CN1922949A - Support pin holding device and substrate supporting device - Google Patents

Support pin holding device and substrate supporting device Download PDF

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Publication number
CN1922949A
CN1922949A CNA2005800053243A CN200580005324A CN1922949A CN 1922949 A CN1922949 A CN 1922949A CN A2005800053243 A CNA2005800053243 A CN A2005800053243A CN 200580005324 A CN200580005324 A CN 200580005324A CN 1922949 A CN1922949 A CN 1922949A
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CN
China
Prior art keywords
fulcrum post
support pin
pin holding
holding device
advance
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Granted
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CNA2005800053243A
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Chinese (zh)
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CN100556269C (en
Inventor
近藤毅
伊藤明伸
须原信介
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Fuji Corp
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Fuji Machine Manufacturing Co Ltd
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Publication of CN1922949A publication Critical patent/CN1922949A/en
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Publication of CN100556269C publication Critical patent/CN100556269C/en
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manipulator (AREA)

Abstract

A support pin holding device capable of rapidly holding and releasing a support pin at low cost. A holding device body (360) openably holds a holding claw group (362) by a liftably held forward/backward movement member (364). When the holding device body (360) is lowered, the support pin (250) is fitted into a fitting hole (386) and engaged with the forward/backward movement member (364) to push the member from a non-acting position to near an acting position. By the relative movement of a motion converting mechanism (430) to the holding device body (360), the motion converting mechanism closes the holding claw group (362) to hold the support pin (250), and at a locking device (432), engagement parts (482) and (484) are moved to locking positions. When the holding device body (360) rises, the engagement parts (482) and (484) are engaged with locking surfaces to hold the forward/backward movement member (364) at the acting position, and when the next holding device body (360) is lowered, the support pin (250) stops the lowering of the forward/backward movement member (364) and pushes the member to near the acting position. Thus, the engagement of the engagement parts (482) and (484) is released, and when the holding device body (360) rises, the forward/backward movement member (364) moves to the non-acting position so as to open the holding claw group (362).

Description

Support pin holding device and substrate supporting device
Technical field
The present invention relates to will plate-shaped members such as supporting printed base plate etc. the fulcrum post assembling, dismantle in the support pin holding device of pin supporting member, particularly relate to the improvement that makes the opening and closing device that a plurality of support pin holding members of controlling, unclamping fulcrum post open and close.
Background technology
Possess a plurality of support pin holding members, control, unclamp the support pin holding device of fulcrum post, be well known that record in the patent documentation 1 for example by the switching of these support pin holding members.This support pin holding device possesses a pair of support pin holding member, and these support pin holding members open and close by means of the opening and closing device that with the vacuum reservoir is drive source, thereby controls, unclamps fulcrum post.
Patent documentation 1: the spy opens the 2001-111296 communique
Summary of the invention
The problem that invention will solve
Yet, in this support pin holding device, need be used for the support pin holding member switching special use as the vacuum reservoir of actuator and control to the supply of the negative pressure of this vacuum reservoir, the control device of blocking-up, cost height.Also have, the controlling of fulcrum post, unclamp based on from the command signal of control device and be subjected to electric control, thereby corresponding to the amount of the confirming operation that carries out the giving and accepting of signal, opening and closing device etc., the required time of controlling, unclamp of the fulcrum post that the support pin holding member is related can be elongated.
The present invention is that background proposes with above-mentioned situation, and its problem is to provide at an easy rate a kind of support pin holding device of controlling, unclamping that can carry out fulcrum post fast.
Be used to solve the scheme of problem
In order to solve above-mentioned problem, the invention is characterized in, control the support pin holding device that be assemblied in the fulcrum post on the pin supporting member and comprise: (a) grasping device body; (b) by to be opened/closedly controlling the member group by what this grasping device body was held in that relatively-movable a plurality of support pin holding member forms directly or indirectly; (c) can keep by above-mentioned grasping device body with moving, by means of with the engaging of the engagement member that moves along with above-mentioned grasping device body and relatively moving of above-mentioned pin supporting member and with respect to this grasping device body, from the actuating member of non-working position to the active position action; And (d) and this actuating member interlock mechanically,, just alternately control the member group and switch to the state of closing, or from closing the switching device shifter of the state state of switching to out from opening state with above-mentioned whenever this actuating member action 1 time.
The invention effect
Anchor is controlled member and can directly be kept by the grasping device body, for example remains on the actuating member, also can be kept indirectly by the grasping device body.Also have, actuating member can be the revolving member that rotation axis rotates that rotates, and also can be the advance and retreat member in the direction of principal axis advance and retreat.Have again, control member group switching, the grasping device body is moved, the pin supporting member is moved, two sides are moved in order to make.
Along with relatively moving of grasping device body and pin supporting member, actuating member and engagement member engage, and actuating member is moved to active position from non-working position, move mechanically interlock with this, make to control the member group and open and close, and control, unclamp fulcrum post.Support pin holding device assembles fulcrum post, dismantle in the pin supporting member, therefore, relatively moving of support pin holding device and pin supporting member is necessary, utilize this necessary relatively moving, just can control, unclamp fulcrum post, special-purpose actuator promptly need not be set for the switching of support pin holding member, can constitute support pin holding device at an easy rate.Also have,, do not need the related electric control of control device, can control, unclamp fulcrum post fast for the switching of support pin holding member.
The mode of invention
Below, the several inventions that can be used as the patent request of illustration in this application (below be sometimes referred to as " can ask invention ".Can ask to invent " the present invention " or " the present application " of comprising at least as the invention of having put down in writing in claims, but have also comprise the subordinate concept invention of the present application, the upperseat concept of the present application or the invention of other notions.) mode, they are described.Each mode is the same with the claim item, by separately, to every pair with sequence number, quote other sequence number as required, put down in writing with this form.This just can ask the understanding of inventing easier in order to make, and does not mean that the thing that formation can ask the combination of the inscape of inventing to only limit to put down in writing in the following.Promptly, can ask to invent the record that consider every appended record, embodiment in light of actual conditions waits and explains, under situation according to this explanation, in every mode the mode of additional again other inscape gained and from every mode the mode of deletion inscape gained all can be used as the mode of inventing of can asking.
In addition, in the following, (1) item is equivalent to claim item 1, (2) item is equivalent to claim item 2, (3) item is equivalent to claim item 3, (4) item is equivalent to claim item 4, (5) item is equivalent to claim item 5, (6) item is equivalent to claim item 6, and (7) item is equivalent to claim item 7, and (8) item is equivalent to claim item 8, (9) item is equivalent to claim item 9, (10) item is equivalent to claim item 10, and (11) item is equivalent to claim item 11, and (12) item is equivalent to claim item 12, (13) item is equivalent to claim item 13, (14) item is equivalent to claim item 14, and (15) item is equivalent to claim item 15, and (16) item is equivalent to claim item 16, (17) item is equivalent to claim item 17, (50) Xiang a part is equivalent to claim item 18, and the remainder of (50) item is equivalent to claim item 19, and (50) item and (40) item are equivalent to claim item 20 altogether.
(1) a kind of support pin holding device is used to control the fulcrum post that be assemblied on the pin supporting member, comprising:
The grasping device body;
By to be opened/closedly controlling the member group by what this grasping device body was held in that relatively-movable a plurality of support pin holding member forms directly or indirectly;
Can keep by above-mentioned grasping device body with moving, by means of with the engaging of the engagement member that moves along with above-mentioned grasping device body and relatively moving of above-mentioned pin supporting member and with respect to this grasping device body, from the actuating member of non-working position to the active position action; And
With this actuating member interlock mechanically, whenever this actuating member action 1 time, just alternately control the member group and switch to the state of closing from opening state with above-mentioned, or from closing the switching device shifter of the state state of switching to out.
(2) according to (a 1) support pin holding device of putting down in writing, wherein, above-mentioned actuating member sets in advance along with above-mentioned member group and the above-mentioned fulcrum post of controlling relatively moves and control controlling of the related fulcrum post of member group and become possible position and engage with fulcrum post, by means of fulcrum post from above-mentioned non-working position on the position that above-mentioned active position moves, fulcrum post works as above-mentioned engagement member.
Fulcrum post for example can engage with actuating member with its leading section, also can engage with the part beyond the leading section.
According to the support pin holding device of this record, actuating member is controlled the fulcrum post of object parts itself by means of conduct and is moved, thereby compares with the occasion that is made of engagement member the parts that are different from fulcrum post, can simplify support pin holding device, reduces cost.
(3) according to the support pin holding device of (a 2) record, wherein, above-mentioned actuating member is arranged on above-mentioned central portion the inside of controlling the member group, is arranged on by means of having entered the above-mentioned position of controlling the leading section of the fulcrum post in the member group and moving.
" central portion the inside " comprises nearby portion the inside of central authorities the inside and central authorities.In the actuating member, can with control the coaxial setting of member group and comprise by the integral body of operating member, also can be provided with by operating member with the pieceable position of the leading section of fulcrum post, other parts are then in the direction of intersecting with the switching axis of controlling the member group setting of staggering.In the former occasion, actuating member will be arranged on central authorities the inside of controlling the member group, in the latter's occasion, is arranged on nearby portion the inside of central authorities.
According to the support pin holding device of this record, in central portion the inside of controlling the member group actuating member is set and gets final product, the occasion engaging with the leading section part in addition of fulcrum post can not be provided with and leading section part engaging portion in addition.
(4) according to the support pin holding device of any record in (1) to (3), wherein, above-mentioned switching device shifter possesses:
Is the motion converter of above-mentioned actuating member above-mentioned motion changing mechanism of controlling member group's switching campaign; And
Above-mentioned actuating member by means of be pulled to engaging of above-mentioned engagement member 1 secondary action position nearby the time, this actuating member is remained on above-mentioned active position, secondly when being pushed 1 time again, removing its maintenance and allow actuating member to reset into the actuating member control device of non-working position.
If control the member group be switched to the state of opening state actuating member be pulled to from non-working position active position near, then control the member group and be switched and control fulcrum post to closing state, and actuating member is maintained at active position and keeps this and close state.And secondly,, then control the member group and be switched and unclamp fulcrum post to opening state if actuating member is pushed and resets into non-working position.Control the member group from opening state to the switching of closing state, from closing state to the switching of opening state, can both be by actuating member being shifted onto nearby carrying out of active position, carry out controlling of fulcrum post and unclamp by the identical action that relatively moves of grasping device body and pin supporting member.
(5) according to (a 4) support pin holding device of putting down in writing, wherein, above-mentioned actuating member control device is that a side who is included in said apparatus body and the above-mentioned actuating member goes up the locking device of locking component that is provided with and the locked member that is provided with on the opposing party, locked member possesses by locking component and locks, thereby above-mentioned actuating member is remained on locked of above-mentioned active position and locking component led, along with 1 time of above-mentioned actuating member is moved caused locking component and relatively moving of locked member and locking component is directed to the latched position of the above-mentioned locked portion of locking, the locking of the related locked portion of the member that unlocks along with moving relatively for following 1 time is directed to locking component the guide part of original position.
If the employing locking device, the shape by locked member selected can easily be realized the action of the hope of locking component, can easily be transformed to the motion of actuating member to relatively moving of grasping device body and pin supporting member.
(6) according to (a 5) support pin holding device of putting down in writing, wherein, above-mentioned locking component is to possess a pair of arm that rotates axial region, roughly extend in vertical direction from this rotations axial region and in the pair of engaging portion of the free end setting of these arms, remain on twist-lock member on the side in above-mentioned grasping device body and the above-mentioned actuating member rotationally to rotate axial region, above-mentioned locked member possesses the common mutually a pair of guide part that above-mentioned pair of engaging portion is led.
Rotate axial region, a pair of arm and pair of engaging portion and can be set to one.According to this support pin holding device, can make simply constructed thing to locking component.
Also roller can be set pivotally respectively in pair of engaging portion, with its as the revolution junction surface, the friction that alleviates junction surface and guide part.
(7) according to the support pin holding device of (6) record, wherein, above-mentioned a pair of guide part has makes above-mentioned pair of engaging portion along with 2 actions of above-mentioned actuating member, comprise above-mentioned locked portion, carries out the shape of the predefined motion that rotates.
According to this support pin holding device, locking component is easily carried out with respect to the locking of locked portion and 2 kinds of different actions of latch-release along with 2 actions of actuating member.
(8) according to the support pin holding device of any record in (1) to (7), wherein, above-mentioned to control the member group be with respect to symmetry axis and the thing that opens and closes axisymmetrically.
According to this support pin holding device, for example,, control the member group energy and do not hinder this ground, location not control for the fulcrum post that axis has been positioned.Also have, one of a plurality of support pin holding members are moved closing direction, remaining is moved to closing direction.
Control the member group and make axisymmetrically the thing that opens and closes not necessarily, for example, asymmetric with respect to the axis of fulcrum post at fulcrum post by the shape of cross section of handle part, for example, have the occasion of eccentric shape with respect to the bearing-surface of supporting supporting object parts, control the member group and make with respect to open and close the thing that axle opens and closes asymmetricly.
(9) according to the support pin holding device of any record in (1) to (8), wherein, above-mentioned actuating member is the advance and retreat member in the direction of principal axis advance and retreat.
According to this support pin holding device, for example, the occasion of making revolving member with actuating member compares, and the direction that can intersect at the axis with the grasping device body constitutes support pin holding device compactly.
(10) according to the support pin holding device of (a 8) record, wherein, above-mentioned actuating member is to be provided on the above-mentioned symmetry axis, along the advance and retreat member of these symmetry axis advance and retreat.
In the actuating member of this support pin holding device, comprise by the integral body of operating member being positioned at central authorities the inside of controlling the member group, can constitute support pin holding device more compactly.
