米管将在半导体领域中扮演重要的角色。如果将碳纳米管作为太阳能吸收转换材料,则可以吸收不同波长的太阳光。研究表明,碳纳米管具有很高的导电能力,其载流能力可以高达109A/cm2量级。Ugarte等人(de Heer WA et al.,Science,1995,268:845-847)发现,碳纳米管的径向电阻远远大于轴向电阻,这种电阻各向异性随着温度的降低而增大。Li等人(Li SD,et al.,Nano Lett.2004,4:2003-2007)研究结果表明,单壁碳纳米管丝的轴向电阻率仅为1.4×10-8Ω·cm量级,表明了碳纳米管具有优异的导电性能。本研究小组的曹安源博士研究表明,碳纳米管具有很高的吸收太阳光能力,在可见光和红外光区的吸收率高达99%以上,这表明,如果将碳纳米管应用在太阳能电池领域,将具有传统材料无可比拟的优势。Singha A等人(Singha A et al.,Nano.Lett.2003,3:383-388)论证了单壁碳纳米管的吸收光谱覆盖了可见光到红外的范围。上海交通大学LiuLY等人(Liu LY,et al.,Sens.Actuator A-Phys,2004,116:394-397)发现,多壁碳纳米管在红外光的照射下可以产生光电流,可以作为红外的探测材料。Wei JQ等人(Wei JQ,et al.,Small,2006,2:988-993)研究发现,宏观碳纳米管束在激光(波长从远红外到可见光范围)照射下可以产生光电流。
鉴于碳纳米管在电学等方面具有优异的性能,碳纳米管可能在太阳能电池中得到应用。实际上,基于碳纳米管的光电转换研究早在2005年就已经开展。早期的研究工作主要基于碳纳米管复合材料太阳能电池的研究工作,其中包括碳纳米管与聚合物等复合作为光电转换的材料。Landi BJ等人(Landi BJ et al.,Prog.Photovoltaics,2005,13:165-172)将单壁碳纳米管与聚三辛基噻吩共混,所测得的太阳能电池开路电压为0.98 V,短路电流为0.12mA/cm2。Kymakis E等人(Kymakis E et al.,J.Phys.D-Appl.Phys.,2006,39:1058-1062)对单壁碳纳米管与聚三辛基噻吩共混后得到的太阳能电池进行了退火处理,在最佳退火温度120℃下保温5min后,所测得的太阳能电池开路电压为0.75V,短路电流为0.5mA/cm2
这些基于碳纳米管复合材料的太阳能电池,是将粉术状的碳纳米管与聚合物等材料共混,碳纳米管间的相互结合较弱,这些碳纳米管间的界面与碳纳米管本体存在很大的差异,因此导致较大的电阻并使电子空穴对容易发生复合;同时由于使用聚合物,容易发生老化,使太阳能电池的效率降低。因此这些碳纳米管复合材料的太阳能电池转换效率很低,研究新型的碳纳米管太阳能电池具有重要意义。
目前现有技术中已成功制取性能优异的碳纳米管宏观体,包括了单壁碳纳米管长丝(专利号:ZL02100684.9;Zhu HW et al.,Science,2002,296:884-886)、双壁碳纳米管长丝及薄膜(专利号:ZL03143102.X;Wei JQ et al.,J Phys Chem B,2004,108:8844-8847)和定向碳纳米管阵列(Zhang XF et al.,Chem.Phys.Lett.2002,362:285-290)以及大面积、超薄碳纳米管薄膜(专利申请号:200510123986.2,公开号:CN1803594)的制备。
发明内容
本发明的目的是针对现有技术中存在的太阳能电池转换效率低、制作工艺复杂以及使用寿命较低的不足和缺陷,提供一种基于碳纳米管薄膜的太阳能电池及其制备方法,旨在利用碳纳米管的电学和光学特性,获得较好的太阳能电池转换效率和较长的使用寿命。
本发明的技术方案如下:
本发明提出的一种基于碳纳米管薄膜的太阳能电池,依次含有背电极、硅片衬底、光电转换材料以及上电极,其特征在于:光电转换材料采用碳纳米管薄膜,该碳纳米管薄膜同时作为上电极。
本发明还提供了上述基于碳纳米管薄膜的太阳能电池的制备方法,具体工艺步骤如下:
1)使用银胶将铜网粘在硅片衬底一侧表面上,待银胶固化,以铜网作为碳纳米管薄膜太阳能电池的背电极;或在硅片衬底一侧表面蒸镀Ti/Pd/Ag金属薄膜,以Ti/Pd/Ag金属薄膜作为碳纳米管薄膜太阳能电池的背电极,并用导线引出;
2)将纯化处理后铺展为厚度50~200 nm的碳纳米管薄膜,转移到硅片衬底的另一侧表面上,使碳纳米管薄膜与硅片衬底紧密接触,碳纳米管薄膜作为光电转换材料,同时作为上电极,并用导线引出。
