CN1996613A

CN1996613A - Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices

Info

Publication number: CN1996613A
Application number: CNA2006101399847A
Authority: CN
Inventors: 查尔斯·M·利伯; 崔屹; 段镶锋; 黄昱
Original assignee: Harvard College
Current assignee: Harvard College
Priority date: 2000-08-22
Filing date: 2001-08-22
Publication date: 2007-07-11

Abstract

The present invention provides a body doping semiconductor which is at least one of the following matters: a single crystal; an elongated and body-doping semiconductor, the semiconductor has a maximum cross-section dimension less than 500 nano at random point along the longitudinal axis; and an independent and body-doping semiconductor with at least one part has the minimum width less than 500 nano, wherein the phenomenon generated by the body-doping semiconductor cross-section represents the quantum restriction caused by the dimension of the cross-section. Besides the invention also provides a method for growing the semiconductor relative to the body-doping semiconductor, a method for manufacturing the device, a semiconductor device, a method for manufacturing the nano wire semiconductor device, a method for manufacturing light emitting diode with the nano wire, a method for manufacturing the device which comprises a body-doping semiconductor component and one or a plurality of other components, a method for assembling a plurality of elongated structures on the surface, a system which is assembled with one or more elongated structures on the surface and a method for selectively aligning and locating the semiconductor nano wire on the substrate.

Description

The elongated semiconductor of mixing up, the growth of this based semiconductor comprises the manufacturing of device and this class device of this based semiconductor

The application is that the application number of submitting August 22 calendar year 2001 is 01816168.5, and denomination of invention is divided an application for " elongated semiconductor of mixing up, the growth of this based semiconductor comprise the manufacturing of device and this class device of this based semiconductor ".

Related application

The application requires the priority of following unsettled U.S. Provisional Patent Application that own together, common according to 35 USC § 119 (e): sequence number No.60/226, and 835, name is called " semiconductor nanowires ", and on August 22nd, 2000 submitted; Sequence number No.60/292,121, name is called " semiconductor nanowires ", and submit May 18 calendar year 2001; Sequence number No.60/254,745, name is called " nano wire and nano-tube nano transducer ", and on December 11st, 2000 submitted; Sequence number No.60/292,035, name is called " nano wire and nano-tube nano transducer ", and submit May 18 calendar year 2001; Sequence number No.60/292,045, name is called " nano electron device that comprises memory and switching device ", and submit May 18 calendar year 2001; And sequence number No.60/291,896, name is called " nano-device that comprises transmitter unit and transducer ", and submit May 18 calendar year 2001.All these applications are all incorporated this paper at this by quoting as proof.

Technical field

Relate generally to of the present invention Asia-semiconductor microelectronics device, and be particularly related to nano level semiconductor article for example, is mixed up so that the nano wire of n type and p type conductivity to be provided, the growth of this based article and be the layout of this based article of making device.

Background technology

The small scale electronic technology depends on mixing up of various materials to a great extent.The doped semiconductor material is known with n type and the p N-type semiconductor N zone that is formed for making such as field-effect transistor, bipolar transistor, complementary inverter, tunnel diode or the like various devices.

Typical state-of-the-art technology semiconductor manufacturing facility relates to high relatively cost, and requires ultra-clean chamber and use for example hydrofluoric toxic chemical.Though semiconductor and micro-fabrication technology have obtained good development, also exist improving, preferably comprise more small scale, the environment amenable lasting demand of making cheaply.

Summary of the invention

In one embodiment, provide and comprise at least a portion and have stand alone type (free-standing) body doped semiconductor less than the minimum widith of 500 nanometers.

Aspect another of this embodiment, this semiconductor comprises: comprise the first semi-conductive kernel; And comprise the shell that is different from this first semi-conductive material.

Aspect another of this embodiment, this semiconductor is elongated.In the various optional characteristic aspect this, on the arbitrfary point in this semi-conductive vertical section, the ratio of length profile and Breadth Maximum is greater than 4: 1, or greater than 10: 1, or greater than 100: 1, or even greater than 1000: 1.

In the various aspects of this embodiment, this semi-conductive part has less than 200 nanometers or less than 150 nanometers or less than 100 nanometers or less than 80 nanometers or less than 70 nanometers or less than 60 nanometers or less than 40 nanometers or less than 20 nanometers or less than 10 nanometers or even less than the minimum widith of 5 nanometers at least.

Aspect this embodiment various, this semiconductor comprises a kind of being selected from by Si, Ge, Sn, Se, Te, B, diamond, P, B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn, SiC, BN/BP/BAs, AlN/AlP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, BN/BP/BAs, AlN/AlP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, ZnO/ZnS/ZnSe/ZnTe, CdS/CdSe/CdTe, HgS/HgSe/HgTe, BeS/BeSe/BeTe/MgS/MgSe, GeS, GeSe, GeTe, SnS, SnSe, SnTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, AgF, AgCl, AgBr, AgI, BeSiN2, CaCN2, ZeGeP2, CdSnAs2, ZnSnSb2, CuGeP3, CuSi2P3, (Cu, Ag) (Al, Ga, In, Tl, Fe) (S, Se, Te) 2, Si3N4, Ge3N4, Al2O3, (Al, Ga, In) 2 (S, Se, Te) 3, the semiconductor of the group that Al2CO forms, and the appropriate combination of two or more these based semiconductors.

In the various aspects of this embodiment, this semiconductor comprises a kind of material that mixes up that is selected from by the group of being made up of following material: the p type from the III family of periodic table mixes up material; N type from the V family of periodic table mixes up material; The p type of selecting from the group of being made up of B, Al and In mixes up material; The n type of selecting from the group of being made up of P, As and Sb mixes up material; P type from the II family of periodic table mixes up material; The p type of selecting from the group of being made up of Mg, Zn, Cd and Hg mixes up material; P type from the IV family of periodic table mixes up material; The p type of selecting from the group of being made up of C and Si mixes up material; Or the n type of selecting from the group of being made up of Si, Ge, Sn, S, Se and Te mixes up material.

Aspect another of this embodiment, this semiconductor is the part of device.Aspect another of this embodiment, this semiconductor is that n mixes up.In the various optional characteristic aspect this, this semiconductor or slight n mix up, or severe n mixes up.

And aspect another of this embodiment, this semiconductor is that p mixes up.In the various optional characteristic aspect this, this semiconductor or slight p mix up, or severe p mixes up.

Aspect another of this embodiment, this semiconductor is a monocrystalline.

In the additional various aspects of this embodiment, this semiconductor is a magnetic; This semiconductor comprises makes the magnetic material that mixes up of this semiconductor, and this semiconductor is ferromagnetic; This semiconductor comprises makes this semiconductor that the ferromagnetic material that mixes up be arranged; And/or this semiconductor comprises manganese.

In another embodiment, provide semiconductor elongated and that body mixes up, this semiconductor is in the cross-sectional dimension that has along the arbitrfary point on its longitudinal axis less than 500 nanometers.

Aspect of this embodiment, this semiconductor is freestanding (free-standing).

Aspect another of this embodiment, this semiconductor comprises: one comprises the first semi-conductive kernel; And one comprise the shell that is different from this first semi-conductive material.

Aspect this embodiment various, on the arbitrfary point of this semiconductor longitudinal axis, the ratio of length profile and Breadth Maximum is greater than 4: 1, or greater than 10: 1, or greater than 100: 1, or even greater than 1000: 1.

Aspect this embodiment various, this semi-conductive vertical section has less than 200 nanometers or less than 150 nanometers or less than 100 nanometers or less than 80 nanometers or less than 70 nanometers or less than 60 nanometers or less than 40 nanometers or less than 20 nanometers or less than 10 nanometers or even less than the minimum widith of 5 nanometers at least.

In the various aspects of this embodiment, this semi-conductive vertical section has less than 200 nanometers or less than 150 nanometers or less than 100 nanometers or less than 80 nanometers or less than 70 nanometers or less than 60 nanometers or less than 40 nanometers or less than 20 nanometers or less than 10 nanometers or even less than the Breadth Maximum of 5 nanometers at least.

Various aspects in this embodiment, this semiconductor comprises a kind of being selected from by Si, Ge, Sn, Se, Te, B, diamond, P, B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn, SiC, BN/BP/BAs, AlN/AlP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, BN/BP/BAs, AlN/AlP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, ZnO/ZnS/ZnSe/ZnTe, CdS/CdSe/CdTe, HgS/HgSe/HgTe, BeS/BeSe/BeTe/MgS/MgSe, GeS, GeSe, GeTe, SnS, SnSe, SnTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, AgF, AgCl, AgBr, AgI, BeSiN2, CaCN2, ZeGeP2, CdSnAs2, ZnSnSb2, CuGeP3, CuSi2P3, (Cu, Ag) (Al, Ga, In, Tl, Fe) (S, Se, Te) 2, Si3N4, Ge3N4, Al2O3, (Al, Ga, In) 2 (S, Se, Te) 3, the semiconductor of the group that Al2CO forms, and the appropriate combination of two or more these based semiconductors.

In the various aspects of this embodiment, this semiconductor comprises the material that mixes up that comes group that free following material forms: the p type from the III family of periodic table mixes up material; N type from the V family of periodic table mixes up material; The p type of selecting from the group of being made up of B, Al and In mixes up material; The n type of selecting from the group of being made up of P, As and Sb mixes up material; P type from the II family of periodic table mixes up material; The p type of selecting from the gang that is made up of Mg, Zn, Cd and Hg mixes up material; P type from the IV family of periodic table mixes up material; The p type of selecting from the group of being made up of C and Si mixes up material; Or the n type of selecting from the group of being made up of Si, Ge, Sn, S, Se and Te mixes up material.

Aspect another of this embodiment, this semiconductor is the part of device.

Aspect another of this embodiment, this semiconductor is that n mixes up.In the various optional characteristic aspect this, this semiconductor or slight n mix up, or severe n mixes up.

Aspect another of this embodiment, this semiconductor is a monocrystalline.

In another embodiment, provide the doped semiconductor that comprises monocrystalline.

Aspect of this embodiment, this semiconductor is that body mixes up.

Aspect of this embodiment, this semiconductor is elongated.In the various optional characteristic aspect this, on the arbitrfary point of this semiconductor longitudinal axis, the ratio of length profile and Breadth Maximum is greater than 4: 1, or greater than 10: 1, or greater than 100: 1, or even greater than 1000: 1.

In the various schemes of this embodiment, this semiconductor comprises the material that mixes up that comes gang that free following material forms: the p type from the III family of periodic table mixes up material; N type from the V family of periodic table mixes up material; The p type of selecting from the gang that is made up of B, Al and In mixes up material; The n type of selecting from the gang that is made up of P, As and Sb mixes up material; P type from the II family of periodic table mixes up material; The p type of selecting from the gang that is made up of Mg, Zn, Cd and Hg mixes up material; N type from the IV family of periodic table mixes up material; The p type of selecting from the gang that is made up of C and Si mixes up material; Or the n type of selecting from the gang that is made up of Si, Ge, Sn, S, Se and Te mixes up material.

And in another embodiment, providing is one of following doped semiconductor at least: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; At least a portion has the semiconductor that mixes up less than the stand alone type of the minimum widith of 500 nanometers and body, and wherein the phenomenon that produces of the semiconductor section that is mixed up by body shows the caused quantum limit of this section size (quantum confinement).

In another scheme of this embodiment, the vertical section can respond stimulated luminescence, and wherein light emitted wavelength is relevant with width.In the optional features of this scheme, institute's wavelength of light emitted is the function of width; The vertical section can not have scattering ground and carries electric charge carrier; Electric charge carrier can be carried so that electric charge carrier passes through the vertical section along trajectory in the vertical section; Electric charge carrier can be carried so that electric charge carrier coherently passes through the vertical section in the vertical section; The vertical section can carry electric charge carrier in case electric charge carrier by spin polarization; And/or electric charge carrier can be carried in the vertical section, and ground does not pass through the vertical section so that the electric charge carrier of spin polarization is not lost spin information.

In another embodiment, provide the solution that comprises one or more doped semiconductor, wherein at least a in these semiconductors is following one at least: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

In the scheme of this embodiment, at least a semiconductor is elongated.In the various optional features of this scheme, on the arbitrfary point in this semi-conductive vertical section, the ratio of length profile and Breadth Maximum is greater than 4: 1, or greater than 10: 1, or greater than 100: 1, or greater than 1000: 1.

In the various schemes of this embodiment, this semi-conductive part has less than 200 nanometers or less than 150 nanometers or less than 100 nanometers or less than 80 nanometers or less than 70 nanometers or less than 60 nanometers or less than 40 nanometers or less than 20 nanometers or less than 10 nanometers or even less than the minimum widith of 5 nanometers at least.

In the various schemes of this embodiment, at least a semiconductor comprises to come free Si, Ge, Sn, Se, Te, B, diamond, P, B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn, SiC, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, ZnO/ZnS/ZnSe/ZnTe, CdS/CdSe/CdTe, HgS/HgSe/HgTe, BeS/BeSe/BeTe/MgS/MgSe, Ges, GeSe, GeTe, SnS, SnSe, SeTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, AgF, AgCl, AgBr, AgI, BeSiN2, CaCN2, ZeGeP2, CdSnAs2, ZnSnSb2, CuGeP3, CuSi2P3, (Cu, Ag) (Al, Ga, In, Tl, Fe) (S, Se, Te) 2, Si3N4, Ge3N4, Al2O3, (Al, Ga, In) 2 (S, Se, Te) 3, the semiconductor of the gang that Al2CO forms, and the appropriate combination of two or more these based semiconductors.

In the various schemes of this embodiment, at least a semiconductor comprises the material that mixes up that comes gang that free following material forms: the p type from the III family of periodic table mixes up material; N type from the V family of periodic table mixes up material; The p type of selecting from the gang that is made up of B, Al and In mixes up material; The n type of selecting from the gang that is made up of P, As and Sb mixes up material; P type from the II family of periodic table mixes up material; The p type of selecting from the gang that is made up of Mg, Zn, Cd and Hg mixes up material; N type from the IV family of periodic table mixes up material; The p type of selecting from the gang that is made up of C and Si mixes up material; Or the n type of selecting from the gang that is made up of Si, Ge, Sn, S, Se and Te mixes up material.

In another embodiment, provide the device that comprises one or more doped semiconductor, wherein at least a in these semiconductors is following one at least: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

In the scheme of this embodiment, this device comprises at least two kinds of doped semiconductor, wherein at least these two kinds of semiconductors all be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; At least a portion has the semiconductor that mixes up less than the stand alone type of the minimum widith of 500 nanometers and body, and wherein first kind at least two kinds of semiconductors shows second kind of quantum limit of handling first kind in quantum limit and at least two kinds of semiconductors.

Aspect another of this embodiment, this device comprises at least two kinds of doped semiconductor, wherein at least these two kinds of semiconductors all be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; At least a portion has the semiconductor that mixes up less than the stand alone type of the minimum widith of 500 nanometers and body.In the various optional features of this embodiment, the physics contact each other of these at least two kinds of body doped semiconductor, first kind in these at least two kinds of body doped semiconductor is first conduction type, and second kind in these at least two kinds of body doped semiconductor is second conduction type; First conduction type is the n type, and second conduction type is the p type; And/or these at least two kinds of body doped semiconductor form p-n junction.

In the various schemes of this embodiment, this device comprises following one or more: switch; Diode; Light-emitting diode; Tunnel diode; Schottky diode; Ambipolar junction transistors; Field-effect transistor; Inverter; Complementary inverter; Optical sensor; The transducer that is used for analyte (for example DNA); Storage component part; Dynamic memory device; The static memory device; Laser; Gate; The AND door; The NAND door; The EXCLUSIVE-AND door; The OR door; The NOR door; The EXCLUSIVE-OR door; Latch; Register; Clock circuit; Logic array; State machine; Programmable circuit; Amplifier; Transformer; Signal processor; Digital circuit; Analog circuit; Light emitting source; Photo luminescent devices; Electroluminescent device; Rectifier; Photodiode; The p-n solar cell; Photistor; Single-electronic transistor; The single photon emission device; Single-photon detector; Spin electric device (spintronic); The ultra-fine probe that is used for atomic force microscope; Scanning tunnel microscope; Feds; Luminescence generated by light probe (tag); Photovoltaic device; Photonic bandgap material; Optical microscope for scanning near field; With circuit with numeral and analog element.

In the various schemes of this embodiment, for comprise one or more in the preceding paragraph the device of listed device element, one of these device elements may comprise at least a semiconductor.In an optional features of this scheme, a plurality of elements of this device may comprise at least a semiconductor, wherein, for each device element, at least a semiconductor be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; At least a portion has the semiconductor that mixes up less than the stand alone type of the minimum widith of 500 nanometers and body.

In the various schemes of this embodiment, at least a semi-conductive at least a portion has less than 200 nanometers or less than 150 nanometers or less than 100 nanometers or less than 80 nanometers or less than 70 nanometers or less than 60 nanometers or less than 40 nanometers or less than 20 nanometers or less than 10 nanometers or even less than the minimum widith of 5 nanometers.

In another scheme of this embodiment, this device comprises other the semiconductor that is electrically coupled to this at least a body doped semiconductor.

In another scheme of this embodiment, this device comprises other the semiconductor that is optically coupled to this at least a body doped semiconductor.And in another scheme of this embodiment, this device comprises other the semiconductor that is arrived this at least a body doped semiconductor by magnetic coupling.

In another scheme of this embodiment, this device comprises other the semiconductor that contacts with this at least a body doped semiconductor physics.

In the various schemes of this embodiment, this at least a semiconductor is coupled to one or more that electrical connection, light connection or magnetic connect.

In another scheme of this embodiment, but this at least a semi-conductive conductivity is response signal control.In the various optional features of this scheme, this at least a semi-conductive conductivity may command is to have an arbitrary value in the codomain; This at least a semiconductor can switch between two or more states; This at least a semiconductor can switch between conduction state and state of insulation by signal; The signal that these at least a semi-conductive two or more states need not to apply can be kept; This at least a semi-conductive conductivity can respond signal of telecommunication control; But this at least a semi-conductive conductivity is the response light signal controlling; This at least a semi-conductive conductivity can respond magnetic signal control; And/or this at least a semi-conductive conductivity is the signal controlling that can respond gate terminal (gateterminal).

In another scheme of this embodiment, in these semiconductors at least two kinds by layout in array, and to be arranged at least a in the semiconductor of array at least be to comprise at least one to have the semiconductor that the body less than the part of the minimum widith of 500 nanometers mixes up.In an optional features of this scheme, array is an oldered array.In another optional features of this embodiment, array is not an oldered array.

And in another scheme of this embodiment, this device comprises two or more separation and interconnected circuit, has at least one not comprise and comprise that at least one has the semiconductor that the body less than the part of the minimum widith of 500 nanometers mixes up in these circuit.

In another embodiment, providing is used to grow comprises at least one and has set less than the reagent of the body doped semiconductor of the part of the minimum widith of 500 nanometers, and this set comprises semiconductor reagent and mixes up material reagent.

In the scheme of this embodiment, this at least a semiconductor is elongated.In the various optional features of this scheme, on the arbitrfary point in this semi-conductive vertical section, the ratio of length profile and Breadth Maximum is greater than 4: 1, or greater than 10: 1, or greater than 100: 1, or greater than 1000: 1.

In the various schemes of this embodiment, this at least a semi-conductive at least a portion has less than 200 nanometers or less than 150 nanometers or less than 100 nanometers or less than 80 nanometers or less than 70 nanometers or less than 60 nanometers or less than 40 nanometers or less than 20 nanometers or less than 10 nanometers or even less than the minimum widith of 5 nanometers.

In the various schemes of this embodiment, this at least a semiconductor comprises to come free Si, Ge, Sn, Se, Te, B, diamond, P, B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn, SiC, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, ZnO/ZnS/ZnSe/ZnTe, CdS/CdSe/CdTe, HgS/HgSe/HgTe, BeS/BeSe/BeTe/MgS/MgSe, Ges, GeSe, GeTe, SnS, SnSe, SeTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, AgF, AgCl, AgBr, AgI, BeSiN2, CaCN2, ZeGeP2, CdSnAs2, ZnSnSb2, CuGeP3, CuSi2P3, (Cu, Ag) (Al, Ga, In, Tl, Fe) (S, Se, Te) 2, Si3N4, Ge3N4, Al2O3, (Al, Ga, In) 2 (S, Se, Te) 3, the semiconductor of the gang that Al2CO forms, and the appropriate combination of two or more these based semiconductors.

In the various schemes of this embodiment, this at least a semiconductor comprises the material that mixes up that comes gang that free following material forms: the p type from the III family of periodic table mixes up material; N type from the V family of periodic table mixes up material; The p type of selecting from the gang that is made up of B, Al and In mixes up material; The n type of selecting from the gang that is made up of P, As and Sb mixes up material; P type from the II family of periodic table mixes up material; The p type of selecting from the gang that is made up of Mg, Zn, Cd and Hg mixes up material; N type from the IV family of periodic table mixes up material; The p type of selecting from the gang that is made up of C and Si mixes up material; Or the n type of selecting from the gang that is made up of Si, Ge, Sn, S, Se and Te mixes up material.

In another embodiment, semiconductor is mixed up in this semiconductor growing process.

In the various schemes of this embodiment: this semiconductor is freestanding; This semiconductor has the minimum widith less than 100 nanometers; The degree of mixing up is controlled; The semiconductor that mixes up is by applying the energy growth to elements collection; This elements collection comprises this semi-conductive molecule and mixes up the molecule of material; The degree of mixing up is controlled; The amount of semiconductor molecule and the ratio of amount that mixes up the molecule of material are controlled.Use laser with the molecule of molecule vaporization with the formation vaporization; This semiconductor is grown into by the molecule of vaporization; The molecule of vaporization is compressed into liquid group (liquid cluster); This semiconductor is grown into by liquid state group; Growing semiconductor is finished by using laser auxiliary catalysis growth (laser-assisted catalyticgrowth); Elements collection comprises the micel of catalysis material; Semi-conductive width is controlled; And/or control semi-conductive width by the width of control catalysis group.

In the scheme that this embodiment adds, the behavior of mixing up comprises carries out chemical vapour deposition (CVD) at least on molecule; The semiconductor that grows into has at least one and has part less than the minimum widith of 20 nanometers; The semiconductor that grows into has at least one and has part less than the minimum widith of 10 nanometers; And/or the semiconductor that grows into has at least one and has part less than the minimum widith of 5 nanometers.

And in other additional aspects of this embodiment: the semiconductor that grows into is a magnetic; This semiconductor is mixed up with the feasible magnetic material of semiconductor that grows into; The semiconductor that grows into is ferromagnetic; This semiconductor is had ferromagnetic material to mix up with the feasible semiconductor that grows into; This semiconductor is mixed up with manganese dioxide.

In another scheme of this embodiment, this at least a semiconductor is elongated.In the various optional features of this scheme, on the arbitrfary point in this semi-conductive vertical section, the ratio of length profile and Breadth Maximum is greater than 4: 1, or greater than 10: 1, or greater than 100: 1, or greater than 1000: 1.

In another embodiment, made a device.One or more semiconductors and one surface contacts, wherein have at least in these semiconductors a kind of be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; At least a portion has the semiconductor that mixes up less than the stand alone type of the minimum widith of 500 nanometers and body.In the various schemes of this embodiment: this surface is a substrate; With before this surface contacts, in these semiconductors at least the first by to semiconductor molecule with mix up material molecule and apply the energy growth; Comprising one or more semi-conductive solution contacts with this surface; Use electric field, one or more are alignd on this surface in these semiconductors; Electric field produces between at least two electrodes, and in these semiconductors one or more are placed between two electrodes; Another kind comprises one or more semi-conductive solution and contacts with this surface, and wherein having at least a kind of in other these semiconductors is to comprise at least one to have body doped semiconductor less than the part of the minimum widith of 500 nanometers; This surface according to circumstances is connected to the surface to the semiconductor of one or more contacts; Form raceway groove from the teeth outwards; Form pattern (pattern) from the teeth outwards; Use electric field that in these semiconductors one or more are alignd from the teeth outwards; At least a semiconductor is elongated.

In the various optional features of this scheme, on the arbitrfary point in this semi-conductive vertical section, the ratio of length profile and Breadth Maximum is greater than 4: 1, or greater than 10: 1, or greater than 100: 1, or greater than 1000: 1.

In another embodiment, produce and only to cause that by apply energy to one or more semiconductors one or more semiconductor light emittings produce, wherein have at least in these semiconductors a kind of be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

In the various schemes of this embodiment, this at least a semiconductor is that body mixes up; This semiconductor comprises direct gap semiconductor; The semi-conductive knot of crossing over two kinds of intersections applies voltage, and every kind of semiconductor has the minimum widith less than 500 nanometers; Every kind of semiconductor has the minimum widith less than 100 nanometers; By controlling this at least a light emitted wavelength of semi-conductive size Control that has less than the minimum widith of 100 nanometers; This semiconductor is elongated, and the semi-conductive width that is elongated is controlled; This semiconductor has a kind of character, if that is: a large amount of semiconductor has the shortest size of minimum, then it is luminous at first wavelength, and the size of this semiconductor controlled system is less than the shortest size of this minimum.

