CN1958488A - Apparatus for substrate marking - Google Patents
Apparatus for substrate marking Download PDFInfo
- Publication number
- CN1958488A CN1958488A CNA2006101606902A CN200610160690A CN1958488A CN 1958488 A CN1958488 A CN 1958488A CN A2006101606902 A CNA2006101606902 A CN A2006101606902A CN 200610160690 A CN200610160690 A CN 200610160690A CN 1958488 A CN1958488 A CN 1958488A
- Authority
- CN
- China
- Prior art keywords
- substrate
- head
- guide
- wheel
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 58
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 238000003825 pressing Methods 0.000 abstract 4
- 230000003028 elevating effect Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/32—Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Abstract
An apparatus for substrate scribing which can apply scribing force vertically on a substrate is provided. The apparatus comprises a line-forming part for scribing a line on the substrate, a pressing part for applying pressure on the line-forming part, an elevator for moving the pressing part up and down, an elevating guiding part for leading the elevator, and a pressing guiding part for leading the pressure part. According to the invention, a scribed line can be formed on the substrate precisely by solving the eccentric force which deviates to the X-Y direction.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
The application requires the rights and interests of the korean patent application submitted on April 18th, 2006 10-2006-0034973 number, and its disclosure integral body is hereby expressly incorporated by reference.
Technical field
The present invention relates to a kind of device that is used for substrate marking, specifically, relate to a kind of like this device that is used for substrate marking, it comprises makes the power of ruling vertically act on the head that is used to rule on the substrate.
Background technology
Usually, the glass substrate that is used for indicating meter is manufactured into large size, then with its cutting be processed into the fit for service appropriate size.
The technology of cutting friable material (such as glass substrate) is undertaken by following operation: the crossed process that forms line of cut by the instrument of diamond (its hardness that has is greater than the hardness of glass substrate) formation on the surface of glass substrate; And by substrate being applied the cut-out operation that the pressure that concentrates on the line of cut that is formed on the glass substrate comes the glass-cutting substrate.
Crossed process uses wheel to form crackle as parting tool in the location of cut of glass substrate.In cutting off operation, cutting rod is positioned at after the cracks, apply instantaneous pressure with suitable power, make crackle along the thickness direction expansion of glass substrate, thus the glass-cutting substrate.Cutting rod is by not causing any material of any cut to make on glass substrate.
The device that is used for crossed process is called scriber.The typical structure that discloses a kind of scriber 10-2005-0032834 number is disclosed in the Korean Patent that is entitled as " device and the driving method thereof that are used for cutting substrate ".
In the disclosed technology of above-mentioned public publication, the structure of traditional scriber related to the present invention is shown in Figure 1.The tradition scriber comprises: wheel 16, be used for glass-cutting substrate 19, and wheel 16 contacts with glass substrate 19; Wheel keeper 15 is used for fixing and supporting-point roller 16; And head 10, it is located such that wheel 16 and wheel keeper 15 can be driven.
Be used for vertical and flatly the guide 17 of moving-head 10 be connected to a side of head 10.Guide 17 is connected to independent driver element, and by drive unit drives.
Therefore, when guide 17 was mobile horizontal or vertically, head 10 moved with guide 17.
Head 10 comprises: cylinder 18 is used for wheel keeper 15 is exerted pressure; Load cell 11 is used to measure the power that is applied by cylinder 18; Bar 12 is used for transmitting the power that cylinder 18 applies by load cell 11 downwards; And bearing 13, it is positioned at the lower end of head 10.In the heart, the keeper axle 14 of wheel keeper 15 is connected to bearing 13 in bearing 13.
One end of bar 12 is connected to a side of head 10, and the other end of bar 12 is free and open.Bar 12 is arranged between cylinder 18 and the bearing 13, and will pass to wheel keeper 15 from cylinder 18 applied pressures by bearing 13.
Has the conventional apparatus that is used for cutting substrate of said structure, the pressurized energy (pressurizing force) that applies when the cylinder 18 of head 10 is passed to wheel 16 when forming line on substrate 19, owing to be connected tolerance between bearing 13 and the head 10, the feasible pressurized energy that should vertically be applied is passed to substrate 19 prejudicially.Therefore, can not form line in accurate location.And, owing to produced, be difficult on substrate 19, form the line of the accurate degree of depth from the error of the pressurized energy of cylinder 18 transmission.
The technology that a kind of solution is used for the problems referred to above that the conventional apparatus to substrate marking exists is disclosed in chalker shown in Figure 2.
The chalker of Fig. 2 comprises: wheel 26 is used for forming on the substrate 29 line; Bearing 23, it is located such that wheel 26 can pivot; Head 27, bearing 23 is installed on head; Stop part 25 is used to limit the pivoting angle of bearing 23; Cylinder 28, it is positioned in the head 27, is used for bearing 23 pressurizations; Guide 24 is used for the vertical movement of guiding head 27; Servomotor 21 is used for moving-head vertically; And ball-screw 22.
In the chalker of Fig. 2 because guide 24 guiding is by the vertical shifting of the head 27 of servomotor 21 and ball-screw 22 pressurizations, so prevented head 27 from the vertical position to lopsidedness.
In other words, utilize servomotor 21 and ball-screw 22, head 27 moves along Z-direction.
In addition, being applied to wheel 26 is controlled by cylinder 28 with the load that forms line.
In addition, because being mounted to by bearing 23, wheel 26 pivots, so the power that is applied by cylinder 28 is received as force of the breath (moment force).Then, because wheel 26 is connected to head 27 by bearing 23, come out from pre-determined range so prevent to take turns 26, so that wheel 26 is pivoted in pre-determined range by the stop part 25 that is arranged in head 27 ends.
But in the traditional structure of Fig. 2, head 27 and wheel 26 are connected to each other by bearing 23.Therefore, as shown in Figure 3, when wheel 26 when different driving directions is advanced, for example " A " direction as shown in Figure 3 or " B " direction are because pressurized energy W
1And W
2The frictional force V that causes
1And V
2Produced repulsion X
1And X
2, and this repulsion X
1And X
2Produce the force of the breath M in unplanned, thereby be difficult to form accurate line.
In addition, in the conventional apparatus of Fig. 1 and Fig. 2, owing to be used for controlling pressurized energy by the air operated cylinder, so pressurized energy can not be controlled at utmost point low pressure (0.02kgf/cm
2) or lower pressure under.
Summary of the invention
Therefore, the present invention aims to provide a kind of device that is used for substrate marking, and it comprises the head that is used to rule, and this head is accurately controlled the motion that is used for forming the unitary Z-direction of line on substrate.
Another object of the present invention is to provide a kind of device that is used for substrate marking, it comprises the head that is used to rule, and only vertically transmits by the pressurized energy that makes trailing wheel be applied to substrate and forms accurate line.
According to exemplary embodiment, the invention provides a kind of device that is used for substrate marking, comprising: line formation portion is used for forming line on substrate; Pressurization part is used for the pressurization to line formation portion; Lifting parts is used to move up and down pressurization part; Promote guide, be used to guide lifting parts; And the pressurized pilot part, be used for direct pressurized portion.
Line formation portion comprises wheel and wheel keeper.
Be used for the device of substrate marking is also comprised the control part that is used to control pressurization part and lifting parts.
Pressurization part comprises voice coil motor (VCM), and produces by the predetermined pressurized energy of control part.
Lifting parts comprises servomotor and ball-screw or linear motor, and the formation portion of will ruling moves to by the predetermined position of control part.
Lifting parts comprises mounted head.
Promote guide and comprise the linear guide that is installed in the head.
Pressurization part is installed in the head place.
The pressurized pilot part comprises linear guide.
Description of drawings
By the detailed description of reference accompanying drawing to the preferred embodiment of the present invention, for a person skilled in the art, above-mentioned feature and advantage with other of the present invention will be more apparent, in the accompanying drawing:
Fig. 1 is the front view that is used to explain to the structure of the conventional apparatus of substrate marking;
Fig. 2 is the front view that is used to explain to the structure of another conventional apparatus of substrate marking;
Fig. 3 is the exemplary plot that is used to explain to the driving condition of the conventional apparatus of substrate marking;
Fig. 4 is the front view to the device of substrate marking that is used to explain according to the embodiment of the invention; And
Fig. 5 is the exemplary plot to the driving condition of the device of substrate marking that is used to explain according to the embodiment of the invention.
Embodiment
More fully describe the present invention hereinafter with reference to accompanying drawing, the preferred embodiments of the present invention have been shown in the accompanying drawing.But the present invention can implement with multi-form, and should not be understood as that the embodiment that is limited to here to be set forth.Certainly, embodiment provides as instruction example of the present invention.Identical label is represented components identical.
Fig. 4 is the front view to the structure of the device of substrate marking that is used to explain according to the embodiment of the invention, and Fig. 5 is the exemplary plot to the driving condition of the device of substrate marking that is used to explain according to the embodiment of the invention.
As shown in Figure 4, be used for the device of substrate marking is comprised: wheel 46 is used for forming line on substrate 50; Voice coil motor (VCM) 45, it is as being used for predetermined pressurized energy taking turns the pressurizing device of 46 pressurizations; Promote head 44, VCM 45 is installed in and promotes head 44 places; Servomotor 41 and ball-screw 42, it moves the lifting gear that promotes head 44 as being used for vertical (along Z-direction); Promote guide 43a, it is installed on the head (not shown) that is used for the device of substrate marking, is used for guiding and promotes head 44, makes it only to move up and down along Z-direction; And pressurized pilot part 43b, it is installed on and promotes head 44, is used to guide the pressurized energy that is applied by VCM 45, makes it only vertically to be passed to substrate 50.
