CN1905972A - Surface coating cutting tool with coating film having intensity distribution of compression stress - Google Patents

Abstract

A surface-coated cutting tool (1) according to the present invention includes a base material (2) and a coated film (3) formed on the base material (2). The coated film (3) serves as an outermost layer on the base material (2) and has compressive stress. The compressive stress is varied so as to have strength distribution in a direction of thickness of the coated film (3). The strength distribution is characterized in that the compressive stress at a surface of the coated film continuously increases from the surface of the coated film toward a first intermediate point located between the surface of the coated film and a bottom surface of the coated film and the compressive stress attains a relative maximum point at the first intermediate point.

Description

Have compression stress intensity distributions the surface coating cutting tool of filming arranged

Technical field

The present invention relates to cutting element such as drill bit, end mill(ing) cutter (end mill), the throw-away tip of drill bit (throw away tip), the throw-away tip of end mill(ing) cutter, the throw-away tip of milling, the throw-away tip of rotary cut, the metal saw, gear cutting tool, reamer, and screw tap and relate more specifically on its surface (outermost layer), be formed with and be used to improve for example surface coating cutting tool of filming of the characteristic of wearability.

Background technology

Usually, hard metal (WC-Co alloy or by adding Ti (titanium) in the WC-Co alloy, Ta (tantalum), the alloy that carbonitride obtained of Nb (niobium) etc.) has been used for cutting element.Increased the trend of high-speed cutting in recent years, use sintered-carbide tool more and more, this sintered-carbide tool is by using CVD (chemical vapour desposition) or PVD (physical vapor deposition), at basic material such as hardmetal, cermet or on based on the surface of the pottery of aluminium oxide or silicon nitride coating 3-20 μ m thickness by the periodic table of elements in IVa family, the carbide of Va family and VIa family metal or Al (aluminium), nitride, carbonitride, boron nitride and oxide are formed films and obtains.

Especially,, the coating that is obtained by PVD do not damage the intensity of basic material because can improving wearability, so it is widely used for the cutting element of desired strength, and as drill bit, the throw-away tip that end mill(ing) cutter and milling or rotary cut are used.

Recently, in order further to improve the efficient in working angles, improved cutting speed.Because this trend needs bigger wearability in instrument.Yet, high-wearing feature if desired, toughness can reduce.Realize when therefore, having required high-wearing feature and high tenacity.

In order to satisfy this demand, advised continuously or changed the method (the open No.2001-315006 (patent documentation 1) of Japan Patent) of internal stress in the filming of on the surface of the basic material of cutting element, forming such as compression stress in the substep mode.Obtain some effects in the requirement that this suggestion realizes when satisfying for wearability and toughness.

In the cutting element according to above-mentioned suggestion, the face side of the compression stress of filming from the face side of filming towards basic material improves equably or descends.Therefore, in order to improve toughness significantly, compression stress should improve towards the face side of filming from the face side of basic material.Simultaneously, in order to improve wearability significantly, the face side that compression stress should improve from the face side of filming towards basic material improves.

In other words, if reach maximal compressed stress on film coated surface, then toughness is excellent and wearability is poor.This is because towards the surface of basic material, and compression stress descends (continuously or in a step-wise fashion) equably.On the contrary, if reach maximal compressed stress on the surface of basic material, then wearability is excellent and toughness is poor.This is because towards the surface of filming, and compression stress descends (continuously or in a step-wise fashion) equably.

Especially, reach on the surface of filming in the cutting element of maximal pressure stress under compression, (in coating by after covering with paint, lacquer, colour wash, etc.) big compression stress when applying impact stress is maybe filmed and is tended to self-destruction because after formation is filmed.Then, tend to take place fine film and peel off (below, be called the film chipization), it influences the outward appearance and the cutting ability in high accuracy processing of cutting element unfriendly.

Because realize it being in the fundamental characteristics one in toughness and the wearability in the cutting element of this type, the cutting element that obtains these characteristics of higher level simultaneously is required.

Patent documentation 1: the open No.2001-315006 of Japan Patent

Summary of the invention

The problem that the present invention solves

Finished the present invention in view of aforesaid situation, the purpose of this invention is to provide the cutting element of surface applied, the inhibition that in cutting element, has obtained excellent toughness and wearability and realized the rete chipization.

The mode of dealing with problems

Study in order to address the above problem, the inventor expects as a result, if the compression stress on the surface portion of filming that forms as outermost layer on the basic material is lowered, then can improve in the inner compression stress of filming, with the relative peak of formation in the intensity distributions of compression stress, near relative peak, can be suppressed at the crackle expansion that takes place on the film coated surface and meanwhile high wearability and be kept and improve simultaneously toughness for the inhibitory action of rete chipization from the teeth outwards.Finished the present invention based on this notion and further investigation.

Specifically, surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: compression stress on the surface of filming will be from the surface of filming towards film coated surface and first intermediate point between the bottom surface of filming improves continuously and on first intermediate point compression stress reach relative peak.Because reach relative peak on first intermediate point, the crackle that takes place on the surface of filming further can suppress effectively towards the development of the bottom surface of filming.Therefore, first intermediate point is not to be positioned on the bottom surface (overlapping) of filming, but as described above between the surface of filming and the bottom surface of filming.

Mainly comprise four embodiments (being first to the 4th embodiment as described below) according to surface coating cutting tool of the present invention, as the embodiment (especially, the intensity distributions towards the bottom surface of filming) of intensity distributions from first intermediate point.

Be characterised in that according to the intensity distributions of first embodiment of the present invention and on the surface of filming, reach lowest compression stress and to keep steady state value to this compression stress of the bottom surface of filming from first intermediate point.

Here, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.In addition, first intermediate point can be in film coated surface at a distance of be equivalent to coating thickness at least 0.1% to 50% position at the most.

Can be set to the value of the 25-95% of the compression stress on first intermediate point that is equivalent to filming in the lip-deep compression stress of filming.

Additionally, can be set to the value of the 35-85% of the compression stress on first intermediate point that is equivalent to filming in the lip-deep compression stress of filming.

Compression stress can reach minimum of a value on the surface of filming, this lowest compression stress can from the surface of filming to the predetermined distance of first intermediate point kept and afterwards compression stress can improve continuously towards first intermediate point.

Intensity distributions according to second embodiment of the present invention is characterised in that: descend continuously towards this compression stress of the bottom surface of filming from first intermediate point.

Here, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.In addition, first intermediate point can be in film coated surface at a distance of be equivalent to coating thickness at least 0.1% to 50% position at the most.

Compression stress can reach minimum of a value on the surface of filming.Can be set to the value of the 25-95% of the compression stress on first intermediate point that is equivalent to filming in the lip-deep compression stress of filming.

Additionally, can be set to the value of the 35-85% of the compression stress on first intermediate point that is equivalent to filming in the lip-deep compression stress of filming.

The lip-deep compression stress of filming can from the surface of filming to the predetermined distance of first intermediate point kept and afterwards compression stress can improve continuously towards first intermediate point.

Intensity distributions according to the 3rd embodiment of the present invention is characterised in that: compression stress descends continuously from first intermediate point towards second intermediate point between first intermediate point and the bottom surface of filming and reaches relative minimum point at second intermediate point.

Here, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.In addition, first intermediate point can be in film coated surface at a distance of be equivalent to coating thickness at least 0.1% to 50% position at the most.Second intermediate point can be in the surface of filming at a distance of be equivalent to coating thickness at least 0.2% to 95% position at the most.

Compression stress can reach minimum of a value on the surface of filming.In addition, can be set to the value of the 25-95% of the compression stress on first intermediate point that is equivalent to filming in the lip-deep compression stress of filming.

Additionally, can be set to the value of the 35-85% of the compression stress on first intermediate point that is equivalent to filming in the lip-deep compression stress of filming.

The lip-deep compression stress of filming can from the surface of filming towards the predetermined distance of first intermediate point kept and afterwards compression stress can improve continuously towards first intermediate point.

Intensity distributions according to the 4th embodiment of the present invention is characterised in that: compression stress descends continuously from first intermediate point towards second intermediate point between first intermediate point and the bottom surface of filming and reaches relative minimum point at second intermediate point, and intensity distributions has one or more similar relative peaks between second intermediate point and the bottom surface of filming.

In addition, intensity distributions can have one or more similar relative minimum points between second intermediate point and the bottom surface of filming.Intensity distributions can have one or more similar relative peaks and one or more similar relative minimum points between second intermediate point and the bottom surface of filming, in the mode that replaces and repeat according to this order.

Whole relative minimum points can reach identical substantially compression stress and whole relative peaks can reach identical substantially compression stress.Additionally, whole relative minimum points can have the compression stress value that differs from one another with whole relative peaks.

Here, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.In addition, first intermediate point can be in film coated surface at a distance of be equivalent to coating thickness at least 0.1% to 40% position at the most.Second intermediate point can be in the surface of filming at a distance of be equivalent to coating thickness at least 0.2% to 80% position at the most.

Can be set to the value of the 10-80% of compression stress on first intermediate point that is equivalent to filming in the compression stress on second intermediate point that can reach lowest compression stress on the surface of filming and film.

Additionally, can be set to the value of the 20-60% of the compression stress on first intermediate point that is equivalent to filming in the compression stress on second intermediate point of filming.

The lip-deep compression stress of filming can from the surface of filming towards the predetermined distance of first intermediate point kept and afterwards compression stress can improve continuously towards first intermediate point.

Effect of the present invention

Owing to carry out structural design like that as mentioned above, obtained the performance of excellent toughness and excellent abrasive and the improved chipization of anti-the rete according to surface coating cutting tool of the present invention simultaneously.

Especially, can find out that from intensity distributions reach lowest compression stress on the surface of filming, wearability and the chip of anti-rete voltinism can be improved like this according to aforesaid first embodiment.In addition, the relative peak in the intensity distributions of compression stress is to film to form in the inner part near the surface, and this compression stress keeps constant from relative peak to the bottom surface of filming, and toughness is improved significantly in view of the above.

In addition, from according to the intensity distributions of aforesaid second embodiment as can be seen, less than in the inner compression stress of filming, the performance of wearability and the chipization of anti-the rete is improved like this in the lip-deep compression stress of filming.And because the relative peak in the intensity distributions of compression stress is to film to form in the inner part near the surface, the development of the crackle that takes place on film coated surface can be inhibited and toughness is improved significantly.In addition, compression stress descends to the bottom surface of filming continuously from relative peak, can obtain more excellent abrasive in view of the above.

In addition, from according to the intensity distributions of aforesaid the 3rd embodiment as can be seen, less than in the inner compression stress of filming, the performance of wearability and the chipization of anti-the rete is improved like this in the lip-deep compression stress of filming.In addition, because the relative peak in the intensity distributions of compression stress is to film to form in the inner part near the surface, similarly realized excellent toughness.In addition, relative peak not only is provided but also relative minimum point is provided, make and realized alleviating film self-destruction or the effect of stress as impacting near relative minimum point, the performance of the chipization of anti-the rete is significantly improved and can be obtained more excellent abrasive.

In addition, from according to the intensity distributions of aforesaid the 4th embodiment as can be seen, less than in the inner compression stress of filming, the performance of wearability and the chipization of anti-the rete is improved like this in the lip-deep compression stress of filming.In addition, because the relative peak in the intensity distributions of compression stress is to film to form in the inner part near the surface, similarly realized excellent toughness.In addition, relative peak not only is provided but also relative minimum point is provided, make and realized alleviating film self-destruction or the effect of stress as impacting near relative minimum point, the performance of the chipization of anti-the rete is significantly improved and can be obtained more excellent abrasive.In addition, formed a plurality of this type of relative peak and relative minimum point, the performance of toughness and wearability and the chipization of anti-the rete further is improved in view of the above.

As mentioned above, the present invention has successfully realized excellent toughness and excellent abrasive simultaneously and has been implemented in improvement on the performance of the chipization of anti-the rete, owing to the intensity distributions that has as the above compression stress that characterizes.

Description of drawings

Fig. 1 is the schematic cross-sectional view according to surface coating cutting tool of the present invention.

Fig. 2 is in the amplification schematic cross-sectional view according to a part in the filming of surface coating cutting tool of the present invention.

Fig. 3 is the figure of first embodiment that has shown the intensity distributions of the compression stress of filming.

Fig. 4 has shown when keeping on the distance of lip-deep lowest compression stress at defined of filming the figure of first embodiment of the intensity distributions of the compression stress of filming.

Fig. 5 is the schematic cross-sectional view according to surface coating cutting tool of the present invention with formed intermediate layer.

Fig. 6 is the figure of second embodiment that has shown the intensity distributions of the compression stress of filming.

Fig. 7 has shown when obtaining keeping on the distance of lip-deep compression stress at defined of filming the figure of second embodiment of the intensity distributions of the compression stress of filming.

Fig. 8 is amplifying schematic cross-sectional view according to another of a part in the filming of surface coating cutting tool of the present invention.

Fig. 9 is the figure of the 3rd embodiment that has shown the intensity distributions of the compression stress of filming.

Figure 10 has shown when obtaining keeping on the distance of lip-deep compression stress at defined of filming the figure of the 3rd embodiment of the intensity distributions of the compression stress of filming.

Figure 11 is amplifying schematic cross-sectional view according to another of a part in the filming of surface coating cutting tool of the present invention.

Figure 12 is the figure of the 4th embodiment that has shown the intensity distributions of the compression stress of filming.

Figure 13 has shown when obtaining keeping on the distance of lip-deep compression stress at defined of filming the figure of the 4th embodiment of the intensity distributions of the compression stress of filming.

The statement of reference character

1 surface coating cutting tool; 2 basic materials; 3 film; 4 surfaces of filming; 5 first intermediate points; 6 bottom surfaces of filming; 7 arrows; 8 intermediate layers; 9 second intermediate points; 10 the 3rd intermediate points; With 11 the 4th intermediate points.

The specific embodiment

Be described in more detail below the present invention.The narration of embodiment will be carried out with reference to the accompanying drawings, represent identical or corresponding element with those of the same reference character with defined.

＜surface coating cutting tool 〉

As shown in fig. 1, surface coating cutting tool 1 according to the present invention comprise basic material 2 and on basic material, form film 3.3 directly contact with the surface of basic material after forming though film in Fig. 1, can film 3 and basic material 2 between any intermediate layer that will describe, formation back, condition is to film 3 as outermost layer.In this application, " what form on basic material films " is believed to comprise the situation that wherein forms any intermediate layer.

Can be used as cutting element such as drill bit, end mill(ing) cutter, the throw-away tip of drill bit, the throw-away tip of end mill(ing) cutter suitably according to this type of surface coating cutting tool of the present invention, the throw-away tip of milling, the throw-away tip of rotary cut, metal saw, gear cutting tool, reamer, or screw tap, or the like.Especially, it is suitable for modifying cutting or precision cutting and is used for the rotary cut process.In these were used, surface coating cutting tool reached excellent toughness and wearability.In addition, because surface coating cutting tool reaches the performance of the chipization of anti-rete of excellence, the machined surface roughness of the material that is cut is improved.In addition, because the excellent light on the finished surface of the material that is cut is also accomplished, there is rough machined processing procedure also to allow simultaneously.