本发明还提供了另一种基于碳纳米管薄膜的太阳能电池,依次含有背电极、硅片衬底、光电转换材料以及上电极,其特征在于:光电转换材料采用碳纳米管薄膜,在所述的碳纳米管薄膜的上面设有透明导电薄膜,在透明导电薄膜上面设有透明材料基底,所述的透明导电薄膜作为上电极。
本发明提供的上述另一种基于碳纳米管薄膜的太阳能电池的制备方法,具体工艺步骤如下:
1)在透明材料的基底上的一侧沉积透明导电薄膜;
2)使用银胶将铜网粘在硅片衬底一侧表面上,待银胶固化,以铜网作为碳纳米管薄膜太阳能电池的背电极;或在硅片衬底一侧表面蒸镀Ti/Pd/Ag金属薄膜,以Ti/Pd/Ag金属薄膜作为碳纳米管薄膜太阳能电池的背电极,并用导线引出;
3)将纯化处理后铺展的碳纳米管薄膜,转移到硅片衬底的另一侧表面上;将已沉积透明材料上的透明导电薄膜与碳纳米管薄膜紧密接触;
4)以透明导电薄膜作为碳纳米管薄膜太阳能电池的上电极,并用导线引出。
本发明的上述技术方案中,其特征还在于:所述的碳纳米管薄膜为单壁碳纳米管、双壁碳纳米管或定向碳纳米管薄膜,其厚度为50~200 nm。所述的透明导电薄膜为氧化锌铝或氧化铟锡。
本发明以碳纳米管薄膜作为太阳能电池的光电转换材料,电池的制备方法简单,相对于传统的硅基太阳能电池,理论上硅的使用量至少降低一半,因此,其制造成本低廉;又由于碳纳米管对于光的吸收包括了红外光、可见光以及紫外光范围,即使不制备绒面、减反射层,也可对太阳光具有很强的吸收,因此有助于提高太阳能电池的转换效率;相对于一般的碳纳米管/聚合物的太阳能电池,本发明所用的碳纳米管宏观形态为连续的膜状,组成薄膜的碳纳米管管束间具有很强的结合力,致使管束间的界面电阻很小,有利于电荷的传导,同时由于未使用有机物,提高了太阳能电池的使用寿命。目前所制备的基于碳纳米管薄膜的太阳能电池,其开路电压超过0.45V,短路电流超过0.5mA/cm2,具有潜在的应用前景。
附图说明
图1为以碳纳米管薄膜为光电转换材料和上电极的碳纳米管薄膜太阳能电池的结构示意图。
图2为以碳纳米管薄膜为光电转换材料,以透明导电薄膜为上电极的碳纳米管薄膜太阳能电池的结构示意图。
图3为沉积在硅片衬底上的碳纳米管薄膜的扫描电镜照片。
具体实施方式
下面结合附图和具体实施例对本发明做进一步的说明。
图1为本发明提供的以碳纳米管薄膜为光电转换材料和上电极的碳纳米管薄膜太阳能电池实施例的结构示意图。该碳纳米管薄膜太阳能电池含有背电极3、硅片衬底2和碳纳米管薄膜1,碳纳米管薄膜作为光电转换材料,同时作为上电极。本实施例中,背电极通过以下方法制备,使用银胶将铜网粘在硅片衬底的一侧表面上,通过红外灯加热,或将其置于干燥箱内,将银胶固化,以铜网作为背电极;或者在硅片衬底表面蒸镀Ti/Pd/Ag金属薄膜作为背电极,也可以采用常规太阳能电池背电极的制备方法实现。碳纳米管薄膜可采用单壁碳纳米管、双壁碳纳米管或定向碳纳米管薄膜,例如采用化学气相沉积法制备的单壁碳纳米管(专利号:ZL02100684.9;Zhu HW et al.,Science,2002,296:884-886)、双壁碳纳米管(专利号:ZL 03 1 43102.X;Wei JQ et al.,J Phys Chem B,2004,108:8844-8847)或定向碳纳米管(Zhang XF et al.,Chem.Phys.Lett.2002,362:285-290)。将上述方法制备的碳纳米管或薄膜需要进行纯化处理:在空气中氧化、双氧水浸泡、盐酸浸泡去除非晶碳和催化剂颗粒,得到较纯净的碳纳米管,这时所得到的碳纳米管相互团聚;将其置于去离子水中,滴加乙醇、丙酮等有机溶剂,碳纳米管便在去离子水表面铺展为碳纳米管薄膜(专利申请号:200510123986.2,公开号:CN1803594),其厚度为50~200nm。将所得到的碳纳米管薄膜转移到硅片衬底未制备背电极的一侧表面,使用红外灯、干燥箱等使其干燥,碳纳米管薄膜便与硅片衬底紧密结合。使用银胶将导线分别粘在碳纳米管薄膜和背电极上,作为电池的上电极和背电极引出。
图2为以碳纳米管薄膜为光电转换材料,以透明导电薄膜为上电极的碳纳米管薄膜太阳能电池实施例的结构示意图。碳纳米管薄膜太阳能电池含有背电极3、硅片衬底2、碳纳米管薄膜1、透明导电薄膜5和透明材料4。碳纳米管薄膜作为光电转换材料,透明导电薄膜作为上电极。以石英片、载玻片为透明材料,在其上沉积氧化锌铝或氧化铟锡透明导电薄膜。本实施例中,背电极通过以下方法制备,使用银胶将铜网粘在硅片衬底的一侧表面上,通过红外灯加热,或将其置于干燥箱内,将银胶固化,以铜网作为背电极;或者在硅片衬底表面蒸镀Ti/Pd/Ag金属薄膜作为背电极,也可以采用常规太阳能电池背电极的制备方法实现。