Servomotor 41 and VCM 45 are by independent controller (not shown) control.Controller utilizes servomotor 41 to come distance between regulating wheel 46 and the substrate 50, and controller control pressurized energy, forms line to utilize VCM 45 on substrate 50.
Promoting guide 43a and pressurized pilot part 43b comprises and intersects roller (cross roller) and such as the linear guide of linear motor guide.Linear guide prevents to depart from the X-Y direction with wheel 46 along lifting head 44 and VCM 45 that Z-direction moves up and down.
In other words, as shown in Figure 5, when wheel 46 when driving direction moves, " C " direction for example, even produced repulsion X by (because wheel 46 causes with friction between the substrate 50) frictional force V and (being produced and trailing wheel 46 is applied to substrate 50) pressurized energy W by VCM 45, lifting guide 43a and pressurized pilot part 43b also can make take turns 46 only vertically (along Z-direction) pressurized.Therefore, unlike Fig. 3, do not produce force of the breath M here.
Therefore, because wheel 46 can be delivered to accurate pressurized energy the pre-position of substrate 50 all the time, so can accurately form line.
In addition, because the pressurized energy that is applied to substrate 50 is by VCM 45 controls with 5ms or quicker response running, thus control pressure accurately, and then accurately form line.
Servomotor 41 and ball-screw 42 promotes head 44 example of (along Z-direction) lifting gear of moving up and down vertically as making.But linear motor also can be used as lifting gear.
As described above, according to the present invention, be offset to the eccentric force of X-Y direction (rather than Z-direction) by solution, comprise that the device to substrate marking of the head that is used to rule provides the effect that forms line in the accurate location of substrate.
In addition, by by VCM control pressurized energy, comprise that the device to substrate marking of the head that is used to rule provides the effect that forms even line with high response speed.
Utilize preferred illustrative embodiment to describe the present invention.But, be appreciated that scope of the present invention is not limited to the disclosed embodiments.On the contrary, scope of the present invention is intended to comprise various modifications and the replaceable setting of those skilled in the art in utilizing the limit of power that has known or unknown technology and equivalent now.Therefore, the scope of claim should with explain the most widely consistent so that comprise all such modifications and similarly be provided with.
Claims (9)
1. device that is used for substrate marking comprises:
Line formation portion is used for forming line on substrate;
Pressurization part is used for the pressurization to described line formation portion;
Lifting parts is used to move up and down described pressurization part;
Promote guide, be used to guide described lifting parts; And
The pressurized pilot part is used to guide described pressurization part.
2. device according to claim 1, wherein, described line formation portion comprises wheel and wheel keeper.
3. device according to claim 1 also comprises the control part that is used to control described pressurization part and described lifting parts.
4. device according to claim 3, wherein, described pressurization part comprises voice coil motor (VCM), and produces by the predetermined pressurized energy of described control part.
5. device according to claim 3, wherein, described lifting parts comprises servomotor and ball-screw or linear motor, and described line formation portion is moved to by the predetermined position of described control part.
6. device according to claim 1, wherein, described lifting parts comprises head.
7. device according to claim 6, wherein, described lifting guide comprises the linear guide that is installed in the described head.
8. device according to claim 6, wherein, described pressurization part is installed on described head.
9. device according to claim 8, wherein, described pressurized pilot part comprises linear guide.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060034973A KR20070103188A (en) | 2006-04-18 | 2006-04-18 | Apparatus for scribing substrate |
| KR10-2006-0034973 | 2006-04-18 | ||
| KR1020060034973 | 2006-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1958488A true CN1958488A (en) | 2007-05-09 |
| CN1958488B CN1958488B (en) | 2011-06-08 |
Family
ID=38070357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006101606902A Expired - Fee Related CN1958488B (en) | 2006-04-18 | 2006-12-06 | Apparatus for substrate marking |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2007284334A (en) |
| KR (1) | KR20070103188A (en) |
| CN (1) | CN1958488B (en) |
| TW (1) | TWI326276B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102036924A (en) * | 2008-06-18 | 2011-04-27 | 三星钻石工业股份有限公司 | Method for taking out unit display panel from mother board |
| CN102603178A (en) * | 2011-01-21 | 2012-07-25 | 塔工程有限公司 | A breaking apparatus for glass panel |
| CN101734846B (en) * | 2008-11-26 | 2012-09-05 | 塔工程有限公司 | Method for setting pressure load of pressure assembly positioned in scribing device |
| CN103507172A (en) * | 2012-06-29 | 2014-01-15 | 三星钻石工业股份有限公司 | Tip holder |
| CN103659866A (en) * | 2012-09-26 | 2014-03-26 | 三星钻石工业股份有限公司 | Cutter wheel holder unit |
| CN102514106B (en) * | 2008-06-30 | 2014-12-10 | 三星钻石工业股份有限公司 | Knife wheel holder |
| TWI583642B (en) * | 2011-05-31 | 2017-05-21 | 塔工程有限公司 | Apparatus for breaking glass panel and method of measuring horizontal level of the same |
| CN107877716A (en) * | 2016-09-29 | 2018-04-06 | 三星钻石工业股份有限公司 | Diamond cutter and its scribble method |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5450964B2 (en) * | 2008-02-29 | 2014-03-26 | 三星ダイヤモンド工業株式会社 | Scribing apparatus and scribing method |
| JP2009274434A (en) * | 2008-04-16 | 2009-11-26 | Thk Co Ltd | Scribing apparatus and multi-shaft scribing apparatus |
| JP5308892B2 (en) * | 2009-04-01 | 2013-10-09 | 三星ダイヤモンド工業株式会社 | Integrated thin film solar cell manufacturing equipment |
| KR101309804B1 (en) * | 2011-12-28 | 2013-09-23 | 주식회사 이엠테크 | Brush apparatus for selectively removing thin film on substrate |
| KR102571055B1 (en) * | 2017-08-21 | 2023-08-30 | 주식회사 탑 엔지니어링 | Scribing method and scribing apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH065379Y2 (en) * | 1988-02-22 | 1994-02-09 | 株式会社小坂研究所 | Cutter holding device for panel cutter |
| JP2504370B2 (en) * | 1993-02-17 | 1996-06-05 | 坂東機工株式会社 | Cutter device |
| US6901670B2 (en) * | 2001-07-18 | 2005-06-07 | Mitsuboshi Diamond Industrial Co., Ltd. | Scribing head, and scribing apparatus and scribing method using the scribing head |
| TW200408061A (en) * | 2002-07-02 | 2004-05-16 | Mitsuboshi Diamond Ind Co Ltd | Substrate slicing system for sealed substrates and the substrate slicing method |
-
2006
- 2006-04-18 KR KR1020060034973A patent/KR20070103188A/en active Search and Examination
- 2006-11-30 TW TW095144533A patent/TWI326276B/en not_active IP Right Cessation
- 2006-11-30 JP JP2006324166A patent/JP2007284334A/en active Pending
- 2006-12-06 CN CN2006101606902A patent/CN1958488B/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102036924A (en) * | 2008-06-18 | 2011-04-27 | 三星钻石工业股份有限公司 | Method for taking out unit display panel from mother board |
| CN102036924B (en) * | 2008-06-18 | 2013-06-12 | 三星钻石工业股份有限公司 | Method for taking out unit display panel from mother board |
| TWI423938B (en) * | 2008-06-18 | 2014-01-21 | Mitsuboshi Diamond Ind Co Ltd | Method of picking up unit display panel from mother substrate |
| CN102514106B (en) * | 2008-06-30 | 2014-12-10 | 三星钻石工业股份有限公司 | Knife wheel holder |
| CN101734846B (en) * | 2008-11-26 | 2012-09-05 | 塔工程有限公司 | Method for setting pressure load of pressure assembly positioned in scribing device |
| CN102603178A (en) * | 2011-01-21 | 2012-07-25 | 塔工程有限公司 | A breaking apparatus for glass panel |
| TWI457299B (en) * | 2011-01-21 | 2014-10-21 | Top Eng Co Ltd | A breaking apparatus of glass panel |
| CN102603178B (en) * | 2011-01-21 | 2015-02-11 | 塔工程有限公司 | A breaking apparatus for glass panel |
| TWI583642B (en) * | 2011-05-31 | 2017-05-21 | 塔工程有限公司 | Apparatus for breaking glass panel and method of measuring horizontal level of the same |
| CN103507172A (en) * | 2012-06-29 | 2014-01-15 | 三星钻石工业股份有限公司 | Tip holder |
| CN103659866A (en) * | 2012-09-26 | 2014-03-26 | 三星钻石工业股份有限公司 | Cutter wheel holder unit |
| CN107877716A (en) * | 2016-09-29 | 2018-04-06 | 三星钻石工业股份有限公司 | Diamond cutter and its scribble method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1958488B (en) | 2011-06-08 |
| TW200728220A (en) | 2007-08-01 |
| KR20070103188A (en) | 2007-10-23 |
| JP2007284334A (en) | 2007-11-01 |
| TWI326276B (en) | 2010-06-21 |
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| PB01 | Publication | ||
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110608 Termination date: 20201206 |
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| CF01 | Termination of patent right due to non-payment of annual fee |