TW202103040A - Simulation method of power metal oxide semiconductor transistor - Google Patents

Simulation method of power metal oxide semiconductor transistor Download PDF

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TW202103040A
TW202103040A TW108124246A TW108124246A TW202103040A TW 202103040 A TW202103040 A TW 202103040A TW 108124246 A TW108124246 A TW 108124246A TW 108124246 A TW108124246 A TW 108124246A TW 202103040 A TW202103040 A TW 202103040A
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TWI702534B (en
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冷中明
王暐綸
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尼克森微電子股份有限公司
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Abstract

A simulation model of a power MOSFET for measuring a plurality of parameters of a power MOSFET to respectively generate corresponding plurality of simulation results, the simulation model of the power MOSFET includes a first voltage-controlled voltage source, a first look-up current source, a transistor sub-circuit and a breakdown voltage module. The first voltage-controlled voltage source responds to the temperature change, and uses the first sub-circuit to simulate gate charge behavior on the gate node. The first look-up table current source is configured to simulate an equivalent current value generated by the capacitance between the gate and the drain according to the look-up current value of the second sub-circuit. The transistor sub-circuit is used to simulate the behavior of the conductive voltage in small current intervals and large current intervals. The breakdown voltage module simulates a breakdown voltage effect between a drain node and a source node according to a voltage value of the first sub-circuit.

Description

功率金屬氧化物半導體電晶體的模擬模型Simulation Model of Power Metal Oxide Semiconductor Transistor

本發明涉及一種功率金屬氧化物半導體(MOS)電晶體的模擬模型,特別是涉及一種可在模擬時降低運算負荷的功率金屬氧化物半導體(MOS)電晶體的模擬模型。The invention relates to a simulation model of a power metal oxide semiconductor (MOS) transistor, in particular to a simulation model of a power metal oxide semiconductor (MOS) transistor which can reduce the computational load during simulation.

電晶體係電腦、電視、蜂巢式電話及諸多其他電子產品中之電組件。設計者通常使用模擬器程式來模擬電晶體之一示意性版本以觀察其電路行為。Electronic components in computers, televisions, cellular phones and many other electronic products. Designers usually use simulator programs to simulate a schematic version of the transistor to observe its circuit behavior.

對於複雜的電子電路的設計,典型地執行模擬用於驗證電子電路的功能性並且用於優化它的性能。通過對目標電子元件進行模擬,以期望能夠準確建立在電路中使用的電子元件的模型。特別地,隨著產品日新月異,若要針對電子元件的每項參數特性進行量測,將會耗費大量人力資源及時間。因此,期望能夠以省時、省力的情況下直接使用功率電晶體的準確模型來進行模擬,以減少開發時間。For the design of complex electronic circuits, simulations are typically performed to verify the functionality of the electronic circuit and to optimize its performance. By simulating the target electronic component, it is expected that the model of the electronic component used in the circuit can be accurately established. In particular, as products change with each passing day, it will consume a lot of human resources and time to measure each parameter characteristic of electronic components. Therefore, it is expected that the accurate model of the power transistor can be directly used for simulation in a time-saving and labor-saving situation, so as to reduce the development time.

在現有的電路模擬軟體中,已經提供了可廣泛對功率電晶體進行模擬的諸多現有的電晶體模擬模型。然而,在某些情況下,使用此等現有的電晶體模擬模型可能導致對某些電晶體電路行為之不準確預測。此外,現有的電晶體模擬模型經常使用了大量的元件,因此可能會對運算系統造成大量負擔。In the existing circuit simulation software, many existing transistor simulation models that can simulate power transistors extensively have been provided. However, in some cases, the use of these existing transistor simulation models may lead to inaccurate predictions of the behavior of certain transistor circuits. In addition, the existing transistor simulation models often use a large number of components, which may cause a lot of burden on the computing system.

因此,急需一種能降低使用元件數量,並減少運算系統的模擬負荷,同時具有一定準確性的功率電晶體的模擬模型。Therefore, there is an urgent need for a power transistor simulation model that can reduce the number of components used, and reduce the simulation load of the computing system, and at the same time have a certain accuracy.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種功率金屬氧化物半導體(MOS)電晶體的模擬模型。The technical problem to be solved by the present invention is to provide a simulation model of a power metal oxide semiconductor (MOS) transistor in view of the shortcomings of the prior art.

為了解決上述的技術問題,本發明所採用的其中一技術方案是,提供一種功率金屬氧化物半導體場效電晶體(MOSFET)的模擬模型,用以對一功率金屬氧化物半導體場效電晶體(MOSFET)的多個參數進行量測,以分別產生對應的多個模擬結果,該功率MOSFET的模擬模型包括閘極節點、源極節點、汲極節點、閘極電阻、第一壓控電壓源、源極電阻、閘極源極間電容、閘極源極間電阻、汲極電阻、第一查表電流源、電晶體子電路及崩潰電壓模塊。閘極電阻連接於該閘極節點及一第一節點之間,第一壓控電壓源連接於閘極電阻及第一節點之間,經配置以響應於溫度變化,以第一子電路模擬閘極節點上的閘極電荷行為。源極電阻連接於源極節點及第二節點之間。閘極源極間電容及閘極源極間電阻連接於第一節點及第二節點之間。汲極電阻連接於汲極節點及第三節點之間。第一查表電流源連接於汲極節點及第一節點之間,第一查表電流源用以依據第二子電路的查表電流值,模擬閘極汲極間電容所產生的等效電流值。電晶體子電路,其包括第一電晶體及第二電晶體。第一電晶體連接於第一節點、第二節點及第三節點,第二電晶體連接於第一節點、第二節點及第三節點,其中該第一電晶體及該第二電晶體用於模擬一導電電壓於一小電流區間及一大電流區間中的行為。崩潰電壓模塊,係連接於源極節點與源極電阻之間的第四節點以及汲極節點與汲極電阻之間的第五節點之間,經配置以依據第一子電路的電壓值,模擬汲極節點及源極節點之間的崩潰電壓效應。In order to solve the above-mentioned technical problems, one of the technical solutions adopted by the present invention is to provide a power metal oxide semiconductor field effect transistor (MOSFET) simulation model for comparing a power metal oxide semiconductor field effect transistor (MOSFET). MOSFET) parameters are measured to generate corresponding simulation results. The simulation model of the power MOSFET includes gate node, source node, drain node, gate resistance, first voltage-controlled voltage source, The source resistance, the capacitance between the gate and the source, the resistance between the gate and the source, the drain resistance, the first look-up current source, the transistor sub-circuit and the breakdown voltage module. The gate resistor is connected between the gate node and a first node, and the first voltage-controlled voltage source is connected between the gate resistor and the first node, and is configured to respond to temperature changes to simulate a gate with a first sub-circuit The behavior of the gate charge on the pole node. The source resistor is connected between the source node and the second node. The capacitance between the gate and the source and the resistance between the gate and the source are connected between the first node and the second node. The drain resistor is connected between the drain node and the third node. The first look-up table current source is connected between the drain node and the first node. The first look-up table current source is used to simulate the equivalent current generated by the capacitance between the gate and the drain according to the look-up current value of the second sub-circuit value. The transistor sub-circuit includes a first transistor and a second transistor. The first transistor is connected to the first node, the second node, and the third node, and the second transistor is connected to the first node, the second node, and the third node. The first transistor and the second transistor are used for Simulate the behavior of a conductive voltage in a small current interval and a large current interval. The breakdown voltage module is connected between the fourth node between the source node and the source resistor and the fifth node between the drain node and the drain resistor, and is configured to simulate according to the voltage value of the first sub-circuit The collapse voltage effect between the drain node and the source node.

