CN102873523A - Device for detecting micro-devices on line during assembly based on micro-vision - Google Patents
Device for detecting micro-devices on line during assembly based on micro-vision Download PDFInfo
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- 230000033001 locomotion Effects 0.000 claims abstract description 12
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- 239000000084 colloidal system Substances 0.000 description 1
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- 238000009826 distribution Methods 0.000 description 1
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- 239000003292 glue Substances 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
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Abstract
The invention discloses a device for detecting attitudes of micro-devices on line during assembly based on micro-vision. The device is suitable for detecting the attitudes of the micro-devices and aligning and assembling the micro-devices, comprises a control host, a three-path orthogonal micro-vision system, a vision system attitude adjusting mechanism, micro-device clamping devices, micro-device attitude adjusting motion mechanisms, a light source system and a digital prototype and has twenty-five degrees of freedom, wherein the two micro-devices are arranged on the corresponding clamping devices; the clamping devices are arranged on the corresponding motion mechanisms; and the digital prototype can feed back the attitudes of the micro-devices, which are detected on line, in real time and can observe the current assembly state of the micro-devices in 360-degree panoramic and zoom modes. Millimeter-level micro-parts can be conveniently and efficiently detected and assembled on line in a man-machine cooperation mode, the size range of the assembled parts is 10 to 12mu m, detection position accuracy is 3 to 5mu m, angle accuracy is 0.3 to 0.5 degree, and a wide application prospect and considerable social and economic benefits are achieved.
Description
Technical field
The invention belongs to little assembling and microoperation technical field, especially a kind of under the guiding of three road quadrature micro-visions, the device that two grade micro elements are carried out micron order precision spacial alignment and assembling.
Background technology
Little assembling is by the technology that grasps exactly, locates, the operation such as aligning becomes a plurality of little assembling parts complicated micro-system, mainly refer to tens microns assembling works of carrying out to the parts of mm size, MEMS (Micro-Electro-Mechanical Systems, MEMS) core content and the hot subject of research are with a wide range of applications and significance.Little mounting technology can be widely used in the fields such as electronics, space flight, biology, semiconductor integrated circuit, is subject to the generally attention of countries in the world.
Central China University of Science and Technology's application number is 01252465.4 the designed little assembly robot system of patent, by system's main control system, microoperation manipulator, vacuum micro-tool, consist of with the microscope of camera, can carry out automatically and semi-automatic operation and assembling work the submillimeter level particulate objects, its positioning accuracy can reach 1-5 μ m, three-dimensional range of movement can reach 50-150mm, has certain application prospect and social economic effect.But this system can only operate submillimeter particulate objects, and is helpless for the Assembly of the parts of several micron order sizes.In addition, this degree of freedom in system is less, does not have integrated digital prototyping system and various types of light sources in the system, and therefore, its flexibility ratio and versatility are restricted.
The gluing welding robot of the micro-step motor that Dalian University of Technology builds system, comprise 3 freedoms of motion, consisted of terminal integrated miniature clamp, the storage sebific duct of metal capillary point colloid system, CCD camera, two flexible light-conducting pipes in robot by 3 precise linear guides.Can finish automatic little assembling and the operation of some glue, but its free degree is less, can't finish the assembling of precision component spatial complex.
In a word, although both at home and abroad the assembling research work of micro parts is had made some progress, the vision system of these technology is relatively simple, mostly detect for the plane, and the spatial attitude detection difficult, precision is lower; In addition, the assembling device free degree is less, and is inadequate to the Complex Assembly flexibility ratio; Digital prototype system research based on physical unit in the microassembly system is less.
Summary of the invention
The object of the invention is to solve the defective that above-mentioned prior art exists, provide a kind of and can satisfy 10 μ m～12mm online device that detects and assemble of the micro element attitude between the area of observation coverage on a large scale.This device has 25 frees degree, can realize flexibly Space configuration task, detection position precision 3-5 μ m, angle precision 0.3～0.5 degree.And have the digital prototype system, can the narrow and small assembly space of comprehensive displaying in the confined state of micro element.
Outstanding feature of the present invention is: 1) based on the automatic zoom microlens of three road quadratures, realize that wide-measuring range and high accuracy spatial attitude detect; 2) have abundant attitude-adjusting system, have 25 frees degree, can be competent at complicated fittage and good flexibility; 3) collimated light source, annular light source, coaxial light source require optimum organization according to different observation, guarantee imaging effect; 4) have the digital prototype demo system, can show easily assembling process.