In another embodiment, made device with at least one doped semiconductor element and one or more other elements.Semiconductor is mixed up the semiconductor element that is mixed up to produce in its growth course, and the semiconductor element that is mixed up is connected in one or more other elements at least one.

In the scheme of this embodiment, the semiconductor that mixes up be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

In the various schemes of this embodiment, semiconductor element is the part of nano wire at least; Semiconductor is mixed up in the process of this semiconductor growing.

In another embodiment, provide and be used for the process that controllable assembling has the semiconductor device that elongates the unit, these elongate unit and have characteristic size on the direction of this unit crossing on nanoscale, this process comprises: produce at least a first first module of mixing up type, described first module is directed on the first direction, and described first module is connected at least one first contact so that electric current is flow through this first module.

In the various schemes of this embodiment: this process comprises that also producing at least a second mixes up Unit second of type, described Unit second is directed on the second direction that is different from first direction, enable electrically contacting between first module and the Unit second, and described Unit second is connected at least one second contact so that electric current is able to flow between first module and Unit second; This process also comprises and is connected to described first module on the isolated contact and between isolated contact, places a gate electrode near this first module place, forms FET by this; First to mix up type be one of n type and p type for this; If first to mix up type be the p type for this, then this second to mix up type be the n type, if first to mix up type be n for this, then this second to mix up type be the p type; One comes directed this first module by applying in electric field and the flow of liquid at least; This first module is suspended in the flow of liquid; Come directed this first module by applying mechanical means; By applying in electric field and the flow of liquid its two directed this Unit second at least; This Unit second is suspended in the flow of liquid; Come directed this Unit second by applying mechanical means.

And in another embodiment, provide semiconductor device, comprise: silicon substrate with hard contact array; The crossbar switch unit, this unit and array electrical communication, and second contact that forms by n N-type semiconductor N nano wire that has first contact (bar) that p N-type semiconductor N nano wire forms and open and laterally place with first contact separation.

In the scheme of this embodiment, this second contact is opened 1 to 10 nanometer with first contact separation.

In another embodiment, provide the method that is used to make nanowire semiconductor device, having comprised: by between the contact, applying electromotive force, location first nano wire between two contacts; Location second nano wire between two other contact.

In another embodiment, provide the method that is used to make nanowire semiconductor device, having comprised: formation has one or more surfaces of optionally adsorbing the zone of nano wire.

In another embodiment, provide the method that is used for making with nano wire light-emitting diode, this diode has the emission wavelength by the size decision of the p-n junction between the nano wire that mixes up at two.

And in another embodiment, provide the method that is used for making semiconductor junction by intersection p type nano wire and n type nano wire.

In another embodiment, provide the method that is used for assembling from the teeth outwards one or more elongated structures, wherein this method comprises operation: flowing from the teeth outwards comprises the liquid of one or more elongated structures; One or more elongated structures that align from the teeth outwards are to form the array of elongated structure.

In the various embodiment of this method: flowing comprises along the first direction working fluid, and alignment is included in liquid one or more elongated structures that align and lines up the structure of array to form ground floor when first direction flows, and this method also comprises liquid flow direction is changed to second direction from first direction, and repetitive stream is moving and the operation of alignment; Contact with at least one second elongated structure from least one first elongated structure of ground floor from second array; One of first and second elongated structures are the doped semiconductor of first conduction type, and another of first and second elongated structures is the doped semiconductor of second conduction type; First conduction type is that the p type and second conduction type are the n types, and wherein first and second elongated structures have formed p-n junction; The surface is the surface of substrate, and this method also comprises the surface of the array of elongated structure being transferred to another substrate from the surface of first this substrate; Transfer comprises punching press; One or more elongated structures are alignd when still being comprised in the liquid from the teeth outwards; Regulate the surface with the function that one or more elongated structures is adsorbed onto lip-deep ad-hoc location, and alignment operation comprises and uses these one or more functions that one or more elongated structures are adsorbed onto ad-hoc location; Regulating operation comprises with one or more molecular regulation surface; Regulating operation comprises with one or more electric charges adjustings surface; Regulating operation comprises with one or more magnets (magneto) adjusting surface; Regulating operation comprises with one or more light intensity regulating surface; With one or more one or more elongated structures are regulated the surface with the function that chemical action power is adsorbed onto lip-deep ad-hoc location; Regulate operation and comprise the function adjusting surface that one or more elongated structures is adsorbed onto lip-deep ad-hoc location with the optics active force with one or more; Regulate operation and comprise the function adjusting surface that one or more elongated structures is adsorbed onto lip-deep ad-hoc location with electrostatic force with one or more; Regulate operation and comprise the function adjusting surface that one or more elongated structures is adsorbed onto lip-deep ad-hoc location with magnetic force with one or more; This method also comprises makes the pattern that receives one or more elongated structures on from the teeth outwards the ad-hoc location to the surface; Patterning case (patterning) operation comprises creates the physics pattern from the teeth outwards; This physics pattern is a groove; This physics pattern is a step; This surface is the surface of substrate, and creates the physics pattern from the teeth outwards and comprise the lattice step (step) that uses substrate; This surface is the surface of substrate, and creates the physics pattern from the teeth outwards and comprise and use two polymeric tapes of self-assembly (self-assembleddi-block strips); Create the physics pattern from the teeth outwards and comprise the use pattern; Create the physics pattern from the teeth outwards and comprise the pattern that uses printing; And/or flow operation comprises flowing of use raceway groove controlling liquid.

In the additional aspects of this embodiment: have at least one to be semiconductor in the elongated structure; Have at least one to be the semiconductor that mixes up in the elongated structure; Have at least one to be the semiconductor that body mixes up in the elongated structure; Have at least one to be the single crystal semiconductor that mixes up in the structure; Have at least one to be to elongate and semiconductor that body mixes up in the structure, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; Have at least one to be that at least a portion has less than the stand alone type of the minimum widith of 500 nanometers and the semiconductor that body mixes up in the structure; Have at least one to be the semiconductor that mixes up in the structure, this semiconductor be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; This doped semiconductor comprises to come free Si, Ge, Sn, Se, Te, B, diamond, P, B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn, SiC, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, ZnO/ZnS/ZnSe/ZnTe, CdS/CdSe/CdTe, HgS/HgSe/HgTe, BeS/BeSe/BeTe/MgS/MgSe, Ges, GeSe, GeTe, SnS, SnSe, SeTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, AgF, AgCl, AgBr, AgI, BeSiN2, CaCN2, ZeGeP2, CdSnAs2, ZnSnSb2, CuGeP3, CuSi2P3, (Cu, Ag) (Al, Ga, In, Tl, Fe) (S, Se, Te) 2, Si3N4, Ge3N4, Al2O3, (Al, Ga, In) 2 (S, Se, Te) 3, the semiconductor of choosing in the gang that Al2CO forms; This doped semiconductor comprises the material that mixes up that comes gang that free following material forms: the p type from the III family of periodic table mixes up material; N type from the V family of periodic table mixes up material; The p type of selecting from the gang that is made up of B, Al and In mixes up material; The n type of selecting from the gang that is made up of P, As and Sb mixes up material; P type from the II family of periodic table mixes up material; The p type of selecting from the gang that is made up of Mg, Zn, Cd and Hg mixes up material; N type from the IV family of periodic table mixes up material; The p type of selecting from the gang that is made up of C and Si mixes up material; Or the n type of selecting from the gang that is made up of Si, Ge, Sn, S, Se and Te mixes up material; This doped semiconductor is mixed up in this semi-conductive growth course.

In another embodiment, the method for assembling one or more elongated structures is from the teeth outwards disclosed, wherein, one or more in the elongated structure be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; And wherein this method comprises the function operations that is adsorbed onto lip-deep ad-hoc location with one or more elongated structures and regulates the surface, and uses these one or more functions by one or more elongated structures being adsorbed onto the ad-hoc location one or more elongated structures that align.

In the various schemes of this embodiment: regulate operation and comprise with one or more molecular regulation surface; Regulating operation comprises with one or more electric charges adjustings surface; Regulating operation comprises with one or more magnets (magneto) adjusting surface; Regulating operation comprises with one or more light intensity regulating surface; With one or more one or more elongated structures are regulated the surface with the function that chemical action power is adsorbed onto lip-deep ad-hoc location; Regulate operation and comprise the function adjusting surface that one or more elongated structures is adsorbed onto lip-deep ad-hoc location with the optics active force with one or more; Regulate operation and comprise the function adjusting surface that one or more elongated structures is adsorbed onto lip-deep ad-hoc location with electrostatic force with one or more; Regulate operation and comprise the function adjusting surface that one or more elongated structures is adsorbed onto lip-deep ad-hoc location with magnetic force with one or more.

In another embodiment, the method for assembling a plurality of elongated structures is from the teeth outwards disclosed, wherein, one or more in the elongated structure be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; And wherein this method comprises operation: deposit a plurality of elongated structures from the teeth outwards; And surface charging is produced electrostatic force with between in these a plurality of elongated structures two or more.

In the various schemes of this embodiment: electrostatic force makes two or more elongated structures align himself; Electrostatic force makes two or more elongated structures himself to snap to one or more patterns; And/or one or more patterns comprise parallel array.

And in another embodiment, provide the method for assembling a plurality of elongated structures from the teeth outwards, wherein, one or more in the elongated structure be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; And wherein this method comprises operation: disperse one or more elongated structures to form the Langmuir-Blodgett film on the liquid phase surface; Compress this Langmuir-Blodgett film; And the Langmuir-Blodgett film transfer of compressing to the surface.

In the scheme of this embodiment, the surface is the surface of substrate.

In another embodiment, provide the method for assembling a plurality of one or more elongated structures from the teeth outwards, wherein, have at least in the elongated structure one be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; And wherein this method comprises operation: disperse one or more elongated structures on scalable matrix; This scalable matrix stretch in one direction to produce the shear stress that causes at least one elongated structure to align on one or more elongated structures on this direction; Remove scalable matrix; And the elongated structure of at least one alignment transferred on the surface.

In the various schemes of this embodiment: this direction is parallel to surface plane, and stretched operation comprises the electricity consumption induction effect power scalable matrix that stretches; Stretched operation comprises with the light induction effect power scalable matrix that stretches; Stretched operation comprises with mechanical sense answers the active force scalable matrix that stretches; Stretched operation comprises with the magnetic induction active force scalable matrix that stretches; This surface is the surface of substrate; Scalable matrix is a polymer.

In another embodiment, provide the system of the doped semiconductor that is used to grow, this system comprises: the device that is used to semiconductor molecule is provided He mixes up material molecule; Be used for will mixing up material molecule and dope in the semiconductor molecule to produce the device of doped semiconductor in the semiconductor growing process.

In the additional aspects of this embodiment, have at least one to be semiconductor in the elongated structure; Have at least one to be the semiconductor that mixes up in the elongated structure; Have at least one to be the semiconductor that body mixes up in the elongated structure; Have at least one to be the single crystal semiconductor that mixes up in the structure; Have at least one to be to elongate and semiconductor that body mixes up in the structure, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; Have at least one to be that at least a portion has less than the stand alone type of the minimum widith of 500 nanometers and the semiconductor that body mixes up in the structure; Have at least one to be the semiconductor that mixes up in the structure, this semiconductor be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; This doped semiconductor comprises to come free Si, Ge, Sn, Se, Te, B, diamond, P, B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn, SiC, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, ZnO/ZnS/ZnSe/ZnTe, CdS/CdSe/CdTe, HgS/HgSe/HgTe, BeS/BeSe/BeTe/MgS/MgSe, Ges, GeSe, GeTe, SnS, SnSe, SeTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, AgF, AgCl, AgBr, AgI, BeSiN2, CaCN2, ZeGeP2, CdSnAs2, ZnSnSb2, CuGeP3, CuSi2P3, (Cu, Ag) (Al, Ga, In, Tl, Fe) (S, Se, Te) 2, Si3N4, Ge3N4, Al2O3, (Al, Ga, In) 2 (S, Se, Te) 3, the semiconductor of choosing in the gang that Al2CO forms; This doped semiconductor comprises the material that mixes up that comes gang that free following material forms: the p type from the III family of periodic table mixes up material; N type from the V family of periodic table mixes up material; The p type of selecting from the gang that is made up of B, Al and In mixes up material; The n type of selecting from the gang that is made up of P, As and Sb mixes up material; P type from the II family of periodic table mixes up material; The p type of selecting from the gang that is made up of Mg, Zn, Cd and Hg mixes up material; N type from the IV family of periodic table mixes up material; The p type of selecting from the gang that is made up of C and Si mixes up material; Or the n type of selecting from the gang that is made up of Si, Ge, Sn, S, Se and Te mixes up material; This doped semiconductor is mixed up in this semi-conductive growth course.

In another scheme, the system that is used for assembling from the teeth outwards one or more elongated structures is provided, this system comprises: the device of the liquid that being used for flows from the teeth outwards comprises one or more elongated structures; One or more elongated structures align from the teeth outwards to form the device of elongated structure array with being used for.

And in another embodiment, provide the system that is used for assembling from the teeth outwards one or more elongated structures, wherein, have in the elongated structure one or more be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; And wherein this system comprises: be used for making the surface to adapt to the device and being used to that one or more elongated structures are adsorbed onto the function of lip-deep ad-hoc location and use these one or more functions by one or more elongated structures being adsorbed onto the align device of one or more elongated structures of ad-hoc location.

In another embodiment, provide the system that is used for assembling from the teeth outwards a plurality of elongated structures, wherein, have in the elongated structure one or more be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; And wherein this system comprises and is used for a plurality of elongated structures are deposited to lip-deep device, and is used for surface charging with at the device that produces electrostatic force between two or more of this a plurality of elongated structures.

In another embodiment, provide the system that is used for assembling from the teeth outwards a plurality of elongated structures, wherein, one or more in the elongated structure be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; And wherein this system comprises: be used for disperseing on the liquid phase surface one or more elongated structures to form the device of Langmuir-Blodgett film; Be used to compress the device of this Langmuir-Blodgett film; With being used for the Langmuir-Blodgett film transfer of compressing is arrived lip-deep device.

In another embodiment, provide the system of assembling a plurality of one or more elongated structures from the teeth outwards, wherein, have at least in the elongated structure one be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, this semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up; And wherein this system comprises: the device that is used for disperseing one or more elongated structures on scalable matrix; Be used for stretching in one direction this scalable matrix to produce the device that causes the shear stress that at least one elongated structure aligns on this direction on one or more elongated structures; Be used to remove the device of scalable matrix; And the elongated structure of at least one alignment transferred to lip-deep device.

Other feature and advantage of the feature and advantage of embodiment described above and these embodiment can more easily be understood from following detailed description and be estimated, and should read detailed description together with accompanying drawing.

Description of drawings

For the present invention is described better, the mark that also contrasts in the accompanying drawing is described, and accompanying drawing is as follows:

Fig. 1 is according to the semiconductor of giving an example of embodiment of the present invention or the stereogram of nano wire.

Fig. 2 is an example schematic of making the laser auxiliary catalysis growth course of semiconductor nanowires.

Fig. 3 is the schematic diagram that shows nanowire growth.

Fig. 4 is the schematic diagram of giving an example of the method for control nanowire diameter.

Fig. 5 is the schematic diagram that is deposited on the nano wire manufacture method of marginal surface.

Fig. 6 is that steam is deposited on the template of prolongation or the schematic diagram of nanowire growth wherein.

Fig. 7 A-7E is that the assembling of semiconductor nanowires rectangle forms schematic representation of apparatus.

Fig. 8 A-8C shows the different functional relations of the silicon nanowires electric current of level and gate voltage to bias voltage of mixing up.

Fig. 9 A-9B demonstration different phosphate is mixed up the functional relation of the silicon nanowires electric current of level and gate voltage to bias voltage.

Figure 10 A-10B shows the energy band spectrum to p type and n type silicon nanowires device respectively.

Figure 11 A-11B is presented at the current-voltage curve that depends on temperature that records in the silicon nanowires that severe boron mixes up.

Figure 12 is a schematic diagram, and expression is grown as the GaP semiconductor nanowires of the accurate qualification of catalyst with monodispersed aurosol.

Figure 13 A represents from the FE-SEM image of the synthetic nano wire of 28.2 nano-colloids.

Figure 13 B is illustrated in the TEM image of another line in the same sample.

Figure 14 A-14C represents the histogram from the diameter of the measurement of the nano wire of the colloidal growth of different diameters.

Figure 14 D is a histogram, and expression utilizes aforesaid method and the diameter of the nanowire growth of colloid of no use, and wherein used laser produces gold nano bunch and GaP reactant.

Figure 15 represents the pseudo-binary phase diagraml of gold and GaAs.

Figure 16 A-16C represents the FE-SEM image with the different nano wires of laser auxiliary catalysis growth.

Figure 17 A represents that diameter is the diffraction contrast TEM image of the GaAs nano wire of about 20 nanometers.

Figure 17 B-17D represents the high definition TEM image of the nano wire of different-diameter.

Figure 18 A represents the FE-SEM image with the CdSe nano wire of laser auxiliary catalysis growth.

Figure 18 B represents that diameter is the diffraction contrast TEM image of the CdSe nano wire of 18 nanometers.

Figure 18 Contract represents that diameter is the high definition TEM image of the CdSe nano wire of about 13 nanometers.

Figure 19 is the schematic diagram of expression with the GaN nano wire of laser catalytic growth.

Figure 20 A represents the schematic diagram of a large amount of GaN nano wires that usefulness laser catalytic growth is synthesized.

Figure 20 B is illustrated in the PXRD Butut that writes down on the body GaN nano wire.

Figure 21 A shows the diffraction contrast TEM image of GaN nano wire, and this nano wire finishes with the nanoparticle of the multiaspect shape of higher (black) contrast.

Figure 21 B represents that another diameter is approximately the high definition TEM image of the GaN nano wire of 10 nanometers.

Figure 22 A-22C represents that mixing up with electricity of InP nano wire transport.

Figure 23 A-23D represents crossed nanowire node and electrical properties.

Figure 24 A-24D represents the optical characteristics of nano wire P-N node.

Figure 25 A represents from the EL image of p type Si and the acquisition of n type GaN nano-node.

Figure 25 B represents the functional relation for the electric current and the voltage of different gate voltages.

Figure 25 C represents the EL collection of illustrative plates for the nano-node of Figure 25 A.

Figure 26 A-26D is illustrated under the electric field with parallel or rectangle assembling nanometer line.

Figure 27 A-27F represents the silicon nanowires node that intersects.

Figure 28 A-28D represents the silicon nanowires bipolar transistor that n+pn intersects.

Figure 29 A-29D represents the reverser and the tunnel diode of assisting.

Figure 30 A-30B represents to be used for the Flow Control channel design of mobile assembling.

Figure 31 A-31D represents the parallel assembling of nano-wire array.

The assembling of Figure 32 A-32D indication cycle nano-wire array.

Figure 33 A-33E represents the layer assembly and the transportation measurement of crossed nanowire array.

Embodiment

In a scheme, the invention provides and be used in checkly on very little space scale mixing up such as semi-conductive material, and dopant material on position toward each other layout to generate the technology of useful device.One group of embodiment relate to as required be that the material (for example: boron, aluminium, phosphorus, arsenic etc.) that mixes up that n type or p N-type semiconductor N are selected comes doped semiconductor.

In various embodiments, the in check semiconductor that the present invention relates to select from indium phosphide, GaAs, gallium nitride, cadmium selenide and zinc selenide mixes up.In this group embodiment, can be used to form the p N-type semiconductor N including, but not limited to the dopant of zinc, cadmium or magnesium, and can be used as the material that mixes up that forms the n N-type semiconductor N from these materials including, but not limited to the dopant of tellurium, sulphur, selenium or germanium.These materials define the direct gap semiconductor material, and these are known with the silicon that mixes up to those of ordinary skills.The present invention expects that any silicon that mixes up of use or direct gap semiconductor material are used for various uses.

As used herein, " width " of object is a point from the periphery of object, through the air line distance of the center of object another point to the object periphery.As used herein, " width " or " cross sectional dimensions " of a point is along the cross-section center by this point and connects the air line distance of two points on the cross-sectional perimeter on the longitudinal axis of the object that elongates.

As used herein, the object of " elongation " (for example: semiconductor or its section) is on the arbitrfary point of the longitudinal axis of object, and the ratio of the Breadth Maximum of the length of object and this point was greater than 2: 1 object.

As used herein, " longitudinal axis " that elongates object is the maximum sized axle along this object.

As used herein, " length " of elongating object is the distance of the end to end along the longitudinal axis from object.

As used herein, " vertical section " of elongating object is to elongate the part of object along the longitudinal axis that elongates object, this part may have any greater than zero the length smaller or equal to object length.

As used herein, be the longitudinal axis plane orthogonal of crossing elongation object and object at this point at " cross section " of any on the longitudinal axis that elongates object.

As used herein, " column " object is to have the outside that shape is similar to cylinder, but does not limit or reflect the object of the character of any relevant this interior of articles.In other words, the object of the column inside that may have solid inside or also may have hollow.

As used herein, " nano wire " or " NW " is the semiconductor that elongates, it is the semiconductor of nanoscale, this semiconductor along have on any point of its length at least one cross sectional dimensions and, in certain embodiments, the cross sectional dimensions of two quadratures, this size is less than 500 nanometers, preferably less than 200 nanometers, better less than 150 nanometers, more better less than 100 nanometers, better again, better, better, better even preferably less than 5 nanometers less than 10 nanometers less than 20 nanometers less than 50 nanometers less than 70 nanometers.The semi-conductive cross section that elongates may have including, but not limited to circle, square, rectangle, oval-shaped arbitrary shape.The shape that comprises regular and irregular.

As used herein, " nanotube " or " NT " is the nano wire with hollow core.

As used herein, " body mixes up " object (for example: semiconductor or its section) is to mix up the mixed fully object of lattice that material is spreaded all over object, and only to be blended into the object of specific region relative anti-with mixing up material for this.For example, generally after the sill growth, mix up, mix up material like this and only extend to the limited distance in crystallization dot matrix (crystal line lattice) inside from surface or the outside of carbon NT such as some objects of carbon NT.In addition, carbon NT often is combined into the sill that the tubular conclusion of the business of nido replaces and mixes up based material layer, and not spreaded all over the crystallization dot matrix of sill mixed so that mix up material.

Describe as used herein " nano wire " or " NW ", " mixing up " expression body mixes up.Therefore, as used herein, " mixing up nano wire " or " mixing up NW " is that body mixes up nano wire.

As used herein, object " array " (for example: nano wire) comprise a plurality of these objects.As used herein, " crossed array " be have at least in the object one or with object in another or with the signal node (for example: electrode) contact.

As used herein, " coupling " to win object or contact with second object of making of being placed of first object (for example: nano wire or larger sized structure) of second object, perhaps with second object enough near character (for example: electrical properties, optical property, magnetic properties) to influence second object.

Like this, the present invention has expected elongation in a scheme semiconductor, this semiconductor is mixed up (n type or p type) by any way, has the minimum widith less than 500 nanometers.In other embodiment, this semiconductor may have less than about 200 nanometers, less than about 150 nanometers or less than the minimum widith of about 100 nanometers.This semiconductor preferably has the minimum widith less than about 80 nanometers, and is better less than about 70 nanometers, better less than about 50 nanometers.Also comprise littler width, have at least one less than about 20 nanometers, less than about 10 nanometers or less than the size of about 5 nanometers such as those.In certain embodiments, the cross sectional dimensions of these semi-conductive two quadratures may be less than top specified value.This scheme ratio, the ratio of promptly semi-conductive length and Breadth Maximum was greater than 2: 1.In other embodiment, this scheme ratio may be greater than 4: 1, greater than 100: 1, even greater than 1000: 1.Such as these semiconductor, on very little size, found multiple use as describing below.

Fig. 1 shows columnar semiconductor L1, for example, and such as the perspective view of the semi-conductive example of wire of nano wire.Columnar semiconductor L1 has length L 2 and longitudinal axis L3.At the some L5 place on longitudinal axis L3, columnar semiconductor L1 has a plurality of width L4 across cross section L6, and wherein one of width L4 is at a minimum widith at L5 place.

Such semiconductor may be freestanding.As used herein, " stand alone type " object is a bit to be free of attachment to other objects, the object that perhaps exists in solution in certain of its life cycle.

In addition, such semiconductor may be the semiconductor that body mixes up.As used herein, " body doped semiconductor " object (for example: be to mix up material to be spreaded all over the mixed fully semiconductor of semi-conductive lattice the section of object or object), this and mix up material only to be blended into the semiconductor of specific region opposite.For example, generally after semiconductor growing, mix up, mix up material like this and only extend to the inner limited distance of crystallization dot matrix (crystalline lattice) from surface or the outside of carbon NT such as some semiconductors of carbon NT.In addition, carbon NT often is combined into nido pipe (that is: cylinder) and forms semiconductor and doped semiconductor layer alternately, and not spreaded all over semi-conductive crystallization dot matrix mixed so that mix up material.Should be appreciated that " body mixes up " neither limits or reflect doping concentration or the quantity that semiconductor is interior, it must be uniform also not representing to mix up.

