CN1781686A - Supersonic vibration cutting device - Google Patents
Supersonic vibration cutting device Download PDFInfo
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- CN1781686A CN1781686A CN 200510128601 CN200510128601A CN1781686A CN 1781686 A CN1781686 A CN 1781686A CN 200510128601 CN200510128601 CN 200510128601 CN 200510128601 A CN200510128601 A CN 200510128601A CN 1781686 A CN1781686 A CN 1781686A
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Abstract
The invention provides an ultrasonic vibration cutting equipment wherein a cutting blade and a spindle can be nearly integrally and firmly fixed together and can be tightly attached to each other in installing the cutting blade on the spindle. The ultrasonic vibration cutting equipment which cuts a work piece by ultrasonic-vibrating the cutting blade 22 in the radial direction, and the spindle 25 is provided in its front end with a tapered part 252 whose diameter decreases as it goes to the end and a fixing member engagement part 254 to be screwed into a fixing member 24. The cutting blade 22 is formed integrally with a base 21, and a tapered hole 212 to be engaged with the tapered part 252 is extended through the center of the base 21. In the ultrasonic vibration cutting equipment, when installing the cutting blade 22 on the spindle 25, the tapered part 252 is first engaged with the tapered hole 212 and then the fixing member 24 is tightened on the fixing member engagement part 254, and thereby the base 21 and the spindle 25 are tightly fixed together.
Description
Technical field
The present invention relates to supersonic vibration cutting device, particularly make cutting tip at the supersonic vibration cutting device that ultrasonic vibration, cutting machined object radially take place.
Background technology
Known from institute, for machined objects such as semiconductor wafer being cut into shaped like chips, have by the semiconductor wafer machining being become the topping machanism of latticed dicing device etc. as the cutting tip of cutting emery wheel.In this topping machanism, suppress the working position temperature and rise and cutting resistance is not increased and reduce smear metal, be the problem that continues research.As the means that solve this problem, just cut in the research and utilization ultrasonic vibration.
As a this example of utilizing the cutting process of ultrasonic vibration, in patent documentation 1, disclose and make cutting tip crooked and the ultrasonic vibration shearing device of ultrasonic vibration takes place at its thickness direction (turning cylinder to).But, with this ultrasonic vibration shearing device, because pass through the power that the cutting drawing lines of semiconductor wafer is stretched in the cutting tip effect of ultrasonic vibration, so, also exist cutting resistance to increase, be easy to generate the problem of smear metal in any case.
As the method that can address this problem, in patent documentation 2, disclose and make cutting tip cut off the ultrasonic vibration shearing device of machined object in the vibration of its radial ultrasonic ripple.With this ultrasonic vibration shearing device, the direction of transfer of the ultrasonic vibration of transmitting in the horizontal direction by the main shaft that cutting tip is installed, be transformed to vertical direction by the vibration direction of transfer transformation component of installing with cutting tip, and make cutting tip in radial vibration.
Like this, by the cutting tip machining machined object of ultrasonic vibration is radially taking place, compare with the common cut-out processing of being undertaken by the cutting tip that ultrasonic vibration does not take place, have following advantage: (1) can reduce cutting resistance, suppress the smear metal generation; (2) easily working position is supplied with cutting water, therefore, the temperature that can suppress processing stand rises, and is difficult to take place thermal deformation; (3) because cutting tip vibrates, dirt is shaken, so non-cohesive dirt on the cutting tip; (4) alleviate the added load of cutting tip, prolong its life-span.
[patent documentation 1] spy opens the 2002-336775 communique;
[patent documentation 2] spy opens the 2000-210928 communique;
[patent documentation 3] spy opens flat 11-162882 communique;
For above-mentioned ultrasonic vibration shearing device, when cutting tip is installed on main shaft, with Do not make the common topping machanism of cutting tip ultrasonic vibration relatively, because because of ultrasonic vibration Cutting tip comes off easily, therefore, must fixedly secure cutting tip on main shaft in addition, Also require the installation site of cutting tip correct. For example, as center and the master of cutting tip The center of axle is incorrect when consistent, and ultrasonic vibration does not take place cutting tip, even perhaps Ultrasonic vibration takes place, and its amplitude also is offset.
In addition, above-mentioned supersonic vibration cutting device consists of the major axes orientation that transmits by main shaft Ultrasonic vibration, be transformed to radially making of cutting tip at vibration direction of transfer change point Cutting tip is in the structure of radial ultrasonic ripple vibration. For this reason, need to be the shape essence of cutting tip The heart is processed into the shape of easy generation ultrasonic vibration. Yet, even carry out so meticulously adding The worker is not when cutting tip, cutting tip base portion closely are connected mutually with main shaft, above-mentioned The direction of vibration change point can not the conversion ultrasonic vibration, thereby, have to make cutting tip The problem of ultrasonic vibration suitably takes place in the footpath direction.
For above-mentioned each parts are closely connected, desirable structure is cutting tip and main shaft structure Become one, still, when the cutting tip loss, also will change expensive main shaft, this very Impracticable. Therefore, must form the structure of cutting tip and main shaft split, in addition, also need Extremely near the all-in-one-piece state cutting tip is installed on main shaft.
