CN1923466A - Macrography/microcosmic association 12 freedom degree micro assembly system - Google Patents

Macrography/microcosmic association 12 freedom degree micro assembly system Download PDF

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CN1923466A
CN1923466A CN 200610149635 CN200610149635A CN1923466A CN 1923466 A CN1923466 A CN 1923466A CN 200610149635 CN200610149635 CN 200610149635 CN 200610149635 A CN200610149635 A CN 200610149635A CN 1923466 A CN1923466 A CN 1923466A
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little
micro
grand
frees degree
robot
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CN100446939C (en
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张之敬
叶鑫
金鑫
张卫民
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Beijing Institute of Technology BIT
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Beijing Institute of Technology BIT
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Abstract

The invention relates to a 12-freedom micro installer, which comprises 6-freedom macro robot, 6-freedom micro robot, combination micro clamper, micro clamper, solid display and control computer; the invention has 12 freedoms, to realize high-accuracy and large-range movement; and the clamper combines the piezoelectric ceramic driving mechanical type, aerated adsorption type, and sheet open compression type. The invention can realize complex micro structure positioning, while its position accuracy is higher than 5micrometer, and maximum movable radius is larger than 700mm.

Description

A kind of grand/the little assembly system of 12 frees degree of little combination
Technical field
The present invention relates to a kind of little assembly system of 12 frees degree that can carry out grand/little combination of complicated micro-miniature structures spare assembling, belong to the electromechanical integration field.
Background technology
Little assembling belongs to the accurate operation of microscopic fields, between assembling of traditional macroscopic view and emerging nanometer assembling, by making the moving of minute yardstick object, rotation, in its complicated micro-system of packing into.Along with the development of micro-processing technology, the structure of micro part also becomes increasingly complex, and has greatly increased the difficulty of assembling.Because the restriction of the physiology of staff and eye can't only rely on the assembly work of manually finishing complicated micro-miniature structures spare, must realize the man-machine coordination or the automation assembling of complicated micro-miniature structures spare by little assembly system.
Central China University of Science and Technology's application number is 01133684.6 the designed little assembly robot system based on micro-vision of patent, constitute by system's main control system, microoperation manipulator, vacuum micro-tool, the microscope that has a camera, can carry out automatically and semi-automatic operation and assembling work the submillimeter level particulate objects, its positioning accuracy can reach 1~5 μ m, three-dimensional range of movement can reach 50~150mm, has certain application prospect and economic results in society.But system has only three degree of freedom, and is just powerless to the assembling of complex-shaped micro part or object.Being of limited application of while vacuum micro-tool, system can only operate the particulate objects of submillimeter level, and range of application also is restricted.
The desktop micro OS of Germany Karlsruhe university design is made of a precision surface plate, microrobot and micro-vision system.Precision surface plate can be done large-scale rectilinear motion, the microrobot that has a plurality of these universities to develop voluntarily on the precision surface plate.The micro-vision system is by microscope, CCD and laser constitution.The microscope that has CCD is mainly used in determines the plan position information of microrobot on platform, and the laser instrument that side direction is placed then can record depth information according to the range of triangle principle.This system's modern design, bold still still is subjected to the restriction of number of degrees of freedom,, can't carry out the assembling of complicated micro-miniature structures spare; And because the microrobot number is numerous, vision system is complicated, control system is relative complex also, and the real-time of control and accuracy are difficult to guarantee.
Little assembly system of external import is a nonflexible line, and product remodeling back just can't have been used.Domesticly at present also can reach Nano grade in the research aspect the microoperation field, but mainly concentrate on the micromotion platform aspect, the displacement range that can reach is also less.
