JP5296730B2 - Ultrasonic processing equipment - Google Patents

Description

  The present invention relates to an ultrasonic processing apparatus that processes a work material by vibrating a tool horn that is detachably attached to an ultrasonic vibration generating means via a connecting member.

  In the field of semiconductors, it is required to drill hard and brittle materials such as ceramics and silicon, and ultrasonic processing using abrasive grains is used as the means. With ultrasonic machining, vertical vibration is caused in a tool having a needle shape by ultrasonic vibration, and abrasive grains intervening between the tool and the work material repeatedly give vibration waves from the tool to the work material. It is a process of crushing materials. In recent years, processing of a processing material is required to make a large number of holes with a small diameter in a large processing material, and the processing technology is also required to be precise.

  Conventionally, for example, in the ultrasonic processing apparatus disclosed in Patent Document 1, ultrasonic vibration is transmitted from an ultrasonic vibration generating unit to a tool via a first horn and a second horn.

JP-A-6-143099

Here, as shown in FIG. 9, the tool 1 is formed integrally with the second horn 2, and the tool 1 is attached to and detached from the first horn 4 to the second horn 2 via a connecting member 3 on which a male screw is formed. This is done by attaching and detaching.
However, when exchanging the tool 1, as shown in FIG. 10, when the rotational position of the tool 1 is shifted from the original position P0 to the position P1 according to the tightening torque of the second horn 2 with respect to the connecting member 3, It is necessary to adjust the position of the processing portion of the processing material in accordance with the position of the tip of a new tool, and there is a possibility that much time and effort are required each time the tool is replaced. In particular, when the material to be processed is large, the labor and time are greatly increased.

  The present invention has been made to solve such a conventional problem, and by adjusting the rotational position of the connecting member and the first horn or the second horn, the tip of the tool and the processing portion of the processing material are adjusted. It aims at providing the ultrasonic processing apparatus which can reduce the effort accompanying replacement | exchange of a tool by aligning.

In order to achieve the above object, the present invention provides:
Vibration is transmitted from the ultrasonic vibration generating means for generating ultrasonic vibration to a tool horn that is detachably attached to the ultrasonic vibration generating means via a connecting member, and the tool horn vibrates to change the work material. An ultrasonic processing device for processing,
The connecting member is
A substantially cylindrical main body having a first bottom surface facing the ultrasonic vibration generating means and a second bottom surface facing the tool horn and having an external thread formed on the outer periphery;
A fixing nut that is screwed into a male screw on the outer periphery of the main body;
One of the first bottom surface and the second bottom surface is fixed to one of the opposing ultrasonic vibration generating means and the tool horn,
A screwing means for connecting the other of the first bottom surface and the second bottom surface to the other of the ultrasonic vibration generating means and the tool horn facing each other;
In the state where the other of the first bottom surface and the second bottom surface and the other of the ultrasonic vibration generating means and the tool horn facing each other are connected to each other so as to have a desired positional relationship by the screwing means. The ultrasonic vibration generating means and the tool horn are connected by rotating the fixing nut and pressing the end face of the fixing nut against the other of the ultrasonic vibration generating means and the tool horn. An ultrasonic processing apparatus is provided.

Here, there is formed fastening means for fastening and fixing one of the first bottom face and the second bottom face and one of the ultrasonic vibration generating means and the tool horn facing each other. It is preferable.
Moreover, it is preferable that one of the first bottom surface and the second bottom surface is formed integrally with one of the ultrasonic vibration generating means and the tool horn facing each other.

  According to the present invention, by adjusting the rotational position of the connecting member and the first horn or the second horn and aligning the tip of the tool with the processing portion of the processing material, the labor associated with tool replacement is reduced. can do.

It is a front view showing the ultrasonic processing apparatus which concerns on Embodiment 1 of this invention. It is a side view showing the structure of the connection member which connects the 1st horn and 2nd horn which were used in Embodiment 1. It is a side view showing the state which screwed together the screwing means of the connection member shown in FIG. 2, and the 2nd horn. It is a side view showing the state which fastened the nut for fixation of the connecting member shown in FIG. 6 is a side view illustrating a configuration of a connecting member used in an ultrasonic machining apparatus according to Embodiment 2. FIG. 6 is a side view illustrating a configuration of a connecting member used in an ultrasonic machining apparatus according to Embodiment 4. FIG. 10 is a side view illustrating a configuration of a connecting member used in an ultrasonic machining apparatus according to Embodiment 5. FIG. FIG. 10 is a side view illustrating a configuration of a connecting member used in an ultrasonic machining apparatus according to a modification example of Embodiment 5. It is a side view showing the structure of the connection member used for the conventional ultrasonic processing apparatus. It is a bottom view showing the position of the tool connected with the connecting member shown in FIG.

  Hereinafter, the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

FIG. 1 shows a configuration of an ultrasonic processing apparatus 10 according to Embodiment 1 of the present invention. The ultrasonic processing apparatus 10 has a column 12 on a pillar arranged in the vertical direction, and a moving means 14 is provided on the surface of the column 12 in the vertical direction.
The moving means 14 has a plate-shaped fixing base 16 extending in the vertical direction and fixed to the column 12. On the surface of the fixed base 16, a rotary shaft 18 having a columnar shape that is rotatably installed and a movable base 20 having a plate shape through which the rotary shaft 18 passes are installed. Further, a servo motor 22 that drives the rotation is connected to the rotary shaft 18. A male screw is formed on the outer periphery of the rotary shaft 18 along the axis, and a female screw corresponding to the male screw is also formed on the moving base 20. The rotating base 18 is rotated by the drive of the servo motor 22, thereby the moving base 20. Can move up and down.

An ultrasonic processing mechanism 24 is fixed on the surface of the movable table 20. The ultrasonic processing mechanism 24 includes a vibration generating unit 26 that generates ultrasonic vibrations, a first horn 28 and a second horn 30 that transmit the generated vibrations, and a tool 32 that processes a work material by the transmitted vibrations. Have.
The vibration generating unit 26 transmits ultrasonic waves by an ultrasonic transducer (not shown) provided therein to generate vertical vibrations. A first horn 28 having a substantially conical shape whose diameter is reduced downward is connected to the lower surface of the vibration generating unit 26, and a second horn 30 having a cylindrical shape is detachably connected to the lower surface of the first horn 28. Has been. On the lower surface of the second horn 30, a plurality of needle-shaped tools 32 are fixed and arranged downward. In this way, the vibration generated from the vibration generator 26 is transmitted to the tool 32 via the first horn 28 and the second horn 30 by connecting the members.

  Below the tool 32, a material fixing means 34 is fixed to the column 12 and installed. The material fixing means 34 is fixed to the material fixing base 36 with a predetermined gap above the material fixing base 36 via a support member (not shown) and a rectangular parallelepiped material fixing base 36 fixed to the column 12. An alignment jig 38 having a plate shape is provided. The alignment jig 38 is formed so that a hole penetrating the plate coincides with the arrangement and sectional shape of each tool 32. In addition, the processing material 40 is inserted into a predetermined gap between the material fixing base 36 and the alignment jig 38 so that the processing portion of the processing material 40 and the position of the hole of the alignment jig 38 coincide with each other. It is fixed to the fixed base 36. Thereby, the position of the processing material 40 and the tip of the tool 32 can be aligned by passing the tool 32 through the hole of the alignment jig 38.

FIG. 2 shows a configuration of a connecting member 42 that connects the first horn 28 and the second horn 30. The connecting member 42 includes a substantially cylindrical main body 44 having a male screw formed on the outer peripheral portion, a male screw portion 48 formed so as to protrude perpendicularly to the upper surface (first bottom surface) 46 of the main body 44, and the lower surface ( (Second bottom surface) 50 has a male threaded portion 52 projecting in the vertical direction, and a fixing nut 54 screwed into a male thread on the outer peripheral portion of the main body 44. Female threaded portions 56 and 58 are formed on the lower surface of the first horn 28 and the upper surface of the second horn 30, respectively, and are screwed into the male threaded portions 48 and 52. Further, the fixing nut 54 is formed with an engaging groove 60, and a rotating tool (not shown) that rotates the fixing nut 54 is engaged with the engaging groove 60 to rotate the fixing nut 54.
In addition, the rotation tool which rotates the nut 54 for fixation should just be able to rotate the nut 54 for fixation, and a well-known tool can be utilized. Also, the engagement groove 60 can be formed in various shapes according to the rotating tool.
Here, the coupling member 42 is used together with the first horn 28, the second horn 30, and the tool 32 with respect to the ultrasonic vibration used in the processing apparatus 10 in order to efficiently transmit the ultrasonic vibration to the tool 32. It is desirable to be configured to form a resonator.
For this reason, the length A in the axial direction of the main body 44 is set to a length equivalent to a half wavelength of the ultrasonic vibration generated by the vibration generator 26 or a length equivalent to an integral multiple of the half wavelength, and is fixed. The length B of the nut 54 in the axial direction is also preferably set to a length corresponding to a half wavelength of the ultrasonic vibration generated by the vibration generator 26 or a length corresponding to an integral multiple of the half wavelength.

  In addition, the vibration generation part 26 and the 1st horn 28 which were mentioned above comprise the ultrasonic vibration generation means in this invention, and the 2nd horn 30 and the tool 32 comprise the tool horn in this invention. Further, the internal thread portion 56 formed on the lower surface of the first horn 28 and the external thread portion 48 formed on the upper surface 46 of the connecting member constitute fastening means in the present invention, and the internal thread portion formed on the upper surface of the second horn 30. 58 and the external thread portion 52 formed on the lower surface 50 of the connecting member 42 constitute a screwing means in the present invention.

Next, the operation of the ultrasonic processing apparatus 10 shown in FIG. 1 will be described.
First, the processing material 40 is fixed to the material fixing base 36. When the processing part of the processing material 40 is determined by the operator, the alignment jig 38 is placed on the material fixing base 36 with the processing part of the processing material 40 and the hole of the positioning jig 38 aligned.
Next, the first horn 28 and the second horn 30 of the ultrasonic processing mechanism 24 fixed to the moving table 20 are connected via a connecting member 42. As shown in FIG. 2, the upper surface 46 of the connecting member 42 is pressed against the lower surface of the first horn 28 by screwing the male screw portion 48 of the connecting member 42 into the female screw portion 56 formed on the lower surface of the first horn 28. The connecting member 42 is fastened and fixed to the first horn 28. Subsequently, as shown in FIG. 3, the second horn 30 is rotated by rotating the second horn 30 with the female screw portion 58 formed on the upper surface of the second horn 30 and the male screw portion 52 of the connecting member 42 aligned with each other. The female screw portion 58 of the two horn 30 is screwed into the male screw portion 52 of the connecting member 42 so that the lower surface 50 of the connecting member 42 and the upper surface of the second horn 30 are not in contact with each other. The rotation of the second horn 30 is stopped when 30 reaches the desired positional relationship. Next, a rotating tool (not shown) is engaged with the engaging groove 60, and as shown in FIG. 4, the fixing nut 54 is rotated and moved downward, and the lower end surface of the fixing nut 54 is moved to the second horn 30. By pressing against the upper surface, the connecting member 42 and the second horn 30 are connected, whereby the connection between the first horn 28 and the second horn 30 is completed.
It should be noted that the desired positional relationship of the second horn 30 with respect to the first horn 28 is that the arrangement and cross-sectional shape of each tool 32 installed on the second horn 30 is processed material 40 through the hole of the alignment jig 38. The positional relationship is determined in advance by the operator so that the position coincides with the processed part.

Next, the ultrasonic machining mechanism 24 is moved downward by the moving table 20, so that the tip of the tool 32 reaches the machining site of the machining material 40 through the hole of the alignment jig 38 as shown in FIG. 1.
In this state, abrasive grains are supplied from the abrasive supply means (not shown) between the work material 40 and the tool 32, and from the ultrasonic vibrator of the vibration generator 26 via the first horn 28 and the second horn 30. Thus, vibration is transmitted to the tool 32. When the vibration wave from the tool 32 is repeatedly given to the processing portion of the processing material 40 through the abrasive grains, the processing material 40 is crushed and processed.
When the processing of the processing material 40 is completed, the ultrasonic processing mechanism 24 is moved upward by the moving means 14. Subsequently, the processing material 40 is removed from the material fixing table 36, and a new processing material 40 is fixed to the material fixing table 36.

Here, when the tool 32 is worn, it is necessary to remove the second horn 30 from the first horn 28 and replace it with a new second horn 30. At this time, the connecting member 42 can adjust the rotational position of the first horn 28 and the new second horn 30 to a desired positional relationship, so that the tip of the tool 32 can be simply moved without moving the work material 40. And the processing portion of the processing material 40 can be aligned.
In this manner, the processing of the processing material 40 by the tool 32 is repeated in the same manner, and the processing is completed when a predetermined number of processing materials 40 are processed.

  If the tool 46 and the processing part of the processing material 58 can be aligned, the alignment jig 56 need not be used.

  According to the ultrasonic processing apparatus 10 of the present embodiment, when the second horn 30 is removed from the first horn 28 and replaced with a new second horn 30, the first horn 28 and the new second horn 30 are replaced by the connecting member 42. Since the rotation position with respect to the horn 30 can be adjusted to a desired positional relationship, the tip of the tool 32 and the processing portion of the processing material 40 can be easily aligned without moving the processing material 40.

Embodiment 2
In the first embodiment, the second horn 30 is coupled to the coupling member 42 by screwing between the male threaded portion 52 of the lower surface 50 of the coupling member 42 and the female threaded portion 58 formed on the upper surface of the second horn 30. This is not a limitation.
For example, as shown in FIG. 5, the second horn 30 is moved to the first horn 30 by screwing between a female screw portion 62 formed on the lower surface 50 of the connecting member 42 and a male screw portion 64 formed on the upper surface of the second horn 30. The connecting member 42 and the second horn are adjusted by adjusting the horn 28 so as to have a desired positional relationship, rotating the fixing nut 54 and pressing the lower end surface of the fixing nut 54 against the upper surface of the second horn 30. 30 may be connected.
In the present embodiment, the male screw portion 64 formed on the upper surface of the second horn 30 and the female screw portion 62 formed on the lower surface 50 of the connecting member 42 constitute the screwing means in the present invention.

Embodiment 3
In the first embodiment, the male screw portion 48 of the connecting member 42 is screwed into the female screw portion 56 formed on the lower surface of the first horn 28, and the connecting member 42 is fastened and fixed to the first horn 28. It is not limited to.
For example, the upper surface of the connecting member is pressed against the lower surface of the first horn by screwing the male screw portion protruding from the lower surface of the first horn and the female screw portion formed on the upper surface of the connecting member, so that the connecting member is It may be fastened and fixed to the horn.
In the present embodiment, the male screw portion formed on the lower surface of the first horn and the female screw portion formed on the upper surface of the connecting member constitute fastening means in the present invention.

Embodiment 4
In the first embodiment, the male screw portion 48 of the connecting member 42 is screwed into the female screw portion 56 formed on the lower surface of the first horn 28, and the connecting member 42 is fastened and fixed to the first horn 28. After the female screw portion 58 formed on the upper surface of the connecting member 42 is screwed into the male screw portion 52 of the connecting member 42, the lower end surface of the fixing nut 54 is pressed against the upper surface of the second horn 30 to thereby connect the connecting member 42 and the second horn. Although 30 is connected, it is not restricted to this.
For example, as shown in FIG. 6, the lower surface of the connecting member 42 is pressed against the upper surface of the second horn 30 by screwing the male screw portion 68 of the connecting member 42 into the female screw portion 66 formed on the upper surface of the second horn 30. Then, the connecting member 42 is fastened and fixed to the second horn 30, the female screw portion 70 formed on the lower surface of the first horn 28 is screwed to the male screw portion 72 formed on the upper surface of the connecting member, and the fixing nut 54 is fixed. The connecting member 42 and the second horn 30 may be connected by rotating and pressing the upper end surface of the fixing nut 54 against the lower surface of the first horn 28.
In the present embodiment, the internal thread portion 66 formed on the upper surface of the second horn 30 and the external thread portion 68 formed on the lower surface 50 of the connecting member 42 constitute the fastening means in the present invention, and the first horn 28 The female screw portion 70 formed on the lower surface and the male screw portion 72 formed on the upper surface 46 of the connecting member constitute the screwing means in the present invention.

Embodiment 5
In the first embodiment, the first horn 28 is connected to the connecting member 42 by screwing the female screw portion formed on the lower surface of the first horn 28 and the male screw portion formed on the upper surface of the connecting member 42. As shown in FIG. 7, the upper surface 46 of the connecting member 42 may be formed integrally with the first horn 28.
Similarly, in the second embodiment, the second horn 30 is coupled to the coupling member 42 by screwing between the female thread portion formed on the upper surface of the second horn 30 and the male thread portion formed on the lower surface of the coupling member 42. As shown in FIG. 8, the lower surface 50 of the connecting member 42 may be formed integrally with the second horn 30.

DESCRIPTION OF SYMBOLS 10 Ultrasonic processing apparatus 12 Column 14 Moving means 16 Fixing base 18 Rotating shaft 20 Moving base 22 Servo motor 24 Ultrasonic processing mechanism 26 Vibration generating part 28 First horn 30 Second horn 32 Tool 34 Material fixing means 36 Material fixing base 38 Positioning jig 40 Work material 42 Connecting member 44 Main body 46 Upper surface 48, 52, 64, 68, 72 Male thread 50 Lower surface 54 Fixing nut 56, 58, 62, 66, 70 Female thread 60 Engaging groove

Claims (3)

Vibration is transmitted from the ultrasonic vibration generating means for generating ultrasonic vibration to a tool horn that is detachably attached to the ultrasonic vibration generating means via a connecting member, and the tool horn vibrates to change the work material. An ultrasonic processing device for processing,
The connecting member is
A substantially cylindrical main body having a first bottom surface facing the ultrasonic vibration generating means and a second bottom surface facing the tool horn and having an external thread formed on the outer periphery;
A fixing nut that is screwed into a male screw on the outer periphery of the main body;
One of the first bottom surface and the second bottom surface is fixed to one of the opposing ultrasonic vibration generating means and the tool horn,
A screwing means for connecting the other of the first bottom surface and the second bottom surface to the other of the ultrasonic vibration generating means and the tool horn facing each other;
In the state where the other of the first bottom surface and the second bottom surface and the other of the ultrasonic vibration generating means and the tool horn facing each other are connected to each other so as to have a desired positional relationship by the screwing means. The ultrasonic vibration generating means and the tool horn are connected by rotating the fixing nut and pressing the end face of the fixing nut against the other of the ultrasonic vibration generating means and the tool horn. Ultrasonic processing equipment.   One of the first bottom surface and the second bottom surface, and the ultrasonic vibration generating means opposed to the first bottom surface and one of the tool horn are fastened together to fasten and fix the fastening means. The ultrasonic processing apparatus according to claim 1.   2. The super of claim 1, wherein one of the first bottom surface and the second bottom surface is integrally formed with one of the ultrasonic vibration generating means and the tool horn facing each other. Sonic processing equipment.

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