CN1946514A - A device and method for forming microstructures - Google Patents
A device and method for forming microstructures Download PDFInfo
- Publication number
- CN1946514A CN1946514A CNA2005800128019A CN200580012801A CN1946514A CN 1946514 A CN1946514 A CN 1946514A CN A2005800128019 A CNA2005800128019 A CN A2005800128019A CN 200580012801 A CN200580012801 A CN 200580012801A CN 1946514 A CN1946514 A CN 1946514A
- Authority
- CN
- China
- Prior art keywords
- actuator
- along
- ram
- cutter
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000005520 cutting process Methods 0.000 claims description 38
- 238000007514 turning Methods 0.000 claims description 16
- 230000004044 response Effects 0.000 claims description 14
- 238000004458 analytical method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 12
- 230000000694 effects Effects 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 238000013016 damping Methods 0.000 claims description 6
- 238000001914 filtration Methods 0.000 claims description 5
- 239000004519 grease Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000003068 static effect Effects 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000008602 contraction Effects 0.000 claims description 3
- 230000007812 deficiency Effects 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000003754 machining Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 23
- 230000006872 improvement Effects 0.000 description 12
- 230000002349 favourable effect Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 238000007731 hot pressing Methods 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 229910001018 Cast iron Inorganic materials 0.000 description 6
- 230000014509 gene expression Effects 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000011112 process operation Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 2
- 229910001573 adamantine Inorganic materials 0.000 description 2
- 239000003570 air Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000573 anti-seizure effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000013404 process transfer Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/32—Feeding working-spindles
Abstract
The invention relates to a device and a method for the production of microstructures, comprising: a spindle driven in rotation about a spindle axis, on which a housing for clamping a workpiece is provided; and an actuator (30), which has a rapid drive (36), in particular a piezo-drive for generation of a rapid movement of a tool (32) in a direction essentially perpendicular to the workpiece surface, thereby the actuator (30) may be positioned by means of a further drive (24) for generation of a linear movement in a first direction along a workpiece surface for machining (24). The rapid drive (36) is coupled to the tool (32) by means of a guide device (38) which permits an adjustment of the tool (32) in the axial direction of the rapid drive (36) against a return force and which presents a high rigidity in a plane perpendicular thereto. The applied control technology permits a precise and reproducible production of microstructures using the dynamic system properties.
Description
Technical field
The present invention relates to a kind of device that is used for forming micro-structural by main shaft, described main shaft is suitable for being actuated to around its longitudinal axis rotation and is provided with the anchor clamps that are used for holding workpiece, this device has the actuator of the fast-loop driver of being provided with, this fast-loop driver is suitable for making cutter along the direction rapid movement that is approximately perpendicular to surface of the work, this actuator can be along the surface of the work location with by being suitable for producing the additional actuators work of moving along the linear feeding of first direction.
The invention still further relates to a kind of actuator that is applicable to this device.
At last, the present invention relates to a kind of method, this method is used to utilize cutter forming micro-structure surface on the workpiece by main axis rotation, described cutter can be driven by actuator and can be positioned to property direction along the line along workpiece by means of driver, and can be by described actuator along moving towards surface of the work with respect to the vertical direction of described linear direction.
Background technology
Apparatus and method from the known described type of EP 0 439 425 B1.
Described known method and well known device are used to utilize the turning operation to make contact lens.According to this operation, contact lens to be processed is installed on the main shaft with blank.Can be by the workpiece that main axis rotation drives by turning cutting tool processing by means of the piezoelectric actuator location.Lathe comprises the column swivel head that is set as around the pivot axis motion.The knife rest guiding piece is installed on this swivel head.This knife rest guiding piece is used for respect to the pivot axis of swivel head property along the line and radial direction guiding knife rest.The knife rest that lathe tool (being preferably turning diamond form) arranged in the knife rest upper support.In order to make the pivot axis fast feed of lathe tool, can knife rest be moved along the knife rest guiding piece by means of motor driver around swivel head.For meticulous location lathe tool, be provided with the piezoelectric actuator that can comprise two piezoelectricity transmitting devices.The first piezoelectricity transmitting device allows to carry out along the moving of knife rest guiding piece direction, and the second piezoelectricity transmitting device is suitable for allowing carrying out the motion perpendicular to described first motion.Can control the setting movement of piezoelectricity transmitting device around the anglec of rotation of main-shaft axis in response to main shaft.
Described layout allows to carry out high-precision lens surface processing by diamond cutter, even allows to form the rotation asymmetric surface.
For example from US 5 467 675 or the known similar device that is used for forming by turning the rotation asymmetric surface of GB 2 314 452 A by piezoelectric actuator.
Although well known device and known method can utilize diamond cutter to carry out the fine structure Surface Machining, yet because dynamic characteristics is not enough, such apparatus and method are unsuitable for processing adamantine metal material with high accuracy.For example making lens by hot pressing needs such material as mold materials.Described material can for example be a carbide alloy.The production of the lens that are used for throwing light on that use in the spotlight that is called projection-type spotlight (PES spotlight) for example must provide this mould with specific microstructure, described mould then during hot pressing process transfer printing become corresponding lens.Described micro-structural is served as the micro-optics parts in the lens of such manufacturing, to satisfy the given predetermined light distribution characteristic of spotlight.
Now can be only by how much variable operations (geometrically uncertain process) with imagination form Production Example as contain carbide alloy or cast iron as described in mould.Beginning by the macroscopical form processing mold of turning with respective lens, is carried out after the die surface polishing in case of necessity.Afterwards, form the die region for the treatment of on lens, to generate scattering center, for example, wherein utilize mask to cover the zone that does not form micro-structural by this way by diamond dust sandblast operation by it by some operations.Then, in sandblast operation rear section succeeded by two-dimentional post processing.Therefore,, need a large amount of manual procedure, this means to forming required surface texture and must carry out extremely consuming time and expensive processing for making described mould.In addition, so a succession of operation is easy to produce the sum of errors mistake, and these sum of errors mistakes have adverse effect for the repeatability of given light distribution characteristic.
The aforementioned well known device that has piezoelectric actuator is unsuitable for such shaping operation, and this is because it lacks required for this reason mechanical stability and with the necessary dynamic characteristics of required cutting speed Precision Machining hard metal piezoelectricity workpiece.
Although utilize well known device perhaps can carry out Position Control processing, have only the enough great talents of first resonant frequency to carry out naturally by the distance corresponding system, this means that maximum only reaches about 1,000Hz just may process by known system.Yet obtainable like this cutting speed is not enough to correctly process previous materials with enough surface quality, and is particularly all the more so when the rotation asymmetric surface structure of aforementioned type to be formed.
Summary of the invention
So, the purpose of this invention is to provide a kind of apparatus and method that are used to form micro-structural, even these apparatus and method allow also can process with high cutting speed the hard metal material such as carbide alloy and cast iron, and allow to obtain the asymmetric micro-structural of rotation simultaneously.Particularly, the present invention can make such mould, and this mould is used for being suitable for the used lens of PES spotlight and being provided with the lens of dispersing lens micro-structural by the hot pressing manufacturing.
The present invention has so realized this purpose by the device of the above-mentioned type, be that actuator is connected with cutter by guiding device, the effect of this guiding device opposing restoring force makes the axial direction feeding of cutter along fast-loop driver, and has very high rigidity in the plane perpendicular to described direction.
Therefore purpose of the present invention realizes fully.