For doped semiconductor, this semiconductor may be mixed up in this semi-conductive growth course.The semiconductor that doped semiconductor may cause mixing up in growth course is the character that body mixes up.In addition, the semiconductor that mixes up like this may controllably be mixed up, can Be Controlled so that mix up the concentration of material in the doped semiconductor, and therefore duplicate, make that semi-conductive like this commodity production becomes possibility. with being stabilized

Use all semiconductor energies as described above enough to make multiple device.Such device comprises electronic device, optics, mechanical devices or its combination in any, comprises photoelectric device and electromechanical integration device.

In one embodiment, use to have and made field effect transistor (FET) less than the minimum widith of 500 nanometers or the doped semiconductor of above-described other width.Doped semiconductor possibility or p type or n type, this is known to those of ordinary skill that FET makes the field.Though it is known using the FET of nanotube, just known to inventor's the knowledge, nanotube is selected in existing configuration randomly, and be not metallic to nanotube or semiconductive control.Under these circumstances, low-down percentage has function in the device, perhaps less than 1/20th, or 1/50th, perhaps near one of percentage.The present invention expects that in check nano wire mixes up so that manufacture process according to be far longer than 1/50th device be have function technology, can relate to and make the FET that function is arranged.For example, this technology may relate to mixes up nano wire, makes FET with it then.

The present invention also provides the complementary inverter that gently mixes up (complementary metal oxide semiconductors (CMOS)), this inverter is by becoming the n N-type semiconductor N simply with p N-type semiconductor N contact configuration, for example, the layout of the nano wire of n type by intersection as follows and p N-type semiconductor N.

According to the present invention, also passed through to have the tunnel diode of the semiconductive element that heavily mixes up.Use the semiconductor that heavily mixes up but not gently mix up, can become tunnel diode with similar with complementary inverter or identical layout." heavily mix up " and " gently mixing up " is the clear terms of understanding its implication of those of ordinary skills.

An importance of the present invention is to make the ability of any basically electronic device that can be benefited from the n type that closes on and p N-type semiconductor N element, and wherein, element is made in advance, and (mix up in independence and separating process, element is separated from one another when mixing up.), after mixing up, be caught contact then.These are different with the typical prior art configuration, in the prior art, single semiconductor is that n mixes up in a zone, and is that p mixes up at close region, but n N-type semiconductor N zone and p N-type semiconductor N zone are adjacent at first before mixing up, and mix up preceding or mix up after mobile mutually each other.That is to say, be in the n type of noncontact configuration and p N-type semiconductor N at first and be caught and contact with each other to be formed with the electronic device of usefulness.According to this scheme of the present invention, can make any device basically, those of ordinary skills can use the n type and the p N-type semiconductor N of combination by expectation manufacturing.The example of these devices includes, but are not limited to: field effect transistor (FET), bipolar junction transistor (BJT), tunnel diode, complementary inverter, luminescent device, optical sensor spare, door, inverter, AND, NAND, OR and NOR door, latch, trigger, register, switch, clock circuit, static state or dynamic memory and array, state machine, gate array and any other dynamically or sequential logic or other comprise the digital device of programmable circuit.Also comprise analogue device and circuit, including, but not limited to: analog circuit and the mixed signal device and the signal processing circuit of amplifier, switch and other use active transistor devices.

The electronic device that comprises semiconductor nanowires can be by for example signal controlling of electricity, light or magnetic.Control may relate between two or more discrete states switches, and maybe may relate to the continuous control of nano wire electric current, i.e. simulation control.Except that the signal of telecommunication, light signal and magnetic signal, the device face that can be pressed is controlled like this:

(1) device can respond the kind of biological or chemical, and for example DNA, protein, metal ion switch.More generally under the situation, these kinds are charged or have dipole.

(2) device can respond mechanical stretching, vibration and crooked the switching.

(3) but the device response temperature switch.

(4) but device response environment pressure switch.

(5) but the motion of device response environment gas or liquid switch.

A lot of device of the present invention has specific use to intersection p/n, and these p/n knots may be the n type of intersection and the knot of p type nano wire.The p/n knot that intersects is limited by at least a n N-type semiconductor N and at least a p N-type semiconductor N, and at least a portion of every kind of material contacts with at least a portion of another kind of material, and every kind of semiconductor comprises the part that other elements of discord contact.They can be by mixing up nano wire in advance, uses the technology that describes below to dispose near being placed on each other then.

Also provide light emitting source according to the present invention, in light emitting source, electronics and hole are in conjunction with luminous.Light emitting source of the present invention one type comprises at least one intersection p/n knot, particularly p type of Jiao Chaing and n type nano wire.Use in the configuration of intersection nano wire in the present invention this and other, line needs not to be, but also can be vertical.When forward direction is setovered (positive charge puts on the p molded lines and negative electrical charge puts on the n molded lines), electronics flows to knot in the n molded lines, and flows to knot in the n molded lines in the hole.Hole and electronics at the knot place in conjunction with luminous.Can use other technology to cause one or more nano wires or other semiconductor light emittings, this is described in greater detail below.

On size dimensions of the present invention, can be by controlling at least one, preferably whole two intersections are to form the size of component control emission wavelength of light-emitting junction.For example, when using nano wire, the nano wire with bigger minimum dimension (line of broad) will provide the emission of lower frequency.For example, under the situation of indium phosphide, under the size dimensions relevant with typical manufacture process, material is sent out the light of 920 nanometers.Under size dimensions of the present invention, emission wavelength can be controlled in the wavelength that is shorter than 920 nanometers, for example in 920 nanometers between 580 nanometers.Wavelength can be selected in this scope, such as 900,850,800,750,700 nanometers etc., depends on the size of line.

Like this, a scheme of the present invention relates to than the semiconductor that causes launching luminous higher luminous semiconductor light emitting source of frequency under its body state, and this of glow frequency is provided at and often is known as quantum limit here." body state ", herein in the context expression its show as the state that has greater than the part of the element of the minimum dimension of 500 nanometers or element." body state " also can be defined as causing the natural wavelength of material or the state of tranmitting frequency.The invention provides this class control of the tranmitting frequency of any semiconductive or doped semiconductor material basically.

Assembling, or the controlled from the teeth outwards layout of nano wire can realize by using electric field alignment nano wire.Electric field produces between electrode, and nano wire is placed between the electrode (being preferably in the zone that is flowed in the suspension liquid between the electrode), and will align in electric field and can cross over distance between electrodes by this and also contact with each electrode.

In another configuration, each contact quilt is layout relative to one another, and each contact is made into taper to form the point that points to each other.To be adsorbed distance between the leap electrode by the electric field that produces between such point, and the single nano wire that contacts with each electrode.In this way, each nano wire can be assembled to each at an easy rate between the electrical contact.Cross spider configuration comprises that many crosspoints (many parallel lines at first direction are intersected by many parallel lines on vertical or subvertical second direction) can expect that the position that is positioned at forms at an easy rate by at first contact (electrode) being navigated to the cross spider end opposite.Electrode, or the contact can be by typical micro-fabrication technology manufacturing.

These assemblings receive and can be replenished or be substituted by the location configuration, and this configuration relates to the direction of the moving orienting device of positioning liquid flow with the position that the guiding fluid that comprises the nano wire of suspension had the nano wire expectation and be placed in.Nano wire solution can be prepared as follows: after nano wire was synthesized, they were transferred to (for example ethanol) in the solvent, be carried out then ultrasonic wave several seconds to a few minutes to obtain stable suspension.

Another kind of configuration relates to the surface that formation comprises the zone of optionally adsorbing nano wire, and this zone is surrounded by their zone of absorption, non preference ground.For example ,-NH2 can be present in the lip-deep special style, and that pattern has absorption nano wire or the nanotube that amine is had the surface functionality of absorption affinity.The known technology moulding can be used in the surface, such as the electron beam moulding, such as at open or the No.5 that on April 30th, 1996 authorized of disclosed No.WO96/29629 international monopoly on July 26th, 1996,512, " soft lithography " described in No. 131 United States Patent (USP)s, each in them is all incorporated this paper here into by quoting as proof.Additional technology is described in No. 216 U.S. Patent applications at the No.60/142 that Lieber etc. submitted on July 2nd, 1999, all is merged in this paper here by quoting as proof.Use can produce the liquid flow raceway groove that is beneficial to the size dimensions of placing nano wire from the teeth outwards such as describing, also all incorporating the multiple technologies that are introduced into that this paper uses here into by quoting as proof on September 18th, 1997, disclosed No.WO97/33737 international monopoly was open.Other technology comprises that those at the No.09/578 that on May 25th, 2000 submitted, describe in No. 589 U.S. Patent applications, all incorporates it into text by quoting as proof here.

Fig. 7 A-7E shows a kind of like this use dimethione (PDMS) mould, is used to produce the technology of liquid flow raceway groove.Raceway groove can be produced and be applied to the surface, and mould can be removed and be applied to a different directions so that cross flow one configuration or different configuration to be provided.

Flow channel configuration may comprise have less than 1 millimeter, preferably less than the raceway groove of 0.5 millimeter, 200 microns or littler minimum widith.Such raceway groove is by using the photolithographic fabrication negative and being made at an easy rate at negative top casting PDMS, as being described during the patent application and the world of reference in the above are open.Assembling than large scale also is possible.Can only be limited by the feature of raceway groove by the area with the nano-wire array moulding, this raceway groove can be with described the same big.

Semiconductor nanowires has the nuclei of crystallization of the non-setting oxide of coated 1 to 10 nanometer thickness.This allows the surface to adjust to use various functional groups to stop the surface.For example, the end that we can use with nanowire surface reaction be alkoxy silane (for example :-Si (OCH3)), the other end comprise (1)-CH3 ,-COOH ,-NH2 ,-SH ,-OH, the activable molecular moiety of hydrazides and aldehyde group (2) light: the molecule of aryl acid, fluoro aryl acid, Benzophenone etc.The substrate/electrode surface is bound or are not tied to substrate and electrode also with certain functional group adjustment so that nano wire is able to interact based on it especially.

Surface-functionalized nano wire also can be coupled to the substrate surface with functional crosslinking agent, for example: the two merit crosslinking agents of (1) homotype, comprise the two merit NHS esters of homotype, the two merit polyurethane of homotype, the two merit sulfhydryl-group activity bridging agents of homotype, difluoro bezene derivative, the two photosensitive bridging agents of merit of homotype, the two merit aldehyde of homotype, di-epoxide, the two merit hydrazides of homotype etc., (2) isodigeranyl merit crosslinking agent, (3) three merit crosslinking agents etc.

Also can use the biomolecule identification to assist is assembled to nano wire on electrode and the substrate.For example, we can use physical absorption or covalently bound a biological binding to being fixed to nanowire surface and another being fixed on substrate or the electrode.Some good biological identifications are: DNA hydridization, antibody-antigen binding, biotin-avidin (or streptavidin) binding.

A lot of body doped semiconductor that can be used to grow such as nano wire are arranged, and the technology that is used for mixing up in growth course these nano wires.

For example, SiNW (the nanoscale semiconductor of elongation) can use laser auxiliary catalysis growth (LCG) synthetic.As shown in Figures 2 and 3, the expectation material (for example: InP) and catalysis material (for example: Au) laser vaporization of the synthetic target of Zu Chenging has produced red-hot, fine and close steam, and this steam promptly is condensed into liquid nano group by the collision with buffer gas.When liquid nano group becomes supersaturation, grow with desired beginning mutually, and under the condition that reactant exists, continue.When nano wire has passed through red-hot conversion zone or growth termination when temperature is turned down.Gold is often used as catalyst, the nanoscale semiconductor of the elongation in the wide range that is used to grow.But catalyst not only is confined to gold.Material such as the wide range of (Ag, Cu, Zn, Cd, Fe, Ni, Co...) can be used as catalyst.Usually, anyly alloy can be formed, catalyst can be used as but the semi-conductive element of discord expectation forms the more multistable metal of deciding compound with the semiconductor of expectation.Buffer gas may be Ar, N2 and other inert gases.Sometimes, the mixture of H2 and buffer gas is used to avoid by the undesirable oxidation of residual oxygen.When wishing, reactive gas (for example: the ammonia that is used for GaN) also can be introduced into.The key point of this process is that laser ablation produces liquid nano group, its direction of growth that this nanoclusters has defined the size of crystallization nano wire and finger mark subsequently.The diameter of final nano wire is by the size decision of catalyst group, and this can pass through control growing condition (for example: background pressure, temperature, flow velocity ...) conversely and be changed.For example, lower pressure generally produces the nano wire that has than minor diameter.Further diameter control can realize by the catalysis group that uses homogeneous diameter.

Utilize the basic principle identical with LCG, if the homogeneous diameter nanoclusters is (less than the variation of 10-20%, depend on nanoclusters have many evenly) be used as catalysis group, then can produce and have the nano wire that uniform-dimension (diameter) distributes, wherein the diameter of nano wire is by the size decision of catalysis group, as shown in Figure 4.By the control growing time, can grow has the nano wire of different length.

Use LCG, can mix up nano wire neatly by one or more being mixed up material introducing synthetic target (for example: (being used for the germanium that InP mixes up)).Doping concentration can mix up element ground relative populations Be Controlled by control, and general 0-20% is introduced into the synthetic target.

Laser ablation can be used as the method for the vapor-phase reactant of the growth that produces the catalysis group nano-scale structures relevant with other with being used for nano wire.Be not limited to laser ablation but make.A lot of methods (for example: the heat vaporization) can be used to produce the gas phase and the catalysis group that are used for nanowire growth.

Another technology that can be used for grow nanowire is catalytic chemical gaseous phase deposition (C-CVD).C-CVD utilizes the basic principle identical with LCG, and only in the C-CVD method, reactant molecule (for example: silane with mix up material) is from gas molecule in space (opposite with the vapor source from laser ablation).

In C-CVD, can be by mixing up nano wire mixing up element introducing vapor-phase reactant (for example: be used for diborane and phosphane that n type and p type nanometer are mixed up nano wire).Import mixing up element ground relative populations and can control doping concentration in the synthetic target by control.Unnecessary acquisition have with gas reactant in identical mix up than the semiconductor of nanoscale of elongation.But,, can copy nano wire with identical doping concentration by control growing condition (for example: temperature, pressure ...).And only, can on very on a large scale, change doping concentration by changing the ratio (for example: 1ppm to 10%) of gas reactant.

Other several semi-conductive technology of elongation nanoscale that can be used to grow such as nano wire are arranged.For example, any nano wire in the multiple material can be by gas-solid process directly from vapor phase growth.In addition, also can produce nano wire, as shown in Figure 5 by deposition on the edge on the pattern surface of surface step and other types.In addition, by in any general elongation template/on vapour deposition can grow nanowire, for example, as shown in Figure 6.Porous membrane may be porous silicon, anodised aluminium or two block copolypeptides and any other similar structures.Natural fiber may be dna molecular, protein molecule, carbon nano-tube, any other elongated structure.For above-described all technology, source material may be from solution mutually but not gas phase.Although solution mutually in, except above-described template, template may be the column colloidal ion (column micelles) that is formed by surfactant molecule.

Use one or more in the above-described technology, the elongation nanoscale semiconductor that can grow and comprise semiconductor line and doped semiconductor line.Such body doped semiconductor may comprise semiconductor and mix up the various combinations of the material of material.Be an incomplete tabulation of these materials below.Can use other material.These materials include, but are not limited to:

Basic semiconductor:

Si, Ge, Sn, Se, Te, B, diamond, P

Substantially semi-conductive solid solution:

B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn

IV-IV family semiconductor:

SiC

III-V family semiconductor:

BN/BP/BAs、AIN/AIP/AlAs/AlSb、GaN/GaP/GaAs/GaSb、InN/InP/InAs/InSb

The III-V alloy:

Two or more combination in any in the above-claimed cpd (for example: AlGaN, GaPAs, InPAs, GaInN, AlGaInN, GaInAsP...)

The II-VI semiconductor:

ZnO/ZnS/ZnSe/ZnTe，CdS/CdSe/CdTe，HgS/HgSe/HgTe，BeS/BeSe/BeTe/MgS/MgSe

II-VI alloy: the two or more combination in any in the above-claimed cpd ((ZnCd) Se for example, Zn (SSe) ...)

The alloy semiconductor of II-VI and III-V: any II-VI and a kind of III-V combination of compounds, for example, (GaAs) _x(ZnS) _1-x

The IV-VI semiconductor:

GeS，GeSe，GeTe，SnS，SnSe，SnTe，PbO，PbS，PbSe，PbTe

The I-VII semiconductor:

CuF，CuCl，CuBr，CuI，AgF，AgCl，AgBr，AgI

Other semiconducting compounds:

II-IV-V ₂：BeSiN2，CaCN2，ZnGeP2，CdSnAs2，ZnSnSb2...

I-IV ₂-V ₃：CuGeP3，CuSi2P3...

I-III-VI ₂：(Cu，Ag)(Al，Ga，In，Tl，Fe)(S，Se，Te)2

IV ₃-V ₄：Si3N4，Ge3N4...

III ₂-VI ₃ Al2O3，(Al，Ga，In)2(S，Se，Te)3

III ₂-IV-VI：Al2CO...

For IV family semi-conducting material, p type alloy can be selected from III family, and n type alloy can be selected from V family.For silicon semiconductor material, p type alloy can be selected in the group that Al and In form from by B, and n type alloy can be selected in the group that As and Sb form from by P.For III-V family semi-conducting material, p type alloy can be from comprising Mg, and Zn selects in the II family of Cd and Hg, or selects from the IV family that comprises C and Si.N type alloy can be from by Si, Ge, and Sn selects in the group that S and Te form.Will be understood that the present invention is not limited to these alloys.

Embodiment

Doping in the nano wire and electron transport

The n type and the p type silicon nanowires (SiNWs) that have prepared monocrystalline, and measure by electron transport it is characterized.Just as used in this, " monocrystalline " object is meant covalent bond, ionic bond in whole object, or the object of the combination of the two.Such monocrystalline object can comprise defective in crystal, but phase region is in comprising one or more nonionic keys or covalent bonds, and only is the tight object of adjacent crystal mutually.In SiNWs vapor phase growth process, the growth of laser auxiliary catalysis is used to controllably introduce boron or phosphorous dopants.(two terminal, gate-dependent) measurement shows that these materials have the behavior as n type and p section bar material respectively for two hold-carryings of carrying out on the SiNWs of independent boron doping and phosphorus doping and grid dependence.The estimated value that transports the carrier mobility that measures by the grid dependence is consistent with the diffusion value of transporting.In addition, these studies show that SiNWs carries out heavy doping and are possible near metallic state.The temperature done on heavily doped SiNWs relies on to measure and shows the sign that does not have coulomb blockade when temperature is reduced to 4.2K, therefore confirmed SiNWs structurally with electricity on consistency.We will discuss the potential application of doping SiNWs.

At present, one dimension (1D) nanostructure as nano wire and nanotube there is strong interest, this is because how their checkings influence the relevant basic principle of physical property with dimension and size, and the potentiality of construction unit that can be used to produce the key of nanometer technology.Because measurable and controllable conductibility will be crucial for the electronics application of a lot of nanoscales, the electron transport by these " lines " is even more important for the 1D nanostructure.Up to now, most effort all concentrates on the electron transport in the carbon nano-tube.These researchs have shown a plurality of interesting essential characteristics and have proved the potentiality that is used for as the device of field effect transistor, these interesting features comprise the existence of the coherency states that extends beyond hundreds of nanometers, trajectory conduction under the room temperature, and the behavior of Luttinger liquid.But nanotube has restriction clearly.The particular growth that depends on the pipe of the metallicity of diameter and helicity or semiconductive at first, sensitively is impossible.So the research that depends on the particular conductivity behavior must rely on accidental observation.Secondly, the controlled doping of semiconducting nanotubes is impossible, although this is crucial to device application potentially.But semiconductor nanowires can overcome these restrictions of carbon nano-tube.These nano wires will not rely on diameter and keep characteristic of semiconductor, and, should be possible be to utilize a large amount of knowledge of semi-conductor industry to come doped nanowire.

So far, we have reported that here first example and the use of the controlled doping of SiNWs transport the sign of measurement to the nano wire electrical property of these doping.Grid rely on and two hold-carrying measurements have proved that (P-doped) SiNWs of boron doped (B-doped) and phosphorus doping has the behavior as n type and p section bar material respectively, and the carrier mobility estimated value has pointed out the diffusion in these nano wires to transport.In addition, the temperature of being done on heavily doped SiNWs relies on to measure and shows the sign that does not have coulomb blockade when temperature is reduced to 4.2K.

Use the synthetic SiNWs of our laser auxiliary catalysis growth described above (LCG).Briefly, can use Nd-YAG laser (532nm; The 8ns pulse duration, the 300mJ/ pulse, the 10Hz) gold target of ablating, this produces the gold nano cluster catalytic particulate in reactor.SiNWs can be at the SiH as reactant ₄Air-flow in grow.Such SiNWs can be by mixing B in reagent flow ₂H ₆Come doped with boron, can be by using Au-P target (99.5: 0.5wt%, Alfa Aesar) and coming Doping Phosphorus at the extra red phosphorus in reactant gas porch (99%, Alfa Aesar).Transmission electron microscope (TEM) is measured proof, uses the SiNWs of the doping of this technology growth to have by foregoing SiO _xThe monocrystalline silicon core that sheath wrapped up.

Use the electron beam lithography of standard to make by JEOL 6400 inscription devices (writer) and be connected to electrically contacting of independent SiNWs.This nano wire is supported on the Si substrate (resistance 1-10 Ω cm, 600nm SiO2, Silicon Sense company) of oxidation, and the conduction Si as back of the body grid is arranged below this substrate.Use the Al (50nm) of hot evaporation to make the contact that is connected SiNWs with Au (150nm).The self-control system that the following noise of the control that uses a computer is less than or equal to 1pA carries out electron transport and measures.Temperature relies on to measure in the magnetic property measuring system of quantum design (Quantum Design) carries out.

TEM studies show that the SiNWs of boron and phosphorus doping is a monocrystal, does not come the boron in independent a plurality of lines or the doped level of phosphorus are estimated though these measurements do not have enough sensitivity.But we can use electron transport spectrum to prove the existence and relative doped level of p type (boron) and n type (phosphorus) alloy clearly.In these embodiments, when measuring the concerning of the relative nano wire voltage of electric current, use gate electrode to change the electrostatic potential of this SiNWs.Because just (bearing) gate voltage conductivity with inverse change for increasing, whether the nano wire that the variation of the conductivity of the SiNWs that has functional relation with gate voltage can be used to distinguish given is p type or n type.

The typical grid that write down on the SiNWs that the B that originally seeks peace mixes rely on the curve of electric current and bias voltage (I-V) shown in Fig. 8 A-C.The line that mixes at two B shown in Fig. 8 B and the 8C is that usage rate is the SiH of 1000: 1 and 2: 1 respectively ₄: B ₂H ₆Synthesize.Usually, the I-V curve at the two poles of the earth is linear, and therefore pointing out metal electrode and SiNWs is ohmic contact.Observedly in the intrinsic nano wire little non-linearly show that this contact is a non-ohm slightly.The I-V data analysis of record obtains 3.9 * 10 during to zero gate voltage drain current (Vg=0) ²The resistivity of Ω m, the data interpretation during zero gate voltage drain current contact resistance and the SiNW contribution of going up oxide covering.Importantly be that when Vg just (is being born) when increasing, conductivity increases (minimizing).This grid dependence shows that SiNW is the semiconductor that mixes of p (below discuss).Similar I-V that the SiNW that mixes for light B writes down and the curve of Vg show that it also is the p type.And, resistivity (1 Ω-, proved that clearly we are from chemically controlling the ability of conductivity that this B mixes cm) than little two orders of magnitude of intrinsic SiNW.This back one viewpoint is also supported by the I-V measurement on the heavily doped SiNWs of B shown in Fig. 8 C.This line has very low resistivity 6.9 * 10-3 Ω-cm, uses the dependence that illustrates Vg; Also promptly, Vg be 0 and the I-V data that write down during 20V overlap.These results are with consistent near the high carrier concentration of metal boundary.

We have also measured in light dope and heavily doped SiNWs and have depended on transporting of Vg.The I-V that writes down on lightly doped nano wire is non-linear a bit, and this has shown nonideal contact between electrode and the nano wire, and the Vg dependence is opposite with the dependence that the SiNWs that observes the B doping obtains.Importantly, this observed grid dependence is consistent with the dependence of the desired n section bar material that mixes as P.When Vg=0, the resistivity of this estimated line is 2.6 * 102 Ω-cm.This higher relatively resistivity has been pointed out low doped level and/or low mobility.In addition, also prepare and studied the SiNWs of heavy P doping.The I-V data that write down on the line that typical heavy P mixes are linear, have the resistivity of 2.3 * 10-2 Ω-cm, do not have to show the dependence to Vg.Low-resistivity (little four orders of magnitude of sample that mix than light P) and Vg dependent/non-dependent have proved that high carrier concentration also can be mixed by the P of SiNWs and have produced.

Top conclusion has proved that boron and phosphorus can be used to the conductivity that several order of magnitude ground change SiNWs, and for boron and phosphorous dopants, the SiNWs of doping is on the contrary in response to the Vg that just (is bearing).In fact, the Vg dependence is to mixing with the p type (hole) of boron among the SiNWs and providing very strong evidence with n type (electronics) doping of phosphorus.With reference to schematic diagram shown in Figure 10 A and 10B, can understand viewed grid dependence, two figure shown electrostatic potential SiNW can with on effect.In these figure, n type nano wire (a) all contacts with metal electrode at two ends with p type nano wire (b).Because for traditional metal-semiconductor interface, SiNW band curvature (for the p type upwards, downward for the n type) is so that the Fermi level of nano wire is consistent with being with of hard contact.When Vg＞0, this can be with reduction, and this will consume the hole among the SiNWs that B mixes and suppress conductivity, but causes electronics among the SiNWs that P mixes to be assembled and strengthen conductivity.On the contrary, Vg＜0 will raise, and this can be with, and increases the conductivity of B doping (p type) SiNWs and the conductivity of (n type) nano wire that reduction P mixes.

In addition, estimate that by transconductance the mobility of charge carrier rate is possible, dI/dVg=μ C/L2, μ is a carrier mobility here, and C is an electric capacity, and L is the length of SiNW.The electric capacity of SiNW is by C ≈ 2 π ε ε ₀L/ln (2h/r) provides, and ε is a dielectric constant here, and h is the thickness of silicon oxide layer, and r is the radius of SiNW.As desired, find that the relative V of point of dI/dVg is linear for (Fig. 8 B) SiNW of intrinsic (Fig. 8 A) and light B doping to this model.For intrinsic (2.13 * 10-11) and B mix (9.54 * 10-9) SiNW, the slope of dI/dVg produces the mobility of 5.9 * 10-3cm2/V-s and 3.17cm2/V-s respectively.The mobility and the doping content of the nano wire that B mixes are 10 ²⁰Cm ³The desired mobility of block Si suitable.We also notice, although mobility is considerably low in our intrinsic (low doping concentration) SiNW, estimate that this mobility can increase along with the increase of concentration of dopant.Possible is because scattering strengthens in diameter littler (intrinsic) SiNW, and mobility is reduced.We believe that the research of following mobility to have functional relation with diameter (for constant concentration of dopant) should be able to disclose this important viewpoint.

At last, we have carried out the temperature dependent Primary Study of the SiNW of counterweight B doping.The I-V curve that temperature relies on shows that conductivity reduces and reduces along with temperature, as desired to the semiconductor (Figure 11 A and 11B) that mixes.More importantly be that when reducing to the minimum temperature (Figure 11 B) that we can reach, we do not find the sign of coulomb blockade.Can be in owing to Contact Effect, because the measurement of the relation of the relative Vg of high-resolution I-V does not show the mark of coulomb blockade near the little non-linear of nearly V=0.From kT=e ²/ 2C estimates that the coulomb charge effects in the uniform line between the electrode (150nm is thick, the line that 2.3 μ m are long) is lower than needs the temperature of about 26mK.This variation that shows SiNW length and defective consumingly is enough little, so that they can not be island with SiNW " division " effectively, these islands may present coulomb blockade in these temperature.These conclusions are opposite with the research of the SiNW of the lithographic patterning that demonstrates coulomb blockade (pattered), and confirmed our freestanding nano wire high-quality.

Prepared and use the electron transport measurement to characterize the n type and the p type silicon nanowires (SiNWs) of monocrystalline.In SiNW vapor phase growth process, use the laser auxiliary catalysis to grow and controllably introduce boron or phosphorous dopants.Mix and two hold-carryings of the SiNW of phosphorus doping at independent boron, the measurement of grid dependence shows that these materials have the behavior as p type and n section bar material respectively.The estimated value that transports the carrier mobility that measures by the grid dependence is consistent with the diffusion value of transporting, and has shown the sign that the mobility that reduces is arranged in less line.In addition, these studies show that, are possible in conjunction with high concentration of dopant and near metallic state in SiNWs.The temperature dependency measurement of being done on heavily doped SiNWs shows the sign that does not have the single electron charging when temperature is reduced to 4.2K, therefore, and structure and consistency doping of pointing out this SiNWs to have height.

We believe and successfully mix we SiNWs has generated the n type and p section bar material will be opened up infusive chance in nanoscale ground Science and Technology.The SiNWs that mixes will be the candidate that is used for studying in the basic problem that transports of 1D nanostructure.Field effect transistor (EFTs) also is structural research in this article, and using self-assembling technique will be possible in conjunction with many SiNWs field effect transistor to the structure that may be used for the nanoelectronic application.Combination for example the p type in crossed array and n type SiNWs to generate p-n junction also should be possible, this p-n junction also may be considered to the device and the transducer in future.

The SiNW p-n junction that intersects forms by directionally assemble p type (n type) SiNWs on n type (p type) SiNWs.Transport and measure rectification and the rising of the electric current sharp in forward bias (onset) that has shown in reverse biased.The measurement of carrying out simultaneously on the p type that constitutes knot and n type SiNWs has proved with contacting of these nano wires it is (the non-rectification) of ohmic properties, has proved that therefore this rectification behavior is because the p-n junction between two SiNWs.

It is the curve of electric current (I) the relative deviation voltage (V) that writes down on the intrinsic SiNW of 70nm that Fig. 8 A shows under different gate voltages (Vg) at

diameter.Curve

1,2,3,4,5,6 and 7 correspond respectively to Vg=-30, and-20 ,-10,0V, 10,20,30V.Illustration be have hard contact SiNW and exemplary scanning electron microscope picture (scale=10um).It is the I-V data that write down on the SiNW that mixes of the B of 150nm that Fig. 8 B shows at diameter; Curve 1-8 corresponds respectively to Vg=-20, and-10 ,-5,0V, 5,10,15 and 20V.It is the I-V data that write down on the SiNW that mixes of the heavy B of 150nm that Fig. 8 C shows at diameter; Vg=20V (solid line) and 0V (tubbiness line).

It is the I-V data that write down on the SiNW that mixes of the P of 60nm that Fig. 9 A shows at diameter;

Curve

1,2,3,4,5 and 6 correspond respectively to Vg=20,5,1,0 ,-20 and-30V.Fig. 9 B is the I-V data that write down on the SiNW that mixes of the heavy P of 90nm at diameter; Vg=0V (solid line) and-20V (tubbiness line).

Figure 10 A shows the energy band diagram table of p type SiNW device.Figure 10 B shows the energy band diagram table of n type SiNW device.These charts have schematically shown the effect of Vg on two class nano wire electrostatic potentials.

Figure 11 A and 11B show the I-V curve of the temperature dependence of writing down on the SiNW that heavy B mixes.In Figure 11 A,

curve

1,2,3,4,5 and 6 correspond respectively to 295,50, and 200,150,100 and 50K.The I-V data that Figure 11 B writes down on nano wire when showing 4.2K.

The diameter of semiconductor nanowires is selected synthetic

By utilizing intact gold colloid as catalyst in our laser auxiliary catalysis growth (LCG) process, having synthesized diameter is 10,20 and 30nm, and length is greater than the approximate monodispersed sample of the GaP nano wire of the monocrystalline attitude of 10 μ m.In this method, Ga and P reactant that the laser ablation by solid-state GaP produces are immediately by gold nano cluster catalyst guiding becoming nano thread structure.The transmission electron microscope of Zhi Bei nano wire (TEM) studies have shown that the diameter distribution of nano wire is determined by the diameter of nanocluster catalyst in the method.High-resolution TEM shows that these lines are the zincblende lattce structures with monocrystalline of [111] direction of growth, and energy dispersive x ray analysis has confirmed that the nano wire composition is stoichiometric GaP.The semiconductor nanowires that uses dispersed nano cluster catalyst to make to have intact and controlled diameter in conjunction with LCG be grown to serve as possibility on a large scale, so opened up chance from the fundamental property of one dimension (1D) system to the assembling of function nano device.

By using intact gold colloid as catalyst in our laser auxiliary catalysis growth (LCG) synthetic method opinion, having synthesized diameter is 10,20 and 30nm, and length is greater than approximate single dispersed sample of the GaP nano wire of the monocrystalline attitude of 10 μ m.The transmission electron microscope of Zhi Bei nano wire (TEM) studies have shown that the diameter distribution of nano wire is determined by the diameter of nanocluster catalyst in the method.High-resolution TEM shows that these lines are the zincblende (zinc blende) with monocrystalline of [111] direction of growth, and energy dispersive x ray analysis (EDAX) has confirmed that the nano wire composition is stoichiometric GaP.

The promotion of electronics and opto-electronic device miniaturization and the needs that the chemistry and the physics basic principle of nanoscale are understood have been excited the interest in the low dimension semiconductor material recently.Especially, from the viewpoint of basic principle and application, one dimension (1D) system all allows people's excitement.As the fascinating physical phenomenon of the liquid behavior of Luttering, and high-quality, the intact 1D nanostructure of numerous application needs from being interconnected to scanning probe microscopy.Experimental progress in 1D nanostructure field usually has been subject to the ability that has the new material of controlled size, structure and composition in this size range that is created on.

The previous synthetic method of 1D system is used film growth and photoetching technique.Especially, pass through molecular beam epitaxy, then carry out cleavage and the undue growth on cleavage surface and grow the semiconductor quantum well and made " T line ", although " V groove " nano wire is by etched trench from the teeth outwards and then deposit small quantity of material and enter in the formed groove and make.A tangible limitation of these methods is that these nano wires are to be embedded in the substrate, and this has just got rid of the assembling of complicated 2D and 3D nanostructure.Template also is used to the large-scale nano wire of growing.Although be restricted owing to usually producing polycrystalline structure, these methods can provide the length of nano wire and diameter better controlled.

For the development that obtains the general synthetic method of freestanding monocrystalline semiconductor nano wire by the LCG method, important progress has been made in our laboratory.In LCG, the laser ablation of solid target is used to produce simultaneously the metallic catalyst cluster and the active semiconductor atom of nanoscale, and this semiconductor atom produces nano wire by gas-liquid-solid growth mechanism.This method has been used to produce large-scale IV, the nano wire of III-V and II-VI family.We have pointed out, and the catalyst nano cluster has determined the size of line in the growth period process, so people are envisioned that by utilizing monodispersed catalyst nano cluster to produce the line (Figure 12) with narrow distribution of sizes.Here, we use the gold colloid of nanometer diameter to use this method.

By LCG, using diameter is 8.4,18.5 and the gold colloid of the 28.2nm GaP that grown.In these experiments, the catalyst nano cluster is supported on SiO ₂On the substrate, use laser ablation to come to produce Ga and P reactant from the GaP solid target.Field emission scanning electron microscope (FESEM) proves that the catalyst that uses all three kinds of sizes has all obtained the nano wire (Figure 13 A) of length above 10nm.Exist (Figure 13 A, the illustration) that the test of these nano wire ends has also been shown the nanocluster catalyst.The control experiment of not using the Au colloid to be carried out does not produce nano wire.This FESEM image shows, the diameter of these nano wires distributes narrower than the diameter distribution of the nano wire that obtains in the experiment of not using colloid catalyst, although FESEM is not the good method that is used to estimate these distributions, because little variation just can produce big variation on the focal plane in viewed diameter.

The grower that uses in these experiments is similar to the device in the report.Substrate is to put into 95: 5 EtOH that contain nitrogen-[3-(methoxy is silica-based) propyl group]-ethylenediamine of 0.4%: H by the silicon chip that the 600nm thermal oxide will be arranged (Silicon Sense) ₂In the O solution 5 minutes, under 100-110 ℃, cured again 10 minutes then and obtain.It is 10 that Au colloidal solution (TedPella) is diluted to concentration ⁹-10 ¹¹Particulate/mL is so that cohesion is minimum, and it is deposited on the substrate.Substrate is placed in the quartz ampoule of downstream of stove, the GaP solid target is placed the 3-4cm place of the outer upstream extremity of stove.Furnace chamber is evacuated to is lower than 100 millitorrs, maintain 250 holders then, be attended by the air-flow of 100sccm.Stove is heated to 700 ℃, and target is used the ArF excimer laser, and (λ=193nm, 100mJ/ pulse 10Hz) were ablated 10 minutes.After the cooling, use FESEM (LEO 1982) to detect substrate.Analyze for TEM (JEOL 200CX and 2010) and EDAX, remove nano wire from substrate by the ultrasonic wave in the ethanol, with nanowire deposition on copper mesh.

For the quantitative measurment and structure and the composition in order to characterize them better that obtain the diameter that uses the nano wire that gold colloid produces is distributed, we have used high-resolution TEM.High-resolution TEM shows that these lines are monocrystal (Figure 13 B), and in the growth of [111] direction, EDAX has confirmed that in its technology limit composition is stoichiometric GaP (Ga: P1.00: 0.94).Importantly, to the nanowire diameter correlation (Figure 14 A and 14B) that tem analysis has proved and the colloid catalyst diameter is fabulous with dispersion widely; That is, for from 28.2 ± 2.6,18.5 ± 0.9 and the line of the colloidal growth of 8.4 ± 0.9nm, we observe 30.2 ± 2.3,20.0 ± 1.0 and the average diameter of 11.4 ± 1.9nm respectively.The average diameter of nano wire is generally than the big 1-2nm of average diameter of colloid.We believe that this added value is because the Ga before the nano wire nucleation and the alloying of P reactant and colloid.Line (Figure 14 A and 14B) for 30nm and 20nm is clear that the width distribution of nano wire reflects the width distribution of colloid, and single decentralization of this indication wire is only limited by the decentralization of colloid.For the line (Figure 14 C) of 10nm, the little broadening (1nm) that line distributes can be summed up as the reunion of colloid.The average diameter and the dispersion of distribution are dispersed on the substrate along with more colloid concentrated solution and increase.This distribution has by～peak that the 2.5nm spacing is separated, and these true some lines of prompting are the aggregate growths from two colloids, though this also needs other work to support this viewpoint.In all situations, the distribution of linear diameter those do not use the diameter of the line of colloid catalyst growth to distribute: more than the little order of magnitude of 43 ± 24nm (Figure 14 D).

We believe that for multiple colloid, this work has clearly proved the ability to the control of the diameter application system of semiconductor nanowires for the first time.The front is attempted on the surface that catalyst adheres to relatively poorly grow nanowire and has been caused having nano wire greater than the nonconforming diameter of 50nm.Other are attempted to control nanowire diameter by change background current-carrying gas and have only moved the average diameter of line a little, and have produced the distribution of using the wideer line of colloid adjusting growth than us.

In a word, we have showed to have the controlled synthetic of semiconductor line that single dispersion diameter distributes.These are high-quality, the line of monocrystalline attitude has been represented and has been used for the research that following low dimensional physics is learned, and the candidate of a plurality of Application for Field that is used for the science and technology of nanoscale.Especially, we believe the controlled diameter sample synthetic will make things convenient for greatly with these nano-scale structures unit combination for complexity with functional 2D and 3D nanosystems.

Figure 12 is the schematic diagram that describe to use the monodispersed gold colloid GaP semiconductor nanowires that is used to grow intact as catalyst.

Figure 13 A shows from the FESEM image (scale is 5 μ m) of the synthetic nano wire of the colloid of 28.2nm.Illustration is one of them the TEM images (scale is 50nm) of end of these lines.High contrast feature is corresponding to the colloid catalyst of online end.Figure 13 B shows the TEM image (scale is 10nm) of another line in this sample.[111] crystal face is differentiated (resolved), and the growth that shows line is along this generation, and this is consistent with previous work.For this line, the measurement of crystal face distance provide lattice constant be 0.54nm (± 0.05nm), this basic value (bulk value) 0.5451nm with GaP is consistent.

Figure 14 A-14C shows the block diagram of the measured diameter of line, and these lines are from 28.2nm (Figure 14 A), the colloidal growth of 18.5 nm (Figure 14 B) and 8.4nm (Figure 14 C).Solid line shows the distribution of line.Figure 14 D shows the post figure of the diameter of the line that uses the front not have the growth of colloid method, uses laser to produce Au nanocluster and GaP reactant in the method.This non-constant width that distributes (standard deviation is 23.9nm), average diameter (42.7nm) is used the synthetic line of reserving in advance of colloid catalyst greater than those.In all situations, the nanowire diameter of being reported equals nucleus.Be consistent relatively between unsetting oxide layer on all nanowire surface each line in same experiment, the thickness between synthetic changes between 2-6nm.

The general of compound semiconductor nano wire synthesized

Used laser auxiliary catalysis growth to finish the predictable synthetic of multicomponent semiconductor nanowires on a large scale.The binary III-V family material (GaAs, GaP, InAs and InP) that has prepared a large amount of high-purity (＞90%) monocrystalline, ternary III-V family material (GaAs/P, InAs/P) and the material (ZnS of binary II-VI family, ZnSe, CdS and CdSe) and the nano wire of binary SiGe alloy.These nano wires have from 3 diameters that change to the dozens of nanometer and the length that extends to the dozens of nanometer.

Nanoscale material synthetic for being directed to understand the fundamental property of minor structure, the work that generates nanostructure formed material and development nanometer technology is very crucial.Nano wire and nanotube are the focuses of numerous attentivenesss, because they have the potentiality of answer about the basic problem of unidimensional system, and be desirably in covering play the part of important role from molecular electronic is acquired the application of novel flying-spot microscope probe.In order to explore nano-material abundant like this and that infusive chance needs chemical analysis and diameter to change.In the past few years, in enormous quantities synthetic a lot of effort of having carried out for nano wire, although use template (template), laser ablation method, solwution method and additive method to make progress, do not have a kind of situation verified can utilize a kind of method to synthesize large-scale nano-material in predictable mode.Here, we have described the large-scale binary and the ternary III-V of use laser auxiliary catalysis growth (LCG) method, and the predictable of II-VI and IV-IV family semiconductor nanowires synthesized.

Recently, we have reported for work and have used the basic Si of LCG method and the growth of Ge nano wire, this has utilized laser ablation to produce the catalyst cluster of nanometer diameter, and this catalyst cluster is determined the growth of the nano wire of size and guiding crystalline state by gas-liquid-solid (VLS) mechanism.A key character of VLS growth course and our LCG method is exactly that equilbrium phase diagram can be used to predict catalyst and growth conditions, therefore makes the rational possibility that becomes of new nano-material.Importantly, we have illustrated here, make in this way the material GaAs of III-V family, GaP, GaAsP, InAs, InP and InAsP, the material ZnS of II-VI family, ZnSe, CdS and CdSe, and the semiconductor nanowires of the SiGe of IV-IV family alloy can synthesize with high output and purity.The target especially fascinating as the synthetic semiconductor of GaAs and CdSe is because their direct gap has caused attracting optics and electrooptical property.Prepared the same little, the nano wire that length surpasses the monocrystal of 10 μ m with 3nm of diameter, this diameter makes these nano wires be in strong quantum limit radially (radial quantum confinement).These studies have shown that, LCG has represented a kind of synthetic very vague generalization of nano wire and method of predictability of being used for, and we believe prepared large-scale III-V, and II-VI and IV-IV family nano wire will be opened up many in the research of nanoscale and the new chance in the technology.

Because the ternary and the complexity of the phasor of high-order more, in principle for the prediction of the growth conditions of the binary of use LCG method or more complicated nano wire than the research of basic Si in front and Ge nano wire want significant difficulties many.But, consider the pseudo-binary phase diagraml that is used for interesting catalyst and compound semiconductor, this complexity performance has been reduced widely.For example, the pseudo-binary phase diagraml of Au-GaAs shows that Au-Ga-As liquid and GaAs solid are basic (Figure 15) mutually in the rich GaAs zone when being higher than 630 ℃.This means that if the composition of target and growth temperature are set to this zone in the phasor, gold can be used as catalyst by the LCG method GaAs nano wire of growing.In fact, we find to use (GaAs) _0.95Au _0.05The LCG of target produces the sample of mainly being made up of nano wire.Typical field emission scanning electron microscope (FE-SEM) image (Figure 16 A) at the material of 890 ℃ of preparations shows that this product is that length extends to 10 μ m or more thread.The analysis showed that of these high-resolution SEM image, at least 90% is nano wire in the product of producing by the LCG method, and very a spot of particulate material is only arranged.The X ray diffracting data of bulk sample can be marked as zincblende (ZB) structure of the lattice constant consistent with block GaAs, shows that also this material is pure GaAS to 1% magnitude.At last, we also can use Ag and Cu catalyst to obtain at the high production of noticing the GaAs nano wire.(M=Ag, Cu) the rich GaAs zone in pseudo-binary phase diagraml is rendered as the true consistent of M-Ga-As liquid and GaAs solid phase, and has proved that the LCG method is used for the predictability of nanowire growth for these data and these metals.

The structure of GaAs nano wire and composition have used transmission electron microscope (TEM), converge beam electrons scattering (ED) and energy dispersion XRF (EDX) at length characterizes.TEM studies show that this nano wire has the diameter from 3nm to about 30nm scope.Diameter is that the typical diffraction contrast image (Figure 17 A) of 20nm solid wire shows that this line is the diameter of monocrystal (consistent contrast) and homogeneous.Ga by this definite line of EDX: the As composition: instrumental sensitivity scope in, with the composition that from GaAs crystal standard specimen analysis obtain be identical at 51.4: 48.6.And, can be labeled as perpendicular to the ED style (illustration, Figure 17 A) of this nano wire longitudinal axis record ZB the GaAs structure＜112〉crystal zone axis, therefore show to grow [111] direction now.Measurement widely to independent nano wire shows that in all scenario, growth occurs along＜111〉direction.This direction and mono-crystalline structures also confirm by TEM lattice image (for example, Figure 17 B) that this lattice image clearly illustrates that (111) crystal face, and (spacing 0.32 ± 0.01nm, piece GaAS is 0.326nm) perpendicular to bobbin.At last, TEM research discloses most of nano wires at one end with nanoparticle end (illustration, Figure 16 A).EDX the analysis showed that nanoparticle mainly is made up of Au.The Au nanoparticle is consistent with pseudo-binary phase diagraml in the existence of nanometer line end, has represented the very strong evidence that is used for the VLS growth mechanism, the recommended LCG that is used for of this mechanism.

The triumph of the binary GaAs nano wire by LCG is synthetic to be not an isolated example, but is general to large-scale binary and more complicated nano-material (table 1).For our synthetic method being expanded nano wire to maximum magnitude, we admit to be used for the catalyst of LCG and can select by the identification metal under the detailed phasor situation not having, in these metals, nano wire composition element is soluble in liquid phase, but liquid phase can not form the more stable solid chemical compound of phase than the nano wire of expection; That is, desirable metallic catalyst should be active physically, but chemically is stable.From this general introduction, noble metal Au should represent a good starting point to a lot of materials.In the past, this noble metal also is used to the VLS growth by the nano wire of the surface support of metal-organic chemical vapour deposition (CVD) (MOCVD).The nano wire that produces by the MOCVD method is different with the material of being reported herein aspect several, and comprising: (1) MOCVD nano wire produces from the teeth outwards, rather than the required big amount that is used to assemble; (2) end of MOCVD nano wire from substrate to them be tapered significantly (that is, they do not have homogeneous diameter); (3) Zui Xiao nanowire diameter (10-15nm) also will be significantly greater than the diameter of the 3-5nm that in our work, is obtained.At last, as described below, by producing interested solid target and catalyst, our LCG method is easy to be extended to many different materials (as table 1), recognizes that this point is very important simply.

At first, we have been extended to our work on GaAs significantly and have comprised GaP and ternary alloy three-partalloy GaAs _1-xP _xMaterial.By LCG from (GaP) _0.95Au _0.05The FE-SEM picture showing of the product that target obtains goes out the nano wire (Figure 16 B) that high-purity, length surpass 10nm.A large amount of TEM shows that these nano wires (1) are the GaP of monocrystal, and (2) along＜111〉direction growths, (3) as LCG mechanism desired stop (illustration, Figure 16 B) with the Au nanoparticle.We have also tested the limitation of our LCG method by the research of ternary GaAsP alloy nano-wire.The synthetic of ternary III-V alloy is especially to allow the people interested for the energy gap engineering, and the energy gap engineering is crucial to electronics and optics.Use contains the GaAs of Au catalyst _0.6P _0.4 targets, the LCG of GaAsP nano wire have produced and have been close to pure nano wire (Figure 16 C).TEM image, ED and EDX show that these nano wires are monocrystal, along＜111〉direction growths, Ga with 1.0: 0.58: 0.41: As: P atomic ratio, this is identical with the composition of primary target in fact, stops (illustration, Figure 16 C) with the nanocluster of mainly being made up of Au.The high-resolution TEM image of going up record for the nano wire (Figure 17 C and 17D) of about 10nm and 6nm at diameter shows (111) crystal face of intact arrangement, and the sign that does not have the composition modulation.We believe that it is crucial that ternary nano line composition can be become the observed result of branch control by target, because it provides chance, the change of this exciton energy to be because the variation (composition) and the quantum limit (size) of energy gap for exploring the exciton energy change.

Based on above result, perhaps not surprisingly, we have also successfully used LCG to prepare the III-V binary material and have comprised the ternary material (table 1) of In-As-P.We believe that more prior is the preparation that this synthetic method also can be extended to the nano wire of many other classifications easily, comprises II-VI material ZnS, ZnSe, CdS and CdSe (table 1), IV-IV SiGe alloy.The situation of II-VI nano wire CdS and CdSe is even more important, and---buergerite (W)---is different from the ZB structure of aforesaid III-V material and the ZB structure of ZnS and ZnSe because the structure phase of these material settling outs.Importantly be that we find to use the LCG method that contains the Au catalyst can synthesize to high production the nano wire (Figure 18 A) of CdS and CdSe.The TEM and the ED data that obtain at the nano wire (for example, Figure 18 B and 18C) of independent CdSe show that these materials are monocrystal, this monocrystal have W-type structure and with the ZB structure＜111〉direction visibly different＜110 direction of growth.CdS nano wire (table 1) studies show that more complicated a little behavior; Promptly, have along two different＜100 and＜the W-type nano wire of 002〉direction growth.Possible is, for the CdS nano wire appointment of minority＜002〉direction perhaps corresponding to the ZB structure＜111〉direction.But the X-ray diffraction that carries out on piece nano wire sample is measured consistent with the crystal parameter value (assignment) of W structure.In addition, the elongation that studies show that edge＜002〉direction of the W-type CdS of front and CdSe nanocluster.We believe, the system research of the nano thread structure that has functional relation with growth temperature should help to illustrate these CdS results' origin, perhaps can provide how controlling the understanding of nanowire growth direction.

At last, we have the nano wire (table 1) that can LCG have prepared IV-IV binary Si-Ge alloy.Use the Au catalyst, at whole Si _1-xGe _xSynthetic single crystal body nano wire is possible in the compositional range.Unlike the situation of GaAsP discussed above, this Si-Ge alloy does not show the composition identical with initial target.But composition changes in growth reactor continuously, and the material of the rich Si that is produced is at the zone line of heat, and the material of the rich Ge that is produced is than cold end.Especially, from (Si _0.70Ge _0.30) _0.95Au _0.05The nano wire that the LCG of target is grown in 1150 ℃ of generations, had respectively 95: 5 to the end from the stove middle part, and 81: 19,74: 26, the Si of 34: 66 and 13: 87: Ge atomic ratio.The variation of this component comes from the fact: the optimal growth temperature of two kinds of independent nano materials is significantly different.This difference can increase the difficulty of the controlled alloy of synthetic ingredient, though our result shows that also this can be used in the alloy compositions for preparing certain limit in the single growth experiment.

In a word, use our LCG technology, we have synthesized the binary and the ternary semiconductor nano wire of large-scale monocrystalline.We believe that these results have proved that clearly this method is used for the synthetic generality of rational nano wire.Expect that these are high-quality, the utilizability of the semiconductor nanowires of monocrystalline makes the charming chance in the nanoscale Science and Technology become possibility.For example, these nano wires can be used to detect restriction, the dynamics of the exciton in 1D and transport, and can be used as the optical activity construction unit that is used for the nanostructure formed material.And, by control growing further, we believe that the LCG method can be used to synthetic more complicated nano thread structure, comprises single line homogeneity and heterojunction, and superlattice, so can make the light-emitting diode of nanoscale and Laser Devices become possibility.

The device and the general step that are used for nano wire LCG growth have been narrated in front.The target that uses in synthetic is by (material) _0.95Au _0.05Form.The typical condition that is used to synthesize is (i) 100-500 holder Ar: H ₂(95: 5), (ii) 50-150sscm air-flow and (iii) use the Nd:YAG laser (λ=1064nm of pulse; Pulsation rate 10Hz; Average power 2.5W) ablates.In table 1, provided the distinct temperature of the growth that is used for different nano-materials.The nano wire product is collected at the cold junction in stove downstream.

Use X-ray diffraction (SCINTAG XDS 2000) FE-SEM (LEO 982) and TEM (Philips 420 and JEOL 2010) that the nano wire sample is characterized.Also carrying out electronic diffraction and constituent analysis (EDX) in TEM measures.The sample that is used for tem analysis is prepared as follows: momently sample is carried out sonicated (sonicate) at ethanol, this suspends nano-material, then places a suspension and make its drying on the TEM grid.

Use the method for the molded conciliation of film and nanotube to be used to prepare many materials.But these nano wires typically have＞diameter of 10nm, and usually have and make its polycrystalline structure that is difficult to survey inherent physical property, and this diameter is greater than the diameter that is used for strong quantum limitation effect of expectation.

Table 1 is a summary of the monocrystal nano wire that synthesized.Growth temperature is corresponding to the scope of being explored in these researchs.Minimum (Min.) and average (Ave.) nanowire diameter (Diam.) are determined by TEM and FE-SEM image.Use electronic diffraction and TEM lattice image to determine structure: ZB, zincblende; W, buergerite; And D, the diamond lattic structure type.Composition is measured by the EDX that carries out on single nano wire and is determined.Except that GaAs also used Ag and Cu, all nano wires used Au synthetic as catalyst.The GaAs nano wire that uses Ag and Cu to obtain has same size, structure and composition with using Au as the nano wire that catalyst obtains.

Material	Growth temperature (℃)	Minimum diameter (nm)	Average diameter (nm)	Structure	The direction of growth	The composition ratio
Material	Growth temperature (℃)	Minimum diameter (nm)	Average diameter (nm)	Structure	The direction of growth	The composition ratio	GaAs GaP GaAs _0.6P _0.4InP InAs InAs _0.5P _0.5ZnS ZnSe CdS CdSe Si _1-xGe _x	800-1030 870-900 800-900 790-830 700-800 780-900 990-1050 900-950 790-870 680-1000 820-1150	3 3-5 4 3-5 3-5 3-5 4-6 3-5 3-5 3-5 3-5	19 26 18 25 11 20 30 19 20 16 18	ZB ZB ZB ZB ZB ZB ZB ZB W WD D	<111> <111> <111> <111> <111> <111> <111> <111> <100> <002> <110> <111>	1.00∶0.97 1.00∶0.98 1.00∶0.58∶0.41 1.00∶0.98 1.00∶1.19 1.00∶0.51∶0.51 1.00∶1.08 1.00∶1.01 1.00∶1.04 1.00∶0.99 Si _1-xGe _x

Figure 15 shows the pseudo-binary phase diagraml of Au and GaAs, and liquid A u-Ga-As component refers to L.

Figure 16 A-16C shows the GaAs (Figure 16 A) by the LCG preparation, GaP (Figure 16 B) and GaAs _0.6P _0.4The FE-SEM image of (Fig. 1 6C) nano wire.Scale in Figure 16 A-16C is 2 μ m.The illustration of Figure 16 A-16C is respectively GaAs, GaP and GaAs _0.6P _0.4The TEM image of nano wire.Scale all is 50nm.The feature of high contrast (black) is corresponding to the catalyst of the nanocluster that solidifies.

Figure 17 A shows the diffraction contrast TEM image of the GaAs nano wire of the about 20nm of diameter.Illustration shows and converges beam electrons diffraction pattern (ED) along＜112〉crystal zone axis records.[111] direction of ED style is parallel to bobbin, shows that therefore growth takes place along [111] direction.Scale equals 20nm.Figure 17 B is the TEM image that the GaAs nano wire of the about 20nm of diameter.Crystal face distance perpendicular to the nanometer bobbin: 0.32 ± 0.01nm has good consistency with the crystal face of (111) face among the body GaAs apart from 0.326nm.Scale equals 10nm.It is 10 and the GaAs of 6nm that Figure 17 C and 17D show diameter respectively _0.6P _0.4The high-resolution TEM image of nano wire.In three kinds of all nano wires, (111) crystal face (perpendicular to bobbin) is all clearly differentiated.Scale in Figure 17 C and 17D is 5nm.

Figure 18 A shows the FE-SEM image by the CdSe nano wire of LCG preparation.Scale equals 2 μ m.The illustration of Figure 18 A is the TEM image that has the independent CdSe nano wire of nanocluster (black feature) at line end.EDX shows that nanocluster mainly is made of Au.Scale is 50nm.Figure 18 B shows the diffraction contrast TEM image that diameter is the CdSe nano wire of 18nm.The contrast of homogeneous shows that this nano wire is a monocrystal.The illustration of Figure 18 B is that this figure has been marked as wurtzite structure along the ED style of＜001〉crystal zone axis record.[110] direction of ED style is parallel to bobbin, has shown that therefore growth takes place along [110] direction.Scale is 50nm.Figure 18 C shows the high-resolution TEM image that diameter is about the CdSe nano wire of 13nm, and this picture showing goes out (100) crystal face and offered an explanation well.Crystal face is apart from experiment value 0.36 ± 0.01nm, and is consistent with the spacing 0.372nm in the piece crystal.(100) crystal face with respect to 30 ° of orientations of nanometer bobbin is consistent with [110] direction of growth of being determined by ED.Scale equals 5nm.

The laser cocatalyst growth of monocrystalline GaN nano wire

Used laser cocatalyst growth (LCG) to synthesize a large amount of monocrystalline attitude GaN nano wires.(GaN, Fe) laser ablation of synthetic target has produced the liquid nanometer cluster, and these clusters can be as the catalyst position of growth of the nano wire of restriction and guiding crystalline state.Field emission scanning electron microscope shows that product mainly is made up of linear structure, have 10nm magnitude diameter and substantially exceed the length of 1 μ m.The powder x-ray diffraction analysis of piece nano wire sample can be marked as the GaN wurtzite structure, shows＞95% phase purity.The transmission electron microscope of independent nano wire converges beam electrons diffraction and energy dispersion x-ray fluorescence analysis and shows that they are the GaN monocrystal with [100] direction of growth.For further basic research and application, the synthetic of semiconductive nitride material important on the nano wire of the GaN of a large amount of monocrystal and the other technologies should have been opened up many chances.

Here, we have reported for work synthesizing in enormous quantities of monocrystalline attitude GaN nano wire.The laser ablation of the synthetic target of GaN and catalyst metals has produced the liquid nanometer cluster, and these clusters can be as the active site that limits and guide the nanowire growth of crystalline state.Field emission scanning electron microscope (FE-SEM) shows that product mainly is made up of linear structure.The analysis of the powder x-ray diffraction (PXRD) of piece nano wire sample can be marked as the GaN wurtzite structure, shows＞95% phase purity.The transmission electron microscope of independent nano wire converges beam electrons diffraction and energy dispersion x-ray fluorescence analysis and shows that they are the GaN monocrystal with [100] direction of growth.

In the many decades in the past, because nano-structured GaN material is used for photoelectronic important potentiality, they have attracted to note widely.These researchs mainly concentrate on the quantum well structure of zero dimension (0D) quantum electricity and two dimension, use ripe method can be easy to synthetic these structures.Because with their the synthetic difficulty that is associated, the research of one dimension (1D) GaN nano wire is restricted, this research may make chance unique in basic principle and the application study become possibility.The report that one piece of GaN nanowire growth is only arranged especially.In this work, at gallium oxide and NH ₃When steam exists, use carbon nano-tube to produce the GaN nano wire as template.We have probed into the predictable synthetic method that is used for the GaN nanowire growth that is referred to as laser cocatalyst growth (LCG).In this method, pulse laser is used to make the solid target evaporation of the material that comprises expection and catalyst, and the liquid nanometer cluster that forms under high-temperature that obtains thus guides the diameter of growth and definite crystalline state nano wire by vapour-liquid-solid growth mechanism.An important feature of this method is to be used to determine that the catalyst of 1D growth can be selected from phase diagram data and/or chemism.Buhro has used the relevant next III-V material for preparing some in solution of method that solution-liquid-solid is grown mutually that is referred to as with the partner, although be not nitride.

In the situation of GaN, (that is, the information of catalyst-Ga-N) can be utilized not have the detailed ternary phase diagrams relevant with LCG.But we can use the knowledge of growth course to come rational selecting catalyst.Especially, under the nanowire growth condition, catalyst should form the mixing material phase that has GaN, but does not form more stable solid phase.Guiding principle inspires us, and Fe can dissolve Ga and N, but does not form the solid-phase compound more stable than GaN, and Fe is used for by the good catalyst of the GaN nanowire growth of LCG.After using laser ablation to produce the catalyst nano cluster, the whole progress of nanowire growth as shown in figure 19.

Importantly, we find to use the linear structure that the LCG of GaN/Fe target has produced the nanometer diameter of high production.It is the 10nm rank by diameter mainly that the typical FE-SEM image (Figure 20 A) of the product of producing by LCG shows this product, and length substantially exceeds the 1D structure of 1 μ m and forms; That is the nano wire of high-aspect-ratio.The FE-SEM data also show the nano wire of consisting of of product about 90%, and all the other are nanoparticle.We also use PXRD (Figure 20 B) to assess the purity mutually of whole crystal structure and piece nano wire sample.All sharp-pointed relatively peaks can be marked as the wurtzite structure that crystal constant is a=3.187 and c=5.178 dust in PXRD figure.The literature value of these values and body GaN: a=3.189 and c=5.182 dust meet finely.In addition, back of the body end signal and the contrast at observed peak show the crystalline material that the GaN wurtzite structure was produced in we synthesize occupy＞95%.

The LCG experimental provision is identical with the device that the front is reported.(atomic ratio is (GaN): Fe=0.95: the center of 0.05) placing stove with GaN/Fe synthetic target to use quartz ampoule.This experimental system is evacuated to 30 millitorrs, then injects anhydrous ammonia gas.When air pressure and flow velocity maintain about 250 holders and 80sccm respectively, furnace temperature is elevated to 900 ℃ with 30 ℃/min.Then use Pulse Nd-YAG laser (1064nm; Pulse duration 8ns; 10Hz repeats; Average power 2.5W) comes ablation target with typical ablation duration 5min.After ablation, close stove, make its cool to room temperature.Then, this system of emptying, yellowish powder is collected in the end of quartzy tube wall internally.This product is directly used in FE-SEM and PXRD research.This product is suspended in the ethanol, transfers to then on the TEM grid and be used for TEM, CBED and EDX measure.

Used TEM, CBED and EDX have characterized pattern, structure and the composition of CaN nano wire in further detail.TEM studies show that this nano wire is straight and has the diameter of homogeneous, typically at one end finishes with nanoparticle.Figure 20 A shows the representational diffraction contrast image of a nano wire.Contrast along the unanimity of bobbin shows that this nano wire is a monocrystal.Behind liquid nanometer cluster crystallization, as desired, be multiaspect shape (Figure 19) in the observed nanoparticle of nanometer line end (black, high contrast feature).We have also used EDX to handle the composition of the nanoparticle of nano wire and end.The data that write down on nano wire show that only ratio and the GaN standard specimen of Ga and N are basic identical, and nanoparticle also contains Ga, N and Fe.Only there is the person's character of having confirmed the catalyst of Fe in synthetic in Fe (and Ga and N) in the nanoparticle of end.

In order further to study intensively the importance of catalyst, we have also studied the growth of using the GaN nano wire of Au catalyst.Recently gold has been used to the growth of a lot of III-V and II-VI material nano line as catalyst, can expect that similarly it also plays a role in the growth of GaN nano wire effectively.But Au presents the dissolubility of very poor N, so can not transport N effectively to the solid-liquid growth interface.Consistent with this analysis is that we can not use the Au catalyst to obtain the GaN nano wire.We believe how importance and catalyst that this has emphasized catalyst can reasonably be selected.

At last, we use CBED and high-resolution TEM (HRTEM) to characterize the structure of GaN nano wire in more detail.The CBED style (illustration, Figure 21 A) of typical nano wire presents and infers and the next consistent sharp-pointed diffraction pattern of mono-crystalline structures from the diffraction contrast image.Mark to this style has further proved the axle arrangement along the line of [100] direction.In addition, Figure 21 B shows the HRTEM lattice image that diameter is about the GaN nano wire of 10nm.This image clearly show that the mono-crystalline structures and the edge [100] of nano wire, the crystal face of [010] and [110] direction along＜001〉crystal zone axis record.This image has proved that [100] direction is parallel with bobbin, has therefore confirmed [100] direction of growth in the GaN nano wire.

In a word, we have probed into and have been used for the reasonably LCG method of synthetic GaN nano wire.Obtained to have the high-purity GaN nano wire of the monocrystal of unique [100] direction of growth.We believe, the method for this predictable selection based on catalyst and growth conditions can be extended to InN at an easy rate, and (GaIn) N alloy and relevant nitride nanowires is synthetic.For the basic research and the application in future, synthetic being supposed to of important semiconducting nitride thing material can be opened up a lot of chances on GaN monocrystal nanowire and the other technologies.

Figure 19 shows the schematic program of using laser cocatalyst Grown GaN nanowire growth.

Figure 20 A shows FE-SEM (LEO 982) image that uses the synthetic a large amount of GaN nano wire of LCG.Scale equals 1 μ m.Figure 20 B shows PXRD (Scintag, XDS2000) style that writes down on a large amount of GaN nano wires.Numeral on the peak is corresponding to (hkl) value of zincblende lattce structure.

Figure 21 A shows the diffraction contrast TEM of GaN nano wire, and (this nano wire finishes with the nanoparticle of the multiaspect shape of higher (black) contrast for Philips, EM420) image.Illustration in Figure 21 A shows regional upper edge＜001 that marks with white ring〉the CBED style of crystal zone axis record.White scale equals 50nm.Figure 21 B shows HRTEM (JEOL 2010) image that another diameter is about the nano wire of 10nm.This image obtains along＜001〉crystal zone axis.[100], [010] and [110] direction is represented with [100] that are parallel to bobbin.White scale equals 5nm.

Electronics and opto-electronic device by the nanoscale of indium phosphide nano line structure unit assembling

Be ideally suited in effectively the transporting of electric charge carrier and exciton as the one-dimensional nano structure of nano wire (NWs) and nanotube (NTs), therefore be considered to be used for the electronics of nanoscale and the construction unit of optoelectronic key.The research of the electron transport in carbon nano-tube has been caused the generation of field effect transistor, univalve, rectifying junction and chemical sensor, these results have shown from the possible exciting application of these materials, although because the selective growth of semiconductive or metallic nanotube and/or assembling are also impossible now, the use of nano tube structure unit is subjected to suitable restriction.Using the construction unit of the inversion assembling that acts on active device and device array will need the electrical property of different units nano-scale structures is to determine that this application will be eliminated the demand for the assembly line of costliness with controllable.At last, we have reported the rational assembling from the functional nano yardstick device of compound semiconductor nano thread structure unit, and electrical property is controlled by mixing in these nano thread structure unit.Grid rely on to transport measures proof, and indium phosphide (InP) nano wire can mix synthetic by controlled n type and p type, and can be as the field effect transistor running of nanoscale.In addition, by forming the crossed nanowire array, the availability of intact n-and p-section bar material makes the generation of p-n junction become possibility.Transport the p-n junction of measuring the announcement nanoscale and showed regular current commutates.Importantly, the InP p-n junction of forward bias has been showed strong, the emission of the light of quantum limit, the light-emitting diode of the minimum that makes these structures perhaps be so far to be created.At last, the assembling of electric field leading is regarded as createing from the construction unit of these new nanoscales highly integrated and a kind of strategy functional device.

The InP nano wire that has prepared monocrystal by foregoing laser cocatalyst growth (LCG).Use tellurium (Te) and zinc (Zn) to prepare the InP nano wire of n type and p type respectively, and find that these nano wires have similar high-quality to the nano wire that does not add alloy as alloy.Field emission scanning electron microscope (FE-SEM) image (Figure 22 A) of the InP nano wire that the Zn that is synthesized mixes proves that these line lengths extend to the dozens of nanometer, and diameter is in the magnitude of 10 nanometers.The nano wire that high resolution transmission electron microscopy (TEM) image (illustration, Figure 22 A) further shows this doping is that the direction of growth is＜111〉monocrystal.Common, in the TEM image the unsetting coating layer that can see the 1-2 nanometer on the nano wire.This thin layer ascribes the oxide that forms when nano wire is exposed in the air to after synthetic.Whole composition of analyzing determined independent nano wire by energy dispersion X-ray diffraction (EDX) is found to be 1: 1 In: P, has therefore confirmed stoichiometric composition of nano wire.But, the sensitive not enough doped level of determining in the independent nano wire of EDX and other elemental analysis method.

For existence and the type of confirming alloy in nano wire, we have carried out grid-dependence on independent nano wire, and two hold-carryings transport measurement.In these were measured, for the nano wire of n-and p-type, the electricity of nano wire was led with the variation of opposite directional response in gate voltage (Vg).Especially, for the nano wire of n type, Vg＞0 will cause the accumulation of electronics and the increase that electricity is led; And for the nano wire of p type, the identical grid that apply voltage will consume the hole and reduce electricity and lead.Figure 22 B and 22C and 100c show respectively the typical grid that the nano wire that mixes from independent Te-and Zn-obtains and rely on the I-V curve.For the nano wire of two types, when Vg=0, the I-V curve all is an approximately linear, shows that metal electrode and nano wire are ohmic contact.The data (Figure 22 B) that transport that write down on the nano wire that Te mixes show for Vg＞0 electricity and lead increase, and lead decline for Vg＜0 electricity.These data clearly illustrate that the InP nano wire that Te mixes is the n type.With the n type, the InP nano wire that Te mixes is compared, and the grid that write down on the nano wire that Zn mixes rely on and transport data and show with the reverse electricity of the variation of Vg and lead variation.Especially, lead increase, lead decline (Figure 22 C) for Vg＜0 electricity for Vg＞0 electricity.These results show that the InP nano wire that Zn mixes is the p type.

Our result has suitable repeatability.Demonstrating matrix effect above the measurement of carrying out on the independent nano wire of 20 diameters from 20nm to 100nm under every kind of situation, this effect is consistent with use alloy in the InP nano wire is synthetic.In addition, gate voltage can be used to fully to exhaust electronics and the hole in the nano wire of n-type and p-type, so that electricity is led and become immeasurablel little.For example, when Vg be less than or equal to-during 20V, the electricity of the nano wire in Figure 22 B is led can be from conducting (opening) state exchange to by (pass) state, so this nano wire can be as field effect transistor work.For some nano wires, electricity leads modulated energy such as 4-5 the order of magnitude is big.High relatively switched voltage is relevant with employed thick (600nm) barrier oxide layers in our measurement.The research of this grid dependent behavior and Metal-oxide-semicondutor (MOS) field effect transistor and recent semiconductor nanowires field effect transistor is similar.We are exactly in each bar nano wire, can obtain predictable semiconductor behavior about one of nanotube work important characteristic.Integrate, these results have illustrated that clearly monocrystal InP nano wire can be synthesized and has controlled carrier type.Because these nano wires are produced with large batch of form, they have represented a kind of material that is used for assembly device and device array that can obtain easily.

By two or more multi-thread between form knot, the availability of n-type and p-type nano thread structure unit has been opened up the possibility of creating the device of sophisticated functions.Allow the chance of people's excitement in order to explore this, we have studied respectively by using intersects two n types, two p types, and a n type and the n-n that p type nano wire forms, the transport property of p-p and p-n junction.Figure 23 A shows and uses the representational nano-wire devices of diameter as the nano wire formation of 29nm and 40nm.For discussed below easy, with four arm A, B, C, D refers to.Importantly, for each experiment, the type of the knot that is studied be can control because we can select to be used to make the type of nano wire of the knot of intersection before assembling.

Figure 23 B and 23C show current-voltage (I-V) data of tying record at n-n and p-p respectively.For two types knot, (AC BD) demonstrates linearity or intimate linear behavior (curve 80, Figure 23 B and curve 82, Figure 23 C) to the data that transport that write down on independent nano wire.These results show that employed metal electrode is contacting of ohm or approximate ohmic properties with nano wire in the experiment, will can not cause effect of nonlinear to the I-V measurement of passing knot.Usually, pass the I-V that carries out of n-n and p-p knot and transport to measure and demonstrate the behavior of linearity or approximately linear, and permit us to infer about two important viewpoints of the knot of preparation in this way.The first, the interfacial oxide between independent nano wire can not produce tangible tunnel barrier, because such potential barrier will cause high non-linear I-V behavior.The second, flow through each I-V curve display and go out similar levels of current adjacent arm record, these values are less than the value of independent nano wire self.These results show that the knot domination transports behavior.At last, our data show, although contact area is little by (10 ^-12-10 ^-10Cm ²) and to make the method for knot simple, independent nano wire is having good reasonably electrically contacting each other.

Contact good between independent nano wire comes the manufacturing function device to provide the foundation for these nano wires of research.As an example, we have made p-n junction from the p-and the n-type nano wire that intersect.By the deposition successively and the medium dry of n-and p-type nano wire weak solution, these knots can reproducibly be made.Figure 23 D shows the typical I-V behavior of crossed nanowire p-n junction.The I-V of the linearity of independent n-and p-type nano-wire devices (curve 84 and 86) shows between nano wire and the metal electrode it is ohmic contact.The transport property (curve 88) of passing p-n junction shows clearly current commutates; That is, do not have electric current to flow during reverse biased, but have the rapid electric current of forward bias to rise.Importantly, the behavior is similar to the block semiconductor p-n junction, and this has formed the basis of the electronics and the opto-electronic device of many keys.In the p-n junction of standard, rectification comes from the potential barrier that forms on the interface between p-and the n-section bar material.When knot is forward bias (p-one side is a positive bias), potential barrier reduces, and big relatively electric current can flow through knot; On the other hand, when reverse biased, only there is a spot of electric current can flow through knot, because potential barrier has further been strengthened.

There is several reasons to make us believe that viewed rectification is because the p-n junction that the crosspoint between p-type and n-type InP nano wire forms.The first, the behavior that is used for making the linearity of the independent p-of knot and n-type nano wire or approximately linear shows between nano wire and metal electrode and has formed ohmic contact.This has just got rid of the possibility of rectification from metal-semiconductor Schottky (Schottky) diode.The second, by every pair of adjacent electrode (AB, AD, CB, CD) determine the knot I-V behavior (curve 88 among Figure 23 D) showed similar rectifying effect and levels of current, this is also than much smaller by the levels of current of independent nano wire.These results prove the I-V behavior of having arranged of tying.The 3rd, four-terminal measurement demonstrates similar I-V and rectification, and with compare slightly small pressure drop (0.1-0.2V) at the two-terminal measurement of same levels of current, in four-terminal measurement, measurement pass two independently electrode (as, during the pressure drop of knot C-D), electric current is by two adjacent electrodes (A-B).At last, in the I-V data, shown similar rectification 10 measurements of independently carrying out on the p-n junction; That is, when p type nano wire was positive bias, significantly electric current only can flow through p-n junction.

Top data show that clearly we can reasonably make the p-n junction of nanoscale now.In the picture direct gap semiconductor of InP, p-n junction has formed the basis of the opto-electronic device of the key that is used to comprise light-emitting diode (LED) and laser.For whether the device of the nanoscale of assessing us has similar behavior, we have studied luminescence generated by light (PL) and electroluminescence (EL) from the crossed nanowire p-n junction.Importantly, EL can observe from the knot of these nanoscales of forward bias easily.Figure 24 A shows the EL image that obtains from the typical nano wire p-n junction in forward bias, and illustration shows the PL image that obtains from the crossed nanowire knot.The PL image clearly illustrates the structure of the wire of two elongations, and the EL image shows the light that sends from the point source of light source.Contrast EL and PL image show that the peaked position of EL equals the crosspoint in the PL image, so proved that light sends really from the p-n junction of nano wire.

The I-V feature (illustration, Figure 24 B) of knot shows at～1.5V has the clearly rectification that rapid electric current rises.The EL intensity of knot shows that with respect to the curve of voltage the system with us under the voltage low as 1.7V can detect effective light.EL intensity is similar to the I-V behavior along with bias voltage may raises rapidly.EL spectrum (Figure 24 C) shows near the intensity of the maximum 820nm, and this value has tangible blue shift with respect to the big band gap (925nm) of InP.This blue shift partly is the quantum limit because of exciton, although other factors also have influence.In the importance that can clearly see quantum limit from the EL result by the p-n junction record of the nano wire assembling of little less (with bigger) diameter, its result has shown the blue shift of big (less).Perhaps, ability by the size adjustment color in these nanometers LEDs will be useful especially in future.The quantum effect of the device that these are initial (electronics is to photon) relatively low (～0.001%), this is astonishing, because we are not almost noted optimizing.The value (～0.002%) of the LEDs of this efficient and early stage piece InP is suitable.We are summed up as inactive compound via surface state with low quantum efficiency, and believe that this harmful process can be reduced by surface passivation.

GaN is a kind of direct wide bandgap semiconductor materials material, and it can launch light in the short wavelength regions (UV and blue light) in room temperature.In the place that needs intensity height, energy efficient and reliable light source, blue LEDs is important reflector.It may be very important for panchromatic accent light-emitting diode display of production and the white lamp of LED are become, because blueness is one of three kinds of Essential colour (red, green, indigo plant).

Here, our reported for work BLUE/UV nanometer LEDs (light emitting area is in the 10nm magnitude) of initial making, it is to use the Si of p type and the GaN nano wire structure of n type (being not intended to mix) to form.With we reported for work at the nearly IR luminous nanometer LEDs in zone, we have shown the great potential of using the different material that can cover whole chromatograms to make LEDs.

Figure 25 A shows the EL image that nano junction that two p type Si and n type GaN intersect obtains.This p-Si week boron mixes.Figure 25 B shows voltage under a plurality of gate voltages with respect to the relation of electric current.Nano junction has all demonstrated good rectification at different gate voltages.EL spectrum shown in Figure 25 C shows and shows about 380nm and 470nm the light emission takes place.N-InP and p-Si nano junction have good rectification.

To finally these construction units need be arranged and be assembled into the technology of intact array in order to make high integrated device based on nano wire.In order to prove this next developing stage, we use electric field (E-field) that independent nano wire is arranged and orientate array parallel and that intersect as---be used for two kinds of integrated basic geometric figures.Place (Figure 26 A) between the electrode by solution, apply the bias voltage of 50-100V then, realize the assembling of E-field guiding nano wire.In the situation of the arrangement of the nano wire that the chlorobenzene between parallel pole suspends, can see the potentiality of this method easily.The FE-SEM image shows, nearly all nano wire is all perpendicular to parallel pole, arrange along the direction of E-field.We have also used electrod-array to be positioned at the independent nano wire of specific position.For example, the assembling of the E-field of the nano wire between a row electrode (Figure 26 C) has been demonstrated and can have been placed independent nano wire and overlap diametrically opposite electrode pair, forms parallel array.In addition, by changing the direction of field, this alignment can be carried out with production crossed nanowire knot (Figure 26 D) in mode successively.These data clearly illustrate that E field assembling represented a kind of strategy that reasonably deposits independent nano wire by direction and spatial control to heavens.We believe, use our nano thread structure unit and E field and/or other packaging technologys, and high integrated function element will be available.

On the whole, the result who introduces herein provides the method for the inverted rational assembling of a kind of electronics that is used for nanoscale and opto-electronic device.Under the condition of the making line that does not have multi-million dollar, the ability of our certified assemblings active (active) device for this field is and is important that we believe for laying a good foundation with long-term development at the moment.We believe that utilizable large-scale nano material and the clear ability that is used for controlling their electrical properties that defines will make the LEDs (the GaN nano wire that for example, is used for blue light) of the nanoscale that covers whole visible light and near infrared region become possibility now.The light source of such nanoscale is perhaps at the parallel optical sensor of the height of creating newtype with to be used in the process of optical inter-connector of nanoelectronics be useful.And the assembling of the nano thread structure unit of doping has the electronic device of creating many other types significantly, even may create the potentiality of laser.

Use LCG to synthesize the InP nano wire.This LCG target is typically by the InP of 94% (atom ratio), forms as 5% Au of catalyst with as 1% Te or Zn of doped chemical.In growth course, furnace temperature (middle part) is set at 800 ℃, and target is placed on the upstream extremity rather than the centre of stove.(8ns, 10Hz) Nd-YAG laser (1064nm) evaporates target to use pulse.Typically, growth was carried out 10 minutes, collected nano wire at downstream, the cold junction of stove.

Use disclosed program on independent nano wire, to transport measurement.Briefly, at first nano wire is dispersed in the ethanol, is deposited on then on the silicon substrate (600nm oxide, 1-10 Ω .cm resistivity) after the oxidation, conductive silicon is as back of the body grid.Use electron beam lithography (JEOL 6400) to make electrically contacting of nano wire.Hot evaporation Ni/In/Au contact electrode.The self-control system of control noise＜1pA down of using a computer carries out the electron transport measurement.

Obtain n-n and p-p knot by random deposition.We at first use high relatively concentration with on the silicon substrate of nanowire deposition after the oxidation, determine the position of crossed nanowire, then make electrode by electron beam lithography on four all arms that intersect.The Ni/In/Au electrode is used to contact with nano wire.

Obtain p-n junction by depositing layer by layer.At first, (for example, the n type) weak solution writes down the position of independent nano wire to substrate to deposit one type nano wire.In second step, deposit nano wire () weak solution for example, the p type, the n-that record intersects and the position of p type nano wire of another kind of type.Then make metal electrode and transport measurement.

Use homemade low-light instrument research EL.Use PL or scattered light (540nm, Ar ion laser) to locate the position of knot.When knot is positioned, close excitation laser, then forward biased junction.Use the CCD camera of cooled with liquid nitrogen to take the EL image, disperse EL to obtain EL spectrum by in the spectrometer of 300mm, using the grid of 150 lines/mm.

Figure 22 A-22C has illustrated the doping and the electron transport of InP nano wire.Figure 22 A shows the typical FE-SEM image of the InP nano wire of Zn doping.Scale is 10 μ m.Illustration is the TEM lattice image of the diameter nano wire that is 26nm.Can see that (111) crystal face is perpendicular to bobbin.Scale is 10nm.Figure 22 B and 22C show the I-V behavior that the grid of the nano wire that Te and Zn mix rely on respectively.Illustration among Figure 22 B and the 22C shows the nano wire that uses two ends Ni/In/Au contact electrode to measure.Scale equals 1 μ m.The diameter of the nano wire in Figure 22 B is 47nm, and the diameter of the nano wire in Figure 22 C is 45nm.On the I-V of correspondence curve, the right-hand side of figure, marked the concrete gate voltage that in measurement, uses.Data are at indoor temperature measurement.

Figure 23 A-23D has illustrated the knot and the electrical property of crossed nanowire.Figure 23 A shows the FE-SEM image of the typical intersection nano-wire devices with Ni/In/Au contact electrode.Scale equals 2 μ m.The diameter of nano wire is 29nm (A-C) and 40nm (B-D); The diameter of nano wire that is used to make device is in the scope of 20-75nm.Figure 23 B-23D shows n-n respectively, the I-V behavior of p-p and

p-n junction.Curve

80 and 82 corresponds respectively to the I-V behavior of n-independent in the knot and p-nano wire.The I-V behavior that knot is passed in curve 88 expressions.In order to check better, the electric current quilt of p-that writes down in Figure 23 D and n-nano wire is divided by 10.The behavior that transports on a pair of adjacent arm is passed in solid line representative, and chain line is represented the behavior that transports of other three pairs of alternate arms.Data are at indoor temperature measurement.

Figure 24 A-24D has illustrated the optical characteristics of nano wire p-n junction.Figure 24 A is the EL image from the light of launching the p-n junction of 2.5V forward bias.Illustration in Figure 24 A illustrates the PL image that finishes.Scale all equals 5 μ m.Figure 24 B shows the relation of EL intensity with respect to voltage.Illustration in Figure 24 B shows the I-V feature, and the illustration in the illustration illustrates the FE-SEM image that finishes self.Scale equals 5 μ m.Form the n type of this knot and p type nano wire and have 65 and the diameter of 68nm respectively.Figure 24 C shows the EL spectrum of the knot in Figure 24 A.The peak value of this spectrum is at 820nm.Figure 24 D shows from the EL spectrum of the crossed nanowire p-n junction record of second forward bias.680nm appears in the maximum of this EL.Illustration in Figure 24 D shows this EL image, and has proved that this EL produces from tie region.Scale is 5 μ m.Form the n type of this knot and p type nano wire and have 39 and the diameter of 49nm respectively.

Figure 26 A-26D has illustrated the parallel and rectangular assembling of using the E field.Figure 26 A is the schematic diagram that arrange the E field.Behind nano wire solution of (blueness) deposition on the substrate, electrode (orange) is placed the bias voltage of 50-100v.Figure 26 B shows the parallel array of the nano wire of arranging between two parallel poles.Nano wire is suspended in the chlorobenzene, uses the bias voltage of the 100V that is applied to arrange.Figure 26 C shows the sterically defined nano wire parallel array of the E field assembling back acquisition of using the 80V bias voltage.The illustration at top shows 15 pairs of parallel poles in Figure 26 C, has the independent nano wire of the diametrically opposite electrode pair of overlap joint.Figure 26 D shows crossed nanowire knot, and this nanowire-junction is by applying the acquisition of aliging layer by layer of E field on right angle orientation in two number of assembling steps.The bias voltage that is applied in two steps is 80V all.Scale in Figure 26 B-26D equals 10 μ m.

Be derived from the inversion assembling of electronic device of the nanoscale of silicon nanowires

By having created four class important function nano-devices by the rational inversion assembling of silicon nanowires (SiNWs), these are to have the doping type of fine control and the p and the n type silicon nanowires of level.In all these devices, measuring prompting in the electron transport on independent p and the n type SiNWs is ohm or approximate ohmic contact between SiNWs and lead-in wire.Importantly, the four-point probe measurment of passing the p-n junction of being made up of p type that intersects and n type SiNWs shows the current commutates behavior that p-n row of diodes as expected is.Also assembled n ⁺Pn intersection knot is created bipolar transistor, obtains in this bipolar transistor as 0.94/16 big common base/emitter gain.The complementary inverter that is made of the lightly doped p-n junction that intersects demonstrates the tangible input voltage that is inversely proportional to input voltage, has 0.13 gain.Tunnel diode with heavily doped SiNW pn cross modal has shown negative differential resistance (NDR) in peak-to-valley ratio (PVR) is 5 to 1 forward bias.

Recently, the miniaturization of conditional electronic equipment is being advanced ardently.But the basic restriction of photoetching method will hinder current ground technology and extend to abstruse nanoelectronics field.Therefore, nanostructure as the application of the construction unit of the inversion assembling that is used for integrated device can less widely manufacturing line cost, be proved to be the notion of success but still kept some in microelectronics, all to be supposed to be cheap for the manufacturing of independent unit and assembling in the application of this nanostructure.Structure as the one dimension of nano wire (NWs) and nanotube (NTs) is the desirable candidate that is used for the nanoelectronics construction unit.How using these construction units to come conformation function nano-device and device array is substantial for nano science and technology.Nanotube is as field effect transistor, and single-electronic transistor is tested.The knot and the knot that intersects in the heterojunction of also having showed NT-NW, NT molecule.But, since the specific growth of the nanotube of metallicity and semiconductive be can not be controlled and controlled growth semiconducting nanotubes be difficult, the use of nanotube is subject to the unpredictability of the character of independent pipe in rational assembling.

The front, we have showed the controlled doping of monocrystalline semiconductor SiNWs, wherein doping type (p type and n type) is well controlled with relative doped level (on the lenient side to heavy).Therefore, these measurable and controlled in nature SiNWs provide crucial construction unit for the inversion assembling of active device and device array.Possible is, the assembling of the guiding by the chemistry assembling can form highdensity SiNW device array, and for example, special interacts and/or the coordination acceptor interaction to semiconductor peptide adhesive effect, DNA radix coupling.For the integrated device of realizing working, prerequisite is exactly the electrical properties that is appreciated that the active device of independent inversion assembling.Here we have reported from these diameters to be the rational assembling of the function nano device that comes of 20 to 50nm SiNWs, and the electrical properties of device.We have proved the ability that we provide manufacturing multiclass electronic device that is controlled to be to doping type and doped level.By make up controllably that p and n type doped level change SiNWs created four class important function structures, comprise the pn diode, bipolar transistor, complementary inverter and tunnel diode.Created the pn knot of the nanoscale of the SiNW knot form of intersecting.The electron transport measurement that these pn tie has shown can be by the current commutates of Semiconductor Physics prediction.We have probed into us and have made up n ⁺Pn SiNW becomes the ability of bipolar transistor, is proved to be to have as 0.94/16 big common base/emitter gain in this bipolar transistor.The complementary inverter that is made of the lightly doped p-n junction that intersects has clearly illustrated the input voltage that is inversely proportional to input voltage, has 0.13 gain.Intersect the result of the tunnel diode that constitutes by heavily doped pn and in peak-to-valley ratio (PVR) is 5 to 1 forward bias, shown the negative differential resistance behavior.In the laser cocatalyst growth course of SiNWs, use diborane and phosphorus to synthesize p type and n type SiNWs respectively as doped source.By the metal lead wire contact of using electron beam lithography on the silicon substrate of the doping that the 600nm thermal oxide is arranged, to make SiNWs.By intersecting a p type and a n type respectively, two p types and two n type SiNWs form pn, pp and nn knot.The type of the SiNWs of the knot of the type of knot by selecting to be used to create appointment is controlled.Typical field emission scanning electron microscope (FE-SEM) image of intersection knot has been shown among Figure 27 A, has been marked as 1,2,3 and 4 respectively for the ease of four contact lead-wires among the discussion figure.Figure 27 B shows pn and intersects current-voltage (I-V) data tie, and this has diameter respectively as 20.3 and little p and the n type SiNWs of 22.5nm.By making electric current (for example at two adjacent lead-in wires, lead-in wire 1-2 or lead-in wire 1-4, the positive direction of electric current is to n type SiNW from p) flow, the pressure drop of measuring between two other lead-in wire (for example, lead-in wire 3-4 or lead-in wire 3-2) is connected across the four-terminal measurement of tying.The I-V curve (Figure 27 B, curve 130) that passes knot shows the electric current rising (positive bias) of very little reverse biased electric current (being back bias voltage in we be provided with) and very rapid forward bias.On the contrary, single p (lead-in wire 1-3 between) and n type (between the lead-in wire 2-4) SiNWs has shown linear I-V behavior (respectively as the curve 110 and 120 of Figure 27 B), and this prompting is that ohm (a non-rectification) contacts between SiNWs and lead-in wire.So this rectification behavior must have knot self to cause.The behavior can explain by the energy band diagram of pn junction diode.When p and n type SiNW are in contact with one another, formed built-in potential barrier at the interface of knot.Electronics can not be passed in the wide space charge region that the junction interface forms, but can be transported by thermal excitation.Forward bias has reduced built-in potential barrier, so a large amount of electric currents can flow through (Figure 27 E), so the built-in potential barrier but reverse biased has raise is levels of current low (Figure 27 F).

Dividually p and n type SiNWs are dispersed in the acetone.Deposition by successively obtains p-n junction.(for example, the n type) solution at first is deposited on the substrate one type SiNWs, and record SiNWs is with respect to the position of alignment mark.Next, the solution that deposits the SiNWs (for example, p type) of another kind of type writes down the position of the pn knot that intersects.Pp and nn connected SiNWs:p type and the n type that only deposits a type, obtained.Write down the position of knot then.

Why we believe the rectification behavior be the pn row of diodes for rather than some other asymmetrical reason of wearing potential barrier then in the junction interface be: (a) the intrinsic oxide layer of SiNWs is enough thin, electronics is this oxide layer of penetration tunnel easily, still exist at the p of knot and the suitable close coupling between the n molded lines, so the built-in potential barrier energy enough forms.This measures affirmation by transporting of tying at pp and nn.Single line in pp (Figure 27 C, curve 110) and nn (Figure 27 D, curve 120) knot (lead-in wire 1-3 is between the 2-4) has shown linearity and contacting that almost linear I-V behavior is pointed out.The two-terminal measurement of tying at pp (Figure 27 C, curve 130) and nn (Figure 27 D, curve 130) (at lead-in wire 1-2,1-4 is between 2-3 or the 3-4) has shown linear and almost linear I-V.Relatively be connected across the resistance of the two-terminal measurement of tying and the resistance of single SiNW, we find that the magnitude of junction resistance is similar to the magnitude of line resistance, and the prompting oxide does not cause tangible resistance tunnel barrier.(b) 20 independently the measurement tied of pn shown (correct) rectification behavior of consistent standard.

As most of semi-conductive elementary cells, the pn knot provides rectifier, amplifier, change-over circuit and the required feature of other many electronic circuit function devices.The success of making the pn knot from the SiNW intersection provides the possibility of making other important function devices for us.In order to prove that we not only can create passive device: the p-n diode, and can create active device, we have made up the bipolar transistor that can carry out current gain.Bipolar transistor is n ⁺Pn (Figure 28 A left side) or p ⁺The np junction device, this needs to have in the emitter in high doped level and base stage and the collector electrode low doping.Be controlled to be us the ability of making complex devices is provided well in SiNWs mixes.Our n ⁺The pn bipolar transistor is to make up to a lightly doped p molded lines by the SiNWs that mechanically operates two n types (heavy doping, another light dope), and (Figure 28 A the right) work in common base wiring.Figure 28 B is the typical SEM image of bipolar transistor.At first the SiNWs in the transistor and the statement of account are solely characterized.The I-V curve of three independent SiNWs is linear, and two independent knots have (correct) rectification behavior of standard.Then, as emitter, the n type carries out bipolar transistor as collector electrode and measures with the SiNW of n+ type.Usually emitter-base stage (E-B) forward bias is injected into base region with electronics.When collector-base (C-B) greater than 0 the time, transistor work active mode, wherein, the C-B knot is a reverse biased, and the very little leakage current knot of flowing through is only arranged.But, can arrive C-B knot space charge region by base diffusion from the emitter injected electrons, collected by collector electrode.Actual collector current only depends on from the emitter injected electrons, so only depend on E-B voltage.This can be clear that among the area I I of Figure 28 C, wherein collector current is along with the E-B voltage of forward raises, but along with C-B voltage changes lentamente, this C-B voltage comes from the leakage current of the slow increase that exists under Early effect (Early effect) and the reverse biased.This has showed the transistor behavior: big electric current can result from the charge carrier that injects from contiguous emitter junction in the collector junction of reverse biased.When C-B voltage was lower than 0, this bipolar transistor was operated in saturation mode (Figure 28 C area I), and wherein E-B and C-B knot all is a forward bias.The collector current that comes self-electrode to inject will be compensated by the C-B electric current of forward bias.So collector current is along with C-B voltage descends.Forward bias on E-B is high more, and the forward bias on the C-B that need be high more is with current compensation to 0 (Figure 28 C, curve 1-4).

Make this n by deposition and mechanically actuated operation ⁺The pn bipolar transistor.At first, the SiNWs of p type from the solution deposition to the substrate on.In second step, with n ⁺Be bonded at sharp-pointed STM needle point with n type SiNWs, transfer at light microscope on the SiNWs of p type.

The common base current gain big as 0.94 (Figure 28 D) of the bipolar transistor of active mode, the gain of general transmit electrode current is 16.This big current gain value has been pointed out three important viewpoints: (a) electron injection efficiency from the emitter to the base stage is very high, this be since the doping content of emitter than the height of base stage; (b) though base region very wide (15 μ m), interaction active between base stage and collector electrode still exists, and most ofly can arrive collector electrode by base stage from the emitter injected electrons, the mobility of the electronics in this prompting base stage is quite high; (c) charging zone between base stage and collector electrode can be collected electronics and they are transported to collector electrode in high rate ground, and this prompting is not obvious in the oxide barrier effect at interface, and has further confirmed the analysis that we tie single pn.For example by reducing base width, our bipolar transistor can be near the performance of commercialization bipolar transistor, and its typical common base current gain is greater than 0.99.

In order to probe into these application of inverted construction unit in logical circuit, reach the controlled doping that further proves SiNWs and can offer our ability, we have created the complementary inverter of the form of light dope p type and light dope n type SiNW intersection.The schematic diagram of the SiNW inverter structure that intersects shown in Figure 29 A (below), at the inverter in the Semiconductor Physics shown in Figure 29 A (top).Lightly doped p in the inverter and n type SiNWs have shown very large matrix effect (gate effect), can be exhausted fully, and as at the p type SiNW as shown in Figure 29 B illustration, this is typical inverter behavior.The behavior can as explanation: the exhausting of n type (p type) by negative (just) input makes output equal ground value (bias voltage).Calculating voltage gain is 0.13, both the inverse of voltage slope.This gain less than commercial inverter greater than 1 value, but can be by using thinner gate oxide rather than 600nm oxide, still less the SiNWs of Can Zaing increases, thinner gate oxide has reduced the grid response of SiNWs, and still less the SiNWs of Can Zaing then needs more to make great efforts to make ohmic contact and further studies with needs.

When lightly doped p that uses two intersections and n type SiNWs making inverter, two degeneracy doped p ⁺And n ⁺Type SiNWs can form tunnel diode.Opposite with pn knot, tunnel diode does not show the rectification behavior, is 5 to 1 NDR behavior but demonstrate PVR under the forward bias, shown in Figure 29 C.This difference can use Jiang Qi (Esaki) diode mechanism to explain.When p+ and n+ type were in contact with one another, built-in electromotive force formed, but the space charge region is enough thin, allowed electron tunnel to penetrate.Under reverse biased (Figure 29 D, left side) and low forward bias (Figure 29 D, centre), electronics can pass this thin space charge region, and causes electric current to flow.After surpassing some points, further increase the conduction band that forward bias causes the n-side and enter the forbidden band (Figure 29 D, right side) of p-side, this has suppressed the penetration tunnel of electronics, has therefore reduced electric current.Further increase forward bias and reduced built-in potential barrier, this makes thermal excitation mechanism arrange conductivity, and electric current rises.