本發明的其中一有益效果在於,本發明所提供的功率金屬氧化物半導體(MOS)電晶體的模擬模型,其使用了較少的元件,因此可降低模擬時運算系統的負荷。One of the beneficial effects of the present invention is that the simulation model of the power metal oxide semiconductor (MOS) transistor provided by the present invention uses fewer components, thereby reducing the load of the computing system during simulation.

此外,使用本發明的功率MOSFET的模擬模型,具備一定程度的準確度,並且由於參數獨立性高,因此能夠依據使用者需求個別調整多項參數。此外,第一子電路的設計能夠響應於溫度變化,以提供具備高溫、低溫電性特性的變化功能,更無需使用高階的MOSFET的參數模型。In addition, the simulation model using the power MOSFET of the present invention has a certain degree of accuracy, and because of the high parameter independence, it is possible to individually adjust multiple parameters according to user requirements. In addition, the design of the first sub-circuit can respond to temperature changes to provide a change function with high and low temperature electrical characteristics, and there is no need to use high-end MOSFET parameter models.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings about the present invention. However, the provided drawings are only for reference and description, and are not used to limit the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關“功率金屬氧化物半導體電晶體的模擬方法”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。The following are specific examples to illustrate the implementation of the “simulation method for power metal oxide semiconductor transistors” disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to actual size, and are stated in advance. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者信號,但這些元件或者信號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一信號與另一信號。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another, or one signal from another signal. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.

圖1為使用本發明實施例的功率金屬氧化物半導體(MOS)電晶體的模型進行模擬的流程圖。FIG. 1 is a flowchart of simulation using a model of a power metal oxide semiconductor (MOS) transistor according to an embodiment of the present invention.

參閱圖1所示,使用本發明實施例的功率金屬氧化物半導體(MOS)電晶體的模型進行模擬時,至少包括下列幾個步驟:Referring to FIG. 1, when using the power metal oxide semiconductor (MOS) transistor model of the embodiment of the present invention for simulation, at least the following steps are included:

步驟S1:使用功率MOSFET模擬模型來模擬功率MOSFET。Step S1: Use the power MOSFET simulation model to simulate the power MOSFET.

步驟S2:分別將多個參數輸入功率MOSFET模擬模型。Step S2: Input multiple parameters into the power MOSFET simulation model respectively.

步驟S3:產生對應的多個模擬結果。Step S3: Generate multiple corresponding simulation results.

其中,在步驟S1中所創建的功率MOSFET模擬模型可包含圖2之模擬模型1,且可用於諸如一SPICE模擬或其他模擬程式之一模擬中。Wherein, the power MOSFET simulation model created in step S1 can include the simulation model 1 of FIG. 2 and can be used in a simulation such as a SPICE simulation or other simulation programs.

在創建功率MOSFET的模擬模型時,可包含提供用以指示例如電晶體模擬模型的各個節點間之連接之資訊。When creating a simulation model of a power MOSFET, it may include providing information for indicating connections between various nodes of, for example, a transistor simulation model.

舉例而言,可提供用以指示二極體模擬模型之陽極及陰極、電晶體模擬模型之基極、集極及射極與模擬模型的各個節點間的連接資訊,還可提供用以指示模擬模型之節點對應於功率電晶體的基極、集極及射極的資訊。For example, it can provide information about the connection between the anode and cathode of the diode simulation model, the base, collector and emitter of the transistor simulation model, and the various nodes of the simulation model. It can also be used to indicate the simulation. The nodes of the model correspond to the information of the base, collector and emitter of the power transistor.

此外,本發明的功率金屬氧化物半導體(MOS)電晶體的模擬模型的資訊,可包含符合SPICE模擬格式之資訊。例如可向電腦系統提供用以創建模擬模型的資訊,電腦系統可接收功率MOSFET模擬模型的資訊,並使用該資訊來模擬一功率電晶體。In addition, the information of the simulation model of the power metal oxide semiconductor (MOS) transistor of the present invention may include information conforming to the SPICE simulation format. For example, the computer system can be provided with information for creating a simulation model, and the computer system can receive the information of the power MOSFET simulation model and use the information to simulate a power transistor.

進一步參照圖2,其為本發明實施例功率MOSFET的模擬模型的架構圖。Further refer to FIG. 2, which is a structural diagram of a simulation model of a power MOSFET according to an embodiment of the present invention.

參閱圖2所示,本發明提供了功率MOSFET的模擬模型1,其包括閘極節點G、源極節點S、汲極節點D、閘極電阻Rg、第一壓控電壓源Es1、源極電阻Rs、汲極電阻Rd、第一查表電流源G11、電晶體子電路10及崩潰電壓模塊12。Referring to FIG. 2, the present invention provides a simulation model 1 of a power MOSFET, which includes a gate node G, a source node S, a drain node D, a gate resistor Rg, a first voltage-controlled voltage source Es1, and a source resistor. Rs, drain resistance Rd, first look-up table current source G11, transistor sub-circuit 10 and breakdown voltage module 12.