(11) according to the support pin holding device of any record in (1) to (10), comprising: with respect to the grasping device body, the utensil of energizing (means) of to the direction of above-mentioned non-working position above-mentioned actuating member being energized from above-mentioned active position.
The utensil of energizing comprises elastic component and gravity such as spring.
The actuating member resistance is energized the energizing power of utensil and is moved to active position from non-working position, and dependence is energized energizing of utensil and returned non-working position.
(12) according to the support pin holding device of (a 11) record, wherein, the above-mentioned utensil of energizing comprises the elastic component that is provided between above-mentioned actuating member and the above-mentioned grasping device body.
According to this support pin holding device, can make actuating member reset into non-working position really and apace by means of the elastic force of elastic component.
(13) according to the support pin holding device of any record in (9) to (12), wherein, above-mentioned motion changing mechanism comprises that an end is relative with in above-mentioned a plurality of support pin holding members each and connects rotationally, and a plurality of connection link rods of connecting rotatably each other of the other end and to these above-mentioned the other end that connect link rods at the removable but guiding utensil that can not lead movably in the direction of intersecting with this advance and retreat direction of the advance and retreat direction of above-mentioned advance and retreat member.
According to this support pin holding device, a plurality of support pin holding members are moved simultaneously.Also have,, just can make other support pin holding members also carry out on-off action by connecting link rod if make one of a plurality of support pin holding members carry out on-off action.If constitute a plurality of support pin holding members and a plurality of connection link rod axisymmetrically, a plurality of support pin holding members shaft are moved symmetrically, make and control the member group and open and close axisymmetrically.
(14) according to the support pin holding device of any record in (9) to (13), wherein, fulcrum post works as above-mentioned engagement member, above-mentioned advance and retreat member possesses with above-mentioned fulcrum post chimeric, substantially prevent the embedded hole of the inclination of fulcrum post, above-mentioned a plurality of support pin holding members engage under the state of the relative tilt of allowing this fulcrum post with above-mentioned fulcrum post with free end separately.
By with the chimeric centering of carrying out fulcrum post of embedded hole, and the support pin holding member is controlled fulcrum post under the state that has carried out centering.By centering, just can correctly be configured in fulcrum post the predefined position of pin supporting member etc.
The advance and retreat member be possess with fulcrum post chimeric and substantially prevent the occasion of embedded hole of the inclination of fulcrum post, as mentioned above, the location of fulcrum post is by carrying out with the chimeric of embedded hole, as long as thereby prevent that the support pin holding member from departing from from the embedded hole of fulcrum post, make 1 also passable.In this occasion, the support pin holding member does not carry out " controlling ", thereby should be called to break away from and prevent member.
(15) according to (a 4) support pin holding device of putting down in writing, wherein, above-mentioned actuating member be with above-mentioned grasping device body direction of principal axis can advance and retreat the chimeric advance and retreat member in ground, above-mentioned a plurality of support pin holding member can remain on this advance and retreat member with relatively moving, on the other hand, on above-mentioned grasping device body, be provided with along with advance and retreat retreating of member and with above-mentioned a plurality of support pin holding members at least 1 engage, thereby make this at least 1 to closing the service portion that direction moves, this service portion constitutes at least a portion of above-mentioned motion changing mechanism.
This feature can with above-mentioned (5) to (14) in the characteristics combination of any record get up to adopt.
(16) according to (a 15) support pin holding device of putting down in writing, wherein, above-mentioned service portion can be by means of above-mentioned grasping device body moves in the direction of intersecting with the advance and retreat direction of above-mentioned advance and retreat member by being arranged to, and is made of at the movable action member of energizing with the approaching direction of above-mentioned at least 1 support pin holding member the utensil of energizing.
According to this support pin holding device, for example, the support pin holding member can be controlled fulcrum post really.Service portion also can be fixedly installed on the grasping device body.But, in this occasion, in the occasion that a plurality of support pin holding members shaft are moved symmetrically, angle when the support pin holding member is closed the most decides according to the configuration of service portion, because the foozle of the component parts of support pin holding device, assembly error etc., if closing angle and can producing deviation of support pin holding member not enough, produces the state of affairs that can not control fulcrum post sometimes.By contrast, if making by the movable action member, service portion constitutes, the thing of energizing by the utensil of energizing, be arranged to the movable action member to make the support pin holding member further to move to closing direction from the predetermined position of controlling fulcrum post, even thereby component parts foozle etc. is arranged, closing angle also can be sufficient, can make the support pin holding member control fulcrum post really.After the support pin holding member was controlled fulcrum post, the resistance of movable action member was energized the energizing power of utensil and is moved, thereby the support pin holding member is too moved to closing direction, and support pin holding member, fulcrum post can not damage.
The movable action member can make around with the rotation effect member of the advance and retreat direction pivot axis of intersecting of advance and retreat member, also can make the straight line mobile model effect member that moves at the direction straight line that intersects with the advance and retreat direction of the member of advancing and retreat.
(17) according to the support pin holding device of any record in (1) to (16), wherein, above-mentioned a plurality of support pin holding members are to control member around the rotating rotation of an axis respectively.
The support pin holding member also can be made the direction straight line that intersects at the axis with fulcrum post and move, control, unclamp the straight line mobile model of fulcrum post and control member, but, control member, just can constitute support pin holding device simple and compactly if make rotation.
(20) a kind of fulcrum post comprises:
The base station that has inner space in the inboard;
On this base station, base end part is positioned at above-mentioned inner space and can be held at direction of principal axis with relatively moving, to bring in the pin member of supporting printed base plate before the outstanding protuberance of base station;
In the above-mentioned inner space of above-mentioned base station, can set at least with lifting, be positioned at base station under the state on the pin supporting member of magnetic material system, magnetically attracted by this pin supporting member, based on this magnetic attraction, add the permanent magnet portion of the power on the pin supporting member that this base station is pressed in to base station; And
On at least one side of the part that is arranged in above-mentioned inner space of above-mentioned pin member and above-mentioned permanent magnet portion, be provided with, in the occasion that has added tensile force to the pin member, this tensile force as this permanent magnet portion is lifted with respect to above-mentioned pin supporting member, the power of leaving from the pin supporting member and pass to the force transfering device of above-mentioned permanent magnet portion meanwhile.
Printed base plate comprise carried electronic circuit component as the printed base plate of the plate that has formed printed wiring, in given position and finished through being welded to connect install as the printed base plate of product and be in semi-finished product in the process between them.
Permanent magnet portion can only be made of permanent magnet, also can be by permanent magnet and keep the member of permanent magnet to constitute regularly.
Permanent magnet portion can be provided in the inner space of base station at least with lifting, when the pin member has added tensile force, at first, permanent magnet portion is lifted, base station is left, from pin supporting member dismounting fulcrum post under the state that this magnetic attraction has reduced from the pin supporting member.
If making permanent magnet portion leaves from the pin supporting member, just can dismantle fulcrum post from the pin supporting member, but, if permanent magnet portion integral body is left from the pin supporting member, the tensile force that surpasses to the magnetic attraction of permanent magnet portion mass action is worked, promptly need big tensile force.By contrast, in the occasion that permanent magnet portion is lifted, than the little tensile force of the occasion that permanent magnet portion is all left just, littler tensile force just can make permanent magnet leave from the pin supporting member.Also have, when permanent magnet portion was lifted, base station and pin member can not tilt, can with by the identical posture dismounting fulcrum post of the state of pin supporting members supports.
For example open to have put down in writing in the 2003-283197 communique and have permanent magnet, be fixed on fulcrum post on the pin supporting member by magnetic attraction the spy.In the fulcrum post of this communique record, on the bar that is provided with rotationally on the fulcrum post, fixing permanent magnet.The action of controlling when fulcrum post is controlled in the support pin holding device utilization with a pair of handle part is rotated bar, makes permanent magnet away from the pin supporting member, from pin supporting member dismounting fulcrum post., in this fulcrum post, rotate, need to strengthen the action of controlling of support pin holding device, thereby support pin holding device to maximize in order to make bar, and fulcrum post control, decontrol spended time, this is the problem that exists.Also have, the occasion at the back side that has been mounted electronic circuit component of supporting printed base plate, bar might with circuit block be installed interfered, bearing position is restricted, this is the problem that exists.
According to this fulcrum post, do not produce such problem, can reduce magnetic attraction and fulcrum post is easily left from the pin supporting member.
And, can utilize generally the simple extension action of the fulcrum post that carries out during from the dismounting of pin supporting member at fulcrum post that permanent magnet portion is lifted, can not prolong the needed activity duration of dismounting of fulcrum post and reduce magnetic attraction, easily dismantle fulcrum post.For controlling of (20) to (31) fulcrum post of putting down in writing, can use support pin holding device of (1) to (a 17) record, but be not limited thereto, so long as can control fulcrum post, add the support pin holding device of tensile force, can use.Also can assemble, dismantle by the operator.
(21) according to the fulcrum post of (20) record, wherein, above-mentioned permanent magnet portion can be provided in the above-mentioned inner space with respect to above-mentioned base station with moving freely.
Permanent magnet portion also can be arranged to only can lift in inner space, and but, if can set, the constraint of permanent magnet portion is just few, sets with the state that can lift easily with freely relatively moving.
(22) according to fulcrum post of (20) or (a 21) record, wherein, above-mentioned base station possesses the open recess in bottom, with it as above-mentioned inner space.
Between permanent magnet portion that sets in the base station inner space and the pin supporting member, magnetic attraction works easily, and base station can be crushed on the pin supporting member really.
(23) according to the fulcrum post of any record in (20) to (22), wherein, above-mentioned permanent magnet portion and above-mentioned base station possess respectively under permanent magnet portion and the immediate state of above-mentioned pin supporting member and engage one another, above-mentioned magnetic attraction is passed to base station, base station is pressed in power transfer part on the pin supporting member.
Permanent magnet portion can contact with the pin supporting member as long as magnetic attraction works, and also can not contact.In the former occasion, can directly contact, also can indirect contact.
(24) according to (a 23) fulcrum post of putting down in writing, wherein, above-mentioned base station possesses the open recess in bottom, with it as above-mentioned inner space, at least a portion of this recess is covered by base plate, works as above-mentioned power transfer part in the bottom surface of the top and above-mentioned permanent magnet portion of this base plate.
According to this fulcrum post, can fulcrum post stably be assemblied on the pin supporting member being passed base station from permanent magnet portion near the pin supporting member based on the thrust of magnetic attraction.
Base plate being set not necessarily at recess, also can be open.In this occasion, for example, the junction surface be positioned at inner space is set on base station, and in permanent magnet portion, be provided with this junction surface from the junction surface that the opposition side of pin supporting member engages, make it add thrust.These junction surfaces constitute the power transfer part.
(25) according to the fulcrum post of (a 24) record, wherein, above-mentioned base plate is made up of nonmagnetic substance.
When base station transmitted thrust, base plate can not be magnetized in permanent magnet portion, and permanent magnet portion and base plate can magnetically not attract mutually, and it is big that the tensile force in the time of avoiding permanent magnet portion is lifted becomes.
(26) according to the fulcrum post of any record in (20) to (25), wherein, the bottom surface of above-mentioned base station is covered by rubber layer.
Rubber is a kind of of the high high friction material of coefficient of friction.The bottom surface of base station is covered by high friction material layer, just can obtain big frictional force between fulcrum post and pin supporting member.Therefore, for fulcrum post, even work in the power of the direction of intersecting with this axis, the position also is difficult for departing from, and can stably support printed base plate.Also have, high friction material layer also works as buffer, when fulcrum post is positioned on the pin bearing-surface of pin supporting member, fulcrum post accommodation device etc., can prevent to damage them.
(27) according to the fulcrum post of any record in (20) to (26), wherein, second junction surface that above-mentioned force transfering device possesses first junction surface of moving with the part that is positioned at above-mentioned inner space of above-mentioned pin member and moves with above-mentioned permanent magnet portion, these first junction surfaces and second junction surface engage one another in the position that the position of making a concerted effort from the magnetic attraction that works between above-mentioned permanent magnet portion and the above-mentioned pin supporting member departs from, and make permanent magnet portion produce flywheel moment.
Be used to make it to produce the tensile force of flywheel moment, than making permanent magnet portion integral body just little at one stroke from the tensile force that the pin supporting member leaves.
(28) according to the fulcrum post of any record in (20) to (27), wherein, above-mentioned force transfering device possesses a pair of first junction surface on the part that is positioned at above-mentioned inner space that is arranged on above-mentioned pin member regularly and is arranged on a pair of second junction surface in the above-mentioned permanent magnet portion regularly, a side and the opposing party in a side in above-mentioned a pair of first junction surface and the opposing party and above-mentioned a pair of second junction surface, the most approaching and under above-mentioned base station adds state based on the power of above-mentioned magnetic attraction, face toward respectively at above-mentioned permanent magnet portion and above-mentioned pin supporting member in the spaced-apart different distance of the direction of principal axis of above-mentioned pin member.
When the pin member adds tensile force, in each first, second a pair of junction surface, at first, thing near each other engages, make permanent magnet portion with first, second junction surface mutually away from the part of the second junction surface side be that fulcrum lifts, magnetic attraction is reduced.If the pin member further is stretched, the opposing party at first, second junction surface that each is a pair of (away from thing mutually) just engages, and the part that becomes above-mentioned fulcrum of permanent magnet portion is left from the pin supporting member.Permanent magnet portion integral body is left from the pin supporting member in inner space, magnetic attraction is disappeared effectively.Is the tensile force that fulcrum lifts necessary pin member for making this permanent magnet portion with the one end, for making an end that becomes fulcrum leave necessary tensile force from the pin supporting member, all than just little for making the whole one action of permanent magnet portion leave necessary tensile force from the pin supporting member, the result just can be with smaller tensile force from pin supporting member dismounting fulcrum post.
(29) according to (a 28) fulcrum post of putting down in writing, wherein, above-mentioned a pair of first junction surface is arranged on the part that is positioned at above-mentioned inner space of above-mentioned pin member regularly, shape of cross section is as general as the C font, the opening portion of this C word is formed by the both ends of downwards C shape member, above-mentioned a pair of second junction surface and above-mentioned permanent magnet are set to one, by forming to the outstanding a pair of teat in side, at least one side in the above-mentioned both ends of this a pair of teat and above-mentioned C shape member is different in the axial position of above-mentioned pin member.
(30) according to (a 29) fulcrum post of putting down in writing, wherein, above-mentioned base station have below open groove, be flute profile, the posture that above-mentioned C shape member extends in parallel with above-mentioned both ends and this groove is housed in the above-mentioned groove, surrounded from the four directions in the space that forms by above-mentioned base station and C shape member, above-mentioned permanent magnet portion is adapted to and can freely relatively moves but prevented from the state of this space disengaging.
The disengaging that base station and C shape member constitute permanent magnet prevents utensil, be provided with in addition break away from prevent utensil occasion relatively, can be simply and constitute fulcrum post at an easy rate.
(31) according to the fulcrum post of any record in (20) to (30), wherein, on above-mentioned base station, be provided with the Limitation Of Movement specified part of the above-mentioned pin member of regulation to the Limitation Of Movement of base station side.
From utilizing lifting of permanent magnet portion to make state that magnetic attraction reduces further when the pin member adds tensile force, utilize the regulation of Limitation Of Movement that the pin member is engaged with base station, base station is left from the pin supporting member.This fulcrum post is preferably automatically assembled, is dismantled in the fulcrum post of pin supporting member by support pin holding device.
(40) a kind of fulcrum post accommodation device, be used to take in fulcrum post from below supporting printed base plate, above-mentioned printed base plate is by the conveyance of board transport device, the aforesaid substrate transmitter comprises a pair of lateral frame and a pair of transmission belt that is supported by these lateral frames, side in the above-mentioned a pair of lateral frame is a fixed frame, the opposing party be by approaching with this fixed frame, leave the movable framework that changes the conveyance width, wherein
Above-mentioned fulcrum post accommodation device is assemblied on the above-mentioned movable framework, can move with this movable framework.
For example the occasion that kind changes, width changes at printed base plate changes the conveyance width.The printed base plate bearing position of fulcrum post is generally different with the kind of printed base plate, disposes fulcrum post according to the kind of printed base plate.At this moment be in the fulcrum post accommodation device, to take in fulcrum post, perhaps from the fulcrum post accommodation device, take out fulcrum post, use it for the supporting of printed base plate, if can assemble the fulcrum post accommodation device movably with movable framework, just can make the fulcrum post accommodation device, no matter the kind of printed base plate often is positioned near the printed base plate, be near the fulcrum post configuring area, can carry out taking in, taking out of fulcrum post fast.
Also have, be arranged on occasion in the electronic circuit component installation system that electronic circuit component is assemblied on the printed base plate, can avoid the reduction of parts installation effectiveness at this fulcrum post accommodation device.For example, be arranged on the occasion of fixed frame side at assembly supply device, if the fulcrum post accommodation device is assemblied on the fixed frame, the distance of the parts supply unit of printed base plate and assembly supply device will be elongated by its amount, moving of part mounting head just needs the time, if assemble movably with movable framework, the displacement of part mounting head just can not be elongated, can avoid the reduction of installation effectiveness.
(41) according to the fulcrum post accommodation device of (40) record, wherein possess at least 1 row by a plurality of incorporating sections of taking in above-mentioned fulcrum post with the incorporating section row that are arranged side by side abreast and form than length direction of above-mentioned movable framework.
With the direction parallel of movable framework than length direction, in the set zone of movable framework, the incorporating section can be set at least, can obtain in the direction compactness parallel with the moving direction of movable framework, take in the fulcrum post accommodation devices more than the number.
(42) according to fulcrum post accommodation device of (40) or (a 41) record, comprising the fulcrum post position-detecting apparatus of the position of the Width of the aforesaid substrate transmitter that changes along with moving of above-mentioned movable framework that detects the fulcrum post of having been taken in by this fulcrum post accommodation device.
The position of fulcrum post detects, and for example can carry out during to the assembling of movable framework at the fulcrum post accommodation device, also can be after assembling, and when setting up, predetermined conditions carries out.For example, when the setting-up time, detect the position when the installation to the electronic circuit component of the printed base plate of setting number finishes etc. again.
If movable framework is moved, follow with it, the position of the Width of the board transport device of fulcrum post accommodation device will change, but, in the position that detects fulcrum post by the fulcrum post position-detecting apparatus, thereby for example carry out fulcrum post automatically to the occasion of taking in, taking out of fulcrum post accommodation device, fulcrum post assembly and disassembly device is moved well to the fulcrum post of having been taken in by the pin accommodation device, empty pin incorporating section precision, do not produce the damage etc. of fulcrum post and take in, take out.
(43) according to the fulcrum post accommodation device of (a 42) record, wherein, above-mentioned fulcrum post position-detecting apparatus comprises:
To the fulcrum post taken in by this fulcrum post accommodation device or with the predetermined part of the conduct of its member that together moves by image pickup part, from the camera head of making a video recording with this position that is faced toward by image pickup part;
The camera head mobile device that this camera head is moved at the Width of aforesaid substrate transmitter at least; And
Based on the position of the above-mentioned camera head mobile and above-mentioned in the image of this position shooting gained, the location computing device of the position of the above-mentioned fulcrum post of computing by the position of image pickup part by means of this camera head mobile device.
The above-mentioned member that together moves with fulcrum post for example has fulcrum post accommodation device itself, movable framework.By image pickup part for example can be fulcrum post front end face, be arranged on mark on the fulcrum post, concavo-convex, also can be arranged on mark on fulcrum post accommodation device, the movable framework, concavo-convex etc. can be by shooting and the part of other parts differences, identification.If as by image pickup part, not taking at the fulcrum post accommodation device under the state of fulcrum post also can be to being made a video recording by image pickup part the predetermined part of fulcrum post accommodation device, detect the position of being scheduled to the fulcrum post taken in.
(44) according to fulcrum post accommodation device of (42) item or (43) record, wherein, above-mentioned fulcrum post position-detecting apparatus comprises:
Be arranged on and make on the frame moving device that above-mentioned movable framework moves, the encoder of the signal that output is corresponding with the position of movable framework; And
Be connected with this encoder, based on the output of encoder, the location computing device of the position of the fulcrum post that computing this portion of being contained has taken in.
Can move along with it and automatically obtain the position of movable framework, detect the position of fulcrum post fast.
(45) according to the fulcrum post accommodation device of (44) record, wherein, above-mentioned position operational part comes the position of the above-mentioned fulcrum post of computing based on the information of the relative position of the output of above-mentioned encoder and predefined movable framework and above-mentioned incorporating section.
(46) according to the fulcrum post accommodation device of any record in (40) to (45), wherein, this fulcrum post accommodation device is assemblied on the movable framework in the position of the opposition side of the said fixing frame side of above-mentioned movable framework.
In this fulcrum post accommodation device, the fulcrum post accommodation device will be arranged on outside the substrate transferring zone, can not consider to avoid to be provided with interference by the printed base plate of board transport device conveyance.Also the fulcrum post accommodation device can be assemblied in the position of the fixed frame side of movable framework.But, in this occasion, the fulcrum post accommodation device will be positioned at the substrate transferring zone of board transport device, for example, the fulcrum post accommodation device liftably is set, it is avoided and printed base plate, the interference of the electronic circuit component of having installed at its back side, perhaps the fulcrum post accommodation device is fixed, be arranged on hands-off positions such as the direction vertical and these printed base plates with the substrate transferring face of board transport device, and must make the incorporating section that has for the fulcrum post accommodation device to fulcrum post assembly and disassembly device can take in, the thing of the actuating length that takes out, but, the fulcrum post accommodation device for this does not need these.
(47) according to the fulcrum post accommodation device of any record in (40) to (46), wherein, above-mentioned incorporating section possesses and the chimeric and location division that fulcrum post is positioned of above-mentioned fulcrum post.
For example, fulcrum post can not be offset, and can utilize the position of the fulcrum post that is detected correctly to carry out taking in, taking out of fulcrum post.Also have, the relative position of incorporating section and fulcrum post can determine on univocality ground, detects the position of fulcrum post by the position that detects the incorporating section.
(50) a kind of substrate supporting device of replacing can planned automatically comprises:
(1) the support pin holding device of any record in (17);
(20) the fulcrum post of any record in (31);
Support the pin supporting member of this fulcrum post;
Take in the fulcrum post accommodation device of above-mentioned fulcrum post;
Make relatively move any relative position in the plane of above-mentioned support pin holding device and above-mentioned pin supporting member and fulcrum post accommodation device, and the relative movement device that relatively moves at the direction of principal axis with an above-mentioned planar quadrature; And
Control this relative movement device, above-mentioned fulcrum post is taken out from above-mentioned fulcrum post accommodation device, be assemblied on the above-mentioned pin supporting member, dismantle, be accommodated in the control device in the fulcrum post accommodation device from this pin supporting member.
Can enjoy the effect that fulcrum post obtained of any record in the support pin holding device of any record in (1) to (17) and (20) to (31), and can automatically plan to replace fulcrum post.
(51) according to the substrate supporting device of (50) record, wherein, above-mentioned relative movement device double as makes at any part by the printed base plate of this substrate supporting device supporting and carries out the relative movement device that the operation head of operation moves with respect to printed base plate.
The operation head for example has the installment state of the installment state of the electronic circuit component on the part mounting head that electronic circuit component is installed on the printed base plate, the high-viscosity fluid dispense tip that is coated with high-viscosity fluids such as sticker, paste scolder, inspection printed base plate to check head.
Relative movement device can double as makes the whole of relative movement device that the operation head moves with respect to printed base plate, also can a double as part.
According to this, can be simply and constitute substrate supporting device at an easy rate.
(52) according to the substrate supporting device of (a 51) record, wherein, above-mentioned operation head and above-mentioned support pin holding device remain on the other holding device.
Can remain on operation head and support pin holding device respectively on the holding device, be installed on the relative movement device together.Like this, for example just can after the end of job, plan transposing at once, or after end is replaced in plan, get started operation.
(53) according to (a 52) substrate supporting device of putting down in writing, wherein, possess above-mentioned other holding device, prepared a plurality of maintaining parts that relatively move by means of above-mentioned relative movement device, these a plurality of maintaining parts are selected a ground with respect to above-mentioned relative movement device and are mounted.
If the operation head that is installed on the relative movement device changes, with first of operation, support pin holding device also will change, and normal and first of the operation of support pin holding device is installed on the relative movement device.
In addition, also can be that the support pin holding device former state is installed on the relative movement device, shared by select a plurality of operation heads that a ground is mounted with respect to relative movement device.
(54) according to the substrate supporting device of (a 51) record, wherein, above-mentioned operation head and above-mentioned support pin holding device are selected a ground and are remained on the shared holding device.
When the plan transposing of fulcrum post, the operation head is dismantled from holding device, and dismantle from relative movement device, support pin holding device is remained on the holding device, and be installed on the relative movement device, when the operation of operation head, replace support pin holding device and the operation head is installed on the relative movement device.
As long as relative movement device moves any one party in operation head and the support pin holding device, moving part is light, for example can strengthen the acceleration, deceleration degree when mobile.
(55) according to (a 54) substrate supporting device of putting down in writing, wherein, possess above-mentioned shared holding device, prepared a plurality of maintaining parts that relatively move by means of above-mentioned relative movement device, these a plurality of maintaining parts are selected a ground with respect to above-mentioned relative movement device and are mounted.
(56) according to the substrate supporting device of any record in (50) to (55), wherein, above-mentioned fulcrum post accommodation device is the fulcrum post accommodation device of any record in above-mentioned (40) to (47).
Can enjoy the effect of the support pin holding device of any record in above-mentioned (40) to (47), and fulcrum post is automatically planned to replace.
Description of drawings
Fig. 1 is that a plurality of perspective views that possess as the electronic circuit component installation system of the installation component of the support pin holding device etc. that can ask inventive embodiment have been arranged in expression.
Fig. 2 is the perspective view of the part of the above-mentioned a plurality of installation components of expression.
Fig. 3 is that the ozzle of the above-mentioned installation component of expression keeps head and ozzle to keep the perspective view of head moving device.
Fig. 4 is the decomposition diagram that the above-mentioned ozzle of expression keeps head moving device.
Fig. 5 removes skull to represent that above-mentioned ozzle keeps the perspective view of head.
Fig. 6 is the perspective view that 3 kinds of different ozzles of expression ozzle support number keep head.
Fig. 7 is a vertical view of roughly representing one of above-mentioned installation component.
Fig. 8 represents the movable track of base board delivery device of above-mentioned installation component and the front view of periphery thereof with fulcrum post and pin supporting station etc.
Fig. 9 is the side sectional view of above-mentioned movable track of expression and fulcrum post accommodation device.
Figure 10 is the vertical view of above-mentioned movable track of expression and fulcrum post accommodation device.
Figure 11 is the front view (a part of section) of the above-mentioned fulcrum post of expression.
Figure 12 is the end view of the above-mentioned fulcrum post of expression.
Figure 13 is the vertical view of the above-mentioned fulcrum post of expression.
Figure 14 is the end view of above-mentioned support pin holding device of expression and support pin holding device lowering or hoisting gear.
Figure 15 is the front view of above-mentioned support pin holding device of expression and support pin holding device lowering or hoisting gear.
Figure 16 is the front section view of the above-mentioned support pin holding device of expression, is the figure that expression advance and retreat member is positioned at the state of non-working position.
