Summary of the invention
The technical problem to be solved in the present invention provides a kind of improved simulation model of high-voltage device and application process thereof, can directly extract corresponding to semiconductor devices at the model aspect the high pressure, and can equally with common device model directly be called by circuit design simulation software.
For solving the problems of the technologies described above, the present invention proposes a kind of improved simulation model of high-voltage device, on the common SPICE device model basis under the low pressure condition, one of series connection can be with the variable resistor of voltage, temperature variation on transistor drain, to realize that control weakens effect to the high-pressure area grid voltage to the transistor current ability, increase a CCCS emulation high tension apparatus from effect; This resistance resistance value with the pass that is added in this voltage above resistance is:
R=RO* (1+VC1*VR+VC2*VR*VR) * (1+VC3*Vbs+VC4*Vbs*Vbs), wherein RO is the resistance value of voltage when being zero, VC1, VC2, VC3, VC4 are its voltage one-level and secondary coefficient, and VR is an absolute value of voltage, and Vbs is the absolute value of voltage between substrate and source electrode; CCCS of cross-over connection between transistor drain and source electrode is with the ionization effect of emulation high voltage transistor.
The present invention also proposes a kind of improved simulation model of high-voltage device application process, BSIM3 model and above-mentioned improved simulation model of high-voltage device are combined into high tension apparatus SPICE model, call the parameter of regulating: resistance R O then for the match actual measured value, its voltage coefficient VC1, VC2, VC3, VC4, temperature coefficient TC1, TC2; Its electronic circuit is: .subckt nch_hv drain gate source sub wn=50uln=2u; X2 drain dl Resistance model for prediction or electronic circuit name; Ml dl gate source sub transistor model name w=wn l=ln; .ends.
Use device model slip-stick artist of the present invention and on the data basis of the high voltage transistor of measuring, can directly extract corresponding high pressure model, and can be by circuit design simulation software (as SPICE, be Simulation Program with Integrated Circuit Emphasis) directly call, greatly improved convenience that the high pressure model uses, improved the efficient and the accuracy of integrated circuit (IC) design work greatly, shortened product design cycle and reduce cost.
Embodiment
The present invention is further detailed explanation below in conjunction with drawings and the specific embodiments.
The performance difference of high-pressure crystal tube device and normal transistor device mainly shows, when drain electrode works in saturation voltage (Vdd), increase with grid voltage (Vgs), when Vgs approaches Vdd, transistorized electric current (Ids) increase obviously becomes slowly, promptly at higher-pressure region grid voltage Vgs the control ability of electric current I ds is weakened greatly.In addition, high voltage transistor also is easy to generate the ionization phenomenon that is associated with grid voltage, promptly is high-pressure crystal tube current and the voltage performance signal with ionization phenomenon as Fig. 1.
Yet traditional BSIM3 can not well simulate this grid voltage the transistor current control is weakened weak effect and the ionization phenomenon that is associated with grid voltage in the higher-pressure region.The present invention is promptly on the basis of traditional B SIM3 universal model, make appropriate change by parameter, form and call method thereof etc. to device model, found a kind of method of direct realization high pressure model, and, can make simulation result and test data basically identical by regulating the value of suitable parameter.Specific as follows:
The present invention at first sets up a kind of improved simulation model of high-voltage device.
1, sets up the common SPICE device model of high voltage transistor under the low pressure condition.
2, increase a variable resistor on transistor drain, utilize the dividing potential drop effect of drain resistance, control weakens effect to the transistor current ability to be implemented in the high-pressure area grid voltage, and the pass of its resistance and its voltage is:
R=RO*(1+VC1*VR+VC2*VR*VR)*(1+VC3*Vbs+VC4*Vbs*Vbs)
Wherein RO is the resistance value of voltage when being zero, and VC1, VC2, VC3, VC4 are its voltage one-level and secondary coefficients, and VR is the absolute value of voltage that is added in above the resistance, and Vbs is the absolute value of voltage between substrate and source electrode.
3, increase the ionization phenomenon that with grid voltage be associated of a CCCS (CCCS) with the emulation high voltage transistor.Increase a CCCS emulation high tension apparatus from effect.
As shown in Figure 2, be the improved transistor schematic of the present invention for the high tension apparatus equivalent electrical circuit after improving.
Below be a high tension apparatus model specific embodiment of setting up as stated above:
.lib?tt_hv
.lib ' ./model_hv.lib ' transistor library name
.lib ' ./model_hv.lib ' resistance library name
.subckt?nch_hv?drain?gate?source?sub?wn=50u?ln=2u
X2 drain dl Resistance model for prediction or electronic circuit name
Ml dl gate source sub transistor model name w=wn l=ln
.ends
.endl?tt-hv
*****************************
.LIB transistor library name
.MODEL transistor model name NMOS
+LEVEL=53
.ENDL transistor library name
*******************************
.LIB resistance library name
.subckt electronic circuit name n1 n2
.param?r0=100?vc1=2.66E-1?vc2=le-2
.ends electronic circuit name
.ENDL resistance library name
BSIM3 model and the improved simulation model of high-voltage device of the invention described above can be combined into high tension apparatus SPICE model then, on the basis of actual high-voltage transistor characteristic data, by partial parameters to wherein regulating for the match actual measured value, as resistance R O, voltage coefficient VC1, VC2, VC3, VC4, temperature coefficient TC1, TC2 etc. are optimized, utilize the dividing potential drop effect of drain resistance, and the incremental effect of CCCS, can be implemented in the behavioural characteristic that realizes high tension apparatus on the traditional B SIM3 model based, and obtain fitting effect preferably.
Its electronic circuit is:
.subckt?nch_hv?drain?gate?source?sub?wn=50u?ln=2u
X2 drain d1 Resistance model for prediction or electronic circuit name
Ml dl gate source sub transistor model name w=wn l=ln
.ends
Electronic circuit is a kind of net sheet form when making circuit simulation with software, is similar to the subroutine in the program design, can be called as way circuit or other electronic circuit by other circuit.
In sum, use simulation model of high-voltage device and application process that the present invention sets up, the device model slip-stick artist can directly extract corresponding high pressure model on the data basis of the high voltage transistor of measuring, and can be by circuit design simulation software (as high pressure SPICE-HSPICE, SPECTRE) directly call, greatly improved convenience that the high pressure model uses, improved the efficient and the accuracy of integrated circuit (IC) design work greatly, dwindled the product design cycle and reduce cost.