閘極電阻Rg連接於閘極節點G及第一節點N1之間,第一壓控電壓源Es1連接於閘極電阻Rg及第一節點N1之間。此處,第一壓控電壓源Es1用於響應於溫度變化,以第一子網路14模擬閘極節點G上的閘極電荷行為。The gate resistor Rg is connected between the gate node G and the first node N1, and the first voltage-controlled voltage source Es1 is connected between the gate resistor Rg and the first node N1. Here, the first voltage-controlled voltage source Es1 is used to simulate the gate charge behavior on the gate node G with the first subnet 14 in response to temperature changes.

詳細而言,功率金氧半場效電晶體的切換速率主要是靠閘極的充放電而動作的,閘極輸入的電荷量(Qg)愈小,則切換速度愈快。所有的功率金氧半場效電晶體在切換的過程中都會損失能量,這些損失的能量會轉變成熱能的型式並使得效能降低。切換時所損失的能量跟切換的時間有很直接的關係,而切換時間又跟結構中的電容值的大小有關,特別是會影響到存在於閘極與汲極之間電荷量(Qgd)的大小。也因此,閘極電荷是決定MOSFET的切換速率的一個重要特性。In detail, the switching rate of the power MOSFET is mainly operated by the charging and discharging of the gate electrode. The smaller the amount of charge (Qg) input by the gate electrode, the faster the switching speed. All power metal oxide half field effect transistors lose energy during the switching process, and this lost energy will be converted into a form of heat energy and reduce the efficiency. The energy lost during switching is directly related to the switching time, and the switching time is related to the size of the capacitance in the structure, especially the amount of charge (Qgd) that exists between the gate and the drain. size. Therefore, the gate charge is an important characteristic that determines the switching rate of the MOSFET.

源極電阻Rs連接於源極節點S及第二節點N2之間。另一方面,崩潰電壓模塊12連接於源極節點S與源極電阻Rs之間的第四節點N4以及汲極節點D與汲極電阻Rd之間的第五節點N5之間,經配置以依據第一子電路14的一電壓值,模擬汲極節點D及源極節點S之間的崩潰電壓效應。崩潰電壓模塊12可包括崩潰二極體Dbr及第二壓控電壓源Esb。崩潰二極體Dbr連接於第五節點N5,而第二壓控電壓源Esb,連接於崩潰二極體Dbr及第四節點N4之間。體二極體Dbo則連接於第四節點N4及第五節點N5之間。The source resistor Rs is connected between the source node S and the second node N2. On the other hand, the breakdown voltage module 12 is connected between the fourth node N4 between the source node S and the source resistor Rs, and the fifth node N5 between the drain node D and the drain resistor Rd, and is configured to follow A voltage value of the first sub-circuit 14 simulates the collapse voltage effect between the drain node D and the source node S. The breakdown voltage module 12 may include a breakdown diode Dbr and a second voltage-controlled voltage source Esb. The breakdown diode Dbr is connected to the fifth node N5, and the second voltage-controlled voltage source Esb is connected between the breakdown diode Dbr and the fourth node N4. The body diode Dbo is connected between the fourth node N4 and the fifth node N5.

此處,汲極節點D及源極節點S之間的崩潰電壓為功率MOSFET的汲極及源極之間所能承受的最大電壓值,並且主要受制於內含的逆向二級體,例如崩潰二極體Dbr的耐壓。Here, the breakdown voltage between the drain node D and the source node S is the maximum voltage that the drain and source of the power MOSFET can withstand, and is mainly subject to the contained reverse secondary body, such as breakdown The withstand voltage of the diode Dbr.

具體而言,第一子網路14包括電流源It、崩潰電阻Rbr、溫度效應電阻Rvt及第一直流電源Vt,電流源It連接於第六節點N6及第七節點N7之間,崩潰電阻Rbr連接於第七節點N7及第八節點N8之間,溫度效應電阻Rvt連接於第六節點N6及第八節點N8之間,而第一直流電源Vt,連接於第六節點及溫度效應電阻Rvt之間。Specifically, the first subnet 14 includes a current source It, a breakdown resistance Rbr, a temperature effect resistance Rvt, and a first DC power source Vt. The current source It is connected between the sixth node N6 and the seventh node N7, and the breakdown resistance Rbr is connected between the seventh node N7 and the eighth node N8, the temperature effect resistor Rvt is connected between the sixth node N6 and the eighth node N8, and the first DC power source Vt is connected between the sixth node and the temperature effect resistor Between Rvt.

在本實施例中,第六節點N6連接於第二節點N2,第二壓控電壓源Esb的電壓係依據第七節點N7及第八節點N8的電壓產生。此處,需要說明的是,第七節點N7及第八節點N8的電壓將會受到電流源It、崩潰電阻Rbr、溫度效應電阻Rvt及第一直流電源Vt的影響,其中,溫度效應電阻Rvt及第一直流電源Vt是用於等效崩潰二極體Dbr隨溫度變化的效應,而存在於閘極與汲極之間電荷量(Qgd)的大小亦會受到溫度變化的影響,因此第一壓控電壓源Es1的電壓可依據第六節點N6及第八節點N8的電壓產生。In this embodiment, the sixth node N6 is connected to the second node N2, and the voltage of the second voltage-controlled voltage source Esb is generated according to the voltages of the seventh node N7 and the eighth node N8. Here, it should be noted that the voltages of the seventh node N7 and the eighth node N8 will be affected by the current source It, the breakdown resistance Rbr, the temperature effect resistance Rvt, and the first DC power supply Vt. The temperature effect resistance Rvt And the first DC power supply Vt is used to equivalently collapse the effect of the temperature change of the diode Dbr, and the amount of charge (Qgd) existing between the gate and the drain will also be affected by the temperature change, so the first The voltage of a voltage-controlled voltage source Es1 can be generated according to the voltages of the sixth node N6 and the eighth node N8.

另一方面,第一查表電流源G11連接於汲極節點D及第一節點N1之間,經配置以依據第二子網路16的查表電流值,以模擬閘極汲極間電容產生的等效電流值。On the other hand, the first look-up current source G11 is connected between the drain node D and the first node N1, and is configured to simulate the capacitance generation between the gate and the drain according to the look-up current value of the second subnet 16 The equivalent current value.

當元件密度提高時,因為閘極-汲極間電荷,或反饋電容(Reverse Transfer capacitance,簡稱Crss,此亦為閘極-汲極間電容Cgd)也會變大,使閘極節點G的充放電速度變慢而影響元件的效能。要增加元件的電流密度且維持元件高頻率的特性,此Cgd值將會是一個重要參數。When the component density increases, the gate-drain charge, or the feedback capacitance (Reverse Transfer capacitance, Crss for short, which is also the gate-drain capacitance Cgd) will also increase, causing the gate node G to charge The discharge speed slows down and affects the performance of the device. To increase the current density of the device and maintain the high frequency characteristics of the device, the Cgd value will be an important parameter.

為了模擬此參數,第二子網路16包括第二直流電源V11、電容C11、第三壓控電壓源E11及查表器Table。第二直流電源V11,連接於接地端及第九節點N9之間,電容C11連接於第九節點N9及第十節點N10之間,第三壓控電壓源E11連接於第十節點N10及接地端之間。其中,第三壓控電壓源E11的電壓依據第一節點N1及第五節點N5的電壓產生。In order to simulate this parameter, the second subnet 16 includes a second DC power supply V11, a capacitor C11, a third voltage-controlled voltage source E11 and a table lookup device. The second DC power source V11 is connected between the ground terminal and the ninth node N9, the capacitor C11 is connected between the ninth node N9 and the tenth node N10, and the third voltage-controlled voltage source E11 is connected to the tenth node N10 and the ground terminal between. The voltage of the third voltage-controlled voltage source E11 is generated according to the voltages of the first node N1 and the fifth node N5.

查表器Table,經配置以依據第十節點N10的電壓值查詢電壓電流對照表,以產生查表電流值,作為第一查表電流源G11產生的等效電流值。The table look-up device Table is configured to look up the voltage and current comparison table according to the voltage value of the tenth node N10 to generate a look-up current value as the equivalent current value generated by the first look-up current source G11.

此外,對於功率MOSFET而言,在電晶體的導電電壓部份,會因為電晶體產生的電流大小而有所不同。為了模擬導電電壓於小電流區間及大電流區間中的行為,設置了電晶體子電路10,連接於第一節點N1、第二節點N2及第三節點N3,其包括第一電晶體Ms及第二電晶體Mw。第一電晶體Ms的閘極連接於第一節點,源極連接於第二節點N2,汲極連接於第三節點N3,適用於模擬導電電壓於大電流區間中的行為。另一方面,第二電晶體Mw的閘極連接於第一節點N1,源極連接於第二節點N2,汲極連接於第三節點N3,適用於模擬導電電壓於小電流區間中的行為。In addition, for power MOSFETs, the conduction voltage of the transistor is different due to the current generated by the transistor. In order to simulate the behavior of the conductive voltage in the low current interval and the high current interval, a transistor sub-circuit 10 is provided, which is connected to the first node N1, the second node N2, and the third node N3, which includes the first transistor Ms and the third node N3. Two transistor Mw. The gate of the first transistor Ms is connected to the first node, the source is connected to the second node N2, and the drain is connected to the third node N3, which is suitable for simulating the behavior of the conductive voltage in the high current interval. On the other hand, the gate of the second transistor Mw is connected to the first node N1, the source is connected to the second node N2, and the drain is connected to the third node N3, which is suitable for simulating the behavior of the conductive voltage in the small current interval.

此外,功率MOSFET模擬模型1更包括閘極電感電路100,其連接於閘極節點G及閘極電阻Rg之間,閘極電感電路100包括並聯的閘極電感Lg及閘極電感電阻RLg。類似的,功率MOSFET模擬模型1更包括源極電感電路102,其連接於源極節點S及該源極電阻Rs之間,源極電感電路102包括並聯的源極電感Ls及源極電感電阻RLs。類似的,功率MOSFET模擬模型1更包括汲極電感電路104,其連接於汲極節點D及汲極電阻Rd之間,汲極電感電路104包括並聯的汲極電感Ld及汲極電感電阻RLd。In addition, the power MOSFET simulation model 1 further includes a gate inductance circuit 100 connected between the gate node G and the gate resistance Rg. The gate inductance circuit 100 includes a gate inductance Lg and a gate inductance resistance RLg connected in parallel. Similarly, the power MOSFET simulation model 1 further includes a source inductor circuit 102, which is connected between the source node S and the source resistor Rs. The source inductor circuit 102 includes a source inductor Ls and a source inductor resistor RLs connected in parallel. . Similarly, the power MOSFET simulation model 1 further includes a drain inductance circuit 104 connected between the drain node D and the drain resistance Rd. The drain inductance circuit 104 includes a drain inductance Ld and a drain inductance resistance RLd connected in parallel.

此外,功率MOSFET模擬模型1更包括閘極源極間電容Cgs及閘極源極間電阻Rgs。閘極源極間電容Cgs及閘極源極間電阻Rgs連接於第一節點N1及第二節點N2之間。汲極電阻Rd連接於汲極節點D及第三節點N3之間。In addition, the power MOSFET simulation model 1 further includes the capacitance Cgs between the gate and the source and the resistance Rgs between the gate and the source. The gate-source capacitance Cgs and the gate-source resistance Rgs are connected between the first node N1 and the second node N2. The drain resistor Rd is connected between the drain node D and the third node N3.

於此,功率MOSFET模擬模型1已創建完畢,其可用於產生多個模擬結果,諸如導電電壓、導通電阻、含逆向回復電荷的本體二極體、閘極電荷、輸入電容、輸出電容及反饋電容等電性特性參數。Here, the power MOSFET simulation model 1 has been created, which can be used to generate multiple simulation results, such as conduction voltage, on-resistance, body diode with reverse recovery charge, gate charge, input capacitance, output capacitance and feedback capacitance Isoelectric characteristic parameters.

在上述實施例中所提供的功率金屬氧化物半導體(MOS)電晶體的模擬方法,由於在功率金屬氧化物半導體電晶體的模型中使用了較少的元件,因此可降低模擬時運算系統的負荷。In the simulation method of the power metal oxide semiconductor (MOS) transistor provided in the above embodiment, since fewer components are used in the model of the power metal oxide semiconductor transistor, the load of the computing system during simulation can be reduced. .

此外,使用本發明的功率MOSFET的模擬模型,具備一定程度的準確度,並且由於參數獨立性高,因此能夠依據使用者需求個別調整多項參數。此外,第一子電路的設計能夠響應於溫度變化,以提供具備高溫、低溫電性特性的變化功能,以及第二子電路能夠用於模擬回授電容的效應,無需使用高階的MOSFET的參數模型即可獲得諸如導電電壓、導通電阻、含逆向回復電荷的本體二極體、閘極電荷、輸入電容、輸出電容及反饋電容等電性特性參數。In addition, the simulation model using the power MOSFET of the present invention has a certain degree of accuracy, and because of the high parameter independence, it is possible to individually adjust multiple parameters according to user needs. In addition, the design of the first sub-circuit can respond to temperature changes to provide a change function with high and low temperature electrical characteristics, and the second sub-circuit can be used to simulate the effect of the feedback capacitor without using high-end MOSFET parameter models. Then electrical characteristic parameters such as conduction voltage, on-resistance, body diode with reverse recovery charge, gate charge, input capacitance, output capacitance and feedback capacitance can be obtained.

以下將進一步呈現本發明的功率MOSFET的模擬方法所產生的各種特性曲線,並與實際量測曲線進行對照,以顯示本發明具有一定的準確度。The following will further present various characteristic curves generated by the simulation method of the power MOSFET of the present invention, and compare them with actual measurement curves to show that the present invention has a certain degree of accuracy.

請參考圖3A及圖3B,分別為使用本發明的功率MOSFET的模擬模型進行模擬時,產生的在不同溫度下的轉移特性曲線圖以及實際測量的轉移特性曲線圖。如圖所示,可知本發明在溫度分別為125℃、25℃及-20℃下,模擬產生的汲極源極間電流Ids對閘極源極間電壓Vgs,亦即,轉移特性曲線,與實際測量的轉移特性曲線圖相比,工作於線性區的趨勢為相同的。Please refer to FIG. 3A and FIG. 3B, which are respectively the transfer characteristic curves at different temperatures and the actually measured transfer characteristic curves generated when the simulation model of the power MOSFET of the present invention is used for simulation. As shown in the figure, it can be seen that the simulated drain-source current Ids versus gate-source voltage Vgs, that is, the transfer characteristic curve, and the Compared with the actual measured transfer characteristic curve, the trend of working in the linear region is the same.

請參考圖4A及圖4B,分別為使用本發明的功率MOSFET的模擬模型進行模擬時,產生的閘極電荷特性的曲線圖以及實際測量的閘極電荷特性的曲線圖。如圖所示,模擬獲得的閘極電荷特性,閘極源極間電壓Vgs在閘極源極間電荷量Qgs為1.8nC區間的趨勢,以及在閘極汲極間電荷量Qgd為5.7nC區間的趨勢,與實際測量的閘極電荷特性在閘極源極間電荷量Qgs為2nC區間的趨勢,以及在閘極汲極間電荷量Qgd為5.5nC區間的趨勢接近。Please refer to FIG. 4A and FIG. 4B, which are respectively a graph of the gate charge characteristics generated when the simulation model of the power MOSFET of the present invention is used for simulation and a graph of the actually measured gate charge characteristics. As shown in the figure, the simulated gate charge characteristics, the voltage Vgs between the gate and the source in the gate-source charge Qgs is 1.8nC, and the gate-drain charge Qgd is in the 5.7nC zone The trend is close to the actual measured gate charge characteristics in the gate-source charge Qgs in the 2nC range, and the gate-drain charge Qgd in the 5.5nC range.

請參考圖5A及圖5B,分別為使用本發明的功率MOSFET的模擬模型進行模擬時,產生的汲極源極導通電阻對接面溫度作圖的曲線圖以及實際測量的汲極源極導通電阻對接面溫度作圖的曲線圖。如圖所示,在接面溫度-50℃至150℃的區間中,汲極源極導通電阻對接面溫度作圖的曲線趨勢亦是相同的,且分別在接面溫度-50℃及150℃時,產生的歸一化的導通電阻亦是相同的。Please refer to FIG. 5A and FIG. 5B, respectively, when using the simulation model of the power MOSFET of the present invention for simulation, the generated drain-source on-resistance butting surface temperature plot and the actual measured drain-source on-resistance butt connection Graph of surface temperature mapping. As shown in the figure, in the range of junction temperature from -50°C to 150°C, the curve trend of the drain-source on-resistance versus junction temperature is also the same, and the junction temperature is -50°C and 150°C respectively. When, the normalized on-resistance generated is also the same.