Here the result who is narrated has showed the inversion assembling of multiclass nanoscale devices, and these devices are from having the SiNWs that type dopant and doped level is carried out controlled doping.Independent device has shown the similar behavior of device of making to tradition.A large amount of productions of these devices and high integration can be assembled and finish by arrange chemistry under auxiliary at electric field and fluent solution, and this will cause exciting practical application in nanoelectronics, avoid expensive manufacturing line simultaneously.And what we can suspect is, in conjunction with optical signalling, pn two utmost points intersect knot and can work as photodiode and pn solar cell, and bipolar transistor intersects can form phototransistor.

Arrange by battery and fluent solution and to have produced the parallel nano-wire array of a class.The direction of switching electric field and fluent solution is placed another kind of nano wire and can be formed nanowire crossbars very closely.

Figure 27 A-27F has illustrated the SiNW knot that intersects.Figure 27 A shows and has used the typical FE-SEM image of Al/Au as the crossed nanowire knot of contact lead-wire.Scale is 2 μ m.The diameter of nano wire is positioned at 20 to 50nm scope.Figure 27 B-27D shows pn respectively, the I-V behavior of pp and nn knot.Curve 110 and 120 corresponds respectively to independent p in the knot and the I-V behavior of n type SiNWs.Curve 130 is represented the I-V of the four-end method of tying by the pn among Figure 27 B and the two hold-carrying I-V that tie by pp among Figure 27 C and the 27D and nn respectively.In Figure 27 B, solid line is a follow current between lead-in wire 1 and 2, the I-V of the voltage between the while measuring lead wire 3 and 4, and dotted line is corresponding to going between follow current between 1 and 4, the I-V of the voltage between the while measuring lead wire 3 and 2.In Figure 27 C and D, solid line is the I-V that passes a pair of adjacent lead-in wire (1-2), and dotted line is to pass other three couples (1-4,2-3, I-V 3-4).Figure 27 E and 27F show the energy band diagram of the pn knot under forward bias and the reverse biased respectively.

Figure 28 A-28D has illustrated n ⁺The SiNW bipolar transistor that pn intersects.Figure 28 A shows the n in the SiNW structure (right side) of Semiconductor Physics (left side) and intersection ⁺The common base wiring schematic diagram of pn bipolar transistor.This n ⁺, p and n type SiNWs play the effect of emitter, base stage and collector electrode respectively.Base earth.The emitter back bias voltage is at particular value.Collector electrode is from just scanning to negative.Figure 28 B shows the typical FE-SEM image of SiNW bipolar transistor.Scale is 5 μ m.Figure 28 C shows the n of 15 μ m separately at emitter and base stage SiNWs ⁺The behavior of the relative collector to-boase voltage of collector voltage that writes down on the pn transistor.Curve 1 to 4 is corresponding to being-1 ,-2 at emitter base voltage ,-3, and the behavior during-4V.Area I and II are separated by solid line, correspond respectively to saturation condition and active state.Figure 28 D shows the gain relation of relative collector to-boase voltage of common base current.

Figure 29 A-29D marginal data complementary inverter and tunnel diode.Figure 29 A show in the Semiconductor Physics (on) complementary inverter and the complementary inverter (descending) that intersects to form by lightly doped pn.In the schematic diagram below, an end of n type nano wire places-bias voltage of 5V, and an end ground connection of p type nano wire.Input voltage is a back gate voltage, the other end of p and n type nano wire by short circuit with as output.Figure 29 B shows the relation of the data of the relative input voltage of input voltage in pn intersects inverter.The illustration of Figure 29 B is the I-V curve of the p type nano wire in the inverter.It is-50 that curve 1 to 5 corresponds respectively to back gate voltage ,-30 ,-10,0 and the I-V of 10V.N type nano wire in this inverter has similar I-V behavior, can be exhausted fully during for-30V at gate voltage.Figure 29 C shows the data of the two hold-carryings measurement of the tunnel diode of being made by heavily doped pn intersection.The I-V behavior of independent p and n type SiNWs is tested and be shown as linear.Illustration among Figure 29 C has launched to demonstrate that part of I-V curve of NDR.Figure 29 D shows the energy band diagram of the SiNW tunnel diode of intersection.When reverse biased (for example, the position 1 in Figure 29 C), electronics can penetration tunnel knot (figure on the left side).When little forward bias (for example, the position 2 in Figure 29 C), it also is (the middle figure) that allows that electron tunnel penetrates.When the forward bias that further increases (for example, the position 3 in Figure 29 C), electron tunnel penetrates be under an embargo (figure on the right).

The controlled placement of lip-deep nano wire

1. in sonicated (sonicate) groove, to the nano wire sonicated in the ethanol about 3 minutes, prepare the nanowire suspended liquid in the stable ethanol.

2. substrate (silicon chip) is used and have-NH ₂The self assembly molecule layer (SAM) of tip covers.

3. constitute the model of microfluid by PDMS.When substrate contacts with the PDMS model, form the microchannel, three faces of conduit are corresponding to modeled three features in model, and the 4th face be corresponding to the surface of substrate, carries out chemical modification described in this substrate such as the step 2.

4. on substrate, apply+during 100 volts of bias voltages, make nanowire suspended liquid flow through the microchannel of having made.Behind about 10 minutes flowing time, use the ethanol flushing channel, then natural air drying.When removing the PDMS die, we obtain the nano-wire array arranged at flow direction at substrate surface.

5. pass through to change flow direction, and use scheme successively, we can obtain a plurality of right-angled intersections (cross-bar) by nano-wire array, and this is considered to be used for our the most important structure from the device of nano wire making.

6. by form pattern on the surface, we can be at the nano wire of arranging (location) somewhere, so make that creating more regular device array becomes possibility.

Patterning process: I, apply one deck PMMA in substrate surface rotation, then use EBL (electron beam lithography) to inscribe pattern, the Si surface of promptly optionally exposing, the Si surface that these are exposed are afterwards by chemical functional groupization (in step 2).II, we have had the PMMA groove now, are had in ditch trough bottom-the Si surface of the exposure that the SAM of NH2 covers.When we make nanowire suspended liquid flow through these patterns (as in step 4, described in 5, in this situation, be exactly that these surfaces are patterned), nano wire will be directed into the PMMA groove.At last, we take PMMA off, and are bonded at the lip-deep nano wire of PMMA.Therefore, only there is the nano wire that rests on the PMMA channel bottom to stay substrate surface, so we obtain clean device array.

The guiding one-dimensional nano structure is assembled into functional network

Having represented the yardstick that is used for the minimum that electronics and exciton effectively transport as the one-dimensional nano structure of nano wire and nanotube, therefore is the desirable construction unit that is used for the classification assembling of the electronics of functional nano yardstick and photon structure.We have reported a kind of method that is used for the one-dimensional nano structure classification is assembled into intact functional network.We show, and by the control equispaced, and with Flow Control arrangement and the combination of patterned surface technology, the nano wire assembling can be parallel array, and the patterned surface technology also is possible for control cycle.In addition, the nano-wire array of complex cross can use has the assembling successively of different flow directions to prepare to continuous step.Transport and studies show that nano-wire array has formed electric wire guide network across, addressable individually device function is arranged in each crosspoint.

Represented the attractive construction unit of the classification assembling that is used for functional nano yardstick device, these nanoscale devices can overcome the traditional basic theories of making based on photoetching technique and the restriction of economic aspect as the nanoscale material of nanocluster and nano wire.The research that concentrates on the zero-dimension nano cluster has caused important progress, comprises having the array assembling of expanding in order from nanometer to the micron length dimension.On the contrary, seldom successful as the assembling of the one-dimensional nano structure of nano wire (NWs) and carbon nano-tube (NTs), though these materials provide the great potential as the construction unit of nanoelectronics and optical application.

In order to obtain nano wire and the substantial potentiality of carbon nano-tube in these and other field of nanometer technology, with the controlled and predictable assembling of the intact nanostructure of needs.We have reported a kind of method of classification assembling of the 1D of being used for nanostructure, by this method with the interval of control easily and the locus nano wire that in liquid stream, aligns.The crossed nanowire array also uses to be had different flow directions successively to assemble to continuous step to prepare.Transport and studies show that the crossed nanowire array has formed electric wire guide network, independent addressable device function is arranged at each nano wire/nanowire crossbars point.This method can be used to organize other 1D nanostructures to become height device array integrally potentially, and therefore the inversion assembling for new electronics and photonic system provides a general approach.

Use the growth of laser cocatalyst to synthesize gallium phosphide (GaP), indium phosphide (InP), the silicon (Si nano wire) that in these research, uses, subsequently they are suspended in the ethanolic solution.Normally, by with the Flow Control channel design of nanowire suspended liquid by forming between the substrate of dimethyl silicone polymer (PDMS) model peace, we have assembled nano-wire array (Figure 30 A and 30B).For assembling process described below, use single (Figure 30 A) respectively and (Figure 30 B) that intersect successively flows, can obtain parallel easily and the crossed nanowire array.

The example of the parallel assembling of a typical nano wire (Figure 31 A) shows that nearly all nano wire is all along direction arrangement, i.e. a flow direction.The little deviation that also has some relative flow directions, we will discuss below for this.The test shows of the nano wire of the assembling of carrying out at length yardstick more, this arrangement has surpassed hundreds of nanometers easily.In fact, based on using width from 50 to 500 μ m, the experiment that the passage of length from 6 to 20mm carries out finds that the arrangement of these nano wires extends to the mm length yardstick, and they look like by the size of Flow Control passage limits.

We have carried out several classes and have tested and understand the control arrangement of nano wire and the factor of equispaced.At first, we find can control by flow velocity the degree of arrangement.Along with the increase of flow velocity, narrow down significantly with respect to the angular distribution width of the nano wire of flow direction (for example, the illustration of Figure 31 C).The dispersion of distribution that contrast is measured under a series of conditions shows, width from we minimum flow velocity (～4mm/s) descend fast, and when～10mm/s almost constant value of convergence (Figure 31 C).The highest flow velocity that detects in our research, the nano wire above 80% are arranged in the scope interior (illustration, Figure 31 C) of flow direction ± 5 degree.Our observed result can explain in the framework of shear flow.Specifically, the passage stream that shows at substrate is similar to shear flow, and before nano wire is fixed on the substrate they is arranged on the flow direction.Higher flow velocity produces higher shearing force, so cause better arrangement.

In addition, can control average nanowire surface coverage rate (Figure 31 D) by the duration of flowing.The experiment of carrying out under constant flow rate shows that nanowire density systematically increases along with the mobile duration.In these experiments, the mobile duration of 30min produce about 250 nano wires/100 μ m density or～the average nano wire of 400nm/nano wire at interval.Prolonging sedimentation time, can to produce spacing be the 100nm and the nano-wire array of magnitude still less.We notice that deposition rate depends on the surface chemistry degree of functionality consumingly, so equispaced-time relationship depends on the surface chemistry degree of functionality consumingly.Especially, we have shown GaP, InP and SiNWs ratio stops at methyl on the individual layer of amino termination (terminated) individual layer or naked SiO ₂Deposition is faster on the surface, and the amino individual layer that stops has the part positive charge.Also it is important to recognize do not have the minimum interval of the getable nano wire arrangement of institute of nano wire-nano wire contact will depend on the length of employed nano wire in assembling process.Nearest progress should increase the scope of available contactless spacing, and this progress has shown the control of the nanowire length from 100 nanometers to the dozens of micro-meter scale.

Our result has showed the serializing of the nano thread structure on the length dimension tissue (scales-organization) of the line of a plurality of nanometer diameters, and the line of this nanometer diameter is surpassing the interval that has on the area of mm-scale from 100nm to the micro-meter scale.This hierarchical sequence can connect microcosmic and macrocosm easily, may need the locus also to be determined though the assembling with maximum control is become.By utilizing in the substrate of chemical patterning and the chemical interaction of the complementation between the nano wire (Figure 32 A), we have realized the purpose that this is important.The SEM image (Figure 32 B-32D) of representative experiment shows the parallel nano-array that has with the picture on surface same lateral cycle.These data show that nano wire is preferably assembled in the definite position of chemical pattern institute, and, show that the pattern of preiodic type can be woven to set of nanowires the superstructure of a rule.It is important that the surface of recognizing patterning can not provide the control that the 1D nanostructure is organized separately.Assembling at the lip-deep nanotube of patterning and nano wire shows, with the surface in alignment of patterning, and overlap joint and seldom direction control is arranged around the 1D nanostructure on the surface of patterning.We use liquid flow to avoid these important problem, make that controlled assembling becomes possibility on one or more directions.By this method is combined with the patterned surface method, should produce the intact nano-wire array of the restriction that surmounts conventional lithographic techniques, these other patterned surface method is as forming and the spontaneous ordering of molecule in the nanoscale farmland of diblock copolymer.

Use the scheme successively as Figure 31 B explanation, our usual way can be used to set of nanowires is woven to more complicated chi structure, and the nano-device array is crucial to these structures for building closely.The formation of that intersect and more complicated structure needs the interaction of nanostructure-substrate enough strong, so that follow-up flow step can not influence the step of front, we find that this condition is obtainable.For example, in two step assembling process, in mobile right-angled intersection (crossbar) structure (Figure 33 A and 33B) that produced of right angle orientation up conversion.Two width of cloth figure show, with a kind of very direct, low-cost, quick and measurable process, can access a plurality of right-angled intersections at the interval that hundreds of nanometers between independent crosspoint, are only arranged.Though the interval between independent nano wire is not quite identical, use the surface energy of aforesaid patterning to be susceptible to periodic array easily.Importantly, these criss-cross constructions can produce functional device (as follows).

We believe that the present relatively work of method that we are used for the assembling that is guided of a plurality of crossed nanowire arrays provides very big advantage, the structure that this method has been used deposition at random, the direct manipulation and the electric field of independent nano wire and nanotube are made single intersection.Use random deposition and handle and be difficult to obtain the required a plurality of right-angled intersections of integrated nano-device.But electric field makes the assembling more control is become possibility, this method also is subject to the electrostatic interference between (i) adjacent electrode, because under micron level, measure at interval, (ii) making is used for the needs of large-scale photoetching technique of electrode of the assembling of a plurality of nano-wire devices structures.Our flow control method is very parallel with measurable in essence, and by controlling the angle between the liquid flow path direction simply in continuous number of assembling steps, it is with respect to the assembling that is guided of going up complicated structure how much.For example, in three layers of sedimentary sequence, make to become 60 ° of angles between the flow direction, assembled an equilateral triangle (Figure 33 C).Therefore, this mobile aligning method provides a kind of method flexibly to satisfy needs to many device configurations, comprises the assembling of a plurality of nano wires of those needs " layer ".

The enough suspension with semiconductor nanowires of electric field energy is arranged as parallel nano-wire array and single nanowire crossbars, and wherein the microelectrode of patterning is used to create field mode.But, the tangible difficulty in the field edgeization and the assembling that can cause a plurality of intersections under the submicron yardstick of charging.

Successively assembling important feature of scheme is, each layer is independent of other layers, therefore, can obtain multiple homogeneous and heterojunction structure at each point by the composition that changes the nanowire suspended liquid that is used for each step simply.For example, should be possible be, use our method directly to assemble n type and p type nano wire and nanotube, mark the position of independent nanoscale devices subsequently, wherein nanowires/nanotubes plays the effect of distribution and active device element.Typically 2 * 2 right-angled intersection arrays of being made up of n type InP nano wire have been showed this viewpoint, and wherein eight terminals of all of nano wire connect (Figure 33 D) by metal electrode.Transport measurement (33E) and show can flow through in eight terminals any two of electric current, make that the electrical properties of independent nano wire and nano wire-nanowire-junction can be evaluated.Current-voltage (I-V) data of record have shown the behavior (curve 200) of linear and approximately linear in four crosspoints each, and the desired value of tying with the n-n type is consistent.Because the single nano wire/nano wire p-n junction that is formed by random deposition has shown the behavioural characteristic of light-emitting diode (LED), we believe, clearly our method can be used to assemble more complicated nano-device on the nano luminescent diode (nanoLED) of high density and addressing separately and the electricity.

These researchs provide a kind of general and reasonable method for the classification assembling that makes the 1D nano material become intact functional network, and this functional network can connect nanometer to the micron-scale field.We have shown, by combining with the patterned surface technology to the control of equispaced with the hydraulic control arrangement, the nano wire assembling can be parallel array, and the patterned surface technology also may be used for control cycle.In addition, we have showed by change flow direction in the step of sequence and have come the possibility of synthetic structure that intersect and more complicated successively, and have obtained preliminary result, point out this method can be extended to 1D nanostructure as carbon nano-tube.We believe that the assembling of flowing has been represented and are used for a kind of general strategy that assembling nanometer line and nano tube structure unit become wiring, the interconnected and structure that functional device is required, therefore can become possibility so that be used for the example of the inversion making of Mirae Nano Technologies Co., Ltd..

Extra studies show that, uses flow control method the carbon nano-tube and the double-deck DNA suspension of individual layer can be arranged as parallel array.

Figure 30 A-30B is the schematic diagram that is used for the Flow Control channel design of mobile assembling.Figure 30 A shows the passage that forms when flat substrate contacts at the PDMS model.By in passage, making nanowire suspended liquid, carry out the assembling of nano wire with one period duration that sets of controlled flow rate.When the PDMS model is removed, on the flow direction on the substrate, can observe the parallel array of nano wire.Figure 30 B has illustrated, successively can obtain a plurality of crossed nanowire arrays by changing flow direction in the assembling process.

Figure 31 A-31D has illustrated the parallel assembling of nano-wire array.Figure 31 A and 31B are the SEM images of the parallel array of the InP nano wire of arrangement in passage stream.In Figure 31 A and 31B, scale equals 2 μ m and 50 μ m respectively.Soaked 30 minutes by chloroformic solution at 1 mM triethoxy .3-aminopropyl silane (APTES), then 110 ℃ of heating 10 minutes, the silicon (SiO that in the assembling of flowing, uses ₂/ Si) substrate uses the amino self-assembled monolayer (SAM) that stops to carry out functionalization.All substrates of using in testing below all are with the similar methods functionalization, unless mention especially.Figure 31 C shows about the nano wire angle of flow direction and flowing velocity relation and launches.Each point in the drawings is the statistical analysis acquisition (for example, seeing illustration) by the angular distribution of right～200 nano wire.This illustration shows the block diagram of the nano wire angular distribution when flow velocity is 9.40mm/s.Averag density will be by calculating divided by width of channel in the nano wire average number of any passage cross section.All experiments all are to carry out during for 6.40mm/s at flow velocity.

Figure 32 A-32D has illustrated the periodically assembling of nano-wire array.Figure 32 A installs to schematic diagram on the substrate of chemical patterning with set of nanowires.The surface that the light gray zone stops corresponding to amino, and that the Dark grey zone stops corresponding to methyl or exposed surface.Nano wire is preferably adhered to the amino from the teeth outwards zone that stops.Figure 32 B and 32C show the spacing of arranging on polymethyl methacrylate (PMMA) patterned surface be the GaP nano-wire array of 5 μ m and 2 μ m.Zone dark in the image is corresponding to residual PMMA, and the corresponding amino SiO that stops in bright zone ₂/ Si surface.Nano wire is preferably adhered to the amino from the teeth outwards zone that stops.By electron beam (E bundle) the photoetching technique patterning PMMA of standard, soaked 30 minutes in the ethanolic solution of 0.5% APTES on the SiO2 surface that obtains, then 110 ℃ of heating 10 minutes by functionalization.Scale equals 5 μ m and 2 μ m respectively in Figure 32 B and 32C.Figure 32 D shows spacing that the SAM surface of using patterning the obtains GaP nano wire parallel array as 500nm.SiO ₂The SAM that/Si surface at first uses methyl to stop carries out functionalization, soaks 15 minutes in pure HMDS (HMDS) in the time of 50 ℃, then 110 ℃ of heating 10 minutes.Patterning is carried out by the array that E bundle photoetching technique forms the parallel feature with 500nm cycle in this surface, then uses APTES to carry out functionalization.Scale equals 500nm.

Figure 33 A-33E has illustrated the assembling successively of crossed nanowire array and has transported measurement.Figure 33 A and 33B show the typical SEM image of InP nano wire, and this InP nano wire is to use two of rectangular flow direction to go on foot in the assembling process in to continuous step to obtain.In the drawings, highlighted flow direction with arrow.Figure 33 C shows the equilateral triangle of the GaP nano wire that obtains in three step assembling process, become 60 ° of angles between the flow direction, respectively with the digital arrow indication of band.In this three width of cloth image, scale equals 500nm.Figure 33 D shows by using rectangular flowing to assemble typical 2 * 2 crossed arrays that n type InP nano wire is made successively.Use E-bundle photoetching technique patterning Ni/In/Au contact electrode.Before carrying out electro-deposition, with nano wire in 6% HF solution momently (3-5s) corrosion to remove unsetting oxide skin.Figure 33 E shows the typical I-V curve of the two hold-carryings test on 2 * 2 crossed arrays.Curve 210 has been represented four independent nano wires, and (ad, bg, cf, I-V eh), curve 200 have represented and have passed four n-n junctions (ab, cd, ef, I-V gh).

We have showed field-effect transistor, pn knot, light-emitting diode, bipolar transistor, complementary inverter, tunnel diode.We can use nano wire to make existing all types of semiconductor device.Potential application is as follows:

(1) chemistry and biology transducer

(2) storage and calculating

(3) photodetector and polarisation detector

(4) indicating label of use photoluminescent property

(5) single-electronic transistor

(6) laser

(7) photovoltage solar cell

(8) be used for the ultra-fine needle point of scanning probe microscopy and approach pattern picture

(9) be used for the extra small electrode of electrochemistry and biological applications

(10) be used for nanoelectronics and optoelectronic interconnection line

(11) temperature sensor

(12) pressure sensor

(13) flow sensor

(14) mass sensor

(15) single photon emission device and detector

(16) be used for the ballistic transport and relevant the transporting of quantum calculation

(17) electron spin device (Spintronics device)

(18) be used for the assembling of the nano wire of 2D and 3D photonic band gap gap material

Be to being used for the description of assembling nanometer line below with the substitute technology of formation device.Fluidics can be used to assembling nanometer line.

Nano wire (or any other slim-lined construction) can be arranged by introduce the nano wire flow of solution on the surface, and wherein this liquid stream can be passage stream or the liquid stream that passes through any other path.

Having the controlled location and the nano-wire array in cycle can be by to substrate basal surface patterning and/or use the surface of different degree of functionality modulation nano wire to produce.

Wherein, obtain control by designing special complementary active force (chemistry, biology, static, magnetic or optics) between patterned surface and line to position and cycle, for example the A line enters A ' modelling zone, the B line enters B ' modelling zone, and the C line enters C ' modelling zone etc.

Wherein, different molecule/materials can be used in the surface of substrate and/or nano wire, or different electric charges, different magneto (magneto) or different light intensity (for example, by the interference/diffraction pattern from light beam) or these combinations.

The nano wire of having assembled also can be transferred to another substrate (for example, passing through press back).

Nano wire can be assembled by complementary reciprocation.In the above methods, use liquid stream to come assembling nanometer line, though this is not limited in liquid stream.Complementary chemistry, biology, static, magnetic and optical interaction also can be studied separately and be used for nano wire and assemble (though have still less control).

Nano wire can use physical patterns (pattern) to assemble.Use as physical models such as the step on surface, groove with the nano wire solution deposition on substrate.

Nano wire surfacewise step corner or arrange along groove.

Physical model can be by pattern or any other model of natural lattice step, self assembly diblock copolymer striped, mint-mark.

Nano wire can be by electrostatic interaction between the nano wire or magnetic force assembling.By introducing electric charge in nanowire surface, the electrostatic force between the nanometer can be arranged as them certain model, for example parallel array.

Use LB film can assembling nanometer line.Nano wire is at first by surface modulation, and the surface that is distributed to liquid phase is to form Langmuir-Bei Lijite (Langmuir-Blodgett, LB) film.Then, by compressive surfaces, nano wire can be aligned to different model (for example parallel array).Next, this nano wire model can be transferred on the substrate of wanting.

Nano wire can be assembled by shear tension, by nano wire being dispersed in the scalable matrix (this may be a polymer), then elongates this matrix in a direction, and under the effect of the shearing force that causes, nano wire can be arranged at draw direction.Then remove matrix, the nano-wire array after the arrangement can be transferred on the substrate of wanting.

Wherein, the stretching of matrix can cause by machinery, electricity, optics, magnetic force.Draw direction can be in or be not on the face of substrate.

Some illustrative embodiment of claimed invention below now having described, but should be apparent that for the those of skill in the art in this area aforesaid only is illustrative, rather than restrictive, only with the method for example it is expressed.Countless improvement and other illustrative embodiment are in those of ordinary skills' limit of power, and are considered to fall in the scope of the claim of setting below.Especially, though many examples of explanation here relate to the combination of special method behavior or system element, it should be understood that these behaviors can make up to finish identical purpose with additive method with these elements.Only with the relevant behavior of discussing of an embodiment, element and the feature of system or method be not intentionally from other embodiment similar role be excluded.And, add the restriction of function (method-plus-function) for mentioned one or more methods in the claim below, its method is not to be limited to the method that is used to carry out mentioned function disclosed herein wittingly, but cover any method that is equal to that can be used for carrying out mentioned function wittingly, no matter be known or development later on now.

Claims

1. a body doped semiconductor is characterized in that, its be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; At least a portion has the semiconductor that mixes up less than the stand alone type of the minimum widith of 500 nanometers and body, and wherein the phenomenon that produces of the semiconductor section that is mixed up by body shows the caused quantum limit of described section size.

2. semiconductor according to claim 1, wherein said semiconductor is elongated, and described size is at the width on arbitrfary point, described semi-conductive vertical section.

3. as semiconductor as described in the claim 2, electric charge carrier can be carried in not scattering ground in wherein said vertical section.

4. as semiconductor as described in the claim 3, electric charge carrier can be carried so that electric charge carrier passes through the vertical section along trajectory in wherein said vertical section.

5. as semiconductor as described in the claim 3, electric charge carrier can be carried so that electric charge carrier coherently passes through the vertical section in wherein said vertical section.

6. as semiconductor as described in the claim 2, wherein said vertical section can carry electric charge carrier in case electric charge carrier by spin polarization.

7. as semiconductor as described in the claim 6, electric charge carrier can be carried in wherein said vertical section, and ground does not pass through the vertical section so that the electric charge carrier of spin polarization is not lost spin information.

8. as semiconductor as described in the claim 2, wherein said vertical section can respond stimulated luminescence, and wherein light emitted wavelength is relevant with described width.

9. as semiconductor as described in the claim 99, wherein light emitted described wavelength and described width are proportional.

10. body doped semiconductor, it shows relevant the conveying.

11. a body doped semiconductor, it shows along trajectory and carries.

12. a body doped semiconductor, it shows the liquid behavior of Luttinger.

13. the method for a growing semiconductor, described method comprises operation:

(A) mix up the described semi-conductive while in described semi-conductive growth course, control described semi-conductive width by apply energy to elements collection, described elements collection comprises described semiconductor molecule, mixes up material molecule and catalyst material molecule.

14. as method as described in the claim 13, wherein Sheng Chang semiconductor is to be following one of them doped semiconductor at least: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

15., also comprise operation as method as described in the claim 13:

(B) increase one or more other materials to the surface of described doped semiconductor.

16. as method as described in the claim 15, wherein operation (B) comprises the shell that forms around described doped semiconductor.

17. as method as described in the claim 13, wherein operation (A) comprising:

The degree that control mixes up.

18. as method as described in the claim 13, wherein operation (A) comprises that described elements collection comprises described semiconductor molecule and mixes up material molecule by apply the energy doped semiconductor of growing to elements collection.

19. as method as described in the claim 18, wherein operation (A) comprises operation:

The degree that control mixes up.

20. as method as described in the claim 19, wherein said control mixes up operation and comprises quantity and the described ratio that mixes up the material molecular amounts of controlling described semiconductor molecule.

21. as method as described in the claim 19, wherein operation (A) also comprises:

Use the described molecule of laser vaporization to form the molecule of vaporization.

22. as method as described in the claim 21, wherein operation (A) also comprises:

From the described vaporized molecules described semiconductor of growing.

23. as method as described in the claim 21, wherein operation (A) also comprises:

Described vaporized molecules is condensed into liquid group.

24. as method as described in the claim 22, wherein operation (A) also comprises:

From the described semiconductor of described liquid group's growth.

25. as method as described in the claim 21, wherein operation (A) uses the growth of laser auxiliary catalysis to carry out.

26. as method as described in the claim 18, wherein elements collection comprises the catalyst material micel.

27. as method as described in the claim 26, wherein operation (A) comprising:

Control described semi-conductive width.

28., wherein control described semi-conductive width and comprise as method as described in the claim 27:

Control the width that described catalysis is rolled into a ball.

29. as method as described in the claim 13, wherein operation (A) also comprises:

At least on described molecule, carry out chemical vapour deposition (CVD).

30. as method as described in the claim 13, wherein Sheng Chang described semiconductor has at least one and has part less than the minimum widith of 20 nanometers.

31. as method as described in the claim 30, wherein Sheng Chang described semiconductor has at least one and has part less than the minimum widith of 10 nanometers.

32. as method as described in the claim 30, wherein Sheng Chang described semiconductor has at least one and has part less than the minimum widith of 5 nanometers.

33. as method as described in the claim 13, wherein Sheng Chang described semiconductor is a magnetic.

34. as method as described in the claim 33, wherein operation (A) comprising:

With making the magnetic material of semiconductor of described growth mix up described semiconductor.

35. as method as described in the claim 13, wherein Sheng Chang described semiconductor is ferromagnetic.

36. as method as described in the claim 35, operation (A) comprising:

With making the semiconductor of described growth have ferromagnetic material to mix up described semiconductor.

37. as method as described in the claim 36, wherein operation (A) comprising:

Mix up described semiconductor with manganese dioxide.

38. a method of making device is characterized in that, this method comprises following operation:

(A) make one or more semiconductors with the surface contact, wherein, in the described semiconductor at least a be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

39. as method as described in the claim 38, wherein said surface is a substrate.

40., also comprise operation as method as described in the claim 38:

(B) preceding in operation (A), by to semiconductor molecule with mix up material molecule and apply grow at least a in the described semiconductor of energy.

41. as method as described in the claim 38, wherein operation (A) comprising:

Make that comprising described solution at least a or more multiple semiconductor contacts with described surface.

42., also comprise as method as described in the claim 41:

(B) use electric field that in the described semiconductor one or more are alignd on described surface.

43. as method as described in the claim 42, wherein operation (B) comprising:

Between at least two electrodes, produce electric field; With

In the described semiconductor one or more are placed between the described electrode.

44., also comprise operation as method as described in the claim 41:

(B) use another kind to comprise one or more other semi-conductive solution repetitive operations (A), at least a in wherein said other semiconductors be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

45., also comprise operation as method as described in the claim 38:

(B) regulate described surface so that the semiconductor of described one or more contacts is connected to described surface.

46. as method as described in the claim 45, wherein operation (B) comprising:

On described surface, form raceway groove.

47. as method as described in the claim 45, wherein operation (B) comprising:

On described surface, form pattern.

48., also comprise as method as described in the claim 38:

49. as method as described in the claim 48, wherein operation (B) comprising:

Between at least two electrodes, produce electric field; With

50. a method that produces light is characterized in that this method comprises following operation:

(A) apply energy to one or more semiconductors and cause described one or more semiconductor light emittings, wherein, at least a in the described semiconductor be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

51. as method as described in the claim 50, wherein said semiconductor comprises direct gap semiconductor.

52. as method as described in the claim 50, wherein operation (A) comprises that the semi-conductive knot of crossing over two kinds of intersections applies voltage, every kind of semiconductor has the minimum widith less than 500 nanometers.

53. as method as described in the claim 52, wherein every kind of semiconductor has the minimum widith less than 100 nanometers.

54., also comprise operation as method as described in the claim 50:

(B) by controlling the described at least a light emitted wavelength of semi-conductive size Control that has less than the minimum widith of 100 nanometers.

55. as method as described in the claim 54, wherein said semiconductor is elongated, and operation (B) comprising:

Control the semi-conductive width of described elongation.

56. as method as described in the claim 54, wherein:

This semiconductor has a character, if promptly a large amount of described semiconductors has the shortest size of minimum, then it is luminous at first wavelength, and

The size of described semiconductor controlled system is less than the shortest size of described minimum.

57. a manufacturing has the method for the device of body doped semiconductor parts and and a plurality of miscellaneous parts, this method comprises following operation:

(A) semiconductor that doped semiconductor is mixed up with generation during semiconductor growing; And

(B) semiconductor device that will mix up is attached at least one parts in one and a plurality of miscellaneous parts.

58. as method as described in the claim 57, wherein body doped semiconductor parts be at least following one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers, and at least a portion has less than the stand alone type of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

59. one kind is used for the process that controllable assembling has the semiconductor device that elongates the unit, described elongation unit has characteristic size crossing on nanoscale on the direction of described unit, and described process comprises:

Produce at least one first first module of mixing up type;

Described first module is directed on the first direction, and

Described first module is connected at least one first contact so that electric current is flow through described first module.

60., also comprise as process as described in the claim 59:

Produce at least one and second mix up Unit second of type;

Described Unit second is directed on the second direction, enables the electric contact between described first module and the described Unit second, and

Described Unit second is connected at least one second contact to allow electric current to flow between described Unit first and second.

61. as process as described in the claim 60, if wherein described first to mix up type be the p type,

Then described second to mix up type be the n type, if described first to mix up type be the n type,

Then described second to mix up type be the p type.

62. as process as described in the claim 60, wherein by applying in electric field and the flow of liquid the directed described Unit second of one at least.

63., also comprise as process as described in the claim 59:

Be connected to described first module on the isolated contact and between isolated contact, place a gate electrode, form FET by this near described first module place.

64. as process as described in the claim 59, wherein said semiconductor device is by selecting by Si, Ge, Sn, Se, Te, B, Diamond, P, B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn, SiC, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, ZnO/ZnS/ZnSe/ZnTe, CdS/CdSe/CdTe, HgS/HgSe/HgTe, BeS/BeSe/BeTe/MgS/MgSe, Ges, GeSe, GeTe, SnS, SnSe, SeTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, AgF, AgCl, AgBr, AgI, BeSiN2, CaCN2, ZeGeP2, CdSnAs2, ZnSnSb2, CuGeP3, CuSi2P3, (Cu, Ag) (Al, Ga, In, Tl, Fe) (S, Se, Te) 2, Si3N4, Ge3N4, Al2O3, (Al, Ga, In) 2 (S, Se, Te) 3 and the material of the gang that forms of Al2CO make.

65. as process as described in the claim 59, wherein said first to mix up type be one of n type or p type.

66. as process as described in the claim 59, wherein by applying in electric field or the flow of liquid the directed described first module of one at least.

67., wherein state first module and be suspended in the described flow of liquid as process as described in the claim 66.

68. the described process of claim 59 is wherein by applying the directed described first module of mechanical means.

69., wherein state Unit second and be suspended in the described flow of liquid as process as described in the claim 59.

70. the described process of claim 59 is wherein by applying the directed described Unit second of mechanical means.

71. a semiconductor device, it comprises:

Silicon substrate with hard contact array;

The crossbar switch unit, described unit and array electrical communication, and have first contact that p N-type semiconductor N nano wire forms and

Second contact that forms by n N-type semiconductor N nano wire of opening with first contact separation and laterally placing.

72. as semiconductor device as described in the claim 71, wherein said second contact is opened 1 to 10 nanometer with described first contact separation.

73. a method that is used to make nanowire semiconductor device comprises by applying electromotive force between the contact, location first nano wire between two contacts;

Location second nano wire between two other contact.

74. a method that is used to make nanowire semiconductor device comprises forming to have one or more surfaces of optionally adsorbing the zone of nano wire.

75. a method that is used for making with nano wire light-emitting diode, described diode have the emission wavelength by the size decision of the p-n junction between the nano wire that mixes up at two.

76. make method for semiconductor and be connected with n type nano wire for one kind by the p type nano wire that intersects.

77. a method of assembling one or more elongated structures from the teeth outwards, described method comprises operation:

(A) the mobile liquid that comprises one or more elongated structures on described surface;

With

(B) the one or more elongated structures of alignment on described surface are to form the array of described elongated structure.

78. as method as described in the claim 77, wherein operation (A) is included on the first direction flow described liquid and operation (B) and is included in the described liquid one or more elongated structures that align lines up the structure of array to form ground floor when first direction flows, and wherein said method also comprises:

(C) described liquid flow direction is changed to second direction from first direction;

With

(D) repetitive operation on second direction (A) and (B) line up the structure of array to form the second layer.

79. as method as described in the claim 78, comprise repetitive operation (C) and (D) once or more times.

80., wherein contact with at least one second elongated structure from described second array from least one first elongated structure of described ground floor as method as described in the claim 78.

81. as method as described in the claim 80, one of wherein said first and second elongated structures are the doped semiconductor of first conduction type, another of first and second elongated structures is the doped semiconductor of second conduction type.

82. as method as described in the claim 81, wherein said first conduction type is that p type and described second conduction type are the n types, and wherein said first and second elongated structures have formed p-n junction.

83. as method as described in the claim 77, wherein said surface is the surface of substrate.

84. as method as described in the claim 83, wherein said method also comprises:

(C) array of elongated structure is transferred to the surface of another substrate from the surface of described substrate.

85. as method as described in the claim 84, wherein operation (C) comprises punching press.

86. as method as described in the claim 77, wherein said one or more elongated structures align in still being included in described liquid the time from the teeth outwards.

87. as method as described in the claim 77, wherein said method also comprises:

(C) function that is adsorbed onto described lip-deep ad-hoc location with one or more elongated structures is regulated described surface,

Wherein, operation (B) comprises and uses described one or more functions that one or more elongated structures are adsorbed onto ad-hoc location.

88. as method as described in the claim 87, wherein operation (C) comprising:

With the described surface of one or more molecular regulation.

89. as method as described in the claim 87, wherein operation (C) comprising:

Regulate described surface with one or more electric charges.

90. as method as described in the claim 87, wherein operation (C) comprising:

Regulate described surface with one or more magnets.

91. as method as described in the claim 87, wherein operation (C) comprising:

With the described surface of one or more light intensity regulating.

92. as method as described in the claim 87, wherein operation (C) comprising:

With one or more one or more elongated structures are regulated described surface with the function that chemical action power is adsorbed onto lip-deep ad-hoc location.

93. as method as described in the claim 87, wherein operation (C) comprising:

With one or more one or more elongated structures are regulated described surface with the function that the light active force is adsorbed onto lip-deep ad-hoc location.

94. as method as described in the claim 87, wherein operation (C) comprising:

With one or more one or more elongated structures are regulated described surface with the function that electrostatic force is adsorbed onto lip-deep ad-hoc location.

95. as method as described in the claim 87, wherein operation (C) comprising:

With one or more one or more elongated structures are regulated described surface with the function that magnetic force is adsorbed onto lip-deep ad-hoc location.

96. as method as described in the claim 87, wherein said method also comprises:

(C) pattern that receives one or more elongated structures on described lip-deep ad-hoc location is made on described surface.

97. as method as described in the claim 96, wherein operation (C) comprising:

On described surface, create the physics pattern.

98. as method as described in the claim 97, wherein said physics pattern is a groove.

99. as method as described in the claim 97, wherein said physics pattern is a step.

100. as method as described in the claim 97, wherein said surface is the surface of substrate, and, wherein, on described surface, create the physics pattern and comprise:

Use the lattice step of described substrate.

101. as method as described in the claim 97, wherein said surface is the surface of substrate, and, wherein, on described surface, create the physics pattern and comprise:

Use two polymeric tapes of self-assembly.

102., wherein on described surface, create the physics pattern and comprise as method as described in the claim 97:

Use pattern.

103., wherein on described surface, create the physics pattern and comprise as method as described in the claim 102:

Pattern with printing.

104. as method as described in the claim 77, wherein operation (A) comprises and uses raceway groove to control flowing of described liquid.

105. as method as described in the claim 77, at least one in the wherein said elongated structure is semiconductor.

106. as method as described in the claim 77, at least one in the wherein said elongated structure is doped semiconductor.

107. as method as described in the claim 106, at least one in the wherein said elongated structure is the body doped semiconductor.

108. as method as described in the claim 77, at least one in the wherein said elongated structure is the single crystal semiconductor that mixes up.

109. as method as described in the claim 77, at least one in the wherein said elongated structure is to elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers.

110. as method as described in the claim 77, at least one in the wherein said elongated structure is to have at least one to have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

111. as method as described in the claim 77, at least one in the wherein said elongated structure is to be following one of them doped semiconductor at least: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up.

112. as method as described in the claim 111, wherein said doped semiconductor comprises and is selected from by Si, Ge, Sn, Se, Te, B, Diamond, P, B-C, B-P (BP6), B-Si, Si-C, Si-Ge, Si-Sn and Ge-Sn, SiC, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, BN/BP/BAs, AIN/AIP/AlAs/AlSb, GaN/GaP/GaAs/GaSb, InN/InP/InAs/InSb, ZnO/ZnS/ZnSe/ZnTe, CdS/CdSe/CdTe, HgS/HgSe/HgTe, BeS/BeSe/BeTe/MgS/MgSe, Ges, GeSe, GeTe, SnS, SnSe, SeTe, PbO, PbS, PbSe, PbTe, CuF, CuCl, CuBr, CuI, AgF, AgCl, AgBr, AgI, BeSiN2, CaCN2, ZeGeP2, CdSnAs2, ZnSnSb2, CuGeP3, CuSi2P3, (Cu, Ag) (Al, Ga, In, Tl, Fe) (S, Se, Te) 2, Si3N4, Ge3N4, Al2O3, (Al, Ga, In) 2 (S, Se, Te) 3, the semiconductor of the gang that Al2CO forms.

113. as method as described in the claim 111, wherein said doped semiconductor comprises coming the material that mixes up of gang that free following material forms: the p type from the III family of periodic table mixes up material; N type from the V family of periodic table mixes up material; The p type of selecting from the gang that is made up of B, Al and In mixes up material; The n type of selecting from the gang that is made up of P, As and Sb mixes up material; P type from the II family of periodic table mixes up material; The p type of selecting from the gang that is made up of Mg, Zn, Cd and Hg mixes up material; N type from the IV family of periodic table mixes up material; The p type of selecting from the gang that is made up of C and Si mixes up material; Or the n type of selecting from the gang that is made up of Si, Ge, Sn, S, Se and Te mixes up material.

114. as method as described in the claim 111, wherein said doped semiconductor is mixed up in described semi-conductive growth course.

115. one kind is assembled one and the method for the long structure of Duola more from the teeth outwards, wherein, one or more in the described elongate structure be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up, and wherein, described method comprises following operation:

(A) function that is adsorbed onto described lip-deep ad-hoc location with one or more one or more elongated structures is regulated described surface; With

(B) by using described one or more functions that described one or more elongated structures are adsorbed onto the ad-hoc location described one or more elongated structure that aligns.

116. as method as described in the claim 115, wherein operation (A) comprising:

With the described surface of one or more molecular regulation.

117. as method as described in the claim 115, wherein operation (A) comprising:

Regulate described surface with one or more electric charges.

118. as method as described in the claim 115, wherein operation (A) comprising:

Regulate described surface with one or more magnets.

119. as method as described in the claim 115, wherein, operation (A) comprising:

With the described surface of one or more light intensity regulating.

120. as method as described in the claim 115, wherein operation (A) comprising:

121. as method as described in the claim 115, wherein operation (A) comprising:

With the one or more described surfaces of functional conditions that one or more elongated structures are adsorbed onto lip-deep ad-hoc location with the light active force.

122. as method as described in the claim 115, wherein operation (A) comprising:

With the one or more described surfaces of functional conditions that one or more elongated structures are adsorbed onto lip-deep ad-hoc location with electrostatic force.

123. as method as described in the claim 115, wherein operation (A) comprising:

With the one or more described surfaces of functional conditions that one or more elongated structures are adsorbed onto lip-deep ad-hoc location with magnetic force.

124. a method of assembling a plurality of elongated structures from the teeth outwards, one or more in the wherein said elongate structure be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up, and wherein, described method comprises operation:

(A) the described a plurality of elongated structures of deposition on described surface; With

(B) described surface charging is produced electrostatic force with between in described a plurality of elongated structures two or more.

125. as method as described in the claim 124, wherein said electrostatic force make described two or more elongated structures alignment himself.

126. as method as described in the claim 125, wherein said electrostatic force makes two or more elongated structures himself to snap to one or more patterns.

127. as method as described in the claim 126, wherein said one or more patterns comprise parallel array.

128. a method of assembling a plurality of elongated structures from the teeth outwards, one or more in the wherein said elongate structure be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up, and wherein, described method comprises operation:

(A) on the liquid phase surface, deposit described one or more elongated structures to form the Langmuir-Blodgett film;

(B) the described Langmuir-Blodgett film of compression; With

(C) the Langmuir-Blodgett film transfer of compressing to the surface.

129. as method as described in the claim 128, wherein said surface is the surface of substrate.

130. a method of assembling a plurality of one or more elongated structures from the teeth outwards, wherein, in the described elongate structure at least one be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up, and wherein, described method comprises operation:

(A) on scalable matrix, disperse one or more elongated structures;

(B) stretch described scalable matrix in one direction to produce the shear stress that causes at least one elongated structure on described direction, to align on the one or more elongated structures;

(C) remove scalable matrix; With

(D) elongated structure of described at least one alignment is transferred on the surface.

131. as method as described in the claim 130, wherein said direction is parallel to the plane on described surface.

132. as method as described in the claim 130, wherein operation (B) comprising:

The electricity consumption induction effect power described scalable matrix that stretches.

133. as method as described in the claim 130, wherein operation (B) comprising:

With the light induction effect power described scalable matrix that stretches.

134. as method as described in the claim 130, wherein operation (B) comprising:

Answer the active force described scalable matrix that stretches with mechanical sense.

135. as method as described in the claim 130, wherein operation (B) comprising:

With the magnetic induction active force described scalable matrix that stretches.

136. as method as described in the claim 130, wherein said surface is the surface of substrate.

137. as method as described in the claim 130, wherein said scalable matrix is a polymer.

138. a system that is used for assembling from the teeth outwards one or more elongated structures, described system comprises:

Be used for the mobile device that comprises the liquid of one or more elongated structures on described surface; With

Be used on described surface, aliging described one or more elongated structures to form the device of elongated structure array.

139. a system that is used for assembling from the teeth outwards one or more elongated structures, wherein, one or more in the described elongated structure be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up, and wherein, described system comprises:

Be used for regulating the device on described surface with the function that one or more described one or more elongated structures are adsorbed onto described lip-deep ad-hoc location; Be used for by using described one or more functions that described one or more elongated structures are adsorbed onto the align device of described one or more elongated structures of ad-hoc location.

140. a system that is used for assembling from the teeth outwards a plurality of elongated structures, wherein, one or more in the described elongate structure be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up, and wherein, described system comprises:

Be used for described a plurality of elongated structures are deposited to described lip-deep device; With

Be used for described surface charging with at the device that produces electrostatic force between two or more of described a plurality of elongated structures.

141. a system that is used for assembling from the teeth outwards a plurality of elongated structures, wherein, one or more in the described elongate structure be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up, and wherein, described system comprises:

Be used on the liquid phase surface, disperseing described one or more elongated structures to form the device of Langmuir-Blodgett film;

Be used to compress the device of described Langmuir-Blodgett film; With

Be used for the described Langmuir-Blodgett film transfer of compressing to lip-deep device.

142. a system that is used for assembling from the teeth outwards a plurality of one or more elongated structures, wherein, at least one in the described elongate structure be following at least one of them: monocrystal; Elongate and semiconductor that body mixes up, described semiconductor is along the cross-sectional dimension that has on the arbitrfary point on its longitudinal axis less than 500 nanometers; And have at least one and have less than the stand alone type of the part of the minimum widith of 500 nanometers and the semiconductor that body mixes up, and wherein, described system comprises:

Be used on scalable matrix, disperseing the device of described one or more elongated structures;

Be used for stretching in one direction described scalable matrix on described one or more elongated structures, to produce the device that causes the shear stress that at least one elongated structure aligns on described direction;

Be used to remove the device of described scalable matrix; With

The elongated structure of described at least one alignment is transferred to lip-deep device.

143. a method that is used for one or more semiconductor nanowires optionally aimed at and be positioned on the matrix, this method may further comprise the steps:

Matrix is provided;

Two or more electrodes are patterned on the surface of matrix;

The environment that contacts with two or more electrodes is provided, comprises one or more semiconductor nanowires among the described environment; And

Electric field between two or more electrodes is provided, thereby facilitates one or more nano wires in environment, to aim at mutually, and be electrically connected described two or more electrode to form the channel semiconductor between electrode.

144. as the described method of claim 143, wherein said environment comprises liquid suspension, and described method comprises liquid suspension flowing on matrix surface.

145., further comprise and adjust matrix surface so that one or more semiconductor nanowires is attached to the surface as the described method of claim 143.

146. as the described method of claim 145, wherein said adjustment comprises the patterning surface.

147. as the described method of claim 145, wherein said adjustment comprises making to have the surperficial functionalized of one or more functional groups, described functional group has the affinity that one or more semiconductor nanowires is attracted each other.

148. as the described method of claim 147, wherein said one or more functional group comprises one or more alkoxysilane groups.

149., further be included in and make field-effect transistor on the matrix surface as the described method of claim 143.

150. as the described method of claim 143, one of them or more semiconductor nanowires deposit on the matrix surface from solution.

151. as the described method of claim 143, one of them or more semiconductor nanowires comprise and are selected from II-VI family, the semi-conductive one or more semiconductor nanowires of III-V family or IV family.

152. as the described method of claim 151, one of them or more semiconductor nanowires comprise one or more silicon nanowires.

153. as the described method of claim 143, further be included in described channel semiconductor above or below form grid lead wire, to control the conductivity of one or more semiconductor nanowires.

154., be not that body contacts between grid lead wire and the one or more semiconductor nanowires wherein as the described method of claim 143.