CN1958206A - Electrochemical machining method in cellular dimple structure - Google Patents

Electrochemical machining method in cellular dimple structure Download PDF

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Publication number
CN1958206A
CN1958206A CN 200610096707 CN200610096707A CN1958206A CN 1958206 A CN1958206 A CN 1958206A CN 200610096707 CN200610096707 CN 200610096707 CN 200610096707 A CN200610096707 A CN 200610096707A CN 1958206 A CN1958206 A CN 1958206A
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China
Prior art keywords
workpiece
tool cathode
cellular
processing
tool
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CN 200610096707
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Chinese (zh)
Inventor
朱荻
曲宁松
王光强
李冬林
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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Priority to CN 200610096707 priority Critical patent/CN1958206A/en
Publication of CN1958206A publication Critical patent/CN1958206A/en
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Abstract

An electrolyzing method for preparing the cellular micropits structure includes such steps as making a tool as cathode with a group of through holes and a shielding film on its surface, uniformly spraying the electrolyte through said through holes onto a workpiece as anode, and electrolyzing.

Description

Electrochemical machining method in cellular dimple structure
Technical field
Electrochemical machining method in cellular dimple structure of the present invention belongs to technical field of electrolysis processing.
Background technology
Electrolyzed Processing is a kind of special processing technology, and it is to utilize electrochemistry anodic solution principle to remove the processing method of material.It is fast that it has process velocity, and surface quality is good, and instrument is lossless, is not subjected to restriction such as the strength of materials, toughness, hardness and do not have outstanding advantage such as macroscopical cutting force, obtained using widely in industries such as Aero-Space, weapons, automobile, mould.
Surface texture with cellular dimple is widely used in the cylinder inner surface as the approach that improves sliding friction, and its manufacture method adopts pit machining method commonly used at present to have four kinds usually: 1. self-excited vibration processing method.Guarantee to have at the cylinder sleeve working surface under essentially smooth the situation, utilize the self-excited vibration effect in the process to produce from the teeth outwards along the equally distributed miniature pit of the hand of spiral.This processing method, operation is many, and efficient is low, and amplitude and frequency adjustment are cumbersome, and little hole size, the degree of depth and being distributed in to a certain extent is restricted; 2. vibratory impulse processing method.Little hole vibratory impulse processing unit (plant) is contained on the middle carriage of lathe, workpiece to be machined is contained on the machine tool chief axis with certain speed rotation, little hole vibratory impulse processing unit (plant) can be vertically and the horizontal direction feeding, control the degree of depth in little hole by traverse feed, on the tool heads of device, apply low-frequency vibration by the driven by motor eccentric stiffener, rely on vibratory impulse on workpiece, to form little hole with certain regularity of distribution and certain size parameter, this processing method, make surface of the work that plastic deformation take place, jagged and material protuberance needs secondary operations sometimes around little hole; 3. digital control laser honing technique.Laser honing is made up of three process: the thick top gem of a girdle-pendant, and the laser stereo lithography and the smart top gem of a girdle-pendant are used to laser to dig a pit, hole, etc., and realize the surface micro-pit Mechanical Builds, and then carry out honing, this processing method cost height; 4. the little hole of Ultrasonic machining technology.The surface micro-pit ultrasonic machining device is contained on the middle carriage of lathe, processed parts with frication pair is contained on the machine tool chief axis with certain rotating speed rotation, little hole ultrasonic machining device can be vertically and the horizontal direction feeding, control the degree of depth in little hole by traverse feed, promote the luffing bar by ultrasonic tr-ansducer and apply ultrasonic vibration, rely on vibratory impulse to form little hole at the cylinder sleeve working surface with certain regularity of distribution and certain size parameter to tool heads.This processing method, required lathe rotating speed is very high, needs the development special purpose machine tool, and is not suitable for the processing of miniature workpiece.
Use analog structures such as electrochemical machining method processing group hole, group's seam to mainly contain following several at present: the electrolysis of 1. taking a picture.At first at workpiece to be processed surface-coated one deck photoresist, after painting and develop, light formed hollow out group sectional hole patterns at surface of the work, with exposed workpiece part chemistry or electrochemical corrosion, form group's pore structure, remove the workpiece that photoresist just can obtain to have cellular dimple structure at last.This method operation is loaded down with trivial details, and processing all needs the repetition above-mentioned steps with each part of a collection of workpiece; 2. use the special electrode Electrolyzed Processing.The fine metal silk is wrapped on the specific frame forms the wire wound tooling group and stitch electrode, or make the group's electrode tool group pore electrod with single micro fine cylindrical, tool-electrode to the workpiece feeding, can process corresponding group's seam and group hole with certain speed.This method electrode is made loaded down with trivial details, and the preparatory period is long.3. arrange micro-electrode processing.Use several micro-electrode Electrolyzed Processing one rounds of row, after finishing, reprocess another row, all machine until the group hole.If use this several manufacture method processing cellular dimple structures, processing technology is loaded down with trivial details, manufacturing cost is too high, and therefore, it is good to be necessary to study the efficient height, the surface quality that make new advances, the solution of the processing cellular dimple that cost is low.