請參考圖6A及圖6B,分別為使用本發明的功率MOSFET的模擬模型進行模擬時,產生的輸出功率電容(Coss)及反饋電容(Crss)的電容值對汲極源極電壓作圖的曲線圖,以及實際測量的輸入功率電容(Ciss)、輸出功率電容(Coss)及反饋電容(Crss)的電容值對汲極源極電壓作圖的曲線圖。其中,輸入功率電容(Ciss)代表閘極源極間電容加上閘極汲極間電容(Cgs+Cgd),輸出功率電容(Coss)代表汲極源極間電容加上閘極汲極間電容(Cds+Cgd),而反饋電容(Crss)代表閘極汲極間電容(Cgd)。如圖所示,在本發明的功率MOSFET模擬模型中,輸入功率電容(Ciss)係通過查詢對應元件的特性表所設定,為定值,而對於輸出功率電容(Coss)及反饋電容(Crss)的電容值而言,其對汲極源極電壓的變化趨勢與實際測量的輸出功率電容(Coss)及反饋電容(Crss)的電容值對汲極源極電壓的變化趨勢是相同的,且於汲極源極電壓為0時,對應的輸出功率電容(Coss)及反饋電容(Crss)的電容值分別為630pF及378pF,此亦與實際測量值相符。Please refer to FIGS. 6A and 6B, respectively, when the simulation model of the power MOSFET of the present invention is used for simulation, the generated output power capacitor (Coss) and feedback capacitor (Crss) are plotted against the drain-source voltage. Figure, as well as the actual measured input power capacitor (Ciss), output power capacitor (Coss) and feedback capacitor (Crss) capacitance values plotted against the drain-source voltage. Among them, the input power capacitance (Ciss) represents the capacitance between the gate and the source plus the capacitance between the gate and the drain (Cgs+Cgd), and the output power capacitance (Coss) represents the capacitance between the drain and the source plus the capacitance between the gate and the drain (Cds+Cgd), and the feedback capacitor (Crss) represents the capacitance between the gate and drain (Cgd). As shown in the figure, in the power MOSFET simulation model of the present invention, the input power capacitor (Ciss) is set by querying the characteristic table of the corresponding component and is a fixed value. For the output power capacitor (Coss) and feedback capacitor (Crss) In terms of the capacitance value, the change trend of the drain-source voltage is the same as the change trend of the actually measured output power capacitor (Coss) and feedback capacitor (Crss) to the drain-source voltage. When the drain-source voltage is 0, the corresponding capacitance values of the output power capacitor (Coss) and feedback capacitor (Crss) are 630 pF and 378 pF, respectively, which are also consistent with the actual measured values.

基於上述結果,可見本發明的功率MOSFET的模擬模型參數獨立性高,因此能夠依據使用者需求個別調整多項參數,並且其模擬結果亦具備一定程度的準確度。Based on the above results, it can be seen that the simulation model parameters of the power MOSFET of the present invention are highly independent, so that multiple parameters can be individually adjusted according to user requirements, and the simulation results also have a certain degree of accuracy.

[實施例的有益效果][Beneficial effects of the embodiment]

本發明的其中一有益效果在於,本發明所提供的功率金屬氧化物半導體(MOS)電晶體的模擬方法,其使用了較少的元件,因此可降低模擬時運算系統的負荷。One of the beneficial effects of the present invention is that the simulation method for power metal oxide semiconductor (MOS) transistors provided by the present invention uses fewer components, so that the load of the computing system during simulation can be reduced.

此外,使用本發明的功率MOSFET的模擬模型,具備一定程度的準確度,並且由於參數獨立性高,因此能夠依據使用者需求個別調整多項參數。此外,第一子電路的設計能夠響應於溫度變化,以提供具備高溫、低溫電性特性的變化功能,更無需使用高階的MOSFET的參數模型。In addition, the simulation model using the power MOSFET of the present invention has a certain degree of accuracy, and because of the high parameter independence, it is possible to individually adjust multiple parameters according to user requirements. In addition, the design of the first sub-circuit can respond to temperature changes to provide a change function with high and low temperature electrical characteristics, and there is no need to use high-end MOSFET parameter models.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The content disclosed above is only the preferred and feasible embodiments of the present invention, and does not limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made using the description and schematic content of the present invention are included in the application of the present invention. Within the scope of the patent.

1:功率MOSFET模擬模型 G:閘極節點 S:源極節點 D:汲極節點 Rg:閘極電阻 Es1:第一壓控電壓源 Rs:源極電阻 Rd:汲極電阻 G11:第一查表電流源 12:崩潰電壓模塊 N1:第一節點 14:第一子網路 N2:第二節點 N3:第三節點 N4:第四節點 N5:第五節點 Dbr:崩潰二極體 Dbo:體二極體 Esb:第二壓控電壓源 It:電流源 Rbr:崩潰電阻 Rvt:溫度效應電阻 Vt:第一直流電源 N6:第六節點 N7:第七節點 N8:第八節點 G11:第一查表電流源 16:第二子電路 V11:第二直流電源 C11:電容 E11:第三壓控電壓源 Table:查表器 N9:第九節點 N10:第十節點 10:電晶體子電路 Ms:第一電晶體 Mw:第二電晶體 100:閘極電感電路 Lg:閘極電感 RLg:閘極電感電阻 102:源極電感電路 Ls:源極電感 RLs:源極電感電阻 104:汲極電感電路 Ld:汲極電感 RLd:汲極電感電阻 Cgs:閘極源極間電容 Rgs:閘極源極間電阻 Ids:汲極源極間電流 Vgs:閘極源極間電壓 Qgs:閘極源極間電荷量 Qgd:閘極汲極間電荷量 Crss:反饋電容 Coss:輸出功率電容1: Power MOSFET simulation model G: gate node S: source node D: Drain node Rg: gate resistance Es1: The first voltage-controlled voltage source Rs: source resistance Rd: Drain resistance G11: First look-up table current source 12: Crash voltage module N1: the first node 14: The first subnet N2: second node N3: third node N4: Fourth node N5: fifth node Dbr: breakdown diode Dbo: body diode Esb: second voltage-controlled voltage source It: current source Rbr: breakdown resistance Rvt: temperature effect resistance Vt: First DC power supply N6: sixth node N7: seventh node N8: The eighth node G11: First look-up table current source 16: The second sub-circuit V11: Second DC power supply C11: Capacitance E11: The third voltage-controlled voltage source Table: Checker N9: Ninth node N10: Tenth node 10: Transistor sub-circuit Ms: first transistor Mw: second transistor 100: gate inductance circuit Lg: gate inductance RLg: gate inductance resistance 102: Source inductor circuit Ls: source inductance RLs: source inductance resistance 104: Drain inductance circuit Ld: Drain inductance RLd: Drain inductance resistance Cgs: capacitance between gate and source Rgs: resistance between gate and source Ids: current between drain and source Vgs: voltage between gate and source Qgs: charge between gate and source Qgd: charge between gate and drain Crss: feedback capacitor Coss: output power capacitor

圖1為本發明實施例的功率金屬氧化物半導體(MOS)電晶體的模擬方法的流程圖。FIG. 1 is a flowchart of a simulation method of a power metal oxide semiconductor (MOS) transistor according to an embodiment of the present invention.

圖2為本發明實施例的功率MOSFET模擬模型的架構圖。FIG. 2 is a structural diagram of a power MOSFET simulation model according to an embodiment of the present invention.