To achieve these goals, a kind of micro element based on micro-vision that the present invention proposes is assemblied in line detector, it is characterized in that, this device comprises: main control system, three road quadrature micro-vision systems, the vision system attitude-adjusting system, micro element clamping device and micro element Attitude control mechanism, wherein:
Described 3 road quadrature micro-vision systems comprise vertical active zoom microscope assembly 1, the first level is zoom microscope assembly 3 and the second level active zoom microscope assembly 5 initiatively, described vision system adopts gigabit Ethernet to be connected with main control system, initiatively initiatively zoom microscope assembly 5 arrangement that is orthogonal of zoom microscope assembly 3, the second level of described vertical active zoom microscope assembly 1, the first level, be used for obtaining three micro element picture signals on the orientation, and the micro element picture signal on these three orientation is sent to main control system;
Described vision system attitude-adjusting system comprises vertical microscope assembly guiding mechanism 2, the first horizontal microscope assembly guiding mechanism 4 and the second horizontal microscope assembly guiding mechanism 6, described vertical microscope assembly guiding mechanism 2, the first horizontal microscope assembly guiding mechanism 4, the second horizontal microscope assembly guiding mechanism 6 link to each other by the manual angular adjustment apparatus of two dimension respectively with between the described microscope assembly, are used for each road microscope assembly is adjusted;
Described micro element Attitude control mechanism comprises micro element A Attitude control mechanism 7 and micro element B Attitude control mechanism 10, is respectively applied to described micro element A9 and micro element B12 are carried out the attitude adjustment;
Described micro element clamping device comprises micro element A vacuum holding means 8 and micro element B vacuum holding means 11, described micro element A vacuum holding means 8 is installed in the micro element A Attitude control mechanism 7, described micro element B vacuum holding means 11 is installed in the micro element B Attitude control mechanism 10, is respectively applied to described micro element A9 and micro element B12 are carried out clamping;
Described micro element A9 and micro element B12 are installed in respectively on the corresponding clamping device;
Described main control system links to each other with described micro element Attitude control mechanism with serial ports, be used for three picture signals of the micro element that receives being carried out after image processes the relative position that obtains between the microscope assembly, give respectively the controllor for step-by-step motor shipping movement instruction of described micro element A Attitude control mechanism 7 and micro element B Attitude control mechanism 10, it is adjusted the relative position of described micro element A and B according to described motion control instruction.
The present invention is complete, a system with versatility and practicality that micro-vision detection technique, little mounting technology and Robotics are combined, detects and assembling work but the little part of grade of the realization man-machine coordination of convenience and high-efficiency is online.The size range of Assembly part can reach 10 μ m-12mm, detection position precision 3-5 μ m, angle precision 0.3～0.5 degree.Along with the fast development of MEMS, application prospect of the present invention and economic results in society are considerable.
Description of drawings
Fig. 1 is that the micro element that the present invention is based on micro-vision is assemblied in the line detector structural representation.
Fig. 2 is the relative position schematic diagram of micro element A and B.
Fig. 3 is the workflow diagram that uses apparatus of the present invention to detect and assemble online.
Fig. 4 is digital prototype demonstration of the present invention interface schematic diagram.
The specific embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Fig. 1 is that the micro element that the present invention is based on micro-vision is assemblied in the line detector structural representation, and among the figure: 1-is active zoom microscope assembly vertically; The vertical microscope assembly guiding mechanism of 2-; 3-the first level is the zoom microscope assembly initiatively; 4-the first horizontal microscope assembly guiding mechanism; 5-the second level is the zoom microscope assembly initiatively; 6-the second horizontal microscope assembly guiding mechanism; 7-4DOF (free degree) micro element A Attitude control mechanism; 8-micro element A vacuum holding means; 9-micro element A; 10-3DOF (free degree) micro element B Attitude control mechanism; 11-micro element B vacuum holding means; 12-micro element B; The 13-spot light; The 14-collimating mirror; The 15-speculum; The 16-annular light source.