Generally speaking, obtained bigger progress in little assembling and microoperation field both at home and abroad in recent years, but these achievements nearly all are at MEMS device or simple, some special parts design, the little assembling studied or the number of degrees of freedom, of micro OS do not reach requirement, rotatablely moving in the spatial dimension of particularly can't finishing the work, cause complicated micro-miniature structures spare to be restricted in the attitude in space, and adopt monocular micro-vision system, can only be at certain direction observation part spatial positional information, can't obtain the definite posture information of three dimensions of part, thereby can't finish the structure operation and the assembling of complicated parts a little, the opereating specification of little assembly system also is restricted, and does not have versatility.
Summary of the invention
The object of the present invention is to provide a kind of abundant number of degrees of freedom, that has, grand/little combination, can satisfy general little assembly system of the labyrinth microminiature parts assembling of millimeter-submillimeter level range scale, micron order assembly precision.
To achieve these goals, of the present invention grand/the little assembly system of 12 frees degree of little combination mainly comprises Combined Micro-gripper, little anchor clamps, stereomicroscopy sighting device and control computer six parts that the grand moving robot of 6DOF, 6DOF precise jiggle robot, integrated micro-power detect.12 frees degree are meant the number of degrees of freedom, of grand moving robot and precise jiggle robot and are 12.The range of movement of grand moving robot is big but precision is lower, and the range of movement of precise jiggle robot is little but precision is higher, and the two routing motion not only can increase the range of movement of system, can also improve precision.
The grand moving robot of 6DOF can be on a large scale in motion (radius of action generally is not less than 700mm), realize and the control compunication by RS-232 serial ports or Ethernet interface, finish the action that the control computer instruction is finished.
The 6DOF jiggle robot has the parallel institution of 3-PPTTRS form, adopt the flexible hinge kinematic pair, and being provided with stepper motor, driver, the ball-screw of being with photoelectric encoder, the control computer drives stepper motor by motion control card and drives the motion that ball-screw is controlled jiggle robot.
The Combined Micro-gripper that little clamping device adopts integrated micro-power to detect.The terminal executing agency of micro clamping device is the decline hold down gag of a clamping device and a thin slice open type design of the little clamping device of Piezoelectric Ceramic of two clamping different scale parts, pneumatic absorption.This slightly the end of clamping device be fixed on the cylinder of support, the compressed air that air compressor produces enters in the cylinder that is fixed on the support, promotes piston rod and does straight reciprocating motion, thereby realize stretching out and restoring of each clamper and hold down gag.Little clamping device of described Piezoelectric Ceramic is the opening and closing that the Piezoelectric Ceramic flexible amplification mechanism is realized clamping limb, and each clamping limb is provided with the little force checking device that can realize little force signal rectification, filtering, amplification.
Realize the contraction and the diastole of piezo ceramic element by the change of shape of the variation control piezoelectric ceramics of power parameter value at the mechanical type retained part, this displacement amplifying mechanism that moves through the flexible hinge structure is delivered to the clamper front end, realizes clamping and release part.At the absorption type retained part, the compressed air that is produced by air compressor enters vacuum generator by the path of magnetic valve, makes the vacsorb mouth produce the negative pressure adsorbent parts according to venturi principle.When needs discharge part, the magnetic valve commutation, vacuum generator quits work, and vacuum adsorption force disappears fast, connects malleation and discharges gas circuit, under the positive differential pressure effect that gas circuit produces part is discharged.Designed the open type chip device at pressing section, can prevent to compress the change or even the destruction of the part shape that the stress raisers brought cause in the process that part is compressed owing to a bit.
Little force checking device part, the force sensing element of strain chip is pasted on the clamping limb of clamping and clamping element, in clamping and the process that compresses, receive the change of actuation arm upper stress and produce the corresponding signal of telecommunication, pass to the real-time monitoring of Displaying Meter realization after the effect through signal amplification and filter to assembly force, and data are passed to the control system of little clamping device, chucking power and thrust are revised, thereby realized closed-loop control.
The stereomicroscopy sighting device comprises two microscopes that have industrial CCD, their angled placements, two varifocal microscopes carry out imaging with different visual angles to little part respectively, obtain the microphoto of the little clearly part different angles of two width of cloth, the image that is collected sends the control computer to by image pick-up card, the control computer recovers the 3D shape of part, and then measures position and the attitude information of little part in three dimensions according to principle of stereoscopic vision.
The present invention is complete, a system with versatility and practicality that Robotics, microoperation technology and stereomicroscopy vision technique are combined, can make things convenient for, realize efficiently automatically or the assembling work of the complicated micro-miniature structures spare of man-machine coordination, its positioning accuracy≤5 μ m, largest motion radius 〉=700mm.Along with high-tech product is accelerated day by day to the trend of microminiaturization development, and the appearance of various micro-processing technologies, the demand of micro-miniature structures spare is increasing, and shape becomes increasingly complex, and application prospect of the present invention and economic results in society are considerable.
Description of drawings
The present invention is further detailed explanation below in conjunction with accompanying drawing.
Fig. 1 is the little assembly system The general frame of 12 frees degree of grand/little combination
Fig. 2 is the little assembly system information flow charts of 12 frees degree of grand/little combination
Fig. 3 detects Combined Micro-gripper schematic diagram front view for integrated micro-power
Fig. 4 detects Combined Micro-gripper schematic diagram vertical view for integrated micro-power
Fig. 5 is the terminal operating part schematic diagram of Combined Micro-gripper
Fig. 6 is a Combined Micro-gripper pneumatic actuation schematic diagram
Fig. 7 is the little assembly system control system of 12 frees degree structure chart of grand/little combination
Among the figure: the three-dimensional micro-vision device of the little force checking device 6-of the little grip device 5-of the little clamping device 4-of the grand mobile robot 2-6 of the 1-6 free degree degree-of-freedom micro 3-of robot 7-control computer 8-man-machine interface 9-microminiature member 10-micro clamping device pedestal 11-cylinder 12-mechanical gripper 1 13-absorption type clamper 14-cylinder 15-mechanical gripper 2 16-compress the terminal actuator 27-of the device 17-piezoelectric ceramics 18-flexible hinge 19-control power supply 20-clamping limb 21-little clamping of pressure source 22-air cleaner 23-pressure control valve 24-Pressure gauge 25-magnetic valve 26-motion control card 28-motor 29-data collecting card 30-image pick-up card
The specific embodiment
Specifically describe running of the present invention in conjunction with Figure of description.
One, the little assembly system of 12 frees degree of grand/little combination
The little assembly system The general frame of 12 frees degree of grand/little combination as shown in Figure 1, the main execution unit of realizing little assembling is grand moving robot 1 and jiggle robot 2, these two robots are controlled by the adjustment instruction of control computer 7 respectively.Grand moving robot 1 and terminal little clamping device 3 clamping micro parts 9 thereof are done large-scale grand displacement, and little grip device 4 at jiggle robot 2 and motion platform center thereof drives micro part 9 to be assembled and does the inching campaign.Little force checking device 5 all has been installed on wherein little clamping device 3 and the little grip device 4, detected little force feedback can have been given grand moving 1/ jiggle robot system 2.Machine-independent robot system visual feedback means 6 arranged, this system can realize micro part to be assembled and be held the spatial pose identification of micro part, and give control computer 7 with its spatial pose feedback information.The control computer is all the time by the co-operating of man-machine interface 8 maintenances with the people.
Two, the little assembly system information flow of 12 frees degree of grand/little combination