Therefore, as the mechanism that cutting tip is installed on main shaft, for example, at patent documentation 3 In the mechanism that the lining blade is installed on main shaft by the flange of bush is disclosed. This installing mechanism structure Become the installing hole of lining blade is formed bellmouth, arrange and this bellmouth in the flange of bush The tapered portion of engaging still arranges the bellmouth that engages with the tapered portion of main shaft on the flange of bush Structure. And, by said structure, have can easy assembling disassembling lining blade effect.
, the mechanism of patent documentation 3 when the lining blade is installed on the flange of bush, makes The bellmouth of lining blade contacts with the tapered portion of the flange of bush and locates, and meanwhile, makes lining The peripheral part of cover flange contacts with the blade section of lining blade and locates. Like this, for two Point positions, requires with very high precision shaping lining blade and the flange of bush, and in the reality, The extremely difficult problem that shapes is arranged.
In addition, the result of present inventor's checking, show and promptly allow to address the above problem, when the mechanism's stationary bushing blade that uses patent document 3 and the flange of bush, because the fastening force that is formed by nut etc. is also by the radially transmission of pyramidal structure to cutting tip, so, carry out fastening if use with the power of the occasion same degree that does not have pyramidal structure, the lining blade and the flange of bush are fixedly secured, and be opposite with the content of patent documentation 3 narrations, can block, cause the dismounting difficulty on the contrary.
Summary of the invention
Therefore, the present invention is a mirror with the problems referred to above, and its objective is provides a kind of novel and improved supersonic vibration cutting device, and it is when being installed on main shaft to cutting tip, cutting tip and main shaft firmly and correctly fixing, and can closely connect mutually with the state that approaches to form one.
In order to solve above-mentioned problem, a kind of supersonic vibration cutting device that provides according to a first aspect of the invention, it has: main shaft; The main spindle box of supporting spindle rotationally; Be installed on the cutting tip of front-end of spindle portion; Be arranged on the main shaft, make the ultrasonic oscillator of main shaft generation ultrasonic vibration.This supersonic vibration cutting device, conversion makes cutting tip cut machined object radially carrying out ultrasonic vibration from the direction of transfer of ultrasonic oscillator via the ultrasonic vibration of main shaft transmission.In this supersonic vibration cutting device, in the leading section setting of main shaft: towards the front of the main shaft tapered portion of undergauge gradually; Form the fixed part holding section that engages with fixed part in front from the close main shaft of tapered portion.In addition, cutting tip constitutes one with the base portion of supporting cutting tip, connects at the center of base portion and forms the bellmouth that engages with the tapered portion of main shaft.In above-mentioned supersonic vibration cutting device, when being installed on cutting tip on the main shaft, with after the tapered portion of main shaft engages, on the fixed part holding section that fixed part is connected in main shaft, base portion and main shaft closely are connected and fixed at the bellmouth that makes base portion.In addition, fixed part, for example, can be with formations such as hold-down nut or set bolts, be threaded with outer screw section or negative thread portion by this hold-down nut or set bolt, base portion be fixed in the leading section of main shaft as the fixed part holding section of main shaft.
According to said structure, not by the flange of bush etc., the base portion that forms one with cutting tip is directly fixed with main shaft, thereby, can be cutting tip to main shaft to approach the state installation of one.In addition, the interaction of the bellmouth by base portion and the tapered portion of main shaft, the power that is fastenedly connected also acts on base portion and main shaft radially, therefore, can fixedly secure base portion at main shaft.Therefore, base portion closely is connected with the main shaft appropriateness, so more can fixedly become one cutting tip and main shaft.In addition, when cutting tip was installed, the bellmouth by making said base portion and the tapered portion engaging of main shaft can be easily and correctly make the center of cutting tip consistent with the center of main shaft.
The effect of invention
According to as above-mentioned the present invention, with the base portion of cutting tip formation one, not by the flange of bush etc., and directly main shaft is fixed.Therefore, can fix cutting tip and main shaft to approach the all-in-one-piece state.
And then the tapered portion of bellmouth and main shaft by base portion can fixedly secure base portion at main shaft.Therefore, form base portion and closely be connected, can fix cutting tip and main shaft with more becoming one with main shaft.
In addition, when cutting tip is installed, owing to make the tapered portion engaging of the bellmouth and the main shaft of said base portion, therefore, can make the center of the center of cutting tip and main shaft correctly consistent easily.
Like this, can make the form of cutting tip, cutting tip is installed on main shaft with the direction of transfer of the suitable ultrasonic vibration of transmitting through main shaft at the supersonic vibration cutting device of footpath direction ultrasonic vibration.
