CN1979721A - Method for forming electrode of plasma display panel - Google Patents
Method for forming electrode of plasma display panel Download PDFInfo
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- CN1979721A CN1979721A CN 200510111079 CN200510111079A CN1979721A CN 1979721 A CN1979721 A CN 1979721A CN 200510111079 CN200510111079 CN 200510111079 CN 200510111079 A CN200510111079 A CN 200510111079A CN 1979721 A CN1979721 A CN 1979721A
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Abstract
The invention is for the electrode formation method of plasma display panel, is the electrode formation method of plasma display panel of the back substrates of several address electrodes that are formed in an opposite direction by the settings that intersect with the double maintaining electrode and the frontal substrates of several double maintaining electrodes that are contained in the transparent electrode and junction electrode that are contained in the top settings of glass substrates, including: the stage to laminate the DFR (dry film positive photoresist ) on the top of the glass substrates; the stage to perform exposure and raster display in accordance with the particular conditions by making the model shield lie on the tope of the above-said glass substrates of the laminated DFR; the stage to print only the metallic paste on the glass substrates there is no DFR; the stage to peel off and eliminate DFR; the stage to form electrode by drying and baking the metallic paste that is printed on the top of glass substrates. The invention is to form electrode by taking advantage of the DFR on the glass substrates of the plasma display panel to some of the actual models it form so as to save the manufacturing cost of panel and avoid the edge from being curled.
Description
Technical field
The present invention is the technology of the electrode formation method of relevant Plasmia indicating panel, especially about forming the electrode formation method of a kind of Plasmia indicating panel of electrode on the Plasmia indicating panel substrate.
Background technology
In general, Plasmia indicating panel is that the partition wall that forms between front substrate and the back substrate forms a unit cell, and the main discharge gas of mist (Ne+He) of containing neon (Ne), helium (He) or neon and helium and so on and the not active gases of small amount of xenon are arranged in each unit.When discharging because of high frequency voltage, active gases does not produce vacuum ultraviolet (Vacuum Ultraviolet rays), and makes the light-emitting phosphor that forms between the partition wall, embodies portrait.Such Plasmia indicating panel can be realized thin and light formation, therefore receives much attention as display device of future generation.
Fig. 1 is the schematic diagram of the general Plasmia indicating panel structure of expression.
As shown in the figure, Plasmia indicating panel is front panel 100 and the parallel at certain intervals combination of back faceplate panels 110.Front panel is to show that several that be arranged with scan electrode 102 on the display surface-face glass 101 of portrait and keep 103 one-tenths dimorphisms one-tenth of electrode keep electrode pair; Back faceplate panels is to form to have on the back surface glass 111 at the back side and can keep the electrode dual crossing with above-mentioned several, has arranged several address electrodes 113.
Front panel 100 is at a discharge cell, for mutual discharge, and keep the luminous scan electrode in unit 102 and keep electrode 103, promptly possess the transparency electrode (a) that forms with transparent ITO material and the scan electrode 102 of (Bus) electrode (b) that confluxes made with metal material and keep 103 one-tenth dimorphisms one-tenth of electrode.
Scan electrode 102 and keep electrode 103 and be limited discharging current; and rise electrode two between the more than one upper dielectric layer 104 of insulating effect cover; in order to make discharging condition become easier, form the protective layer 105 of foliation magnesium oxide (Mgo) above the upper dielectric layer 104.
Back faceplate panels 110 is for forming several discharge spaces, and promptly the shape of stripes of discharge cell (or enclosure wall shape) partition wall 112 is kept parallel and arranged.In addition, the discharge of operation address produces vacuum ultraviolet several address electrodes 113 and be arranged in parallel with partition wall 112.
The upper side of back faceplate panels 110 produces at the RGB fluorophor 114 that shows the visible rays of drawing a portrait when having sprayed the address discharge.Form the lower dielectric layer 115 of protection address electrode 113 between address electrode 113 and the fluorophor 114.
Here, above-mentioned partition wall 112 upper sides are arranged with to play and absorb the exterior light that face glass 101 outsides take place, and reduce the black layer 116 that the light that reflects cuts off function and functions such as colour purity (Purity) that promotes face glass 101 and contrast.