Little assembly system information flow such as Fig. 2 show.After the system initialization, little clamping device 3 that grand moving robot 1 drives its end carries out part and grasps, and little force checking device 5 detects little chucking power simultaneously.If it is defective that the size of little chucking power is estimated, readjust little chucking power and detection so, qualified if little power size is estimated, so grand moving robot 1 is held part 9 with drive and carries out grand moving by path planning and attitude.When part 9 moved near rigging position, grand moving robot 1 controller sent halt instruction, and robot 1 stops to move, and vision system 6 begins identification is just carried out in the position of part 9.Determine that vision system 6 begins to move after part 9 general location, by focusing on, realize the essence identification of part 9 spatial poses, and simultaneously the result is fed back to control computer 7, and carry out kinematics solution, allow robot 1/2 carry out little moving, finish assembling according to the pose status recognition.To check constantly that in assembling process whether the control of little power is estimated qualifiedly, how defective, carries out little moving according to the pose status recognition so again.At this moment, if assembling finishes, export the result so; If assembling does not finish, so grand moving robot 1 begins the grasping manipulation of new round part again.
Three, the Combined Micro-gripper of integrated micro-power detection
Fig. 3, Fig. 4 are the terminal operating part schematic diagram of Combined Micro-gripper, and Fig. 6 is a Combined Micro-gripper pneumatic actuation schematic diagram.The operation principle of the combined type clamper that integrated micro-power detects is described in conjunction with Fig. 3 and Fig. 5.Pedestal 10 connects firmly 1 end in grand moving robot by screw, can carry out crankmotion by grand moving robot 1, and four cylinders 11,14 connect firmly at pedestal 10 front ends.In assembling process, the instruction that control system is sent makes grand moving robot 1 drive pedestal 10 and rotates, and makes the suitable end effector of front end (mechanical gripper 12, absorption type clamper 13, mechanical gripper 15, hold down gag 16) move to suitable rigging position.Produce compressed air streams by pressure source 21 again,, and detect by Pressure gauge 24 and to obtain force value, promote cylinders by two magnetic valves, 25 control compressed air at last and drive end effectors 26 elongations through air cleaner 22 and pressure-control valve 23.After the work of this build-up member was finished, the control pneumatic circuit made cylinder piston rod drive this end effector withdrawal.When needing to use other build-up member, act on relevant build-up member, finish assembling work with same step.
Fig. 5 is the schematic diagram of Piezoelectric Ceramic micro clamping device.Realize the contraction and the diastole of piezo ceramic element 17 by the change of shape of the variation control piezo ceramic element 17 of power supply 19 parameter values at the mechanical type retained part, this displacement amplifying mechanism that moves through flexible hinge 18 structures is delivered to clamping limb 20 front ends, realizes clamping and release part.
Four, the little assembly system control system of 12 frees degree of grand/little combination
Fig. 7 is the little assembly system control system of 12 frees degree structure chart of grand/little combination.For the driving control of fine motion parallel robot, adopt multi-axis motion control card 27 to drive stepper motor 28, the rectilinear motion that is converted into each driver part of robot that rotatablely moves that drives ball-screw is realized.The PUL of the C1 terminal of motion control card 27 links to each other with direction pulse signal with the stepping pulse signal of driver respectively with DR signal, stepper motor 28 is three phase electric machines, so stepper motor driver is by signal U, V, W links to each other with stepper motor respectively, is used for stepper motor 28 is controlled.The adjusting that the segmentation of stepper motor 28 drives can utilize segmentation to select signal ON, and the various combination of OFF is regulated voluntarily.The step angle of stepping motor 28 is reduced, and positioning accuracy improves.For the control of grand moving robot 1, adopt the communication of RS-232 serial ports or TCP/IP procotol realization control computer 7 and robot controller, by revising the motion that each kinematic parameter changes grand moving robot 1.Stereomicroscopy sighting device 6 and little power detect and the feedback signal of reponse system feeds back to control computer 7 by image pick-up card 30 and data collecting card 29 respectively, judge spatial pose and the stressing conditions that this moment assembles micro part by the people, and determine next step how motion of driven machine people.

