CN1940549A - Oxygen concentration determination apparatus - Google Patents
Oxygen concentration determination apparatus Download PDFInfo
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- CN1940549A CN1940549A CNA2006101595626A CN200610159562A CN1940549A CN 1940549 A CN1940549 A CN 1940549A CN A2006101595626 A CNA2006101595626 A CN A2006101595626A CN 200610159562 A CN200610159562 A CN 200610159562A CN 1940549 A CN1940549 A CN 1940549A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/409—Oxygen concentration cells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/4065—Circuit arrangements specially adapted therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/4162—Systems investigating the composition of gases, by the influence exerted on ionic conductivity in a liquid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/417—Systems using cells, i.e. more than one cell and probes with solid electrolytes
- G01N27/4175—Calibrating or checking the analyser
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/417—Systems using cells, i.e. more than one cell and probes with solid electrolytes
- G01N27/419—Measuring voltages or currents with a combination of oxygen pumping cells and oxygen concentration cells
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- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
An oxygen concentration measuring apparatus capable of removing substances which degenerate an oxygen sensor in gases to be measured before the gases to be measured reach the oxygen sensor and enabling the oxygen sensor to measure the concentration of oxygen without the substances which degenerate the oxygen sensor. The oxygen concentration measuring apparatus comprises a suction pump 4 for sucking the gases to be measured from a suction opening 7; an oxygen sensor 3 for measuring the concentration of oxygen; and a removal unit 2, located at the upstream of the oxygen sensor 3, for removing substances which degenerate the oxygen sensor from the gases to be measured which are fed in from the suction pump 4, and feeding the gases to be measured to the oxygen sensor 3.
Description
Technical field
The present invention relates to be used for monitor and control the oxygen concentration determination apparatus of the oxygen concentration of soft soldering apparatus and semiconductor-fabricating device etc.
Background technology
In soft soldering apparatus etc., sometimes because the oxidation of the soft solder that oxygen causes, the wellability of soft solder reduces, thereby the fault of solder takes place.Therefore,, use oxygen concentration determination apparatus usually, so that the monitoring of the oxygen concentration in the solder atmosphere is controlled in the numerical value (for example 100ppm) of the regulation that soft solder is not had influence in order to prevent the fault of above-mentioned solder.
In addition, in semiconductor-fabricating device etc., the processing of the silicon chip in the semi-conductive manufacture process is many to be carried out under the state of anaerobic (for example CVD, burn till, annealing etc.).But if in the processing of silicon chip heating process is arranged, then the silicon of silicon chip surface becomes and easily combines with oxygen, and the result becomes silicon dioxide (SiO
2).This silicon dioxide is insulativity, becomes the main cause that produces substandard product concerning semiconductor is made.Thus, the oxygen concentration in the atmosphere gas in the silicon chip treatment process is bigger to semi-conductive manufacturing influence, therefore, uses oxygen concentration determination apparatus, so that its monitoring is controlled in the oxygen concentration numerical value that semi-conductive manufacturing is not exerted an influence.
In above-mentioned oxygen concentration determination apparatus, has the lambda sensor of measuring oxygen concentration.Lambda sensor normally is provided with platinum electrode respectively on zirconia etc. at high temperature has the two sides of solid electrolyte of regulation shape of oxygen-ion conductive, the certain reference gas of oxygen concentration (being generally atmosphere) is contacted with the platinum electrode of a side wherein, the determination object gas that will measure oxygen concentration is contacted with the platinum electrode of opposite side, by the two interelectrode electromotive force of mensuration, and utilize this spy's of energy (Nernst) theoretical formula to come the oxygen concentration in the mensuration gas is measured according to the difference generation of oxygen concentration.
Under the situation of this lambda sensor, if platinum electrode with measure gas in the impurity that contained contact, then this impurity is attached on the platinum electrode, the moving of oxygen molecule, be that electronics moves smoothly and carries out, the phenomenon of operating lag can take place at short notice, finally can't move by electronics, lose the function of lambda sensor.Therefore, as the countermeasure that prevents the platinum electrode deterioration, various schemes have been proposed all the time.
For example; in patent documentation 1; following technology is disclosed: preventing that silicon poisons with in the lambda sensor, possessing coated electrode and contain the protective seam of the composition that is made of periodic table of elements IIa family element in the side facing to exhaust, thereby make Si on this protective seam adsorption reaction take place.In addition, in patent documentation 2, disclose and filled deterioration composition absorbing agent (for example silica wool) at the upstream side of the electrode part of lambda sensor inside and protect lambda sensor.
Patent documentation 1: the spy opens flat 2-222830 communique
Patent documentation 2: the spy opens the 2002-22698 communique
Summary of the invention
But; though in the lambda sensor of patent documentation 1 to the protective seam of measuring electrode by spraying plating, particularly form by plasma spray coating; but on the interior perimembranous of the depths, the inside of elongated tube element, form when measuring electrode etc. under the situation, exist the very problem of difficulty of spraying plating.In addition, in the lambda sensor of patent documentation 2, because the infiltration rate of deterioration composition absorbing agents such as silica wool is slower, so need a large amount of absorbing agents, thereby exist the time lengthening that determination object gas arrives lambda sensor, as the problem of the operating lag of lambda sensor.
The object of the present invention is to provide a kind of oxygen concentration determination apparatus, it removed the material that makes oxygen sensor deterioration in the determination object gas before determination object gas arrives lambda sensor, thereby can not measure oxygen concentration under lambda sensor does not contain the state of the material that makes its deterioration.
The oxygen concentration determination apparatus of the present application is characterised in that, the material that makes the platinum electrode deterioration that is contained in the upstream side of lambda sensor is provided with determination object gas is removed removes the unit.The above-mentioned unit of removing is made of ceramic pipe, portion's catalyst filling within it, and well heater is installed on outer peripheral face is removed the unit with heating.
Above-mentioned catalyzer is the platinum and the granular silver of cotton shape, the platinum of cotton shape is filled in the central portion of above-mentioned ceramic pipe, granular silver is filled in the both sides of the platinum of above-mentioned cotton shape respectively, by the heating of removing the unit middle body of the ceramic pipe inside of removing the unit is reached more than 750 ℃ simultaneously, and temperature controlled, so that produce from the Temperature Distribution below 500 ℃ of this part to two side directions.
In addition, thereby distribute and remove the heating-up time of removing in the unit that the unit arrives till the state that can turn round and control produce said temperature in removing the unit, so that its temperature that is shorter than above-mentioned lambda sensor arrives the heating-up time till the temperature that lambda sensor can measure.
In addition, also can possess the suction pump that attracts determination object gas, thereby after the above-mentioned stipulated time after removing the running of unit and lambda sensor, attract determination object gas and be fed through above-mentioned removing in the unit, the electromagnetic switch valve that perhaps also can in the stream of determination object gas, possess the switch of carrying out this stream, thereby after the above-mentioned stipulated time after removing the running of unit and lambda sensor, open above-mentioned electromagnetic switch valve, the said determination object gas is fed through above-mentioned removing in the unit.
According to oxygen concentration determination apparatus of the present invention, because the material that makes oxygen sensor deterioration that is contained in the determination object gas is removed in the unit of removing of upstream side that can be by being arranged on lambda sensor, therefore can will the material of oxygen sensor deterioration be attracted in the lambda sensor, thereby needn't implement to prevent the countermeasure of deterioration lambda sensor itself.Consequently, the mensuration sensitivity of lambda sensor, response etc. significantly improve, and the life-span of lambda sensor also can prolong.
In addition, owing in removing the unit, produce Temperature Distribution by the heating of removing the unit, thus as chlorine of representative substances that makes oxygen sensor deterioration and organosilicon etc. respectively with the temperature of reaction of removing the catalyzer in the unit under react, even therefore the different material of temperature of reaction also can be removed reliably.
And, owing to can after the stipulated time after removing the running of unit and lambda sensor, determination object gas be fed through remove in the unit, therefore the material of oxygen sensor deterioration is removed reliably from be fed through the determination object gas of removing in the unit.
Description of drawings
Fig. 1 is the block diagram of an embodiment of expression oxygen concentration determination apparatus of the present invention.
Fig. 2 is an axial sectional view of removing the unit.
Fig. 3 is the figure that expression ceramic pipe temperature inside distributes.
Symbol description
1 determination part 2 is removed the unit
3 lambda sensors, 4 suction pumps
5 voltage sources, 6 control operational parts
21 ceramic pipes, 22 well heaters
The platinum 24 granular silver of 23 cotton shapes
29 silica wools
Embodiment
Fig. 1 is the component diagram of an embodiment of expression oxygen concentration determination apparatus of the present invention, is provided with determination part 1 in this oxygen concentration determination apparatus.
This determination part 1 comprises: suction pump 4, and it attracts determination object gases via the filter 8 of the dust of removing determination object gas from attraction mouth 7; Measure the solid electrolyte lambda sensor (hereinafter referred to as lambda sensor) 3 of oxygen concentration; Remove unit 2, it is positioned at the upstream of lambda sensor 3, and it will make the material of oxygen sensor deterioration remove from the determination object gas of being sent into by suction pump 4, and determination object gas is fed through in the lambda sensor 3.
In addition, be provided with the flowmeter 9 that is used for being determined at the flow of the determination object gas behind the mensuration oxygen concentration in the lambda sensor 3 and will have passed through the gas discharge outlet 12 of the determination object gas of flowmeter 9 to the discharge of the outside of determination part 1 with being used for.Regulate the flow that is fed through the determination object gas of removing unit 2 by the shunt flow control valve 10 that is arranged on suction pump 4 and remove between the unit 2, so that it reaches the flow of regulation.For this adjusting, a part of gas is discharged from separation panel outlet 11.
In determination part 1, be used to make the voltage source 5 of removing unit 2 runnings to be connected with control operational part 6, the oxygen concentration signal that above-mentioned control operational part 6 is used to remove the running control of unit 2, lambda sensor 3 and suction pump 4 and will come from lambda sensor 3 carries out computing.
The two sides that employed lambda sensor 3 is solid electrolytes in the oxygen concentration determination apparatus of the present invention is provided with the known sensor of platinum electrode, and it is to utilize down the difference of oxygen concentration when carrying out oxygen ion conduction in reference gas (atmosphere) and determination object gas and the electromotive force that produces is measured oxygen concentration at high temperature (about 700 ℃) between two electrodes.Needn't form protective seam or fill deterioration composition absorbing agent by spraying plating as before as the countermeasure that prevents above-mentioned platinum electrode deterioration.This is because by being arranged in the removing unit 2 of lambda sensor 3 upstreams the material of above-mentioned platinum electrode deterioration will be removed from the determination object gas that is fed through lambda sensor 3.
As the material that makes the platinum electrode deterioration in the lambda sensor, the organosilicon that contains in a large number in the representational silicone encapsulant that is the chlorine that contains in a large number in the solder flux that in soft soldering apparatus etc., uses, in the chamber of semiconductor-fabricating device etc., uses etc.
For chlorine, its at high temperature with platinum generation chemical reaction, form chlorination platinic acid etc., thereby make the defunctionalization of platinum electrode.In addition, for organosilicon, it at high temperature combines with oxygen and form SiO on electrode surface
2Film, see through thereby hinder oxygen.
Describe with regard to the employed unit 2 of removing in the oxygen concentration determination apparatus of the present invention below.Fig. 2 is this axial sectional view of removing unit 2.
Remove in the unit 2, the both ends of ceramic pipe 21 embed in the support component 30,31 respectively and fix, and support component 30,31 is installed in respectively in the substrate 32 to become one.Inside diameter in the vertical direction with ceramic pipe 21 on support component 30 is provided with gas access 25 communicatively, also is provided with gas vent 26 communicatively with the inside diameter in the vertical direction of ceramic pipe 21 on support component 31, so that gas can pass in and out.
The well heater 22 that is used to heat is installed on the outer peripheral face of ceramic pipe 21, and is connected with voltage source 5.At this moment, the part that need on the axial periphery face of the ceramic pipe 21 of support component 30,31 sides, not have well heater with suitable distance setting.In addition, well heater 22 is that the coiling platinum filament forms on the outer peripheral face of ceramic pipe 21, and this well heater 22 drives the winding number of adjusting platinum etc. by voltage stabilizing, make the maximum temperature point reach 800～900 ℃ with internal resistance and filament saturation by platinum filament.The adiabatic material 28 that is used to obtain insulation effect is installed on the outer peripheral face of well heater 22 in addition.This thermal insulation material 28 is the ceramic fiber of nonwoven fabrics shape to be reeled which floor forms.In addition, the well heater of employed lambda sensor also uses the well heater roughly the same with above-mentioned well heater in the oxygen concentration determination apparatus of the present invention.
On support component 30,31, ceramic pipe 21 axially on is communicated with the inside diameter of ceramic pipe 21 and is equipped with through hole, cover 27 and be installed on the support component 30,31 in detachable mode across encapsulants 33 such as O shape rings.
Then, take and cover 27, fill platinum 23, at the silver 24 of the area of space filler particles shape of its both sides as the cotton shape of catalyzer at the area of space of the central interior portion of ceramic pipe 21.Then, the silica wool 29 of packing in the inside, both ends of ceramic pipe 21 is to prevent above-mentioned catalyzer moving in ceramic pipe.When removing unit 2 running, yes is covered with for lid 27.
The platinum 23 of the cotton shape of above-mentioned catalyzer and granular silver-colored 24 is consumables, if judge it is replacing period, can refill from covering 27 ones.
Be used to make the heating of removing unit 2 runnings by providing electric power to carry out from voltage source 5 to well heater 22, the central portion of ceramic pipe 21 produces Temperature Distribution as shown in Figure 3 when reaching about 900 ℃.This is not have the part of well heater 22 to produce owing to aforesaid both sides at ceramic pipe 21 are provided with.
Specifically, set 3 scopes of L1, L2 (totally 2 of both sides) on ceramic pipe 21, L1 is about 500～about 900 ℃ scope, and L2 is about 250～500 ℃ scope.Therefore, the catalyzer that is filled in ceramic pipe 21 inside is configured in these 3 scopes.The i.e. platinum of filling cotton shape in L1 portion, the silver 24 of filler particles shape respectively in L2 portion.
Thus, well-known, chlorine has the characteristic 400 ℃ of left and right sides Yi Yuyin combinations, and organosilicon also has in the characteristic that is attached to platinum more than 600 ℃ as everyone knows, therefore, and can be effectively in the temperature range of L1, L2 and remove 2 kinds of materials reliably.
The effect of removing from determination object gas with regard to the material that will make oxygen sensor deterioration of oxygen concentration determination apparatus of the present invention describes below.
When the power supply of oxygen concentration determination apparatus is imported, then control operational part 6 runnings, from well heater 22 supply capabilities that 5 pairs of voltage sources are removed unit 2, the heating that begins to remove unit 2.Simultaneously, to lambda sensor 3 also supply capability, also begin the heating of lambda sensor 3.At this moment, control operational part 6 is carried out program setting, but arrive heating-up time till heating-up time till 900 ℃ of the temperature that can turn round is shorter than 700 ℃ of the temperature that lambda sensor 3 arrives oxygen concentration determinations so that remove unit 2.Thus, material that determination object gas will remove can not take place does not remove fully and just is fed through in the lambda sensor 3.
Then, remove unit 2 and lambda sensor 3 arrives set point of temperature together, after in removing unit 2, producing the stipulated time after said temperature distributes, suction pump 4, and 25 is sent into and is removed unit 2 from the gas access from attracting mouthfuls 7 to attract determination object gases via the filter 8 of removing the dust in the determination object gas.The control of suction pump 4 runnings is detected temperatures of the Temperature Distribution range L 1 by removing unit 2, Temperature Detector (not shown) that L2 portion possesses and by the internal temperature that the thermopair in the lambda sensor (not shown) produces the feedback of control operational part 6 is carried out that the time till turning round to suction pump 4 is suitably set after stipulated time after this removes 3 runnings of unit 2 and lambda sensor.
To the importing means of removing unit 2 and lambda sensor 3, also the stream of determination object gas can be made as the positive delivery stream about determination object gas, and have electromagnetic switch valve (not shown) and replace suction pump 4, import by its switch.Control when the control of above-mentioned electromagnetic switch valve can be with suction pump is identical.
The material that will remove in the temperature range of removing unit 2 is removed from be fed through the determination object gas of removing unit 2.That is, the chlorine in the determination object gas is removed 2 ones of Temperature Distribution range L, and organosilicon is removed 1 one of Temperature Distribution range L.
Having removed chlorine and organosilyl determination object gas is fed through the lambda sensor 3 to measure oxygen concentration from the gas vent 26 of removing unit 2, the oxygen concentration of measuring passes in the control operational part 6 with the form of electric signal, carry out the demonstration of oxygen concentration at control operational part 6, perhaps pass through other means of communication to external communication oxygen concentration information.
Determination object gas behind the oxygen concentration determination is discharged to the outside of determination part 1 from gas discharge outlet 12 by flowmeter 9 backs.
For effectively utilize above-mentioned remove that unit 2 carries out to remove removing of material, from the experiment aspect, the internal diameter size of removing the ceramic pipe 21 of unit 2 is preferably set to 4mm, by in the ceramic pipe 21 and the flow of the determination object gas in the lambda sensor 3 be preferably set to below the 100mL/min, flow velocity is preferably set to 150mm/ below second.In addition, the adjusting of flow is to be undertaken by suction pump 4 and the shunt flow control valve 10 removed between the unit 2.
For the flow set with determination object gas is more than the 100mL/min, the internal diameter size of ceramic pipe 21 can be set at more than the 4mm, but flow velocity is preferably set to 150mm/ below second.
Remove in the unit 2 of the present invention, also can remove other material by changing the catalyzer of being filled.For example,, make the organic solvent burning, can prevent that organic solvent from invading in the lambda sensor by filling silica wool or ceramic fiber.
In addition, if the unit 2 of removing of the present invention is independently, promptly it is not to be assembled in packaging in the oxygen concentration determination apparatus, but separately as the words of rotating device assembling, can in oxygen sensor element, use, and be predictable as the commercialization of removing the unit.
Claims (6)
1. oxygen concentration determination apparatus, it is characterized in that, it possesses the solid electrolyte lambda sensor, described lambda sensor has taking-up and measures by the platinum electrode of the electromotive force of oxygen ion conduction generation and to the oxygen concentration of determination object gas, wherein, the material that makes described platinum electrode deterioration that is contained in the upstream side of described lambda sensor is provided with described determination object gas is removed removes the unit.
2. oxygen concentration determination apparatus as claimed in claim 1 is characterized in that, the described unit of removing is made of ceramic pipe, portion's catalyst filling within it, and well heater is installed on its outer peripheral face is removed the unit with heating.
3. oxygen concentration determination apparatus as claimed in claim 2, it is characterized in that, described catalyzer is the platinum and the granular silver of cotton shape, the platinum of cotton shape is filled in the central portion of described ceramic pipe, granular silver is filled in the both sides of the platinum of described cotton shape respectively, and by described heating of removing the unit middle body of the ceramic pipe inside of removing the unit is reached more than 750 ℃, and temperature is controlled, so that produce Temperature Distribution below 500 ℃ to two side directions from this part.
4. as claim 2 or 3 described oxygen concentration determination apparatus, it is characterized in that, thereby described remove in the unit produced described Temperature Distribution and reach the heating-up time of removing in the unit of removing till the state that can turn round the unit and control, so that its temperature that is shorter than described lambda sensor reaches the heating-up time till the temperature that lambda sensor can measure.
5. as each described oxygen concentration determination apparatus in the claim 1～4, it is characterized in that, it possesses the suction pump that attracts determination object gas, after the described stipulated time after removing the running of unit and lambda sensor, described suction pump attracts determination object gas also to be fed through described removing in the unit.
6. as each described oxygen concentration determination apparatus in the claim 1～4, it is characterized in that, it possesses the electromagnetic switch valve of the switch of carrying out this stream in the stream of positive delivery determination object gas, after the described stipulated time after removing the running of unit and lambda sensor, open described electromagnetic switch valve, determination object gas is fed through described removing in the unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005280651A JP4841917B2 (en) | 2005-09-27 | 2005-09-27 | Oxygen concentration measuring device |
| JP280651/2005 | 2005-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1940549A true CN1940549A (en) | 2007-04-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006101595626A Pending CN1940549A (en) | 2005-09-27 | 2006-09-27 | Oxygen concentration determination apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4841917B2 (en) |
| KR (1) | KR101301474B1 (en) |
| CN (1) | CN1940549A (en) |
| TW (1) | TWI420103B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101551378B (en) * | 2008-12-30 | 2014-07-02 | 湖北宜化化工股份有限公司 | Method and equipment for detecting oxygen content in coal gas |
| JP6404128B2 (en) * | 2015-01-13 | 2018-10-10 | エナジーサポート株式会社 | Oxygen concentration measuring device |
| CN113493030A (en) * | 2021-06-11 | 2021-10-12 | 上海帆铭机械有限公司 | Modified atmosphere fresh-keeping packaging machine with oxygen consumption type secondary deoxidization structure |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6352058A (en) * | 1986-08-22 | 1988-03-05 | Karuto Kk | Detection of concentration of organic gas |
| US4875990A (en) * | 1986-08-28 | 1989-10-24 | Ngk Insulators, Ltd. | Oxygen concentration measuring device |
| JPS63200761A (en) * | 1987-02-15 | 1988-08-19 | 大森商機株式会社 | Apparatus for disinfecting material |
| KR950003455B1 (en) * | 1991-03-15 | 1995-04-13 | 쌍용양회공업 주식회사 | Electrode manufacturing method of oxygen sensor |
| JP3398320B2 (en) * | 1997-12-26 | 2003-04-21 | 新光電気工業株式会社 | Gas sensor device |
| JP2001013048A (en) * | 1999-07-02 | 2001-01-19 | Shimadzu Corp | Gas concentration measuring apparatus |
| JP2002022698A (en) * | 2000-07-05 | 2002-01-23 | Toray Eng Co Ltd | Oxygen sensor |
| JP2002071630A (en) * | 2000-09-05 | 2002-03-12 | Matsushita Electric Ind Co Ltd | Gas sensor |
| TWI228592B (en) * | 2003-09-30 | 2005-03-01 | Hon Hai Prec Ind Co Ltd | Gas sensor of zinc oxide |
| US20050155871A1 (en) * | 2004-01-15 | 2005-07-21 | Grant Robert B. | Electrochemical sensor |
-
2005
- 2005-09-27 JP JP2005280651A patent/JP4841917B2/en active Active
-
2006
- 2006-07-13 KR KR1020060065693A patent/KR101301474B1/en active IP Right Grant
- 2006-09-26 TW TW095135461A patent/TWI420103B/en active
- 2006-09-27 CN CNA2006101595626A patent/CN1940549A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| TW200728715A (en) | 2007-08-01 |
| JP2007093295A (en) | 2007-04-12 |
| JP4841917B2 (en) | 2011-12-21 |
| KR20070035412A (en) | 2007-03-30 |
| KR101301474B1 (en) | 2013-08-29 |
| TWI420103B (en) | 2013-12-21 |
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