DE502005005644D1 - Device for producing microstructures - Google Patents
Device for producing microstructuresInfo
- Publication number
- DE502005005644D1 DE502005005644D1 DE502005005644T DE502005005644T DE502005005644D1 DE 502005005644 D1 DE502005005644 D1 DE 502005005644D1 DE 502005005644 T DE502005005644 T DE 502005005644T DE 502005005644 T DE502005005644 T DE 502005005644T DE 502005005644 D1 DE502005005644 D1 DE 502005005644D1
- Authority
- DE
- Germany
- Prior art keywords
- drive
- tool
- workpiece
- producing microstructures
- fast
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/32—Feeding working-spindles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Turning (AREA)
- Machine Tool Units (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Optical Elements Other Than Lenses (AREA)
- Saccharide Compounds (AREA)
- Disintegrating Or Milling (AREA)
Abstract
The device for producing microstructures has a rotating driven spindle (12) and a holder for clamping a workpiece (16). A fast drive is coupled to a tool (32) over a guidance arrangement, which permits adjustment of the tool in an axial direction of the fast drive against a return force. The drive has high rigidity in the plane perpendicular to the drive direction. An independent claim is made for an actuator (30) for moving the tool of a turning machine (10) to produce a micro-structured surface in a workpiece, especially using a piezoelectric drive.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004020990A DE102004020990B4 (en) | 2004-04-23 | 2004-04-23 | Apparatus and method for producing microstructures |
DE202004011815U DE202004011815U1 (en) | 2004-04-23 | 2004-07-28 | Device for producing microstructures |
Publications (1)
Publication Number | Publication Date |
---|---|
DE502005005644D1 true DE502005005644D1 (en) | 2008-11-20 |
Family
ID=34223637
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102004020990A Expired - Fee Related DE102004020990B4 (en) | 2004-04-23 | 2004-04-23 | Apparatus and method for producing microstructures |
DE202004011815U Expired - Lifetime DE202004011815U1 (en) | 2004-04-23 | 2004-07-28 | Device for producing microstructures |
DE502005005644T Active DE502005005644D1 (en) | 2004-04-23 | 2005-04-13 | Device for producing microstructures |
DE502005004658T Active DE502005004658D1 (en) | 2004-04-23 | 2005-04-13 | Apparatus and method for producing microstructures |
DE502005007003T Active DE502005007003D1 (en) | 2004-04-23 | 2005-04-13 | Apparatus and method for producing microstructures |
DE502005006144T Active DE502005006144D1 (en) | 2004-04-23 | 2005-04-13 | DEVICE FOR GENERATING MICROSTRUCTURES |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102004020990A Expired - Fee Related DE102004020990B4 (en) | 2004-04-23 | 2004-04-23 | Apparatus and method for producing microstructures |
DE202004011815U Expired - Lifetime DE202004011815U1 (en) | 2004-04-23 | 2004-07-28 | Device for producing microstructures |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE502005004658T Active DE502005004658D1 (en) | 2004-04-23 | 2005-04-13 | Apparatus and method for producing microstructures |
DE502005007003T Active DE502005007003D1 (en) | 2004-04-23 | 2005-04-13 | Apparatus and method for producing microstructures |
DE502005006144T Active DE502005006144D1 (en) | 2004-04-23 | 2005-04-13 | DEVICE FOR GENERATING MICROSTRUCTURES |
Country Status (4)
Country | Link |
---|---|
CN (1) | CN100592959C (en) |
AT (4) | ATE427184T1 (en) |
DE (6) | DE102004020990B4 (en) |
TW (1) | TW200534949A (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005044087A1 (en) * | 2005-09-08 | 2007-03-15 | Schott Ag | Actuator for moving a tool |
US7328638B2 (en) * | 2005-12-27 | 2008-02-12 | 3M Innovative Properties Company | Cutting tool using interrupted cut fast tool servo |
JP5031459B2 (en) | 2007-06-27 | 2012-09-19 | 株式会社アルバック | Coarse / fine movement apparatus and liquid supply apparatus including the same |