Claims (5)

1, a kind of grand/the little assembly system of 12 frees degree of little combination, it is characterized in that this system has 12 frees degree, comprise Combined Micro-gripper, little anchor clamps, stereomicroscopy sighting device, six major parts of control computer that the grand moving robot of 6DOF, 6DOF precise jiggle robot, integrated micro-power detect.
2, according to claim 1 a kind of grand/the little assembly system of 12 frees degree of little combination, it is characterized in that 12 frees degree be meant grand moving robot and precise jiggle robot number of degrees of freedom, and be 12, be embodied on the routing motion of the two.
3, according to claim 1 a kind of grand/the little assembly system of 12 frees degree of little combination, it is characterized in that the 6DOF precise jiggle robot has the parallel institution of 3-PPTTRS form, adopt the flexible hinge kinematic pair, drive part has stepper motor, driver, the ball-screw of band photoelectric encoder.
4, according to claim 1 a kind of grand/the little assembly system of 12 frees degree of little combination, it is characterized in that the Combined Micro-gripper that little clamping device adopts integrated micro-power to detect; The terminal executing agency of described micro clamping device is the machinery of the Piezoelectric Ceramic of two clamping different scale parts the decline hold down gag of a clamping device and a thin slice open type design of clamping device, pneumatic absorption that declines; Adopt semiconductor gauge as force sensing element, and dispose little force detection system of corresponding signal amplification and filter, the data that little force detection system obtains can be fed back to the micro clamping device control system, form closed-loop control; The telescoping mechanism that adopts pneumatic shuttle to drive, the compressed air that air compressor produces enters in the cylinder that is fixed on the support, promotes piston rod and does straight reciprocating motion, thereby realize stretching out and restoring of each clamper and hold down gag.
5, according to claim 1 a kind of grand/the little assembly system of 12 frees degree of little combination, it is characterized in that the stereomicroscopy sighting device is made of two varifocal microscopes that have CCD respectively.
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CN102873523A (en) * 2012-09-13 2013-01-16 中国科学院自动化研究所 Device for detecting micro-devices on line during assembly based on micro-vision
CN103158161A (en) * 2013-03-29 2013-06-19 中国科学院自动化研究所 Alignment and assembly device and method of microtubule and microsphere based on monocular microscopic vision
CN103157975A (en) * 2013-03-08 2013-06-19 苏州大学 Small component assembly system and assembly method thereof
CN103737586A (en) * 2014-01-12 2014-04-23 北京工业大学 Pneumatic type micro clamp for clamping lead of micro motor
CN103791838A (en) * 2014-03-07 2014-05-14 中国工程物理研究院激光聚变研究中心 Method for automatic measurement of pose of micro part
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CN113182797A (en) * 2021-06-02 2021-07-30 哈尔滨工业大学 Micro-assembly system based on double macro-micro combined robots
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CN102873523B (en) * 2012-09-13 2014-10-22 中国科学院自动化研究所 Device for detecting micro-devices on line during assembly based on micro-vision
CN102873523A (en) * 2012-09-13 2013-01-16 中国科学院自动化研究所 Device for detecting micro-devices on line during assembly based on micro-vision
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CN103157975B (en) * 2013-03-08 2015-10-28 苏州大学 Micro devices assembly system and assembly method thereof
CN103158161A (en) * 2013-03-29 2013-06-19 中国科学院自动化研究所 Alignment and assembly device and method of microtubule and microsphere based on monocular microscopic vision
CN103158161B (en) * 2013-03-29 2015-11-11 中国科学院自动化研究所 Microtubule microballoon based on monocular micro-vision is aimed at and assembling device and method
CN103955163B (en) * 2013-10-25 2016-08-17 北京理工大学 A kind of multiaxis towards microassembly system mixes quick control unit design method
CN103955163A (en) * 2013-10-25 2014-07-30 北京理工大学 Multi-shaft mixed rapid control unit design method for micro assembly system
CN103737586B (en) * 2014-01-12 2016-06-08 北京工业大学 For clamping the pneumatic type micro clamping device of micromotor lead-in wire
CN103737586A (en) * 2014-01-12 2014-04-23 北京工业大学 Pneumatic type micro clamp for clamping lead of micro motor
CN103791838A (en) * 2014-03-07 2014-05-14 中国工程物理研究院激光聚变研究中心 Method for automatic measurement of pose of micro part
CN103791838B (en) * 2014-03-07 2017-03-22 中国工程物理研究院激光聚变研究中心 Method for automatic measurement of pose of micro part
CN108406248A (en) * 2018-02-06 2018-08-17 大连理工大学 A kind of system structure of micro devices assembly equipment
CN108406739A (en) * 2018-03-23 2018-08-17 哈尔滨工业大学 A kind of liquid surface micro structures transmission method and its device based on Magnetic driving Micro-Robot
CN108406739B (en) * 2018-03-23 2020-10-02 哈尔滨工业大学 Liquid surface micro-component transmission method and device based on magnetically driven micro-robot
CN109514537A (en) * 2019-01-17 2019-03-26 中国工程物理研究院激光聚变研究中心 The complicated automatic microoperation arm-and-hand system of the micro- part of multi-configuration
CN109514537B (en) * 2019-01-17 2024-04-05 中国工程物理研究院激光聚变研究中心 Automatic micromanipulation manipulator system for complex multi-configuration micro-parts
CN109814514A (en) * 2019-03-25 2019-05-28 苏州小男孩智能科技有限公司 Assembly automation pipeline system with view touching fusion function
CN113182797A (en) * 2021-06-02 2021-07-30 哈尔滨工业大学 Micro-assembly system based on double macro-micro combined robots
CN114799803A (en) * 2022-05-25 2022-07-29 天津大学 Nine-shaft series connection type macro-micro combination assembling robot system

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Inventor after: Ye Xin

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