＜basic material 〉

Usually any basic material of basic material that is known as the application of the above-mentioned type can be used for according in the surface coating cutting tool of the present invention.For example, preferred, use hard metal (, except that WC, also to contain the material of Co as WC type hardmetal, or added Ti, Ta, the material of the carbonitride of Nb or analog), cermet (mainly by TiC, TiN, TiCN or analog are formed), high-speed steel, pottery (titanium carbide, carborundum, silicon nitride, aluminium nitride, aluminium oxide, or analog), sintered cubic bodily form boron nitride, or sintered diamond.

Among these various matrix materials, especially, WC-type hardmetal, cermet or sintered cubic bodily form boron nitride are preferably selecteed.This be because these basic materials at high temperature hardness and the balance between the intensity on excellent especially, and have the basic material that excellent characteristic can be used as the surface coating cutting tool of above-mentioned application.

＜film

According to of the present invention film be on basic material, form and as outermost layer.Form as long as film in this way, filming needn't apply the whole surface of basic material and not have to form the part of filming or not have the part of the intensity distributions of the satisfied following compression stress that will describe can be included in the surface of basic material.Be noted that the following situation that the present invention includes: wherein, when in case form and to film and when removing the surface of filming a part of by some last handling processes afterwards, the layer that newly exposes to the open air can be used as filming of the intensity distributions that satisfies compression stress of the present invention.In addition, the present invention similarly comprises following situation: wherein, when forming intermediate layer (below will describe) at basic material with between filming and removing this coating and intermediate layer when coming out equally as outermost layer by some last handling processes, intermediate layer in expose portion has been used as film (if the intermediate layer forms by a plurality of layers, then the outermost layer among a plurality of layers (as the layer on surface) is as involved in the present invention the filming) of the intensity distributions that satisfies compression stress of the present invention.

Form this and film, so that in the various characteristics such as the wearability that are used for determining employed cutting edge part, oxidation resistance, the toughness of instrument, or obtain on the chromatic characteristic to improve.The composition of filming is not particularly limited and common known composition can both adopt.For example, exemplary composition comprises the IVa elements (Ti, Zr, Hf etc.) that is selected from the periodic table of elements, Va elements (V, Nb, Ta etc.), the element (Cr of VIa family, Mo, W etc.) at least a element in, Al (aluminium), B (boron), Si (silicon), and the carbide of Ge (germanium), nitride, oxide, carbonitride, oxycarbide, oxynitride, or carbide-nitride-oxide, or their solid solution.

Especially, exemplary suitable composition comprises Ti, Al, (Ti _1-xAl _x), (Al _1-xV _x), (Ti _1-xSi _x), (Al _1-xCr _x), (Ti _1-x-yAl _xSi _y), or (Al _1-x-yCr _xV _y) nitride of (x or y represent to be not more than any number of 1) (further contain B, the material of Cr or analog also can comprise), carbonitride, oxynitride or carbide-nitride-oxide.

More preferably, exemplary composition comprises TiCN, TiN, TiSiN, TiSiCN, TiAlN, TiAlCrN, TiAlSiN, TiAlSiCrN, AlCrN, AlCrCN, AlCrVN, TiBN, TiAlBN, TiSiBN, TiBCN, TiAlBCN, TiSiBCN, AlN, AlCN, AlVN, AlVCN and analog.In these are formed, the general formula that the ratio of each atom is exemplary as described above.

Can suppose that this based film forms as the single type layer.Should be pointed out that the single type layer here is meant such structure, wherein, it is identical for each layer that the quantity of accumulation horizon can be set at type one or more and that constitute the element of this layer.So,, be also included within the single type layer here by the formed structure of a plurality of layers of different atom ratios as long as the type of element is identical.

In according to of the present invention filming, especially on the whole, the type of element is preferably identical with the ratio of atom.Yet, aforesaid single type layer is believed to comprise super multi-layer film structure, wherein one deck has the thickness that is lower than 0.1 μ m and dissimilar elements constitutes layer (if the two-layer of A and B repeatedly piled up, then the type of element between A and B is different) separately.

＜the thickness of filming 〉

Though be not particularly limited, preferably have the thickness that is not less than 0.1 μ m and is not more than 10 μ m according to of the present invention filming.If thickness is lower than 0.1 μ m, in some cases, because the improvement on various characteristics that formation caused of filming can not obtain fully.Simultaneously, if thickness surpasses 10 μ m, then film and itself can easily peel off.

The method that＜formation is filmed 〉

Be not particularly limited though form method of filming according to the present invention, film and preferably use physical vapor deposition method (PVD) to form.Adopt physical vapor deposition, the compression stress of filming can easily be changed, to form intensity distributions.

That is, have been found that when filming with the formation of physical vapor deposition method according to the research that the inventor carried out, the compression stress of filming is subjected to temperature, active gases pressure, the influence of substrate bias-voltage etc., and especially, wherein, when filming, formation influenced by the substrate bias-voltage.

It is as follows that reason is considered to.Specifically, for example, when big substrate bias-voltage put on basic material, constituting the element of filming was to offer basic material with ionized state under high-energy.Then, the impulsive force when element collision basic material become bigger and therefore the compression stress of filming that forms become bigger.On the contrary, suppose, if the substrate bias-voltage is low since basic material and the caused impact of the collision between the element under the ionized state also be little and so compression stress also be little.

So,, can obtain the intensity distributions of the compression stress of on the thickness direction of filming, filming when on basic material, forming when filming by adopting the physical vapor deposition method and by regulating the substrate bias-voltage.As following described in detail, utilize the adjusting of mechanical shock or thermal shock, or the annealing phenomenon of use heat also is possible.

Form method of filming of the present invention though physical vapor deposition preferably is adopted to, do not wish to get rid of the chemical vapour desposition that is known as the another kind of method that formation films.

Exemplary physical vapor deposition method comprises known method such as sputter or ion plating usually, and wherein the substrate bias-voltage can be regulated.Especially, among the whole bag of tricks, ion plating or magnetron sputtering are preferred the employings.

Ion plating refers to following method.Specifically, metal is used as anode as negative electrode and vacuum chamber.Then, evaporation of metal and ionization and while negative voltage (substrate bias-voltage) are applied in basic material, and ion is displaced with metal ion and is deposited on the surface of basic material like this.In this method, if neutralizing to vacuum, nitrogen supply causes and metal reaction, then formed the nitride of this metal.For example, if titanium is used as metal and causes and the nitrogen reaction, then form titanium nitrogen (TiN).

Existing various types of ion platings, however the cathode arc ion plating that reaches the primitive element (raw element) of macroion ratio is preferred especially the employing.

For the use of cathode arc ion plating, can before filming, formation carry out in the lip-deep metal ion bombardment method of basic material.Therefore, the remarkable improvement on the cohesive of filming also can realize effectively.Therefore, consider that from cohesive the cathode arc ion plating is a preferable methods.

Simultaneously, magnetron sputtering refers to following method.Specifically, after vacuum chamber reached high vacuum, Ar gas was introduced into and high voltage is put on target, thereby caused glow discharge.Then, this target is used and is carried out Ionized acceleration Ar by glow discharge and come radiation, and this target is implemented sputter then.Go out and Ionized target atom quickens and is deposited on the basic material by the substrate bias-voltage between target and substrate, therefore form film.Exemplary magnetically controlled sputter method comprises the magnetron sputtering of balance, unbalance magnetron sputtering or the like.

Use the method for physical vapor deposition method control substrate bias-voltage to show it is the method that forms the intensity distributions of the compression stress of filming, yet the present invention is not limited only to it.For example, utilize mechanical shock as applying the method for compression stress in the sandblast after forming of filming, alleviate the method for compression stress by use thermal source such as heater, laser or analog, or the combined method of these methods is possible.

＜the compression stress of filming 〉

Has compression stress according to of the present invention filming.Preferably, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.More preferably, the lower limit set of compression stress is to-10GPa and further preferably set to-8GPa, and its upper limit more preferably is set to-and 0.5GPa and more preferably being set to-1GPa.

If the compression stress of filming is lower than-15GPa, special release coated film on the crestal line part of cutting edge then, this depends on the shape (instrument that the instrument of minimum angle (included angle) is arranged or have complicated shape as cutting edge) of cutting element.Simultaneously, if the compression stress of filming is higher than 0GPa, the stress of then filming enters extended state.Then, in filming, cause crackle, cause the chipization of instrument itself.

One type the internal stress (intrinsic strain) that exists during here the compression stress of Shi Yonging is illustrated in and films, and by "-" (negative sign) numerical value (unit: GPa) express.Therefore, the absolute value of the above numerical value of this expression phrase " big compression stress (internal stress) " expression is big, represents that the absolute value of above numerical value is little and express phrase " little compression stress (internal stress) ".

Compression stress in the present invention is with sin ²The ψ method is measured.Use the sin of X ray ²The ψ method is widely used as the method for the residual stress of measurement in polycrystalline material.This measuring method be described in detail in " X-ray Stress Measurement " the 54-66 page or leaf (The Society ofMaterials Science, Japan, 1981, published by Yokendo Co., Ltd).In the present invention, at first, the penetration depth of X ray fixes by inclination method and inclination degree computing method are combined, and be in a plane of the direction that comprises measured stress and the sample surfaces normal that on the measuring position, provides, to measure, thereby prepare 2 θ-sin with respect to the various angles of the angle of diffraction 2 θ of ψ direction ²The ψ curve map.The mean pressure stress under compression that reaches this degree of depth (from the surperficial calculated distance of filming) can be that the basis records with the gradient of curve map.Similarly, sequentially measure mean pressure stress under compression that arrives different depth and the intensity distributions that mathematical method is used to find compression stress on the thickness direction of filming.

More particularly, X ray from the X ray light source enters in a kind of method by means of X-ray measurement stress of sample with predetermined angular therein, X ray by the sample diffraction is to be detected by X-ray detector, with internal stress be that the basis is measured with the detected value, can find out by following mode in the compression stress of sample interior.On the arbitrary portion of sample, enter the surface of sample along the angle of any setting from the X ray of X ray light source.When sample along the X-radiation point that passes sample and when rotating with the χ axle that overlaps with incident X-rays at the ω axle of the incident X-rays form right angle on the sample surfaces and along the time in the rotation parallel of ω axle with sample carrier, this sample requires to keep constant on the surface of sample and the angle between the incident X-rays when rotated, and change at normal on the diffraction surfaces and the angle ψ between the normal on the sample surfaces, to measure diffracted beam.

Here, consider that synchrotron radiation (SR) is preferably used as x-ray source and seeks intensity distributions on the coating thickness direction from the quality of x-ray source (as high radiance, high collimation, Wavelength variable etc.).

For from aforesaid 2 θ-sin ²Find compression stress on the ψ curve map, Young's modulus of filming and Poisson's ratio are essential.Here, Young's modulus can utilize dynamic stiffness meter or similar devices to measure, and as Poisson's ratio, uses the value that is set in about 0.2.This is because can marked change to another kind of material Poisson's ratio from a kind of material.In the present invention, the intensity distributions of compression stress is important, rather than compression stress value especially accurately.Therefore, from 2 θ-sin ²When finding compression stress among the ψ figure, the measure of seeking lattice paprmeter and interplanar distance rather than use Young's modulus can substitute the intensity distributions of compression stress.

＜intensity distributions 〉

Compression stress of filming according to the present invention changes, thereby has intensity distributions on the coating thickness direction.Here, the thickness direction of filming refers to from the surface of filming towards the direction of the bottom surface of filming (because film as the outermost layer on basic material, the bottom surface refers to outermost near the surface of basic material) with perpendicular to the direction on the surface of filming.Provide detailed description with reference to figure 2, Fig. 2 has shown the enlarged cross-sectional view of 3 the part of filming of Fig. 1.Here, the direction on coating thickness is to use from the surface 4 of filming that the arrow 7 towards the bottom surface 6 of filming shows.Though arrow 7 points to the bottom surface 6 of filming from the surface 4 of filming for convenience's sake,, this direction not necessarily is limited to direction from the top down, as long as this direction is perpendicular to the surface of filming.That is to say that the thickness direction of filming can point to the surface 4 of filming from the bottom surface 6 of filming.

Intensity distributions is represented according to the variation on the amplitude of mode in compression stress that forms distribution on the thickness direction of filming.In other words, refer to not to be to be parallel on the direction on the surface of filming but the variation of compression stress amplitude on perpendicular to the direction on the surface of filming in the intensity distributions of compression stress on the thickness direction of filming.

Intensity distributions is characterised in that in the compression stress that reaches on the surface of filming and improves continuously with first intermediate point between the bottom surface of filming towards the surface of filming from the surface of filming and compression stress reaches relative peak at first intermediate point.Hereinafter, explain first to the 4th embodiment of intensity distributions in detail.

＜intensity distributions--first embodiment 〉

First embodiment of intensity distributions is characterised in that on the surface of filming and reaches lowest compression stress (in other words, reach the compression stress of least absolute value), compression stress from the surface of filming towards improving continuously with first intermediate point between the bottom surface of filming on the surface of filming and reaching relative peak and this compression stress keeps steady state value to the bottom surface of filming from first intermediate point at first intermediate point.

This characteristic will be described in detail with reference to Fig. 2 and Fig. 3 of first embodiment that has shown intensity distributions of the present invention.Fig. 3 is the figure that shows intensity distributions, and wherein abscissa is illustrated on the thickness direction of filming and represents compression stress with the surface distance and the ordinate apart of filming.

At first, as shown in Figure 2, first intermediate point 5 is between the surface 4 of filming and the bottom surface 6 of filming.For in vertical direction with surface 4 distance apart of filming, first intermediate point 5 needn't one be positioned with this surface at a distance of being equivalent to the position (in vertical direction from the surface 4 of filming to the distance of the bottom surface 6 of filming) of 1/2 distance of coating thickness.Normally, first intermediate point 5 more approaches the surface 4 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, first intermediate point 5 be positioned at and the surface of filming 4 at a distance of be equivalent to coating thickness at least 0.1% to the position of 50% distance at the most (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming).More preferably, the lower limit set of this distance to this thickness 0.3% and further preferably set to 0.5% of this thickness, and the upper limit that should distance be set to aptly this thickness 40% and further preferably set 35% of this thickness.If will apart from be set in be lower than thickness 0.1% and when this instrument is used for finishing cut or precision cutting, the minimizing of compression stress is incomplete, the effect of the inhibition of rete chipization is that improvement effect low and on machined surface roughness does not show.In addition, if this distance is set greater than 50% of thickness, then can reduce and the improvement of toughness can not show in the effect of the increase of the internal compression stresses of filming.

Preferably, be set to the 25-95% of the compression stress on first intermediate point of filming in the lip-deep compression stress of filming.More preferably, from the teeth outwards the upper limit of compression stress be set to compression stress on first intermediate point 90% and more preferably be set to 85% of on first intermediate point compression stress, simultaneously its lower limit be set on first intermediate point compression stress 30% and more preferably be set to its 35%.

Be lower than 25% of on first intermediate point compression stress if be set, then can't obtain enough toughness in the lip-deep compression stress of filming.Simultaneously, if surpass 95% of on first intermediate point compression stress, then can reduce and the inhibition effect of rete chipization can not show in the effect of the reduction of the lip-deep compression stress of filming in the lip-deep compression stress of filming.

Peak is that foundation one position is (in Fig. 3 relatively, with the point of the surface of filming at a distance of about 0.1 μ m) observed on first intermediate point 5, and show, on the surface of filming, reach degree that the compression stress (compression stress has approximately-value of 1.8GPa in Fig. 3) of minimum of a value improves continuously and improve towards the bottom surface 6 of filming and change at peak relatively.Here, improve degree change and refer to that the value towards this compression stress of bottom surface of filming begins to become constant after reaching relative peak, as shown in Figure 3.Therefore, here relatively the meaning of peak is equal to, or more is wider than, the meaning of peak relatively, and it is the term with the related use of the function in mathematics.

In Fig. 3, compression stress only reaches on the surface of filming minimum (that is, with the point of the surface of filming at a distance of 0 μ m), yet, embodiment of the present invention are not limited to such situation, are only reaching lowest compression stress with the surface of filming at a distance of the point of 0 μ m.That is, as shown in Figure 4, the present invention also comprises the situation that the predetermined distance scope (preferably being not more than 0.5 μ m) of the bottom surface of filming keeps lowest compression stress of wherein crossing over from the surface of filming to.In other words, the present invention includes a kind of embodiment, wherein compression stress reaches minimum on the surface of filming, leap from the surface of filming to the predetermined distance (preferably being not more than 0.5 μ m) of first intermediate point keep this lowest compression stress and afterwards compression stress improve continuously towards first intermediate point.

As mentioned above, when crossing over from the surface of filming to the predetermined distance scope of the bottom surface of filming when remaining on the lip-deep lowest compression stress of filming, reached excellent especially effect on the inhibition of rete chipization and wearability, this is preferred.

Wherein compression stress situation about improving continuously to first intermediate point from the surface of filming not only comprises the situation that compression stress wherein improves by the mode protruding upward shown in Fig. 3 but also comprises the situation that compression stress wherein improves or improves linearly by the mode of downward protrusion.In addition, if compression stress generally improves to first intermediate point from the surface of filming, then the situation of the continuous raising here comprises the situation that compression stress wherein partly reduces, or the degree (slope) that wherein improves changes at a certain mid point, and maybe the situation of (with the hierarchical approaches raising) is carried out in this variation with hierarchical approaches.

Wherein compression stress value keeps constant situation to comprise that not only wherein compression stress is set to the situation of accurate steady state value but also comprises that wherein compression stress is set to the situation of steady state value substantially from first intermediate point to the bottom surface of filming.

As mentioned above, first embodiment according to intensity distributions of the present invention, compression stress reaches minimum of a value on the surface of filming, and compression stress from the surface of filming to improving continuously with first intermediate point the bottom surface of filming on the surface of filming and reaching relative peak at first intermediate point.On the surface of filming, reach lowest compression stress, improve so as much as possible in lip-deep wearability of filming and the performance of similarly improving the chipization of anti-the rete.In addition, near relative peak, reach big compression stress and compression stress and keep constantly from first intermediate point to the bottom surface of filming, excellent toughness is provided in view of the above.

In this way, surface coating cutting tool according to the present invention is successfully obtaining toughness, obtains extremely excellent effect on the performance of wearability and the chipization of anti-the rete.

This type of excellent effect can not demonstrate in common surface coating cutting tool (patent documentation 1), and the latter is characterised in that does not have relative peak and compression stress to improve equably or descend continuously or with hierarchical approaches from the surface of filming to the bottom surface of filming.

＜intensity distributions--second embodiment 〉

Second embodiment of intensity distributions is characterised in that, the lip-deep compression stress of filming from the surface of filming to the surface of filming and first intermediate point the bottom surface of filming improve continuously, and compression stress reaches relative peak on first intermediate point, and compression stress descends to the bottom surface of filming continuously from first intermediate point.

This characteristic will be described in detail with reference to Fig. 2 and Fig. 6 of second embodiment that has shown intensity distributions of the present invention.Fig. 6 is the figure that shows intensity distributions, and wherein abscissa is illustrated on the thickness direction of filming and represents compression stress with the surface distance and the ordinate apart of filming.

At first, as shown in Figure 2, first intermediate point 5 is between the surface 4 of filming and the bottom surface 6 of filming.For in vertical direction with surface 4 distance apart of filming, first intermediate point 5 needn't one be positioned with this surface at a distance of being equivalent to the position of 1/2 distance of coating thickness (in vertical direction from the surface 4 of filming to the distance of the bottom surface 6 of filming).Normally, first intermediate point 5 more approaches the surface 4 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, first intermediate point 5 be positioned at and the surface of filming at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.1% to the position of 50% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.3% and further preferably set to 0.5% of this thickness, and the upper limit that should distance be set to aptly this thickness 40% and further preferably set 35% of this thickness.If will apart from be set in be lower than thickness 0.1% and when this instrument is used for finishing cut or precision cutting, the minimizing of compression stress is incomplete, the effect of the inhibition of rete chipization is that improvement effect low and on machined surface roughness does not show.In addition, if this distance is set greater than 50% of thickness, then can reduce and the improvement of toughness can not show in the effect of the increase of the internal compression stresses of filming.

In this intensity distributions, compression stress can reach minimum of a value (in other words, compression stress reaches least absolute value) on the surface 4 of filming.Therefore, can obtain the performance of special excellent abrasive and the chipization of anti-the rete.Simultaneously, compression stress also can reach minimum of a value (in other words, compression stress reaches least absolute value) on the bottom surface 6 of filming.Therefore can obtain special excellent abrasive.

Preferably, be set to the 25-95% of the compression stress on first intermediate point of filming in the lip-deep compression stress of filming.More preferably, from the teeth outwards the upper limit of compression stress be set to compression stress on first intermediate point 90% and more preferably be set to 85% of on first intermediate point compression stress, simultaneously its lower limit be set on first intermediate point compression stress 30% and more preferably be set to its 35%.

Be lower than 25% of on first intermediate point compression stress if be set, then can't obtain enough toughness in the lip-deep compression stress of filming.Simultaneously, if surpass 95% of on first intermediate point compression stress, then can reduce and the inhibition effect of rete chipization can not show in the effect of the reduction of the lip-deep compression stress of filming in the lip-deep compression stress of filming.

Peak is that foundation one position is (in Fig. 6 relatively, with the point of the surface of filming at a distance of about 0.1 μ m) observed on first intermediate point, and show, improve continuously towards the bottom surface 6 of filming in the lip-deep compression stress of filming (compression stress that in Fig. 6, has the value of about-1.8GPa), and the degree that improves changes at relative peak.Here, improve degree change and refer to that the value towards this compression stress of bottom surface of filming begins to descend continuously after reaching relative peak, as shown in Figure 6.

In Fig. 6, peak only exists on first intermediate point relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative peak exists with certain thickness on the coating thickness direction.Here, the relative peak that exists with certain thickness refers to such situation: wherein the compression stress on relative peak since first intermediate point cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially.As mentioned above, peak exists with certain thickness since first intermediate point relatively, and toughness can further be improved like this.

Therefore, here relatively the meaning of peak is equal to, or more is wider than, as with the meaning of " the relative peak " of the term of the related use of the function in mathematics.

In Fig. 6, compression stress improves (that is, with the point of the surface of filming at a distance of 0 μ m) continuously from the surface of filming, yet embodiment of the present invention are not limited to it.That is, for example, as shown in Figure 7, the present invention also comprises wherein in the lip-deep compression stress of filming and crosses over the situation that the distance range (preferably being not more than 0.5 μ m) of regulation is maintained towards the bottom surface of filming.In other words, the present invention includes wherein less than the embodiment of the compression stress of inside (in other words in the lip-deep compression stress of filming, the absolute value of compression stress is less than the absolute value in the compression stress of inside from the teeth outwards), and compression stress is crossed over from the surface of filming the predetermined distance (preferably being not more than 0.5 μ m) of first intermediate point and is maintained and improves continuously towards first intermediate point afterwards.

As mentioned above, when crossing over from the surface of filming to that the predetermined distance scope of the bottom surface of filming remains on the lip-deep compression stress of filming, reached excellent especially effect on the inhibition of rete chipization and wearability, this is preferred.

Wherein compression stress situation about improving continuously to first intermediate point from the surface of filming not only comprises the situation that compression stress wherein improves by the mode protruding upward shown in Fig. 6 but also comprises the situation that compression stress wherein improves or improves linearly by the mode of downward protrusion.In addition, if compression stress generally improves to first intermediate point from the surface of filming, then the situation of the continuous raising here comprises the situation that compression stress wherein partly improves, or the degree (slope) that wherein improves changes at a certain mid point, and maybe the situation of (with the hierarchical approaches raising) is carried out in this variation with hierarchical approaches.

Wherein compression stress not only comprises the situation that compression stress wherein descends by the mode protruding upward shown in Fig. 6 but also comprises the situation that compression stress wherein descends or descends linearly by the mode of downward protrusion from situation about descending continuously to the surface of filming from first intermediate point.In addition, if compression stress generally descends to the bottom surface of filming from first intermediate point, then the situation of the continuous decline here comprises the situation that compression stress wherein partly improves, or the degree (slope) that wherein descends changes at a certain mid point, and maybe the situation of (with the hierarchical approaches minimizing) is carried out in this variation with hierarchical approaches.

As mentioned above, according to second embodiment of intensity distributions of the present invention, improve continuously with first intermediate point between the bottom surface of filming towards the surface of filming from the surface of filming and this compression stress reaches relative peak at first intermediate point in the lip-deep compression stress of filming., improve so as much as possible less than compression stress in the lip-deep compression stress of filming in lip-deep wearability of filming and the performance of similarly improving the chipization of anti-the rete in inside.In addition, near relative peak, reach big compression stress, therefore excellent toughness is provided.

In addition, according to second embodiment of intensity distributions of the present invention, compression stress descends to the bottom surface of filming continuously from first intermediate point, and extremely excellent abrasive is provided like this.In this way, surface coating cutting tool according to the present invention is successfully obtaining toughness, obtains extremely excellent effect on the performance of wearability and the chipization of anti-the rete.

This type of excellent effect can not demonstrate in common surface coating cutting tool (patent documentation 1), and the latter is characterised in that does not have relative peak and compression stress to improve equably or descend continuously or with hierarchical approaches from the surface of filming to the bottom surface of filming.

＜intensity distributions--the 3rd embodiment 〉

The 3rd embodiment of intensity distributions is characterised in that; Improve continuously with first intermediate point the bottom surface of filming to the surface of filming from the surface of filming and this compression stress reaches relative peak at first intermediate point in the lip-deep compression stress of filming, and compression stress from first intermediate point to descending continuously with second intermediate point the bottom surface of filming at first intermediate point and reaching relative minimum point at second intermediate point.

This characteristic will be described in detail with reference to Fig. 8 and Fig. 9 of the 3rd embodiment that has shown intensity distributions of the present invention.Fig. 9 is the figure that shows intensity distributions, and wherein abscissa is illustrated on the thickness direction of filming and represents compression stress with the surface distance and the ordinate apart of filming.

At first, as shown in Figure 8, first intermediate point 5 is between the surface 4 of filming and the bottom surface 6 of filming.For in vertical direction with surface 4 distance apart of filming, first intermediate point 5 needn't one be positioned with this surface at a distance of being equivalent to the position of 1/2 distance of coating thickness (in vertical direction from the surface 4 of filming to the distance of the bottom surface 6 of filming).Normally, first intermediate point 5 more approaches the surface 4 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, first intermediate point 5 be positioned at and the surface of filming 4 at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.1% to the position of 50% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.3% and further preferably set to 0.5% of this thickness, and the upper limit that should distance be set to aptly this thickness 40% and further preferably set 35% of this thickness.If will apart from be set in be lower than thickness 0.1% and when this instrument is used for finishing cut or precision cutting, the minimizing of compression stress is incomplete, the effect of the inhibition of rete chipization is that improvement effect low and on machined surface roughness does not show.In addition, if this distance is set greater than 50% of thickness, then can reduce and the improvement of toughness can not show in the effect of the increase of the internal compression stresses of filming.

In this intensity distributions, compression stress can reach minimum of a value (in other words, compression stress reaches least absolute value) on the surface 4 of filming.Therefore, can obtain special excellent abrasive.

Preferably, be set to the 25-95% of the compression stress on first intermediate point of filming in the lip-deep compression stress of filming.More preferably, from the teeth outwards the upper limit of compression stress be set to compression stress on first intermediate point 90% and more preferably be set to 85% of on first intermediate point compression stress, simultaneously its lower limit be set on first intermediate point compression stress 30% and more preferably be set to its 35%.

Be lower than 25% of on first intermediate point compression stress if be set, then can't obtain enough toughness in the lip-deep compression stress of filming.Simultaneously, if surpass 95% of on first intermediate point compression stress, then can reduce and the inhibition effect of rete chipization can not show in the effect of the reduction of the lip-deep compression stress of filming in the lip-deep compression stress of filming.

Peak is that foundation one position is (in Fig. 9 relatively, with the point of the surface of filming at a distance of about 0.1 μ m) observed on first intermediate point, and show in the lip-deep compression stress of filming (compression stress that in Fig. 9, has the value of about-1.8GPa) and improve continuously, and the degree that improves changes at relative peak towards the bottom surface 6 of filming.Here, improve degree change and refer to that the value towards second this compression stress of intermediate point begins to descend continuously after reaching relative peak, as shown in Figure 9.

In Fig. 9, peak only exists on first intermediate point relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative peak exists with certain thickness on the coating thickness direction.Here, the relative peak that exists with certain thickness refer to wherein on peak relatively compression stress since first intermediate point cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially.As mentioned above, peak exists with certain thickness since first intermediate point relatively, and toughness can further be improved like this.

Therefore, here relatively the meaning of peak is equal to, or more is wider than, as with the meaning of the term " relative peak " of the related use of the function in mathematics.

Simultaneously, as shown in Figure 8, second intermediate point 9 is between first intermediate point 5 and the bottom surface 6 of filming, yet, second intermediate point 9 not necessarily must be positioned at first intermediate point 5 at a distance of being equivalent to a position of that distance of 1/2 of the distance from first intermediate point 5 to the bottom surface 6 of filming in vertical direction.Normally, second intermediate point 9 more approaches the surface 6 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, second intermediate point 9 be positioned at and the surface of filming at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.2% to the position of 95% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.5% and further preferably set to 1.0% of this thickness, and the upper limit that should distance be set to aptly this thickness 90% and further preferably set 80% of this thickness.If distance is set to and is lower than 0.2% of thickness, then the application of compression stress be not enough and and the improvement on toughness can not show.In addition, if this distance is set to greater than 95% of thickness, then the minimizing of compression stress is not enough, and can't demonstrate effect that suppresses the rete chipization and the effect of improving wearability.

Preferably, the compression stress on second intermediate point is set to the 20-90% that goes up compression stress at first intermediate point (peak relatively).More preferably, the upper limit of compression stress on second intermediate point be set to compression stress on first intermediate point 85% and more preferably be set to 80% of this compression stress, simultaneously, its lower limit be set to compression stress 30% and more preferably be set to its 40%.

If will be set to 20% of the compression stress that is lower than on first intermediate point in the compression stress on second intermediate point, then the reduction of compression stress is excessive and can't obtains enough toughness.Simultaneously, if surpass 90% of compression stress on first intermediate point in the compression stress on second intermediate point, then impact absorption (stress relaxation) is incomplete, and the effect that suppresses the rete chipization can descend and can't obtain to improve the effect of wearability.

Peak is that foundation one position is (in Fig. 9 relatively, with the point of the surface of filming at a distance of about 0.4 μ m) observed on second intermediate point, and show that the compression stress (compression stress that has the value of about-5GPa in Fig. 9) on first intermediate point 5 descends continuously towards the bottom surface 6 of filming, and the degree that descends changes in relative minimum point.Here, the decline degree change refers to begin to improve continuously towards bottom surface 6 these compression stresses of filming after reaching relative minimum point, as shown in Figure 9.

In Fig. 9, minimum point only exists on second intermediate point relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative minimum point exists with certain thickness on the coating thickness direction.Here, the relative minimum point that exists with certain thickness refer to wherein on minimum point relatively compression stress since second intermediate point cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially.As mentioned above, minimum point exists with certain thickness since second intermediate point relatively, and wearability can further be improved like this.

Therefore, here relatively the meaning of minimum point is equal to, or more is wider than, as with the meaning of the relative minimum point of the term of the related use of the function in mathematics.

Though the embodiment that the compression stress wherein of having shown Fig. 9 improves to the bottom surface of filming continuously from second intermediate point, but, embodiment of the present invention are not limited to it, and comprise the wherein situation of compression stress from second intermediate point to the bottom surface maintenance constant (constant substantially) of filming.When compression stress from second intermediate point when improve continuously the bottom surface of filming, obtain excellent toughness.On the other hand, when compression stress keeps steady state value from second intermediate point to the bottom surface of filming, shown the effect of further improvement wearability.

In Fig. 9, compression stress improves (that is, with the point of the surface of filming at a distance of 0 μ m) continuously from the surface of filming, yet embodiment of the present invention are not limited to it.That is, for example, as shown in Figure 10, the present invention also comprises wherein in the lip-deep compression stress of filming and crosses over the situation that the distance range (preferably being not more than 0.5 μ m) of regulation is maintained towards the bottom surface of filming.In other words, the present invention includes wherein less than the embodiment of the compression stress of inside (in other words in the lip-deep compression stress of filming, the absolute value of compression stress is less than the absolute value in the compression stress of inside from the teeth outwards), and compression stress is crossed over from the surface of filming the predetermined distance (preferably being not more than 0.5 μ m) of first intermediate point and is maintained and improves continuously towards first intermediate point afterwards.

As mentioned above, when crossing over from the surface of filming to that the predetermined distance scope of the bottom surface of filming remains on the lip-deep compression stress of filming, reached excellent especially effect on the inhibition of rete chipization and wearability, this is preferred.

Compression stress situation about descending continuously not only comprises the situation that compression stress wherein descends by the mode protruding upward shown in Fig. 9 but also comprises the situation that compression stress wherein descends or descends linearly by the mode of downward protrusion in this application.In addition, if compression stress generally descends, then the situation of continuous decline in this application comprises the situation that compression stress wherein partly improves, or the degree (slope) that wherein descends changes at a certain mid point, and maybe the situation of (with hierarchical approaches decline) is carried out in this variation with hierarchical approaches.

Compression stress situation about improving continuously not only comprises the situation that compression stress wherein improves by the mode of the protruding upward or downward protrusion shown in Fig. 9 but also comprises the situation that compression stress wherein improves linearly in this application.In addition, if compression stress generally descends, then the situation of continuous raising in this application comprises the situation that compression stress wherein partly descends, or the degree (slope) that wherein improves changes at a certain mid point, and maybe the situation of (with the hierarchical approaches raising) is carried out in this variation with hierarchical approaches.

As mentioned above, according to the 3rd embodiment of intensity distributions of the present invention, improve continuously with first intermediate point between the bottom surface of filming towards the surface of filming from the surface of filming and this compression stress reaches relative peak at first intermediate point in the lip-deep compression stress of filming., improved wearability like this and also obtained the performance of the excellent chipization of anti-the rete less than compression stress in the lip-deep compression stress of filming in inside.In addition, demonstrated near the remarkable result of the excellent toughness relative peak.

In addition, according to the 3rd embodiment of intensity distributions of the present invention, compression stress descends continuously from first intermediate point to second intermediate point and obtains relative minimum point at second intermediate point, and more excellent abrasive is provided like this.In this way, surface coating cutting tool according to the present invention is successfully obtaining toughness, obtains extremely excellent effect on the performance of wearability and the chipization of anti-the rete.

This type of excellent effect can not demonstrate in common surface coating cutting tool (patent documentation 1), and the latter is characterised in that not to be had relative peak and do not have relative minimum point and compression stress to improve equably or descend continuously or with hierarchical approaches from the surface of filming to the bottom surface of filming yet.

＜intensity distributions--the 4th embodiment 〉

The 4th embodiment of intensity distributions is characterised in that; Improve continuously with first intermediate point the bottom surface of filming to the surface of filming from the surface of filming and this compression stress reaches relative peak at first intermediate point in the lip-deep compression stress of filming, and compression stress from first intermediate point to descending continuously with second intermediate point the bottom surface of filming at first intermediate point and reach relative minimum point at second intermediate point, and intensity distributions has the one or more similar relative peak between second intermediate point and the bottom surface of filming.

Here, similar relative peak refers to that compression stress wherein demonstrates a kind of point of behavior on intensity distributions, with be expressed as identical on the relative peak of first intermediate point and for example referring to the point that the raising degree of compression stress after compression stress improves to the bottom surface of filming continuously from second intermediate point changes.As mentioned above, between second intermediate point and the bottom surface of filming, provide one or more relative peaks, obtained more excellent toughness like this, the cracking that has taken place on film coated surface can more effectively suppress and further improve the performance of the chipization of anti-the rete towards the inner development of filming.

Simultaneously, intensity distributions can have one or more similar relative minimum points between second intermediate point and the bottom surface of filming.

Here, similar relative minimum point refers to that compression stress wherein demonstrates a kind of point of behavior on intensity distributions, with be expressed as identical on the relative minimum point of second intermediate point, and for example refer at the compression stress point that the decline degree of compression stress changes after descend continuously to the bottom surface of filming between the bottom surface that is located at second intermediate point and films.As mentioned above, between second intermediate point and the bottom surface of filming, provide one or more relative minimum points, so that the cracking that has taken place on film coated surface can more effectively suppress towards the inner development of filming, further improve the performance of the chipization of anti-the rete and demonstrate more excellent abrasive.

Intensity distributions can have one or more similar relative peaks and the one or more similar relative minimum point between second intermediate point and the bottom surface of filming, by this order with alternately and the mode that repeats.Here, the interval of the number of times of repetition and repetition is not particularly limited.If peak (being included in the relative peak of first intermediate point) is to exist with the interval that equates substantially with relative minimum point (being included in the relative minimum point of second intermediate point) relatively, the number of times that repeats can be measured relatively with the thickness of filming, like this relative distance between the peak and the distance between the minimum point relatively be the upper limit of the 0.1%-70% of coating thickness and this distance preferably be set to coating thickness 60% and more preferably be set to 50% of coating thickness, lower limit that simultaneously should distance preferably be set to thickness 0.15% and more preferably be set to 0.2% of thickness.

Be lower than 0.1% of thickness if this distance set, the interval of the Chong Fuing weak point stable stress state that can't obtain to film too then, this causes the easy generation of rete chipization.Simultaneously, if this distance is set greater than 70% of thickness, the effect of then a plurality of relative minimum points or the formation of peak relatively can reduce.

As mentioned above, a plurality of relative peaks and relative minimum point be by this order with alternately and the mode that repeats exist, like this, the quantity that the development energy of the cracking that wherein takes place on film coated surface can absorbed point can increase.Therefore, cracking can more effectively be suppressed towards the inner development of filming, and further improves the performance of the chipization of anti-the rete and demonstrates more excellent abrasive and toughness.

The various characteristics of aforesaid intensity distributions will go through with reference to Figure 11 and Figure 12 of the 4th embodiment that has shown intensity distributions of the present invention.Figure 12 is the figure that shows intensity distributions, and wherein abscissa is illustrated on the thickness direction of filming and represents compression stress with the surface distance and the ordinate apart of filming.

At first, as shown in Figure 11, first intermediate point 5 is between the surface 4 of filming and the bottom surface 6 of filming.For in vertical direction with surface 4 distance apart of filming, first intermediate point 5 needn't one be positioned with this surface at a distance of being equivalent to the position of 1/2 distance of coating thickness (in vertical direction from the surface 4 of filming to the distance of the bottom surface 6 of filming).Normally, first intermediate point 5 more approaches the surface 4 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, first intermediate point 5 be positioned at and the surface of filming 4 at a distance of be equivalent to coating thickness at least 0.1% to the position of 40% distance at the most (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming).More preferably, the lower limit set of this distance to this thickness 0.3% and further preferably set to 0.5% of this thickness, and the upper limit that should distance be set to aptly this thickness 35% and further preferably set 30% of this thickness.If will apart from be set in be lower than thickness 0.1% and when this instrument is used for finishing cut or precision cutting, the minimizing of compression stress is incomplete, the effect of the inhibition of rete chipization is that improvement effect low and on machined surface roughness does not show.In addition, if this distance is set at greater than 40% of thickness, then can reduce and the improvement of toughness can not show in the effect of the increase of the internal compression stresses of filming.

In this intensity distributions, compression stress can reach minimum of a value (in other words, compression stress reaches least absolute value) on the surface 4 of filming.Therefore, can obtain excellent especially toughness.

Preferably, be set to the 25-95% of the compression stress on first intermediate point of filming in the lip-deep compression stress of filming.More preferably, from the teeth outwards the upper limit of compression stress be set to compression stress on first intermediate point 90% and more preferably be set to 85% of on first intermediate point compression stress, simultaneously its lower limit be set on first intermediate point compression stress 30% and more preferably be set to its 35%.Be lower than 25% of on first intermediate point compression stress if be set, then can't obtain enough toughness in the lip-deep compression stress of filming.Simultaneously, if surpassed in 95% of the compression stress of first intermediate point in the lip-deep compression stress of filming, then the effect in the minimizing of the lip-deep compression stress of filming can reduce, and impact absorption (stress relaxation) is incomplete and can't demonstrates the effect of the inhibition of rete chipization.

There are a plurality of relative peaks from the surface 4 of filming to the bottom surface 6 of filming.As for the position, the first relative peak of counting from film coated surface 4 sides is to occur at aforesaid first intermediate point, and any one or a plurality of point (for example, the 3rd intermediate point 10 in Figure 11) between second intermediate point 9 and the bottom surface 6 of filming are observed relative peak.Here, this relative peak finger pressure stress under compression demonstrates the point of following a kind of behavior on intensity distributions: the degree that compression stress improves after compression stress improves continuously towards the bottom surface 6 of filming can change.Here, improving degree change is meant: the compression stress that improves towards the bottom surface 6 of filming begins to descend continuously after arriving relative peak.

Though Figure 11 only is shown as the 3rd intermediate point 10 the relative peak of expression second or back, this expression is for convenience's sake.Second or the relative peak of back similarly without limits.

In Figure 12, peak exists as do not have the point of width on the coating thickness direction relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative peak exists with certain thickness (width) on the coating thickness direction.Here, the situation of the relative peak that exists with certain thickness refer to wherein the compression stress on peak relatively cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially value.As mentioned above, peak is to exist with certain thickness relatively, and toughness can further be improved like this.

Therefore, here relatively the meaning of peak is equal to, or more is wider than, as with the meaning of the relative peak of the term of the related use of the function in mathematics.

Simultaneously, as shown in Figure 11, second intermediate point 9 is between first intermediate point 5 and the bottom surface 6 of filming, yet, second intermediate point 9 not necessarily must and first intermediate point 5 at a distance of being equivalent in vertical direction a position of that distance of 1/2 from first intermediate point 5 to the distance the bottom surface 6 of filming.

Preferably, second intermediate point 9 be positioned at and the surface of filming at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.2% to the position of 80% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.5% and further preferably set to 1% of this thickness, and the upper limit that should distance be set to aptly this thickness 75% and further preferably set 70% of this thickness.If distance is set to and is lower than 0.2% of thickness, then the application of compression stress be not enough and and the improvement effect on toughness can not show.In addition, if this distance is set to greater than 80% of thickness, then the minimizing of compression stress is not enough, and can't demonstrate effect that suppresses the rete chipization and the effect of improving wearability.

Preferably, the compression stress on second intermediate point is set to the 10-80% that goes up compression stress at first intermediate point (peak relatively).More preferably, the upper limit of compression stress on second intermediate point be set to compression stress on first intermediate point 70% and more preferably be set to 60% of on first intermediate point compression stress, simultaneously its lower limit be set on first intermediate point compression stress 15% and more preferably be set to its 20%.If there are two or more relative minimum points, each relative minimum point preferably has the compression stress in above-mentioned scope.

If will be set to 10% of the compression stress that is lower than on first intermediate point in the compression stress on second intermediate point, then the reduction of compression stress is excessive and can't obtains enough toughness.Simultaneously, if surpass 80% of compression stress on first intermediate point in the compression stress on second intermediate point, it is incomplete then impacting (stress relaxation), and the effect that suppresses the rete chipization can descend and can't be presented at improvement effect on the wearability.

There are one or more relative minimum points from the surface 4 of filming to the bottom surface 6 of filming.As for the position, the first relative minimum point of counting from film coated surface 4 sides is to occur at aforesaid second intermediate point 9.If have second or the relative minimum point of back, then observe relative minimum point (for example, the 4th intermediate point 11 in Figure 11) on any one between second intermediate point 9 and the bottom surface 6 of filming or a plurality of point.Minimum point finger pressure stress under compression demonstrates the point of following a kind of behavior on intensity distributions relatively: the degree that compression stress descends after compression stress descends continuously towards the bottom surface 6 of filming can change.Here, improving degree change is meant: the compression stress that descends towards the bottom surface 6 of filming begins to improve continuously after arriving relative minimum point.

Though Figure 11 only is shown as the 4th intermediate point 11 the relative minimum point of expression second or back, this expression is for convenience's sake.Second or the relative minimum point of back similarly without limits.

In Figure 12, minimum point exists as do not have the point of width on the coating thickness direction relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative minimum point exists with certain thickness (width) on the coating thickness direction.Here, the situation of the relative minimum point that exists with certain thickness refer to wherein the compression stress on minimum point relatively cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially value.As mentioned above, minimum point exists with certain thickness relatively, and wearability can further be improved like this.

Therefore, here relatively the meaning of minimum point is equal to, or more is wider than, as with the meaning of the relative minimum point of the term of the related use of the function in mathematics.

Relatively peak and relatively minimum point preferably by this order with alternately and the mode that repeats between the surface 4 of filming and the bottom surface 6 of filming, exist, as shown in Figure 12.In addition, preferred, this relative peak is to exist with equal or unequal interval with relative minimum point, and compression stress is being to exist as identical substantially value on each relative peak or on each relative minimum point.

In Figure 12, compression stress improves (that is, with the point of the surface of filming at a distance of 0 μ m) continuously from the surface of filming, yet embodiment of the present invention are not limited to it.That is, for example, as shown in Figure 13, the present invention also comprises wherein in the lip-deep compression stress of filming and crosses over the situation that the distance range (preferably being not more than 0.5 μ m) of regulation is maintained towards the bottom surface of filming.In other words, the present invention includes wherein less than the embodiment of the compression stress of inside (in other words in the lip-deep compression stress of filming, the absolute value of compression stress is less than the absolute value in the compression stress of inside from the teeth outwards), and compression stress is crossed over from the surface of filming the predetermined distance (preferably being not more than 0.5 μ m) of first intermediate point and is maintained and improves continuously towards first intermediate point afterwards.

As mentioned above, when crossing over from the surface of filming to that the predetermined distance scope of the bottom surface of filming remains on the lip-deep compression stress of filming, reached effect excellent especially in the inhibition of rete chipization and wearability, this is preferred.

Compression stress situation about descending continuously not only comprises the situation that compression stress wherein descends by the mode protruding upward shown in Figure 12 but also comprises the situation that compression stress wherein descends or descends linearly by the mode of downward protrusion in this application.In addition, if compression stress generally descends, then the situation of continuous decline in this application comprises the situation that compression stress wherein partly improves, or the degree (slope) that wherein descends changes at a certain mid point, and maybe the situation of (with hierarchical approaches decline) is carried out in this variation with hierarchical approaches.

Compression stress situation about improving continuously not only comprises the situation that compression stress wherein improves by the mode of the protruding upward or downward protrusion shown in Figure 12 but also comprises the situation that compression stress wherein improves linearly in this application.In addition, if compression stress generally increases, then the situation of continuous raising in this application comprises the situation that compression stress wherein partly descends, or the degree (slope) that wherein improves changes at a certain mid point, and maybe the situation of (with the hierarchical approaches raising) is carried out in this variation with hierarchical approaches.

Can point out that in aforesaid intensity distributions, the point of the most approaching bottom surface of filming 6 can be relative minimum point or relative peak.Therefore, the compression stress on the bottom surface 6 of filming can be in raising or be in downward trend, or additionally, minimum point or relative peak can overlap with bottom surface 6 relatively.

As mentioned above, according to the 4th embodiment of intensity distributions of the present invention, improve continuously with first intermediate point between the bottom surface of filming towards the surface of filming from the surface of filming and this compression stress reaches relative peak at first intermediate point in the lip-deep compression stress of filming., improved wearability like this and also obtained the performance of the excellent chipization of anti-the rete less than compression stress in the lip-deep compression stress of filming in inside.In addition, demonstrated near the remarkable result of the excellent toughness relative peak.

In addition, according to the 4th embodiment of intensity distributions of the present invention, compression stress descends continuously from first intermediate point to second intermediate point and obtains relative minimum point at second intermediate point, and more excellent abrasive is provided like this.In addition, according to the 4th embodiment of intensity distributions of the present invention, a plurality of relative peaks and relatively minimum point be by this order with alternately and the mode that repeats between second intermediate point and the bottom surface of filming, exist.Therefore, the cracking that takes place on film coated surface can more effectively be suppressed towards the inner development of filming, and further improves the performance of the chipization of anti-the rete and demonstrates more excellent abrasive and toughness.

In this way, surface coating cutting tool according to the present invention is successfully obtaining toughness, obtains extremely excellent effect on the performance of wearability and the chipization of anti-the rete.

This type of excellent effect can not demonstrate in common surface coating cutting tool (patent documentation 1), and the latter is characterised in that not to be had relative peak and do not have relative minimum point and compression stress to improve equably or descend continuously or with hierarchical approaches from the surface of filming to the bottom surface of filming yet.

＜other 〉

In surface coating cutting tool according to the present invention, can and film at basic material 2 and form between 3 in intermediate layer 8 arbitrarily, as shown in Figure 5.This type of intermediate layer 8 normally has the wearability of improvement or improves at basic material and the fusible performance between filming, and can implement by single layer or a plurality of layer.The bottom surface of filming here, 6 as film 3 and intermediate layer 8 between contact surface.

This intermediate layer can be for example by TiN, TiCN, and TiSiN, TiAlN, AlCrN, AlVN, TiAlCrN, TiAlSiN, TiAlSiCrN, AlCrVN or analog are formed.In these were formed, the ratio of each atom provided after the example as the general formula that composition exemplified of filming.

＜embodiment 〉

Hereinafter, the present invention will describe in detail with reference to the following examples, yet, the invention is not restricted to them.The compound composition of filming is in an embodiment confirmed by XPS (x-ray photoelectron spectroscopy analyzer).In addition, use aforesaid sin ²The ψ method is measured compression stress and thickness (or with the surface of filming distance apart).

Using sin ²In the measurement of ψ method, the ability of employed X ray is set to 10keV and diffraction maximum is set to Ti _0.5Al _0.5(embodiment 1-6, embodiment 11-16, embodiment 21-26 and the embodiment 31-36) of N, Al _0.7Cr _0.3(the embodiment 7-10) of N, Al _0.7Cr _0.25V _0.05(the embodiment 17-20) of N, Ti _0.8Si _0.2(the embodiment 27-30) of N, and Ti _0.7Si _0.2Cr _0.1(200) plane of N (embodiment 37-40).Then, measure measured diffraction maximum position and obtain 2 θ-sin by the match of Gaussian function ²The slope of ψ figure.In addition, be adopted to Young's modulus by using the measured value of dynamic stiffness meter (by the Nanoindenter of MTS Systems Corporation manufacturing), and the value of TiN (0.19) is adopted to Poisson's ratio.So set stress value.

Following filming forms by use cathode arc ion plating, yet film also can form by using balance or unbalance sputter.In addition, though following filming of forming specific composition never similarly can access similar effect with filming of composition.

＜embodiment 1-6 〉

The manufacturing of＜surface coating cutting tool 〉

At first, basic material as surface coating cutting tool, prepared and have the material shown in the following table 1 and tool shape the throw-away tip that is used to cut of (according to the method for each characteristic that will describe below estimating different and different), and throw-away tip (basic material) is installed on the cathode arc ion plating device.

Table 1

	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Basic material (JIS)	The K10 hardmetal				The K10 hardmetal	The P10 cermet
The shape of tool			CNMG120408	CNMG120408	CCMT120404
	The material that is cut	SCM415				SCM435 (4 grooves)	S45C (4 grooves)
Cutting speed (m/min)			400	150	200
	Feed speed (mm/rev)	0.15				0.25	0.2
Cutting (mm)			2.0	1.5	0.5
	Cutting oil	Use				Do not use	Use

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.5Al _0.5N is formed up to the thickness of 3 μ m, when filming on basic material is in contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 2.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 1-6 of the intensity distributions of the compression stress shown in the table 3 according to surface coating cutting tool of the present invention.

Table 2

No.	Substrate bias-voltage/elapsed time
			Embodiment 1	From beginning to 35 minutes-150V	35 minutes to 60 minutes-150V to-50V
Embodiment
	2	From beginning to 35 minutes-150V	35 minutes to 60 minutes-150V to-70V
Embodiment
	3	From beginning to 45 minutes-150V	45 minutes to 60 minutes-150V to-120V
Embodiment
	4	From beginning to 45 minutes-150V	45 minutes to 60 minutes-150V to-60V
Embodiment
	5	From beginning to 55 minutes-150V	55 minutes to 60 minutes-150V to-100V
Embodiment
	6	From beginning to 58 minutes-150V	58 minutes to 60 minutes-150V to-100V

Time showing in above table 2 since the elapsed time of metal ion after begin by the evaporation the target of alloy composition.In addition, the numerical value of voltage has shown substrate bias-voltage group in aforesaid elapsed time process in each bezel, cluster.For example, if provided single numerical value as " 150V ", this shows that the substrate bias-voltage is constant in the elapsed time.The compression stress of filming here, is similarly kept steady state value.Simultaneously, if the scope that provides as " 150V to-50V ", this shows that in the elapsed time substrate bias-voltage is reduced to-50V from-150V gradually with constant speed.Here, the compression stress of filming little by little descends, with the relative peak that has formed compression stress on the point that begins to descend at voltage.

The substrate bias-voltage changes with respect to the elapsed time or is set to steady state value, and like this, compression stress keeps forming in the intensity distributions of the compression stress that the relative peak of steady state value or section can be in filming.

Table 3

No.	Surface compression stress	First intermediate point	Relative peak
				Embodiment 1	-2.0GPa	40.0％(1.2μm)	-5.0GPa
Embodiment 2	-2.8GPa	40.0％(1.2μm)	-5.0GPa
				Embodiment 3	-4.3GPa	23.3％(0.7μm)	-5.1GPa
Embodiment 4	-2.1GPa	23.3％(0.7μm)	-5.1GPa
				Embodiment 5	-4.0GPa	6.7％(0.2μm)	-5.2GPa
Embodiment 6	-4.1GPa	1.7％(0.05μm)	-5.2GPa

Should be pointed out that in above table 3 numerical value in the bezel, cluster of compression stress has from the teeth outwards provided the shown lowest compression stress that goes out on the surface of filming.In addition, the numerical value in the bezel, cluster of first intermediate point shown on the coating thickness direction from the surface of filming to the distance first intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, the numerical value in the bezel, cluster of relative peak has shown the compression stress under this relative peak.This compression stress keeps constant (identical value) towards the bottom surface of filming.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 1 to 6.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, be characterised in that with intensity distributions: on the surface of filming, reach lowest compression stress, and this compression stress improves continuously and reaches relative peak and this compression stress keeps steady state value from first intermediate point to the bottom surface of filming at first intermediate point from the surface of filming to first intermediate point the surface of filming and the bottom surface of filming.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid first embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, the substrate bias-voltage keeps 60 minutes (comparative example 1) under-150V at metal ion.

In the surface coating cutting tool according to comparative example 1, the intensity distributions of the compression stress of not filming and compression stress are constant from the bottom surface of filming to the surface of filming.

＜embodiment 7 to 10 〉

The manufacturing of＜surface coating cutting tool 〉

At first, the basic material identical with the basic material that is used for embodiment 1 to 6 as the basic material of surface coating cutting tool and this basic material attaching in cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

With argon gas introducing and with pressure chamber in remain on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Al by alloy composition as metal evaporation sources _0.7Cr _0.3N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 4.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 7-10 of the intensity distributions of the compression stress shown in the table 5 according to surface coating cutting tool of the present invention.

Table 4

No.	Substrate bias-voltage/elapsed time
			Embodiment
7	From beginning to 55 minutes-200V	55 minutes to 60 minutes-200V to-75V
			Embodiment
8	From beginning to 55 minutes-150V	55 minutes to 60 minutes-150V to-75V
			Embodiment
9	From beginning to 55 minutes-120V	55 minutes to 60 minutes-120V to-75V
			Embodiment
10	From beginning to 55 minutes-90V	55 minutes to 60 minutes-90V to-75V

With the same in the table 2, the time showing in above table 4 since metal ion elapsed time after the start vaporizer from the target that alloy constitutes.In addition, with the same in table 2, the numerical value of voltage has shown substrate bias-voltage group corresponding in the aforesaid elapsed time in each bezel, cluster.

Table 5

No.	Surface compression stress	First intermediate point	Relative peak
				Embodiment 7	-3.0GPa	6.7％(0.2μm)	-8.0GPa
Embodiment 8	-3.1GPa	6.7％(0.2μm)	-5.0GPa
				Embodiment 9	-3.1GPa	6.7％(0.2μm)	-4.4GPa
Embodiment 10	-3.2GPa	6.7％(0.2μm)	-3.8GPa

Should be pointed out that with the same in table 3 numerical value in the bezel, cluster of compression stress has provided the shown lowest compression stress that goes out on the surface of filming from the teeth outwards in above table 5.In addition, with the same in table 3, numerical value in the bezel, cluster of first intermediate point also shown on the coating thickness direction from the surface of filming to the distance first intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, with the same in table 3, the numerical value in the bezel, cluster of relative peak has also shown compression stress at that point.This compression stress keeps steady state value (identical value) towards the bottom surface of filming.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 7 to 10.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, be characterised in that with intensity distributions: on the surface of filming, reach lowest compression stress, and this compression stress improves continuously and reaches relative peak and this compression stress keeps steady state value from first intermediate point to the bottom surface of filming at first intermediate point from the surface of filming to first intermediate point the surface of filming and the bottom surface of filming.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid first embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: at metal ion from the target that alloy constitutes after the start vaporizer, substrate bias-voltage cost 60 minutes descend equably from-200V to-20V (comparative example 2).

In the surface coating cutting tool according to comparative example 2, the intensity distributions of the compression stress of filming does not have relative peak and compression stress descends to the surface of filming equably from the bottom surface of filming.

The evaluation of the wearability of＜surface coating cutting tool 〉

Under the condition shown in the above table 1, carry out the continuous cutting test and the cutting test of interruption by the above method manufacturing according in the surface coating cutting tool of embodiment 1 to 10 and comparative example 1 and 2 each.Then, the flank wear width on cutting edge was measured as the cutting time above the time of 0.15mm.

Table 6 and 7 shown, as the evaluation result of the wearability of surface coating cutting tool, and method cutting time of measuring as mentioned above.Along with the cutting time becomes longer, wearability is excellent.In addition, in continuous cutting test, also observe the brightness on the finished surface of the material that will cut.Table 6 and 7 has similarly shown observed result.Here, the finished surface of the material that " light " expression will be cut has brightness, and the finished surface of the material that " dim " expression will be cut does not have brightness but be dim.

From table 6 and 7, can be clear that, in the cutting test of continuous cutting test and interruption, with compare with the surface coating cutting tool in 2 comparative example 1, verified, surface coating cutting tool according to the present invention in embodiment 1-10 has obtained further improved wearability (referring to continuous cutting test) and toughness (referring to the cutting test of interrupting), the performance and the further improved life-span of the chipization of anti-rete of the excellence that possesses owing to the brightness on finished surface.

＜the evaluation of brightness on the finished surface of surface coating cutting tool 〉

Each acceptance according in the surface coating cutting tool of embodiment 1 to 10 and comparative example 1 and 2 by the above method manufacturing is used to estimate a kind of test of brightness on finished surface under condition shown below.

For the condition of cutting, specifically, as shown in above table 1, S45C is as the material that is cut.Wet rotary cut (wet turning) is tested below and carried out 10 minutes under the condition: cutting speed is set to 200m/min, and feed rate is set at 0.2mm/rev, and cutting depth (cutting) is set at 0.5mm.

Table 6 and 7 has shown the result of the evaluation of brightness on the finished surface of each surface coating cutting tool.From table 6 and 7, can be clear that, with compare with the surface coating cutting tool in 2 comparative example 1, the verified surface coating cutting tool according to the present invention in embodiment 1-10 has obtained the performance of on finished surface further improved brightness and the excellent chipization of anti-the rete.

Table 6

No.	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Embodiment 1	89 minutes (light)				19 minutes	Excellent brightness
Embodiment
	2	82 minutes (light)	21 minutes	Excellent brightness
Embodiment
	3	71 minutes (light)	29 minutes	Good light brightness
Embodiment
	4	85 minutes (light)	24 minutes	Excellent brightness
Embodiment
	5	77 minutes (light)	31 minutes	Good light brightness
Embodiment
	6	65 minutes (light)	36 minutes	Good light brightness
The comparative example 1					13 minutes (dim)	3 minutes	Dim

Table 7

No.	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Embodiment 7	85 minutes (light)				31 minutes	Good light brightness
Embodiment
	8	84 minutes (light)	27 minutes	Good light brightness
Embodiment
	9	84 minutes (light)	25 minutes	Good light brightness
Embodiment
	10	83 minutes (light)	24 minutes	Good light brightness
The comparative example 2					41 minutes (light)	3 seconds	In 1 minute, observe chipization

＜embodiment 11 to 16 〉

The manufacturing of＜surface coating cutting tool 〉

At first, basic material as surface coating cutting tool, prepared and have the material shown in the above table 1 and tool shape the throw-away tip that is used to cut of (according to the method for each characteristic that will describe below estimating different and different), and throw-away tip (basic material) is installed on the cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

With argon gas introducing and with pressure chamber in remain on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.5Al _0.5N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 8.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 11-16 of the intensity distributions of the compression stress shown in the following table 9 according to surface coating cutting tool of the present invention.

Table 8

No.	Substrate bias-voltage/elapsed time
			Embodiment
11	From beginning to 35 minutes-70V extremely-150V	35 minutes to 60 minutes-150V to-50V
			Embodiment 12	From beginning to 35 minutes-70V extremely-150V	35 minutes to 60 minutes-150V to-70V
Embodiment 13	From beginning to 45 minutes-70V extremely-150V	45 minutes to 60 minutes-150V to-120V
			Embodiment 14	From beginning to 45 minutes-60V extremely-150V	45 minutes to 60 minutes-150V to-60V
Embodiment 15	From beginning to 55 minutes-50V extremely-150V	55 minutes to 60 minutes-150V to-100V
			Embodiment 16	From beginning to 58 minutes-50V extremely-150V	58 minutes to 60 minutes-150V to-100V

Time showing in above table 8 since the elapsed time of metal ion after begin by the evaporation the target of alloy composition.In addition, the numerical value of voltage has shown substrate bias-voltage group in aforesaid elapsed time process in each bezel, cluster.For example, if the scope that provides as " 70V to-150V ", this shows that during the elapsed time substrate bias-voltage is reduced to-150V from-70V gradually with constant speed.The compression stress of filming here, little by little improves.Simultaneously, if the scope that provides as " 150V to-50V ", this shows that during the elapsed time substrate bias-voltage is reduced to-50V from-150V gradually with constant speed.Here, the compression stress of filming little by little descends, and has formed the relative peak of compression stress on the point that voltage begins to descend.

The substrate bias-voltage changed with respect to the elapsed time, can be formed in relative peak in the intensity distributions of compression stress or increase and decrease continuously in filming like this.

Table 9

No.	Surface compression stress	First intermediate point	Relative peak	Compression stress on the bottom surface
					Embodiment 11	-2.1GPa	40.0％ (1.2μm)	-5.0GPa	-3.0GPa
Embodiment 12	-2.9GPa	40.0％ (1.2μm)	-5.1GPa	-3.0GPa
					Embodiment 13	-4.4GPa	23.3％ (0.7μm)	-5.1GPa	-3.1GPa
Embodiment 14	-2.3GPa	23.3％ (0.7μm)	-5.0GPa	-2.4GPa
					Embodiment 15	-4.1GPa	6.7％ (0.2μm)	-4.9GPa	-2.0GPa
Embodiment 16	-4.0GPa	1.7％ (0.05μm)	-5.0GPa	-2.1GPa

Should be pointed out that in the bezel, cluster of the compression stress from the teeth outwards in above table 9 and on the bottom surface numerical value in the bezel, cluster of compression stress provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, the numerical value in the bezel, cluster of first intermediate point shown on the coating thickness direction from the surface of filming to the distance first intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, the numerical value in the bezel, cluster of relative peak has shown the compression stress under this relative peak.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 11 to 16.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming improves continuously and compression stress reaches relative peak at first intermediate point, and compression stress descends to the bottom surface of filming continuously from first intermediate point in the lip-deep compression stress of filming.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid second embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, the substrate bias-voltage keeps 60 minutes (comparative example 3) under-150V at metal ion.

In the surface coating cutting tool according to comparative example 3, the intensity distributions of the compression stress of not filming and compression stress are constant from the bottom surface of filming to the surface of filming.

＜embodiment 17 to 20 〉

The manufacturing of＜surface coating cutting tool 〉

At first, the basic material identical with the basic material that is used for embodiment 11 to 16 as the basic material of surface coating cutting tool and this basic material attaching in cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Al by alloy composition as metal evaporation sources _0.7Cr _0.25V _0.05N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 10.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 17-20 of the intensity distributions of the compression stress shown in the following table 11 according to surface coating cutting tool of the present invention.

Table 10

No.	Substrate bias-voltage/elapsed time
			Embodiment 17	From beginning to 55 minutes-100V extremely-200V	55 minutes to 60 minutes-200V to-70V
Embodiment 18	From beginning to 55 minutes-100V extremely-170V	55 minutes to 60 minutes-170V to-70V
			Embodiment 19	From beginning to 55 minutes-50V extremely-120V	55 minutes to 60 minutes-120V to-70V
Embodiment 20	From beginning to 55 minutes-50V extremely-100V	55 minutes to 60 minutes-100V to-70V

With the same in the table 8, the time showing in above table 10 since metal ion elapsed time after the start vaporizer from the target that alloy constitutes.In addition, with the same in table 8, the numerical value of voltage has shown the substrate bias-voltage group during the aforesaid elapsed time in each bezel, cluster.

Table 11

No.	Surface compression stress	First intermediate point	Relative peak	Compression stress on the bottom surface
					Embodiment 17	-3.1GPa	6.7％ (0.2μm)	-7.9GPa	-4.0GPa
Embodiment 18	-3.0GPa	6.7％ (0.2μm)	-5.9GPa	-3.8GPa
					Embodiment 19	-3.2GPa	6.7％ (0.2μm)	-4.5GPa	-2.0GPa
Embodiment 20	-3.1GPa	6.7％ (0.2μm)	-4.0GPa	-1.9GPa

Should be pointed out that with the same in table 9 numerical value in the bezel, cluster of the compression stress from the teeth outwards in above table 11 and on the bottom surface in the bezel, cluster of compression stress has provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, with the same in table 9, numerical value in the bezel, cluster of first intermediate point also shown on the coating thickness direction from the surface of filming to the distance first intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary mark that " μ m " arranged).In addition, with the same in table 9, the numerical value in the bezel, cluster of relative peak has also shown compression stress at that point.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 17 to 20.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming improves continuously and compression stress reaches relative peak and compression stress descends to the bottom surface of filming continuously from first intermediate point at first intermediate point.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid second embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: at metal ion from the target that alloy constitutes after the start vaporizer, substrate bias-voltage cost 60 minutes descend equably from-200V to-20V (comparative example 4).

In the surface coating cutting tool according to comparative example 4, the intensity distributions of the compression stress of filming does not have relative peak and compression stress descends to the surface of filming equably from the bottom surface of filming.

The evaluation of the wearability of＜surface coating cutting tool 〉

Under the condition shown in the above table 1, carry out the continuous cutting test and the cutting test of interruption by the above method manufacturing according in the surface coating cutting tool of embodiment 11 to 20 and comparative example 3 and 4 each.Then, the flank wear width on cutting edge was measured as the cutting time above the time of 0.15mm.

Table 12 and 13 shown, as the evaluation result of the wearability of surface coating cutting tool, and method cutting time of measuring as mentioned above.Along with the cutting time becomes longer, wearability is excellent.In addition, in continuous cutting test, also observe the brightness on the finished surface of the material that will cut.Table 12 and 13 has similarly provided observed result.Here, the finished surface of the material that " light " expression will be cut has brightness, and the finished surface of the material that " dim " expression will be cut does not have brightness but be dim.

From table 12 and 13, can be clear that, in the cutting test of continuous cutting test and interruption, with compare with the surface coating cutting tool in 4 comparative example 3, verified, surface coating cutting tool according to the present invention in embodiment 11-20 has obtained further improved wearability (referring to continuous cutting test) and toughness (referring to the cutting test of interrupting), the performance and the further improved life-span of the chipization of anti-rete of the excellence that possesses owing to the brightness on finished surface.

＜the evaluation of brightness on the finished surface of surface coating cutting tool 〉

Each acceptance according in the surface coating cutting tool of embodiment 11 to 20 and comparative example 3 and 4 by the above method manufacturing is used to estimate a kind of test of brightness on finished surface under condition shown below.

For the condition of cutting, specifically, as shown in above table 1, S45C is as the material that is cut.Wet rotary cut is tested below and carried out 10 minutes under the condition: cutting speed is set to 200m/min, and feed rate is set at 0.2mm/rev, and cutting depth (cutting) is set at 0.5mm.

Table 12 and 13 has shown the result of the evaluation of brightness on the finished surface of each surface coating cutting tool.From table 12 and 13, can be clear that, with compare with the surface coating cutting tool in 4 comparative example 3, the verified surface coating cutting tool according to the present invention in embodiment 11-20 has obtained the performance of on finished surface further improved brightness and the excellent chipization of anti-the rete.

Table 12

No.	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Embodiment 11	105 minutes (light)				17 minutes	Excellent brightness
Embodiment 12			100 minutes (light)	19 minutes	Excellent brightness
	Embodiment 13	82 minutes (light)				27 minutes	Excellent brightness
Embodiment 14			102 minutes (light)	22 minutes	Excellent brightness
	Embodiment 15	85 minutes (light)				27 minutes	Excellent brightness
Embodiment 16			75 minutes (light)	33 minutes	Excellent brightness
	The comparative example 3	12 minutes (dim)				3 minutes	Dim

Table 13

No.	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Embodiment 17	95 minutes (light)				27 minutes	Good light brightness
Embodiment 18			101 minutes (light)	25 minutes	Good light brightness
	Embodiment 19	94 minutes (light)				23 minutes	Excellent brightness
Embodiment 20			92 minutes (light)	22 minutes	Excellent brightness
	The comparative example 4	40 minutes (dim)				3 seconds	In 1 minute, observe chipization

＜embodiment 21 to 26 〉

The manufacturing of＜surface coating cutting tool 〉

At first, basic material as surface coating cutting tool, prepared and have the material shown in the above table 1 and tool shape the throw-away tip that is used to cut of (according to the method for each characteristic that will describe below estimating different and different), and throw-away tip (basic material) is installed on the cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.5Al _0.5N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 14.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 21-26 of the intensity distributions of the compression stress shown in the following table 15 according to surface coating cutting tool of the present invention.

Table 14

No.	Substrate bias-voltage/elapsed time
				Embodiment 21	From beginning to 20 minutes-170V to-70V	20 minutes to 35 minutes-70V to-150V	35 minutes to 60 minutes-150V to-50V
Embodiment 22	From beginning to 20 minutes-170V to-70V	20 minutes to 35 minutes-70V to-150V	35 minutes to 60 minutes-150V to-70V
				Embodiment 23	From beginning to 20 minutes-170V to-70V	20 minutes to 45 minutes-70V to-150V	45 minutes to 60 minutes-150V to-120V
Embodiment 24	From beginning to 30 minutes-170V to-70V	30 minutes to 45 minutes-70V to-150V	45 minutes to 60 minutes-150V to-60V
				Embodiment 25	From beginning to 30 minutes-170V to-70V	30 minutes to 55 minutes-70V to-150V	55 minutes to 60 minutes-150V to-100V
Embodiment 26	From beginning to 30 minutes-170V to-70V	30 minutes to 58 minutes-70V to-150V	58 minutes to 60 minutes-150V to-100V

Time showing in above table 14 since the elapsed time of metal ion after begin by the evaporation the target of alloy composition.In addition, the numerical value of voltage has shown substrate bias-voltage group in aforesaid elapsed time process in each bezel, cluster.For example, if the scope that provides as " 170V to-70V ", this shows that in the elapsed time substrate bias-voltage is reduced to-70V from-170V gradually with constant speed.The compression stress of filming here, little by little descends.Simultaneously, if the scope that provides as " 70V to-150V ", this shows that in the elapsed time substrate bias-voltage is increased to-150V from-70V gradually with constant speed.The compression stress of filming here, little by little improves.On being transformed on the point of raising and being transformed in the raising of voltage the point of decline, the decline of voltage formed the relative minimum point and relative peak of compression stress respectively.

The substrate bias-voltage changed with respect to the elapsed time, can be formed in the relative minimum point in the intensity distributions of compression stress and relative peak or decline or raising continuously in filming like this.

Table 15

No.	Surface compression stress	First intermediate point	Relative peak	Second intermediate point	Relative minimum point	Compression stress on the bottom surface
							Embodiment 21	-2.0GPa	43.3％ (1.3μm)	-5.0GPa	66.7％ (2.0μm)	-2.9GPa	-5.9GPa
Embodiment 22	-3.0GPa	43.3％ (1.3μm)	-5.0GPa	66.7％ (2.0μm)	-3.1GPa	-6.0GPa
							Embodiment 23	-4.5GPa	23.3％ (0.7μm)	-5.1GPa	66.7％ (2.0μm)	-3.0GPa	-6.0GPa
Embodiment 24	-2.3GPa	23.3％ (0.7μm)	-4.9GPa	50.0％ (1.5μm)	-2.9GPa	-6.0GPa
							Embodiment 25	-3.9GPa	6.7％ (0.2μm)	-5.0GPa	50.0％ (1.5μm)	-3.0GPa	-6.1GPa
Embodiment 26	-4.1GPa	1.7％ (0.05μm)	-4.9GPa	50.0％ (1.5μm)	-3.0GPa	-6.1GPa

Should be pointed out that in the bezel, cluster of the compression stress from the teeth outwards in above table 15 and on the bottom surface numerical value in the bezel, cluster of compression stress provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, numerical value in the bezel, cluster of first intermediate point and the numerical value in the bezel, cluster of second intermediate point have shown and are being clipped to first intermediate point and to the distance second intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged) from the surface branch of filming on the coating thickness direction.In addition, in the bezel, cluster of relative peak with bezel, cluster in relative minimum point in numerical value shown respectively compression stress under relative peak and relative minimum point.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 21 to 26.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming improves continuously and compression stress reaches relative peak at first intermediate point, and compression stress descends to second intermediate point first intermediate point and the bottom surface of filming continuously from first intermediate point, on second intermediate point, reach relative minimum point and improve continuously to the bottom surface of filming from second intermediate point.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid the 3rd embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, the substrate bias-voltage keeps 60 minutes (comparative example 5) under-150V at metal ion.

In the surface coating cutting tool according to comparative example 5, the intensity distributions of the compression stress of filming does not have relative peak and does not have relative minimum point yet, and compression stress descends to the surface of filming equably from the bottom surface of filming.

＜embodiment 27 to 30 〉

The manufacturing of＜surface coating cutting tool 〉

At first, the basic material identical with the basic material that is used for embodiment 21 to 26 as the basic material of surface coating cutting tool and this basic material attaching in cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.8Si _0.2N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 16.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 27-30 of the intensity distributions of the compression stress shown in the following table 17 according to surface coating cutting tool of the present invention.

Table 16

No.	Substrate bias-voltage/elapsed time
				Embodiment 27	From beginning to 30 minutes-170V to-100V	30 minutes to 58 minutes-100V to-200V	58 minutes to 60 minutes-200V to-70V
Embodiment 28	From beginning to 30 minutes-170V to-100V	30 minutes to 58 minutes-100V to-170V	58 minutes to 60 minutes-170V to-70V
				Embodiment 29	From beginning to 30 minutes-150V to-50V	30 minutes to 58 minutes-50V to-120V	58 minutes to 60 minutes-120V to-70V
Embodiment 30	From beginning to 30 minutes-150V to-50V	30 minutes to 58 minutes-50V to-100V	58 minutes to 60 minutes-100V to-70V

With the same in the table 14, the time showing in above table 16 since metal ion elapsed time after the start vaporizer from the target that alloy constitutes.In addition, with the same in table 14, the numerical value of voltage has shown the substrate bias-voltage group during the aforesaid elapsed time in each bezel, cluster.

Table 17

No.	Surface compression stress	First intermediate point	Relative peak	Second intermediate point	Relative minimum point	Compression stress on the bottom surface
							Embodiment 27	-3.0GPa	6.7％ (0.2μm)	-8.0GPa	50％ (1.5μm)	-3.9GPa	-6.1GPa
Embodiment 28	-3.0GPa	6.7％ (0.2μm)	-6.1GPa	50％ (1.5μm)	-4.0GPa	-5.9GPa
							Embodiment 29	-3.1GPa	6.7％ (0.2μm)	-4.5GPa	50％ (1.5μm)	-2.0GPa	-5.0GPa
Embodiment 30	-2.9GPa	6.7％ (0.2μm)	-3.9GPa	50％ (1.5μm)	-2.0GPa	-4.9GPa

Should be pointed out that with the same in table 15 numerical value in the bezel, cluster of the compression stress from the teeth outwards in above table 17 and on the bottom surface in the bezel, cluster of compression stress has provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, with the same in table 15, numerical value in the bezel, cluster of first intermediate point and the numerical value in the bezel, cluster of second intermediate point also shown on the coating thickness direction from the surface of filming to the distance each intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, with the same in table 15, in the bezel, cluster of relative peak with bezel, cluster in relative minimum point in numerical value also shown the compression stress on these aspects respectively.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 27 to 30.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming improves continuously and compression stress reaches relative peak at first intermediate point, and compression stress descends to second intermediate point first intermediate point and the bottom surface of filming continuously from first intermediate point, on second intermediate point, reach relative minimum point and improve continuously to the bottom surface of filming from second intermediate point.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid the 3rd embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: at metal ion from the target that alloy constitutes after the start vaporizer, substrate bias-voltage cost 60 minutes descend equably from-200V to-20V (comparative example 6).

In the surface coating cutting tool according to comparative example 6, the intensity distributions of the compression stress of filming does not have relative peak or relative minimum point, and compression stress descends to the surface of filming equably from the bottom surface of filming.

The evaluation of the wearability of＜surface coating cutting tool 〉

Be received in wet (water miscible emulsion) continous way cutting test and interrupt cutting test under the condition shown in the above table 1 by the above method manufacturing according in the surface coating cutting tool of embodiment 21 to 30 and comparative example 5 and 6 each.Then, the flank wear width on cutting edge was measured as the cutting time above the time of 0.20mm.

Table 18 and 19 shown, as the evaluation result of the wearability of surface coating cutting tool, and method cutting time of measuring as mentioned above.Along with the cutting time becomes longer, wearability is excellent.In addition, in continuous cutting test, also observe the brightness on the finished surface of the material that will cut.Table 18 and 19 has similarly provided observed result.Here, the finished surface of the material that " light " expression will be cut has brightness, and the finished surface of the material that " dim " expression will be cut does not have brightness but be dim.

From table 18 and 19, can be clear that, in the cutting test of continuous cutting test and interruption, with compare with the surface coating cutting tool in 6 comparative example 5, verified, surface coating cutting tool according to the present invention in embodiment 21-30 has obtained further improved wearability (referring to continuous cutting test) and toughness (referring to the cutting test of interrupting), the performance and the further improved life-span of the chipization of anti-rete of the excellence that possesses owing to the brightness on finished surface.

＜the evaluation of brightness on the finished surface of surface coating cutting tool 〉

Each acceptance according in the surface coating cutting tool of embodiment 21 to 30 and comparative example 5 and 6 by the above method manufacturing is used to estimate a kind of test of brightness on finished surface under condition shown below.

For the condition of cutting, specifically, as shown in above table 1, S45C is as the material that is cut.Wet rotary cut is tested below and carried out 10 minutes under the condition: cutting speed is set to 200m/min, and feed rate is set at 0.2mm/rev and cutting depth is set at 0.5mm.

Table 18 and 19 has shown the result of the evaluation of brightness on the finished surface of each surface coating cutting tool.From table 18 and 19, can be clear that, with compare with the surface coating cutting tool in 6 comparative example 5, the verified surface coating cutting tool according to the present invention in embodiment 21-30 has obtained the performance of on finished surface further improved brightness and the excellent chipization of anti-the rete.

Table 18

No.	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Embodiment 21	112 minutes (light)				23 minutes	Excellent brightness
Embodiment 22			103 minutes (light)	24 minutes	Excellent brightness
	Embodiment 23	85 minutes (light)				30 minutes	Excellent brightness
Embodiment 24			108 minutes (light)	25 minutes	Excellent brightness
	Embodiment 25	89 minutes (light)				32 minutes	Excellent brightness
Embodiment 26			79 minutes (light)	36 minutes	Excellent brightness
	The comparative example 5	12 minutes (dim)				3 minutes	Dim

Table 19

No.	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Embodiment 27	99 minutes (light)				37 minutes	Good light brightness
Embodiment 28			105 minutes (light)	34 minutes	Excellent brightness
	Embodiment 29	98 minutes (light)				33 minutes	Excellent brightness
Embodiment 30			96 minutes (light)	32 minutes	Excellent brightness
	The comparative example 6	27 minutes (dim)				25 seconds	In 3 minutes, observe chipization

＜embodiment 31 to 36 〉

The manufacturing of＜surface coating cutting tool 〉

At first, basic material as surface coating cutting tool, prepared and have the material shown in the above table 1 and tool shape the throw-away tip that is used to cut of (according to the method for each characteristic that will describe below estimating different and different), and throw-away tip (basic material) is installed on the cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.5Al _0.5N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 20.In this way, the arc current of 100A is supplied to negative electrode to reach 60 minutes and metal ion produces from electric arc type evaparation source, made in view of the above have the embodiment 31-36 of the intensity distributions of the compression stress shown in the following table 21 according to surface coating cutting tool of the present invention.

Table 20

No.	Period 1 (time/the substrate bias-voltage)	Second round (time/the substrate bias-voltage)
			Embodiment 31	15 minutes-50V is to-150V	15 minutes-150V is to-50V
Embodiment 32	10 minutes-50V is to-150V	10 minutes-150V is to-50V
			Embodiment 33	3 minutes-50V is to-150V	3 minutes-150V is to-50V
Embodiment 34	1 minute-50V is to-150V	3 minutes-150V is to-50V
			Embodiment 35	12 minutes-210V is to-20V	12 minutes-20V is to-210V
Embodiment 36	12 minutes-150V is to-75V	12 minutes-75V is to-150V

" period 1 " in above table 20 and " second round " expression apply the substrate bias-voltage as alternately repeating the result in (reaching 60 minutes) these cycles, continue that (this cycle is from " period 1 " in the time span shown in the bezel, cluster of the bezel, cluster of period 1 and second round these cycles, yet, there is no need to finish with " second round ").That is to say, the time showing in each bezel, cluster in cycle the elapsed time, metal ion evaporates from the target that alloy constitutes in this elapsed time.The numerical value of voltage has shown the substrate bias-voltage set in aforesaid elapsed time process in each bezel, cluster.For example, if the scope that provides as " 50V to-150V ", this shows that in the elapsed time substrate bias-voltage is increased to-150V from-50V gradually with constant speed.The compression stress of filming here, little by little improves.Simultaneously, if the scope that provides as " 150V to-50V ", this shows that in the elapsed time substrate bias-voltage is reduced to-50V from-150V gradually with constant speed.The compression stress of filming here, little by little descends.The raising of voltage therein is transformed into the relative peak and relative minimum point that (promptly converting on the point of " period 1 " from " second round ") on the point that (promptly converting on the point of " second round " from " period 1 ") and the decline of voltage therein on the point of decline be transformed into raising formed compression stress respectively.

The substrate bias-voltage changed with respect to the elapsed time, can be formed in the relative peak in the intensity distributions of compression stress and relative minimum point or raising or decline continuously in filming like this.

Table 21

No.	Surface compression stress	First intermediate point	Relative peak	Second intermediate point	Relative minimum point	Relative peak counting/distance	Relative minimum point counting/distance	Compression stress on the bottom surface
									Embodiment 31	-2GPa	25％ 0.75μm	-5.2GPa is to-4.8GPa	50％ 1.5μm	-2GPa	2/ 1.5μm	1/ -μm	-2GPa
Embodiment 32	-2GPa	16.7％ 0.5μm	-5.2GPa is to-4.8GPa	33.3％ 1.0μm	-2.0GPa is to-1.6GPa	3/ 1.0μm	2/ 1.0μm	-2GPa
									Embodiment 33	-2GPa	5％ 0.15μm	-5.3GPa is to-4.7GPa	10％ 0.3μm	-2.0GPa is to-1.6GPa	10/ 0.3μm	9/ 0.3μm	-2GPa
Embodiment 34	-2GPa	1.7％ 0.05μm	-5.4GPa is to-4.6GPa	6.7％ 0.2μm	-2.0GPa is to-1.6GPa	15/ 0.2μm	14/ 0.2μm	-2GPa
									Embodiment 35	-1GPa	20％ 0.6μm	-7.1GPa is to-6.8GPa	40％ 1.2μm	-1.1GPa is to-0.8GPa	2/ 1.2μm	2/ 1.2μm	-7GPa
Embodiment 36	-3GPa	20％ 0.6μm	-5.2GPa is to-4.8GPa	40％ 1.2μm	-3.3GPa is to-2.9GPa	2/ 1.2μm	2/ 1.2μm	-5GPa

Should be pointed out that in the bezel, cluster of the compression stress from the teeth outwards in above table 21 and on the bottom surface numerical value in the bezel, cluster of compression stress provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, numerical value in the bezel, cluster of first intermediate point and the numerical value in the bezel, cluster of second intermediate point have shown and are being clipped to first intermediate point and to the distance second intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged) from the surface branch of filming on the coating thickness direction.In addition, in the bezel, cluster of relative peak with bezel, cluster in relative minimum point in numerical value shown respectively compression stress (, can suppose that this compression stress has reached any identical substantially value in this scope) under relative peak and relative minimum point though this numerical value is shown as a scope.In addition, relatively peak counting/distance and relatively minimum point counting/distance represented the relative peak that between the surface of filming and the bottom surface of filming, occurs and the quantity of relative minimum point respectively, and in distance between the relative peak and the distance between relative minimum point.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 31 to 36.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming improves continuously and compression stress reaches relative peak at first intermediate point, and compression stress descends continuously from first intermediate point to second intermediate point first intermediate point and the bottom surface of filming and reaches relative minimum point at second intermediate point, and intensity distributions has one or more similar relative peak and one or more similar relative minimum points between second intermediate point and the bottom surface of filming.These relative peaks and relative minimum point according to this order with alternately and repetitive mode exist.In each embodiment, reach identical substantially value and the compression stress on each relative minimum point in the compression stress on each relative peak and reach identical substantially value.Peak or relative minimum point are to exist with the interval that equates substantially relatively.That is to say that this intensity distributions has shown the exemplary intensity distributions according to aforesaid the 4th embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, the substrate bias-voltage keeps 60 minutes (comparative example 7) under-150V at metal ion.

In the surface coating cutting tool according to comparative example 7, the intensity distributions of the compression stress of not filming and compression stress are constant from the bottom surface of filming to the surface of filming.

＜embodiment 37 to 40 〉

The manufacturing of＜surface coating cutting tool 〉

At first, the basic material identical with the basic material that is used for embodiment 31 to 36 is attached in the cathode arc ion plating device as basic material and this basic material of surface coating cutting tool.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

With argon gas introducing and with pressure chamber in remain on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.7Si _0.2Cr _0.1N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 22.In this way, the arc current of 100A is supplied to negative electrode to reach 60 minutes and metal ion produces from electric arc type evaparation source, made in view of the above have the embodiment 37-40 of the intensity distributions of the compression stress shown in the following table 23 according to surface coating cutting tool of the present invention.

Table 22

No.	Period 1 (time/the substrate bias-voltage)	Second round (time/the substrate bias-voltage)
			Embodiment 37	6 minutes-20V is to-180V	6 minutes-180V is to-20V
Embodiment 38	6 minutes-60V is to-180V	6 minutes-180V is to-60V
			Embodiment 39	6 minutes-75V is to-180V	6 minutes-180V is to-75V
Embodiment 40	6 minutes-150V is to-180V	6 minutes-180V is to-150V

With the same in table 20, " period 1 " in above table 22 and " second round " expression apply the substrate bias-voltage as alternately repeating the result in (reaching 60 minutes) these cycles, and these cycles continue in the time span shown in the bezel, cluster of the bezel, cluster of period 1 and second round (this cycle is from " period 1 ").In addition, with the same in table 20, the numerical value of time and voltage has shown the substrate bias-voltage group in the elapsed time in each bezel, cluster.

Table 23

No.	Surface compression stress	First intermediate point	Relative peak	Second intermediate point	Relative minimum point	Relative peak counting/distance	Relative minimum point counting/distance	Compression stress on the bottom surface
									Embodiment 37	-1GPa	10％ 0.3μm	-6.2GPa is to-5.8GPa	20％ 0.6μm	-1.2GPa is to-0.8GPa	5/ 0.6μm	4/ 0.6μm	-1GPa
Embodiment 38	-2GPa	10％ 0.3μm	-6.2GPa is to-5.8GPa	20％ 0.6μm	-2.2GPa is to-1.8GPa	5/ 0.6μm	4/ 0.6μm	-2GPa
									Embodiment 39	-3GPa	10％ 0.3μm	-6.2GPa is to-5.8GPa	20％ 0.6μm	-3.3GPa is to-3.0GPa	5/ 0.6μm	4/ 0.6μm	-3GPa
Embodiment 40	-5GPa	10％ 0.3μm	-6.2GPa is to-5.8GPa	20％ 0.6μm	-5.2GPa is to-4.8GPa	5/ 0.6μm	4/ 0.6μm	-5GPa

Should be pointed out that with the same in table 21 numerical value in the bezel, cluster of the compression stress from the teeth outwards in above table 23 and on the bottom surface in the bezel, cluster of compression stress has provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, with the same in table 21, numerical value in the bezel, cluster of first intermediate point and the numerical value in the bezel, cluster of second intermediate point also shown on the coating thickness direction from the surface of filming to the distance each intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, with the same in table 21, in the bezel, cluster of relative peak with bezel, cluster in relative minimum point in numerical value also shown the compression stress (, can suppose that this compression stress has reached any identical substantially value in this scope) under these are put respectively though this numerical value is shown as a scope.In addition, with identical in table 21, relatively peak counting/distance and relatively minimum point counting/distance represented the relative peak that between the surface of filming and the bottom surface of filming, occurs and the quantity of relative minimum point respectively, and in distance between the relative peak and the distance between relative minimum point.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 37 to 40.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming improves continuously and compression stress reaches relative peak at first intermediate point, and compression stress descends continuously from first intermediate point to second intermediate point first intermediate point and the bottom surface of filming and reaches relative minimum point at second intermediate point, and intensity distributions has one or more similar relative peak and one or more similar relative minimum points between second intermediate point and the bottom surface of filming.These relative peaks and relative minimum point according to this order with alternately and repetitive mode exist.In each embodiment, reach identical substantially value and the compression stress on each relative minimum point in the compression stress on each relative peak and reach identical substantially value.Peak or relative minimum point are to exist with the interval that equates substantially relatively.That is to say that this intensity distributions has shown the exemplary intensity distributions according to aforesaid the 4th embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: at metal ion from the target that alloy constitutes after the start vaporizer, substrate bias-voltage cost 60 minutes descend equably from-200V to-20V (comparative example 8).

In the surface coating cutting tool according to comparative example 8, the intensity distributions of the compression stress of filming does not have relative peak and does not have relative minimum point and compression stress yet and descend equably to the surface of filming from the bottom surface of filming.

The evaluation of the wearability of＜surface coating cutting tool 〉

Be received in wet (water miscible emulsion) continous way cutting test and interrupt cutting test under the condition shown in the above table 1 by the above method manufacturing according in the surface coating cutting tool of embodiment 31 to 40 and comparative example 7 and 8 each.Then, the flank wear width on cutting edge was measured as the cutting time above the time of 0.20mm.

Table 24 and 25 shown, as the evaluation result of the wearability of surface coating cutting tool, and method cutting time of measuring as mentioned above.Along with the cutting time becomes longer, wearability is excellent.In addition, in continuous cutting test, also observe the brightness on the finished surface of the material that will cut.Table 24 and 25 has similarly provided observed result.Here, the finished surface of the material that " light " expression will be cut has brightness, and the finished surface of the material that " dim " expression will be cut does not have brightness but be dim.

From table 24 and 25, can be clear that, in the cutting test of continuous cutting test and interruption, with compare with the surface coating cutting tool in 8 comparative example 7, verified, surface coating cutting tool according to the present invention in embodiment 31-40 has obtained further improved wearability (referring to continuous cutting test) and toughness (referring to the cutting test of interrupting), the performance and the further improved life-span of the chipization of anti-rete of the excellence that possesses owing to the brightness on finished surface.

＜the evaluation of brightness on the finished surface of surface coating cutting tool 〉

Each acceptance according in the surface coating cutting tool of embodiment 31 to 40 and comparative example 7 and 8 by the above method manufacturing is used to estimate a kind of test of brightness on finished surface under condition shown below.

For the condition of cutting, specifically, as shown in above table 1, S45C is as the material that is cut.Wet rotary cut is tested below and carried out 10 minutes under the condition: cutting speed is set to 200m/min, and feed rate is set at 0.2mm/rev and cutting depth is set at 0.5mm.

Table 24 and 25 has shown the result of the evaluation of brightness on the finished surface of each surface coating cutting tool.From table 24 and 25, can be clear that, with compare with the surface coating cutting tool in 8 comparative example 7, the verified surface coating cutting tool according to the present invention in embodiment 31-40 has obtained the performance of on finished surface further improved brightness and the excellent chipization of anti-the rete.

Table 24

No.	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Embodiment 31	112 minutes (light)				24 minutes	Excellent brightness
Embodiment 32			116 minutes (light)	27 minutes	Excellent brightness
	Embodiment 33	123 minutes (light)				29 minutes	Excellent brightness
Embodiment 34			118 minutes (light)	30 minutes	Excellent brightness
	Embodiment 35	119 minutes (light)				28 minutes	Excellent brightness
Embodiment 36			97 minutes (light)	30 minutes	Excellent brightness
	The comparative example 7	12 minutes (dim)				3 minutes	Dim

Table 25

No.	The evaluation of wearability		The evaluation of the light on finished surface
				Continuous cutting test	The cutting test of interrupting
	Embodiment 37	132 minutes (light)				25 minutes	Excellent brightness
Embodiment 38			129 minutes (light)	34 minutes	Excellent brightness
	Embodiment 39	125 minutes (light)				42 minutes	Excellent brightness
Embodiment 40			83 minutes (light)	40 minutes	Good light brightness
	The comparative example 8	31 minutes (dim)				21 seconds	In 3 minutes, observe chipization

Above disclosed embodiment and embodiment are illustrative purposes but do not play the qualification effect for example, and the spirit and scope of the present invention are not subjected to above embodiment and embodiment restriction but are subjected to the restriction of claim and hope is included in whole improvement and variation in the claim scope.

Claims (32)

1. surface coating cutting tool (1) comprising:

Basic material (2); With

Go up film (3) that form at described basic material (2); Wherein

These film (3) are as the outermost layer on described basic material (2) and have compression stress,

This compression stress changes so that have intensity distributions on the thickness direction of described filming (3), and

This intensity distributions is characterised in that: the compression stress of locating on described surface of filming (4) improves continuously from described described surface (4) of filming towards being positioned at described described surface (4) of filming and first intermediate point (5) between the described bottom surface of filming (6), and this compression stress locates to reach relative peak at described first intermediate point (5).

2. according to the surface coating cutting tool (1) of claim 1, wherein

Described intensity distributions is characterised in that: locate to reach lowest compression stress and this compression stress on described described surface (4) of filming and keep steady state value from described first intermediate point (5) to described described bottom surface (6) of filming.

3. according to the surface coating cutting tool (1) of claim 2, wherein

Described compression stress be at least-stress of 15GPa in the 0GPa scope at the most.

4. according to the surface coating cutting tool (1) of claim 2, wherein

Described first intermediate point (5) be positioned at described described surface (4) of filming apart be equivalent to described filming (3) thickness at least 0.1% to the position of 50% distance at the most.

5. according to the surface coating cutting tool (1) of claim 2, wherein

The described compression stress of locating on described described surface (4) of filming is set to the value of the 25-95% that is equivalent to the compression stress located at described first intermediate point (5) of described filming (3).

6. according to the surface coating cutting tool (1) of claim 5, wherein

The described compression stress of locating on described described surface (4) of filming is set to the value of the 35-85% that is equivalent to the compression stress located at described first intermediate point (5) of described filming (3).

7. according to the surface coating cutting tool (1) of claim 2, wherein

Described compression stress locates to reach minimum on described described surface (4) of filming, this lowest compression stress is maintained in the predetermined distance that crosses described first intermediate point (5) from described described surface (4) of filming, and described afterwards compression stress improves continuously towards described first intermediate point (5).

8. according to the surface coating cutting tool (1) of claim 1, wherein

Described intensity distributions is characterised in that: described compression stress descends towards described described bottom surface (6) of filming continuously from described first intermediate point (5).

9. surface coating cutting tool according to Claim 8 (1), wherein

Described compression stress be from least-stress of 15GPa in the 0GPa scope at the most.

10. surface coating cutting tool according to Claim 8 (1), wherein

Described first intermediate point (5) be positioned at described described surface (4) of filming apart be equivalent to described filming (3) thickness at least 0.1% to the position of 50% distance at the most.

11. surface coating cutting tool according to Claim 8 (1), wherein

Described compression stress locates to reach minimum on described described surface (4) of filming.

12. surface coating cutting tool according to Claim 8 (1), wherein

The described compression stress of locating on described described surface (4) of filming is set to the value of the 25-95% that is equivalent to the compression stress located at described first intermediate point (5) of described filming (3).

13. according to the surface coating cutting tool (1) of claim 12, wherein

The described compression stress of locating on described described surface (4) of filming is set to the value of the 35-85% that is equivalent to the compression stress located at described first intermediate point (5) of described filming (3).

14. surface coating cutting tool according to Claim 8 (1), wherein

The described compression stress of locating on described described surface (4) of filming is maintained in the predetermined distance that crosses described first intermediate point (5) from described described surface (4) of filming, and described afterwards compression stress improves continuously towards described first intermediate point (5).

15. according to the surface coating cutting tool (1) of claim 1, wherein

Described intensity distributions is characterised in that: described compression stress descends continuously and reaches relative minimum point at described second intermediate point (9) towards being positioned at second intermediate point (9) between described first intermediate point (5) and the described described bottom surface (6) of filming from described first intermediate point (5).

16. according to the surface coating cutting tool (1) of claim 15, wherein

Described compression stress be at least-stress of 15GPa in the 0GPa scope at the most.

17. according to the surface coating cutting tool (1) of claim 15, wherein

Described first intermediate point (5) be positioned at described described surface (4) of filming at a distance of described filming (3) thickness at least 0.1% to the position of 50% distance at the most.

18. according to the surface coating cutting tool (1) of claim 15, wherein

Described second intermediate point (9) be positioned at described described surface (4) of filming at a distance of described filming (3) thickness at least 0.2% to the position of 95% distance at the most.

19. according to the surface coating cutting tool (1) of claim 15, wherein

Described compression stress locates to reach minimum on described described surface (4) of filming.

20. according to the surface coating cutting tool (1) of claim 15, wherein

The described compression stress of locating on described described surface (4) of filming is set to the value of the 25-95% that is equivalent to the compression stress located at described first intermediate point (5) of described filming (3).

21. according to the surface coating cutting tool (1) of claim 20, wherein

The described compression stress of locating on described described surface (4) of filming is set to the value of the 35-85% that is equivalent to the compression stress located at described first intermediate point (5) of described filming (3).

22. according to the surface coating cutting tool (1) of claim 15, wherein

The predetermined distance that the described compression stress of locating on described described surface (4) of filming is crossed over from described described surface (4) of filming to described first intermediate point (5) is maintained, and described afterwards compression stress improves continuously towards described first intermediate point (5).

23. according to the surface coating cutting tool (1) of claim 1, wherein

Described intensity distributions is characterised in that: described compression stress descends continuously with second intermediate point (9) between the described described bottom surface (6) of filming and reaches relative minimum point at described second intermediate point (9) towards being positioned at described first intermediate point (5) from described first intermediate point (5), and this intensity distributions has one or more similar described relative peaks between described second intermediate point (9) and described described bottom surface (6) of filming.

24. according to the surface coating cutting tool (1) of claim 23, wherein

Described intensity distributions has one or more similar described relative minimum points between described second intermediate point (9) and described described bottom surface (6) of filming.

25. according to the surface coating cutting tool (1) of claim 23, wherein

Described intensity distributions has one or more described similar relative peaks and one or more described similar relative minimum points between described second intermediate point (9) and described described bottom surface (6) of filming, described relative peak and relative minimum point are according to this sequence alternate and repetition.

26. according to the surface coating cutting tool (1) of claim 23, wherein

Described compression stress be at least-stress of 15GPa in the 0GPa scope at the most.

27. according to the surface coating cutting tool (1) of claim 23, wherein

Described first intermediate point (5) be positioned at described described surface (4) of filming at a distance of described filming (3) thickness at least 0.1% to the position of 40% distance at the most.

28. according to the surface coating cutting tool (1) of claim 23, wherein

Described second intermediate point (9) be positioned at described described surface (4) of filming at a distance of described filming (3) thickness at least 0.2% to the position of 80% distance at the most.

29. according to the surface coating cutting tool (1) of claim 23, wherein

Described compression stress locates to reach minimum on described described surface (4) of filming.

30. according to the surface coating cutting tool (1) of claim 23, wherein

The described compression stress of locating at described second intermediate point (9) of described filming (3) is set to the value of the 10-80% that is equivalent to the compression stress located at described first intermediate point (5) of described filming (3).

31. according to the surface coating cutting tool (1) of claim 30, wherein

The described compression stress of locating at described second intermediate point (9) of described filming (3) is set to the value of the 20-60% that is equivalent to the compression stress located at described first intermediate point (5) of described filming (3).

32. according to the surface coating cutting tool (1) of claim 23, wherein

The predetermined distance that the described compression stress of locating on described described surface (4) of filming is crossed over from described described surface (4) of filming to described first intermediate point (5) is maintained, and described afterwards compression stress improves continuously towards described first intermediate point (5).

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