圖3A及圖3B分別為使用本發明的功率MOSFET的模擬模型進行模擬時,產生的在不同溫度下的轉移特性曲線圖以及實際測量的轉移特性曲線圖。3A and 3B are respectively the transfer characteristic curve diagrams at different temperatures and the actually measured transfer characteristic curve diagrams generated when the simulation model of the power MOSFET of the present invention is used for simulation.

圖4A及圖4B分別為使用本發明的功率MOSFET的模擬模型進行模擬時,產生的閘極電荷特性的曲線圖以及實際測量的閘極電荷特性的曲線圖。4A and 4B are respectively a graph of gate charge characteristics and a graph of gate charge characteristics actually measured when the simulation model of the power MOSFET of the present invention is used for simulation.

圖5A及圖5B,分別為使用本發明的功率MOSFET的模擬模型進行模擬時,產生的汲極源極導通電阻對接面溫度作圖的曲線圖以及實際測量的汲極源極導通電阻對接面溫度作圖的曲線圖。5A and 5B, respectively, when using the simulation model of the power MOSFET of the present invention for simulation, the generated drain-source on-resistance butt junction temperature graph and the actual measured drain-source on-resistance butt junction temperature Graphs for graphing.

圖6A及圖6B分別為使用本發明的功率MOSFET的模擬模型進行模擬時,產生的輸出功率電容(Coss)及反饋電容(Crss)的電容值對汲極源極電壓作圖的曲線圖,以及實際測量的輸入功率電容(Ciss)、輸出功率電容(Coss)及反饋電容(Crss)的電容值對汲極源極電壓作圖的曲線圖。6A and 6B are respectively a graph of the capacitance value of the output power capacitor (Coss) and feedback capacitor (Crss) generated against the drain-source voltage when the simulation model of the power MOSFET of the present invention is used for simulation, and The actual measured input power capacitor (Ciss), output power capacitor (Coss) and feedback capacitor (Crss) capacitance values plotted against the drain-source voltage.

1:功率MOSFET模擬模型 1: Power MOSFET simulation model

G:閘極節點 G: gate node

S:源極節點 S: source node

D:汲極節點 D: Drain node

Rg:閘極電阻 Rg: gate resistance

Es1:第一壓控電壓源 Es1: The first voltage-controlled voltage source

Rs:源極電阻 Rs: source resistance

Rd:汲極電阻 Rd: Drain resistance

G11:第一查表電流源 G11: First look-up table current source

12:崩潰電壓模塊 12: Crash voltage module

N1:第一節點 N1: the first node

14:第一子網路 14: The first subnet

N2:第二節點 N2: second node

N3:第三節點 N3: third node

N4:第四節點 N4: Fourth node

N5:第五節點 N5: fifth node

Dbr:崩潰二極體 Dbr: breakdown diode

Dbo:體二極體 Dbo: body diode

Esb:第二壓控電壓源 Esb: second voltage-controlled voltage source

It:電流源 It: current source

Rbr:崩潰電阻 Rbr: breakdown resistance

Rvt:溫度效應電阻 Rvt: temperature effect resistance

Vt:第一直流電源 Vt: First DC power supply

N6:第六節點 N6: sixth node

N7:第七節點 N7: seventh node

N8:第八節點 N8: The eighth node

G11:第一查表電流源 G11: First look-up table current source

16:第二子電路 16: The second sub-circuit

V11:第二直流電源 V11: Second DC power supply

C11:電容 C11: Capacitance

E11:第三壓控電壓源 E11: The third voltage-controlled voltage source

Table:查表器 Table: Checker

N9:第九節點 N9: Ninth node

N10:第十節點 N10: Tenth node

10:電晶體子電路 10: Transistor sub-circuit

Ms:第一電晶體 Ms: first transistor

Mw:第二電晶體 Mw: second transistor

100:閘極電感電路 100: gate inductance circuit

Lg:閘極電感 Lg: gate inductance

RLg:閘極電感電阻 RLg: gate inductance resistance

102:源極電感電路 102: Source inductor circuit

Ls:源極電感 Ls: source inductance

RLs:源極電感電阻 RLs: source inductance resistance

104:汲極電感電路 104: Drain inductance circuit

Ld:汲極電感 Ld: Drain inductance

RLd:汲極電感電阻 RLd: Drain inductance resistance

Cgs:閘極源極間電容 Cgs: capacitance between gate and source

Rgs:閘極源極間電阻 Rgs: resistance between gate and source

Claims (11)

一種功率金屬氧化物半導體場效電晶體(MOSFET)的模擬模型,用以對一功率金屬氧化物半導體場效電晶體(MOSFET)的多個參數進行量測,以分別產生對應的多個模擬結果,該功率MOSFET的模擬模型包括: 一閘極節點、一源極節點及一汲極節點; 一閘極電阻,係連接於該閘極節點及一第一節點之間; 一第一壓控電壓源,係連接於該閘極電阻及一第一節點之間,經配置以響應於溫度變化,以一第一子電路模擬該閘極節點上的一閘極電荷行為; 一源極電阻,係連接於該源極節點及一第二節點之間; 一閘極源極間電容及一閘極源極間電阻,係連接於該第一節點及該第二節點之間; 一汲極電阻,係連接於該汲極節點及一第三節點之間; 一第一查表電流源,係連接於該汲極節點及該第一節點之間,該第一查表電流源用以依據一第二子電路的一查表電流值,模擬一閘極汲極間電容所產生的一等效電流值; 一電晶體子電路,其包括: 一第一電晶體,係連接於該第一節點、該第二節點及該第三節點;及 一第二電晶體,係連接於該第一節點、該第二節點及該第三節點,其中該第一電晶體及該第二電晶體用於模擬一導電電壓於一小電流區間及一大電流區間中的行為;以及 一崩潰電壓模塊,係連接於該源極節點與該源極電阻之間的一第四節點以及該汲極節點與該汲極電阻之間的一第五節點之間,經配置以依據該第一子電路的一電壓值,模擬該汲極節點及該源極節點之間的崩潰電壓效應。A simulation model of a power metal oxide semiconductor field effect transistor (MOSFET) for measuring multiple parameters of a power metal oxide semiconductor field effect transistor (MOSFET) to generate corresponding multiple simulation results respectively , The simulation model of the power MOSFET includes: A gate node, a source node and a drain node; A gate resistor connected between the gate node and a first node; A first voltage-controlled voltage source is connected between the gate resistor and a first node, and is configured to respond to temperature changes to simulate a gate charge behavior on the gate node with a first sub-circuit; A source resistor connected between the source node and a second node; A capacitance between the gate and the source and a resistance between the gate and the source are connected between the first node and the second node; A drain resistor connected between the drain node and a third node; A first look-up table current source is connected between the drain node and the first node. The first look-up table current source is used to simulate a gate drain according to a look-up table current value of a second sub-circuit. An equivalent current value generated by the capacitance between electrodes; A transistor sub-circuit, which includes: A first transistor connected to the first node, the second node and the third node; and A second transistor is connected to the first node, the second node, and the third node. The first transistor and the second transistor are used to simulate a conduction voltage in a small current interval and a large current. Behavior in the current range; and A breakdown voltage module is connected between a fourth node between the source node and the source resistance and a fifth node between the drain node and the drain resistance, and is configured to be based on the first A voltage value of a sub-circuit simulates the collapse voltage effect between the drain node and the source node. 如申請專利範圍第1項所述的功率MOSFET的模擬模型,其中該第一子電路包括: 一電流源,連接於一第六節點及一第七節點之間; 一崩潰電阻,連接於該第七節點及一第八節點之間; 一溫度效應電阻,連接於該第六節點及該第八節點之間;以及 一第一直流電源,連接於該第六節點及該溫度效應電阻之間。The simulation model of the power MOSFET as described in item 1 of the scope of patent application, wherein the first sub-circuit includes: A current source connected between a sixth node and a seventh node; A breakdown resistor connected between the seventh node and an eighth node; A temperature effect resistor connected between the sixth node and the eighth node; and A first DC power supply is connected between the sixth node and the temperature effect resistor. 如申請專利範圍第2項所述的功率MOSFET的模擬模型,其中該第六節點連接於該第二節點。According to the power MOSFET simulation model described in item 2 of the scope of patent application, the sixth node is connected to the second node. 如申請專利範圍第2項所述的功率MOSFET的模擬模型,其中該第一壓控電壓源的電壓係依據該第六節點及該第八節點的電壓產生。According to the power MOSFET simulation model described in item 2 of the scope of patent application, the voltage of the first voltage-controlled voltage source is generated based on the voltages of the sixth node and the eighth node. 如申請專利範圍第2項所述的功率MOSFET的模擬模型,其中該崩潰電壓模塊包括: 一崩潰二極體,連接於該第五節點;以及 一第二壓控電壓源,連接於該崩潰二極體及該第四節點之間。The simulation model of the power MOSFET described in item 2 of the scope of patent application, wherein the breakdown voltage module includes: A breakdown diode, connected to the fifth node; and A second voltage-controlled voltage source is connected between the breakdown diode and the fourth node. 如申請專利範圍第5項所述的功率MOSFET的模擬模型,其中該第二壓控電壓源的電壓係依據該第七節點及該第八節點的電壓產生。According to the power MOSFET simulation model described in item 5 of the scope of patent application, the voltage of the second voltage-controlled voltage source is generated according to the voltage of the seventh node and the eighth node. 如申請專利範圍第1項所述的功率MOSFET的模擬模型,其中該第二子電路包括: 一第二直流電源,連接於一接地端及一第九節點之間; 一電容,連接於該第九節點及一第十節點之間; 一第三壓控電壓源,連接於該第十節點及該接地端之間,其中該第三壓控電壓源的電壓係依據該第一節點及該第五節點的電壓產生;以及 一查表器,經配置以依據該第十節點的電壓值查詢一電壓電流對照表,以產生該查表電流值,其中該第一查表電流源依據該查表電流值,模擬該等效電流值。According to the power MOSFET simulation model described in item 1 of the scope of patent application, the second sub-circuit includes: A second DC power supply connected between a ground terminal and a ninth node; A capacitor connected between the ninth node and a tenth node; A third voltage-controlled voltage source connected between the tenth node and the ground terminal, wherein the voltage of the third voltage-controlled voltage source is generated according to the voltages of the first node and the fifth node; and A look-up meter is configured to look up a voltage and current comparison table based on the voltage value of the tenth node to generate the look-up current value, wherein the first look-up current source simulates the equivalent based on the look-up current value Current value. 如申請專利範圍第1項所述的功率MOSFET的模擬模型,更包括一閘極電感電路,其連接於該閘極節點及該閘極電阻之間,該閘極電感電路包括並聯的一閘極電感及一閘極電感電阻。The simulation model of the power MOSFET described in item 1 of the scope of patent application further includes a gate inductance circuit connected between the gate node and the gate resistor, and the gate inductance circuit includes a gate in parallel. Inductance and a gate inductance and resistance. 如申請專利範圍第1項所述的功率MOSFET的模擬模型,更包括一源極電感電路,其連接於該源極節點及該源極電阻之間,該源極電感電路包括並聯的一源極電感及一源極電感電阻。The simulation model of the power MOSFET described in item 1 of the scope of patent application further includes a source inductance circuit connected between the source node and the source resistance, and the source inductance circuit includes a source in parallel. Inductance and a source inductance and resistance. 如申請專利範圍第1項所述的功率MOSFET的模擬模型,更包括一汲極電感電路,其連接於該汲極節點及該汲極電阻之間,該汲極電感電路包括並聯的一汲極電感及一汲極電感電阻。The simulation model of the power MOSFET described in claim 1 further includes a drain inductance circuit connected between the drain node and the drain resistance, and the drain inductance circuit includes a drain connected in parallel. Inductance and a drain inductance and resistance. 如申請專利範圍第1項所述的功率MOSFET的模擬模型,其中該些參數包括導電電壓、導通電阻、含逆向回復電荷的本體二極體、閘極電荷、輸入電容、輸出電容及反饋電容的至少其中之一。The simulation model of the power MOSFET as described in item 1 of the scope of patent application, wherein these parameters include conduction voltage, on-resistance, body diode with reverse recovery charge, gate charge, input capacitance, output capacitance and feedback capacitance. At least one of them.
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