Summary of the invention
The objective of the invention is to solve present cellular dimple structure and process that ubiquitous efficient is not high, surface quality is not high, the defective that manufacturing cost is too high, provide a kind of high efficiency, great surface quality, the electrochemical machining method in cellular dimple structure of low manufacturing cost.
A kind of electrochemical machining method in cellular dimple structure is characterized in that may further comprise the steps:
(1), one of making has and runs through group pore structure, surperficial tool cathode with screened film; (2), during Electrolyzed Processing, tool cathode and the workpiece anode made are placed in opposite directions; (3), in the Electrolyzed Processing, run through group hole to the even jet electrolytic liquid of workpiece anode by tool cathode; (4), switch between workpiece anode and the tool cathode, to the workpiece Electrolyzed Processing.
Because this processing mode is tool cathode and anode to fit tightly (middle rise shield and the screened film of insulating effect belongs to the part of tool cathode), this and traditional Electrolyzed Processing mode are very different.In traditional Electrolyzed Processing, leave an electrolyte flow channel between tool cathode and the workpiece anode.And the present invention adopts and runs through group pore structure as electrolyte flow channel on the tool cathode, promptly as feed pathway, also as liquid outlet channel.Electrolyte sprays to the tool cathode surface under the effect of pump, arrive tool cathode and this zone of workpiece anode by the cathode fixture internal cavities, at this moment group's pore structure is the flow channel of solution, also is the flow pass of solution, and electrolyte enters flow pass by the runner of cathode fixture again.This moment, tool cathode ran through the interior ancient piece of jade, round, flat and with a hole in its centre in group hole and the electric field between the workpiece anode has been removed main effect to the workpiece anode material.Adopt this electrochemical machining method, only apply steps such as photoresist, photoetching, development, etching in tool surfaces, form tool cathode, or have the through hole structure by other technology formation, the surface has the tool cathode of screened film.And anode is without any need for suchlike step, just can Electrolyzed Processing after tool cathode clamps it, workpiece need not secondary operations after the process finishing.The most important thing is,, this means and to produce in batches easily so long as processing just need not be changed tool cathode with a kind of part.The once electrolytic that can realize cellular dimple structure shapes, and has improved working (machining) efficiency, has reduced processing cost.
Description of drawings
Fig. 1 is a cellular dimple structure electrochemical machining process schematic diagram.
Fig. 2 is a tool cathode manufacturing process schematic diagram.Wherein, Fig. 2 (a) is that metal substrate applies photoresist and carries out the photoetching schematic diagram; Fig. 2 (b) is the back band photoresist metal substrate schematic diagram that develops; Fig. 2 (c) is the tool cathode schematic diagram that obtains after etching is finished.
Label title among Fig. 1: 1, screened film, 2, tool cathode, 3, the workpiece anode, 4, electrolyte,
Label title among Fig. 2: 5, substrate, 6, exposure light source.
The specific embodiment
As shown in Figure 1, cellular dimple structure electrochemical machining process.Tool cathode 2 surfaces have screened film 1, and anode 3 is without any need for suchlike step, just can Electrolyzed Processing after tool cathode 2 clamps it.Electrolyte 4 sprays to the tool cathode surface under the effect of pump, arrive tool cathode and this zone of workpiece anode by the cathode fixture internal cavities, at this moment group's pore structure is the flow channel of solution, also is the flow pass of solution, and electrolyte enters flow pass by the runner of cathode fixture again.
Shown in Figure 2 is tool cathode manufacture process schematic diagram, on substrate 5, apply screened film 1, through having formed the figure shown in Fig. 2 (b) after photoetching, the development, the substrate exposed part is carried out etching, can adopt physical etchings, also can adopt chemical etching or electrochemical etching, substrate be carved worn, form figure shown in Fig. 2 (c).At this moment screened film 1 is referred to as tool cathode 23 with substrate 5 integrative-structures.Here it is to be noted: this only is a kind of technology that obtains tool cathode 2, also can adopt other technology (as drilling) to obtain to have to run through group pore structure, and the surface has the tool cathode 2 of screened film.
Below in conjunction with Fig. 1, Fig. 2, explanation method of the present invention, implementation process is passed through following step successively:
1. with reference to figure 2 (a), screened film 1 is coated in substrate 5, and photoetching, make to occur group's pore structure on the screened film;
2. with reference to figure 2 (b), after the development, there is the part substrate exposed externally;
3. with reference to figure 2 (c), the exposed part of substrate 5 is carried out etching, the substrate of carving after wearing 5 is called tool cathode 2 with screened film 1 integrative-structure, as the tool cathode of cellular dimple structure Electrolyzed Processing;
4. just can Electrolyzed Processing after tool cathode 2 and workpiece 3 clamp with reference to figure 1.Electrolyte 4 sprays to the tool cathode surface under the effect of pump, arrive tool cathode and this zone of workpiece anode by the cathode fixture internal cavities, at this moment group's pore structure is the flow channel of solution, also is the flow pass of solution, and electrolyte enters flow pass by the runner of cathode fixture again.After the processed cellular dimple structure of anode blank, Electrolyzed Processing finishes.
5. with reference to figure 1, take out workpiece 3, another workpiece blank is installed again, carry out Electrolyzed Processing again after clamping with tool cathode 2.Like this, can realize that the batch of cellular dimple structure workpiece is efficient, great surface quality, the low-cost manufacturing.

Claims (1)

1, a kind of electrochemical machining method in cellular dimple structure is characterized in that may further comprise the steps:
(1), one of making has and runs through group pore structure, surperficial tool cathode (23) with screened film;
(2), during Electrolyzed Processing, tool cathode (23) and the workpiece anode (26) made is staggered relatively;
(3), in the Electrolyzed Processing, run through group hole to the even jet electrolytic liquid of workpiece anode (26) finished surface by tool cathode (23);
(4), energising between workpiece anode (26) and the tool cathode (23), to the workpiece Electrolyzed Processing.
CN 200610096707 2006-10-10 2006-10-10 Electrochemical machining method in cellular dimple structure Pending CN1958206A (en)

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Cited By (19)

* Cited by examiner, † Cited by third party
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CN101791726A (en) * 2010-04-22 2010-08-04 西安交通大学 Processing method of cylindrical component with mask micro-structure on outer curved surface
CN101804488A (en) * 2010-04-22 2010-08-18 西安交通大学 Method for processing inner curved surface maskless microstructure of sleeve part
CN101862870A (en) * 2010-06-21 2010-10-20 南京航空航天大学 Array micro-pit electrolytic machining method and system
CN101733491B (en) * 2009-12-22 2011-06-22 沈阳黎明航空发动机(集团)有限责任公司 Method for electrolytically machining complex case type surface
CN103084682A (en) * 2013-01-16 2013-05-08 河南理工大学 Method of liquid beam jet flows electrolyzing and processing dimples
CN103706899A (en) * 2013-12-12 2014-04-09 西安理工大学 Wire electrode array structure preparation method for micro-electrochemical machining
CN103737130A (en) * 2013-12-03 2014-04-23 同济大学 Electrochemical deburring and surface processing method through gel-state electric brush
CN104014879A (en) * 2014-05-27 2014-09-03 南京航空航天大学 Slave type array micro pit electrolytic machining method
CN104551282A (en) * 2014-12-11 2015-04-29 南京航空航天大学 System and method for improving locality of electrolytic processing of array micro-pit by flexible template
CN104772538A (en) * 2015-04-29 2015-07-15 常州工学院 Copper-aluminum composite micro-electrolysis electrode and preparation method for same
CN105290617A (en) * 2015-11-13 2016-02-03 中国科学院力学研究所 Machining processing method for enabling metal glass to generate stretching plasticity
CN105364237A (en) * 2015-11-20 2016-03-02 沈阳黎明航空发动机(集团)有限责任公司 Method for controlling honeycomb size of thin-walled honeycomb part
CN106064261A (en) * 2016-06-12 2016-11-02 南京航空航天大学 The System and method for of micro-pit array Electrolyzed Processing based on magnetic PDMS mask
CN106392214A (en) * 2016-10-21 2017-02-15 河南理工大学 Periodic flow closure control device for pulse jet flows
CN107116274A (en) * 2017-05-19 2017-09-01 广东工业大学 A kind of method of cavitation jet auxiliary mask Electrolyzed Processing array pit
CN107956516A (en) * 2017-11-23 2018-04-24 中国航发沈阳黎明航空发动机有限责任公司 A kind of honeycomb and its processing method for gas turbine sealing
CN109332831A (en) * 2018-11-20 2019-02-15 广东工业大学 A kind of micro- texture processing unit (plant) in surface
CN111715955A (en) * 2020-07-01 2020-09-29 南京航空航天大学 Large length-diameter ratio thick-wall array micro-flow channel pipe electrode and manufacturing method thereof, and electroforming core mold for manufacturing pipe electrode and manufacturing method thereof
CN114289803A (en) * 2022-01-25 2022-04-08 扬州大学 Ultrasonic translation jet flow electrolytic machining device and method for surface micro-pit array structure

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101733491B (en) * 2009-12-22 2011-06-22 沈阳黎明航空发动机(集团)有限责任公司 Method for electrolytically machining complex case type surface
CN101804488A (en) * 2010-04-22 2010-08-18 西安交通大学 Method for processing inner curved surface maskless microstructure of sleeve part
CN101791726A (en) * 2010-04-22 2010-08-04 西安交通大学 Processing method of cylindrical component with mask micro-structure on outer curved surface
CN101862870A (en) * 2010-06-21 2010-10-20 南京航空航天大学 Array micro-pit electrolytic machining method and system
CN103084682B (en) * 2013-01-16 2015-04-22 河南理工大学 Method of liquid beam jet flows electrolyzing and processing dimples
CN103084682A (en) * 2013-01-16 2013-05-08 河南理工大学 Method of liquid beam jet flows electrolyzing and processing dimples
CN103737130A (en) * 2013-12-03 2014-04-23 同济大学 Electrochemical deburring and surface processing method through gel-state electric brush
CN103706899B (en) * 2013-12-12 2016-01-20 西安理工大学 For the line electrode array structure preparation method of electrochemical micromachining
CN103706899A (en) * 2013-12-12 2014-04-09 西安理工大学 Wire electrode array structure preparation method for micro-electrochemical machining
CN104014879A (en) * 2014-05-27 2014-09-03 南京航空航天大学 Slave type array micro pit electrolytic machining method
CN104014879B (en) * 2014-05-27 2017-01-11 南京航空航天大学 Slave type array micro pit electrolytic machining method
CN104551282A (en) * 2014-12-11 2015-04-29 南京航空航天大学 System and method for improving locality of electrolytic processing of array micro-pit by flexible template
CN104551282B (en) * 2014-12-11 2017-09-19 南京航空航天大学 The system and method for array micro-pit Electrolyzed Processing locality is improved using Flexible formwork assembly
CN104772538A (en) * 2015-04-29 2015-07-15 常州工学院 Copper-aluminum composite micro-electrolysis electrode and preparation method for same
CN105290617A (en) * 2015-11-13 2016-02-03 中国科学院力学研究所 Machining processing method for enabling metal glass to generate stretching plasticity
CN105290617B (en) * 2015-11-13 2017-05-31 中国科学院力学研究所 A kind of processing and treating method for making glassy metal produce stretching plastic
CN105364237A (en) * 2015-11-20 2016-03-02 沈阳黎明航空发动机(集团)有限责任公司 Method for controlling honeycomb size of thin-walled honeycomb part
CN106064261A (en) * 2016-06-12 2016-11-02 南京航空航天大学 The System and method for of micro-pit array Electrolyzed Processing based on magnetic PDMS mask
CN106392214A (en) * 2016-10-21 2017-02-15 河南理工大学 Periodic flow closure control device for pulse jet flows
CN107116274A (en) * 2017-05-19 2017-09-01 广东工业大学 A kind of method of cavitation jet auxiliary mask Electrolyzed Processing array pit
CN107956516A (en) * 2017-11-23 2018-04-24 中国航发沈阳黎明航空发动机有限责任公司 A kind of honeycomb and its processing method for gas turbine sealing
CN109332831A (en) * 2018-11-20 2019-02-15 广东工业大学 A kind of micro- texture processing unit (plant) in surface
CN109332831B (en) * 2018-11-20 2019-11-19 广东工业大学 A kind of micro- texture processing unit (plant) in surface
CN111715955A (en) * 2020-07-01 2020-09-29 南京航空航天大学 Large length-diameter ratio thick-wall array micro-flow channel pipe electrode and manufacturing method thereof, and electroforming core mold for manufacturing pipe electrode and manufacturing method thereof
CN114289803A (en) * 2022-01-25 2022-04-08 扬州大学 Ultrasonic translation jet flow electrolytic machining device and method for surface micro-pit array structure
CN114289803B (en) * 2022-01-25 2023-09-19 扬州大学 Ultrasonic translation jet electrolytic machining device and method for surface micro-pit array structure

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