Described on-line measuring device has 25 frees degree altogether, and wherein in three road quadrature vision systems, every road vision system and corresponding vertically microscope assembly guiding mechanism have 5 frees degree, are respectively three translations and two angle frees degree; In two micro element Attitude control mechanisms, one has 4 frees degree: three angles, a lifting, and one has 3 frees degree: three translations; Micro element B vacuum holding means has 3 manual angle-adjusting mechanisms.The distribution of the above-mentioned whole free degree had both taken into account observation and the adjustment of vision system, also convenient two the attitude adjustment of micro element in assembling process.
As shown in Figure 1, described micro element based on micro-vision is assemblied in line detector and comprises: main control system, and three road quadrature micro-vision systems, the vision system attitude-adjusting system, micro element clamping device and micro element Attitude control mechanism, wherein:
Described three road quadrature micro-vision systems comprise vertical active zoom microscope assembly 1, the first level initiatively zoom microscope assembly 3 and the second level active zoom microscope assembly 5, and described vision system adopts gigabit Ethernet to be connected with main control system;
Initiatively initiatively zoom microscope assembly 5 arrangement that is orthogonal of zoom microscope assembly 3, the second level of described vertical active zoom microscope assembly 1, the first level, be used for obtaining three micro element picture signals on the orientation, and the micro element picture signal on these three orientation is sent to main control system;
Described vision system attitude-adjusting system comprises vertical microscope assembly guiding mechanism 2, the first horizontal microscope assembly guiding mechanisms 4 and the second horizontal microscope assembly guiding mechanism 6;
Described vertical microscope assembly guiding mechanism 2, the first horizontal microscope assembly guiding mechanism 4, the second horizontal microscope assembly guiding mechanism 6 are the 3DOF platform regulating mechanism, link to each other by the manual angular adjustment apparatus of 2 dimensions respectively with between the described microscope assembly, be used for each road microscope assembly is adjusted, so that the optical axis of each road microscope assembly is substantially vertical with the micro element inspection surface, make the measured value of image space and the distance of cartesian space have preferably corresponding relation, and the micro element surface characteristics is within the field depth of microscope assembly.
Described micro element Attitude control mechanism comprises 4DOF (free degree) micro element A Attitude control mechanism 7 and 3DOF (free degree) micro element B Attitude control mechanism 10, is respectively applied to described micro element A9 and micro element B12 are carried out the attitude adjustment;
Described micro element clamping device comprises micro element A vacuum holding means 8 and micro element B vacuum holding means 11, described micro element A vacuum holding means 8 is installed in 4DOF (free degree) the micro element A Attitude control mechanism 7, described micro element B vacuum holding means 11 is installed in 3DOF (free degree) the micro element B Attitude control mechanism 10, is respectively applied to described micro element A9 and micro element B12 are carried out clamping;
Described micro element A9 and micro element B12 are installed in respectively on the corresponding clamping device, micro element A9 at three road microscope assemblies within sweep of the eye under the original state, micro element B12 is at the oblique upper of micro element A9, under the guiding of micro-vision system both progressively convergence aim to assemble action.
Vacuum holding means 8 by vacuum adsorption type between micro element A9 and its 4DOF (free degree) Attitude control mechanism 7 links to each other and adsorbs fixing; Vacuum holding means 11 by vacuum adsorption type between micro element B12 and its 3DOF (free degree) Attitude control mechanism 10 links to each other and adsorbs fixing.Wherein, described adjustment motion 7 is 4DOF, comprises 3 angles and a Z direction lifting free degree; Adjusting motion 10 has along the platform free degree of X, Y, three directions of Z; Described vacuum holding means 11 has the manual angle-adjusting mechanism of 3DOF.
Described main control system links to each other with described micro element Attitude control mechanism with serial ports, be used for three picture signals of the micro element that receives being carried out after image processes the relative position that obtains between the microscope assembly, give respectively 4DOF (free degree) micro element A Attitude control mechanism 7 in the described micro element Attitude control mechanism and the controllor for step-by-step motor shipping movement instruction of 3DOF (free degree) micro element B Attitude control mechanism 10, described micro element A Attitude control mechanism 7 and micro element B Attitude control mechanism 10 adjust the relative position of described micro element A and B according to the described motion control instruction that receives; Wherein, described image is processed and is comprised: the in the horizontal direction level of (x-y plane) upper micro element A of extraction and B and vertically edge, calculate Z-direction distance and perpendicularity on two horizontal directions, described perpendicularity is that the lower edge of the axis of micro element A and micro element B is respectively at the angle on XOZ plane and YOZ plane shown in Figure 2; On vertical direction (z-plane), extract respectively the upper surface feature of micro element A and B, thereby calculate axial distance and radial angle between them, described axial distance is the center of circle, upper surface of micro element A and the distance of the center of circle on XOY plane shown in Figure 2 of the terminal round hole of micro element B; Described radial angle is for take arbitrary respective flag of the upper artificial regulation of micro element A and B as initial point, respectively along vertical level, i.e. and Δ θ shown in Figure 2
ZDirection is rotated the differential seat angle that forms.