Plasmia indicating panel with this structure is to utilize above-mentioned and so on fine discharge, the unit that discharge takes place produces visible rays, above-mentioned partition wall (barrier rib) is for the unit being separated into several spaces, for between division unit and the unit and form, above-mentioned black layer 116 is in order to prevent to discharge, partition wall top produces unnecessary light, reduces contrast (Contrast) characteristic of Plasmia indicating panel and forms.
Existing PDP with this spline structure roughly forms through engineerings such as glass substrate manufacturing engineering, front substrate manufacturing engineering, back substrate manufacturing engineering and packing engineerings.In the front of above-mentioned existing PDP substrate manufacturing engineering,, illustrate that electrode formation method is as follows as an example.
Fig. 2 is an engineering drawing of representing existing PDP electrode formation method successively.
As shown in the figure,, as described in the PDP panel,, will show the display surface of portrait-face glass substrate 10 tops, form photonasty metal paste layer (A) with the certain thickness metal by the β mode of printing in the S101 stage.
Here, above-mentioned photonasty metal paste layer (A) should comprise silver (Ag) paste of additional photoresist, and above-mentioned photoresist uses the responsive photoactive substance of light such as ultraviolet ray reaction.
Afterwards, in the S102 stage, with silver (Ag) the paste layer (A) of the dry additional above-mentioned photoresist of certain hour.
In the S103 stage, make the pattern protective cover (B) that forms certain pattern be positioned at the certain distance on above-mentioned photonasty metal paste layer (A) top, from the upside irradiation light, utilize photo-hardening opening photonasty metal paste layer (A) partly.This engineering is called the exposure engineering.
Afterwards, in the S105 stage, with the photonasty metal paste layer (A) of part (that is the part of exposing in the exposure engineering) remaining after the dry above-mentioned video picture engineering of certain hour.
Afterwards, in the S106 stage, the photonasty metal paste layer (A) of above-mentioned drying forms the metal electrode 11,12 with certain pattern with process sintering process under about 500-600 ℃ temperature with this.
Afterwards, as shown in Figure 1, form dielectric layer 104, the surface of above-mentioned dielectric layer 104 forms the protective layer 105 that constitutes with magnesium oxide (MgO), finally forms the PDP panel.
But the electrode formation method of so existing Plasmia indicating panel is to form electrode with photoetching (Photo Lithography) method of utilizing Ag electrode paste and film, perhaps utilizes the etching (Etching) by the super foliation of AI or Cr-Cu-Cr.As mentioned above, the Ag electrode paste is printed to glass substrate whole, except the part (about 30%) that forms realistic model, will eliminate video picture, cause the waste of unnecessary resource and the increase of manufacturing expense.In addition, the problem of crimping (Edge Curl) phenomenon of perk takes place in the both ends that also have an electrode mode.
Summary of the invention
Therefore, the present invention develops for solving above-mentioned existing issue, the electrode formation method of the Plasmia indicating panel that its purpose is to provide such, promptly on the glass substrate of Plasmia indicating panel, just make the part of utilizing dry film photoresist (DFR:Dry Film Photo Resist is hereinafter to be referred as DFR) to form realistic model form electrode, reduce the manufacturing expense of panel with this, and lifting production efficiency, can prevent that edge-curl phenomenon from taking place.
To achieve these goals, the electrode formation method of Plasmia indicating panel of the present invention is, as comprise that glass substrate top is provided with several that comprise transparency electrode and bus electrode and keeps the two front substrate of electrode, is provided with and can keeps the electrode dual crossing and the electrode formation method of the Plasmia indicating panel of the back substrate of several address electrodes that subtend forms with above-mentioned, comprise as the next stage be characteristics: on glass substrate top, the stage of lamination DFR; The pattern protective cover of making is positioned at the above-mentioned glass substrate top of above-mentioned lamination DFR, according to specified conditions, implements the stage of exposure and video picture; The metal paste was only printed to the stage that does not form above-mentioned DFR part on the above-mentioned glass substrate; Peel off the stage of eliminating above-mentioned DFR.
In addition, also comprise peeling off after the elimination stage of above-mentioned DFR, dry and burn till the metal paste of above-mentioned glass substrate upper print, form the stage of electroplax.
Above-mentioned exposure and the specified conditions on the video picture stage are to make above-mentioned DFR be formed inverse taper, the wide spacing distance of pattern of setting and above-mentioned pattern protective cover by diffraction of light and the refraction effect by above-mentioned pattern protective cover.
Above-mentioned metal paste is that above-mentioned metal paste should be formed on the above-mentioned glass substrate with trapezoidal with at least one formation in copper (Cu) or the silver (Ag).
Effect of the present invention:
As mentioned above, electrode formation method according to Plasmia indicating panel of the present invention, on the glass substrate of Plasmia indicating panel, the part that only forms realistic model to utilizing DFR forms electrode, have the waste of stopping unnecessary photonasty metal paste with this, the manufacturing expense of reducing panel, and promote production efficiency, also, can prevent the effect that edge-curl phenomenon takes place by trapezoidal electrode.
For further specifying above-mentioned purpose of the present invention, design feature and effect, the present invention is described in detail below with reference to accompanying drawing.
Description of drawings
Fig. 1 is a schematic diagram of roughly representing existing PDP panel construction.
Fig. 2 is an engineering drawing of representing existing PDP electrode formation method successively.
Fig. 3 is an integration map of representing PDP method for producing panel of the present invention successively.
Fig. 4 is an engineering drawing of representing PDP electrode formation method of the present invention successively.
The symbol description of major part in the accompanying drawing:
10,20: glass substrate 11,12: electrode
A: photonasty metal paste layer
B: pattern protective cover (pattern Mask) C:DFR (Dry Film Photo Resist)
D: metal paste layer a: the pattern of pattern protective cover is wide
B: the spacing distance of pattern protective cover
Embodiment
Embodiment to the electrode formation method of Plasmia indicating panel of the present invention is described in more detail below with reference to accompanying drawings.
Fig. 3 is a precedence diagram of representing Plasmia indicating panel manufacture method of the present invention successively.
As shown in the figure, the manufacture method of Plasmia indicating panel of the present invention comprises front substrate manufacture process (S201-S204) and back substrate manufacture process (S205-S209) and the above-mentioned adhesive face substrate and the adhesion process (S210-S211) of back substrate.
At first, if the above-mentioned front substrate manufacture process of explanation.
S201, S202, after preparing to become the face glass on substrate basis, front, forming several on the face glass top, to keep electrode two.
S203, S204 afterwards, keep the two tops of electrode and form upper dielectric layer, and upper dielectric layer top forms the protective layer that the two MgO material of electrode is kept in protection.
In addition, put off until some time later bright back substrate manufacture process.
S205, S206, back substrate are also the same with the front substrate, at first prepare to become the back surface glass of equipment, can with the front substrate on form keep the electrode dual crossing and subtend, several address electrodes of back formation on glass.
S207, S208 afterwards, form lower dielectric layer above the address electrode, above-mentioned lower dielectric layer top forms the partition wall of the discharge cell of dividing Plasmia indicating panel, and black layer is formed at partition wall top.
S209, afterwards, at the discharge cell of being divided by above-mentioned partition wall with interior formation luminescent coating.
Drying by separately and engineering such as burn till produces front substrate and back substrate.
S210, S211, front substrate of Zhi Zaoing and back substrate form Plasmia indicating panel by adhesion process like this.
In addition, the formation method of the Plasmia indicating panel of the present invention of Zhi Zaoing is described as described above, if the electrode formation method of front substrate more specifically is described, just as shown in Figure 4.
Fig. 4 is an engineering drawing of representing PDP of the present invention front substrate manufacturing engineering successively.
S301, as shown in the figure, at first, dry film photoresist (DFR:Dry Film Photo Resist) C lamination (laminating) on above-mentioned glass substrate 10 tops.
S302-S303 afterwards, makes pattern protective cover B be positioned at above-mentioned glass substrate 10 tops of the above-mentioned dry film photoresist of lamination (DFR) C, and according to specified conditions, moves exposure and video picture engineering successively.
At this moment, above-mentioned specified conditions are to make above-mentioned DFR be formed inverse taper by diffraction of light and the refraction effect by above-mentioned pattern protective cover B, suitably the spacing distance (b) of the pattern wide (a) of setting and above-mentioned pattern protective cover B.
Therefore, as shown in Figure 4, dry film photoresist (DFR) C of inverse taper is formed at above-mentioned glass substrate 10 tops.
S304 afterwards, on above-mentioned glass substrate 10, only gives the part type metal paste layer D that does not form above-mentioned dry film photoresist (DFR) C.