Figure 17 is the front section view of the above-mentioned support pin holding device of expression, is the figure that expression advance and retreat member is positioned at the state that retreats end position.
Figure 18 is the front section view of the above-mentioned support pin holding device of expression, is the figure that expression advance and retreat member is positioned at the state of active position.
Figure 19 is the left surface cutaway view of the above-mentioned support pin holding device of expression, is the figure that expression advance and retreat member is positioned at the state of non-working position.
Figure 20 is the right side view of the above-mentioned fulcrum post of expression, is the figure that expression advance and retreat member is positioned at the state of active position.
Figure 21 is the figure of the related fulcrum post of the above-mentioned support pin holding device of explanation from the dismounting of pin supporting station.
Figure 22 is the figure of a pair of guide part that is provided with on the above-mentioned advance and retreat member of expression, is that the related pair of engaging portion of these guide parts of explanation is from the figure of original position to the guiding of latched position.
Figure 23 is that the related pair of engaging portion of the above-mentioned a pair of guide part of explanation is from the figure of latched position to the guiding of original position.
Figure 24 is a block diagram of roughly representing to control the control device of above-mentioned installation component.
Figure 25 is the figure that roughly represents as the fulcrum post position-detecting apparatus of the fulcrum post accommodation device that can ask another embodiment of inventing.
Figure 26 is the left surface cutaway view of expression as the support pin holding device of the another embodiment that can ask to invent.
Figure 27 is the left surface cutaway view of expression as the support pin holding device of the another embodiment that can ask to invent.
Figure 28 is that expression is as the magnet maintaining part of the fulcrum post of the another embodiment that can ask to invent and the front section view of periphery thereof.
Label declaration
28: substrate supporting device 40: ozzle keeps 42: ozzle keeps head moving device 50: printed base plate 120 a: body 250: fulcrum post 252: support pin holding device 254: pin supporting station 256: fulcrum post accommodation device 360: grasping device body 362: holding claw group 364: advance and retreat member 366: switching device shifter 374: compression disc spring 386: embedded hole 394,396: control pawl 430: motion changing mechanism 432: locking device 434,436: connect link rod 438: guider 440: actuating rod 470: locked member 472 twist-lock members 476: rotate axial region 478,480: arm 482,484: junction surface 486,488: groove 490,492: guide part 650: control device 720: support pin holding device 722: advance and retreat member 724: teat 728: keep body 732: engagement member 740: support pin holding device 742: advance and retreat member 744: engaging arms 770: fulcrum post
Embodiment
Below, explain with reference to accompanying drawing and can ask several embodiment of inventing.In addition, can ask invention, except the following example, can according to those skilled in the art's knowledge, implement according to the mode of record in the item of above-mentioned (summary of the invention) in the mode of having carried out various changes.
Fig. 1 represents to possess as the wiring plate supporting arrangement of an embodiment that can ask to invent etc., carries out the electronic circuit component installation system (being called for short installation system later on) of electronic circuit component installation exercise.This installation system has been arranged many installation components 12 at equidirectional near each otherly on 1 system base 10, thus the constituent components row.In these many installation components each shared the installation of carrying out to the electronic circuit component of printed base plate (being called for short circuit block later on).In the installation component 12 each all is electronic-circuit-component mounting machine.Below, the direction that installation component 12 is arranged is called X-direction, and direction vertical with X-direction in horizontal plane is called Y direction.
Fig. 2 represents the perspective view of a part of having removed exterior member of 1 in above-mentioned many installation component 12.The assembly supply device 22 that in the installation component 12 each have component body 18, be provided with on component body 18, base board delivery device 24, apparatus for mounting component 26, substrate supporting device 28 (with reference to Fig. 8) etc.Assembly supply device 22 is arranged on the part in the place ahead of component body 18, for example, supplies with electronic circuit component by presenting the type assembly supply device, or supplies with electronic circuit component by tray type part feed device.
Apparatus for mounting component 26, as shown in Figure 3, possess ozzle keep 40 and ozzle keep head moving device (being called for short head moving device later on) 42.Ozzle keeps 40 pick-up nozzle 44 (with reference to Fig. 5) that keep as parts maintenance tool, by means of head moving device 42, stride and relate to assembly supply device 22 and base board delivery device 24 and move, take out circuit block from assembly supply device 22, by base board delivery device 24 conveyances, and on by the printed base plate (being called for short substrate later on) 50 of substrate supporting device 28 supportings, this circuit block is installed.Ozzle keeps 40 to be part mounting heads, is a kind of of operation head.
Head moving device 42 is the human-like mobile device of XY machine in the present embodiment, be arranged on the component body 18, as shown in Figures 3 and 4, comprise and make ozzle keep 2 mobile Y carriage 60 and X carriages 62 of 40 2 direction (X, Y direction) as linear moving apparatus at mutually orthogonal.
Y carriage 60 constitutes, and makes a kind of Y ball bolt 68 revolution as bolt shaft by the Y-axis motor 66 as drive source, thereby Y nut 70 is moved, and the Y-axis sliding part 72 as moving-member is moved in Y direction.Y-axis motor 66 for example is made of the servo motor of band encoder in the present embodiment.Servo motor is the electro-motor that the precision of angle of revolution can be controlled well.Also can replace servo motor with stepper motor.
X carriage 62 is the i.e. 2 grades of formula mobile devices of multistage mobile device in the present embodiment, comprises an X carriage 80 and the 2nd X carriage 82 these 2 carriages and constitutes.These first, second X carriages 80,82 are the same with Y carriage 60 respectively, comprise X-axis motor 84,86 as drive source, a kind of X ball bolt 88,90 as bolt shaft, nut 92,94 and as the X-axis sliding part 96,98 of moving-member and constitute. X-axis motor 84,86 is made of the servo motor of band encoder in the present embodiment.Ozzle keeps on the 40 second X-axis sliding parts 98 that remain on as the X-axis sliding part of the 2nd X carriage 82, by the revolution of control Y-axis motor 66, X-axis motor 84,86, makes ozzle keep 40 optional positions that move in the plane of level.
Ozzle keeps 40 to be removable with respect to head moving device 42 in the present embodiment, can select to keep from constituting to go up mutually different a plurality of things.Apparatus for mounting component 26 can keep ozzle 40 to be replaced by different types of thing.Among Fig. 6, keep an example of 40, represent 3 ozzles maintenances a 40a, 40b, 40c as the retainable ozzles of head moving device 42.Ozzle keeps 40, and the ozzle of representing typically as Fig. 5 keeps a 40a, the skull 122 (with reference to Fig. 3) of these component parts of various component parts, constituent apparatus and covering that comprise a body 120, set at a body 120 everywhere etc. and constituting.Fig. 5 is the figure that has removed this skull 122.Keep ozzle to keep a 40a, its maintenance body 126 that is assemblied on the head moving device 42 is arranged on the body 120 integratedly, constituted holding device.Ozzle keeps a 40a to be positioned by a positioner 123 with respect to the second X-axis sliding part 98 on maintenance body 126, by an assembling device 124 (with reference to Fig. 3) assembling fast, dismounting, is removable.
Ozzle keeps a 40a, 40b, 40c to have the number of different ozzle supports 130 separately, and the number of the pick-up nozzle 44 that keep is different, selects a ground according to the kind of the kind of substrate 50, the circuit block that is mounted etc. and is kept by head moving device 42.Above-mentioned positioner 123, an assembling device 124 and ozzle keep a 40a, 40b, 40c also undocumented, and the related spy of the applicant is willing in 2002-337739 number the specification on the books, describes omission in detail.
On the above-mentioned second X-axis sliding part 98, its underpart be provided be used for to the surface that is attached to substrate 50 (above) on the device of making a video recording such as datum mark, promptly comprise as the ccd video camera 160 of picture pick-up device and a kind of mark camera head 164 (with reference to Fig. 3, Figure 24) as recognition device of lighting device 162.Mark camera head 164 keeps 40 with ozzle, moves to the optional position in the plane of level by means of head moving device 42.
Also have, on each installation component 12, as shown in Figure 2, on component body 18, be equipped with between assembly supply device 22 and base board delivery device 24 and have as the ccd video camera of picture pick-up device and a kind of parts camera head 170 as recognition device of lighting device, 170 pairs of parts camera heads keep a posture of 40 circuit blocks that keep etc. to make a video recording by ozzle.Like this, each installation component 12 be possess assembly supply device 22, parts conveyor apparatus 24, apparatus for mounting component 26 respectively and by modularization the modularization device, also can make the structure that can easily separate from system base 10, change each and dispose.
Base board delivery device 24 is described.In native system, substrate 50 is by the X-direction conveyance of base board delivery device 24 in the direction of arranging as installation component 12.X-direction is the substrate transferring direction.Base board delivery device 24 is transmitting device in the present embodiment, roughly represent as Fig. 7, have preceding transport part 200 and 202 these 2 transport parts, transport part, back, guide rail 210 and guide rail 212 constitute the body of preceding transport part 200, and guide rail 214 and guide rail 216 constitute the body of transport part 202, back.Guide rail the 210,212,214, the 216th, an example of lateral frame possesses the guide part that substrate 50 and transmission belt described later are led, thereby is called guide rail, hereinafter to be referred as track.
Track 210 is trapped orbits that (assembly supply device 22 sides of Y direction) fixedly install in the place ahead of system base 10, track the 212,214, the 216th, the movable track that is provided with movably in Y direction along the guiding piece 218 (with reference to Fig. 8) that sets on system base 10.These tracks 212,214,216, be representative with track 212 among Fig. 8, by means of comprising that the orbital position as drive source changes the track mobile device 226 of motor 220 (with reference to Figure 24), ball bolt 222 and nut 224 and independently mobile, the conveyance width of preceding transport part 200 and transport part 202, back all can change arbitrarily separately separately.Track 214 is movable tracks, in transport part 202, back, makes that track is 216 approaching, the conveyance width is regulated in disorbit 214.On this meaning, can think that also track 214 is trapped orbits.
On track 210~216, for track 212, represent typically as Fig. 8, be provided with pivotally separately with a plurality of belt pulleys headed by the belt pulley 230, and volume has been hung the transmission belt 232 of ring-type, belt pulley 230 grades are by means of turning round substrate transferring motor 234 (with reference to Figure 24) as the belt drive of drive source, thereby transmission belt 232 is rotated, the substrate 50 of going up mounting in the above by guiding elements 236 guiding in X-direction by conveyance.The top face that comprises transmission belt 232 is a substrate transferring face 238.Substrate transferring motor 234 and above-mentioned orbital position change motor 220 is made of the servo motor as the band encoder of electro-motor in the present embodiment.On in track 21O~216 each, as Fig. 8 and shown in Figure 9, also liftably be provided with and elect substrate 50 above transmission belt 232, it is pressed in the clamping component that clamps on the splenium 240 or elects member 242, these spleniums 240 and election member 242 etc. have constituted the substrate clamping device.
Substrate supporting device 28 is described.Substrate supporting device 28, as Fig. 8, Figure 10 and shown in Figure 14, possess fulcrum post 250, support pin holding device 252, pin supporting station 254, fulcrum post accommodation device 256, as the support pin holding device mobile device of relative movement device and control the control device of this mobile device as the pin supporting member.Fulcrum post 250, pin supporting station 254 and fulcrum post accommodation device 256, in preceding transport part 200 and the transport part 202, back each and be provided with, make shared in addition.
Fulcrum post 250 and pin supporting station 254 are described.Fulcrum post 250, is made magnetic force based on permanent magnet 270 and base station 272 is pressed on the pin supporting station 254 fixing removably to shown in Figure 13 as Figure 11, and is come the thing of supporting substrates 50 by the pin member 274 by base station 272 supportings.Pin supporting station 254 represents roughly that as Fig. 8 shape of cross section is the tabular of rectangle, mounting fulcrum post 250 on by the pin bearing-surface 276 that constitutes above it.Therefore, in the pin supporting station 254, selling bearing-surface 276 at least is magnetic material systems such as steel.
Pin supporting station 254 is by means of the supporting station lowering or hoisting gear 280 as pin supporting member mobile device, shown in two dot dot dash among Fig. 8, the substrate supporting position of fulcrum post 250 supporting substrates 50 and shown in solid line among Fig. 8 is hidden to the escape hole of the below of substrate transferring face 238 fulcrum post 250 and is moved.Supporting station lowering or hoisting gear 280 in the present embodiment as a kind of air cylinder of fluid presure as power device as drive source.Pin supporting station 254 is used for the supporting of multiple substrate 50 by above-mentioned preceding transport part 200 and back transport part 202 conveyances, and movable track 212,216 is moved in Y direction with respect to pin supporting station 254.
The base station 272 of fulcrum post 250 is nonmagnetic substance systems such as aluminium alloy in the present embodiment, and as Figure 11 and shown in Figure 13, shape of cross section is circular, open downwards, and have the groove 288 that connects in direction, be flute profile, have inner space 290 in the inboard with the orthogonal axe of fulcrum post 250.Inner space 290 also is the open recess in bottom.On below the bottom surface of base station 272, on its whole, adopt suitable fixer such as adhesion to fix base plate 292, covered the whole of inner space 290.Base plate 292 is nonmagnetic substance systems such as stainless steel in the present embodiment, on as the face of these base station 272 sides the conduct of 293 opposition side outside below on adopt suitable fixer such as adhesion to fix rubber slab 294, the bottom surface of base station 272 is covered by rubber layer.The face of the opposition side of the base plate 292 of rubber slab 294 has constituted the face that is supported by pin supporting station 254 supportings of fulcrum post 250.
Pin member 274, as Figure 11 and shown in Figure 12, any one all comprises first member 300 and second member 302 that is a shape.Second member 302 can be embedded in the roof 314 at the end of the formation groove 288 of base station 272 with relatively moving at direction of principal axis, kept by base station 272, makes its lower end part in inner space 290, constitutes base end part, and fixation of C shape member 304.C shape member 304 comprise shape of cross section be rectangle body 308 and body 308 than the both ends of length direction respectively from the central portion of its Width, vertically extend with the plate face of body 308, and extending end direction bending near each other, the shape of cross section at the junction surface 310,312 of the pair of plate-shaped parallel with body 308 is roughly the C font.Junction surface 310,312 direction of principal axis at pin member 274 are positioned at same position.C shape member 304 is accommodated in the groove 288 with the posture that junction surface 310,312 and groove 288 extend in parallel, the state of opening portion towards the below with the C word is fixed on second member 302 removably by suitable fixers 316 such as bolts, makes 310,312 both ends from body 308, junction surface be projected into the below.Pin member 274 engages with C shape member 304 by roof 314 to the Limitation Of Movement of base station 272 sides and stipulates that roof 314 has constituted the Limitation Of Movement specified part.First, second member 300,302, C shape member 304 are nonmagnetic substance systems such as aluminium alloy in the present embodiment.
Outside at second member 302 from base station 272, promptly on the outstanding protuberance of the opposition side of inner space 290, above-mentioned first member 300 by screw togather etc. suitable fixer dismantled and assembled and axial position-adjustable fix.The front end of this protuberance is plane with the orthogonal axe of fulcrum post 250, constitutes bearing-surface 324, supporting substrates 50.The direction of principal axis of bearing-surface 324 or the position of short transverse can be by first member 300 the adjusting of the amount of screwing togather regulate.Also have, be provided with the groove 326 of ring-type at the axial pars intermedia of first member 300, be provided with shape of cross section for circular by the junction surface 329 of handle part 328 and ring-type.
Above-mentioned permanent magnet 270 in the present embodiment as shown in figure 13, shape of cross section is circular, is kept by magnet retaining member 330.Magnet retaining member 330 possesses the recess 332 at its bottom surface opening, for container-like, fixed by suitable fixers such as adhesions at recess 332 internal permanent magnets 270, be made of one with permanent magnet 270, permanent magnet 270 and magnet retaining member 330 have constituted permanent magnet portion 334.Magnet retaining member 330 is made by magnetic materials such as steel.Permanent magnet 270 is fixed with the states that the bottom surface 335 from magnet retaining member 330 is retracted in the recess 332 a little, realizes the reinforcement of the magnetic attraction that the pin supporting station 254 of the protection of permanent magnet 270 and magnetic material system is produced thus.
On magnet retaining member 330,, be provided with to the oppositely outstanding mutually a pair of teat 336,338 in its side as Figure 11 and shown in Figure 13.Magnet retaining member 330 is as Figure 11 and shown in Figure 12, Open Side Down for recess 332, make teat 336,338 are positioned at junction surface 310, in 312, with the junction surface 310 of C shape member 304, parallel direction of 312 orientation and the direction vertical with body 308 respectively and C shape member 304 between leave the gap, with junction surface 310,308 liang of vertical directions in side of 312 orientation and body, and base station 272 between leave the gap a little, surrounding in the space that forms from the four directions by above-mentioned base station 272 and C shape member 304, can freely relatively move, but prevented the disengaging in this space, set with this state.Teat 336,338 as shown in figure 11, and is thick otherwise same, has the mutually different composition surface 340,342 in the axial position of pin member 274 respectively.Under magnet retaining member 330 integral body and base plate 292 state of contact, by plane teat 336 and axis normal pin member 274, promptly the below is leaned on than the composition surface 342 of teat 338 in the composition surface 340 of face formation down, promptly in the axial position of pin member 274 difference.In the present embodiment, junction surface 310,312 constitutes a pair of first junction surface, and teat 336,338 constitutes a pair of second junction surface, and they have constituted force transfering device.
As shown in figure 11, on fulcrum post 250 is positioned in pin supporting station 254, by pin bearing-surface 276 supporting under the state of supporting substrates 50, base station 272 is positioned in above the pin bearing-surface 276, and bottom surface 335 integral body of magnet retaining member 330 contact with top 293 of base plate 292, become permanent magnet portion 334 and pin supporting station 254 immediate states.Under this state, produce magnetic field in permanent magnet portion 334 and 254 of pin supporting stations, permanent magnet portion 334 is magnetically attracted by pin supporting station 254, based on this magnetic attraction, magnet retaining member 330 folder Jie base plates 292 and add to base station 272 this base station 272 is pressed in power on the pin supporting station 254 that fulcrum post 250 just is fixed, is bearing in above the pin supporting station 254.In the present embodiment, top 293 of the bottom surface 335 of magnet retaining member 330 and base plate 292 have constituted the power transfer part.Pin member 274 is by base station 272 supporting that is fixed on the pin supporting station 254, and folder Jie's C shape member 304 and magnet retaining member 330 and by pin supporting station 254 from the below supporting and supporting substrates 50.
Support pin holding device 252 is described.Support pin holding device 252, as Figure 14 and shown in Figure 15, keep by above-mentioned maintenance body 126, keep 40 to be installed on the second X-axis sliding part 98 of above-mentioned head moving device 42, move to the optional position in the horizontal plane by means of head moving device 42 with ozzle.Keep the part of the maintenance support pin holding device 252 of body 126 to constitute the holding device that keeps support pin holding device 252, in the present embodiment, ozzle keep 40 and support pin holding device 252 keep by other holding device, and these holding devices are set to one, and ozzle keeps 40, support pin holding device 252 and keep body 126 to constitute maintaining part.Support pin holding device 252 is to keep each setting in 40 for above-mentioned multiple ozzle, and a plurality of maintaining parts are selected a ground and are installed on the head moving device 42.
Support pin holding device 252 as shown in figure 16, comprises grasping device body 360, holding claw group 362, as the advance and retreat member 364 and the switching device shifter 366 of actuating member.Grasping device body 360, shape of cross section is roughly circle, promptly in the bottom or the hollow tube-shape that the end is arranged of lower opening.Advance and retreat member 364 comprises holding claw group maintaining part 370 and locked component portion 372.Holding claw group maintaining part 370, shape of cross section is little gold coin shape, and as Figure 16 and shown in Figure 19, can advance and retreat at direction of principal axis coaxially and along this axle promptly liftably is entrenched in the grasping device body 360.
Locked component portion 372, shape of cross section is circular, from holding claw group maintaining part 370 is extended with one heart and upward, coaxial with grasping device body 360, advance and retreat member 364 by and grasping device body 360 between energize a kind of compression disc spring 374 as elastic component of utensil of the conduct that is provided with energizing from the outstanding direction of grasping device body 360.The Limitation Of Movement of the advance and retreat member 364 of energizing related of spring 374, as shown in figure 19, by being arranged on the advance and retreat member 364, the end face of the recess 376 that extends at direction of principal axis engages with the teat 378 on being arranged on grasping device body 360 and stipulates, as shown in figure 16, become the state that the major part of holding claw group maintaining part 370 is given prominence to promptly to foreign side from grasping device body 360.This position is the non-working position of advance and retreat member 364, and the recess 376 and the teat 378 that constitute the junction surface have respectively constituted non-working position device specifies, non-working position locking device NOR-function position holdout device.Advance and retreat member 364 from then on non-working position advances to active position.Active position, as shown in figure 18, the inboard that is positioned at the grasping device body of comparing with non-working position 360 with respect to grasping device body 360 is a upside, be to keep holding claw group 362 for closing the position that state keeps controlling the state of fulcrum post 250,374 pairs on the spring member 364 of advancing and retreat is being energized to the direction of non-working position from active position.Advance and retreat member 364 is led by the inner peripheral surface that comprises grasping device body 360 reaches the spigot surface 382 that is provided with on grasping device body 360 guider with respect to the advance and retreat of grasping device body 360.
On holding claw group maintaining part 370, on this axis, be provided with opening below, extend at direction of principal axis, have the embedded hole that the end is arranged 386 of bottom surface 384.This embedded hole 386 forms, be positioned on the axis of grasping device body 360, rely on the leading section of above-mentioned fulcrum post 250, it in the present embodiment part of junction surface 328 chimeric bearing-surface 324 sides of first member 300, substantially prevent the inclination of fulcrum post 250, locate coaxially with grasping device body 360.
On holding claw group maintaining part 370, as shown in figure 16, from this locked component portion 372 to 2 positions that radial direction is given prominence to export-orientedly, promptly the axis with respect to grasping device body 360 and advance and retreat member 364 becomes axisymmetric part also is provided with opening outside it respectively in the direction of principal axis perforation recess 390,392, chimeric rotationally a plurality of holding claw group 362 are that 2 pins as the support pin holding member are controlled pawl (be called for short later on and control pawl) 394,396 in the present embodiment.Control pawl 394,396 and be more microscler shape, with as its upper end than an end of length direction, rely on axle 398,400 and around with the clover leaf axis of axis normal of advance and retreat member 364, be that axis parallel to each other is assemblied on the holding claw group maintaining part 370 rotationally, can open and close, the axis of being arranged to respect to grasping device body 360 is axisymmetric.
As the bottom or the free end of the other end of controlling pawl 394,396,,, be provided with claw 410,412 as handle part respectively to direction bending near each other as Figure 16 and shown in Figure 180.The face that faces toward mutually of claw 410,412 is the planar face of controlling of part cylinder 413,414.Also be provided with oppositely outstanding teat 415,416 at the free end of controlling pawl 394,396, work as shielding portion to claw 410,412.The purposes back explanation of teat 415,416.Also have, control the lower surface of pawl 394,396, for example, implemented black dying and handled and reverberation not.Have again, control pawl 394,396 at its pars intermedia than length direction, by as energizing a kind of compression disc spring 418,420 of utensil, leave and the direction left mutually is that evolution is to energizing from the axis of controlling member maintaining part 370 at claw 410,412 as elastic component.The related rotation limit of controlling pawl 394,396 of energizing of spring 418,420 contacts with the bottom surface of recess 390,392 and stipulates by controlling pawl 394,396.
Also have, control rightabout i.e. outside conduct of pawl 394,396 and controlling the face that is applied 422,424 than the length direction extension of pawl 394,396.These parts that are applied the pivot center side of face 422,424 are just got over the inclined plane 426,428 to the direction inclination of foreign side's (outer peripheral face side of grasping device body 360) as leaving pivot center (past more below) more.
Above-mentioned switching device shifter 366 as shown in figure 16, comprises motion changing mechanism 430 and locking device 432.Motion changing mechanism 430 comprises a pair of connection link rod (being called for short link rod later on) 434,436, guider 438 and as the actuating rod 440 of movable action member.Each end of link rod 434,436 is linked in rotatably around the axis parallel with the pivot center of controlling pawl 394,396 by means of axle 444,446 respectively and controls pawl 394,396, and the other end connects mutually around the axis parallel with the pivot center of an end rotatably by means of axle 448 each other.
As shown in figure 19, axle 448 is from outwards outstanding holding claw group maintaining part 370, with the otch 452 that is provided with on the grasping device body 360, with the direction of the parallel axes of grasping device body 360, the advance and retreat direction of member 364 of promptly advancing and retreat is removable, and with this advance and retreat direction vertical direction, promptly parallel with the switching direction of controlling pawl 394,396 direction can not be chimeric movably.Otch 452 is arranged in the plane of the axis that comprises grasping device body 360, and axle 448 moves in this plane, and link rod 436,438 axis with respect to grasping device body 360 constitute axisymmetrically.Therefore, a pair of pawl 394,396 of controlling is rotated as symmetry axis and axisymmetrically simultaneously and the axis of grasping device body 360, a holding claw group 362 is opened and closed axisymmetrically, and make a side control the pawl rotation, also can make the opposing party's interlock and rotate.In the present embodiment, axle 448 and otch 452 have constituted guider 438.Also have, in the present embodiment, chimeric coaxial with grasping device body 360, keep coaxially the advance and retreat member 364 of holding claw group 362 is provided on the symmetry axis of holding claw group 362, and the inside in the central is set, along the symmetry axis of holding claw group 362 is advanced and retreat.The above-mentioned embedded hole 384 that is arranged on the advance and retreat member 364 is positioned on the symmetry axis of holding claw group 362, and its bottom surface 384 is positioned at the central authorities the inside holding claw group 362.
Above-mentioned actuating rod 440 is more microscler shape, as shown in figure 16, be arranged on an a pair of side who controls in the pawl 394,396 with grasping device body 360 by means of axle 456 rotationally around the axis parallel with the pivot center of controlling pawl 394, for example, control the position of pawl 394 correspondences, being arranged in the direction of intersecting with the advance and retreat direction of controlling pawl 394 is movably.Actuating rod 440 is assembled rotationally with the upper end as the one end, and is energized to the direction approaching with controlling pawl 396 by energize a kind of stretching disc spring 458 as elastic component of utensil of the conduct in the outside that is wound on grasping device body 360.Roller 460 is assemblied in the bottom as the other end of actuating rod 440 pivotally, has constituted the revolution junction surface.
The rotation limit of the related actuating rod 440 of energizing of above-mentioned spring 458 contacts with the predetermined surface 462 (with reference to Figure 16) that is provided with on grasping device body 360 by actuating rod 440 and stipulates.Actuating rod 440 under this state, as shown in figure 16, are positioned at the effect starting position.The effect starting position is to make the part of roller 460 embed chimeric to control in the recess 390 of pawl 394, and as shown in figure 17, be positioned at than controlling pawl 394 and controlled the position that the position wearing or featuring stage armour of the face that is applied 422 under the state of fulcrum post 250 is held the axis side of device body 360 (the switching axis side of holding claw group 362).
Above-mentioned locking device 432 as shown in figure 16, is included in locked member 470 that is provided with on the locked component portion 372 of advance and retreat member 364 and the twist-lock member 472 as locking component that is provided with on grasping device body 360.In the present embodiment, locked member 470 is set to one with advance and retreat member 364, is arranged on the advance and retreat member 364.Locked member can be provided with the actuating member split, is fixed on the actuating member, integratedly action.Twist-lock member 472 is formed by the steel wire bending in the present embodiment, have one rotation axial region 476, from rotate a pair of arm 478,480 that axial region 476 roughly extends in vertical direction, in the pair of engaging portion 482,484 that the free end of arm 478,480 direction near each other is provided with, keep rotationally around axis by grasping device body 360 to rotate axial region 476 with its orthogonal axe.Twist-lock member 472 elastically deformables.
On locked component portion 372,2 positions that separate in the direction parallel with the pivot center that rotates axial region 476 are provided with groove 486,488 respectively, thus, shown in Figure 22 (a), each a pair of guide part 490,492 and locked 494,496 are set, guiding is embedded into the junction surface 482,484 in the groove 486,488, is locked.Groove 486 comprise the part that works as spigot surface of the side in a pair of groove side and two sides as spigot surface or containment surfaces and work, constraint junction surface 482, make it not become free state, the guiding groove section that determines mobile route and lead, guide part 490, shown in Figure 22 (a), comprise the first, second, third, fourth, the 5th spigot surface 500,502,504,506,508, first guiding groove section 512 that constitutes by a square groove side and locked 510 of between second spigot surface 502 and the 3rd spigot surface 504, being provided with.
Groove 488 too, guide part 492 comprise the 6th, the 7th spigot surface 516,518 that constitutes by a square groove side, second, third, each two groove side of the 4th, the 5th guiding groove section 524,526,527,528 and locked 530.Locked 510,530 separately towards recessed, it is 482,484 pieceable at junction surface, locked member 470 be provided with locked 510,530 part constitutes locked 494,496, the junction surface 482,484 of twist-lock member 472 is a latched position with locked 510,530 position that engages.
Support pin holding device 252, as Figure 14 and shown in Figure 15, the lifting by means of support pin holding device lowering or hoisting gear (being called for short lowering or hoisting gear later on) 540 that on above-mentioned maintenance body 126, is provided with, approaching, leave pin supporting station 254.Lowering or hoisting gear 540 constitutes air cylinder 542 in the present embodiment as drive source, support pin holding device 252 moves to predefined rising end position and decline end position by guider 546 guiding that comprise guide rod 544.Lowering or hoisting gear 540 is near separating device, has constituted relative movement device with above-mentioned head moving device 42, and a part of double as of relative movement device makes ozzle keep the part of 40 relative movement device that relatively move with respect to substrate 50.
Fulcrum post accommodation device 256 is described.Fulcrum post accommodation device 256 in the present embodiment as shown in Figure 7, in the outside of movable track 212,216, promptly the position of the opposition side of trapped orbit 210 sides and movable track 214 sides is assemblied on the movable track 212,216, can therewith move.Also can consider to assemble fulcrum post accommodation device 256 for movable track 216 at the opposition side of trapped orbit 210 sides.
With the fulcrum post accommodation device 256 that is assemblied on the movable track 212 is that representative describes.The packaging container 600 of fulcrum post accommodation device 256 as shown in figure 10, is more microscler shape, is fixed on removably on the movable track 212 with the posture parallel with substrate transferring direction (left and right directions among Figure 10).On packaging container 600, as shown in figure 10, along packaging container 600 or movable track 122 than the length direction partition distance, for example equally spaced be provided with a plurality of shape of cross sections for circular, up the pin reception hole 602 of opening by 1 row.A plurality of pin reception holes 602 have constituted the base station 272 that possesses chimeric fulcrum post 250 respectively and in the size of radial direction location, possess respectively with fulcrum post 250 chimeric, the incorporating section of the location division that fulcrum post 250 is positioned with one heart.At the open end of pin reception hole 602, formed diameter to the taper surface that the opening edge side increases, be provided with the chimeric spigot surface that leads 606 to fulcrum post 250, constituted the pin guide part.Packaging container 600, in the present embodiment, the part that constitutes the bottom surface 608 of pin reception hole 602 is made by magnetic material, and part in addition is a nonmagnetic substance system.Also have, the both ends that separate than length direction on packaging container 600 are provided with datum mark 610,612 respectively.
In addition, fulcrum post accommodation device 256 is arranged to be positioned at below it pin bearing-surface 276 than the pin supporting station 254 under the state that is positioned at the rising end position slightly by last.Therefore, fulcrum post accommodation device 256 moves with movable track 212, but can not interfere with the pin supporting station 254 that moves to the rising end position.Under fulcrum post 250 is accommodated in state in the fulcrum post accommodation device 256, as shown in Figure 9, bearing-surface 324 is positioned at the top roughly the same height with movable track 212, avoided the interference of fulcrum post accommodation device 256 and pin supporting station 254, and fulcrum post 250 can not given prominence to greatly above movable track and counteract.Also have, with respect to the assembling of the fulcrum post 250 of pin supporting station 254, dismounting the time and with respect to the taking in of the fulcrum post 250 of fulcrum post accommodation device 256, when taking out, lowering or hoisting gear 540 can make support pin holding device 252 liftings with the lifting travel of identical setting.
All be provided with control device 650 (with reference to Figure 24) in native system in a plurality of installation components 12 each, be used for the installation exercise etc. of the circuit block of control basal plate 50.Control device 650 the computer 660 of bus 658 that comprises CPU652, ROM654, RAM656 and connect them as main body.Bus 658 is connected with input/output interface 662, and by drive circuit 664 with various devices such as base board delivery device 24, drive source, the graphics processing unit of being handled by the view data of acquisitions such as parts camera head 170 670, whole system control device 680 of a plurality of task module 12 of unified control, the control device 650 of other task module 12 etc. are connected.Store parts installation procedure, fulcrum post among ROM654 and the RAM656 and planned various programs such as replacement program and data etc. automatically, control device 650 is carried out these programs, and the automatic plan replacement etc. of the related fulcrum post 250 of the control of relative movement device is carried out.Control head mobile device 42 grades of control device 650 and make the fulcrum post 250 between pin supporting station 254 and the fulcrum post accommodation device 256 assembling, dismantle and take in the control device that the part of being carried out has constituted substrate supporting device 28.
Secondly action is described.
To the installation of the circuit block of substrate 50 time, substrate 50 is stopped in predefined installation site by base board delivery device 24 conveyances.Then, pin supporting station 254 is risen, the fulcrum post 250 that is fixed on above the pin supporting station 254 contacts with the back side of substrate 50, supports from the below.At this moment, pin supporting station 254 is elected member 242, makes it keep substrate 50.Fulcrum post 250 is configured in the predefined part at the back side of coming supporting substrates 50 above the pin supporting station 254.For example, the occasion of circuit block has been installed on the one side of substrate 50, must have avoided them and support, be i.e. the predefined position of the kind according to substrate 50 mounting fulcrum post 250 on pin supporting station 254.Be held like this at substrate 50, and under the state by fulcrum post 250 supporting, ozzle keeps 40 to move by means of head moving device 42, is subjected to the sense circuit parts from assembly supply device 22, and it is installed on the substrate 50.The parts installation exercise is known, omits explanation.
Kind at the substrate 50 that is mounted circuit block changes, and when planning to replace, changes the configuration of fulcrum post 250 with respect to pin supporting station 254 automatically.Below the automatic plan of explanation fulcrum post 250 is replaced.
Plan is replaced and is carried out like this, for example, change the current position that is fixed on the fulcrum post 250 on the pin supporting station 254 according to next bearing position that is mounted the substrate 50 of circuit block, or in the unwanted fulcrum post 250 withdrawal fulcrum post accommodation devices 256, or from fulcrum post accommodation device 256, take out fulcrum post 250, it is assembled on the pin supporting station 254.Kind according to substrate 50 makes the pin configuration data in advance, it is stored in the computer, based on various in 2 kinds of substrates 50 that are mounted circuit block for front and back and pin configuration data that make is planned to replace.Illustrate that fulcrum post 250 is from the dismounting of pin supporting station 254 and taking in to fulcrum post accommodation device 256 herein.
During from the dismounting of pin supporting station 254, support pin holding device 252 moves according to the pin configuration data by means of head moving device 42, moves to the top that is fixed on the fulcrum post 250 above the pin supporting station 254 at fulcrum post 250.In support pin holding device 252, as Figure 16 and shown in Figure 19, advance and retreat member 364 is in non-working position, and twist-lock member 472 is positioned at original position, and holding claw group 362 is in out state, controls pawl 394,396 and opens, and actuating rod 440 is positioned at the effect starting position.Also have, make pin supporting station 254 rise to the rising end position.Make support pin holding device 252 move to the axis consistent location of the axis and the fulcrum post 250 of grasping device body 360, and make it drop to the decline end position from the rising end position by means of lowering or hoisting gear 540.In addition, in Figure 16~Figure 19, Figure 21, the state for the permanent magnet portion 334 that represents fulcrum post 250 illustrates the state of seeing fulcrum post 250 from equidirectional in the direction with its axis normal.
Along with the decline of support pin holding device 252, the leading section and the embedded hole 386 of the pin member 274 of fulcrum post 250 are chimeric, enter a holding claw group 362 central authorities the insides, and as shown in figure 16, bearing-surface 324 contacts with the bottom surface 384 of embedded hole 386.Support pin holding device 252 was further descended from this state, but, stoped decline, so 360 pairs of springs 374 of grasping device body are compressed and descend because advance and retreat member 364 contacts with fulcrum post 250.The member 364 that equals to advance and retreat is supported the leading section election of pin 250 and rises with respect to grasping device body 360, advances to active position from non-working position.Bottom surface 384 has constituted by action face or has been engaged face in the present embodiment, and the part that is provided with bottom surface 384 of advance and retreat member 364 has constituted by operating member or joint.With advance and retreat member 364, holding claw group 362 is risen with respect to grasping device body 360, the roller 460 of actuating rod 440 engages with the face that is applied 422 of controlling pawl 394, makes to control that pawl 394 is revolted the power of energizing of springs 418 and to closing the direction rotation.Make thus and control pawl 396 also symmetrically to closing the direction rotation, claw 415,416 will embed in the groove 326 of fulcrum post 250.
Actuating rod 440 makes the part of roller 460 embed chimeric to control in the recess 390 of pawl 394 in the effect starting position, and as shown in figure 17, be positioned at than controlling pawl 394 and controlled the position that the position wearing or featuring stage armour of the face that is applied 422 under the state of fulcrum post 250 is held the axis side of device body 360, engage swimmingly by inclined plane 426, roller 460 guiding and control pawl 394 and actuating rod 440, actuating rod 440 makes controls pawl 394 and positively rotates to closing direction, and makes it positively control fulcrum post 250.In the way that support pin holding device 252 descends, control pawl 394,396 and control fulcrum post 250 with being engaged by handle part 328 with the face of controlling 413,414.Make support pin holding device 252 control under the state of fulcrum post 250 further and descend controlling pawl 394,396, arrive the decline end position, and during this period, actuating rod 440 is revolted the power of energizing of springs 458 and is rotated to the direction of leaving from the symmetry axis of controlling pawl 394,396, make control pawl 394,396 from further rotated by handle part 328 state of contact to closing direction, avoid damaging fulcrum post 250, control pawl 394,396, actuating rod 440, roller 460 etc. and make and control pawl 394,396 and positively control fulcrum post 250.Support pin holding device 252 is dropped under the state of decline end position, controlling pawl 394,396 and be switched, controlling face 413,414 and control fulcrum post 250 with being engaged by handle part 328 to closing state (with reference to Figure 17).Also have, advance and retreat member 364 is positioned at as likening to the position by position near the active position that retreats end position of top with respect to grasping device body 360.
Grasping device body 360 is descended, when non-working position moves to active position, the twist-lock member 472 of locking device 432 is moved to latched position from original position at advance and retreat member 364.Be positioned at grasping device body 360 under the state of rising end position, twist-lock member 472 is shown in Figure 22 (a), and junction surface 482,484 is positioned at the upper end of groove 486,488, and junction surface 484 embeds the upper end of second guiding groove section 524.This position is the original position of twist-lock member 472, along with advance and retreat member 364 moving to active position, shown in Figure 22 (b), junction surface 484 is by second guiding groove section, 524 guiding, and twist-lock member 472 relatively moves in the direction with its parallel axes with respect to advance and retreat member 364.Then, at first, junction surface 482 contacts with first spigot surface 500, by its guiding, twist-lock member 472 is directed into locked 510 in the advance and retreat direction of advance and retreat member 364, rotates to the direction of leaving from locked 510 in the direction vertical with this advance and retreat direction simultaneously.The rotary motion trace of representing twist-lock member 472 with two dot dot dash.
Like this, the opposing party junction surface 484 just engages with the 6th spigot surface 516, moves along it.The 6th spigot surface 516 is roughly the same to the distance of this pivot center with first spigot surface 500 to the distance of the pivot center of twist-lock member 472, but, contact with junction surface 484 from the opposition side of first spigot surface 500, thereby junction surface 484 1 sides compare with junction surface 482, rotational angle is little, make twist-lock member 472 strains, arm 478 just with respect to arm 480 in Figure 22 (b) to clockwise direction in relative rotation direction turned.For convenience, this is turned direction as positive direction.The position of only representing the junction surface 484 of the occasion that do not turn among Figure 22 (c) with the circle of two dot dot dash.Then, junction surface 484 shown in Figure 22 (c), embeds the 3rd guiding groove section 526 at junction surface 482 under by the state of first spigot surface 500 guiding, by the 3rd guiding groove section 526 guiding, when rotation is restricted, moves with respect to locked member 470.Therefore, when junction surface 482 moves to the end of first spigot surface 500, the backward rotation by means of the elastic recovering force of twist-lock member 472, engage with the 4th spigot surface 506 and be positioned at second spigot surface 502 just below.In that support pin holding device 252 is dropped under the state of decline end position, shown in Figure 22 (c), become junction surface 482 and engage with the 4th spigot surface 506, junction surface 484 embeds the state of the bottom of the 3rd guiding groove section 526.In addition, guide part the 490, the 492nd, mutual back-to-back setting, and in Figure 22, Figure 23, they are illustrated with the state of arranging, the rotation direction of twist-lock member 472 is illustrated in the opposite direction.
With regard to support pin holding device 252, grasping device body 360 is dropped to after the decline end position, rise to the rising end position.At this moment, advance and retreat member 364 remains the state that engages with the leading section of fulcrum post 250 by energizing of spring 374, in spring 374 elongations, grasping device body 360 rises with respect to advance and retreat member 364, shown in Figure 22 (d), twist-lock member 472 is risen, and pair of engaging portion 482,484 is led by the 4th spigot surface 506 and the 3rd guiding groove section 526 respectively and moves to locked 510,530 sides.Then, junction surface 482 engages and is directed to second spigot surface 502, shown in Figure 22 (e), engages with locked 510 then.At this moment, junction surface 482 engages with second spigot surface 502 under the state that junction surface 484 embeds in the 3rd guiding groove section 526.Therefore, engage back twist-lock member 472 strains, be reversed and turn, when deviate from from the 3rd guiding groove section 526 at junction surface 484, move to locked 530 side by the elastic recovering force of twist-lock member 472, be positioned at locked 530 roughly just below.During this period, junction surface 482 also be positioned at locked 510 roughly just below.Therefore, if from this state support pin holding device 252 is further risen, advance and retreat member 364 is descended relatively, junction surface 482,484 just engages with locked 510,530 respectively.That is, advance and retreat member 364 is locked in grasping device body 360 by twist-lock member 472, as shown in figure 18, remains on active position, and with regard to regard to holding claw group 362, actuating rod 440 engages with controlling pawl 394, and maintenance is closed state and continued to control fulcrum post 250.
Make support pin holding device 252 from then on state further rise, advance and retreat member 364 is risen with grasping device body 360, a holding claw group 362 and fulcrum post 250 are risen.With regard to controlling pawl 394,396, claw 410,412 engages with the junction surface 329 of ring-type, adds tensile force to pin member 274, and it is risen with respect to base station 272.Rise in the way thereon, at first, the junction surface 310 of C shape member 304 engages with teat 336.Therefore, shown in Figure 21 (a), making magnet retaining member 330 is the center with the part of teat 338 sides of bottom surface 335 and the contact site of base plate 292, and resistance magnetic attraction and tilting leaves sideling with respect to pin supporting station 254, and magnetic attraction is reduced.The tensile force that is added on the pin member 274 passes to permanent magnet portion 334 as the power that permanent magnet portion 334 is lifted.At this moment, the central authorities that are considered to be in permanent magnet portion 334 concentrate making a concerted effort of the magnetic attraction work as long as be added in power antagonism on the part of teat 338 sides of the bottom surface 335 that power on the teat 336 and base plate 292 be added in magnet retaining member 330 by junction surface 310, and, from the horizontal range (distance of the direction parallel) till the contact point of junction surface 310 and teat 338 of making a concerted effort of magnetic attraction with base plate 292 be till the contact point of the part of teat 338 sides of bottom surface 335 and base plate 292 horizontal range less than 2 times, thereby the power that junction surface 310 should be added on the teat 336 is that more than 1/3 of magnetic attraction gets final product.Be little the getting final product of the needed power of occasion (with equating with joint efforts of magnetic attraction) that the needed force rate of lifting of magnet retaining member 330 makes magnet retaining member 330 integral body and vertically leaves with respect to pin supporting station 254, pin member 274 is further risen, thereby junction surface 312 is engaged with teat 338, permanent magnet portion 334 integral body are left from pin supporting station 254, magnetic attraction is disappeared.The most approaching and add to base station 272 under the state of magnetic attraction at permanent magnet portion 334 and pin supporting station 254, composition surface 340 is positioned at downside than composition surface 342, the composition surface 340 1 sides engage earlier near junction surface 310 than composition surface 342, secondly composition surface 342 engages with junction surface 312, junction surface 310,312 and teat 336,338 at the direction of principal axis of pin member 274 in mutually different 2 positions, staggering engages period, and permanent magnet portion 334 is lifted.If pin member 274 is further risen, shown in Figure 21 (b), C shape member 304 just engages with the roof 314 of base station 272, and base station 272 is lifted by pin supporting station 254, and fulcrum post 250 integral body are just lifted simply by pin supporting station 254.
Fulcrum post 250 in mutual the controlling pawl 394,396 and being entrenched in embedded hole 382 of opening and closing symmetrically contacts and controls, they are opened and closed axisymmetrically, and control the length of face 413,414, become along the length of the direction of the state of its axis short when promptly having controlled fulcrum post 250, under the state of the relative tilt of allowing fulcrum post 250, engage, can not hinder the centering of the related fulcrum post 250 of embedded hole 386, fulcrum post 250 can become the posture of vertical by conveyance with its axis.
Make support pin holding device 252 move to the rising end position, and cross movable track 212 or 216 and move to fulcrum post accommodation device 256, with the state conveyance fulcrum post 250 shown in Figure 21 (b) by means of head moving device 42.Support pin holding device 252 is moved to after the top of pin reception hole 602 of the sky in a plurality of pin reception holes 602 of fulcrum post accommodation device 256, make its decline and take in fulcrum post 250.In addition, with respect to before the taking in, take out of the fulcrum post 250 of fulcrum post accommodation device 256, make a video recording by 164 pairs of datum marks of mark camera head 610,612, detect the position of Width of the base board delivery device 24 of the fulcrum post 250 that is accommodated in the pin reception hole 602.
Fulcrum post accommodation device 256 moves with movable track 212,216, along with moving of movable track 212,216, the position of the Width of base board delivery device 24 will change, and the position of the fulcrum post 250 that has been contained will change.Therefore, the position of fulcrum post 250 is moved movable track 212,216, and the conveyance width changes, the position change of fulcrum post accommodation device 256 time be detected.The position of the Y direction of movable track 212,216 is set in advance according to the kind of substrate 50, when mark is made a video recording, position based on movable track 212,216, mark camera head 164 is moved to be scheduled to datum mark 610,612 residing positions, to datum mark 610,612 from directly over, promptly make a video recording in the position that faces toward with datum mark 610,612.Mark camera head 164 carries on the second X-axis sliding part 98, moves by means of head moving device 42.
Then, position based on the position of mark camera head 164 and the datum mark 610,612 in the image of gained is made a video recording in this position, obtain the physical location of datum mark 610,612, based on a plurality of pin reception holes 602 of these positions and fulcrum post accommodation device 256 and the relative position information of datum mark 610,612, each position of fulcrum post 250 is obtained in each center of computing pin reception hole 602.Be that fulcrum post 250 is embedded in pin reception hole 602 and is located with one heart in the present embodiment, the position that detects fulcrum post 250 of the position by pin reception hole 602.The data of each in these positions and the selected a plurality of pin reception holes 602 are mapped and are stored among the RAM656 of computer 660.The conduct of mark camera head 164 double as fulcrum post accommodation devices 256 is by the camera head of the datum mark 610,612 of image pickup part in the present embodiment, head moving device 42 double as camera head mobile devices, the location computing device that constitutes with the part by the position that detects fulcrum post of control device 650 has constituted the fulcrum post position-detecting apparatus.When fulcrum post 250 being regained in the pin reception holes 602, read the position that is mapped and has stored with this pin reception hole 602, support pin holding device 252 is correctly moved to above the pin reception hole 602, fulcrum post 250 correctly is accommodated in the pin reception hole 602.
Utilize the decline of support pin holding device 252, base station 272 is entrenched in by spigot surface 606 guiding and is positioned in the pin reception hole 602, and arrive bottom surface 608 and seat.Utilize the further decline of support pin holding device 252, pin member 274 descends with respect to base station 272, bottom surface 335 integral body of magnet retaining member 330 contact with base plate 292, and the bottom surface 608 by the magnetic material system of pin reception hole 602 magnetically attracts, and based on this magnetic attraction base station 272 is compressed, is fixed on the bottom surface 608.Bottom surface 608 and permanent magnet portion 334 have constituted the fulcrum post fixture, and fulcrum post 250 is fixed with the state that is positioned in the pin reception hole 602.Make support pin holding device 252 from then on state further descend, but advance and retreat member 364 stops and descends by being fixed on fulcrum post 250 in the pin reception hole 602,360 pairs of springs 374 of grasping device body compress and descend with respect to advance and retreat member 364.Advance and retreat member 364 is risen with respect to grasping device body 360 by the leading section pushing of fulcrum post 250, moves from the direction of non-working position to active position, moves to and retreats end position.
Like this, in locking device 432, from the state shown in Figure 23 (a), shown in Figure 23 (b), the junction surface 482,484 that makes twist-lock member 472 is left from locked 510,530, unlocks.At this moment, twist-lock member 472 keeps the posture of vertical, descends with respect to guide part 490,492.Then, shown in Figure 23 (b), junction surface 484 engages with the 7th spigot surface 518, after this moves to left among the figure, and junction surface 482 is stoped by the 3rd spigot surface 504 to right-hand moving then, thereby twist-lock member 472 is reversed and turns.Junction surface 484 utilizes the guiding of the 7th spigot surface 518 and is arranged in the side of keeping left, position that only represents with the circle of two dot dot dash than Figure 23 (b).After junction surface 484 embeds in the 4th guiding groove section 527, shown in Figure 23 (c), junction surface 482 integral body depart from from the 3rd spigot surface 504, move among the figure by means of the elastic recovering force of twist-lock member 472 right-hand, move to first guiding groove section 512 just below.Therefore, begin afterwards to rise if make support pin holding device 252 drop to the decline end position, junction surface 482 just embeds in first guiding groove section 512.When support pin holding device 252 is risen, remove junction surface 482,484 and locked 510,530 locking, and advance and retreat member 364 is pressed on the fulcrum post 250 by energizing of spring 374, grasping device body 360 is risen.In other words, twist-lock member 472 rises with respect to locked member 470, and the state shown in the Figure 23 (d) that is led through the first, the 5th guiding groove section 512,528 and the 5th spigot surface 508 resets into the original position shown in Figure 23 (e).
482 by first guiding groove section 512 and the 5th spigot surface 508 guiding at the junction surface, and when led by the 5th guiding groove section 528 in junction surface 484, arm 478,480 is oppositely turned mutually.Shown in the position at the junction surface 482,484 of the occasion that do not turn with the circle expression of two dot dot dash among Figure 23 (d), with can't help the occasion of the first, the 5th guiding groove section 512,528 and the 5th spigot surface 508 guiding and compare, junction surface 482 rotational angles are big, junction surface 484 rotational angles are little, and arm 478,480 is oppositely turned mutually.And, if depart from from the 5th spigot surface 508 at junction surface 482, just utilize the elastic recovering force of twist-lock member 472, turn to the pivot center side of twist-lock member 472, junction surface 484 also turns to the position that enters second guiding groove section 524, and twist-lock member 472 resets into original position.
At twist-lock member 472 when original position moves, advance and retreat member 364 descends with respect to grasping device body 360, move to non-working position, as shown in figure 16, a holding claw group maintaining part 370 is departed from from grasping device body 360, control pawl 394,396 utilize energizing of spring 418,420 and turn to evolution to, unclamp fulcrum post 250.Therefore make support pin holding device 252 arrive original position at twist-lock member 472, advance and retreat member 364 further rises after resetting into non-working position, and at this moment, utilize the joint of the end face of teat 378 and recess 376, advance and retreat member 364 is risen with grasping device body 360, fulcrum post 250 is deviate from from embedded hole 386, remained the state that is accommodated in the fulcrum post accommodation device 256.
Like this, locked member 470 has a pair of guide part 490,492, and these guide parts 490,492 are arranged to relatively move along with advance and retreat member 364 and the axial of grasping device body 370, retrain at least one side in the junction surface 482,484 in principle, make twist-lock member 472 can not become the state that freely rotates.Become the occasion of free state at a side junction surface, the opposing party junction surface in its front is retrained by guiding groove section, to determine the moving direction at a side junction surface, two side junction surfaces one are located in the guiding groove section, junction surface 482,484 is engaged the other way around, the decision moving direction with spigot surface in the rotation direction of twist-lock member 472.Like this, a pair of guide part 490,492 carries out mutually jointly, feasible 2 advance and retreat along with advance and retreat member 364, junction surface 482,484, comprise locked portion, carry out the predefined motion that rotates, as opposite action with locked 510,530 engage and the releasing of this joint just can easily be carried out, 2 times from non-working position to active position pushing advance and retreat member 364, make the keeping and unclamp and can easily carry out of the controlling of fulcrum post 250, gripping state.
Also have, support pin holding device 252 is placed, is accommodated in pin supporting station 254, fulcrum post accommodation device 256 for the fulcrum post 250 that will control, need be with respect to their approaching, departure motion.In support pin holding device 252, utilize this action to make advance and retreat member 364 advance and retreat, a holding claw group 362 is opened and closed, thereby need not be for holding claw group is opened and closed and newly appends actuator and just can control, unclamp fulcrum post 250.
In addition, unclamped fulcrum post 250 holding claw group 362 often is switched to opening state, the teat 415 of controlling pawl 394 is positioned at the below of the roller 460 of actuating rod 440, is covered with roller 460.Therefore, ozzle keeps 40 after assembly supply device 22 takes out circuit blocks,, is avoided the light of roller 460 to form for the image of circuit block and brings harmful effect when make a video recording in the below by parts camera head 170.
More than for from pin supporting station 254 dismounting fulcrum posts 250, its occasion that is accommodated in the fulcrum post accommodation device 256 is illustrated, but, taking out fulcrum post 250 from fulcrum post accommodation device 256, it is assemblied in the occasion of pin supporting station 254, also the occasion with the position that changes fulcrum post 250 on pin supporting station 254 is the same, makes advance and retreat member 364 actions 2 times, carries out unclamping after the controlling of fulcrum post 250, conveyance and the mounting.
Another embodiment of fulcrum post position-detecting apparatus is described based on Figure 25.The fulcrum post position-detecting apparatus of present embodiment comprises encoder 702 and the location computing device 704 that makes the track mobile device 700 that movable track moves.Track mobile device 700 for example, constitutes equally with above-mentioned track mobile device 226, and the output of the encoder 702 that is provided with for orbital position change motor 706 is output and the corresponding signal in position of movable track, and controlled device 708 is imported.Control device 708 is the same with above-mentioned control device 650, constitute based on computer, by the part that constitutes this location computing device 704, come the position of computing fulcrum post based on the information of the relative position of the output of encoder 702 and predefined movable track and pin reception hole.This information for example comprises that each center that the reference position set or orbital position obtain position, position and a plurality of pin reception holes is in X-axis, at the relative position information of Y direction on movable track.
The engagement member that actuating member engaged can be made of the member beyond the fulcrum post.For example, in support pin holding device shown in Figure 26 720, make teat 724 from advance and retreat member 722 to the direction of intersecting with this advance and retreat direction, be vertically to extend in the present embodiment, constitute the junction surface, and keeping being provided with the engagement member 732 that possesses the composition surface that makes progress 730 that faces toward with teat 724 on the body 728.Composition surface 730 is arranged on support pin holding device 720 and descends by means of lowering or hoisting gear, reaches the position that teat 724 engaged when holding claw group 362 just in time controlled the position of fulcrum post 250.In addition, being supported pin 250 chimeric embedded holes 736 has bottom surface 738 and bumps the degree of depth less than fulcrum post 250.Support pin holding device 720 is descended, the leading section of fulcrum post 250 is embedded in embedded hole 736, reach holding claw group 362 is utilized when the switching of closing state is controlled by the position of handle part 328, utilize the joint on teat 724 and composition surface 730 to stop the decline of the member 722 of advancing and retreat, advance and retreat member 722 is moved from the direction of non-working position to active position by engagement member 732 pushings when the decline of after this grasping device body 360.Make a holding claw group 362 closures thus, control fulcrum post 250.Engagement member 732 engages with advance and retreat member 722, and from the direction pushing of non-working position to active position, in addition, the occasion of moving with moving back member engages with fulcrum post 250 is the same, carries out controlling, unclamping of fulcrum post 250.
Also can utilize pin supporting member and fulcrum post accommodation device as engagement member.For example, support pin holding device 740 as shown in figure 27 makes engaging arms 744 from advance and retreat member 742 downwards, to 254 extensions of pin supporting station the junction surface is set.Engaging arms 744 is arranged in to reach when holding claw group 362 just in time controlled the position of fulcrum post 250 and contacts with pin bearing-surface 276, utilize the joint of engaging arms 744 and pin bearing-surface 276 to stop the decline of the member 742 of advancing and retreat, be picked up with respect to grasping device body 360.Also have, diagram has been omitted, but, fulcrum post to the taking in of fulcrum post accommodation device the time, the inscape of engaging arms 744 and fulcrum post accommodation device, for example packaging container engages the decline that stops the member 742 of advancing and retreat.
The force transfering device of fulcrum post also can be used as and makes permanent magnet produce the device of flywheel moment.For example, the permanent magnet portion 772 of fulcrum post 770 shown in Figure 28 comprises permanent magnet 774 and magnet retaining member 776, be provided in the inner space 780 of base station 778, and magnet retaining member 776 with the direction parallel of the groove 782 that constitutes inner space 780 than length direction, with the part that has departed from from permanent magnet 774, utilize axle 784 and be assemblied in rotationally on the base station 778.At the free end of magnet retaining member 776, prominent established teat 790 and constituted second junction surface.Make the base end part of pin member 794 be positioned at inner space 780, and be provided with teat 790 from the below pieceable junction surface 796 and constitute first junction surface.
If pin member 794 is added tensile force, junction surface 796 just engages with teat 790, and magnet retaining member 776 is rotated, and makes 772 inclinations of permanent magnet portion and leaves pin supporting station 254.Teat 790 is arranged on the position of departing from permanent magnet 774, in the position that the position of making a concerted effort from the magnetic attraction that works between the supporting station 254 at permanent magnet portion 772 and pin departs from, teat 790 and junction surface 796 engage one another, and make permanent magnet portion 772 produce flywheel moments and rotate.In this occasion, a power and 784 power that are added on the magnet retaining member 776 that junction surface 796 is added on the teat 790 are resisted making a concerted effort of magnetic attraction, and permanent magnet portion 772 is lifted under little tensile force, and magnetic attraction is reduced.
In addition, the C shape member of fulcrum post can be magnetic material systems such as soft iron.If C shape member is made nonmagnetic substance system, magnetic attraction is just inoperative to C shape member, and the magnet retaining member tilts easily with respect to the pin supporting station.But, even C shape member is made magnetic material system,, it is engaged with the magnet retaining member and lift if the magnetic attraction of pin supporting station does not reach.The magnet retaining member can utilize magnetic force to attract to body by C shape member under the state that leaves from the base station base plate, keeps straight condition.
Also have, datum mark is being made a video recording, detect the occasion of the position that is accommodated in the fulcrum post in the fulcrum post accommodation device, only 1 datum mark being made a video recording gets final product.If obtain the position of datum mark, just can detect the position of each fulcrum post according to the relative position information of a plurality of fulcrum posts (incorporating section) and datum mark.
Have again, a pair of first junction surface of the C shape member of fulcrum post also can be set in the different position of the direction of principal axis of pin member, meanwhile, a pair of second junction surface of permanent magnet portion can be set also in the different position of the direction of principal axis of pin member.
Also have, pin supporting member lowering or hoisting gear, support pin holding device lowering or hoisting gear also can be made with electro-motor, and for example servo motor is a drive source, comprises the device of the movement converter with bolt shaft and nut.
Have again, can ask to invent the component mounter component mounter in addition that keeps head to move in X-axis, Y direction applicable to the component installation system beyond the component installation system of assembly type, ozzle by means of head moving device, for example, a plurality of ozzles keep head around the component mounter of the transposition type of axis rotation, the operating system beyond the component installation system, for example, fulcrum post, support pin holding device, fulcrum post accommodation device, the substrate supporting device of screen process press, sticker apparatus for coating etc.

Claims (20)

1. a support pin holding device is used to control the fulcrum post that be assemblied on the pin supporting member, comprising:
The grasping device body;
By to be opened/closedly controlling the member group by what this grasping device body was held in that relatively-movable a plurality of support pin holding member forms directly or indirectly;
Can keep by described grasping device body with moving, by means of with the engaging of the engagement member that moves along with described grasping device body and relatively moving of described pin supporting member and with respect to this grasping device body, from the actuating member of non-working position to the active position action; And
With this actuating member interlock mechanically, whenever this actuating member action 1 time, just alternately control the member group and switch to the state of closing from opening state with described, or from closing the switching device shifter of the state state of switching to out.
2. support pin holding device according to claim 1, wherein, described actuating member sets in advance along with described member group and the described fulcrum post of controlling relatively moves and control controlling of the related fulcrum post of member group and become possible position and engage with fulcrum post, by means of fulcrum post from described non-working position on the position that described active position moves, fulcrum post works as described engagement member.
3. support pin holding device according to claim 2, wherein, described actuating member is arranged on described central portion the inside of controlling the member group, is arranged on by means of having entered the described position of controlling the leading section of the fulcrum post in the member group and moving.
4. according to any described support pin holding device in the claim 1~3, wherein, described switching device shifter possesses:
Is the motion converter of described actuating member described motion changing mechanism of controlling member group's switching campaign; And
Described actuating member by means of be pulled to engaging of described engagement member 1 secondary action position nearby the time, this actuating member is remained on described active position, secondly when being pushed 1 time again, removing its maintenance and allow actuating member to reset into the actuating member control device of non-working position.
5. support pin holding device according to claim 4, wherein, described actuating member control device is that a side who is included in described device body and the described actuating member goes up the locking device of locking component that is provided with and the locked member that is provided with on the opposing party, locked member possesses by locking component and locks, thereby described actuating member is remained on locked of described active position and locking component led, along with 1 time of described actuating member is moved caused locking component and relatively moving of locked member and locking component is directed to the latched position of the described locked portion of locking, the locking of the related locked portion of the member that unlocks along with moving relatively for following 1 time is directed to locking component the guide part of original position.
6. support pin holding device according to claim 5, wherein, described locking component is to possess a pair of arm that rotates axial region, roughly extend in vertical direction from this rotations axial region and in the pair of engaging portion of the free end setting of these arms, remain on twist-lock member on the side in described grasping device body and the described actuating member rotationally to rotate axial region, described locked member possesses the common mutually a pair of guide part that described pair of engaging portion is led.
7. support pin holding device according to claim 6, wherein, described a pair of guide part has makes described pair of engaging portion along with 2 times of described actuating member actions, comprise described locked portion, carries out the shape of the predefined motion that rotates.
8. according to any described support pin holding device in the claim 1~7, wherein, described to control the member group be with respect to symmetry axis and the thing that opens and closes axisymmetrically.
9. according to any described support pin holding device in the claim 1~8, wherein, described actuating member is the advance and retreat member in the direction of principal axis advance and retreat.
10. support pin holding device according to claim 8, wherein, described actuating member is to be provided on the described symmetry axis, along the advance and retreat member of these symmetry axis advance and retreat.
11. according to any described support pin holding device in the claim 1~10, comprising: with respect to the grasping device body, the utensil of energizing of to the direction of described non-working position described actuating member being energized from described active position.
12. support pin holding device according to claim 11, wherein, the described utensil of energizing comprises the elastic component that is provided between described actuating member and the described grasping device body.
13. according to any described support pin holding device in the claim 9~12, wherein, described motion changing mechanism comprises that an end is relative with in described a plurality of support pin holding members each and connects rotationally, and a plurality of connection link rods of connecting rotatably each other of the other end and to these described the other end that connect link rods at the removable but guiding utensil that can not lead movably in the direction of intersecting with this advance and retreat direction of the advance and retreat direction of described advance and retreat member.
14. according to any described support pin holding device in the claim 9~13, wherein, fulcrum post works as described engagement member, described advance and retreat member possesses with described fulcrum post chimeric, substantially prevent the embedded hole of the inclination of fulcrum post, described a plurality of support pin holding members engage under the state of the relative tilt of allowing this fulcrum post with described fulcrum post with free end separately.
15. support pin holding device according to claim 4, wherein, described actuating member be with described grasping device body direction of principal axis can advance and retreat the chimeric advance and retreat member in ground, described a plurality of support pin holding member can remain on this advance and retreat member with relatively moving, on the other hand, on described grasping device body, be provided with along with advance and retreat retreating of member and with described a plurality of support pin holding members at least 1 engage, thereby make this at least 1 to closing the service portion that direction moves, this service portion constitutes at least a portion of described motion changing mechanism.
16. support pin holding device according to claim 15, wherein, described service portion can be by means of described grasping device body moves in the direction of intersecting with the advance and retreat direction of described advance and retreat member by being arranged to, and is made of at the movable action member of energizing with the approaching direction of described at least 1 support pin holding member the utensil of energizing.
17. according to any described support pin holding device in the claim 1~16, wherein, described a plurality of support pin holding members are to control member around the rotating rotation of an axis respectively.
18. a substrate supporting device comprises:
Any described support pin holding device in the claim 1~17;
Comprise fulcrum post: the base station that (a) has inner space in the inboard with the lower part; (b) on this base station, base end part is positioned at described inner space and can be held at direction of principal axis with relatively moving, to bring in the pin member of supporting printed base plate before the outstanding protuberance of base station; (c) in the described inner space of described base station, can set at least with lifting, be positioned at base station under the state on the pin supporting member of magnetic material system, magnetically attracted by this pin supporting member, based on this magnetic attraction, add the permanent magnet portion of the power on the pin supporting member that this base station is pressed in to base station; And (d) at least one side of the part that is arranged in described inner space of described pin member and described permanent magnet portion, be provided with, in the occasion that has added tensile force to the pin member, this tensile force as this permanent magnet portion is lifted with respect to described pin supporting member, the power of leaving from the pin supporting member and pass to the force transfering device of described permanent magnet portion meanwhile; And
Support the pin supporting member of this fulcrum post.
19. substrate supporting device according to claim 18 comprises:
Take in the fulcrum post accommodation device of described fulcrum post;
Make relatively move any relative position in the plane of described support pin holding device and described pin supporting member and fulcrum post accommodation device, and the relative movement device that relatively moves at the direction of principal axis with a described planar quadrature; And
Control this relative movement device, described fulcrum post taken out from described fulcrum post accommodation device, be assemblied on the described pin supporting member, dismantle, be accommodated in the control device in the fulcrum post accommodation device from this pin supporting member,
And can plan automatically to replace.
20. substrate supporting device according to claim 19, wherein, described fulcrum post accommodation device is used to take in the fulcrum post from below supporting printed base plate, described printed base plate is by the conveyance of board transport device, described board transport device comprises a pair of lateral frame and a pair of transmission belt that is supported by these lateral frames, side in the described a pair of lateral frame is a fixed frame, the opposing party is by approaching with this fixed frame, leave the movable framework that changes the conveyance width, described fulcrum post accommodation device is assemblied on the described movable framework, can move with this movable framework.
CNB2005800053243A 2004-02-20 2005-02-16 Support pin holding device and substrate supporting device Active CN100556269C (en)

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