In order to guarantee the blur-free imaging of micro element, described micro element based on micro-vision is assemblied in line detector and also comprises light-source system, described light-source system further comprises: spot light 13, collimating mirror 14, two speculums 15 and annular light source 16, wherein, described spot light 13 is positioned at the second horizontal microscope assembly guiding mechanism 6 sides along the X positive direction, for generation of the seed light of scattering; Collimating mirror 14 is positioned at the focal length place, the place ahead of spot light 13, and the scattered light that is used for spot light 13 is sent becomes directional light; Speculum 15 is comprised of the identical speculum in two sides, lay respectively at vertical microscope assembly guiding mechanism 2 along the side of Y positive direction and the place ahead of X positive direction, the directional light that is used for collimating mirror 14 is sent is transferred turnback, so that it forms from the X of micro element A9 incident in the other direction is parallel backlight, namely form collimated back; Annular light source 16 is comprised of two identical circular lamps, is installed on respectively the initiatively end of zoom microscope assembly 5 of the first level active zoom microscope assembly 3 and the second level, is used to these two micro elements to provide illumination in the imaging of camera lens side.
Described light-source system adopts axis light, ring light, collimated back to be used in conjunction with, and wherein, the clear-cut that can make object backlight, but can lose textural characteristics carries out fuzziness evaluation in preset adjustment and the during focusing to the attitude of part before being unfavorable for assembling; Ring light can highlight article surface vein and hold and levy, be easy to realize that definition is to poly-and attitude adjustment, but because metal object is easily reflective, therefore the contrast of the edge of ring light is strong not, light-source system of the present invention is in conjunction with both characteristics, the scheme that adopts both to make up, and in different steps, light source is switched: an open loop shape light source 16 when 3 imaging of the first level active zoom microscope assembly; When 5 imaging of the second level active zoom microscope assembly, open annular light source 16 and collimated back; When vertical initiatively zoom microscope assembly 1 imaging, only open axis light, described axis light microscope assembly has the spot light external interface, behind the external spot light of described axis light microscope assembly, the light that produces in lens barrel by built-in optical element is exactly axis light.In addition, light-source system of the present invention adopts collimated light source to form backlight.In the described light-source system, at first, spot light 13 produces scattered light, forms directional light behind collimating mirror 14, then through projecting the behind of micro element A behind two speculums 15, forms backlight.
In order to make the user get more information about online detection and confined state, described micro element based on micro-vision is assemblied in line detector and also comprises digital prototype, described digital prototype and main control system employing kilomega network link and carry out transfer of data, and be used for online detection and the confined state of micro element are carried out real-time demonstration, the data owner of described transmission will comprise two perpendicularity, Z-direction distance, axial distance and radial angles between micro element.
The actual size of described micro element A and B is known, utilizes OpenGL to draw micro element in digital prototype, and further can be according to both attitudes of Data Control of receiving of control host computer.The digital prototype interface of this device as shown in Figure 3, it has the function that convergent-divergent, rotation, translation, data-driven show actual micro element assembling attitude.
The workflow diagram of Fig. 2 for using apparatus of the present invention to detect online and assemble, as shown in Figure 2, when using apparatus of the present invention to detect online and assemble:
At first, micro element A, micro element B are installed in respectively on micro element A vacuum holding means 8 and the micro element B vacuum holding means 11;
Then, system reset, the state of each several part in the checkout gear, at this moment, micro element A and micro element B are distant, and the multiplication factor of three microscope assemblies is transferred to minimum, the visual field is maximum, respectively the attitude of micro element A and micro element B is measured, and the information that measures is sent to main control system, and through under attitude-adjusting system control separately, two micro elements being carried out coarse alignment behind the attitude information of main control system image processing acquisition micro element; Through coarse alignment, when both close together, change the multiplication factor of three microscope assemblies, at this moment, the visual field of microscope assembly is little but accuracy of detection is high, again micro element A and micro element B are carried out attitude detection, and the information that measures sent to main control system, process through the main control system image behind the attitude information obtain micro element that the Z-direction between micro element A and the micro element B and axial distance and perpendicularity, radial angle deviation are sent to Attitude control mechanism 8 and 11 by serial ports, to carry out accurate aligning and the assembling between micro element A and micro element B.The attitude data that obtains in above-mentioned assembling process can show by the synchronous digital prototype that sends to.
The present invention is based on the automatic zoom microlens of three road quadratures, realize that wide-measuring range and high accuracy spatial attitude detect; Have abundant attitude-adjusting system, have 25 frees degree, can be competent at complicated fittage and good flexibility; Collimated light source, annular light source, coaxial light source require optimum organization according to different observation, guarantee imaging effect; Have the digital prototype demo system, can show easily assembling process.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. the micro element based on micro-vision is assemblied in line detector, it is characterized in that, this device comprises: main control system, three road quadrature micro-vision systems, the vision system attitude-adjusting system, micro element clamping device and micro element Attitude control mechanism, wherein:
Described three road quadrature micro-vision systems comprise vertical active zoom microscope assembly (1), the first level is zoom microscope assembly (3) and the second level active zoom microscope assembly (5) initiatively, described vision system adopts gigabit Ethernet to be connected with main control system, described vertical active zoom microscope assembly (1), the first level is zoom microscope assembly (3) initiatively, initiatively zoom microscope assembly (5) arrangement that is orthogonal of the second level, be used for obtaining three micro element picture signals on the orientation, and the micro element picture signal on these three orientation is sent to main control system;
Described vision system attitude-adjusting system comprises vertical microscope assembly guiding mechanism (2), the first horizontal microscope assembly guiding mechanism (4) and the second horizontal microscope assembly guiding mechanism (6), described vertical microscope assembly guiding mechanism (2), the first horizontal microscope assembly guiding mechanism (4), the second horizontal microscope assembly guiding mechanism (6) link to each other by the manual angular adjustment apparatus of two dimension respectively with between the described microscope assembly, are used for each road microscope assembly is adjusted;
Described micro element Attitude control mechanism comprises micro element A Attitude control mechanism (7) and micro element B Attitude control mechanism (10), is respectively applied to described micro element A (9) and micro element B (12) are carried out the attitude adjustment;
Described micro element clamping device comprises micro element A vacuum holding means (8) and micro element B vacuum holding means (11), described micro element A vacuum holding means (8) is installed in the micro element A Attitude control mechanism (7), described micro element B vacuum holding means (11) is installed in the micro element B Attitude control mechanism (10), is respectively applied to described micro element A (9) and micro element B (12) are carried out clamping;
Described micro element A (9) and micro element B (12) are installed in respectively on the corresponding clamping device;
Described main control system links to each other with described micro element Attitude control mechanism with serial ports, be used for three picture signals of the micro element that receives being carried out after image processes the relative position that obtains between the microscope assembly, give respectively the controllor for step-by-step motor shipping movement instruction of described micro element A Attitude control mechanism (7) and micro element B Attitude control mechanism (10), it is adjusted the relative position of described micro element A and B according to described motion control instruction.
2. device according to claim 1, it is characterized in that, described device has 25 frees degree altogether: described vertical microscope assembly guiding mechanism (2), the first horizontal microscope assembly guiding mechanism (4), the second horizontal microscope assembly guiding mechanism (6) are the 3-dimensional freedom platform guiding mechanism; Described micro element A Attitude control mechanism (7) is four-degree-of-freedom, comprises three angles and a Z direction lifting free degree; Described micro element B Attitude control mechanism (10) has along the platform free degree of X, Y, three directions of Z; Described micro element B vacuum holding means (11) has the manual angle-adjusting mechanism of Three Degree Of Freedom.
3. device according to claim 1, it is characterized in that, described vertical microscope assembly guiding mechanism (2), the first horizontal microscope assembly guiding mechanism (4), the second horizontal microscope assembly guiding mechanism (6) are adjusted each road microscope assembly, so that the optical axis of each road microscope assembly is substantially vertical with the micro element inspection surface, make the measured value of image space and the distance of cartesian space have preferably corresponding relation, and the micro element surface characteristics is within the field depth of microscope assembly.
4. device according to claim 1 is characterized in that, described micro element A vacuum holding means (8) and micro element B vacuum holding means (11) are vacuum adsorption type.
5. device according to claim 1 is characterized in that, described image is processed and comprised: in the horizontal direction, i.e. x-y plane, the level of upper extraction micro element A and B and vertical edge, calculates on two horizontal directions Z-direction apart from and perpendicularity; At vertical direction, i.e. z-plane, the upper upper surface feature of extracting respectively micro element A and B, thus calculate axial distance and radial angle between them.
6. device according to claim 5 is characterized in that, described perpendicularity is that the lower edge of the axis of micro element A and micro element B is respectively at the angle on XOZ plane and YOZ plane; Described axial distance is the center of circle, upper surface of micro element A and the distance of the center of circle on XOY plane of the terminal round hole of micro element B; Described radial angle rotates the differential seat angle that forms along the vertical level direction respectively for the correspondence of taking up an official post with micro element A and B is masked as initial point.
7. device according to claim 1 is characterized in that, described on-line measuring device also comprises light-source system, described light-source system comprises: spot light (13), collimating mirror (14), two speculums (15) and annular light source (16), wherein:
Described spot light (13) is positioned at the second horizontal microscope assembly guiding mechanism (6) along the side of X positive direction, for generation of the seed light of scattering;
Collimating mirror (14) is positioned at the focal length place, the place ahead of spot light (13), and the scattered light that is used for spot light (13) is sent becomes directional light;
Speculum (15) is comprised of the identical speculum in two sides, lay respectively at vertical microscope assembly guiding mechanism (2) along the side of Y positive direction and the place ahead of X positive direction, the directional light that is used for collimating mirror (14) is sent is transferred turnback, so that it forms from the X of micro element A (9) incident in the other direction is parallel backlight, namely form collimated back;
Annular light source (16) is comprised of two identical circular lamps, be installed on respectively the initiatively end of zoom microscope assembly (5) of the first level active zoom microscope assembly (3) and the second level, be used to these two micro elements to provide illumination in the imaging of camera lens side.
8. device according to claim 7 is characterized in that, an open loop shape light source (16) when the imaging of the first level active zoom microscope assembly (3); When the imaging of the second level active zoom microscope assembly (5), open annular light source (16) and collimated back; Only open axis light when vertical initiatively zoom microscope assembly (1) imaging, wherein, behind the external spot light of described axis light microscope assembly, the light that produces in lens barrel by built-in optical element is exactly axis light.
9. device according to claim 1, it is characterized in that, described on-line measuring device also comprises digital prototype, and described digital prototype and main control system employing kilomega network link and carry out transfer of data, and are used for online detection and the confined state of micro element are carried out real-time demonstration; The data of described transmission comprise two perpendicularity, Z-direction distance, axial distance and radial angles between micro element.
10. device according to claim 1 is characterized in that, when described on-line measuring device work:
At first, micro element A, micro element B are installed in respectively on micro element A vacuum holding means (8) and the micro element B vacuum holding means (11);
Then, system reset, the state of each several part in the checkout gear, at this moment, micro element A and micro element B are distant, and the multiplication factor of three microscope assemblies is transferred to minimum, and the visual field is maximum, respectively the attitude of micro element A and micro element B is measured, and the information that measures is sent to main control system; And through under attitude-adjusting system control separately, two micro elements being carried out coarse alignment behind the attitude information of main control system image processing acquisition micro element;
Then, through behind the coarse alignment, when both close together, change the multiplication factor of three microscope assemblies, at this moment, the visual field of microscope assembly is little but accuracy of detection is high, again micro element A and micro element B are carried out attitude detection, and the information that measures sent to main control system, process through the main control system image behind the attitude information obtain micro element the Z-direction between micro element A and the micro element B and axial distance and perpendicularity, the radial angle deviation sends to Attitude control mechanism (8) and (11) by serial ports, to carry out accurate aligning and the assembling between micro element A and micro element B;
Simultaneously, the attitude data synchronized transmission that obtains in the assembling process is shown to digital prototype.
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