DE102010029242A1 (en) * | 2010-05-21 | 2011-11-24 | Index-Werke Gmbh & Co. Kg Hahn & Tessky | Guide device and machine tool with such a guide device |
CN102152131B (en) * | 2011-02-28 | 2012-06-13 | 西安理工大学 | Series macro-micro driving and guiding device for piezoelectric actuator of ball screw pair |
AT511468B1 (en) * | 2011-04-20 | 2012-12-15 | Fill Gmbh | DAMPING ROLL |
DE102011101935B4 (en) * | 2011-05-18 | 2014-10-09 | Wsengineering Gmbh & Co.Kg | Tool holder with axial evasion mechanism and method of manufacturing a tool holder with an evasive mechanism |
AT511330B1 (en) * | 2011-06-03 | 2012-11-15 | Piezocryst Advanced Sensorics | SENSOR FOR MEASUREMENT OF PRESSURE AND / OR FORCE |
CN103567459B (en) * | 2012-07-20 | 2016-06-08 | 鸿准精密模具(昆山)有限公司 | There is the workpiece of nonvolatile organic acid |
DE102013104923B3 (en) * | 2013-05-14 | 2014-09-11 | Hochschule Furtwangen | Device for vibration-assisted workpiece machining |
DE102014005543B3 (en) * | 2014-04-16 | 2015-02-19 | Innolite Gmbh | Method and device for ultra-precise machining of a curved and ferrous negative surface of a mold insert, mold insert and an optical element produced therewith |
TWI579537B (en) * | 2015-12-09 | 2017-04-21 | 財團法人金屬工業研究發展中心 | Method of extracting dynamic vibration frequency |
JP7343384B2 (en) * | 2019-12-20 | 2023-09-12 | デクセリアルズ株式会社 | Roll mold manufacturing method, roll mold manufacturing equipment and program |
JP7413001B2 (en) * | 2019-12-20 | 2024-01-15 | デクセリアルズ株式会社 | Roll mold manufacturing method, roll mold manufacturing equipment and program |
CN116576095B (en) * | 2023-05-12 | 2024-06-07 | 烟台东德氢能技术有限公司 | Centering adjustment method for diaphragm compressor and motor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0439425B1 (en) * | 1990-01-24 | 1993-04-14 | Ciba-Geigy Ag | Device for machining an ophthalmic lens with, in particular, aspheric surfaces |
US5467675A (en) * | 1993-11-15 | 1995-11-21 | North Carolina State University | Apparatus and method for forming a workpiece surface into a non-rotationally symmetric shape |
GB2314452A (en) * | 1996-06-17 | 1997-12-24 | Rank Taylor Hobson Ltd | Electromechanical actuator |
DE19952996A1 (en) * | 1999-11-04 | 2001-05-10 | Heidelberger Druckmasch Ag | Engraving device for electronic engraving machine |
WO2003101666A2 (en) * | 2002-05-29 | 2003-12-11 | Massachusetts Institute Of Technology | Rotary fast tool servo system and methods |
-
2004
- 2004-04-23 DE DE102004020990A patent/DE102004020990B4/en not_active Expired - Fee Related
- 2004-07-28 DE DE202004011815U patent/DE202004011815U1/en not_active Expired - Lifetime
-
2005
- 2005-04-12 TW TW094111430A patent/TW200534949A/en unknown
- 2005-04-13 CN CN200580012801A patent/CN100592959C/en not_active Expired - Fee Related
- 2005-04-13 DE DE502005005644T patent/DE502005005644D1/en active Active
- 2005-04-13 AT AT06026119T patent/ATE427184T1/en not_active IP Right Cessation
- 2005-04-13 AT AT06026120T patent/ATE400402T1/en not_active IP Right Cessation
- 2005-04-13 AT AT06026134T patent/ATE410261T1/en not_active IP Right Cessation
- 2005-04-13 AT AT05732039T patent/ATE416061T1/en not_active IP Right Cessation
- 2005-04-13 DE DE502005004658T patent/DE502005004658D1/en active Active
- 2005-04-13 DE DE502005007003T patent/DE502005007003D1/en active Active
- 2005-04-13 DE DE502005006144T patent/DE502005006144D1/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE502005004658D1 (en) | 2008-08-21 |
DE502005007003D1 (en) | 2009-05-14 |
ATE427184T1 (en) | 2009-04-15 |
ATE400402T1 (en) | 2008-07-15 |
DE102004020990A1 (en) | 2005-11-17 |
CN100592959C (en) | 2010-03-03 |
DE502005006144D1 (en) | 2009-01-15 |
ATE416061T1 (en) | 2008-12-15 |
DE202004011815U1 (en) | 2005-02-24 |
DE102004020990B4 (en) | 2008-05-21 |
CN1946514A (en) | 2007-04-11 |
TW200534949A (en) | 2005-11-01 |
ATE410261T1 (en) | 2008-10-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |