CN1925696B - Diamond oscillating film - Google Patents
Diamond oscillating film Download PDFInfo
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- CN1925696B CN1925696B CN2005100936953A CN200510093695A CN1925696B CN 1925696 B CN1925696 B CN 1925696B CN 2005100936953 A CN2005100936953 A CN 2005100936953A CN 200510093695 A CN200510093695 A CN 200510093695A CN 1925696 B CN1925696 B CN 1925696B
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Abstract
This invention relates to diamond vibration film and its process method, which comprises the following steps: forming different heating effect according to distance difference of non even energy of mode curved surface and isolation gas, such as resistance wires, electrical slurry and flares through one mode; filming the diamond materials onto mode surface to make diamond materials grow difference with non even vibration characteristics.
Description
Technical field
The present invention relates to a kind of vibrating membrane, particularly a kind of thickness and hardness all present the diamond oscillating film of uneven distribution.
Background technology
On the material of vibrating membrane was selected, the main factor of considering had hardness and damping characteristic.Hardness decision material natural frequency, the natural frequency that the material that hardness is high is relative is also high, on the contrary low its natural frequency of material of hardness is also low.The good material of damping characteristic can make vibrating membrane possess more smooth-going vibratory response, makes that the output sound pressure level of vibrating membrane is comparatively smooth-going.
Common traditionally diaphragm material comprises stationery, high molecule plastic material, metal (Be, Ti, Al), pottery etc., and stationery and macromolecular material damping characteristic are good, but poor rigidity damage easily, and hardness low with make its maximum operating frequency limited.Though and the metal vibrating membrane has preferable hardness, it costs an arm and a leg, is difficult for processing the metal of high rigidity such as Be, Ti etc.Ceramic material also has the numerous and diverse problem of sintering procedure to exist.Because diamond material has multinomial outstanding mechanical property, intensity, be fit to the vibrating diaphragm that workmanship is light, rigidity is big, can be applicable in the middle and high band loudspeaker.By this diaphragm vibration frequency, produce the sound desiring to send.The diaphragm vibration frequency is high more, and the mechanical strength of vibrating membrane and quality requirement are harsh more, uses diamond material to make vibrating membrane and can reach this purpose.
Generally speaking no matter, vibrating membrane all has the upper limit of response frequency, yet with diamond or other material vibrating membrane, because its integral material characteristic homogeneous is defined within the particular range its natural frequency, and limits its frequency range performance.And also can't random variation between damping characteristic and the rigidity, and limit its tonequality, tone color performance.Therefore if contain the receptible frequency range of people's ear, all need to be provided with simultaneously a plurality of frequency ranges, vibrating membrane that upper frequency limit is different usually, just can reach the acoustics of the best.Therefore have in the prior art and will utilize the technology of different materials sectional making vibrating membrane, the vibrating membrane middle body is utilized the high material of hardness, outer ring portion is being utilized the low material of hardness, then engage this two part, make the single vibration film possess two kinds of different material hardnesses and thickness simultaneously, and can contain bigger frequency range.But the common thickness of vibrating membrane as thin as a wafer, engages operation and be difficult for carrying out.If will be applied on the diamond material, its joining technique, cement all are very big problems, therefore are difficult for being applied on the diamond material.
Summary of the invention
For addressing the above problem, the present invention proposes a kind of diamond oscillating film and manufacture method thereof, can change hardness, thickness and the damping characteristic of zones of different on the diamond oscillating film, makes it possess vibration characteristics heterogeneous, contains bigger frequency range scope.
Diamond oscillating film disclosed according to the present invention and manufacture method thereof, one mould that possesses curved surface is provided, one non-homogeneous (non-homogeneous) energy that excites the gas that dissociates by the mould top, is produced high temperature mould is heated, make die surface present unequal Temperature Distribution.For example with
1. thermal resistance wire is central point (highest energy zone), and reactive material concentration presents non-impartial annular distribution.
2. the electricity of high-frequency energy excitation slurry is owing to the effect of wavelength, amplitude, standing wave, and reactive material concentration presents the sphere-like of non-equal distribution.
3. the flame energy is outwards decayed by the central area, and reactive material concentration presents non-equalization and disperses distribution.
Temperature that above-mentioned energy produced and reactive material concentration is outwards decay rapidly in regular turn; Therefore, the reactive material concentration of different die surface position contact zoness of different forms the diamond film that grows different structure state, different-thickness, make diamond material possess the vibration characteristics of non-homogeneous (non-homogeneous), for example thickness or hardness present distribution heterogeneous, again this diamond film is taken off by mould, form this diamond oscillating film.The configuration state of diamond material has a micron crystallization (Micro-crystal), nanocrystal (Nano-crystal) etc.
Diamond oscillating film according to the present invention's manufacturing, its hardness, thickness are inhomogeneous, present zone line hardness height, fringe region hardness is low, and the kenel that intermediate zone thicknesses is big, fringe region thickness is little, the influence that the vibration characteristics at each position is subjected to hardness and thickness possesses different natural frequencies respectively, and makes diamond oscillating film can possess bigger frequency range.
Description of drawings
Figure 1A～1D is the making schematic flow sheet of the present invention's first preferred embodiment;
Fig. 2 A is the vertical view of the first preferred embodiment mould;
Fig. 2 B is the end view of the first preferred embodiment mould;
Fig. 3 is frequency, the volume analysis chart of first preferred embodiment and prior art; And
Fig. 4 A～4D is the making schematic flow sheet of the present invention's first preferred embodiment.
Wherein, Reference numeral:
10 moulds
12 first vibration levels
14 second vibration levels
20 thermal resistance wires
A, B, C, D die surface
Embodiment
For making purpose of the present invention, structure, feature and function thereof there are further understanding, cooperate embodiment to be described in detail as follows now.
See also Figure 1A～1D, be the disclosed a kind of diamond oscillating film of the present invention's first preferred embodiment.Its manufacture method is for providing a mould 10, and the kenel of the vibrating membrane of the required making of form fit of mould 10 designs, and forms the curved surface kenel of center protrusion.Then on the mould 10 by non-homogeneous (non-homogeneous) energy that can excite the gas that dissociates, for example high temperature thermal resistance wire, electricity slurry, flame etc., present embodiment adopts a thermal resistance wire 20 to produce this non-homogeneous energy, thermal resistance wire 20 can adopt resistant to elevated temperatures tungsten, tantalum, tungsten carbide to make, its temperature can be heated to 1900～2300 ℃, feed and to produce high temperature behind the electric current and to mould 10 heating, shown in 1A figure and Figure 1B.By directly over the mould 10, because mould 10 is the curved surface kenel, so each several part is different with the distance of thermal resistance wire 20 on the mould 10, and makes die surface 10 produce unequal variations in temperature along same horizontal plane for thermal resistance wire 20.
Then electric current is fed in the thermal resistance wire 20, make 20 pairs of mould upper surfaces of thermal resistance wire 20 produce the heat effect, simultaneously also to the temperature increase to 400 of mould 10 ℃～1000 ℃, re-use in the diamond coating film program, chemical vapour deposition technique for example, make the diamond material plated film on mould 10, form first vibration level 12 of curved surface film shape, shown in Fig. 1 C, then again first vibration level 12 is taken off by mould 10, remove too much partly, can finish diamond oscillating film of the present invention, shown in Fig. 1 D.Because the non-homogeneous energy that provides of the 20 pairs of moulds 10 of thermal resistance wire and first vibration level 12 can be because the different conversion zone of distance generation reaction temperature be central point (highest energy zone) with thermal resistance wire 10, reactive material concentration presents non-impartial annular distribution.First vibration level 12 is because reaction temperature and reactive material concentration different, therefore the diamond material crystallization rate at each position also can be different on mould 10, the vibration characteristics that forms non-homogeneous (non-homogeneous) distributes, make the middle part of the vibration level 12 of winning form the key reaction zone, the diamond material growth rate in approaching more central area is fast more, so thickness is also big more.With Fig. 2 A and 2B is example, among 4 of A, B, C, the D, the B point is near reaction zone, A, D point then apart from high temperature reaction zone farthest, therefore at first vibration level 12, the growth of B point the thickness maximum, the thickness minimum that A, D are ordered, it is B＞C＞A=D that its varied in thickness is closed, and thickness range approximately is distributed between 3～50 μ m.Because each point (A in first vibration level 12, B, C, D 4 points) thickness difference, therefore can make its vibration characteristics difference, and possesses the highest different natural frequency, make diamond oscillating film that this first vibration level 12 constituted for the vibrating membrane that only possesses single thickness, the frequency range that can possess broad, as shown in Figure 3, the single hardness of prior art or the vibrating membrane of thickness, after arriving certain high frequency (about 20KHz), its response volume just can decay rapidly, the present invention then can further promote upper frequency limit again, and sustainable arrival 100KHz just relaxation phenomenon can occur.And the characteristic of diamond material possesses hard, crisp and high damping coefficient also can make the sound pressure level of first vibration level, 12 outputs comparatively smooth-going.
As previously mentioned, non-homogeneous energy is except adopting thermal resistance wire 20 provides, also can be electricity slurry or flame, because the difference of energy producing method, can make the distribution mode of reaction temperature and reactive material concentration produce difference, its purpose all is to make diamond material to produce crystallization rate heterogeneous, and the formed diamond oscillating film that makes possesses vibration characteristics heterogeneous.When feeding the electricity slurry as non-homogeneous energy, high-frequency swashs electricity slurry wavelength, standing wave and die surface and produces relativeness, can make the electricity slurry amplitude of die surface each point vary in size, therefore can present the sphere-like of non-equal distribution in the reactive material concentration of die surface.When adopting flame as non-homogeneous energy, the energy that flame provided can be outwards to decay in the center with flame, reactive material concentration presents non-equalization and disperses distribution, make that the diamond material of die surface can be along with different with the distance of flame, different crystallization rates occurs, form the diamond oscillating film that possesses non-homogeneous vibration characteristics.
In addition, difference by reaction temperature, also can make diamond material different lattice structures in pyroreaction growth zone, occur, B point position among Fig. 2 A and the 2B for example, the stereochemical structure ratio of being made up of the SP3 bond in the microstructure of its formed diamond material is higher, the structure that makes diamond material form in B point position possesses higher hardness, and A, C, D are ordered etc. away from the grow up part in zone of pyroreaction, the ratio regular meeting that SP2 bond in the diamond material microstructure is formed increases along with the reduction of temperature, makes it possess lower hardness.That is, for the whole physical characteristic of first vibration level 12,, heave material hardness partly away from central authorities and then descend gradually near the material hardness height that part is heaved by central authorities.Because the material hardness of each several part is neither identical, therefore also can make and the natural response frequency difference of each regional area contain tremendously high frequency by low frequency, promote the frequency range of first vibration level.
The diamond oscillating film that is provided for the present invention's second preferred embodiment please is provided shown in Fig. 4 A to 4D again.The present invention is not limited to single layer structure and forms, and also can pass through different growth conditions, constitutes sandwich construction.Owing to the growth condition difference of each layer structure, therefore can produce the difference of thickness and hardness, use combination by sandwich construction, the vibration characteristics of adjusting diamond oscillating film distributes.
Second preferred embodiment describes with two-layer structure, and in fact present embodiment can form two layers or more structure.Prepare a mould 10 earlier, this mould 10 cooperates the required kenel of diamond oscillating film, is the curved surface kenel of central protrusion, but the non-homogeneous energy that above mould 10, dissociates simultaneously (for example thermal resistance wire 20, electricity slurry, flame) by an excited gas.Present embodiment adopts a thermal resistance wire that this non-homogeneous energy is provided, after electric current fed thermal resistance wire 20, can make thermal resistance wire 20 temperature rise to 1900 ℃～2300 ℃, simultaneously with mould 10 temperature increase to 400 ℃～1000 ℃, then utilize the non-homogeneous energy that excites the gas that dissociates (thermal resistance wire for example, the electricity slurry, plated film programs such as chemical vapour deposition technique flame), diamond material is plated on mould 10 surfaces, form first vibration level 12 in mould 10 surfaces, utilize the difference of temperature conditions, make first vibration level 12 form thick middle, peripheral thin, and middle hard, the material behavior that the edge is soft.Then change the plated film condition, comprise thermal resistance wire 20 heating-up temperatures, thermal resistance wire 20 distances, mould 10 temperature, pressure, gas concentration and flow etc., above first vibration level 12, form one second vibration level 14 again, second vibration level 14 can form thick middle, peripheral thin equally, and the material behavior that the centre is hard, the edge is soft, simultaneously because the plated film condition is different from first vibration level 12, so its vibration characteristics also can be different from first vibration level 12.Form composite construction by first vibration level 12 and second vibration level 14, can adjust the vibration characteristics of diamond oscillating film, make its vibration characteristics reach optimization.First vibration level 12 and second vibration level 14 that are combined as a whole are taken off, can finish the diamond oscillating film of present embodiment, certainly also can continue on second vibration level 14, to continue to plate the 3rd, the 4th .... vibration level makes the vibration characteristics of diamond oscillating film reach optimization with more vibration level.
Though the present invention with aforesaid embodiment openly as above, yet it is not in order to limit the present invention.Without departing from the spirit and scope of the present invention, variation of being done and modification all belong to scope of patent protection of the present invention.Please refer to appended claim scope about the protection range that the present invention defined.
Claims (10)
1. the manufacture method of a diamond oscillating film is characterized in that, comprises the following step:
One mould is provided, and this mould is the curved surface kenel;
The one non-homogeneous energy that excites the gas that dissociates by described mould top, is produced high temperature mould is heated, make die surface present unequal Temperature Distribution; And
A plurality of diamond coating film programs, with the diamond material plated film in described die surface, produce a plurality of vibration levels that possess non-homogeneous vibration characteristics, so that a plurality of vibration levels are laminated on the described mould in the plated film mode, and the hardness of each vibration level is distributed as uneven distribution or thickness is respectively uneven distribution.
2. the manufacture method of diamond oscillating film as claimed in claim 1 is characterized in that, described non-homogeneous energy is provided by a thermal resistance wire, and the material of described thermal resistance wire is tungsten, tantalum or tungsten carbide.
3. the manufacture method of diamond oscillating film as claimed in claim 1 is characterized in that, described non-homogeneous energy is heated to 1900 ℃～2300 ℃.
4. the manufacture method of diamond oscillating film as claimed in claim 1 is characterized in that, described non-homogeneous energy is an electricity slurry or a flame.
5. the manufacture method of diamond oscillating film as claimed in claim 1 is characterized in that, described mold heated to 400 ℃～1000 ℃.
6. the manufacture method of diamond oscillating film as claimed in claim 1 is characterized in that, described a plurality of diamond coating film programs adopt different plated film conditions respectively, make described vibration level possess different vibration characteristics.
7. diamond oscillating film, be the curved surface film that utilizes diamond material to make, it is characterized in that, the thickness distribution of described diamond oscillating film is non-homogeneous, the thickness of its middle section is greater than the thickness of fringe region, and described diamond oscillating film is by a plurality of vibration level be combined intos, and the thickness distribution of each vibration level is a uneven distribution.
8. diamond oscillating film as claimed in claim 7 is characterized in that, the thickness of described vibration level is between 3 μ m～50 μ m.
9. diamond oscillating film, be a curved surface film that utilizes diamond material to make, it is characterized in that, the hardness of described diamond oscillating film is distributed as non-homogeneous, the hardness of its middle section is higher than the hardness of its fringe region, described diamond oscillating film is by a plurality of vibration level be combined intos, and the hardness of each vibration level is distributed as uneven distribution.
10. diamond oscillating film as claimed in claim 9 is characterized in that, described diamond material includes higher SP3 bond stereochemical structure of hardness and the lower SP2 bond planar structure of hardness, forms by the ratio of stereochemical structure and planar structure to change its hardness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2005100936953A CN1925696B (en) | 2005-09-01 | 2005-09-01 | Diamond oscillating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2005100936953A CN1925696B (en) | 2005-09-01 | 2005-09-01 | Diamond oscillating film |
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| Publication Number | Publication Date |
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| CN1925696A CN1925696A (en) | 2007-03-07 |
| CN1925696B true CN1925696B (en) | 2010-10-13 |
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| CN2005100936953A Expired - Fee Related CN1925696B (en) | 2005-09-01 | 2005-09-01 | Diamond oscillating film |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10397717B2 (en) | 2017-05-24 | 2019-08-27 | Ming Chi University Of Technology | Acoustic diaphragm and speaker containing the same |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107071664A (en) * | 2017-04-28 | 2017-08-18 | 北京欧意智能科技有限公司 | Low noise vibrating diaphragm and comprehensive sounding loudspeaker |
| CN107071659B (en) * | 2017-05-26 | 2020-03-27 | 明志科技大学 | Acoustic diaphragm and loudspeaker device comprising same |
| CN112565984A (en) * | 2020-11-16 | 2021-03-26 | 无锡时柒伍科技有限公司 | Loudspeaker with novel drum paper and drum paper surface treatment method |
| CN113442622B (en) * | 2021-06-28 | 2022-12-02 | 广东邦固化学科技有限公司 | Electrochemical aluminum hot stamping foil suitable for offset printing cold stamping technology and preparation method thereof |
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| US4987002A (en) * | 1988-05-09 | 1991-01-22 | Kabushiki Kaisha Kenwood | Process for forming a crystalline diamond film |
| CN1093213A (en) * | 1993-04-01 | 1994-10-05 | 中国建筑材料科学研究院 | The method for preparing diamond composite vibrating membrane |
| CN1261927A (en) * | 1997-07-07 | 2000-08-02 | Cvd金刚石公司 | Apparatus and method for nucleotion and deposition of diamond using hot-filament DC plasma |
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- 2005-09-01 CN CN2005100936953A patent/CN1925696B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4987002A (en) * | 1988-05-09 | 1991-01-22 | Kabushiki Kaisha Kenwood | Process for forming a crystalline diamond film |
| CN1093213A (en) * | 1993-04-01 | 1994-10-05 | 中国建筑材料科学研究院 | The method for preparing diamond composite vibrating membrane |
| CN1261927A (en) * | 1997-07-07 | 2000-08-02 | Cvd金刚石公司 | Apparatus and method for nucleotion and deposition of diamond using hot-filament DC plasma |
Non-Patent Citations (6)
| Title |
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| 126,201.;戴达煌等.金刚石薄膜沉积制备工艺与应用 1.冶金工业出版社,2001,116-117,126,201. * |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10397717B2 (en) | 2017-05-24 | 2019-08-27 | Ming Chi University Of Technology | Acoustic diaphragm and speaker containing the same |
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| CN1925696A (en) | 2007-03-07 |
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