At this moment, above-mentioned metal paste is at least one formation in Ying Yitong (Cu) or the silver (Ag), and the printing of above-mentioned metal paste layer D is carried out in silk screen printing (Screen Printing) mode usually.
In addition, as shown in the figure, the above-mentioned metal paste layer D that prints between above-mentioned dry film photoresist (DFR) C is formed on the above-mentioned glass substrate 10 with trapezoidal by above-mentioned dry film photoresist (DFR) C that forms with inverse taper.
By such trapezoidal shape, the support force at electrode mode both ends increases, and therefore can prevent the generation of crimping (Edge Curl) phenomenon.
S305-S306, afterwards, the glass substrate 10 of the above-mentioned metal paste layer D of dry printing is peeled off and is eliminated above-mentioned dry film photoresist (DFR) C.
S307, in addition, above-mentioned dry film photoresist (DFR) C peel off the elimination stage after, to burn till the metal paste layer D of above-mentioned glass substrate 10 upper print under the 500-600 ℃ of temperature, finish the formation engineering of final electrode 11,12 approximately with this.
Like this, on the glass substrate 10 of Plasmia indicating panel of the present invention, only the part of utilizing dry film photoresist (DFR) C to form realistic model is formed electrode, reduce the waste of unnecessary high price photonasty metal paste A with this, reduce manufacturing expense, promote production efficiency, and, prevent the generation of edge-curl phenomenon by trapezoidal electrode 11,12.
Those of ordinary skill in the art will be appreciated that, above embodiment is used for illustrating the present invention, and be not to be used as limitation of the invention, as long as in connotation scope of the present invention, all will drop in the scope of claims of the present invention variation, the modification of the above embodiment.
Claims (5)
1, a kind of electrode formation method of Plasmia indicating panel, be to comprise that glass substrate top is provided with several that comprise transparency electrode and bus electrode and keeps the two front substrate of electrode, is provided with and can keeps the electrode dual crossing and the electrode formation method of the Plasmia indicating panel of the back substrate of several address electrodes that subtend forms with above-mentioned, it is characterized in that:
On glass substrate top, the stage of laminating dry film optical impedance agent;
The pattern protective cover of making is positioned at the above-mentioned glass substrate top of above-mentioned laminating dry film optical impedance agent, according to specified conditions, implements the stage of exposure and video picture;
The metal paste was only printed to the stage that does not form above-mentioned dry film photoresist part on the above-mentioned glass substrate;
Peel off the stage of eliminating above-mentioned dry film photoresist.
2, the electrode formation method of Plasmia indicating panel as claimed in claim 1 is characterized in that also comprising:
Peeling off after the elimination stage of above-mentioned dry film photoresist, dry and burn till the metal paste of above-mentioned glass substrate upper print, form the stage of electroplax.
3, the electrode formation method of Plasmia indicating panel as claimed in claim 1 or 2 is characterized in that above-mentioned exposure and the specified conditions on the video picture stage are:
Make above-mentioned dry film photoresist be formed inverse taper, the wide spacing distance of pattern with above-mentioned pattern protective cover is set by diffraction of light and refraction effect by above-mentioned pattern protective cover.
4, the electrode formation method of Plasmia indicating panel as claimed in claim 1 or 2 is characterized in that:
Above-mentioned metal paste is with at least one formation in copper or the silver.
5, the electrode formation method of Plasmia indicating panel as claimed in claim 1 or 2 is characterized in that:
Above-mentioned metal paste is to be formed on the above-mentioned glass substrate with trapezoidal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510111079 CN1979721A (en) | 2005-12-02 | 2005-12-02 | Method for forming electrode of plasma display panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510111079 CN1979721A (en) | 2005-12-02 | 2005-12-02 | Method for forming electrode of plasma display panel |
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| Publication Number | Publication Date |
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| CN1979721A true CN1979721A (en) | 2007-06-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200510111079 Pending CN1979721A (en) | 2005-12-02 | 2005-12-02 | Method for forming electrode of plasma display panel |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111223411A (en) * | 2019-12-11 | 2020-06-02 | 京东方科技集团股份有限公司 | Substrate for micro LED display panel and manufacturing method thereof |
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2005
- 2005-12-02 CN CN 200510111079 patent/CN1979721A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111223411A (en) * | 2019-12-11 | 2020-06-02 | 京东方科技集团股份有限公司 | Substrate for micro LED display panel and manufacturing method thereof |
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