Description of drawings
Fig. 1 represents to relate to the overall perspective view of the dicing device of first embodiment of the present invention;
Fig. 2 is the stereogram that expression relates to the cutting unit of this embodiment;
Fig. 3 is partly cut-away's side view of internal structure that expression relates to the main spindle box of this embodiment;
Fig. 4 is that expression makes the cutting tip that relates to this embodiment key diagram in the principle that ultrasonic vibration radially takes place;
Fig. 5 is the cutaway view of structure that relates to the cutting tip installing mechanism of this embodiment with the STA representation that separates each parts;
Fig. 6 is the cutaway view with the structure of this cutting tip installing mechanism of STA representation that makes up each parts.
The specific embodiment
Below, with reference to accompanying drawing, describe desirable embodiment of the present invention in detail.In addition, in the application's book and accompanying drawing, have the inscape of identical function and structure about essence, additional identical numbering is omitted repeat specification.
At first, based on Fig. 1, the overall structure of the dicing device 10 that constitutes as an example of the supersonic vibration cutting device that relates to first embodiment of the present invention is described.In addition, Fig. 1 represents to relate to the overall perspective view of the dicing device 10 of present embodiment.
As shown in Figure 1, dicing device 10 has: machining is the cutting unit (main axle unit) 20 of machined object 12 such as semiconductor wafer for example; Chuck table 15 as the maintenance means that keep machined object 12; Cutting unit travel mechanism (not having diagram); Chuck table travel mechanism (not having diagram).
In addition, chuck table 15 for example is discoidal of top general planar, has vacuum chuck (not having diagram) etc. above it.This chuck table 15 for example, is placed the machined object 12 that is held in the state of framework 14 by 13 on wafer band, can vacuum holds this machined object 12 and stably maintains.
Cutting unit travel mechanism makes cutting unit 20 move in Y direction.This Y direction is perpendicular to the horizontal direction of cutting direction (X-direction), for example be provided in main shaft in the cutting unit 20 axially.By this Y-axis to move, the blade of cutting tip is aimed at the cutting position (the line of cut) of machined object 12.In addition, this cutting unit travel mechanism also can make cutting unit 20 move in Z-direction (vertical direction), thus, can regulate the penetraction depth of cutting tip to machined object 12, or fall cutting tip to blade detection means described later.
Chuck table travel mechanism adds man-hour in common scribing, and the chuck table 15 of having placed machined object 12 is moved back and forth in cutting direction (X-direction), and the blade that makes cutting tip acts on machined object 12 with the track of straight line.
The dicing device 10 of said structure while make the cutting tip incision machined object 12 of rotation at a high speed that cutting unit 20 and chuck table 15 are relatively moved, thus, can carry out scribing processing to machined object 12.In addition, in dicing device 10, display unit 16 such as monitor are set.Various information such as the image on machined object 12 surfaces of taking when this display unit 16 can show adjustment and machining setup parameter.
Below, based on Fig. 2, the structure of the cutting unit 20 that relates to present embodiment is described.In addition, Fig. 2 is the stereogram that expression relates to the cutting unit 20 of present embodiment.
As shown in Figure 2, cutting unit 20 mainly has: cutting tip 22; Base portion 21 with cutting tip formation one; Hold-down nut 24 as fixed part one example; Main shaft 25; Main spindle box 26; Cutting water is supplied with nozzle 27; Wheel cover 28.
In addition, main shaft 25 for example, is the turning cylinder that is used for transmitting to cutting tip 22 the rotating drive power of motor described later (not having diagram), can make the cutting tip 22 of installation, with the high speed rotation of for example 30000rpm.The major part of this main shaft 25 is covered by main spindle box 26, and leading section exposes from main spindle box 26, at this leading section blade 22 and base portion 21 is installed.
In addition, main spindle box 26 is to cover main shaft 25 and the shell of setting.This main spindle box 26, by being located at inner air bearing, can high speed swivel bearing main shaft 25, about detailed content (with reference to Fig. 3) is described later on.
In addition, cutting water is supplied with nozzle 27, for example, can be arranged at the both sides of cutting tip 22 with installing and removing, supplies with cutting water and cool off near working position.In addition, wheel cover 28 covers the periphery of cutting tips 22 and is provided with, and prevents to cut water and smear metal is dispersed.
The cutting unit 20 of said structure by main shaft 25, makes cutting tip 22 rotation at a high speed, makes the blade incision machined object 12 of above-mentioned cutting tip 22 and relatively moves.Like this, the machined surface of machining machined object 12 for example, and can form extremely shallow grooving (drawing lines) along the line of cut.
Below, based on Fig. 3 and Fig. 4, the internal structure of the main spindle box 26 in the cutting unit 20 that relates to present embodiment is described.In addition, Fig. 3 is partly cut-away's side view of internal structure that expression relates to the main spindle box 26 of present embodiment.For convenience of description, among this Fig. 3, represent main spindle box 26 and contactless power supply device 50 with the vertical section of the central axis that comprises main shaft 25.
As shown in Figure 3, in the inside of the main spindle box 26 of cutting unit 20, for example, be provided with: main shaft 25; The entad air bearing 30 of supporting spindle 25 and thrust air bearing 31 rotationally; Motor 32 with rotor 321 and stator 322; Be used for stator electric supply installation 34 to stator 322 power supplies; Be located at the ultrasonic oscillator 33 of the rearward end side of main shaft 25; Be used for to entad air bearing 30 and thrust air bearing 31 are supplied with the air supply road (not illustrating) of pressure-air; The exhaust line (not illustrating) that discharge is used by the air of entad air bearing 30 and 31 ejections of thrust air bearing.In addition, be provided for contactless power supply device 50 in the rearward end of main spindle box 26 to ultrasonic oscillator 33 power supplies.
The rearward end side of main shaft 25 connects the rotor 321 as the turning cylinder that constitutes motor 32.Constitute when by stator with electric supply installation 34 during to stator 322 power supplies the driving force because the interaction of rotor 321 and stator 322 rotates is rotated at a high speed by this rotating drive axle 25 of advocating.In addition, in the leading section side of main shaft 25, the diameter thrust plate 251 bigger than the diameter of axle of main shaft 25 is set.
Entad air bearing 30 and thrust air bearing 31 are supplied with the road by above-mentioned air and are communicated with the air supply means (and do not illustrate) that is made of high-pressure pump etc.Like this, the pressure-air that provides of air supply means supplies to entad air bearing 30 and thrust air bearing 31.
Entad air bearing 30, for example, from approximate equality be arranged at a plurality of jets (do not have diagram) of the inner peripheral surface of main spindle box 26, to the periphery ejection air of main shaft 25.Like this, entad air bearing 30 is pressed by air, and restriction main shaft 25 moves to radially (radiation direction, promptly, X and Z-direction) perpendicular to axle, can be at the main shaft 25 (that is, can prevent crosstrall) of radial support high speed rotating.
In addition, thrust air bearing 31, from the jet (not having diagram) of the left and right sides that is arranged at thrust plate 251, the ejection air is with clamping thrust plate 251.Like this, thrust air bearing 31 is pressed by air, and restriction main shaft 25 moves to axially (thrust direction, be Y direction), can support the main shaft 25 (that is, can prevent vertical misalignment) of high speed rotating in thrust direction.
Like this, main spindle box 26, by air from air bearing 30 entad and 31 ejections of thrust air bearing, can supporting spindle 25 high speed rotating.In addition, the structure of air bearing is not limited to the example of above-mentioned Fig. 3, can carry out multiple design alteration.Also can not shown in the example of Fig. 3, the structure of one group of thrust air bearing 31 and thrust plate 251 for example only is set in cutting tip 22 sides of main shaft 25.For example, can be provided with one group, many groups perhaps also can be set at above-mentioned position at positions such as the substantial middle portion of main shaft 25 and root sides.
In addition, air from air bearing 30 entad and 31 ejections of thrust air bearing, to main spindle box 26 outside discharges, discharge from the main shaft 25 and the gap between the main spindle box 26 of cutting tip 22 sides by portion of air by above-mentioned exhaust line for major part, as aeroseal performance function.In addition, as mentioned above, the air that circulates in the main spindle box 26 is also controlled medium performance function as the temperature of the temperature of controlling main spindle box 26 and main shaft 25.Thus, the temperature that keeps main shaft 25 can prevent that in set point of temperature main shaft 25 from producing thermal deformation.
Above main shaft 25, main spindle box 26, entad air bearing 30, thrust air bearing 31, motor 32, air are supplied with road, exhaust line and air supply means etc. and are constituted air spindles.
In addition, in the cutting unit 20 that relates to present embodiment, make main shaft 25 and cutting tip 22 carry out the vibration generation means of ultrasonic vibration as being used to, as shown in Figure 3, the contactless power supply device 50 that ultrasonic oscillator 33 is set and powers to this ultrasonic oscillator 33.
Ultrasound waves oscillator 33 is provided in the rearward end side (with cutting tip 22 opposition sides) of main shaft 25, than rotor 321 more by the rearward end side.This ultrasonic oscillator 33 for example, uses the electrostriction oscillator of being made by lead zirconate titanate piezoceramic materials such as (PZT) to constitute.The compressional wave ultrasonic vibration of assigned frequency takes place owing to the electric power of supplying with from contactless power supply device 50 in above-mentioned ultrasonic oscillator 33.Constitute the electrostriction oscillator of this ultrasonic oscillator 33, compare with the ultra-magnetic telescopic oscillator, therefore low price and stable performance, have the advantage that can make main shaft 25 that ultrasonic vibration suitably takes place.
In addition, ultrasonic oscillator 33 is not limited to the example of above-mentioned electrostriction oscillator, as long as it is just passable that ultrasonic vibration can take place, for example, can enough magnetostrictive vibrators (comprising the ultra-magnetic telescopic oscillator) or formation such as quartz crystal.In addition, ultrasonic oscillator 33 can be arranged on any part of main shaft 25, for example, and the last end of main shaft 25, central portion, leading section side etc.
Contactless power supply device 50 is powered to above-mentioned ultrasonic oscillator 33 in the noncontact mode.This contactless power supply device 50 is by secondary side transformer 54 formations that is connected with external power source (do not have diagram), that is connected with rearward end with main shaft 25 as the primary side transformer 52 of supply side transformer, that conduct is subjected to electric side transformer.This primary side transformer 52 and secondary side transformer 54 separate the predetermined distance isolation configuration.This contactless power supply device 50, the electric power that external power source is supplied with, transmit and supply with ultrasonic oscillators 33 by main shaft 25 by the electromagnetic induction noncontact to secondary side transformer 54 from primary side transformer 52.
By the electric power of such supply, ultrasonic vibration takes place in ultrasonic oscillator 33, and makes main shaft 25 ultrasonic vibrations.For example, in order to make ultrasonic oscillator 33 with the 50KHz ultrasonic vibration, contactless power supply device 50 is supplied with the electric power of 50KW～60KW.But the supply capability of contactless power supply device 50 is not limited to above-mentioned example because of the characteristic of ultrasonic oscillator 33 is different.
Like this, in the cutting unit 20 that relates to present embodiment,, use contactless power supply device 50 non-contact powers for the ultrasonic oscillator 33 of the electrostriction vibrator type of being located at main shaft 25.In above-mentioned air spindle mechanism, main shaft 25 is kept by noncontact by main spindle box 26.In said mechanism, owing to, can make power supply not contact main shaft 25 and finish, thereby main shaft 25 can successfully rotate, and can give full play to the advantage of air spindle with parts by contactless power supply device 50 power supplies.From above-mentioned viewpoint, as electric supply installation, use above-mentioned contactless power supply device 50 for desirable, yet, be not limited to above-mentioned example, also can use the contact electric supply installation.In addition, the occasion use magnetostrictive vibrator as ultrasonic oscillator 33 does not need above-mentioned electric supply installation.
Ultrasonic vibrations take place in the ultrasonic oscillator 33 of powering from the contactless power supply device 50 of said structure, and make main shaft 25 ultrasonic vibrations.This ultrasonic vibration is transmitted in axial (Y direction) of main shaft 25, passes the cutting tip 22 to the leading section that is installed on main shaft 25.
And then, adjust the shape of main shaft 25 and base portion 21 etc. and the frequency of configuration and ultrasonic oscillator 33 etc., so that the Y-axis position of the vibration direction of transfer change point when the ultrasonic vibration of so transmitting along axial (Y direction) of main shaft 25 being transformed to radially (the XZ in-plane) of cutting tip 22 is roughly the same with the installation site (the Y-axis position of cutting tip 22) of 22 pairs of main shafts 25 of cutting tip.
By above-mentioned structure,, can be transformed to cutting tip 22 to the direction of transfer of this ultrasonic vibration of being transmitted radially at the vibration direction of transfer change point that roughly is positioned at same position with cutting tip 22 along the transfers ultrasonic vibration of main shaft 25.Like this, make cutting tip 22 that ultrasonic vibration radially take place, just can make the cutting tip 22 of annular vibrate and cut machined objects 12 in hole enlargement undergauge ground repeatedly by this cutting tip 22 with high-frequency.
About so making the principle of cutting tip 22 in radial ultrasonic ripple vibration, disclosed in for example above-mentioned patent documentation 2, be well-known, below based on Fig. 4 simple declaration.
Fig. 4 is illustrated in the cutting unit 25 that relates to present embodiment, with the vibrational waveform W1 of the ultrasonic vibration resonance of being sent by ultrasonic oscillator 33 and the key diagram that direction of transfer is transformed to vibrational waveform W2 radially.Vibrational waveform W1 represents that vibrational waveform W2 represents that direction of transfer is transformed to the instantaneous displacement (vibration amplitude) of ultrasonic vibration radially by the instantaneous displacement (vibration amplitude) of the ultrasonic vibration of resonance generation.
As shown in Figure 4, on the axle of main shaft 25 (on the Y-axis), there be maximum vibration amplitude points A, C, E, G and minimum vibration amplitude points B, D, F, the H of vibrational waveform W1.Usually, at minimum vibration amplitude points B, D, F, H, the elongation radially of main shaft 25 is maximum.Thereby, must increase the interval between main shaft 25 and the main spindle box 26, cause few maximum hole enlargement amount greater than the main shaft 25 among minimum vibration amplitude points B, D, F, the H.But, about other point, because cutting unit 20 adopts air bearing mechanism, so, there is no need occasion as mechanical main shaft mechanism, strengthen carrying out structure near minimum vibration amplitude points B, D, F, the H.
The minimum vibration amplitude points B of vibrational waveform W1 is a vibration direction of transfer change point, is vibrating direction of transfer change point same position or near the position configuration cutting tip 22 it with this.At vibration direction of transfer change point B, the direction of transfer of ultrasonic vibration is for conversion into radially (below, abbreviate " radially " sometimes as) of cutting tip 22 from axially (below, abbreviate " axially " sometimes as) of main shaft 25.Adjust the blade footpath of cutting tip 22 and the frequency of ultrasonic vibration etc., so that so direction of transfer is transformed to the maximum vibration amplitude points α among the vibrational waveform W2 of ultrasonic vibration radially, the blade position that β is positioned at cutting tip 22.
In addition, in order suitably to transmit and the above-mentioned ultrasonic vibration of conversion, one constitutes cutting tip 22 and base portion 21, and then, closely be connected nut 24 and base portion 21 and main shaft 25 leading sections mutually and each one of formation with fixedly securing, detailed content illustrates later on.
As mentioned above, the direction of transfer by ultrasonic vibration that main shaft 25 is transmitted vertically is transformed to radially, and cutting tip 22 is the hole enlargement undergauge repeatedly, and the blade of cutting tip 22 is with the radial vibration shown in the arrow of Fig. 4.
In addition, in order to impel the conversion of vibrating direction of transfer at vibration direction of transfer change point (above-mentioned B point), can dispose the vibration direction of transfer transform component of tubaeform grade, yet, if the position of vibration direction of transfer change point and the position of cutting tip 22 are roughly the same, even do not set this vibration direction of transfer transform component in addition, also can conversion vibration direction of transfer.
More than, based on Fig. 2～Fig. 4,, to making the structure of cutting tip 22, be illustrated especially in the vibration of radial ultrasonic ripple to the structure of the cutting unit 20 of present embodiment.
Below, based on Fig. 5 and Fig. 6, the cutting tip installing mechanism as feature of the present invention is described.Fig. 5 and Fig. 6 are the cutaway views of structure that expression relates to the cutting tip installing mechanism of present embodiment.Wherein, Fig. 5 is the cutaway view that expression makes the state of each isolation of components, and Fig. 6 is the cutaway view of the state of each parts of expression combination.
As shown in Figure 5 and Figure 6, the leading section at main shaft 25 forms tapered portion 252 that engages with the bellmouth 212 of base portion 21 and the outer screw section 254 that is threaded with hold-down nut 24.Form tapered portion 252 to the tip of main shaft 25 undergauge gradually.The tapering of the conical surface of this tapered portion 252 for example is 1/8～1/20.In addition, outer screw section 254 is examples of the fixed part holding section that engages with hold-down nut 24 as one of fixed part example.This outer screw section 254 is provided in from the front of tapered portion 252 near main shaft 25.Above-mentioned outer screw section 254 at its peripheral shape spirality screw thread, is threaded with hold-down nut 24.
In addition, the base portion 21 of cutting tip 22 and this cutting tip 22 of support constitutes one.Like this, constitute the method for cutting tip 22 and base portion 21 as one, for example, can be the cutting tip 22 of independent formation and base portion 21 by the mutual bonding one that forms of bonding agent, perhaps, also can pass through electrolytic plating method, grow up to cutting blade and form cutting tip 22 at the peripheral part of base portion 21.
In addition, at the center of the axle connecting portion 214 of base portion 21, along the axial formation of main shaft 25 bellmouth 212 as the taper through hole.This bellmouth 212 has to main shaft the place ahead (hold-down nut 24 sides) taper of undergauge gradually.The tapering of the conical surface of this bellmouth 212 is identical with the tapering of the conical surface of the tapered portion 252 of above-mentioned main shaft 25, for example is 1/8～1/20.In addition, the axial length of the main shaft 254 of bellmouth 212 (thickness of axle connecting portion 214) is shorter than the axial length of the main shaft 25 of tapered portion 252.
Therefore, above-mentioned bellmouth 212 correctly engages with the tapered portion 252 of main shaft 25.That is, when in the bellmouth 212 that the tapered portion 252 of main shaft 25 is inserted base portion 21, the conical surface of bellmouth 212 (inner peripheral surface) does not have clearance plane mutually with the conical surface (inner peripheral surface) of tapered portion 252 and overlaps, tight connection.
Hold-down nut 24 has the fixing function of leading section that 21 of base portion is connected in main shaft 25.This hold-down nut 24, side face forms the negative thread portion 242 that is threaded with the external thread part 254 of main shaft 25 within it.In addition, the external diameter of hold-down nut 24 is bigger than the aperture of hold-down nut 24 sides of the bellmouth 212 of base portion 21.
In addition, the above-mentioned base portion 21 and the material of hold-down nut 24 for example are aluminium, and the material of main shaft 25 for example is a stainless steel, yet, being not limited to this example, also can form with various materials such as other metals or resin.Because such base portion 21, hold-down nut 24 are different with the material of main shaft 25, differences such as the transfer rate of ultrasonic vibration, however this difference relatively is slight with the influence that is caused by the shape of these parts and size etc., thereby thinking in the reality does not almost influence.
More than, the structure of the cutting tip installing mechanism of present embodiment is illustrated.Below, the method for using this cutting tip installing mechanism, cutting tip 22 is installed on the main shaft 25 is described.
At first, the leading section of main shaft 25 is inserted in the bellmouth 212 of base portion 21, the bellmouth 212 of base portion 21 is engaged with the tapered portion 252 of main shaft 25.Like this, the leading section of main shaft 25 passes base portion 21, and outer screw section 254 protrudes at the opposition side (left side of Fig. 5 and Fig. 6) of base portion 21.
Then, make hold-down nut 24 be threaded hold-down nut 24 with the outer screw section 254 of main shaft 25.Like this, base portion 21 is sandwiched between the tapered portion 252 of hold-down nut 24 and main shaft 25, and the stable earth's axis is connected in the leading section of main shaft 25.At this moment, the bellmouth 212 of base portion 21 closely is connected and fixed with the tapered portion 252 of main shaft 25.That is because utilize the pyramidal structure that constitutes by above-mentioned bellmouth 212 and above-mentioned tapered portion 252, so be connected and fixed the power of nut 24, not only main shaft 25 axially, and in the radially transmission of cutting tip 22.Therefore, by being connected and fixed nut 24, base portion 21 more is firmly secured to the leading section of main shaft 25, base portion 21 closely is connected with main shaft 25.
Like this, the cutting tip installing mechanism with relating to present embodiment does not use other installing components such as flange, and the base portion 21 of integrally formed cutting tip 22 directly is installed on main shaft 25.Thereby, can be cutting tip 22 to be installed on the main shaft 25 near the all-in-one-piece state.
As mentioned above, when cutting tip 22 is installed on main shaft 25, be base portion 21, and this base portion 21 constitute one with cutting tip 22 between the parts between the two.In addition, the base portion 21 that constitutes respectively fixedly secures with main shaft 25 and closely is connected mutually.Thereby, can install cutting tip 21 and main shaft 25 with the state of the situation that approaches to constitute one, so can be sent to cutting tip 22 to the ultrasonic vibration proper transformation that transmits by main shaft 25.
In addition, when cutting tip 22 is installed,, can make the center of cutting tip 22 correctly consistent easily with the center of main shaft 25 by the pyramidal structure of said base portion 21 and main shaft 25.Like this, the installation site of cutting tip 22 is correct, thereby, will ultrasonic vibration take place the time, though can not produce since installation site skew cause cutting tip 22 not vibrate or vibrate, situation that its amplitude excursion is such.
As mentioned above, the cutting tip installing mechanism with relating to present embodiment can be installed on main shaft 25 to cutting tip 22 to be suitable for the form of supersonic vibration cutting device.
In addition, when cutting tip 22 wearing and tearing, can pull down all-in-one-piece cutting tip 22 and base portion 21 is changed from main shaft 25.Like this, just need not change expensive main shaft 25 together, thereby be economical.
More than, with reference to description of drawings suitable embodiment of the present invention, certainly, the present invention is not limited to above-mentioned example.So long as those skilled in the art just can imagine various modifications or modification in the described scope of summary of the invention, also should belong to technical scope of the present invention certainly about these various modifications or modification, this all should be clear and definite.
For example,,, exemplify dicing device 10 and be illustrated, still, the invention is not restricted to above-mentioned example as supersonic vibration cutting device at above-mentioned embodiment.For example, so long as use device by the cutting tip 22 machining machined objects 12 of the high speed rotation of main shaft 25, for example, carry out outside the scribing processing so long as carry out the various topping machanisms of machining can.
In addition, at the cutting unit 20 that relates to above-mentioned embodiment,, be that example describes with the air bearing as the supporting device of main shaft 25, still, the present invention is not limited to above-mentioned example.For example, the supporting device of main shaft 25 also can be the mechanical main shaft with bearing mechanical type supporting spindle 25.The present invention, so long as at the supersonic vibration cutting device that radially makes cutting tip 22 ultrasonic vibrations, any main shaft supporting mechanism can both be suitable for.
In addition, at above-mentioned embodiment, ultrasonic oscillator 33 is set at the rearward end side of main shaft 25, and still, the present invention is not limited to this example.For example, ultrasonic oscillator 33 also can be located at the central portion of main shaft 25 or leading section side etc.
In addition, at above-mentioned embodiment, as fixed part, use hold-down nut 24 that base portion 21 is fixed in the leading section of main shaft 25, still, the present invention is not limited to above-mentioned example, also can use any fixed part.For example, also can use the set bolt that is threaded with the negative thread portion (being equivalent to the fixed part holding section) of the leading section that is formed at main shaft 25,, base portion 21 is fixed in the leading section of main shaft 25 with the head fixed pedestal portion 21 of this set bolt.
In addition, the shape of base portion 21 is not limited to the example of above-mentioned embodiment, as long as can support cutting tip 22, can form arbitrary shape.At this moment, base portion 21 become with vibration direction of transfer change point B (with reference to Fig. 4) be the center, in the ideal that is shaped as of the axial symmetry of main shaft 25.Like this, the direction of transfer of suitably conversion ultrasonic vibration suitably transmits ultrasonic vibration to cutting tip 22.
The possibility of utilizing on the industry
The present invention can be applicable to and make cutting tip vibrate, cut simultaneously at the radial ultrasonic ripple Supersonic vibration cutting device.
Claims (1)
1. supersonic vibration cutting device, it has: main shaft; Can support the main spindle box of above-mentioned main shaft rotationally; Be installed on the cutting tip of the leading section of above-mentioned main shaft; Be arranged on the above-mentioned main shaft, make the ultrasonic oscillator of above-mentioned main shaft generation ultrasonic vibration,
The direction of transfer of the ultrasonic vibration that its conversion is transmitted via above-mentioned main shaft from above-mentioned ultrasonic oscillator makes above-mentioned cutting tip carry out ultrasonic vibration diametrically and cuts machined object,
It is characterized in that, in the leading section setting of above-mentioned main shaft: towards the front of the above-mentioned main shaft tapered portion of undergauge gradually; Form the fixed part holding section that engages with fixed part in front from the close above-mentioned main shaft of above-mentioned tapered portion;
Above-mentioned cutting tip constitutes one with the base portion of supporting above-mentioned cutting tip, connects at the center of said base portion and forms the bellmouth that engages with the above-mentioned tapered portion of above-mentioned main shaft;
When being installed on above-mentioned cutting tip on the above-mentioned main shaft, at the above-mentioned bellmouth that makes said base portion with after the above-mentioned tapered portion of above-mentioned main shaft engages, the said fixing parts are connected in the said fixing parts holding section of above-mentioned main shaft, thus, said base portion and above-mentioned main shaft closely are connected and fixed.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004340923 | 2004-11-25 | ||
| JP2004340923A JP2006156481A (en) | 2004-11-25 | 2004-11-25 | Ultrasonic vibration cutting equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1781686A true CN1781686A (en) | 2006-06-07 |
| CN100496907C CN100496907C (en) | 2009-06-10 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101286011A Active CN100496907C (en) | 2004-11-25 | 2005-11-22 | Supersonic vibration cutting device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2006156481A (en) |
| CN (1) | CN100496907C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101594961B (en) * | 2006-10-17 | 2011-06-15 | 大西一正 | Disklike cutting tool and cutting device |
| CN101318359B (en) * | 2007-06-05 | 2012-02-22 | 株式会社迪思科 | Cutting device |
| CN104476684A (en) * | 2014-12-16 | 2015-04-01 | 马鞍山太时芯光科技有限公司 | LED (light-emitting diode) chip cutting cutter with novel structure and LED chip cutting method |
| CN109940710A (en) * | 2019-04-02 | 2019-06-28 | 南京林业大学 | A kind of vertical diameter vibration thin plate Scissoring device and its application |
| CN112658820A (en) * | 2020-12-25 | 2021-04-16 | 深圳市特力威科技有限公司 | Ultrasonic conduction grinding module |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4917399B2 (en) * | 2006-09-29 | 2012-04-18 | 株式会社ディスコ | Frequency setting method and cutting apparatus for ultrasonic vibration applied to cutting blade |
| TWI399821B (en) * | 2009-11-23 | 2013-06-21 | Powertech Technology Inc | Blade module for cutting semiconductor devices, placing shelf for the module and its using method |
| CN101912979A (en) * | 2010-08-27 | 2010-12-15 | 上海交通大学 | Ultrasonic vibratory turning system for shaft part and turning method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2735412B1 (en) * | 1995-06-19 | 1997-08-22 | Unir Ultra Propre Nutrition In | ULTRASONIC CUTTING DEVICE |
| JP3128508B2 (en) * | 1996-04-12 | 2001-01-29 | 株式会社アルテクス | Ultrasonic vibration cutter |
| JP3469488B2 (en) * | 1999-01-21 | 2003-11-25 | 株式会社アルテクス | Ultrasonic vibration cutting device |
| JP4216565B2 (en) * | 2002-10-28 | 2009-01-28 | 株式会社ディスコ | Cutting equipment |
| JP2004235250A (en) * | 2003-01-28 | 2004-08-19 | Disco Abrasive Syst Ltd | Cutting device |
-
2004
- 2004-11-25 JP JP2004340923A patent/JP2006156481A/en not_active Withdrawn
-
2005
- 2005-11-22 CN CNB2005101286011A patent/CN100496907C/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101594961B (en) * | 2006-10-17 | 2011-06-15 | 大西一正 | Disklike cutting tool and cutting device |
| TWI393619B (en) * | 2006-10-17 | 2013-04-21 | Kazumasa Ohnishi | Disc cutting tools and cutting devices |
| CN101318359B (en) * | 2007-06-05 | 2012-02-22 | 株式会社迪思科 | Cutting device |
| CN104476684A (en) * | 2014-12-16 | 2015-04-01 | 马鞍山太时芯光科技有限公司 | LED (light-emitting diode) chip cutting cutter with novel structure and LED chip cutting method |
| CN109940710A (en) * | 2019-04-02 | 2019-06-28 | 南京林业大学 | A kind of vertical diameter vibration thin plate Scissoring device and its application |
| CN112658820A (en) * | 2020-12-25 | 2021-04-16 | 深圳市特力威科技有限公司 | Ultrasonic conduction grinding module |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100496907C (en) | 2009-06-10 |
| JP2006156481A (en) | 2006-06-15 |
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