By with fast-loop driver with along being connected all having guiding device very high rigidity, customization perpendicular to all directions in the plane of the direction of motion of this fast-loop driver, a kind of actuator control system that is used for the lathe tool motion can be provided, it presents the sufficiently high resonant frequency of following high dynamic stiffiness, thereby also can process with sufficiently high cutting speed the hard material such as carbide alloy and cast iron even allow.Avoided simultaneously vibration in this case, otherwise can vibrate when the hard material of processing such as cast iron, this can make the surface quality variation.
Preferably, described fast-loop driver is a piezoelectric actuator.
Yet, can imagine other embodiment of described fast-loop driver equally, for example hydraulic actuator.What the term fast-loop driver of use related to the present invention was described is such driver, and it can carry out quick controlled motion vertically, but can not carry out controlled motion in perpendicular to the plane of described direction, and only is subjected to very little power in described direction.Term " fast " is meant that this driver can be so that 500Hz or bigger frequency are moved at least when being controlled by specific control signal in this connection.
Improve according to present invention further optimization, described guiding device has the static rigidity of 50N/ μ m at least in the plane perpendicular to the direction of feed of this guiding device, be preferably 100N/ μ m at least.
Such device particularly can be made the mould of the hot pressing that is used for the used lens of PES condenser, and the surface of described lens is provided with micro-structural or quilt " frosted ".Such device can obtain the cutting speed of 60 meters/minute magnitude when processing cast iron or carbide alloy.This sufficient to guarantee can accepted correct processing rotation asymmetric surface in the time period.Used in this case insert (insert) can be a traditional type.
According to further favourable improvement of the present invention, described guiding device comprises the ram that preferably is supported on first and second spring elements, described spring element radially to a great extent can not be crooked along this ram, but can resist described spring element spring force and along the direction deflection of ram axis.
According to the further favourable improvement of described embodiment, described spring element is configured to leaf spring for this reason, and the length direction end of described leaf spring is stuck in the keeper and can moves transverse to this length direction.
According to the improvement that further facilitates of described embodiment, described spring element comprises clearance gauge bar (feeler gauge strip) in this case, and described clearance gauge bar radially is stuck between keeper and the ram with arranged crosswise.
Alternatively, as the structure of radial symmetric spring element, for example being the disc spring form, also is feasible, and ram can be connected the center in this case.
Described structure allows to obtain the enough elastic force of guiding device along the direction of motion of fast-loop driver, and very high rigidity is provided in the plane perpendicular to this direction simultaneously.
According to further favourable improvement of the present invention, described cutter is stuck in first end of ram, and this ram is leaning on described fast-loop driver partially with this cutter second opposed end place.
This has guaranteed required restoring force, and fast-loop driver is resisted this restoring force and acted on.
According to the further favourable improvement of this embodiment, described ram leans on described fast-loop driver partially by fluid pressure.
Although also can realize biasing usually, yet this feature has the effect that reduces the cutting power influence of noise by mechanical device (for example passing through spring).
Further favourable improvement according to this embodiment, described ram remains in the housing, this housing and this ram have formed the pressure-tight space, can apply fluid pressure in this space, this space seals towards the outside vertically by primary diaphragm that is connected with described ram in the piezoelectricity side and the secondary diaphragm that passes through to be connected with described ram in the cutter side, and primary diaphragm is exposed to the active surface of fluid pressure greater than secondary diaphragm.
According to the further favourable improvement of this embodiment, described diaphragm is made of aluminium.
Can guarantee to be used for the restoring force of piezoelectric actuator like this in the better way mode, reduce may influencing of cutting power noise simultaneously.
According to the further favourable improvement of this embodiment, described housing comprises at least one by agglomerated material, is preferably the damper element that sintering metal is made.In this case, described damper element preferably demonstrates a lot of open spaces.
In addition, in this design, can between described damper element and relevant diaphragm, form the gap that width is preferably between 0.1 and 1 millimeter and is filled with the damping medium.Described damping medium can for example be air, grease or oil.
These features help further to reduce the cutting power The noise.
According to further favourable improvement of the present invention, first end relative with ram of piezoelectric actuator is stuck in and keeps on the anchor clamps, and be connected with ram by compensating element, with the first end second opposed end, this compensating element, can compensate the alignment error between the longitudinal axis of ram axis and piezoelectric actuator.
In this case, second end of piezoelectric actuator can pass through the relevant centralising device that male element (for example particularly ball or ball element) leans on ram.
Can eliminate radially static state and dynamic applying of cross force by this way greatly, for example can produce this power, and can cause producing this power by the cutting power noise by the alignment error between piezoelectric actuator and the ram.
According to an alternative embodiment of the invention, second end of described piezoelectric actuator ends at the overlay that is connected with ram by contraction flow region.
Can further reduce the quality of whole system in this way, and can save a joint as needing, this is favourable with regard to the dynamic of whole system.
According to further improvement of the present invention, described driver makes and can carry out feed motion perpendicular to the direction of main-shaft axis in the edge, and described actuator makes cutter to move along the main shaft axial direction.
By this embodiment, owing to make cutter roughly along main shaft axial direction (that is) feeding along the z direction by piezoelectric actuator, thereby realized turning operation by the end face processing mode.
Described structure example forms micro-structural as being suitable for being used to make on the mould of PES optically focused lamp lens.
According to still another embodiment of the invention, described driver carries out feed motion along the direction that is parallel to main-shaft axis, and described actuator makes that cutter can be along moving perpendicular to the direction of this direction.
Under the situation of this layout, can carry out Surface Machining by on the outer surface of workpiece, forming micro-structural to this workpiece along the longitudinal direction.Therefore, because actuator allows cutter in that (for example, along x direction feeding in) the plane, therefore described layout is processed in the mode of vertical lathe perpendicular to main-shaft axis.
This layout for example for example be suitable for for the adhesion that improves grease on the surface that is subjected to friction stree (for example, bearing outside surface) go up and form micro-structural, thereby realize the obvious raising of lubrication property and dead (anti-seizure) performance of anti-bite.
According to the improvement that further facilitates of the present invention, the electronic controller that is used to control actuator movements is provided, this controller is controlled with respect to moving of workpiece actuator along the position of first direction in response to the position, angle and the actuator of workpiece.
This makes and can obtain rotation asymmetric surface structure by means of the piezoelectricity feed motion of cutter.
According to another structure of the present invention, described controller comprises such device, this device be used for by cartesian coordinate definition, treat to convert Coordinate Conversion structure to by the polar coordinates definition in the specific microstructure that mould forms, wherein store the actuating value, this actuating value is the polar function that comprises angle of rotation and radius.
The feasible corresponding actuating value that can under the situation of end face processing, be identified for actuator of this Coordinate Conversion.
In this case, described Coordinate Conversion structure optimization is stored in the table of comparisons (LUT), and electronic controller is derived the actuating value from this table of comparisons, and this actuating value is supplied to amplifier, so that described actuator is controlled.
According to the further advantageous embodiment of described embodiment, described electronic controller comprises the device that is used for the actuated signal that is supplied to amplifier is carried out interpolation, and this interpolation is the function of linear feeding motion along the positional increment of first direction.
Although because the inertia of mechanical system, in the unnecessary interpolation of carrying out of the operative orientation of the piezoelectric actuator that has certain smooth effect automatically, the function of the positional increment of moving as linear feeding is supplied to the actuated signal interpolation of amplifier still meaningful.Thereby avoided when drawing the neighbor of micro-structural, formed the vestige that is similar to the tool margin that produces because linear feeding radially moves.
According to another advantageous embodiment of the present invention, first resonant frequency of described actuator is at least 1,500Hz, be preferably at least 2,000Hz, more preferably at least 3,000Hz, described control device is designed to supply with the signal of this actuator LPF or bandpass filtering, and the upper cut off frequency of this signal is less than the resonant frequency of actuator.
This embodiment makes and can process with high cutting speed that described cutting speed is chosen to guarantee the resonant frequency of the cut-off frequency of required micro-structural to be formed a little less than actuator under the situation of the Position Control that does not have actuator.Therefore, can be for the open cycle system that does not have Position Control still the highlyest may cutting speed carry out work with the resonant frequency of actuator fully separates.
Purpose of the present invention further realizes by the actuator that is suitable for utilizing piezoelectric actuator to be used in the lathe tools motion of formation micro-structure surface, described piezoelectric actuator is connected with cutter by guiding device, described guiding device makes described cutter can resist the axial feed of the effect of restoring force along piezoelectric actuator, and presents very high rigidity in the plane perpendicular to described direction.
For method, purpose of the present invention is achieved by the following method, the cutter that promptly utilizes actuator to drive forms micro-structure surface on the workpiece by main axis rotation, described cutter can be by actuator along moving towards the direction of surface of the work, and can be by another driver along surface of the work along perpendicular to this surperficial direction linear orientation, said method comprising the steps of:
(a) be provided for the required micro-structural of workpiece to be processed;
(b) described required micro-structural is converted to the file (table of comparisons that comprises along the actuated position of vertical machine direction, LUT), this actuated position be the described corner of described workpiece and described cutter along the function of the linear feeding stroke of described surface of the work, be used for the piezoelectricity control feed motion of described cutter;
(c) described required micro-structural is carried out spatial-frequency analysis, and being identified for the maximum cut-off of the signal of supplying position, to be described corner, described actuator move and the function of described cutting speed along the described linear feeding of described surface of the work described supplying position;
(d) set the cutting speed of the turning operation of workpiece, make the described maximum cut-off of described required micro-structural less than described first resonant frequency of described actuator;
(e) drive a described main shaft and a driver, thereby along the described actuator of described surface of the work linear orientation, and based on the actuating value that from the described table of comparisons, derives by means of this actuator by forming micro-structural at workpiece against described surface of the work feeding cutter, described actuating value is described cutting speed, described corner and the described actuator function along the described feed motion length of described surface of the work.
Therefore, the method according to this invention has been guaranteed on described workpiece to form in the process of micro-structural, can use the highest described this actuator of frequencies operations to be lower than actuator resonance frequency still may cutting speed the time.This makes and can utilize described system with the speed of the highest cutting speed that reaches that described resonant frequency by described actuator limits, and does not need to carry out Position Control.
The method according to this invention also is suitable for basically and is used to utilize actuator control cutter to be used in combination by turning operation forms micro-structural on workpiece conventional apparatus.Yet preferably, the method according to this invention is used for being used in combination with device according to the present invention.
According to the further favourable improvement of the inventive method, if the cutting speed deficiency that can regulate according to step (d), then the signal to the feed motion that is used for actuator carries out LPF or bandpass filtering.
Under following situation, the spatial-frequency analysis that is described required micro-structural to be formed demonstrates the high frequency that comprises the type that is for example taken place under the situation of sharp edges transition, normal selected cutting speed can obviously reduce, and fully separates with the resonant frequency of maintenance with system.In this case, though above-mentioned feature guaranteed under the situation of described required micro-structural, also can use high cutting speed.By at initial trap signal, thus described required micro-structural some smoothly guarantee to use sufficiently high cutting speed processing for example such as the hard material of cast iron or carbide alloy.
According to another embodiment of the present invention, form the described required micro-structural of workpiece, thereby the white noise of low pass restriction in spatial-frequency analysis, occurs being subjected to by means of algorithm.
In this case can be by overlapping and form the required micro-structural of workpiece by the dot pattern that selective examination maker (random-check generator) generates by low pass filter (deep-pass filter) (being preferably the binomial wave filter).
By this structure of micro-structural, can guarantee during forming required micro-structural, just to obtain low-pass filter signal, this signal is particularly suitable for working under the situation a little less than the resonant frequency of actuator.
Alternatively, form this required micro-structural by generating the dot pattern that generates at random, described dot pattern then is switched to frequency space, LPF and is transformed into again works as front space.
This desired structure is suitable for making the mould that is used for making by hot pressing the used lens of PES spotlight particularly well, wherein forms the dispersing lens micro-structural on lens surface.
The method according to this invention can be advantageously along the described actuator of main shaft axial direction feeding, and can be by first driver along locating this actuator perpendicular to the direction of described direction.
This makes and can process with the end face processing mode.
Alternatively, can locate described actuator along the z direction that is parallel to main-shaft axis by first actuator, and can be against described surface of the work along this actuator of direction feeding perpendicular to described direction.
Under the situation of this embodiment, can realize the micro-structural of workpiece in vertical turning operation mode.
As previously discussed, the method according to this invention is suitable for forming micro-structural, particularly lens microstructure or scattering micro-structural particularly well on optical element, perhaps is suitable for making the hot pressing die that is used for this optical element.
In addition, the method according to this invention is suitable for wherein treating to form many other purposes of micro-structural on surface of the work.This is comprising being subjected to forming micro-structural on the surface of friction stree, especially for friction bearing.
Be to be understood that above-mentioned feature of the present invention and remain the further feature of the following explanation respective combination shown in not only can be used for, and can be used for other combination or use separately, and do not depart from the scope of the present invention.
Description of drawings
With reference to the accompanying drawings, from according to knowing other features and advantages of the present invention the description of some preferred embodiment, in the accompanying drawings:
Fig. 1 shows the schematic diagram very simplified of expression according to apparatus of the present invention;
Fig. 2 represents by the longitudinal section according to actuator of the present invention shown in Figure 1;
Fig. 2 a represents the details of the actuator according to the present invention, compares with Fig. 2 slightly and revises, and shows the join domain between actuator and the ram;
Fig. 3 represents the stereogram according to the actuator of Fig. 2;
Fig. 4 represents according to the frequency response characteristic of actuator Fig. 2, that have cutter and phase response characteristic;
Fig. 5 is expressed as mfg. moulding die and the amplification details of required lens microstructure to be formed, and this mould is used to make the used lens of PES spotlight;
Fig. 6 shows according to the pixel map of the required micro-structural of Fig. 5 and represents;
Fig. 7 represents the spatial-frequency analysis that carries out along the periphery that with R=34mm is radius according to the required micro-structural of Fig. 6;
Fig. 8 represents to comprise the block diagram of the control that is used for actuator;
Fig. 9 represents to be used for the graphic representation of the algorithm of drive actuator; And
Figure 10 represents the longitudinal section by actuator of the present invention, and this actuator is compared slightly with embodiment shown in Figure 2 and revised.
The specific embodiment
In Fig. 1, be shown schematically in very much according to device of the present invention, this device is whole by Reference numeral 10 expressions.
Device 10 according to the present invention is lathes, can carry out quick piezoelectricity controlled motion and the additional actuator 30 that is equipped with respect to workpiece 16 in order to make cutter 32.Device 10 comprises main shaft 12, thereby it can be driven around 25 rotations of its main-shaft axis, and is as shown in arrow 28.The anchor clamps 14 that are the chuck form that is suitable for holding workpiece 16 are installed on main shaft 12.On the lathe bed 13 of device 10, be provided with driver 20, knife rest 18 moved shown in double-head arrow 26 along the z direction by means of this driver along the guiding piece that extends along z direction (being parallel to main-shaft axis 25).Knife rest 18 is provided with driver 22, by means of this driver can make knife rest 24 shown in double-head arrow 27 vertically (y direction) move.Knife rest 24 is provided with another driver that allows its along continuous straight runs (the x direction is perpendicular to main-shaft axis 25) motion again.
At last, knife rest 24 supports actuator 30, and cutter 32 can move along the z direction is additional shown in double-head arrow 34 by means of this actuator.
For controlling described lathe and described actuator, be provided with the central controller that schematically illustrates with Reference numeral 17.The position, angle of main shaft 12 can be monitored by encoder 31.
So, for on the surface of workpiece 16, forming micro-structural, operative installations 10 by this way, promptly passing through knife rest 24 in x direction positional actuator 30, make workpiece 16 around main-shaft axis 25 rotation by main shaft 12, by actuator 30 make the workpiece 16 that cutter 32 determines in response to the space coordinates of actuator 30 and by encoder 31 the position, angle and towards surface of the work along the feeding of x direction.By this way, can on surface of the work, form micro-structural, and can form rotation asymmetric surface structure with high accuracy.
Make the workpiece can be processed with reference to the described structure of Fig. 1 with the end face processing mode, this means workpiece is rotated, at actuator 30 (promptly along the z direction, when the direction along main-shaft axis 25) carrying out the fast feed campaign, cutter 32 is main along transverse to the horizontal direction (x direction) of main-shaft axis or along the radial motion of workpiece 16.Certainly may produce in addition along other of other direction and move, for example be turning profile moving along the z direction.
Should be understood that with straight-cut operation mode processing work be feasible equally.In this case, realize the setting movement of actuator 30, can in plane (xy plane), carry out feed motion by driver 30 simultaneously perpendicular to this direction along the z direction by driver 20.Be easily, the mode of extending along x direction (perhaps along the y direction) with the piezoelectricity axis for described purpose with actuator position on knife rest 24.Such layout for example is suitable for forming micro-structural with cylindrical turning operation or internal cylindrical turning mode of operation (perhaps surface on) within it on the outer surface of workpiece.
Describe the concrete structure of actuator in more detail hereinafter with reference to Fig. 2 and Fig. 3, this actuator can be resisted the effect of restoring force and move rapidly very much along the direction of piezoelectricity axis, but it presents very high rigidity in the plane perpendicular to the piezoelectricity axis.
Mainly comprise piezoelectric actuator 36 at also whole actuator by Reference numeral 30 expressions shown in Fig. 2 and Fig. 3, this piezoelectric actuator is received on the housing and by guiding device 38 and acts on the cutter 32.Piezoelectric actuator 36 only allows along the moving of this piezoelectric actuator axial direction, and can not produce feeding power in the plane perpendicular to this direction.So, guarantee that by guiding device 38 piezoelectric actuator 36 can be directly passed to cutter 32 along the feed motion of its axial direction, and whole actuator 30 presents very high rigidity in the plane perpendicular to the piezoelectricity axis.
Guiding device 28 comprises ram 40 for this reason, and the ram axis 41 of this ram aligns with the longitudinal axis 37 of piezoelectric actuator 36 as far as possible exactly.Ram 40 can be resisted the power of first spring element 44 and second spring element 48 and move vertically along its ram axis 41, but because the particular design of spring element 44,48 and clamping arrange, this ram is suspended in the plane perpendicular to ram axis 41 in unyielding mode particularly.The leaf spring of spring element 44 and 48 for being made by the big little spring steel of thickness of width is as for example from known the application as the clearance gauge bar.The outer end of leaf spring is stuck in the keeper, and ram 40 is installed in the middle part of leaf spring.First spring element 44 is stuck between the annular keeper 45,46, and second spring element 48 is stuck between the annular keeper 49,50.
Generally speaking, ram can obtain the possible axial dipole field of about 0.5mm magnitude in this way, thereby ram 40 is held in very firm (static rigidity is more than the 100N/ μ m) in the plane perpendicular to described direction.In this case, pneumatic generation of necessary restoring force rather than the machinery that acts on the piezoelectric actuator 36 produces.Ram 40 is suspended in the housing 64 for this reason, thereby forms cavity 72, and this cavity is to outside gas-tight seal, and can be supplied with compressed air by compressed air connector 74.Cavity 72 seals by secondary diaphragm 70 by primary diaphragm 68 and in its end towards cutter vertically in its end towards piezoelectric actuator 36.In this case, towards outside (surrounding air) effective diameter of the primary diaphragm 68 of piezoelectric actuator 36 obviously greater than the diameter of the diaphragm on the opposite side 70.This has formed pressure differential, and this pressure differential is biased in the ram 40 that the center is linked to each other by these two diaphragms 68,70 along the direction of piezoelectric actuator 36.This biasing force should can be regulated this biasing force by the surface area relation of correct selection diaphragm 68,70 and by applied pressure greater than the acceleration that is produced by piezoelectric actuator 36 certainly.
Therefore, sintered metal plates 36 can see through air, thereby the bigger pressure in cavity 72 inside can be delivered to diaphragm 68, and causes significant cushioning effect by the thin passage that open space forms, thereby the cutting power influence of noise in the actuator operated process obviously reduces.
Described cutter 32 can for example be configured to insert and be installed on the anchor clamps 42, and these anchor clamps are installed in the outer axial end (by unshowned screw) of ram 40, is installed on second spring element 48 by the spring that intersects simultaneously.The opposite end of ram 40 firmly is connected with described two first cross spring elements 44.This realizes by screw 80, and this screw extends through the corresponding central recess in the spring element 44 of described two intersections and passes intermediate washer 76 and middleware 78, and the end that enters ram 40 is threaded with it.
The unit and the end piece 60 that are formed by piezoelectric actuator 36 and suspender thereof directly are screwed in together by keeper 45,46 by bolt 52 and middle ware spacer 54.
Like this, whole layout has formed compact actuator 30, and wherein piezoelectric actuator 36 can be resisted pneumatic restoring force and motion vertically, and presents higher rigidity in the plane perpendicular to this direction.
Supplementary features such as the complete splashproof that is suitable for protecting piezoelectric actuator 36 to avoid cutting oil in the cutting operation process are known to those skilled in the art, thereby here do not need to describe in detail.
The modification of the connection between piezoelectric actuator 36 and the ram 40 can be referring to Fig. 2 a.Here, between piezoelectric actuator 36 and ram 40, compensating element, 43 is set equally, is used to compensate potential alignment error between the longitudinal axis 37 of piezoelectric actuator 36 and the ram axis 41.Yet in this case, compensating element, 36 is configured to end plate 39 and the ram 40 direct-connected contraction flow regions 47 with piezoelectric actuator 36, thus formed between piezoelectric actuator 36 and the ram 40 directly but the connection of lateral flexibility.
Be also shown in lateral bracket 84 in Fig. 3 in addition, actuator 30 for example is installed on the knife rest 24 by this carriage.
At this moment, Fig. 4 represents frequency response characteristic and the working range according to the actuator of Fig. 2 and Fig. 3.In the present circumstance, using maximum feeding is that the piezo-electric crystal of 40 μ m is as piezoelectric actuator 36.With frequency range is 0 to 4, the 1V amplitude excitations piezoelectric actuator 36 of 000Hz.Illustrate stroke among Fig. 4 as the function of driving voltage.The vibrometer stroke that directly is recorded on the cutter 32 shows 0 to about 2250Hz very constant amplitude characteristic, is about 2.5 μ m/V.First resonant frequency is about 2,400Hz.
The lower view of Fig. 4 shows the phase response characteristic diagram as the function of frequency.Phase response characteristic is very linear from 0 to 2250Hz.
Because its very good dynamic characteristic is suitable for forming from the teeth outwards micro-structural especially well according to actuator of the present invention, particularly is suitable for carrying out on hard material process operation, such process operation needs high cutting speed.For example, be under the situation of 5 μ m in the structure amplitude, can reach feeding frequency up to 2.25kHz.Remove rate for higher feeding amplitude or very large material, maximum feeding frequency can slightly reduce.Seem to there is no need to utilize traditional closed-loop control (rather than used open loop control) further to improve dynamic characteristic here, and, unlikely reach a little less than resonant frequency according to the phase response characteristic that measures.
The maximum actuator stroke of used actuator 30 is approximately 40 μ m, thereby resonant frequency is about 2, in the scope of 400Hz.Yet in many application, the maximum actuator stroke is that the piezoelectric actuator of 20 μ m is just enough.So this makes minimum resonance frequency increase to about 3.5kHz.
The selection of the correct processing conditions that is used to form lens microstructure is described in further detail now with reference to Fig. 5 to Fig. 7.
Below the actuator of having described in detail with reference to Fig. 2 to Fig. 4 30 uses with the Index type lathe of making in 1978, and this lathe comprises that radial disbalance is the high accuracy main shaft of 0.4 μ m magnitude.
This device is used for the manufacturing of the used mould of lens that hot pressing PES spotlight uses.For satisfying given light distribution characteristic, in this case, the selected surf zone of respective lens must be provided with the micro-structural that is the lenticule form.When being used for corresponding projection-type spotlight, this micro-structural or " frosted " lens produce special light distribution characteristic.During making lens by hot pressing, the surface micro-structure defined in the mould is transferred on the lens surface.
Fig. 5 represents the amplification details of such micro-structural.The gray value of drawing on the vertical axis is h
Min=0 and h
Max=255, this is corresponding to 0 peak to about 10 μ m-paddy degree of depth.
Such structure also can be by forming by the overlapping dot pattern that generates at random of binomial wave filter.In order to form such structure, as shown in Figure 6, can for example in the image of 801 * 801 pixels, be each pixel addressing by selective examination maker (random-check generator).If be not addressed to pixel (that is, the gray value of all neighbors in this circumscribed circle is 0) before in the space length of n pixel, the gray value at address pixel place is made as 1 so.The selective examination maker carries out hundreds of thousands time circulation by this way.The result forms has the image that gray value is 1 unordered pixel, and wherein every pair of neighbor can not be lower than this boundary.Then, it is overlapping by the binomial wave filter this image to be carried out two dimension, then repeatedly overlapping as needs.Figuratively speaking, the binomial wave filter is that in 1 the pixel each " is put " in the center with each gray value.The result forms has " peak " of random arrangement and the image of " paddy ", and this image is simulated the shape according to the lens microstructure of Fig. 5 very effectively.Because this binomial wave filter has the low pass attribute, thereby entire image also has the low pass attribute.This is fit to utilize the actuator that is adopted to make very much.
In the illustrated case, treat respectively to be applied on the surface of mould in the micro-structural shown in Fig. 5 or Fig. 6 by the end face processing that utilizes actuator 30.In this case, be necessary that certainly the required micro-structural that will be limited by cartesian coordinate is transformed into polar coordinate system.Being transformed into polar structure can for example store with the table of comparisons (LUT) form.So (c n) is defined as the corner (c) of actuator and the function of position radially (n) to be somebody's turn to do the output valve G that shows actuator.
Fig. 7 represents the spatial-frequency analysis of deriving from according to the structure of Fig. 6.In this case, be recorded in spatial frequency on the periphery for the treatment of research structure (being radius with 34mm under the present case) by FFT Fourier analysis (FFT).From shown in peripheral part on surperficial spectrum demonstrate, from zero to about two the cycle/the spatial frequency response characteristic of millimeter is constant relatively.From about every millimeter 2.8 structures, the spatial frequency response characteristic approaches zero.
It is on the basis of 50m/min that lower view among Fig. 7 is illustrated in hypothesis Tool in Cutting speed, and the spatial frequency characteristic by the fft analysis record is to the conversion of frequency of oscillation characteristic.There is very linear phase characteristic in the result up to about 1.7kHz, and 2, the linearity of spatial frequency characteristic drops to and approaches zero after the 350Hz.
According to the present invention, cutting speed be selected to and guarantee that the amplitude response characteristic will be at the first resonant frequency place of actuator (shown in Figure 4 for about 2,400Hz) drop to zero.Therefore, selected structure allows cutting speed to be arranged to 50 meters/minute, this be since the spatial frequency characteristic of actuator about 2,350Hz place drop to approach zero.Therefore, the required surface (it is corresponding to the space structure shown in Fig. 5) that generates by means of the selective examination maker as shown in Figure 6 has the amplitude response characteristic of the white noise that is subjected to the LPF restriction, and can advantageously form with about 50 meters/minute cutting speed by means of actuator 30 according to the present invention.This even permission are processed adamantine metal material (for example carbide alloy), the sufficiently high cutting speed of these material requires, otherwise can vibrate.
Fig. 8 represents to form the used device of micro-structural 10 in the overall control that adds man-hour with the end face processing mode.
As first step, form lens microstructure (contrasting Fig. 5 and Fig. 6 respectively) at random.Alternatively, also other structure be can imagine certainly, photo (converted photo), symbol etc. for example changed.
Then convert these structures to polar coordinates.
Then, select processing conditions and simulate processing conditions based on spatial-frequency analysis.Use suitable cutting speed, be used for actuator and be used for the radially actuator signal of necessity of positional actuator so the used real-time computer (it can comprise the PC that has signal processing card) of drive actuator produces.This real-time computer calculates pulse that is produced by the encoder 31 that is used for rotation and the pulse that is produced by another encoder that is used for longitudinal axis for this reason, and produces initial pulse and the stopping pulse that is used for process operation.
The cut-off frequency of the required micro-structural that the spatial-frequency analysis decision is to be formed.If the cut-off frequency that the spatial-frequency analysis indication is very high, then the result can select very low cutting speed, and this is just to guaranteeing that maximum cut-off can keep below first resonant frequency of actuator.For example, if required micro-structural to be formed comprises that sharp edges etc. will be like this.
Then, be at first to make required micro-structural level and smooth easily, thereby obtain advantageously to use low-pass filter signal according to actuator system work of the present invention by application of low-pass filters or bandpass filter (for example, the Sobel wave filter).
Required micro-structural to be formed (contrast Fig. 6) should be square, and has for example odd number imaging pixel of 801 * 801 pixels.Based on this square structure, so can during end face processing, the processing diameter be the circle of 801 pixels.For the outline at image also obtains square pixels, picture format should be approximate consistent with the resolution ratio of the encoder that is used for main-shaft axis that is divided by with PI (pixel precision).For example, if the degree of depth is selected to 1Byte (=255 tonal gradation), then used encoder can have 2,500 increments.As example, 255 tonal gradations should be after a while corresponding to the degree of depth of 0 to 10 μ m of the degree of depth feed motion that is used for actuator.
Fig. 9 represents to be used for the related algorithm of described process operation.
Convert required micro-structural to be formed to polar coordinates, and (c is stored among the LUT of 2,500 * 401 pixels n), and given actuator actuating value is the 1Byte precision with polar coordinate image G.Actuating value G thereby can adopt value between 0 and 255, this value can corresponding between 0 and maximum 40 μ m between the actuator skew, or for example 0 to 10 μ m more among a small circle.
With the BMP form polar coordinate image shown in Fig. 9 is stored among the LUT.
As shown in Figure 9, pick up the position, angle of main shaft 12 and, after converting digital value to, be processed into " c value " by spindle encoder C based on initial " main shaft is initial " value by edge counter (edge counter) record.
Similarly, by the radial position of encoder Y pick-up actuator, and after converting digital value to, handle by the edge counter.
The actuating value that utilization is used for the z direction controls to piezoelectric actuator by real-time computer that (stroke is h
MinTo h
Max).Amplifier receives from LUT with from the input value of the encoder that is used for position, angle and radial position according to appropriate algorithm by digital to analog converter.
Amplifier input voltage U at the g=0 place
MinCorresponding to h
Min, and at the amplifier input voltage U at g=255 place
MaxCorresponding to maximum actuation value h
MaxTerm " radius fully " is described and is used for from R
MaxTo R
0The radial impulse number of the stroke of (that is, from the external diameter to the center).Term among Fig. 9 " floor (y) " expression is become the number of adjacent less even number by rounding.
Utilize algorithm shown in Figure 9, based on controlling by the digital to analog converter pair amplifier from the value of LUT and the value that is used for the encoder C value of main shaft and is used for the radially encoder Y of radial position.
This algorithm utilize two radially the output voltage of the pixel pair amplifier of interpolation by radially of next-door neighbour's pixels carry out smoothly being used for the feed motion of actuator.As shown in the other first box in polar coordinate image right side, algorithm carries out interpolation g=G (c, n+1) * (1-d)+G (c, n+2) * d.The digital value u that obtains being used for amplifier output voltage according to this formula is u=U
Min+ g* (U
Max-U
Min)/255.This value is converted to the analogue value that is used for control amplifier by digital to analog converter.
Like this, to the linear interpolation of vertically neighbor value of actuating, but corner is not carried out interpolation.Thereby avoided along " the turning vestige " of the appearance of turning direction, otherwise " turning vestige " will be clearly.
Do not need the actuating value is carried out interpolation in constant radial position, provide along circumferential smooth effect thereby the mechanical system of actuator has sufficiently high inertia.
In Figure 10, show longitudinal profile by actuator according to the present invention, this actuator is compared with the embodiment shown in Fig. 2 slightly and is revised, and whole with Reference numeral 30 ' expression.Here, corresponding component is represented with the respective drawings mark.
The design of actuator 30 ' conforms to reference to the described actuator of Fig. 2 with previous to a great extent.Compare with the embodiment of Fig. 2, cutter keeper 42 is positioned to make the accurate centering of cutter now.Thereby can avoid component perpendicular to axial direction, this component can cause from axle and disposes.This can further reduce the cutting power noise
In addition, the centering part between ram 30 ' and the piezoelectric actuator 36 is provided with coronal-plane 88 and is provided with smooth opposite face 90 at piezoelectric actuator 36 places at screw 80 places.
At last, this external sintered plate 66 forms about 0.1 to 1 millimeter (being preferably 0.1 to 0.5 millimeter) wide little gap 73 respectively with between diaphragm 68 or the relative diaphragm 69, and this gap is filled with the damping medium.This damping medium can for example be air, grease or oil.
And, thereby further reduced the cutting power noise.
Claims (36)
1, a kind of device that is used for forming micro-structural by main shaft (12), described main shaft is suitable for being actuated to rotating and being provided with the anchor clamps that are used for holding workpiece (16) around its longitudinal axis (25), this device has the actuator (30) of the fast-loop driver of being provided with (36), this fast-loop driver is suitable for making cutter (32) along the direction rapid movement that is approximately perpendicular to surface of the work, this actuator (30) can be along the surface of the work location to work along the additional actuators (24) of the linear feeding motion of first direction (x) by being suitable for generation, described device is characterised in that, described fast-loop driver (36) is connected with described cutter (32) by guiding device (38), the effect of this guiding device opposing restoring force makes the axial direction feeding of cutter (32) along described fast-loop driver (36), and has very high rigidity in the plane perpendicular to described direction.
2, device according to claim 1 is characterized in that, described fast-loop driver is a piezoelectric actuator.
3, device according to claim 1 and 2 is characterized in that, described guiding device (38) has the static rigidity of 50N/ μ m at least in the plane perpendicular to the direction of feed of this guiding device (38), be preferably 100N/ μ m at least.
4, according to claim 1,2 or 3 described devices, it is characterized in that, described guiding device (38) comprises and movably is supported on first and second spring elements (44,48) ram on (40), described spring element (44,48) along this ram (40) radially to a great extent can not be crooked, but can resist described spring element (44,48) spring force and along the direction deflection of ram axis (41).
5, device according to claim 4 is characterized in that, described spring element (44,48) is configured to leaf spring, and the length direction end of described leaf spring is stuck in the keeper (45,46,49,50) and can moves transverse to this length direction.
6, device according to claim 5 is characterized in that, described spring element (44,48) comprises the clearance gauge bar, and described clearance gauge bar radially is stuck between described keeper (45,46,49,50) and the described ram (40) in the arranged crosswise mode.
7, according to each described device in the claim 1 to 4, it is characterized in that described spring element is configured to the dish of radial symmetric, particularly be the disc spring form.
According to each described device in the claim 4 to 7, it is characterized in that 8, described cutter (32) is stuck in first end of described ram (40), and this ram (40) leans on described fast-loop driver (36) partially in itself and this cutter (32) second opposed end.
9, device according to claim 8 is characterized in that, described ram (40) leans on described fast-loop driver (36) partially by fluid pressure or spring pressure.
10, device according to claim 9, it is characterized in that, described ram (40) remains in the housing (64), this ram (40) and this housing (64) have formed pressure-tight space (72), can apply fluid pressure in this space, this space (72) seals towards the outside vertically by the primary diaphragm (68) that is connected with described ram (40) in the piezoelectricity side and at the secondary diaphragm (70) that the cutter side is connected with described ram (40), and described primary diaphragm (68) active surface that is exposed to fluid pressure is exposed to the active surface of fluid pressure greater than described secondary diaphragm (70).
11, device according to claim 10 is characterized in that, at least one in the described diaphragm (68,70) is made of aluminium.
12, according to each described device in the claim 2 to 11, it is characterized in that, first end relative with ram (40) of described piezoelectric actuator (36) is stuck in and keeps on the anchor clamps (60), and pass through compensating element, (43 with the first end second opposed end, 82) be connected with this ram (40), this compensating element, can compensate the alignment error between the longitudinal axis (37) of ram axis (41) and piezoelectric actuator (36).
13, device according to claim 12 is characterized in that, second end of described piezoelectric actuator (36) leans on described ram (40) by male element, particularly ball (82) or ball element.
14, device according to claim 12 is characterized in that, second end of described piezoelectric actuator (36) ends at the overlay (39) that is connected with described ram (40) by contraction flow region (47).
According to each described device in the claim 10 to 14, it is characterized in that 15, described housing (64) comprises at least one by agglomerated material, be preferably the damper element (66) that sintering metal is made.
16, device according to claim 13 is characterized in that, described damper element (66) comprises a lot of open spaces.
17, according to claim 15 or 16 described devices, it is characterized in that, between described damper element (66) and relative diaphragm (69), form the gap (73) that is filled with the damping medium.
18, device according to claim 17 is characterized in that, described gap is filled with air, grease or oil as the damping medium, and width is preferably 0.1 to 1 millimeter.
19, according to each described device in the aforesaid right requirement, it is characterized in that, described driver (24) makes and can carry out feed motion perpendicular to the direction (x) of main-shaft axis (25) in the edge, and described actuator (30) makes that described cutter (32) can be along direction (z) motion of main-shaft axis (25).
20, according to each described device in the claim 1 to 16, it is characterized in that, described driver (24) makes and can carry out feed motion along the direction (z) that is parallel to main-shaft axis (25), and described actuator (30) makes that described cutter (32) can be along direction (x, y) motion perpendicular to this direction.
21, according to each described device in the aforesaid right requirement, it is characterized in that, this device provides and has been used to control described actuator (30) ELECTRON OF MOTION controller (17), and its position, angle (c) and actuator (30) in response to workpiece (16) is controlled with respect to the motion of workpiece (16) this actuator (30) along the position (n) of described first direction (x).
22, device according to claim 21, it is characterized in that, described controller (17) comprises such device, this device is used for converting the Coordinate Conversion structure that is defined by polar coordinates with treating in the specific microstructure that workpiece forms, these polar coordinates comprise the actuating value (G (c that is used for actuator (30), n)), it is the function of corner (c) and the linear feeding (n) along surface of the work along described first direction (x).
23, according to claim 20 and 21 described devices, it is characterized in that, described controller comprises such device, this device be used for by cartesian coordinate definition, treat to convert the Coordinate Conversion structure that defines by polar coordinates in the specific microstructure that workpiece (16) forms, wherein store actuating value (G (c, n)), this actuating value is polar coordinates (c, function n) that comprises angle of rotation (c) and radius (n).
24, according to claim 22 or 23 described devices, it is characterized in that, described Coordinate Conversion structure can be stored in the table of comparisons (LUT), described electronic controller (17) is derived actuated signal (h) from this table of comparisons, this actuated signal is supplied to amplifier, so that described actuator (30) is driven.
25, device according to claim 24, it is characterized in that, described electronic controller (17) comprises the device that is used for the described actuated signal that is supplied to described amplifier is carried out interpolation, and this interpolation is the function of linear feeding motion (n) along the positional increment of first direction (x).
26, according to each described device in the aforesaid right requirement, it is characterized in that the first resonant frequency (f of described actuator (30)
R) being at least 1,500Hz is preferably at least 2,000Hz, more preferably at least 3,000Hz, described control device (17) is designed to supply with the signal of this actuator (30) LPF or bandpass filtering, the upper cut off frequency (f of this signal
G) less than the described resonant frequency (f of actuator (30)
R).
27, a kind of actuator (30), it is used to make workpiece to go up motion at lathe (10), thereby pass through fast-loop driver, particularly piezoelectric actuator (36) forms micro-structure surface, this actuator is characterised in that, described fast-loop driver (36) is connected with described cutter (32) by guiding device (38), and the effect of this guiding device opposing restoring force makes the axial direction feeding of cutter (32) along described fast-loop driver (36), and has very high rigidity in the plane perpendicular to described direction.
28, a kind of method that is used for utilizing the cutter (32) that passes through actuator (30) driving to go up the formation micro-structure surface at the workpiece (16) that rotates by main shaft (12), described cutter can pass through actuator (30) along direction (z) motion towards surface of the work, and can be by another driver (24) along described surface of the work along perpendicular to this surperficial direction linear orientation, said method comprising the steps of:
(a) be provided for the required micro-structural of workpiece to be processed (16);
(b) described required micro-structural is converted to the actuated position G (c that comprises along vertical machine direction, n) the file (table of comparisons, LUT), this actuated position be the corner (c) of workpiece (16) and cutter along the function of the linear feeding stroke (n) of surface of the work, be used for the actuator control feed motion of cutter;
(c) described required micro-structural is carried out spatial-frequency analysis, and be identified for supplying position G (c, the maximum cut-off (f of signal n)
G), described supplying position is that described corner (c), described actuator move (n) and cutting speed (function v) along the described linear feeding of described surface of the work;
(d) cutting speed of setting the turning operation of workpiece (16) (v), makes the maximum cut-off (f of required micro-structural
G) less than the described first resonant frequency (f of described actuator (30)
R), f
G＜f
R
(e) drive described main shaft (12) and driver (24), thereby along the described actuator of surface of the work linear orientation, and based on the actuating value that from the table of comparisons, derives by means of this actuator (30) by against the described cutter of described surface of the work feeding (32) and in described workpiece (16) formation micro-structural, described actuating value is that (v), described corner (C) and described actuator are along the function of the described feed motion length (n) of described surface of the work for described cutting speed.
29, method according to claim 28 is characterized in that, if the cutting speed deficiency that can regulate according to step (d), then the signal to the feed motion that is used for actuator carries out LPF or bandpass filtering.
30, according to claim 28 or 29 described methods, it is characterized in that, form the required micro-structural of workpiece (16), thereby in spatial-frequency analysis, obtain to be subjected to the white noise of low pass restriction by means of algorithm.
31, method according to claim 30 is characterized in that, by dot pattern that generate at random forms described required micro-structural by low pass filter, particularly binomial wave filter are overlapping.
According to claim 28,29,30 or 31 described methods, it is characterized in that 32, form described required micro-structural by the dot pattern that generates at random, described dot pattern is switched to the frequency space, is low pass filtering and is transformed into again works as front space.
33, according to each described method in the claim 28 to 32, it is characterized in that, can be along the described actuator of direction (z) feeding (30) of main-shaft axis (25), and can be by additional actuators (24) along locating this actuator perpendicular to the direction (x) of described direction.
34, according to each described method in the claim 28 to 32, it is characterized in that, locate described actuator (30) by described additional actuator along the z direction that is parallel to main-shaft axis (25), and against described surface of the work edge direction (x, y) this actuator of feeding (30) perpendicular to described direction.
35, according to each the described method in the claim 28 to 34, this method is used for forming micro-structural, particularly lens microstructure or diffraction structure on optical element, is used to make the used pressure mould of described optical element.
36, according to each the described method in the claim 28 to 34, this method is used for being subjected to form micro-structural on the surface of frrction load, especially for friction bearing.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004020990.1 | 2004-04-23 | ||
| DE102004020990A DE102004020990B4 (en) | 2004-04-23 | 2004-04-23 | Apparatus and method for producing microstructures |
| DE202004011815.7 | 2004-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1946514A true CN1946514A (en) | 2007-04-11 |
| CN100592959C CN100592959C (en) | 2010-03-03 |
Family
ID=34223637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200580012801A Expired - Fee Related CN100592959C (en) | 2004-04-23 | 2005-04-13 | A device and method for forming microstructures |
Country Status (4)
| Country | Link |
|---|---|
| CN (1) | CN100592959C (en) |
| AT (4) | ATE400402T1 (en) |
| DE (6) | DE102004020990B4 (en) |
| TW (1) | TW200534949A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101541472B (en) * | 2007-06-27 | 2011-06-22 | 株式会社爱发科 | Coarse-fine movement device |
| CN102152131A (en) * | 2011-02-28 | 2011-08-17 | 西安理工大学 | Series macro-micro driving and guiding device for piezoelectric actuator of ball screw pair |
| CN102248428A (en) * | 2010-05-21 | 2011-11-23 | 哈恩和特斯基工件指数有限商业两合公司 | Guide device and machine tool with such a guide device |
| CN103547400A (en) * | 2011-04-20 | 2014-01-29 | 费尔有限公司 | Damping roller |
| CN103748446A (en) * | 2011-06-03 | 2014-04-23 | 压电晶体式高级传感器有限公司 | Sensor for measuring pressure and/or force |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005044087A1 (en) | 2005-09-08 | 2007-03-15 | Schott Ag | Actuator for moving a tool |
| US7328638B2 (en) * | 2005-12-27 | 2008-02-12 | 3M Innovative Properties Company | Cutting tool using interrupted cut fast tool servo |
| DE102011101935B4 (en) * | 2011-05-18 | 2014-10-09 | Wsengineering Gmbh & Co.Kg | Tool holder with axial evasion mechanism and method of manufacturing a tool holder with an evasive mechanism |
| CN103567459B (en) * | 2012-07-20 | 2016-06-08 | 鸿准精密模具（昆山）有限公司 | There is the workpiece of nonvolatile organic acid |
| DE102013104923B3 (en) * | 2013-05-14 | 2014-09-11 | Hochschule Furtwangen | Device for vibration-assisted workpiece machining |
| DE102014005543B3 (en) | 2014-04-16 | 2015-02-19 | Innolite Gmbh | Method and device for ultra-precise machining of a curved and ferrous negative surface of a mold insert, mold insert and an optical element produced therewith |
| TWI579537B (en) * | 2015-12-09 | 2017-04-21 | 財團法人金屬工業研究發展中心 | Method of extracting dynamic vibration frequency |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE88125T1 (en) * | 1990-01-24 | 1993-04-15 | Ciba Geigy Ag | DEVICE FOR MANUFACTURING A CONTACT LENS WITH PARTICULARLY ASPHERIC FRONT AND/OR BACK SURFACE. |
| US5467675A (en) * | 1993-11-15 | 1995-11-21 | North Carolina State University | Apparatus and method for forming a workpiece surface into a non-rotationally symmetric shape |
| GB2314452A (en) * | 1996-06-17 | 1997-12-24 | Rank Taylor Hobson Ltd | Electromechanical actuator |
| DE19952996A1 (en) * | 1999-11-04 | 2001-05-10 | Heidelberger Druckmasch Ag | Engraving device for electronic engraving machine |
| AU2003249653A1 (en) * | 2002-05-29 | 2003-12-19 | Massachusetts Institute Of Technology | Rotary fast tool servo system and methods |
-
2004
- 2004-04-23 DE DE102004020990A patent/DE102004020990B4/en not_active Expired - Fee Related
- 2004-07-28 DE DE202004011815U patent/DE202004011815U1/en not_active Expired - Lifetime
-
2005
- 2005-04-12 TW TW094111430A patent/TW200534949A/en unknown
- 2005-04-13 DE DE502005005644T patent/DE502005005644D1/en active Active
- 2005-04-13 DE DE502005004658T patent/DE502005004658D1/en active Active
- 2005-04-13 AT AT06026120T patent/ATE400402T1/en not_active IP Right Cessation
- 2005-04-13 DE DE502005006144T patent/DE502005006144D1/en active Active
- 2005-04-13 DE DE502005007003T patent/DE502005007003D1/en active Active
- 2005-04-13 AT AT06026134T patent/ATE410261T1/en not_active IP Right Cessation
- 2005-04-13 AT AT05732039T patent/ATE416061T1/en not_active IP Right Cessation
- 2005-04-13 AT AT06026119T patent/ATE427184T1/en not_active IP Right Cessation
- 2005-04-13 CN CN200580012801A patent/CN100592959C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101541472B (en) * | 2007-06-27 | 2011-06-22 | 株式会社爱发科 | Coarse-fine movement device |
| US8049454B2 (en) | 2007-06-27 | 2011-11-01 | Ulvac, Inc. | Rough and fine movement device, and liquid supply device incorporating the same |
| CN102248428A (en) * | 2010-05-21 | 2011-11-23 | 哈恩和特斯基工件指数有限商业两合公司 | Guide device and machine tool with such a guide device |
| CN102152131A (en) * | 2011-02-28 | 2011-08-17 | 西安理工大学 | Series macro-micro driving and guiding device for piezoelectric actuator of ball screw pair |
| CN102152131B (en) * | 2011-02-28 | 2012-06-13 | 西安理工大学 | Series macro-micro driving and guiding device for piezoelectric actuator of ball screw pair |
| CN103547400A (en) * | 2011-04-20 | 2014-01-29 | 费尔有限公司 | Damping roller |
| CN103547400B (en) * | 2011-04-20 | 2016-06-22 | 费尔有限公司 | Cushion idler |
| CN103748446A (en) * | 2011-06-03 | 2014-04-23 | 压电晶体式高级传感器有限公司 | Sensor for measuring pressure and/or force |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE410261T1 (en) | 2008-10-15 |
| CN100592959C (en) | 2010-03-03 |
| DE202004011815U1 (en) | 2005-02-24 |
| DE102004020990A1 (en) | 2005-11-17 |
| ATE400402T1 (en) | 2008-07-15 |
| TW200534949A (en) | 2005-11-01 |
| ATE427184T1 (en) | 2009-04-15 |
| DE502005006144D1 (en) | 2009-01-15 |
| ATE416061T1 (en) | 2008-12-15 |
| DE102004020990B4 (en) | 2008-05-21 |
| DE502005007003D1 (en) | 2009-05-14 |
| DE502005004658D1 (en) | 2008-08-21 |
| DE502005005644D1 (en) | 2008-11-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1946514A (en) | A device and method for forming microstructures | |
| US7823488B2 (en) | Device for producing microstructures | |
| CN1073895C (en) | Appts. for dieless forming plate materials | |
| CN1958227A (en) | Fast tool arrangement, in particular for lathes for machining optical workpieces | |
| CN1721136A (en) | Barrel burnishing tool | |
| CN101028702A (en) | Microfeeding system for precisive grinding | |
| CN100566898C (en) | Floating type oval-shaped supersonic vibration micro-engraving device | |
| CN1098974A (en) | The equipment and the method for processing gear shape | |
| US8563892B2 (en) | Method and apparatus for laser engraving | |
| JP4553967B2 (en) | Cutting apparatus, processing method, and mold processed by the processing method | |
| CN1754694A (en) | Platemaking method and platemaking apparatus | |
| CN1974167A (en) | Scoring device and method and multi braking system | |
| KR20100112165A (en) | Machine tool and working method | |
| CN1675976A (en) | Mounting machine and controller for the mounting machine | |
| CN1822919A (en) | Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces | |
| CN1066083C (en) | Cylinder member holder, machining apparatus having said holder, and machining method using same | |
| CN1220973C (en) | Apparatus and method for lapping magnetic heads | |
| CN1739916A (en) | Double-sided polishing apparatus | |
| CN1898061A (en) | Panel machining method and apparatus | |
| CN101052496A (en) | Cutting tools for polishing treatment, particularly knife tool method and device | |
| CN1991592A (en) | Object stage device | |
| CN1781686A (en) | Supersonic vibration cutting device | |
| CN1337365A (en) | Precision element forming device and forming method | |
| CN1919566A (en) | Scroll saw machining method | |
| CN1217112C (en) | Damping device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100303 Termination date: 20130413 |