碳纳米管薄膜可采用单壁碳纳米管、双壁碳纳米管或定向碳纳米管薄膜,例如采用化学气相沉积法制备的单壁碳纳米管(专利号:ZL 02 1 00684.9;Zhu HW et al.,Science,2002,296:884-886)、双壁碳纳米管(专利号:ZL 03 143102.X;Wei JQ et al.,J Phys Chem B,2004,108:8844-8847)或定向碳纳米管(Zhang XF et al.,Chem.Phys.Lett.2002,362:285-290)。将上述方法制备的碳纳米管或薄膜需要进行纯化处理:在空气中氧化、双氧水浸泡、盐酸浸泡去除非晶碳和催化剂颗粒,得到较纯净的碳纳米管,这时所得到的碳纳米管相互团聚;将其置于去离子水中,滴加乙醇、丙酮等有机溶剂,碳纳米管便在去离子水表面铺展为碳纳米管薄膜(专利申请号:200510123986.2,公开号:CN1803594),其厚度为50~200nm。将所得到的碳纳米管薄膜转移到硅片衬底未制备背电极的一侧表面,使用红外灯、干燥箱等使其干燥,碳纳米管薄膜便与硅片衬底紧密结合。将沉积在石英片或载玻片上的透明导电薄膜5与碳纳米管薄膜1紧密接触,作为上电极。使用银胶将导线粘在透明导电薄膜5和背电极3上,作为电池的上电极和背电极引出。
实施例1:
(1)使用银胶将铜网粘在硅片衬底2一侧表面,固化24小时,作为碳纳米管薄膜太阳能电池的背电极3,并用导线引出;
(2)将纯化处理后的双壁碳纳米管置于去离子水中,此时碳纳米管呈团聚状,在其上滴加乙醇溶液,双壁碳纳米管铺展为厚度100nm的薄膜;
(3)将铺展后的双壁碳纳米管薄膜再转移到硅片衬底2未制备背电极3的一侧表面上;
(4)在红外灯下将双壁碳纳米管薄膜烤干,双壁碳纳米管薄膜则与硅片衬底紧密接触。以双壁碳纳米管薄膜作为太阳能电池的上电极,并用导线引出。
经实际测量,该碳纳米管薄膜太阳能电池的开路电压为0.45V,短路电流为0.5mA/cm2
实施例2:
(1)使用银胶将铜网粘在硅片衬底2一侧表面,在红外灯下对铜网进行烘烤3小时,使其固化,作为碳纳米管薄膜太阳能电池的背电极3,并用导线引出;
(2)将纯化处理后的单壁碳纳米管置于去离子水中,此时碳纳米管呈团聚状,在其上滴加丙酮溶液,单壁碳纳米管铺展为厚度50nm的薄膜;
(3)将铺展为后单壁碳纳米管薄膜1在转移到硅片衬底2未制备背电极的一侧表面上;
(4)将步骤(3)所得到的单壁碳纳米管薄膜和硅片衬底结合体置于干燥箱内,温度50℃保温3h,使单壁碳纳米管薄膜与硅片衬底紧密接触。以单壁碳纳米管薄膜作为太阳能电池的上电极,并用导线引出。
其测量结果与实施例1接近。
实施例3:
(1)将用丙酮擦拭干净的载玻片4放入中频交流磁控溅射镀膜机内。以氧化锌铝为靶材,使载玻片温度为250℃,本底真空为3.0×10-3Pa,氩气压力为0.8Pa,靶功率密度为3W/cm2,沉积时间70s。通过沉积得到厚度100nm左右的氧化锌铝薄膜5;
(2)使用银胶将铜网粘在硅片衬底2一侧表面,在红外灯下对铜网进行烘烤3小时,使其固化,作为碳纳米管薄膜太阳能电池的背电极3,并用导线引出;
(3)将制备的定壁碳纳米管超声1h,使其充分分散;
(4)将充分分散的碳纳米管在转移到硅片衬底未制备背电极的一侧表面上,得到厚度为200nm的碳纳米管薄膜1;
(5)在红外灯下将碳纳米管薄膜烤干,使碳纳米管薄膜1与硅片衬底2紧密接触;
(6)将沉积在载玻片4上的氧化锌铝薄膜5与铺在硅片衬底2上的碳纳米管薄膜1紧密接触;
(7)以氧化锌铝薄膜5作为碳纳米管薄膜太阳能电池的上电极,并用导线引出。
其测量结果与实施例1接近。
实施例4:
(1)将用乙醇擦拭干净的石英片4放入中频交流磁控溅射镀膜机内。以氧化铟锡为靶材,使石英片温度为350℃,本底真空为3.0×10-3Pa,氩气压力为1.0Pa,靶功率密度为3.5W/cm2,沉积时间60s。通过沉积得到厚度100nm左右的氧化铟锡薄膜5。
(2)在硅片衬底2的一侧使用真空蒸镀的方法沉积Ti/Pd/Ag,作为碳纳米管薄膜太阳能电池的背电极3,并用导线引出;
(3)将纯化处理后的双壁碳纳米管置于去离子水中,此时碳纳米管呈团聚状,在其上滴加乙醇溶液,双壁碳纳米管铺展为厚度100nm的薄膜1;
(4)将铺展后的双壁碳纳米管薄膜1转移到硅片衬底2未蒸镀电极的一侧表面;
(5)将步骤(4)所得到的双壁碳纳米管薄膜1和硅片衬底2结合体置于干燥箱内,温度50℃保温3h,使双壁碳纳米管薄膜1与硅片衬底2紧密接触;
(6)将沉积在石英片4上的氧化铟锡薄膜5与铺在硅片衬底2上的碳纳米管薄膜1紧密接触;
(7)以氧化铟锡薄膜5作为碳纳米管薄膜太阳能电池的上电极,并用导线引出。
其测量结果与实施例1接近。

Claims (7)

1.一种基于碳纳米管薄膜的太阳能电池,依次含有背电极(3)、硅片衬底(2)、光电转换材料以及上电极,其特征在于:所述的光电转换材料采用碳纳米管薄膜(1),该碳纳米管薄膜同时作为上电极。
2.按照权利要求1所述的一种基于碳纳米管薄膜的太阳能电池,其特征在于:所述的碳纳米管薄膜(1)为单壁碳纳米管、双壁碳纳米管或定向碳纳米管薄膜,其厚度为50~200nm。
3.一种基于碳纳米管薄膜的太阳能电池,依次含有背电极(3)、硅片衬底(2)、光电转换材料以及上电极,其特征在于:所述的光电转换材料采用碳纳米管薄膜(1),在所述的碳纳米管薄膜(1)的上面设有透明导电薄膜(5),在透明导电薄膜(5)上面设有透明材料基底(4),所述的透明导电薄膜(5)作为上电极。
4.按照权利要求3所述的基于碳纳米管薄膜的太阳能电池,其特征在于:所述的透明导电薄膜(5)为氧化锌铝或氧化铟锡。
5.按照权利要求3或4所述的一种基于碳纳米管薄膜的太阳能电池,其特征在于:所述的碳纳米管薄膜(1)为单壁碳纳米管、双壁碳纳米管或定向碳纳米管薄膜,其厚度为50~200nm。
6.一种如权利要求1所述的基于碳纳米管薄膜的太阳能电池的制备方法,其特征在于该方法包括如下步骤:
1)使用银胶将铜网粘在硅片衬底一侧表面上,待银胶固化,以铜网作为碳纳米管薄膜太阳能电池的背电极;或在硅片衬底一侧表面蒸镀Ti/Pd/Ag金属薄膜,以Ti/Pd/Ag金属薄膜作为碳纳米管薄膜太阳能电池的背电极;
2)将纯化处理后铺展为薄膜的碳纳米管,转移到硅片衬底的另一侧表面上,使碳纳米管薄膜与硅片衬底紧密接触,碳纳米管薄膜作为光电转换材料,同时作为上电极。
7.一种如权利要求3所述的基于碳纳米管薄膜的太阳能电池的制备方法,其特征在于该方法包括如下步骤:
1)在透明材料的基底的一侧沉积透明导电薄膜;
2)使用银胶将铜网粘在硅片衬底一侧表面上,待银胶固化,以铜网作为碳纳米管薄膜太阳能电池的背电极;或在硅片衬底一侧表面蒸镀Ti/Pd/Ag金属薄膜,以Ti/Pd/Ag金属薄膜作为碳纳米管薄膜太阳能电池的背电极;
3)将纯化处理后铺展的碳纳米管薄膜,转移到硅片衬底的另一侧表面上;将已沉积在透明材料上的透明导电薄膜与碳纳米管薄膜紧密接触;
4)以透明导电薄膜作为碳纳米管薄膜太阳能电池的上电极,用导线引出。
CNB2006101698270A 2006-12-29 2006-12-29 基于碳纳米管薄膜的太阳能电池及其制备方法 Active CN100405617C (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CNB2006101698270A CN100405617C (zh) 2006-12-29 2006-12-29 基于碳纳米管薄膜的太阳能电池及其制备方法
US12/521,691 US20100078067A1 (en) 2006-12-29 2007-12-28 Carbon nanotube film based solar cell and fabricating method thereof
PCT/CN2007/003863 WO2008086709A1 (fr) 2006-12-29 2007-12-28 Cellule solaire à base de film à nanotubes de carbone et procédé de fabrication correspondant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2006101698270A CN100405617C (zh) 2006-12-29 2006-12-29 基于碳纳米管薄膜的太阳能电池及其制备方法

Publications (2)

Publication Number Publication Date
CN1996620A true CN1996620A (zh) 2007-07-11
CN100405617C CN100405617C (zh) 2008-07-23

Family

ID=38251618

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006101698270A Active CN100405617C (zh) 2006-12-29 2006-12-29 基于碳纳米管薄膜的太阳能电池及其制备方法

Country Status (3)

Country Link
US (1) US20100078067A1 (zh)
CN (1) CN100405617C (zh)
WO (1) WO2008086709A1 (zh)

Cited By (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008086709A1 (fr) * 2006-12-29 2008-07-24 Tsinghua University Cellule solaire à base de film à nanotubes de carbone et procédé de fabrication correspondant
CN101562203A (zh) * 2008-04-18 2009-10-21 清华大学 太阳能电池
CN101820012A (zh) * 2010-04-09 2010-09-01 上海交通大学 表面组装有碳纳米管的硅太阳电池
CN101950764A (zh) * 2010-07-30 2011-01-19 清华大学 一种带有酸溶液的碳纳米管-硅构成的太阳能电池
CN101950763A (zh) * 2010-07-09 2011-01-19 清华大学 基于硅线阵列掺磷的芯壳型结构太阳能电池及其制备方法
CN101562204B (zh) * 2008-04-18 2011-03-23 鸿富锦精密工业(深圳)有限公司 太阳能电池
CN101694816B (zh) * 2009-10-16 2011-05-11 清华大学 一种异质结和光电化学混合太阳能电池
CN101552296B (zh) * 2008-04-03 2011-06-08 清华大学 太阳能电池
US8105126B2 (en) 2008-07-04 2012-01-31 Tsinghua University Method for fabricating touch panel
US8111245B2 (en) 2007-12-21 2012-02-07 Tsinghua University Touch panel and display device using the same
US8115742B2 (en) 2007-12-12 2012-02-14 Tsinghua University Touch panel and display device using the same
US8125878B2 (en) 2007-12-27 2012-02-28 Tsinghua University Touch panel and display device using the same
CN102364691A (zh) * 2011-10-19 2012-02-29 中国科学院宁波材料技术与工程研究所 具有上/下转换发光结构的晶体硅太阳能电池及制备方法
CN102364698A (zh) * 2011-06-30 2012-02-29 常州天合光能有限公司 扩散氧化层二次利用的太阳能电池制备方法
CN102368503A (zh) * 2011-10-17 2012-03-07 清华大学 一种碳纳米管-硅异质结太阳能电池及其制作方法
CN101527328B (zh) * 2008-03-05 2012-03-14 鸿富锦精密工业(深圳)有限公司 太阳能电池及其制造方法
CN102414840A (zh) * 2009-04-30 2012-04-11 汉阳大学校产学协力团 包含碳纳米管层的硅太阳能电池
US8199119B2 (en) 2007-12-12 2012-06-12 Beijing Funate Innovation Technology Co., Ltd. Touch panel and display device using the same
US8237673B2 (en) 2007-12-14 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237668B2 (en) 2007-12-27 2012-08-07 Tsinghua University Touch control device
US8237671B2 (en) 2007-12-12 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237672B2 (en) 2007-12-14 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237670B2 (en) 2007-12-12 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237674B2 (en) 2007-12-12 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237669B2 (en) 2007-12-27 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237675B2 (en) 2007-12-27 2012-08-07 Tsinghua University Touch panel and display device using the same
US8243030B2 (en) 2007-12-21 2012-08-14 Tsinghua University Touch panel and display device using the same
US8243029B2 (en) 2007-12-14 2012-08-14 Tsinghua University Touch panel and display device using the same
US8248379B2 (en) 2007-12-14 2012-08-21 Tsinghua University Touch panel, method for making the same, and display device adopting the same
US8248378B2 (en) 2007-12-21 2012-08-21 Tsinghua University Touch panel and display device using the same
US8248381B2 (en) 2007-12-12 2012-08-21 Tsinghua University Touch panel and display device using the same
US8248380B2 (en) 2007-12-14 2012-08-21 Tsinghua University Touch panel and display device using the same
US8248377B2 (en) 2007-10-23 2012-08-21 Tsinghua University Touch panel
US8253701B2 (en) 2007-12-14 2012-08-28 Tsinghua University Touch panel, method for making the same, and display device adopting the same
US8253700B2 (en) 2007-12-14 2012-08-28 Tsinghua University Touch panel and display device using the same
US8260378B2 (en) 2008-08-22 2012-09-04 Tsinghua University Mobile phone
US8263860B2 (en) 2008-04-03 2012-09-11 Tsinghua University Silicon photovoltaic device with carbon nanotube cable electrode
CN101552297B (zh) * 2008-04-03 2012-11-21 清华大学 太阳能电池
US8325145B2 (en) 2007-12-27 2012-12-04 Tsinghua University Touch panel and display device using the same
US8325146B2 (en) 2007-12-21 2012-12-04 Tsinghua University Touch panel and display device using the same
US8325585B2 (en) 2007-12-12 2012-12-04 Tsinghua University Touch panel and display device using the same
US8346316B2 (en) 2008-08-22 2013-01-01 Tsinghua University Personal digital assistant
US8363017B2 (en) 2007-12-12 2013-01-29 Beijing Funate Innovation Technology Co., Ltd. Touch panel and display device using the same
US8390580B2 (en) 2008-07-09 2013-03-05 Tsinghua University Touch panel, liquid crystal display screen using the same, and methods for making the touch panel and the liquid crystal display screen
US8411044B2 (en) 2007-12-14 2013-04-02 Tsinghua University Touch panel, method for making the same, and display device adopting the same
WO2013086963A1 (zh) * 2011-12-13 2013-06-20 清华大学 太阳能电池及其制备方法
US8502786B2 (en) 2007-10-23 2013-08-06 Tsinghua University Touch panel
US8542212B2 (en) 2007-12-12 2013-09-24 Tsinghua University Touch panel, method for making the same, and display device adopting the same
US8574393B2 (en) 2007-12-21 2013-11-05 Tsinghua University Method for making touch panel
US8585855B2 (en) 2007-12-21 2013-11-19 Tsinghua University Method for making touch panel
US8796537B2 (en) 2008-03-07 2014-08-05 Tsinghua University Carbon nanotube based solar cell
US9040159B2 (en) 2007-12-12 2015-05-26 Tsinghua University Electronic element having carbon nanotubes
US9077793B2 (en) 2009-06-12 2015-07-07 Tsinghua University Carbon nanotube based flexible mobile phone
CN109599412A (zh) * 2017-09-30 2019-04-09 清华大学 一种光电自储能器件
CN112786715A (zh) * 2019-11-08 2021-05-11 清华大学 太阳能电池

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI452704B (zh) * 2009-12-17 2014-09-11 Hon Hai Prec Ind Co Ltd 太陽能發電裝置及太陽能發電模組
US8389939B1 (en) * 2011-09-26 2013-03-05 Rockwell Collins, Inc. System and method of dual energy radiation detection
US9202945B2 (en) * 2011-12-23 2015-12-01 Nokia Technologies Oy Graphene-based MIM diode and associated methods
US20140263278A1 (en) * 2013-03-15 2014-09-18 Solarno, Inc. Solar selective multilayer coating
TWI493739B (zh) * 2013-06-05 2015-07-21 Univ Nat Taiwan 熱載子光電轉換裝置及其方法
CN110391335B (zh) * 2018-04-16 2023-08-22 清华大学 聚合物太阳能电池

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6913713B2 (en) * 2002-01-25 2005-07-05 Konarka Technologies, Inc. Photovoltaic fibers
AU2003249324A1 (en) * 2002-07-19 2004-02-09 University Of Florida Transparent electrodes from single wall carbon nanotubes
CN1224111C (zh) * 2003-07-04 2005-10-19 清华大学 硅纳米线阵列太阳能转换装置
EP1507298A1 (en) * 2003-08-14 2005-02-16 Sony International (Europe) GmbH Carbon nanotubes based solar cells
WO2005024852A1 (ja) * 2003-09-02 2005-03-17 Shinshu University 導電性高分子薄膜複合体
JP2005136315A (ja) * 2003-10-31 2005-05-26 Akihiko Fujii 有機太陽電池
KR101001547B1 (ko) * 2004-01-28 2010-12-17 삼성에스디아이 주식회사 섬유상 태양 전지 및 이의 제조 방법
KR101001744B1 (ko) * 2004-12-27 2010-12-15 삼성전자주식회사 탄소 나노 튜브를 이용한 광전 변환 전극 및 이를 구비한태양 전지
JP4752283B2 (ja) * 2005-02-24 2011-08-17 富士ゼロックス株式会社 カーボンナノチューブを用いた太陽電池
KR100649743B1 (ko) * 2005-10-20 2006-11-27 삼성전기주식회사 Cnt를 포함하는 태양전지 및 그 제조방법
CN100427388C (zh) * 2005-11-25 2008-10-22 清华大学 一种大面积的超薄碳纳米管膜及其制备工艺
CN100405617C (zh) * 2006-12-29 2008-07-23 清华大学 基于碳纳米管薄膜的太阳能电池及其制备方法

Cited By (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008086709A1 (fr) * 2006-12-29 2008-07-24 Tsinghua University Cellule solaire à base de film à nanotubes de carbone et procédé de fabrication correspondant
US8248377B2 (en) 2007-10-23 2012-08-21 Tsinghua University Touch panel
US8502786B2 (en) 2007-10-23 2013-08-06 Tsinghua University Touch panel
US8237674B2 (en) 2007-12-12 2012-08-07 Tsinghua University Touch panel and display device using the same
US8248381B2 (en) 2007-12-12 2012-08-21 Tsinghua University Touch panel and display device using the same
US8325585B2 (en) 2007-12-12 2012-12-04 Tsinghua University Touch panel and display device using the same
US8542212B2 (en) 2007-12-12 2013-09-24 Tsinghua University Touch panel, method for making the same, and display device adopting the same
US8237670B2 (en) 2007-12-12 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237671B2 (en) 2007-12-12 2012-08-07 Tsinghua University Touch panel and display device using the same
US8199119B2 (en) 2007-12-12 2012-06-12 Beijing Funate Innovation Technology Co., Ltd. Touch panel and display device using the same
US9040159B2 (en) 2007-12-12 2015-05-26 Tsinghua University Electronic element having carbon nanotubes
US8115742B2 (en) 2007-12-12 2012-02-14 Tsinghua University Touch panel and display device using the same
US8363017B2 (en) 2007-12-12 2013-01-29 Beijing Funate Innovation Technology Co., Ltd. Touch panel and display device using the same
US8243029B2 (en) 2007-12-14 2012-08-14 Tsinghua University Touch panel and display device using the same
US8253701B2 (en) 2007-12-14 2012-08-28 Tsinghua University Touch panel, method for making the same, and display device adopting the same
US8411044B2 (en) 2007-12-14 2013-04-02 Tsinghua University Touch panel, method for making the same, and display device adopting the same
US8253700B2 (en) 2007-12-14 2012-08-28 Tsinghua University Touch panel and display device using the same
US8237672B2 (en) 2007-12-14 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237673B2 (en) 2007-12-14 2012-08-07 Tsinghua University Touch panel and display device using the same
US8248380B2 (en) 2007-12-14 2012-08-21 Tsinghua University Touch panel and display device using the same
US8248379B2 (en) 2007-12-14 2012-08-21 Tsinghua University Touch panel, method for making the same, and display device adopting the same
US8325146B2 (en) 2007-12-21 2012-12-04 Tsinghua University Touch panel and display device using the same
US8243030B2 (en) 2007-12-21 2012-08-14 Tsinghua University Touch panel and display device using the same
US8585855B2 (en) 2007-12-21 2013-11-19 Tsinghua University Method for making touch panel
US8574393B2 (en) 2007-12-21 2013-11-05 Tsinghua University Method for making touch panel
US8111245B2 (en) 2007-12-21 2012-02-07 Tsinghua University Touch panel and display device using the same
US8248378B2 (en) 2007-12-21 2012-08-21 Tsinghua University Touch panel and display device using the same
US8325145B2 (en) 2007-12-27 2012-12-04 Tsinghua University Touch panel and display device using the same
US8237669B2 (en) 2007-12-27 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237675B2 (en) 2007-12-27 2012-08-07 Tsinghua University Touch panel and display device using the same
US8237668B2 (en) 2007-12-27 2012-08-07 Tsinghua University Touch control device
US8125878B2 (en) 2007-12-27 2012-02-28 Tsinghua University Touch panel and display device using the same
CN101527328B (zh) * 2008-03-05 2012-03-14 鸿富锦精密工业(深圳)有限公司 太阳能电池及其制造方法
US8796537B2 (en) 2008-03-07 2014-08-05 Tsinghua University Carbon nanotube based solar cell
CN101552296B (zh) * 2008-04-03 2011-06-08 清华大学 太阳能电池
US8263860B2 (en) 2008-04-03 2012-09-11 Tsinghua University Silicon photovoltaic device with carbon nanotube cable electrode
CN101552297B (zh) * 2008-04-03 2012-11-21 清华大学 太阳能电池
US8895841B2 (en) 2008-04-18 2014-11-25 Tsinghua University Carbon nanotube based silicon photovoltaic device
CN101562204B (zh) * 2008-04-18 2011-03-23 鸿富锦精密工业(深圳)有限公司 太阳能电池
CN101562203A (zh) * 2008-04-18 2009-10-21 清华大学 太阳能电池
US8237677B2 (en) 2008-07-04 2012-08-07 Tsinghua University Liquid crystal display screen
US8237680B2 (en) 2008-07-04 2012-08-07 Tsinghua University Touch panel
US8237679B2 (en) 2008-07-04 2012-08-07 Tsinghua University Liquid crystal display screen
US8228308B2 (en) 2008-07-04 2012-07-24 Tsinghua University Method for making liquid crystal display adopting touch panel
US8105126B2 (en) 2008-07-04 2012-01-31 Tsinghua University Method for fabricating touch panel
US8199123B2 (en) 2008-07-04 2012-06-12 Tsinghua University Method for making liquid crystal display screen
US8390580B2 (en) 2008-07-09 2013-03-05 Tsinghua University Touch panel, liquid crystal display screen using the same, and methods for making the touch panel and the liquid crystal display screen
US8411052B2 (en) 2008-07-09 2013-04-02 Tsinghua University Touch panel, liquid crystal display screen using the same, and methods for making the touch panel and the liquid crystal display screen
US8411051B2 (en) 2008-07-09 2013-04-02 Tsinghua University Liquid crystal display screen
US8260378B2 (en) 2008-08-22 2012-09-04 Tsinghua University Mobile phone
US8346316B2 (en) 2008-08-22 2013-01-01 Tsinghua University Personal digital assistant
CN102414840A (zh) * 2009-04-30 2012-04-11 汉阳大学校产学协力团 包含碳纳米管层的硅太阳能电池
US9077793B2 (en) 2009-06-12 2015-07-07 Tsinghua University Carbon nanotube based flexible mobile phone
CN101694816B (zh) * 2009-10-16 2011-05-11 清华大学 一种异质结和光电化学混合太阳能电池
CN101820012A (zh) * 2010-04-09 2010-09-01 上海交通大学 表面组装有碳纳米管的硅太阳电池
CN101820012B (zh) * 2010-04-09 2012-01-04 上海交通大学 表面组装有碳纳米管的硅太阳电池
CN101950763A (zh) * 2010-07-09 2011-01-19 清华大学 基于硅线阵列掺磷的芯壳型结构太阳能电池及其制备方法
CN101950764A (zh) * 2010-07-30 2011-01-19 清华大学 一种带有酸溶液的碳纳米管-硅构成的太阳能电池
CN102364698A (zh) * 2011-06-30 2012-02-29 常州天合光能有限公司 扩散氧化层二次利用的太阳能电池制备方法
CN102368503A (zh) * 2011-10-17 2012-03-07 清华大学 一种碳纳米管-硅异质结太阳能电池及其制作方法
CN102364691A (zh) * 2011-10-19 2012-02-29 中国科学院宁波材料技术与工程研究所 具有上/下转换发光结构的晶体硅太阳能电池及制备方法
WO2013086963A1 (zh) * 2011-12-13 2013-06-20 清华大学 太阳能电池及其制备方法
CN109599412A (zh) * 2017-09-30 2019-04-09 清华大学 一种光电自储能器件
CN109599412B (zh) * 2017-09-30 2020-09-08 清华大学 一种光电自储能器件
CN112786715A (zh) * 2019-11-08 2021-05-11 清华大学 太阳能电池

Also Published As

Publication number Publication date
WO2008086709A1 (fr) 2008-07-24
CN100405617C (zh) 2008-07-23
US20100078067A1 (en) 2010-04-01

Similar Documents

Publication Publication Date Title
CN100405617C (zh) 基于碳纳米管薄膜的太阳能电池及其制备方法
Ke et al. Cooperative tin oxide fullerene electron selective layers for high-performance planar perovskite solar cells
Wang et al. Highly efficient poly (3-hexylthiophene) based monolithic dye-sensitized solar cells with carbon counter electrode
Ren et al. Strategies for high performance perovskite/crystalline silicon four-terminal tandem solar cells
Huang et al. Efficient and stable all‐inorganic CsPbIBr2 perovskite solar cells enabled by dynamic vacuum‐assisted low‐temperature engineering
Hao et al. A tin-based perovskite solar cell with an inverted hole-free transport layer to achieve high energy conversion efficiency by SCAPS device simulation
Fan et al. Delayed annealing treatment for high-quality CuSCN: exploring its impact on bifacial semitransparent nip planar perovskite solar cells
Liu et al. Recent progress in developing monolithic perovskite/Si tandem solar cells
Shen Recently-explored top electrode materials for transparent organic solar cells
JP2008153632A (ja) 光電池
Zhao et al. Thickness-dependent electron transport performance of mesoporous TiO2 thin film for dye-sensitized solar cells
Zhou et al. Semi-transparent Cl-doped perovskite solar cells with graphene electrodes for tandem application
Li et al. Boosting efficiency of planar heterojunction perovskite solar cells to 21.2% by a facile two-step deposition strategy
CN105720197A (zh) 一种自驱动宽光谱响应硅基杂化异质结光电传感器及其制备方法
Li et al. Self-assembled NiO microspheres for efficient inverted mesoscopic perovskite solar cells
Wu et al. Progress in blade-coating method for perovskite solar cells toward commercialization
CN107492584A (zh) 一种碲化镉太阳能电池制备方法及碲化镉太阳能电池
Lee et al. Thin metal top electrode and interface engineering for efficient and air-stable semitransparent perovskite solar cells
CN101562230B (zh) 给体采用弱外延生长薄膜的有机太阳能电池
Xiao et al. Enhancing the efficiency and stability of Organic/Silicon solar cells using graphene electrode and Double-layer Anti-reflection coating
CN107123741B (zh) 一种酞菁染料敏化的CsPbBr3光伏电池及其制造方法
CN101567423A (zh) 一种有机太阳能电池
Huang et al. Comparison of mesoporous materials based on mixed-organic-cation hole-conductor-free perovskite solar cells
Luo et al. Improving open-circuit voltage and short-circuit current of high-efficiency silicon-based planar heterojunction solar cells by combining V2O5 with PEDOT: PSS
CN111162176B (zh) 一种振荡辅助旋涂工艺制备具有垂直相梯度分布光活性层的有机太阳能电池的制备方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant