CN1905974A

CN1905974A - Cutting tool made of surface-coated super hard alloy, and method for manufacture thereof

Info

Publication number: CN1905974A
Application number: CN 200580001819
Authority: CN
Inventors: 森田启介; 益野智行; 长田晃; 中村惠滋
Original assignee: Mitsubishi Materials Corp
Current assignee: Mitsubishi Materials Corp
Priority date: 2004-01-30
Filing date: 2005-01-28
Publication date: 2007-01-31
Anticipated expiration: 2025-01-28
Also published as: CN100431756C

Abstract

A surface-coated cutting tool comprising: a hard substrate; a lower layer which is formed on a surface of the hard substrate, contains a composite compound consisting of at least one element selected from Ti and Al, and at least one element selected from N and C, and has an average thickness of 0.1 to 3 m; and an upper layer having an average thickness of 1 to 13 m, which is formed on the lower layer and having a texture in which fine grains of crystalline Ti (C,N) based compounds or fine grains of crystalline (Ti, Al)(C, N) based compounds are dispersively distributed in a matrix of a carbon based amorphous material containing W.

Description

Cutting tool made of surface-coated super hard alloy and manufacture method thereof

Technical field

The present invention relates to especially with the cutting tool made of surface-coated super hard alloy that carries out ferrous materials such as various steel and cast iron at a high speed, also has under the situation of machining of nonferrous materials such as Al alloy and Cu alloy, lubricity amorphous carbon class overlay film also can be brought into play advantages of good abrasion (below be called coat sintered carbide tools).

In addition, the present invention relates to surface coating layer except good high-temperature hardness and hear resistance and good high-temperature intensity, also have a good lubricity thereby especially carry out under with the high speed that is accompanied by high heating and heavy cut conditions such as high cutting-in that is accompanied by high mechanical shock or high feeding especially under the situation of machining of various Al and Al alloy, Cu and Cu alloy and nonferrous materials such as Ti and Ti alloy, in surface coating layer, do not produce the coating sintered carbide tools that chip (tiny flaw) waits, brings into play advantages of good abrasion.

The application for the spy of on January 30th, 2004 application be willing to the spy of application on May 17th, 2004-22535 number 1 be willing to 2004-146397 number, the spy of application on the same day is willing to 2004-146398 number and the spy of application on July 21st, 2004 is willing to advocate priority 2004-212896 number, quotes their content here.

Background technology

Generally, as coating sintered carbide tools, known have on the leading section that in ferrous materials such as various steel or cast iron, the turning processing that also has nonferrous materials such as Al alloy and Cu alloy or planing operation dismounting is installed in cutter freely and the throw away chip that uses, the drill bit or the miniature bur that in perforate machining etc., use, also have the slotting cutter of the monolithic devices of use in building up by welding and groove processing, shoulder processing etc. etc., in addition dismounting install freely above-mentioned throw away chip, and the slotting cutter of above-mentioned monolithic devices similarly carry out the throw away slotting cutter instrument etc. of machining.

In addition, as above-mentioned coating sintered carbide tools, known have:

(a) on the superhard matrix surface that the basic superhard alloy of tungsten carbide (following represent with WC) or titanium carbonitride (following represent with TiCN) metalloid pottery constitutes,

(b) in sputter equipment, use the Ti target as negative electrode (evaporation source), via in the mist of nitrogen and Ar or the reacting gas environment that constitutes by the mist of decomposition gas, nitrogen and the Ar of hydrocarbon, form, by any or both of titanium nitride (following represent) layer and titanium carbonitride (following represent) layer with TiCN with TiN constitute and have 1～3 μ m average bed thickness connect airtight knitting layer

(c) in sputter equipment, use the WC target as negative electrode (evaporation source), evaporation is formed with in the reacting gas environment that the mist by the decomposition gas of hydrocarbon and Ar constitutes and forms, contains when measuring by the Auger spectroscopy apparatus

W:5～20 atom %,

All the other have by forming of constituting of carbon and inevitable impurity and have 1～13 μ m average bed thickness lubricity amorphous carbon class overlay film and the coating sintered carbide tools that forms.

And then, the also known technology that the above-mentioned coating sintered carbide tools in the past of following manufacturing is arranged: in Fig. 5 A for example by approximate vertical view, among Fig. 5 B by shown in the outline elevation, above-mentioned superhard matrix is encased in possesses negative electrode (evaporation source) is the sputter equipment of Ti target, and negative electrode (evaporation source) is in the evaporation coating device of sputter equipment of WC target, for example in will installing, be heated under 300 ℃ the state of temperature by heater, as reacting gas with nitrogen and Ar with for example nitrogen flow: 200sccm, in the ratio gatherer of Ar flow: 300sccm, with the nitrogen of for example 1Pa and the mist of Ar, or C for example ₂H ₂(hydrocarbon), nitrogen and Ar are with for example C ₂H ₂In the ratio gatherer of flow: 40sccm, nitrogen flow: 200sccm, Ar flow: 300sccm, form equally 1Pa by C ₂H ₂The reacting gas environment that constitutes of the mist of decomposition gas, nitrogen and Ar, negative electrode (evaporation source) to the Ti target applies power: 12kW (frequency: sputter electric power 40kHz), on the other hand, for example applying on the above-mentioned superhard matrix-produce glow discharge under the condition of the bypass voltage of 100V, on the surface of above-mentioned superhard matrix, form the knitting layer that connects airtight that any or both by the TiN layer of regulation bed thickness and TiCN layer constitute, then the heating-up temperature in for example will installing is made as under 200 ℃ the state, with C ₂H ₂Deng hydrocarbon and Ar with C ₂H ₂Flow: 40～80sccm, the ratio of Ar flow: 250sccm imports, will be by the mist of above-mentioned nitrogen and Ar, or the decomposition gas of above-mentioned methane, the reacting gas environment that the reacting gas environment change that the mist of nitrogen and Ar constitutes constitutes for the mist by the decomposition gas of hydrocarbon and Ar of for example 1Pa, the bypass voltage that adds to above-mentioned superhard matrix at for example facility is-20V, negative electrode (evaporation source) to the WC target has applied power: 4～6kW (frequency: under the condition of sputter electric power 40kHz), by make (opening flat 07-164211 communique and special table 2002-513087 communique with reference to the spy) at the above-mentioned lubricity amorphous carbon class overlay film that connects airtight evaporation formation regulation bed thickness on the knitting layer.

In addition, also known have, as the coating sintered carbide tools that in the machining that is cut material that constitutes by above-mentioned nonferrous material, uses especially, on the surface of the superhard matrix that constitutes by the basic superhard alloy of tungsten carbide (following represent) or titanium carbonitride (following represent) based ceramic metal with TiCN with WC

(a) as lower layer and evaporation has by the average bed thickness with 1.5～10 μ m and satisfies composition formula: (Ti _1-ZAl _Z) Ti of N (wherein, in atomic ratio, Z represents 0.40～0.60) and the complex nitride of the Al (hard layer that following usefulness (Ti, Al) N represents) layer constitutes;

(b) as upper layer and evaporation has average bed thickness with 1～10 μ m and use the WC target as negative electrode (evaporation source), form, contain when measuring by the Auger spectroscopy apparatus in the reacting gas environment that the mist by the decomposition gas of hydrocarbon and Ar constitutes in sputter equipment

W:5～20 atom %,

The amorphous carbon class lubricating layer of forming that all the other are made of carbon and unavoidable impurities and the coating sintered carbide tools that forms; And (the Ti of the hard layer of known surface coating layer as above-mentioned coating sintered carbide tools, Al) the N layer has high temperature hardness and hear resistance by the Al as constituent, has elevated temperature strength by Ti as constituent, and by with common combination the as the amorphous carbon class lubricating layer of its upper layer, be cut the continuous cutting of material or interrupted cut and add and can bring into play good cutting ability man-hour being used for above-mentioned nonferrous material etc.

And then, the also known technology that the above-mentioned coating sintered carbide tools of following manufacturing is arranged: utilize among Fig. 6 for example by the evaporation coating device shown in the diagrammatic illustration figure, promptly possess and be provided with glow discharge device with Ti-Al alloy that regulation forms and the evaporation coating device that is provided with the sputter equipment of WC target as negative electrode (evaporation source) as negative electrode (evaporation source), above-mentioned superhard matrix is encased in wherein

(a) at first, as above-mentioned lower layer, for example in will installing, be heated under 500 ℃ the state of temperature by heater, between the negative electrode (evaporation source) of anode and above-mentioned Ti-Al alloy with the condition generation arc discharge of for example electric current: 90A, simultaneously nitrogen is imported in the device as reacting gas, form for example reacting gas environment of 2Pa, on the other hand, on the above-mentioned superhard matrix with for example applied-condition of the bypass voltage of 100V under, evaporation forms by above-mentioned (Ti, Al) hard layer of N layer formation on the surface of above-mentioned superhard matrix;

(b) then, as upper layer, for example in will installing, be heated under 200 ℃ the state of temperature, C ₂H ₂Deng hydrocarbon and Ar with C ₂H ₂The ratio of flow: 40～80sccm, Ar flow: 250sccm imports, form the reacting gas environment that the mist by hydrocarbon and Al of 1Pa for example constitutes, the bypass voltage that adds to above-mentioned superhard matrix at for example facility is for-20V, applied power: 4～6kW (frequency: under the condition of sputter electric power 40kHz) to the negative electrode (evaporation source) of WC target, by (Ti, Al) evaporation forms amorphous carbon class lubricating layer and makes (with reference to special table 2002-513087 communique) on the hard layer that constitutes of N floor above-mentioned.

The high performance of cutting apparatus in recent years is very remarkable, on the other hand, to laborsavingization of machining and energy-conservationization, further the requirement of cost degradation is also stronger, accompany therewith, machining has the trend of high speed, but in above-mentioned coating sintered carbide tools in the past, no problem when under common machining condition, using it, but especially carrying out under the situation of machining at a high speed, the wearing and tearing development of lubricity amorphous carbon class overlay film is very fast, within a short period of time, just to reach service life be realistic state.In addition, especially with at a high speed and be accompanied by and carry out above-mentioned nonferrous material etc. under the heavy cut conditions such as high cutting-in that high mechanicalness impacts and high feeding and be cut under the situation of machining of material, since in as the hard layer of the lower layer of surface coating layer high temperature hardness and hear resistance, also have that elevated temperature strength is insufficient, elevated temperature strength is insufficient in this external its amorphous carbon class lubricating layer, so be easy to generate chip and also further promoted wearing and tearing development, so just to reach service life within a short period of time be realistic situation.

Summary of the invention

Given this, present inventors etc. are according to viewpoint as described above, carried out wanting developing especially in high-speed cutting processing lubricity amorphous carbon class overlay film and can bring into play the research of the coating sintered carbide tools of advantages of good abrasion, the result obtained following (a) and (b) shown in result of study.

(a) in by Fig. 2 A, Fig. 2 B respectively by the evaporation coating device shown in approximate vertical view and the outline elevation, be that the lubricity amorphous carbon class overlay film in the past shown in above-mentioned Fig. 5 A, Fig. 5 B forms with in each sputter equipment in the evaporation coating device, be provided with the evaporation coating device of solenoid if utilize as magnetic control sputtering device, form magnetic field by above-mentioned solenoid, be made as 100～300 (Gausses) in flux density, the heating-up temperature in the said apparatus be made as under 300～500 ℃ the state the installation portion of superhard matrix, and C for example ₂H ₂Deng hydrocarbon, nitrogen and Ar as reacting gas preferably with C ₂H ₂The ratio of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 150～250sccm imports in the device, makes the reacting gas environment become for example C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and apply for example power: 1～3kW (frequency: sputter electric power 40kHz) at negative electrode (evaporation source) to the WC target of above-mentioned two magnetic control sputtering devices, simultaneously its Ti target is applied for example 3～8kW (frequency: the formation of being lubricated property amorphous carbon class overlay film under the condition of sputter electric power 40kHz), the result, the lubricity amorphous carbon class overlay film that forms is, the structure observation result of its infiltration type electron microscope as among Figure 1A by shown in the schematic diagram, tissue with the particulate that in the substrate of carbon class amorphous body, is distributed with crystalline carbon nitrogen compound (following usefulness " crystalline Ti (C, N) compounds particulate " expression).

(b) when forming the lubricity amorphous carbon class overlay film of above-mentioned (a), adjust as the hydrocarbon, nitrogen and the Ar that import to the reacting gas in the evaporation coating device separately flow and be applied to the WC target of magnetic control sputtering device and the sputter electric power on the Ti target, above-mentioned lubricity amorphous carbon class overlay film utilizes the measurement of Auger spectroscopy apparatus and contains:

W:5～40 atom %,

Ti:0.5～30 atom %,

Nitrogen: 0.5～20 atom %,

All the other had by forming that carbon and unavoidable impurities constitute; the result; the lubricity amorphous carbon class overlay film that forms is at crystalline Ti (C; N) hardness significantly improves under the dispersion distribution effect of based fine particles and the micronize effect when the film forming of the magnetic field of above-mentioned solenoid; thereby; the coating sintered carbide tools that is formed with this lubricity amorphous carbon class overlay film improves effect with the intensity of W composition and cooperates; in high-speed cutting processing, can on blade part, not produce chip (tiny flaw) yet, and bring into play more advantages of good abrasion chronically.

The present invention is that the result according to above-mentioned research makes, and a kind of coating sintered carbide tools is provided, and has following feature:

(a) on the surface of the superhard matrix that constitutes by WC base superhard alloy or TiCN metalloid pottery, (b) via by magnetic control sputtering device, utilize the Ti target as negative electrode (evaporation source), in the reacting gas environment that the mist by decomposition gas, nitrogen and the Ar of the mist of nitrogen and Ar or hydrocarbon constitutes and in magnetic field any or both of the TiN layer of film forming and TiCN layer constituted and have 0.1～3 μ m average bed thickness connect airtight knitting layer, evaporation forms

(c) pass through magnetic control sputtering device equally, utilize WC target and Ti target as negative electrode (evaporation source), in the reacting gas environment that the mist by decomposition gas, nitrogen and the Ar of hydrocarbon constitutes and in magnetic field film forming, measure and contain with the Auger spectroscopy apparatus

W:5～40 atom %,

Ti:0.5～30 atom %,

Nitrogen: 0.5～30 atom %,

All the other have by what carbon and unavoidable impurities constituted forms and demonstrates in the observation by the infiltration type electron microscope be distributed with crystalline Ti (C in the substrate of carbon class amorphous body, N) tissue of compounds particulate and have 1～13 μ m average bed thickness lubricity amorphous carbon class overlay film and form, lubricity amorphous carbon class overlay film can be brought into play advantages of good abrasion in high-speed cutting processing especially.

Then, in coating sintered carbide tools of the present invention, describe for limiting the reason of connecting airtight knitting layer and lubricity amorphous carbon class overlay film that constitutes it as described above.

(a) connect airtight the average bed thickness of knitting layer

Connect airtight knitting layer between superhard matrix and lubricity amorphous carbon class overlay film by what any or both of TiN layer and TiCN layer constituted, connect airtight securely with the two and to engage, the zygosity of connecting airtight to above-mentioned superhard matrix has further improved by film forming in the magnetic field, but under the situation of its average bed thickness less than 0.1 μ m, the good zygosity of connecting airtight that can not guarantee to want, on the other hand, if its average bed thickness has surpassed 3 μ m, then in high-speed cutting, cause pyroplastic deformation especially easily, the reason that this chip that becomes lubricity amorphous carbon class overlay film produces is so its average bed thickness is set at 0.1～3 μ m.

(b) the W amount of lubricity amorphous carbon class overlay film

The W composition forms the substrate of above-mentioned lubricity amorphous carbon class overlay film, effect with the intensity that improves overlay film, but can not guarantee the high strength wanted under less than the situation of 5 atom % at its amount, on the other hand, if amount has surpassed 40 atom %, then lubricity sharply reduces, so its amount is set at 5～40 atom %.

(c) Ti of lubricity amorphous carbon class overlay film and N amount

The Ti composition also has C (carbon) composition to combine under the film forming of magnetic field with the N composition, in overlay film as the Ti (C of crystalline, N) compounds particulate and existing, effect with the hardness that significantly improves overlay film, if but its amount is that the Ti composition is less than 0.5 atom %, and the N composition is less than 0.5 atom %, then in overlay film as Ti (C, N) based fine particles and the ratio that exists becomes very few, can not guarantee the high rigidity wanted, on the other hand, if its amount surpasses 30 atom % for the Ti composition, and the N composition has surpassed 30 atom %, then intensity and lubricity reduce sharp, so its amount is set at Ti:0.5～30 atom % respectively, N:0.5～30 atom %.

(d) the average bed thickness of lubricity amorphous carbon class overlay film

Under the situation of its average bed thickness, can not guarantee lubricity and the mar proof effect wanted on the other hand,, then in blade part, to be easy to generate chip, so its average bed thickness is set at 1～13 μ m if its average bed thickness has surpassed 13 μ m less than 1 μ m.

In addition, present inventor etc. have also carried out wanting developing especially the research that in high-speed cutting processing lubricity amorphous carbon class overlay film can be brought into play the coating sintered carbide tools of advantages of good abrasion, and the result obtains result of study shown below:

(a) at Fig. 3 A, among Fig. 3 B respectively by the evaporation coating device shown in approximate vertical view and the outline elevation, be above-mentioned Fig. 5 A, lubricity amorphous carbon class overlay film in the past shown in Fig. 5 B forms with in each sputter equipment in the evaporation coating device, solenoid is set and becomes magnetic control sputtering device, and, utilization will be made the evaporation coating device of the Ti-Al alloy target of the composition with regulation as the Ti target of a negative electrode (evaporation source), form magnetic field by above-mentioned solenoid, be made as 100～300G (Gauss) in flux density with the installation portion of superhard matrix, heating-up temperature in the said apparatus is made as under 300～500 ℃ the state, with nitrogen and Ar as reacting gas with for example nitrogen flow: 200sccm, the ratio of Ar flow: 300sccm imports in the device, and form the reacting gas environment that the mist by nitrogen and Ar of 1Pa for example constitutes, negative electrode (evaporation source) to above-mentioned Ti-Al alloy target applies for example power: 12kW (frequency: sputter electric power 40kHz), on the other hand, on above-mentioned superhard matrix, for example applying-produce glow discharge under the condition of the bypass voltage of 100V, thus, composition formula is satisfied in formation on the surface of above-mentioned superhard matrix: (Ti _1-XAl _X) (wherein X is an atomic ratio to N, expression 0.40～0.60) Ti and the complex nitride (following usefulness (Ti of Al, Al) N represents) layer, so, its result's (Ti, Al) the N layer not only connects airtight joint securely and the zygosity of connecting airtight of above-mentioned superhard matrix is passed through film forming and further raising in the magnetic field with respect to superhard matrix surface, and high temperature hardness and hear resistance have been improved by containing Al, improving effect with the elevated temperature strength of Ti cooperates, even in the high-speed cutting processing of following high heating, can not produce chip yet and can bring into play advantages of good abrasion.

(b) then, with for example C ₂H ₂Be preferably with C as reacting gas Deng hydrocarbon, nitrogen and Ar ₂H ₂The ratio of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 200sccm imports in the device, makes the reacting gas environment become for example C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and the negative electrode (evaporation source) to the WC target in above-mentioned two magnetic control sputtering devices applies for example power: 1～3kW (frequency: sputter electric power 40kHz) at the same time, above-mentioned Ti-Al alloy target is applied for example power: 3～8kW (frequency: the formation of being lubricated property amorphous carbon class overlay film under the condition of sputter electric power 40kHz), so, the lubricity amorphous carbon class overlay film that the result forms is with respect to above-mentioned (Ti, Al) the N layer connects airtight joint securely, and its structure observation result who uses the infiltration type electron microscope is as using among Figure 1B shown in the schematic diagram, has the tissue that in the substrate of carbon class amorphous body, is distributed with the good crystalline Ti-Al class composite carbon nitride particulate of high temperature hardness and hear resistance (following usefulness " crystalline Ti-Al class (C, N) particulate " expression).

(c) when forming the lubricity amorphous carbon class overlay film of above-mentioned (b), adjusting import to flow separately, the WC target that imposes on magnetic control sputtering device and the Ti-Al alloy target of the hydrocarbon as reacting gas, nitrogen and Ar in the evaporation coating device sputter electric power, also have the composition of above-mentioned Ti-Al alloy target, contain if above-mentioned lubricity amorphous carbon class overlay film is measured by the Auger spectroscopy apparatus:

W:5～20 atom %,

Ti:2.5～10 atom %,

Al:1.6～15 atom %,

Nitrogen: 0.4～22.5 atom %,

All the other had by forming that carbon and unavoidable impurities constitute; then the lubricity amorphous carbon class overlay film of result's formation is by crystalline Ti-Al class (C; N) the grain refined effect during the magnetic field film forming of the dispersion distribution effect of particulate and above-mentioned solenoid; improved hardness significantly; thereby; form coating sintered carbide tools that this lubricity amorphous carbon class overlay film forms and improve effect with the intensity of W composition and cooperates, even in high-speed cutting is processed, also can in blade part, not produce chip (tiny flaw), can bring into play more advantages of good abrasion chronically.

The present invention is based on above-mentioned result of study and makes, and provides a kind of surface to coat sintered carbide tools, has following feature:

(a) on the surface of the superhard matrix that constitutes by WC base superhard alloy or TiCN metalloid pottery,

(b) via by magnetic control sputtering device, utilize the Ti target as negative electrode (evaporation source), in the reacting gas environment that the mist by nitrogen and Ar constitutes and in magnetic field film forming and have the average bed thickness of 0.1～3 μ m and by satisfying composition formula: (Ti _1-XAl _X) N (wherein X is an atomic ratio, expression 0.40～0.60) (Ti, Al) the N layer constitutes connects airtight knitting layer, and evaporation forms

(c) pass through magnetic control sputtering device equally, utilize WC target and Ti-Al target as negative electrode (evaporation source), in the reacting gas environment that the mist by decomposition gas, nitrogen and the Ar of hydrocarbon constitutes and in magnetic field film forming, measure and contain with the Auger spectroscopy apparatus

W:5～20 atom %,

Ti:2.5～10 atom %,

Al:1.6～15 atom %,

Nitrogen: 0.4～22.5 atom %,

All the other have by what carbon and unavoidable impurities constituted forms and demonstrates in the observation by the infiltration type electron microscope be distributed with crystalline Ti-Al class (C in the substrate of carbon class amorphous body, N) tissue of particulate and have 1～13 μ m average bed thickness lubricity amorphous carbon class overlay film and form, lubricity amorphous carbon class overlay film can be brought into play advantages of good abrasion in high-speed cutting processing especially.

(a) connect airtight the composition and the average bed thickness of knitting layer

By (Ti, Al) the N layer constitutes connects airtight knitting layer, possesses good high-temperature intensity by Ti as above-mentioned such constituent, possess good high-temperature hardness and hear resistance by its Al composition, but expression Al contain proportional X value with the resultant of Ti in shared ratio (atomic ratio) less than 0.40 situation under, can not obtain being accompanied by the effect that the mar proof in the high high-speed cutting of generating heat improves, on the other hand, if above-mentioned X value surpasses 0.60, then elevated temperature strength reduces sharp, become the reason that chip produces, so the X value is set at 0.40～0.60.

In addition, above-mentioned (Ti, Al) the N layer connects airtight securely with superhard matrix and lubricity amorphous carbon class overlay film and engages, the zygosity of connecting airtight to above-mentioned superhard matrix has further improved by film forming in the magnetic field, but under the situation of its average bed thickness less than 0.1 μ m, the good zygosity of connecting airtight that can not guarantee to want, on the other hand, if its average bed thickness has surpassed 3 μ m, then in high-speed cutting, become the reason that chip produces especially, so its average bed thickness is set at 0.1～3 μ m.

(b) the W amount of lubricity amorphous carbon class overlay film

The W composition forms the substrate of above-mentioned lubricity amorphous carbon class overlay film, effect with the intensity that improves overlay film, but can not guarantee the high strength wanted under less than the situation of 5 atom % at its amount, on the other hand, if amount has surpassed 20 atom %, then lubricity sharply reduces, so its amount is set at 5～20 atom %.

(c) Ti, the Al of lubricity amorphous carbon class overlay film and nitrogen amount

Ti and Al composition also have C (carbon) composition to combine under the film forming of magnetic field with nitrogen (N) composition, in overlay film as crystalline Ti-Al class (C, N) particulate and existing, above-mentioned crystalline Ti-Al class (C, N) particulate possesses good high-temperature intensity by Ti and N composition as constituent, also possess good high-temperature hardness and hear resistance by Al and C composition, so being distributed in the overlay film that forms in the substrate, its dispersion improved mar proof significantly, but if if its amount is less than 2.5 atom % for the Ti composition, for the Al composition less than 1.6 atom %, for the N composition less than 0.4 atom %, then in overlay film as Ti-Al class (C, N) particulate and the ratio that exists becomes very few, can not guarantee the mar proof wanted, on the other hand, if its amount is to surpass 10 atom % for the Ti composition, surpass 15 atom % for the Al composition, surpass 22.5 atom % for the N composition, then elevated temperature strength reduces, or high temperature hardness and hear resistance reduce sharp, so its amount is set at Ti:2.5～10 atom % respectively, Al:1.6～15 atom %, N:0.4～22.5 atom %.

(d) the average bed thickness of lubricity amorphous carbon class overlay film

And then, present inventors etc. are conceived to above-mentioned coating sintered carbide tools in the past, carried out wanting developing especially that in the high speed heavy cut processing that is cut material of above-mentioned nonferrous material etc. surface coating layer does not produce chip and the research that can bring into play the coating sintered carbide tools of advantages of good abrasion for a long time obtains the result of study shown in following (a)～(e):

(a) utilize (Ti of the surface hard layer of the formation coating sintered carbide tools in the past that the arc discharge device of the evaporation coating device of above-mentioned Fig. 6 forms, Al) lower layer of N layer (hard layer) spreads all over whole bed thickness and has uniform composition basically, thereby have the high temperature hardness and a hear resistance of homogeneous, also has elevated temperature strength, and for example use among Fig. 3 A by approximate vertical view, the arc ions electroplanting device of the structure of representing by outline elevation among Fig. 3 B, promptly be provided with superhard matrix installation rotary table at the device central portion, across above-mentioned rotary table and respectively as negative electrode (evaporation source) and opposed to each other at higher relatively (the Ti amount is lower) the Al-Ti alloy of side configuration Al amount, at higher relatively (the Al amount is lower) the Ti-Al alloy of opposite side configuration Ti amount, and on the position that has rotated 90 degree with respect to above-mentioned two negative electrodes, the arc ions electroplanting device of Metal Cr as negative electrode (evaporation source) is installed also, on the above-mentioned rotary table of this evaporation coating device, on position from its central shaft to radial direction that leave predetermined distance from, a plurality of superhard matrixes are installed with ring-type, under this state, make in the device gaseous environment become the nitrogen gas environment and make above-mentioned rotary table rotation, and under the layer thickness homogenized purpose of the lower layer (hard layer) of seeking evaporation formation, also make superhard matrix self rotation, make simultaneously between each negative electrode (evaporation source) of the above-mentioned accompanying drawing left and right sides and the anode arc discharge takes place, on the surface of above-mentioned superhard matrix, form complex nitride (following usefulness (Al/Ti) N represents) layer of Al and Ti, so, in its result (Al/Ti) N layer, the above-mentioned superhard matrix that is configured on the rotary table with ring-type forms in the layer that Al is the highest to be contained a bit being engraved in when immediate with the negative electrode (evaporation source) of higher (the Ti amount is lower) the Al-Ti alloy of the amount of Al relatively of an above-mentioned side, and above-mentioned superhard matrix forms in the layer that Ti is the highest to be contained a bit being engraved in when immediate with the negative electrode of higher (the Al amount is lower) the Ti-Al alloy of the amount of Ti relatively of above-mentioned opposite side, occur repeatedly alternately with predetermined distance along the bed thickness direction in layer by the rotation of above-mentioned rotary table that above-mentioned Al is the highest to be contained a bit and Ti is the highest contains a bit, and have from above-mentioned Al and a bit upwards state Ti and have a few the highest containing the highest containing, state upwards a bit that Al is the highest to be contained a bit the highest containing from above-mentioned Ti, the composition varied configurations that Al and Ti amount change respectively continuously.

(b) in the formation of (Al/Ti) of composition varied configurations N layer with above-mentioned (a), make as the Al amount of the Al-Ti alloy of the negative electrode (evaporation source) of a side of arranged opposite and compare relatively higher with the Al amount of above-mentioned Ti-Al alloy in the past and make the Ti amount of the Ti-Al alloy of negative electrode (evaporation source) compare relatively higher with the Ti amount of above-mentioned Ti-Al alloy in the past as its opposite side, and control is equipped with the rotary speed of the rotary table of superhard matrix, makes respectively

Above-mentioned Al satisfies composition formula a little the highest containing: (Al _1-XTi _X) N (wherein, X is an atomic ratio, expression 0.05～0.35),

Above-mentioned Ti satisfies composition formula a little the highest containing: (Ti _1-YAl _Y) N (wherein, Y is an atomic ratio, expression 0.05～0.35),

And establish that adjacent above-mentioned Al is the highest to contain a bit the highest 0.01～0.1 μ m that is spaced apart that contains thickness direction a bit with Ti, so,

Have a few in the part the highest containing at above-mentioned Al, because of Al amount and above-mentioned in the past (Ti, Al) the N layer is compared relatively higher, so demonstrate good high-temperature hardness and hear resistance (hot properties) more, on the other hand, have a few in the part the highest containing at above-mentioned Ti, because of Ti amount and above-mentioned in the past (Ti, Al) the N layer is compared relatively higher, so possess higher elevated temperature strength, and because with these Al the highest contain a bit with Ti the highest contain interval a bit be set at very little, so under the state that keeps good high-temperature intensity as the characteristic of layer integral body, possess good high-temperature hardness and hear resistance.

(c) then, for example in Fig. 2 A, use approximate vertical view, in Fig. 2 B, represent like that with outline elevation, there is negative electrode (evaporation source) to be the magnetic control sputtering device of Ti target in arranged opposite, and negative electrode (evaporation source) is on the rotary table of evaporation coating device of magnetic control sputtering device of WC target, installation is formed with the superhard matrix of above-mentioned lower layer, make the rotary table rotation, and with the layer thickness homogenized of upper layer (amorphous carbon class lubricating layer) of seeking evaporation formation is that purpose also makes the rotation of above-mentioned superhard matrix self, form magnetic field by solenoid, in the flux density with the installation portion of above-mentioned superhard matrix is 100～300G (Gauss), heating-up temperature in the said apparatus is made as under 300～500 ℃ the state, and C for example ₂H ₂Be preferably with C as reacting gas Deng hydrocarbon, nitrogen and Ar ₂H ₂The ratio of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 150～250sccm imports in the device, makes the reacting gas environment become for example C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and the negative electrode (evaporation source) to the WC target of above-mentioned two magnetic control sputtering devices applies for example power: 1～3kW (frequency: sputter electric power 40kHz) at the same time, its Ti target is applied for example power: 3～8kW (frequency: carry out the formation of amorphous carbon class lubricating layer (upper layer) under the condition of sputter electric power 40kHz), so, the structure observation result who passes through the infiltration type electron microscope of the amorphous carbon class lubricating layer that the result forms is as being represented by schematic diagram among Figure 1A, has tissue at the particulate that is distributed with crystalline titanium carbonitride compounds in the substrate of the carbon class amorphous body that contains the W composition (below be called " crystalline Ti (C, N) compounds particulate ").

(d) when forming the amorphous carbon class lubricating layer of above-mentioned (c), regulate as the hydrocarbon, nitrogen and the Ar that import to the reacting gas in the evaporation coating device separately flow and impose on the WC target of magnetic control sputtering device and the sputter electric power of Ti target, above-mentioned amorphous carbon class lubricating layer is contained by the measurement of Auger spectroscopy apparatus

W:5～40 atom %,

Ti:0.5～30 atom %,

Nitrogen: 0.5～30 atom %,

All the other had by forming that carbon and unavoidable impurities constitute; then the amorphous carbon class lubricating layer of result's formation is by effect, the crystalline Ti (C of the W composition that its substrate contained; N) the dispersion distribution effect of based fine particles and the grain refined effect when the film forming of the magnetic field of above-mentioned solenoid, elevated temperature strength significantly improves.

(e) above-mentioned lower layer is to have (Al/Ti) N layer of forming varied configurations, the coating sintered carbide tools that forms is being accompanied by that especially significant high temperature takes place to be cut in the high speed heavy cut of material with the above-mentioned nonferrous material of high mechanical shock etc. owing to have good high-temperature hardness and hear resistance as (Al/Ti) N layer of lower layer even the upper layer evaporation is formed with the surface coating layer that is made of amorphous carbon class lubricating layer, also has good high-temperature intensity, and the amorphous carbon class lubricating layer as upper layer also possesses good high-temperature intensity, so can in surface coating layer, not produce chip, can bring into play advantages of good abrasion chronically.

The present invention is based on above-mentioned result of study and makes, and a kind of coating sintered carbide tools is provided, and it is characterized in that, on the surface of superhard matrix, evaporation is formed with by following (a) and reaches the surface coating layer that (b) constitutes,

(a) as lower layer, it is average bed thickness with 1.5～10 μ m, and separate predetermined distance along the bed thickness direction and have repeatedly alternately that Al is the highest to be contained a bit and Ti has a few the highest containing, and have from above-mentioned Al the highest contain a bit upwards state Ti the highlyest contain a bit, from above-mentioned Ti the highest contain state upwards a bit that Al the highlyest contains a bit, Al and the Ti amount constituent concentration distributed structure of variation continuously respectively

And have above-mentioned Al and satisfy composition formula a little the highest containing: (Al _1-XTi _X) N (wherein X is an atomic ratio, expression 0.05～0.35), above-mentioned Ti satisfy composition formula a little the highest containing: (Ti _1-YAl _Y) N (wherein Y is an atomic ratio, expression 0.05～0.35),

And adjacent above-mentioned Al is the highest to be contained a bit with Ti is the highest and contains the hard layer that (Al/Ti) N layer of forming varied configurations that interval a bit is made of 0.01～0.1 μ m constitutes;

(b) as upper layer, it is average bed thickness with 1～10 μ m, and pass through magnetic control sputtering device, utilize WC target and Ti target as negative electrode (evaporation source), film forming in the reacting gas environment that the mist by decomposition gas, nitrogen and the Ar of hydrocarbon constitutes, measure and contain by the Auger spectroscopy apparatus:

W:5～40 atom %,

Ti:0.5～30 atom %,

Nitrogen: 0.5～30 atom %,

All the other had by forming that carbon and unavoidable impurities constitute, and by the infiltration type electron microscope observation, have and in the substrate of the carbon class amorphous body that contains the W composition, be distributed with crystalline Ti (C, N) the amorphous carbon class lubricating layer of the tissue of compounds particulate;

Surface coating layer can be brought into play good anti-clasticity in the processing of high speed heavy cut especially.

Then, in the formation layer of the surface coating layer of coating sintered carbide tools of the present invention, describe for the reason that limits numerical value as described above.

(A) lower layer (Al/Ti) N layer

(a) the highest composition a bit that contains of Al

As the Al composition in (Al/Ti) N layer of lower layer the high temperature hardness of raising and stable on heating effect are arranged, its Ti composition has the effect that improves elevated temperature strength, thereby, possess good high-temperature hardness and hear resistance more a little the highest containing at the proportional higher Al that contains of Al composition relatively, under the high-speed cutting condition that is accompanied by high heating, can bring into play advantages of good abrasion, if but the X value of the ratio of expression Ti in the ratio (atomic ratio) with the resultant of Al of accounting for less than 0.05, then the ratio of Al relatively becomes too much, even be adjacent to exist Ti a bit can not avoid the intensity of layer self to reduce the highest containing with good high-temperature intensity, the result, under high speed heavy cut condition, be easy to generate chip etc., on the other hand, if the X value of expression Ti components in proportions has surpassed 0.35, then the ratio of Al relatively becomes very few, can not guarantee good high-temperature hardness and the hear resistance wanted, so the X value is set at 0.05～0.35.

(b) the highest composition a bit that contains of Ti

As mentioned above, Al is the highest, and to contain high temperature hardness and hear resistance a bit good, and opposite elevated temperature strength is relatively poor, so replenishing under the highest purpose that contains elevated temperature strength deficiency a bit of this Al, relatively Ti contains proportional higher, the Ti that will have good high-temperature intensity thus alternately is clipped in the middle on thickness direction the highest containing a bit, thereby, if the ratio (atomic ratio) that the Y value of ratio of expression Al promptly accounts for the resultant of Ti has surpassed 0.35, then relatively the ratio of Al becomes too much, can not guarantee the good high-temperature intensity wanted, on the other hand, if the Y value is equally less than 0.05, then relatively the ratio of Ti becomes too much, possess high temperature hardness and the hear resistance of wanting in can not making that Ti is the highest and containing a bit, become and promote the wearing and tearing reasons of development, so the Y value is set at 0.05～0.35.

(c) Al is the highest contains a bit and the highest interval that contains between having a few of Ti

Betwixt under situation less than 0.01 μ m, be difficult to form each point clearly by above-mentioned composition, the result can not guarantee the good high-temperature intensity wanted in layer, good high-temperature hardness and hear resistance, and, if it has surpassed 0.1 μ m at interval, the shortcoming that each point is had then appears in layer partly, promptly if Al the elevated temperature strength deficiency a bit then occurs the highest containing, if Ti high temperature hardness and hear resistance deficiency a bit then occur the highest containing, as former thereby in cutting blade, produce chip easily, promoted the wearing and tearing development, so it is set at 0.01～0.1 μ m at interval.

(d) average bed thickness

In the situation of its bed thickness less than 1.5 μ m, can not guarantee the mar proof wanted chronically, and if its average bed thickness has surpassed 10 μ m, then be easy to generate chip, so its average bed thickness is set at 1.5～10 μ m.

(B) upper layer (amorphous carbon class lubricating layer)

(a) W amount

The W composition contains in the substrate of above-mentioned amorphous carbon class lubricating layer, effect with the elevated temperature strength that improves layer, but can not guarantee the good high-temperature intensity wanted under less than the situation of 5 atom % at its amount, on the other hand, if amount has surpassed 40 atom %, then lubricity sharply reduces, so its amount is set at 5～40 atom %.

(b) Ti and N amount

The Ti composition also has C (carbon) composition to combine under the film forming of magnetic field with the N composition, in overlay film as crystalline Ti (C, N) compounds particulate and existing, have the good lubricity that disturbed zone did not possess and significantly improve the effect of elevated temperature strength, but at its amount is that the Ti composition is less than 0.5 atom %, and under the situation of N composition less than 0.5 atom %, in layer as Ti (C, N) based fine particles and the ratio that exists is less, can not guarantee the good high-temperature intensity wanted, on the other hand, if its amount has surpassed 30 atom % for the Ti composition and the N composition has surpassed 30% atom, then high temperature hardness and lubricity reduce sharp, so its amount is made as Ti:0.5～30 atom % respectively, N:0.5～30 atom %.

(c) average bed thickness

Under the situation of its average bed thickness, can not guarantee chronically the lubricant effect wanted on the other hand,, then in blade part, to be easy to generate chip, so its average bed thickness is set at 1～10 μ m if its average bed thickness has surpassed 10 μ m less than 1 μ m.

As previously discussed, coating sintered carbide tools of the present invention is to have formed lower layer (hard layer) and upper layer (amorphous carbon class lubricating layer) on WC superhard matrix of base or titanium carbonitride metalloid ceramic matrix surface.

1, the TiN in the lower layer, TiCN and TiAlN have given and good the connecting airtight property of base material and high temperature hardness and hear resistance, elevated temperature strength.

2, in amorphous carbon class lubricating layer as upper layer,

2-1 is that purpose contains as the W of carbon class amorphous phase composition to improve overlay film intensity, and C is that purpose contains to improve the lubricity effect.

2-2 is by making crystalline Ti (C, N) compounds (TiN, TiCN etc.) and crystalline (Ti, Al) (C, N) compounds (TiAlN, TiAlCN etc.) microparticulate is distributed in the described carbon class of the above-mentioned 2-1 amorphous phase, can improve mar proof, hear resistance, high temperature hardness, the elevated temperature strength of top lubricating layer integral body.

3, (C, N) (Ti, Al) (C, N) particulate of compounds directly is preferably below the 40nm for compounds and crystalline to be distributed in crystalline Ti in the upper layer.Under particle diameter is situation more than the 40nm, the mar proof variation of upper layer integral body.

4, by compound above-mentioned 1～3, in the high-speed cutting and high speed heavy cut that are accompanied by high heating and mechanical shock, lower layer can be brought into play good high-temperature hardness and hear resistance, also have elevated temperature strength, and upper layer (amorphous carbon class lubricating layer) also can be brought into play good lubricity, mar proof and high-temperature stability by the microcrystallization that contains the lower layer composition.

Coating sintered carbide tools of the present invention is to make the hardness of the lubricity amorphous carbon class overlay film that constitutes it by become the crystalline Ti (C that disperses distribution under the superfine state by the magnetic field film forming in the substrate of its carbon class amorphous body, N) compounds particulate and improving significantly, with the substrate of above-mentioned carbon class amorphous body under the effect of W composition and possess high strength and match, at ferrous materials such as various steel and cast irons, also have and can not produce chip in the high-speed cutting of Al alloy or Cu alloy etc. and bring into play advantages of good abrasion chronically.

In addition, coating sintered carbide tools of the present invention is to make the mar proof of the lubricity amorphous carbon class overlay film that constitutes it by become the crystalline (Ti that disperses distribution under the superfine state by the magnetic field film forming in the substrate of its carbon class amorphous body, Al) (C, N) compounds particulate and improving significantly, with the substrate of above-mentioned carbon class amorphous body under the effect of W composition and possess high strength and match, at ferrous materials such as various steel and cast irons, also have and can not produce chip in the high-speed cutting of Al alloy or Cu alloy etc. and bring into play advantages of good abrasion chronically.

And then, in coating sintered carbide tools of the present invention, the lower layer that constitutes surface coating layer is that (Al/Ti) N layer has good high-temperature hardness and hear resistance, also has good high-temperature intensity, and as the effect of the amorphous carbon class lubricating layer of its upper layer by the W composition that substrate contained of its carbon class amorphous body, and becoming the crystalline Ti (C that disperses distribution under the superfine state by the magnetic field film forming in the above-mentioned substrate, N) compounds particulate, and crystalline (Ti, Al) (C, N) effect of compounds particulate, possesses good high-temperature intensity more, so be cut in the high speed heavy cut of material especially at the above-mentioned nonferrous material that is accompanied by significant high heating and high mechanical shock etc., can in surface coating layer, not produce chip yet, bring into play good wearability chronically.

Description of drawings

Figure 1A utilizes the infiltration type electron microscope that the lubricity amorphous carbon class overlay film that constitutes coating sintered carbide tools of the present invention (is contained the schematic diagram that crystalline Ti (C, N) compounds particulate) carries out the result of structure observation.

Figure 1B utilizes the infiltration type electron microscope ((Ti, Al) (C, N) compounds particulate) carries out the result's of structure observation schematic diagram to contain crystalline to the lubricity amorphous carbon class overlay film that constitutes coating sintered carbide tools of the present invention.

Fig. 2 A is illustrated in to form the approximate vertical view that connects airtight the evaporation coating device that uses in knitting layer and the lubricity amorphous carbon class overlay film that constitutes coating sintered carbide tools of the present invention.

Fig. 2 B is the outline elevation of the evaporation coating device shown in Fig. 2 A.

Fig. 3 A is illustrated in to form the approximate vertical view that connects airtight the evaporation coating device that uses in knitting layer and the lubricity amorphous carbon class overlay film that constitutes coating sintered carbide tools of the present invention.

Fig. 3 B is the outline elevation of the evaporation coating device shown in Fig. 2 A.

Fig. 4 A is the approximate vertical view of the arc ions electroplanting device that uses in (Al/Ti) N layer of the lower side that forms the surface coating layer that coats sintered carbide tools as the present invention.

Fig. 4 B is the outline elevation of the arc ions electroplanting device shown in Fig. 4 A.

Fig. 5 A is the approximate vertical view that connects airtight the evaporation coating device that uses in knitting layer and the lubricity amorphous carbon class overlay film that constitutes coating sintered carbide tools (relatively coating sintered carbide tools) in the past forming.

Fig. 5 B is the outline elevation of the evaporation coating device shown in Fig. 5 A.

Fig. 6 is forming (Ti, Al) the diagrammatic illustration figure of the evaporation coating device that uses in N layer and the amorphous carbon class overlay film as upper layer as the lower side of surface coating layer of in the past coating sintered carbide tools.

The specific embodiment

Then, specifically describe coating sintered carbide tools of the present invention by embodiment.

Embodiment 1

As material powder, preparation all has WC powder, TiC powder, VC powder, TaC powder, NbC powder, the Cr of the average grain diameter of 0.8～3 μ m ₃C ₂Powder, and Co powder, these material powders are fitted in the cooperation shown in the table 1 to be formed, carry out 84 hours wet mixed by ball mill, after the drying, pressure press forming by 100MPa is the press-powder body, with this press-powder body in the vacuum of 6Pa, temperature: sintering under 1 hour the condition of maintenance in 1400 ℃, making all the carbon steel cutting that is made of WC base superhard alloy cuts with superhard matrix base material with superhard matrix base material and Al alloy and Cu alloy, on above-mentioned carbon steel cuts with superhard matrix base material, cutting blade is partly implemented the honing processing of R:0.03 and made the superhard matrix A-1～A-10 of the plate shape with ISO specification TNMG160408, in addition, above-mentioned Al alloy and Cu alloy are cut superhard matrix the A-1 '～A-10 ' that makes the plate shape with ISO specification TEGX 160304R with superhard matrix base material enforcement attrition process.

In addition, as material powder, preparation all has TiCN (mass ratio is TiC/TiN=50/50) powder, the Mo of the average grain diameter of 0.5～2 μ m ₂The C powder, the ZrC powder, the NbC powder, the TaC powder, WC powder, the Co powder, and Ni powder, these material powders are fitted in the cooperation shown in the table 2 to be formed, carry out 84 hours wet mixed by ball mill, after the drying, pressure press forming by 100MPa is the press-powder body, with this press-powder body in the nitrogen gas environment of 2kPa, in temperature: keep sintering under 1 hour the condition in 1500 ℃, making all the carbon steel cutting that is made of TiCN metalloid pottery cuts with superhard matrix base material with superhard matrix base material and Al alloy and Cu alloy, on above-mentioned carbon steel cuts with superhard matrix base material, cutting blade is partly implemented the honing processing of R:0.03 and made the superhard matrix B-1～B-6 of the plate shape with ISO specification TNMG160408, in addition, above-mentioned Al alloy and Cu alloy are cut superhard matrix the B-1 '～B-6 ' that makes the plate shape with ISO specification TEGX160304R with superhard matrix base material enforcement attrition process.

Then, with above-mentioned superhard matrix A-1,1 '～A-10,10 ' and B-1,1 '～B-6,6 ' carries out ultrasonic wave respectively in acetone cleans, under the dried state, at Fig. 2 A, on the rotary table in the evaporation coating device shown in Fig. 2 B, a plurality of superhard matrixes are installed in ring-type leave on the position of predetermined distance to radial direction from its central shaft, as the negative electrode (evaporation source) of the magnetic control sputtering device of a side and configuration purity: the Ti target of 99.9 quality %, in opposite side configuration purity: the WC target of 99.6 quality % is as the negative electrode (evaporation source) of magnetic control sputtering device.In addition, with above-mentioned 2 negative electrode quadrature sides, as by (Ti, Al) the N layer constitutes connect airtight knitting layer form usefulness magnetic control sputtering device negative electrode (evaporation source) and configuration has the Ti-Al alloy target of the composition of regulation;

(a) at first, to install on one side interior vacuum exhaust and remain the vacuum of 0.01Pa, be heated to after 200 ℃ in will installing with heater on one side, Ar gas imported in the device and become the Ar gaseous environment of 0.5Pa pressure, apply at the above-mentioned superhard matrix that under this state rotation on one side on above-mentioned rotary table is rotated on one side-the bypass voltage of 800V, above-mentioned superhard matrix surface is carried out 20 minutes Ar gas impact and clean;

(b) then, on the solenoid of two magnetic control sputtering devices of the arranged opposite of above-mentioned evaporation coating device, all apply the condition of voltage: 50V, electric current: 10A, the flux density that forms the installation portion of above-mentioned superhard matrix is 140G (Gauss's) magnetic field, and the heating-up temperature in making above-mentioned evaporation coating device is under 400 ℃ the state, as reacting gas nitrogen and Ar are imported with the ratio of nitrogen flow: 300sccm, Ar flow: 200sccm, the reacting gas environment that the mist by nitrogen and Ar of formation 1Pa constitutes is perhaps as reacting gas and with C ₂H ₂, nitrogen and Ar be with C ₂H ₂The ratio of flow: 50sccm, nitrogen flow: 300sccm, Ar flow: 230sccm imports, form 1Pa by C ₂H ₂The reacting gas environment that constitutes of the mist of decomposition gas, nitrogen and Ar, negative electrode (evaporation source) for the Ti target applies power: 12kW (frequency: sputter electric power 40kHz), on the other hand, on above-mentioned superhard matrix, by applying-condition of the bypass voltage of 100V issues the light discharge that blazes, and forms the knitting layer that connects airtight that any or both by the TiN layer of target bed thickness shown in the table 3 and TiCN layer constitute on the surface of above-mentioned superhard matrix;

(c) and then, to be made as voltage to the condition that above-mentioned solenoid applies: the setting in the scope of 50～100V, electric current: 10～20A, the flux density of the installation portion of above-mentioned superhard matrix is made as the setting in the scope of 100～300G (Gauss), under the state that heating-up temperature in above-mentioned evaporation coating device is 400 ℃, the bypass voltage of above-mentioned superhard matrix for-100V, with C ₂H ₂(hydrocarbon), nitrogen and Ar are with C ₂H ₂Regulation flow in the scope of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 150～250sccm imports in the above-mentioned evaporation coating device as reacting gas, makes the reacting gas environment become the C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and apply for example power: 1～3kW (frequency: the sputter electric power of the regulation in scope 40kHz) at negative electrode (evaporation source) to the WC target of above-mentioned two magnetic control sputtering devices, on its Ti target, apply simultaneously power: 3～8kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz), form and to form by the target shown in the table 3 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produce surface coating cemented carbide throw away chip of the present invention as coating sintered carbide tools of the present invention (below be called the superhard blade of coating of the present invention) 1 thus respectively, 1 '～26,26 '.

And then, with above-mentioned superhard matrix A-1,1 '～A-10,10 ' and B-1,1 '～B-6,6 ' carries out ultrasonic wave respectively in acetone cleans, under the dried state, at Fig. 3 A, on the rotary table in the evaporation coating device shown in Fig. 3 B, a plurality of superhard matrixes are installed in ring-type leave on the position of predetermined distance to radial direction from its central shaft, as the negative electrode (evaporation source) of the magnetron sputtering catching device of a side and configuration has the Ti-Al alloy target of the composition of regulation, in opposite side configuration purity: the WC target of 99.6 quality % is as the negative electrode (evaporation source) of magnetic control sputtering device.In addition, with above-mentioned 2 negative electrode quadrature sides, as any or both by TiN layer and TiCN layer connecting airtight of constituting negative electrode (evaporation source) that knitting layer forms the magnetic control sputtering device of usefulness and configuration purity: the Ti target of 99.9 quality %;

(c) and then, to be made as voltage to the condition that above-mentioned solenoid applies: the setting in the scope of 50～100V, electric current: 10～20A, the flux density of the installation portion of above-mentioned superhard matrix is made as the setting in the scope of 100～300G (Gauss), under the state that heating-up temperature in above-mentioned evaporation coating device is 400 ℃, the bypass voltage of above-mentioned superhard matrix for-70V, with C ₂H ₂(hydrocarbon), nitrogen and Ar are with C ₂H ₂The flow of the regulation in the scope of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 150～250sccm imports in the above-mentioned evaporation coating device as reacting gas, makes the reacting gas environment become the C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and apply for example power: 1～3kW (frequency: the sputter electric power of the regulation in scope 40kHz) at negative electrode (evaporation source) to the WC target of above-mentioned two magnetic control sputtering devices, on its Ti target, apply simultaneously power: 3～8kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz), evaporation forms that the target shown in the table 4 is formed and the lubricity amorphous carbon class overlay film of target bed thickness, produces surface of the present invention as coating sintered carbide tools of the present invention thus respectively and coats cemented carbide throw away chip (below be called the present invention coat superhard blade) 27,27 '～42,42 '.

In addition, under purpose relatively, with above-mentioned superhard matrix A-1,1 '～A-10,10 ' and B-1,1 '～B-6, each surface of 6 ' carry out in acetone respectively that ultrasonic wave cleans, under the dried state, at the negative electrode (evaporation source) shown in Fig. 5 A, Fig. 5 B is on the sputter equipment and the rotary table of negative electrode (evaporation source) for the evaporation coating device of the sputter equipment arranged opposite of WC target of Ti target, a plurality of superhard matrixes is installed in ring-type leaves on the position of predetermined distance to radial direction from its central shaft;

(b) then, heating-up temperature in making above-mentioned evaporation coating device is under 300 ℃ the state, as reacting gas nitrogen and Ar are imported with the ratio of nitrogen flow: 200sccm, Ar flow: 300sccm, the reacting gas environment that the mist by nitrogen and Ar of formation 1Pa constitutes is perhaps as reacting gas and with C ₂H ₂, nitrogen and Ar be with C ₂H ₂The ratio of flow: 40sccm, nitrogen flow: 200sccm, Ar flow: 300sccm imports, form 1Pa by C ₂H ₂The reacting gas environment that constitutes of the mist of decomposition gas, nitrogen and Ar, negative electrode (evaporation source) for the Ti target applies power: 12kW (frequency: sputter electric power 40kHz), on the other hand, on above-mentioned superhard matrix, by applying-condition of the bypass voltage of 100V issues the light discharge that blazes, and forms the knitting layer that connects airtight that any or both by the TiN layer of target bed thickness shown in table 5, the table 6 and TiCN layer constitute on the surface of above-mentioned superhard matrix;

(c) then, the heating-up temperature in making above-mentioned evaporation coating device is under 200 ℃ the state, with C ₂H ₂With Ar with C ₂H ₂The flow of the regulation in the scope of flow: 40～80sccm, Ar flow: 250sccm imports, form 1Pa by C ₂H ₂Decomposition gas and the reacting gas environment that constitutes of the mist of Ar, and will the bypass voltage that above-mentioned superhard matrix applies be made as-20V, apply power: 4～6kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz) at negative electrode (evaporation source) to the WC target, connect airtight above-mentioned that evaporation forms equally by table 5 on the knitting layer, target shown in the table 6 is formed and the lubricity amorphous carbon class overlay film of target bed thickness, and the comparison surface that produces the coating sintered carbide tools that is equivalent in the past thus respectively coats cemented carbide throw away chip (below be called relatively coat superhard blade) 1,1 '～16,16 '.

Then, by stationary fixture with the coating of the invention described above superhard blade 1,1 '～42,42 ' and relatively coat superhard blade 1,1 '～16,16 ' screw and be fixed under the state on the leading section of instrument steel cutter, carry out

Be cut material: the pole of JISS10C,

Cutting speed: 350m/min,

Cutting-in: 1.2mm,

Feeding: 0.18mm/rev,

Cutting time: 5 minutes, condition under the dry type high-speed cutting processing experiment of carbon steel (common cutting speed is 120m/min.)；

Be cut material: the pole of JISS5052,

Cutting speed: 1000m/min,

Cutting-in: 1.4mm,

Feeding: 0.3mm/rev,

Cutting time: 20 minutes, condition under the dry type high-speed cutting processing experiment of Al alloy (common cutting speed is 400m/min.)；

Also have,

Be cut material: the pole of JISC3710,

Cutting speed: 430m/min,

Cutting-in: 1.2mm,

Feeding: 0.25mm/rev,

Cutting time: 20 minutes, condition under the dry type high-speed cutting processing experiment of Cu alloy (common cutting speed is 200m/min.)。In which machining test, all measure the flank wear width of cutting blade.Its measurement result is represented in table 3～6.

[table 1]

Kind		Cooperate and form (quality %)
		Cooperate and form (quality %)							Co	TiC	TaC	NbC	VC	Cr ₃C ₂	WC
		Superhard matrix (blade)	A-1，1′	5	-	0.5	-	-	Co	TiC	TaC	NbC	VC	Cr ₃C ₂	WC	-	All the other
A-2，2′	5.5		A-1，1′	5	-	0.5	-	-	-	0.2	1.8	-	-	All the other		-	All the other
A-2，2′	5.5		A-3，3′	6	-	-	-	-	-	0.2	1.8	-	-	All the other	0.1	All the other
A-4，4′	6.5		A-3，3′	6	-	-	-	-	-	-	-	0.1	-	All the other	0.1	All the other
A-4，4′	6.5		A-5，5′	7	-	-	-	0.3	-	-	-	0.1	-	All the other	0.3	All the other
A-6，6′	7.5		A-5，5′	7	-	-	-	0.3	-	2	-	-	-	All the other	0.3	All the other
A-6，6′	7.5		A-7，7′	8	-	-	-	-	-	2	-	-	-	All the other	0.5	All the other
A-8，8′	8.6		A-7，7′	8	-	-	-	-	5	-	3	-	-	All the other	0.5	All the other
A-8，8′	8.6		A-9，9′	9	0.5	2.5	-	-	5	-	3	-	-	All the other	-	All the other
A-10，10′	9.5		A-9，9′	9	0.5	2.5	-	-	1.5	-	0.5	-	-	All the other	-	All the other

[table 2]

Kind		Cooperate and form (quality %)
		Cooperate and form (quality %)								Co	Ni	ZrC	TaC	NbC	Mo ₂C	WC	TiCN
		Superhard matrix (blade)	B-1，1′	14	4.5	-	10	-	10	Co	Ni	ZrC	TaC	NbC	Mo ₂C	WC	TiCN	16	All the other
B-2，2′	7		B-1，1′	14	4.5	-	10	-	10	6	-	5	-	7.5	-	All the other		16	All the other
B-2，2′	7		B-3，3′	8	-	-	-	-	6	6	-	5	-	7.5	-	All the other	10	All the other
B-4，4′	11		B-3，3′	8	-	-	-	-	6	4.5	-	11	2	-	-	All the other	10	All the other
B-4，4′	11		B-5，5′	9	4	1	8	-	10	4.5	-	11	2	-	-	All the other	10	All the other
B-6，6′	12		B-5，5′	9	4	1	8	-	10	5.5	-	10	-	9.5	14.5	All the other	10	All the other

[table 3]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film						Flank wear width (mm)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film						Flank wear width (mm)			Target bed thickness (μ m)		Target is formed (atom %)				Target bed thickness (μ m)	(C N) is crystalline particle footpath (nm) to Ti	The high-speed cutting of carbon class steel	The high-speed cutting of Al alloy	The high-speed cutting of Cu alloy
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity						Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity	Coating superhard cutting blade of the present invention	1，1′	A-1，1′	0.1	-	5.0	20.0	10.0	All the other	1.0	39.5						0.25	0.17	0.16
2，2′	A-2，2′	-	1.0	10.0	15.0	7.5	All the other	3.0		1，1′	A-1，1′	0.1	-	5.0	20.0	10.0	All the other	1.0	39.5	23.5	0.22	0.14	0.13		0.25	0.17	0.16
2，2′	A-2，2′	-	1.0	10.0	15.0	7.5	All the other	3.0		3，3′	A-3，3′	1.0	0.5	15.0	10.0	5.0	All the other	5.0	22.5	23.5	0.22	0.14	0.13	0.2	0.12	0.11
4，4′	A-4，4′	-	2.0	20.0	5.0	2.5	All the other	7.0		3，3′	A-3，3′	1.0	0.5	15.0	10.0	5.0	All the other	5.0	22.5	9.0	0.17	0.1	0.08	0.2	0.12	0.11
4，4′	A-4，4′	-	2.0	20.0	5.0	2.5	All the other	7.0		5，5′	A-5，5′	2.5	-	5.0	20.0	18.0	All the other	9.0	8.5	9.0	0.17	0.1	0.08	0.15	0.07	0.06
6，6′	A-6，6′	1.0	2.0	10.0	15.0	10.5	All the other	13.0		5，5′	A-5，5′	2.5	-	5.0	20.0	18.0	All the other	9.0	8.5	7.0	0.12	0.05	0.04	0.15	0.07	0.06
6，6′	A-6，6′	1.0	2.0	10.0	15.0	10.5	All the other	13.0		7，7′	A-7，7′	0.5	-	15.0	10.0	9.0	All the other	3.0	35.5	7.0	0.12	0.05	0.04	0.23	0.15	0.14
8，8′	A-8，8′	-	3.0	20.0	5.0	0.5	All the other	5.0		7，7′	A-7，7′	0.5	-	15.0	10.0	9.0	All the other	3.0	35.5	20.5	0.21	0.13	0.13	0.23	0.15	0.14
8，8′	A-8，8′	-	3.0	20.0	5.0	0.5	All the other	5.0		9，9′	A-9，9′	0.5	2.5	10.0	10.0	3.0	All the other	7.0	18.5	20.5	0.21	0.13	0.13	0.18	0.12	0.09
10，10′	A-10，10′	2.0	-	15.0	15.0	1.5	All the other	9.0		9，9′	A-9，9′	0.5	2.5	10.0	10.0	3.0	All the other	7.0	18.5	9.5	0.17	0.09	0.07	0.18	0.12	0.09
10，10′	A-10，10′	2.0	-	15.0	15.0	1.5	All the other	9.0		11，11′	A-1，1′	2.0	-	5.0	20.0	18.0	All the other	9.0	30.4	9.5	0.17	0.09	0.07	0.23	0.12	0.11
12，12′	A-3，3′	-	1.5	10.0	30.0	25.0	All the other	6.0		11，11′	A-1，1′	2.0	-	5.0	20.0	18.0	All the other	9.0	30.4	15.6	0.19	0.14	0.10	0.23	0.12	0.11
12，12′	A-3，3′	-	1.5	10.0	30.0	25.0	All the other	6.0		13，13′	A-5，5′	0.5	0.5	20.0	20.0	16.5	All the other	4.0	13.0	15.6	0.19	0.14	0.10	0.18	0.16	0.09
14，14′	A-7，7′	0.5	1.0	10.0	0.5	10.0	All the other	5.0		13，13′	A-5，5′	0.5	0.5	20.0	20.0	16.5	All the other	4.0	13.0	8.0	0.35	0.03	0.05	0.18	0.16	0.09
14，14′	A-7，7′	0.5	1.0	10.0	0.5	10.0	All the other	5.0		15，15′	A-9，9′	-	1.5	40.0	4.0	30.0	All the other	10.0	5.0	8.0	0.35	0.03	0.05	0.08	0.21	0.25
16，16′	B-1，1′	-	2.5	5.0	5.0	2.5	All the other	9.0		15，15′	A-9，9′	-	1.5	40.0	4.0	30.0	All the other	10.0	5.0	9.5	0.15	0.08	0.07	0.08	0.21	0.25
16，16′	B-1，1′	-	2.5	5.0	5.0	2.5	All the other	9.0		17，17′	B-2，2′	1.0	1.0	10.0	10.0	5.0	All the other	7.0	13.5	9.5	0.15	0.08	0.07	0.16	0.11	0.10
18，18′	B-3，3′	-	1.0	15.0	15.0	7.5	All the other	3.0		17，17′	B-2，2′	1.0	1.0	10.0	10.0	5.0	All the other	7.0	13.5	28.5	0.21	0.14	0.12	0.16	0.11	0.10
18，18′	B-3，3′	-	1.0	15.0	15.0	7.5	All the other	3.0		19，19′	B-4，4′	1.5	-	20.0	20.0	10.0	All the other	13.0	8.0	28.5	0.21	0.14	0.12	0.13	0.08	0.06
20，20′	B-5，5′	-	0.1	10.0	15.0	13.5	All the other	1.0		19，19′	B-4，4′	1.5	-	20.0	20.0	10.0	All the other	13.0	8.0	36.0	0.24	0.19	0.18	0.13	0.08	0.06
20，20′	B-5，5′	-	0.1	10.0	15.0	13.5	All the other	1.0		21，21′	B-6，6′	1.5	1.5	15.0	10.0	1.0	All the other	5.0	21.0	36.0	0.24	0.19	0.18	0.19	0.13	0.11
22，22′	B-1，1′	-	0.5	20.0	5.0	4.5	All the other	8.0		21，21′	B-6，6′	1.5	1.5	15.0	10.0	1.0	All the other	5.0	21.0	17.0	0.18	0.12	0.12	0.19	0.13	0.11
22，22′	B-1，1′	-	0.5	20.0	5.0	4.5	All the other	8.0		23，23′	B-3，3′	2.0	-	15.0	20.0	15.0	All the other	10.0	8.5	17.0	0.18	0.12	0.12	0.14	0.08	0.06
24，24′	B-4，4′	2.0	1.0	10.0	30.0	26.0	All the other	2.0		23，23′	B-3，3′	2.0	-	15.0	20.0	15.0	All the other	10.0	8.5	23.0	0.20	0.15	0.10	0.14	0.08	0.06
24，24′	B-4，4′	2.0	1.0	10.0	30.0	26.0	All the other	2.0		25，25′	B-5，5′	1.5	0.5	20.0	3.0	10.0	All the other	6.0	39.0	23.0	0.20	0.15	0.10	0.29	0.05	0.04
26，26′	B-6，6′	-	1.0	35.0	1.5	30.0	All the other	12.0		25，25′	B-5，5′	1.5	0.5	20.0	3.0	10.0	All the other	6.0	39.0	6.0	0.10	0.23	0.20	0.29	0.05	0.04

[table 4]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film							Flank wear width (mm)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film							Flank wear width (mm)			Target bed thickness (μ m)		Target is formed (atom %)					Target bed thickness (μ m)	(Ti, Al) (C N) is crystalline particle footpath (nm)	The high-speed cutting of carbon class steel	The high-speed cutting of Al alloy	The high-speed cutting of Cu alloy
			The TiN layer	The TiCN layer	W	Ti	Al	N	C+ impurity						Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	Al	N	C+ impurity	Coating superhard cutting blade of the present invention	27，27′	A-1，1′	0.1	-	5.0	10.0	15.0	22.5	All the other	3.0	32.6						0.21	0.16	0.14
28，28′	A-2，2′	-	1.0	10.0	8.0	12.0	12.0	All the other	5.0		27，27′	A-1，1′	0.1	-	5.0	10.0	15.0	22.5	All the other	3.0	32.6	24.9	0.19	0.13	0.12		0.21	0.16	0.14
28，28′	A-2，2′	-	1.0	10.0	8.0	12.0	12.0	All the other	5.0		29，29′	A-3，3′	1.0	0.5	15.0	4.0	6.0	3.0	All the other	7.0	22.1	24.9	0.19	0.13	0.12	0.19	0.11	0.12
30，30′	A-4，4′	-	2.0	20.0	10.0	15.0	2.5	All the other	9.0		29，29′	A-3，3′	1.0	0.5	15.0	4.0	6.0	3.0	All the other	7.0	22.1	11.7	0.14	0.1	0.07	0.19	0.11	0.12
30，30′	A-4，4′	-	2.0	20.0	10.0	15.0	2.5	All the other	9.0		31，31′	A-5，5′	2.5	-	5.0	10.0	10.0	18.0	All the other	1.0	8.6	11.7	0.14	0.1	0.07	0.13	0.07	0.05
32，32′	A-6，6′	1.0	2.0	10.0	7.5	7.5	13.5	All the other	3.0		31，31′	A-5，5′	2.5	-	5.0	10.0	10.0	18.0	All the other	1.0	8.6	5.3	0.1	0.04	0.04	0.13	0.07	0.05
32，32′	A-6，6′	1.0	2.0	10.0	7.5	7.5	13.5	All the other	3.0		33，33′	A-7，7′	0.5	-	15.0	5.0	5.0	3.0	All the other	5.0	28.6	5.3	0.1	0.04	0.04	0.2	0.14	0.13
34，34′	A-8，8′	-	3.0	20.0	2.5	2.5	0.5	All the other	7.0		33，33′	A-7，7′	0.5	-	15.0	5.0	5.0	3.0	All the other	5.0	28.6	25.7	0.2	0.12	0.12	0.2	0.14	0.13
34，34′	A-8，8′	-	3.0	20.0	2.5	2.5	0.5	All the other	7.0		35，35′	A-9，9′	0.5	2.5	5.0	2.5	1.6	0.4	All the other	9.0	16.3	25.7	0.2	0.12	0.12	0.16	0.13	0.08
36，36′	A-10，10′	2.0	-	10.0	6.0	4.0	6.0	All the other	13.0		35，35′	A-9，9′	0.5	2.5	5.0	2.5	1.6	0.4	All the other	9.0	16.3	14.3	0.16	0.1	0.07	0.16	0.13	0.08
36，36′	A-10，10′	2.0	-	10.0	6.0	4.0	6.0	All the other	13.0		37，37′	B-1，1′	-	2.5	15.0	10.0	8.7	5.0	All the other	13.0	9.4	14.3	0.16	0.1	0.07	0.13	0.07	0.06
38，38′	B-2，2′	1.0	1.0	20.0	2.5	1.6	3.7	All the other	9.0		37，37′	B-1，1′	-	2.5	15.0	10.0	8.7	5.0	All the other	13.0	9.4	12.2	0.15	0.1	0.09	0.13	0.07	0.06
38，38′	B-2，2′	1.0	1.0	20.0	2.5	1.6	3.7	All the other	9.0		39，39′	B-3，3′	-	1.0	5.0	10.0	10.0	10.0	All the other	7.0	21.2	12.2	0.15	0.1	0.09	0.19	0.13	0.11
40，40′	B-4，4′	1.5	-	10.0	7.5	7.5	7.5	All the other	5.0		39，39′	B-3，3′	-	1.0	5.0	10.0	10.0	10.0	All the other	7.0	21.2	6.5	0.11	0.05	0.05	0.19	0.13	0.11
40，40′	B-4，4′	1.5	-	10.0	7.5	7.5	7.5	All the other	5.0		41，41′	B-5，5′	-	0.1	15.0	5.0	5.0	5.0	All the other	3.0	39.8	6.5	0.11	0.05	0.05	0.23	0.18	0.16
42，42′	B-6，6′	1.5	1.5	20.0	7.5	7.5	7.5	All the other	1.0		41，41′	B-5，5′	-	0.1	15.0	5.0	5.0	5.0	All the other	3.0	39.8	18.8	0.17	0.12	0.1	0.23	0.18	0.16

[table 5]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film					Flank wear width (mm)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film					Flank wear width (mm)			Target bed thickness (μ m)		Target is formed (atom %)				Target bed thickness (μ m)	The high-speed cutting of carbon class steel	The high-speed cutting of Al alloy	The high-speed cutting of Cu alloy
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity					Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity	Relatively coat superhard cutting blade	1，1′	A-1，1′	0.1	-	5	-	-	All the other	1					0.75	0.67	0.65
2，2′	A-2，2′	-	1	10	-	-	All the other	3		1，1′	A-1，1′	0.1	-	5	-	-	All the other	1	0.72	0.64	0.62		0.75	0.67	0.65
2，2′	A-2，2′	-	1	10	-	-	All the other	3		3，3′	A-3，3′	1	0.6	15	-	-	All the other	5	0.72	0.64	0.62	0.69	0.62	0.60
4，4′	A-4，4′	-	2	20	-	-	All the other	7		3，3′	A-3，3′	1	0.6	15	-	-	All the other	5	0.64	0.60	0.58	0.69	0.62	0.60
4，4′	A-4，4′	-	2	20	-	-	All the other	7		5，5′	A-5，5′	2.5	-	5	-	-	All the other	9	0.64	0.60	0.58	0.62	0.58	0.57
6，6′	A-6，6′	1	2	10	-	-	All the other	13		5，5′	A-5，5′	2.5	-	5	-	-	All the other	9	0.59	0.55	0.53	0.62	0.58	0.57
6，6′	A-6，6′	1	2	10	-	-	All the other	13		7，7′	A-7，7′	0.5	-	15	-	-	All the other	3	0.59	0.55	0.53	0.74	0.67	0.64
8，8′	A-8，8′	-	3	20	-	-	All the other	5		7，7′	A-7，7′	0.5	-	15	-	-	All the other	3	0.72	0.64	0.61	0.74	0.67	0.64
8，8′	A-8，8′	-	3	20	-	-	All the other	5		9，9′	A-9，9′	0.5	2.5	10	-	-	All the other	7	0.72	0.64	0.61	0.68	0.62	0.60
10，10′	A-10，10′	2	-	15	-	-	All the other	9		9，9′	A-9，9′	0.5	2.5	10	-	-	All the other	7	0.66	0.60	0.57	0.68	0.62	0.60

[table 6]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film					Flank wear width (mm)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film					Flank wear width (mm)			Target bed thickness (μ m)		Target is formed (atom %) C+				Target bed thickness (μ m)	The high-speed cutting of carbon class steel	The high-speed cutting of Al alloy	The high-speed cutting of Cu alloy
			The TiN layer	The TiCN layer	W	Ti	N	Impurity					Target bed thickness (μ m)		Target is formed (atom %) C+
			The TiN layer	The TiCN layer	W	Ti	N	Impurity	Relatively coat superhard cutting blade	11，11′	B-1，1′	-	2.5	5	-	-	All the other	9					0.61	0.57	0.57
12，12′	B-2，2′	1	1	10	-	-	All the other	7		11，11′	B-1，1′	-	2.5	5	-	-	All the other	9	0.63	0.60	0.59		0.61	0.57	0.57
12，12′	B-2，2′	1	1	10	-	-	All the other	7		13，13′	B-3，3′	-	1	15	-	-	All the other	3	0.63	0.60	0.59	0.70	0.65	0.63
14，14′	B-4，4′	1.5	-	20	-	-	All the other	13		13，13′	B-3，3′	-	1	15	-	-	All the other	3	0.60	0.57	0.55	0.70	0.65	0.63
14，14′	B-4，4′	1.5	-	20	-	-	All the other	13		15，15′	B-5，5′	-	0.1	10	-	-	All the other	1	0.60	0.57	0.55	0.73	0.58	0.66
16，16′	B-6，6′	1.5	1.5	15	-	-	All the other	5		15，15′	B-5，5′	-	0.1	10	-	-	All the other	1	0.66	0.63	0.62	0.73	0.58	0.66

Embodiment 2

As material powder, prepare to have average grain diameter: the middle coarse grain WC powder of 4.5 μ m, average grain diameter: particulate WC powder, the average grain diameter of 0.8 μ m: TaC powder, the average grain diameter of 1.3 μ m: NbC powder, the average grain diameter of 1.2 μ m: ZrC powder, the average grain diameter of 1.2 μ m: the Cr of 1.8 μ m ₃C ₂Powder, average grain diameter: the VC powder of 1.5 μ m, the average grain diameter: (Ti of 1.0 μ m, W) C (mass ratio is TiC/WC=50/50) powder, and average grain diameter: the Co powder of 1.8 μ m, these material powders are fitted in the cooperation shown in the table 7 respectively to be formed, add paraffin again and in acetone, carry out ball mill mixing in 72 hours, behind the drying under reduced pressure, pressure press forming by 100MPa is the various press-powder bodies of regulation shape, with these press-powder bodies in the vacuum gas environment of 6Pa, be warmed up to the temperature of the regulation in 1370～1470 ℃ the scope with 7 ℃/minute programming rates, after keeping 1 hour under this temperature, under the cold condition of stove, carry out sintering, the formation diameter is 8mm, 13mm, and 3 kinds of superhard matrixes formation pole sintered bodies of 26mm, cut processing by above-mentioned 3 kinds of pole sintered bodies by grinding again, with the combination shown in the table 7, the diameter * length that produces blade part respectively is respectively 6mm * 13mm, 10mm * 22mm, and the size of 20mm * 45mm, and superhard matrix (slotting cutter) C-1～C-8 that all has 4 side's of having tooth shape shapes of torsion angle 30 degree.

Then, these superhard matrixes (slotting cutter) C-1～C-8 is carried out ultrasonic wave in acetone clean, under the dried state, be encased in equally by Fig. 2 A, Fig. 2 B or Fig. 3 A, in the evaporation coating device shown in Fig. 3 B, under the condition identical with the foregoing description 1, form table 8 by evaporation, any of the TiN layer of the target bed thickness shown in the table 9 and TiCN layer or both, and equally by table 8, target shown in the table 9 is formed and the lubricity amorphous carbon class overlay film of target bed thickness, produces surface of the present invention as coating sintered carbide tools of the present invention respectively and coats cemented carbide slotting cutter (below be called the superhard slotting cutter of coating of the present invention) 1～19.

In addition, under purpose relatively, above-mentioned superhard matrix (slotting cutter) C-1～C-8 is carried out ultrasonic wave in acetone clean, under the dried state, be encased in equally by Fig. 5 A, in the evaporation coating device shown in Fig. 5 B, under the condition identical with the foregoing description 1, form any or both of the TiN layer of the target bed thickness shown in the table 10 and TiCN layer by evaporation, and forms by the target shown in the table 10 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produce the comparison surface coating cemented carbide slotting cutter (below be called relatively coat superhard slotting cutter) 1～8 of the coating sintered carbide tools that is equivalent in the past respectively.

Then, for the superhard slotting cutter 1～19 of the coating of the invention described above and relatively coat the superhard slotting cutter 1～3,9,12～14 of coating of the present invention in the superhard slotting cutter 1～8 and relatively coat superhard slotting cutter 1～3, carry out

Be cut material: planar dimension: the sheet material of the JISA5052 of 100mm * 250mm, thickness: 50mm,

Cutting speed: 300m/min,

Axial cutting-in: 4mm,

Radially cutting-in: 0.7mm,

Table feed: the 2200mm/ branch, condition under the dry type high speed side machining test of Al alloy (common cutting speed is 180m/min.); For the superhard slotting cutter 4～6,10,15～17 of coating of the present invention and relatively coat superhard slotting cutter 4～6, carry out

Be cut material: planar dimension: the sheet material of the JISC3710 of 100mm * 250mm, thickness: 50mm,

Cutting speed: 300m/min,

Axial cutting-in: 6mm,

Radially cutting-in: 1.1mm,

Table feed: the 2050mm/ branch, condition under the dry type high speed side machining test of Cu alloy (common cutting speed is 180m/min.); For the superhard slotting cutter 7,8,11,18,19 of coating of the present invention, carry out

Be cut material: planar dimension: the sheet material of the JISS10C of 100mm * 250mm, thickness: 50mm,

Cutting speed: 350m/min,

Axial cutting-in: 8mm,

Radially cutting-in: 2mm,

Table feed: the 2050mm/ branch, condition under the dry type high speed side machining test of carbon steel (common cutting speed is 200m/min.); Length of cut when the flank wear width of all measuring the peripheral edge of blade part in which side cut processing experiment reaches as the 0.1mm of the normative reference in service life.Its measurement result is illustrated respectively in table 8～table 10.

[table 7]

Kind		Cooperate and form (quality %)								Diameter * the length of blade part (mm)
		Cooperate and form (quality %)									Co	(Ti，W)C	TaC	NbC	ZrC	Cr ₃C ₂	VC	WC
		Superhard matrix (slotting cutter)	C-1	5	-	-	-	-	-		Co	(Ti，W)C	TaC	NbC	ZrC	Cr ₃C ₂	VC	WC	-	Particulate: all the other	6×13
C-2	6		C-1	5	-	-	-	-	-	-	-	1	-	-	-	Particulate: all the other	6×13		-	Particulate: all the other	6×13
C-2	6		C-3	6	-	-	-	1	0.5	-	-	1	-	-	-	Particulate: all the other	6×13	0.5	Particulate: all the other	6×13
C-4	6.5		C-3	6	-	-	-	1	0.5	-	-	-	-	0.3	0.3	Particulate: all the other	10×22	0.5	Particulate: all the other	6×13
C-4	6.5		C-5	7	18	4.5	0.6	-	-	-	-	-	-	0.3	0.3	Particulate: all the other	10×22	-	Middle coarse grain: all the other	10×22
C-6	7.5		C-5	7	18	4.5	0.6	-	-	-	-	-	-	0.5	-	Particulate: all the other	10×22	-	Middle coarse grain: all the other	10×22
C-6	7.5		C-7	8	20	1	4	-	-	-	-	-	-	0.5	-	Particulate: all the other	10×22	-	Middle coarse grain: all the other	20×45
C-8	9		C-7	8	20	1	4	-	-	9	1	5	2	-	-	Middle coarse grain: all the other	20×45	-	Middle coarse grain: all the other	20×45

[table 8]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film						Cutting long (m)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film							Target bed thickness (μ m)		Target is formed (atom %)				Target bed thickness (μ m)	(C N) is crystalline particle footpath (nm) to Ti
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity				Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity	The superhard slotting cutter of coating of the present invention	1		C-1	0.1	-	5.0	20.0	10.0			All the other	3	21.3	195
2	C-2	-	1.0	10.0	15.0	7.5	All the other	5		1	7.9	C-1	0.1	-	5.0	20.0	10.0	210		All the other	3	21.3	195
2	C-2	-	1.0	10.0	15.0	7.5	All the other	5		3	7.9	C-3	0.5	0.5	15.0	10.0	5.0	210	All the other	3	28.3	186
4	C-4	-	1.5	20.0	5.0	2.5	All the other	7		3	11.6	C-3	0.5	0.5	15.0	10.0	5.0	223	All the other	3	28.3	186
4	C-4	-	1.5	20.0	5.0	2.5	All the other	7		5	11.6	C-5	0.5	2.0	5.0	20.0	18.0	223	All the other	9	25.3	245
6	C-6	0.5	-	10.0	15.0	10.5	All the other	3		5	17.2	C-5	0.5	2.0	5.0	20.0	18.0	192	All the other	9	25.3	245
6	C-6	0.5	-	10.0	15.0	10.5	All the other	3		7	17.2	C-7	3.0	-	15.0	10.0	9.0	192	All the other	9	15.8	70
8	C-8	-	3.0	20.0	5.0	0.5	All the other	13		7	5.6	C-7	3.0	-	15.0	10.0	9.0	84	All the other	9	15.8	70
8	C-8	-	3.0	20.0	5.0	0.5	All the other	13		9	5.6	C-1	0.5	1.0	10.0	0.5	10.0	84	All the other	5	6.3	213
10	C-4	-	1.5	40.0	4.0	30.0	All the other	10		9	13.2	C-1	0.5	1.0	10.0	0.5	10.0	205	All the other	5	6.3	213
10	C-4	-	1.5	40.0	4.0	30.0	All the other	10		11	13.2	C-7	-	1.5	10.0	30.0	25.0	205	All the other	6	37.4	64

[table 9]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film							Cutting long (m)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film								Target bed thickness (μ m)		Target is formed (atom %)					Target bed thickness (μ m)	(Ti, Al) (C N) is crystalline particle footpath (nm)
			The TiN layer	The TiCN layer	W	Ti	Al	N	C+ impurity				Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	Al	N	C+ impurity	The superhard slotting cutter of coating of the present invention	12		C-1	0.1	-	10.0	10.0	6.7	1.5			All the other	3	14.5	205
13	C-2	-	1.0	20.0	10.0	10.0	18.0	All the other	5		12	9.7	C-1	0.1	-	10.0	10.0	6.7	1.5	221		All the other	3	14.5	205
13	C-2	-	1.0	20.0	10.0	10.0	18.0	All the other	5		14	9.7	C-3	0.5	0.5	5.0	10.0	15.0	22.5	221	All the other	3	32.5	195
15	C-4	-	1.5	10.0	5.0	8.0	6.5	All the other	7		14	13.1	C-3	0.5	0.5	5.0	10.0	15.0	22.5	234	All the other	3	32.5	195
15	C-4	-	1.5	10.0	5.0	8.0	6.5	All the other	7		16	13.1	C-5	0.5	2.0	20.0	7.5	7.5	4.5	234	All the other	9	7.3	257
17	C-6	0.5	-	5.0	2.5	1.6	0.4	All the other	3		16	18.5	C-5	0.5	2.0	20.0	7.5	7.5	4.5	202	All the other	9	7.3	257
17	C-6	0.5	-	5.0	2.5	1.6	0.4	All the other	3		18	18.5	C-7	3.0	-	10.0	4.5	5.5	0.7	202	All the other	9	11.6	74
19	C-8	-	3.0	15.0	5.5	4.5	0.6	All the other	13		18	12.6	C-7	3.0	-	10.0	4.5	5.5	0.7	88	All the other	9	11.6	74

[table 10]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film					Cutting long (m)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film						Target bed thickness (μ m)		Target is formed (atom %)				Target bed thickness (μ m)
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity			Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity	Relatively coat superhard slotting cutter		1	C-1	0.1	-	20	-		-	All the other	3	68
2	C-2	-	1	10	-	-	All the other	5		72	1	C-1	0.1	-	20	-		-	All the other	3	68
2	C-2	-	1	10	-	-	All the other	5		72	3	C-3	0.5	0.5	5	-	-	All the other	3	66
4	C-4	0.5	1.5	5	-	-	All the other	7		80	3	C-3	0.5	0.5	5	-	-	All the other	3	66
4	C-4	0.5	1.5	5	-	-	All the other	7		80	5	C-5	-	2	10	-	-	All the other	9	91
6	C-6	0.5	-	20	-	-	All the other	3		64	5	C-5	-	2	10	-	-	All the other	9	91
6	C-6	0.5	-	20	-	-	All the other	3		64	7	C-7	3	-	15	-	-	All the other	9	29
8	C-8	-	3	10	-	-	All the other	13		34	7	C-7	3	-	15	-	-	All the other	9	29

Embodiment 3

The diameter that utilization is made in the foregoing description 2 is 8mm (superhard matrix C-1～C-3 forms and uses), 13mm (superhard matrix C-4～C-6 forms and uses), and 26mm (superhard matrix C-7, C-8 form with) 3 kinds of pole sintered bodies, cut processing by these 3 kinds of pole sintered bodies by grinding, the diameter * length that produces groove formation portion respectively is respectively 4mm * 13mm (superhard matrix D-1～D-3), 8mm * 22mm (superhard matrix D-4～D-6), and 16mm * 45mm (superhard matrix D-7, D-8) size, and superhard matrix (drill bit) D-1～D-8 that all has 2 tooth shape shapes of torsion angle 30 degree.

Then, cutting blade to these superhard matrixes (drill bit) D-1～D-8 is implemented honing, carrying out ultrasonic wave in acetone cleans, under the dried state, be encased in equally by Fig. 2 A, Fig. 2 B or Fig. 3 A, in the evaporation coating device shown in Fig. 3 B, under the condition identical with the foregoing description 1, form table 11 by evaporation, any of the TiN layer of the target bed thickness shown in the table 12 and TiCN layer or both, and equally by table 11, target shown in the table 12 is formed and the overlay film of the lubricity carbon class amorphous body of target bed thickness, produces surface of the present invention as coating sintered carbide tools of the present invention respectively and coats cemented carbide drill bit (below be called the superhard drill bit of coating of the present invention) 1～19.

In addition, under purpose relatively, cutting blade to above-mentioned superhard matrix (drill bit) D-1～D-8 is implemented honing, carrying out ultrasonic wave in acetone cleans, under the dried state, be encased in equally by Fig. 5 A, in the evaporation coating device shown in Fig. 5 B, under the condition identical with the foregoing description 1, form any or both of the TiN layer of the target bed thickness shown in the table 13 and TiCN layer by evaporation, and forms by the target shown in the table 13 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produce the comparison surface coating cemented carbide drill bit (below be called relatively coat superhard drill bit) 1～8 of the coating sintered carbide tools that is equivalent in the past respectively.

Then, for the superhard drill bit 1～19 of the coating of the invention described above and relatively coat the superhard drill bit 1～3,9,12～14 of coating of the present invention in the superhard drill bit 1～8 and relatively coat superhard drill bit 1～3, carry out

Cutting speed: 280m/min,

Feeding: 0.4mm/rev,

Hole depth: 6mm, condition under the wet type high speed perforate machining test of Al alloy (common cutting speed is 120m/min.); For the superhard drill bit 4～6,10,15～17 of coating of the present invention and relatively coat superhard drill bit 4～6, carry out

Cutting speed: 250m/min,

Feeding: 0.5mm/rev,

Hole depth: 12mm, condition under the wet type high speed perforate machining test of carbon steel (common cutting speed is 110m/min.); For the superhard drill bit 7,8,11,18,19 of coating of the present invention and relatively coat superhard drill bit 7,8, carry out

Cutting speed: 250m/min,

Feeding: 0.6mm/rev,

Hole depth: 20mm, condition under the wet type high speed perforate machining test of Cu alloy (common cutting speed is 110m/min.); Perforate when the flank wear width of all measuring front end cutting blade face in which wet type perforate machining test (using water-soluble cutting oil) reaches 0.3mm adds number.Its measurement result is illustrated respectively in table 11～table 13.

[table 11]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film						Perforate adds number (hole)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film							Target bed thickness (μ m)		Target is formed (atom %)				Target bed thickness (μ m)	(C N) is crystalline particle footpath (nm) to Ti
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity				Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity	Coating Superhard Drill of the present invention	1		D-1	0.5	-	5.0	5.0	0.5			All the other	3	13.7	8928
2	D-2	-	3.0	15.0	15.0	7.5	All the other	5		1	7.3	D-1	0.5	-	5.0	5.0	0.5	9105		All the other	3	13.7	8928
2	D-2	-	3.0	15.0	15.0	7.5	All the other	5		3	7.3	D-3	1.0	1.5	20.0	20.0	18.0	9105	All the other	7	29.9	9633
4	D-4	-	2.0	5.0	20.0	14.0	All the other	7		3	21.6	D-3	1.0	1.5	20.0	20.0	18.0	2405	All the other	7	29.9	9633
4	D-4	-	2.0	5.0	20.0	14.0	All the other	7		5	21.6	D-5	0.1	2.9	10.0	15.0	4.5	2405	All the other	9	12.7	2620
6	D-6	3.0	-	15.0	10.0	0.1	All the other	3		5	17.6	D-5	0.1	2.9	10.0	15.0	4.5	1840	All the other	9	12.7	2620
6	D-6	3.0	-	15.0	10.0	0.1	All the other	3		7	17.6	D-7	2.0	-	10.0	15.0	10.5	1840	All the other	6	15.3	3133
8	D-8	-	1.0	20.0	5.0	1.5	All the other	13		7	5.7	D-7	2.0	-	10.0	15.0	10.5	3892	All the other	6	15.3	3133
8	D-8	-	1.0	20.0	5.0	1.5	All the other	13		9	5.7	D-2	1.3	1.0	10.0	0.5	10.0	3892	All the other	5	5.9	9708
10	D-5	-	1.3	40.0	4.0	30.0	All the other	10		9	14.7	D-2	1.3	1.0	10.0	0.5	10.0	2537	All the other	5	5.9	9708
10	D-5	-	1.3	40.0	4.0	30.0	All the other	10		11	14.7	D-8	1.5	-	10.0	30.0	25.0	2537	All the other	6	35.9	3794

[table 12]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film							Perforate adds number (hole)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film								Target bed thickness (μ m)		Target is formed (atom %)					Target bed thickness (μ m)	(Ti, Al) (C N) is crystalline particle footpath (nm)
			The TiN layer	The TiCN layer	W	Ti	Al	N	C+ impurity				Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	Al	N	C+ impurity	Coating Superhard Drill of the present invention	12		D-1	0.5	-	5.0	10.0	15.0	22.5			All the other	3	14.1	9374
13	D-2	-	3.0	10.0	10.0	10.0	14.0	All the other	5		12	16.4	D-1	0.5	-	5.0	10.0	15.0	22.5	9560		All the other	3	14.1	9374
13	D-2	-	3.0	10.0	10.0	10.0	14.0	All the other	5		14	16.4	D-3	1.0	1.5	15.0	10.0	6.7	8.3	9560	All the other	7	8.5	10112
15	D-4	-	2.0	10.0	5.0	8.0	3.9	All the other	7		14	26.2	D-3	1.0	1.5	15.0	10.0	6.7	8.3	2521	All the other	7	8.5	10112
15	D-4	-	2.0	10.0	5.0	8.0	3.9	All the other	7		16	26.2	D-5	0.1	2.9	15.0	7.5	7.5	9.0	2521	All the other	9	21.4	2748
17	D-6	3.0	-	20.0	2.5	1.5	0.4	All the other	3		16	15.7	D-5	0.1	2.9	15.0	7.5	7.5	9.0	1928	All the other	9	21.4	2748
17	D-6	3.0	-	20.0	2.5	1.5	0.4	All the other	3		18	15.7	D-7	2.0	-	15.0	4.5	5.5	4.0	1928	All the other	6	10.8	3265
19	D-8	-	1.0	10.0	5.5	4.5	7.0	All the other	13		18	27.6	D-7	2.0	-	15.0	4.5	5.5	4.0	3993	All the other	6	10.8	3265

[table 13]

Kind		Superhard matrix number	Connect airtight knitting layer		Lubricity amorphous carbon class overlay film					Perforate adds number (hole)
			Connect airtight knitting layer		Lubricity amorphous carbon class overlay film						Target bed thickness (μ m)		Target is formed (atom %)				Target bed thickness (μ m)
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity			Target bed thickness (μ m)		Target is formed (atom %)
			The TiN layer	The TiCN layer	W	Ti	N	C+ impurity	Relatively coat Superhard Drill		1	D-1	0.5	-	5	-		-	All the other	3	3839
2	D-2	-	3	15	-	-	All the other	5		4003	1	D-1	0.5	-	5	-		-	All the other	3	3839
2	D-2	-	3	15	-	-	All the other	5		4003	3	D-3	1	1.5	20	-	-	All the other	7	4142
4	D-4	-	2	5	-	-	All the other	7		962	3	D-3	1	1.5	20	-	-	All the other	7	4142
4	D-4	-	2	5	-	-	All the other	7		962	5	D-5	0.1	2.9	10	-	-	All the other	9	1074
6	D-6	3	-	15	-	-	All the other	3		698	5	D-5	0.1	2.9	10	-	-	All the other	9	1074
6	D-6	3	-	15	-	-	All the other	3		698	7	D-7	2	-	10	-	-	All the other	6	1691
8	D-8	-	1	20	-	-	All the other	13		1984	7	D-7	2	-	10	-	-	All the other	6	1691

For constituting as the superhard blade 1 of coating of the present invention that has obtained this result's coating sintered carbide tools of the present invention, 1 '～42,42 ', the superhard slotting cutter 1～19 of coating of the present invention, and the superhard drill bit 1～19 of coating of the present invention, and the superhard blade 1 of the relatively coating that is equivalent to coating sintered carbide tools in the past, 1 '～16,16 ', relatively coat superhard slotting cutter 1～8, reach the lubricity amorphous carbon class overlay film that relatively coats superhard drill bit 1～8, utilize the Auger spectroscopy apparatus to measure its composition, utilize scanning electron microscope to measure its bed thickness, expression is all formed and substantially the same composition and the average bed thickness (mean values at 5 places, cross section) of target bed thickness with target then, in addition, after utilizing its tissue of infiltration type electron microscope observation, the coating sintered carbide tools of the invention described above is illustrated in the Ti (C that is distributed with crystalline in the substrate of carbon class amorphous body, N) tissue of compounds particulate, and above-mentioned in the past coating sintered carbide tools is represented the single tissue that constitutes mutually by carbon class amorphous body.

By the result shown in table 3～table 13 as can be known, lubricity amorphous carbon class overlay film has the Ti (C that is distributed with crystalline in the substrate of carbon class amorphous body, N) even the coating sintered carbide tools of the present invention of the tissue of compounds particulate is all carrying out the Al alloy with high-speed condition, the Cu alloy also has under the situation of machining of steel, also can bring into play advantages of good abrasion, relative therewith, in lubricity amorphous carbon class overlay film has coating sintered carbide tools in the past (relatively coating sintered carbide tools) by the single tissue that constitutes mutually of carbon class amorphous body, under the high-speed cutting condition, the wearing and tearing development of above-mentioned lubricity amorphous carbon class overlay film is very fast, will reach service life in the short period of time.

Embodiment 4

As material powder, preparation all has WC powder, TiC powder, VC powder, TaC powder, NbC powder, the Cr of the average grain diameter of 0.7～3 μ m ₃C ₂Powder, and Co powder, these material powders are fitted in the cooperation shown in the table 14 to be formed, carry out 80 hours wet mixed by ball mill, after the drying, pressure press forming by 100MPa is the press-powder body, with this press-powder body in the vacuum of 6Pa, temperature: sintering under 1 hour the condition of maintenance in 1400 ℃, making all the carbon steel cutting that is made of WC base superhard alloy cuts with superhard matrix base material with superhard matrix base material and Al alloy and Cu alloy, on above-mentioned carbon steel cuts with superhard matrix base material, cutting blade is partly implemented the honing processing of R:0.03 and made the superhard matrix A-1～A-10 of the plate shape with ISO specification TNMG160408, in addition, above-mentioned Al alloy and Cu alloy are cut superhard matrix the A-1 '～A-10 ' that makes the plate shape with ISO specification TEGX 160304R with superhard matrix base material enforcement attrition process.

In addition, as material powder, preparation all has TiCN (mass ratio is TiC/TiN=50/50) powder, the Mo of the average grain diameter of 0.5～2 μ m ₂The C powder, the ZrC powder, the NbC powder, the TaC powder, WC powder, the Co powder, and Ni powder, these material powders are fitted in the cooperation shown in the table 15 to be formed, carry out 80 hours wet mixed by ball mill, after the drying, pressure press forming by 100MPa is the press-powder body, with this press-powder body in the nitrogen gas environment of 2kPa, in temperature: keep sintering under 1 hour the condition in 1510 ℃, making all the carbon steel cutting that is made of TiCN metalloid pottery cuts with superhard matrix base material with superhard matrix base material and Al alloy and Cu alloy, on above-mentioned carbon steel cuts with superhard matrix base material, cutting blade is partly implemented the honing processing of R:0.03 and made the superhard matrix B-1～B-6 of the plate shape with ISO specification TNMG160408, in addition, above-mentioned Al alloy and Cu alloy are cut superhard matrix the B-1 '～B-6 ' that makes the plate shape with ISO specification TEGX160304R with superhard matrix base material enforcement attrition process.

Then, with above-mentioned superhard matrix A-1,1 '～A-10,10 ' and B-1,1 '～B-6,6 ' carries out ultrasonic wave respectively in acetone cleans, under the dried state, at Fig. 2 A, on the rotary table in the evaporation coating device shown in Fig. 2 B, a plurality of superhard matrixes are installed in ring-type leave on the position of predetermined distance to radial direction from its central shaft, as the negative electrode (evaporation source) of the magnetron sputtering catching device of a side and configuration purity: the Ti target of 99.6 quality %, in opposite side configuration purity: the WC target of 99.6 quality % is as the negative electrode (evaporation source) of magnetic control sputtering device.In addition, with above-mentioned 2 negative electrode quadrature sides, as by (Ti, Al) the N layer constitutes connect airtight knitting layer form usefulness magnetic control sputtering device negative electrode (evaporation source) and configuration has the Ti-Al alloy target of the composition of regulation;

(a) at first, to install on one side interior vacuum exhaust and remain the vacuum of 0.01Pa, be heated to after 200 ℃ in will installing with heater on one side, Ar gas imported in the device and become the Ar gaseous environment of 0.5Pa pressure, apply at the above-mentioned superhard matrix that under this state rotation on one side on above-mentioned rotary table is rotated on one side-the bypass voltage of 810V, above-mentioned superhard matrix surface is carried out 20 minutes Ar gas impact and clean;

(b) then, on the solenoid of all magnetic control sputtering devices of above-mentioned evaporation coating device, all apply voltage: 50V, the condition of electric current: 10A, the flux density that forms the installation portion of above-mentioned superhard matrix is 140G (Gauss's) magnetic field, and the heating-up temperature in making above-mentioned evaporation coating device is under 400 ℃ the state, as reacting gas and with nitrogen and Ar with nitrogen flow: 300sccm, the ratio of Ar flow: 200sccm imports, the reacting gas environment that the mist by nitrogen and Ar of formation 1Pa constitutes, negative electrode (evaporation source) for Ti-Al alloy target applies power: 12kW (frequency: sputter electric power 40kHz), on the other hand, on above-mentioned superhard matrix, by applying-condition of the bypass voltage of 70V issues the light discharge that blazes, on the surface of above-mentioned superhard matrix, form by table 16, target shown in 17 form and the target bed thickness (Ti, N) the N layer constitutes connects airtight knitting layer;

(c) and then, to be made as voltage to the condition that above-mentioned solenoid applies: the setting in the scope of 50～100V, electric current: 10～20A, the flux density of the installation portion of above-mentioned superhard matrix is made as the setting in the scope of 100～300G (Gauss), under the state that heating-up temperature in above-mentioned evaporation coating device is 400 ℃, the bypass voltage of above-mentioned superhard matrix for-100V, with C ₂H ₂(hydrocarbon), nitrogen and Ar as reacting gas with C ₂H ₂The flow of the regulation in the scope of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 150～250sccm imports in the above-mentioned evaporation coating device, makes the reacting gas environment become the C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and apply for example power: 1～3kW (frequency: the sputter electric power of the regulation in scope 40kHz) at negative electrode (evaporation source) to the WC target of above-mentioned two magnetic control sputtering devices, on its Ti target, apply simultaneously power: 3～8kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz), form and to form by the target shown in the table 16 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produce surface coating cemented carbide throw away chip of the present invention as coating sintered carbide tools of the present invention (below be called the superhard blade of coating of the present invention) 1 thus respectively, 1 '～26,26 '.

(b) then, on the solenoid of all magnetic control sputtering devices of above-mentioned evaporation coating device, all apply voltage: 50V, the condition of electric current: 10A, the flux density that forms the installation portion of above-mentioned superhard matrix is 140G (Gauss's) magnetic field, and the heating-up temperature in making above-mentioned evaporation coating device is under 400 ℃ the state, as reacting gas and with nitrogen and Ar with nitrogen flow: 300sccm, the ratio of Ar flow: 200sccm imports, the reacting gas environment that the mist by nitrogen and Ar of formation 1Pa constitutes, negative electrode (evaporation source) for Ti-Al alloy target applies power: 12kW (frequency: sputter electric power 40kHz), on the other hand, on above-mentioned superhard matrix, by applying-condition of the bypass voltage of 70V issues the light discharge that blazes, on the surface of above-mentioned superhard matrix, form by table 16, target shown in 17 form and the target bed thickness (Ti, Al) the N layer constitutes connects airtight knitting layer;

(c) and then, to be made as voltage to the condition that above-mentioned solenoid applies: the setting in the scope of 50～100V, electric current: 10～20A, the flux density of the installation portion of above-mentioned superhard matrix is made as the setting in the scope of 100～300G (Gauss), under the state that heating-up temperature in above-mentioned evaporation coating device is 400 ℃, the bypass voltage of above-mentioned superhard matrix for-70V, with C ₂H ₂(hydrocarbon), nitrogen and Ar as reacting gas with C ₂H ₂The flow of the regulation in the scope of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 150～250sccm imports in the above-mentioned evaporation coating device, makes the reacting gas environment become the C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and apply for example power: 1～3kW (frequency: the sputter electric power of the regulation in scope 40kHz) at negative electrode (evaporation source) to the WC target of above-mentioned two magnetic control sputtering devices, on its Ti-Al alloy target, apply power: 3～8kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz) simultaneously, form and to form by the target shown in the table 17 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produce surface coating cemented carbide throw away chip of the present invention as coating sintered carbide tools of the present invention (below be called the superhard blade of coating of the present invention) 27 thus respectively, 27 '～42,42 '.

In addition, under purpose relatively, with above-mentioned superhard matrix A-1,1 '～A-10,10 ' and B-1,1 '～B-6, each surface of 6 ' carry out in acetone respectively that ultrasonic wave cleans, under the dried state, on the rotary table that the negative electrode (evaporation source) shown in Fig. 5 A, Fig. 5 B is the sputter equipment of Ti target and negative electrode (evaporation source) for the WC target and the evaporation coating device sputter equipment arranged opposite, a plurality of superhard matrixes are installed in ring-type leave on the position of predetermined distance to radial direction from its central shaft;

(b) then, heating-up temperature in making above-mentioned evaporation coating device is under 300 ℃ the state, as reacting gas and with nitrogen and Ar with nitrogen flow: 200sccm, the ratio of Ar flow: 300sccm imports, the reacting gas environment that the mist by nitrogen and Ar of formation 1Pa constitutes, negative electrode (evaporation source) for the Ti target applies power: 12kW (frequency: sputter electric power 40kHz), on the other hand, on above-mentioned superhard matrix, by applying-condition of the bypass voltage of 100V issues the light discharge that blazes, and forms the knitting layer that connects airtight that TiN layer by target bed thickness shown in the table 18 constitutes on the surface of above-mentioned superhard matrix;

(c) then, the heating-up temperature in making above-mentioned evaporation coating device is under 200 ℃ the state, with C ₂H ₂With Ar with C ₂H ₂The flow of the regulation in the scope of flow: 40～80sccm, Ar flow: 250sccm imports, form 1Pa by C ₂H ₂Decomposition gas and the reacting gas environment that constitutes of the mist of Ar, and will the bypass voltage that above-mentioned superhard matrix applies be made as-20V, apply power: 4～6kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz) at negative electrode (evaporation source) to the WC target, connect airtight evaporation on the knitting layer and form and forms by the target shown in the table 18 equally and the lubricity amorphous carbon class overlay film of target bed thickness above-mentioned, produce the comparison surface coating cemented carbide throw away chip (below be called relatively coat superhard blade) 1 of the coating sintered carbide tools that is equivalent in the past thus respectively, 1 '～16,16 '.

Be cut material: the pole of JISS10C,

Cutting speed: 360m/min,

Cutting-in: 1.2mm,

Feeding: 0.2mm/rev,

Cutting time: 5 minutes, condition (being called machining condition A) under the dry type high-speed cutting processing experiment of carbon steel (common cutting speed is 120m/min.)；

Be cut material: the pole of JISA5052,

Cutting speed: 1050m/min,

Cutting-in: 1.2mm,

Feeding: 0.3mm/rev,

Cutting time: 20 minutes, condition (being called machining condition B) under the dry type high-speed cutting processing experiment of Al alloy (common cutting speed is 400m/min.)；

Also have,

Be cut material: the pole of JISC3710,

Cutting speed: 450m/min,

Cutting-in: 1.4mm,

Feeding: 0.27mm/rev,

Cutting time: 20 minutes, condition (being called machining condition C) under the dry type high-speed cutting processing experiment of Cu alloy (common cutting speed is 200m/min.)。In which machining test, all measure the flank wear width of cutting blade.Its measurement result is represented in table 16～18.

[table 14]

Kind		Cooperate and form (quality %)
		Cooperate and form (quality %)							Co	TiC	TaC	NbC	VC	Cr ₃C ₂	WC
		Superhard matrix (blade)	A-1，1′	5	-	0.9	0.1	-	Co	TiC	TaC	NbC	VC	Cr ₃C ₂	WC	-	All the other
A-2，2′	5.5		A-1，1′	5	-	0.9	0.1	-	-	1.8	0.2	-	-	All the other		-	All the other
A-2，2′	5.5		A-3，3′	6	-	-	-	-	-	1.8	0.2	-	-	All the other	0.2	All the other
A-4，4′	6.5		A-3，3′	6	-	-	-	-	-	-	-	0.2	-	All the other	0.2	All the other
A-4，4′	6.5		A-5，5′	7	-	-	-	0.2	-	-	-	0.2	-	All the other	0.2	All the other
A-6，6′	7.5		A-5，5′	7	-	-	-	0.2	-	-	2	-	-	All the other	0.2	All the other
A-6，6′	7.5		A-7，7′	8	-	1	-	-	-	-	2	-	-	All the other	0.5	All the other
A-8，8′	8.5		A-7，7′	8	-	1	-	-	6	-	3	-	-	All the other	0.5	All the other
A-8，8′	8.5		A-9，9′	9	1	1	1	-	6	-	3	-	-	All the other	-	All the other
A-10，10′	9.5		A-9，9′	9	1	1	1	-	1	-	1	-	0.5	All the other	-	All the other

[table 15]

Kind		Cooperate and form (quality %)
		Cooperate and form (quality %)								Co	Ni	ZrC	TaC	NbC	Mo ₂C	WC	TiCN
		Superhard matrix (blade)	B-1，1′	13	4.5	-	10	-	10	Co	Ni	ZrC	TaC	NbC	Mo ₂C	WC	TiCN	15	All the other
B-2，2′	8		B-1，1′	13	4.5	-	10	-	10	6	-	5	-	8	-	All the other		15	All the other
B-2，2′	8		B-3，3′	7	-	-	-	-	6	6	-	5	-	8	-	All the other	12	All the other
B-4，4′	10		B-3，3′	7	-	-	-	-	6	4.5	-	7	6	-	-	All the other	12	All the other
B-4，4′	10		B-5，5′	8	4	1	8	-	10	4.5	-	7	6	-	-	All the other	11	All the other
B-6，6′	10		B-5，5′	8	4	1	8	-	10	5.5	-	10	-	9.5	15	All the other	11	All the other

[table 16]

Kind		Superhard matrix number	Connect airtight knitting layer				Lubricity amorphous carbon class overlay film					(C N) is crystalline particle footpath (nm) to Ti	Flank wear width (mm)
			Connect airtight knitting layer				Lubricity amorphous carbon class overlay film						Flank wear width (mm)			Target is formed (atom %)			Target bed thickness (μ m)	Target is formed (atom %)				Target bed thickness (μ m)	Machining condition A	Machining condition B	Machining condition C
			Ti	Al	N	W	Ti	N	C+ impurity							Target is formed (atom %)				Target is formed (atom %)
			Ti	Al	N	W	Ti	N	C+ impurity	Coating superhard cutting blade of the present invention	1，1′		A-1，1′	0.60	0.40	1.00	0.5	5.0		20.0	10.0	All the other	1.0					37.8	0.22	0.15	0.16
2，2′	A-2，2′	0.55	0.45	1.00	2.0	10.0	15.0	7.5	All the other		1，1′	3.0	A-1，1′	0.60	0.40	1.00	0.5	5.0	22.5	20.0	10.0	All the other	1.0	0.2	0.13	0.12		37.8	0.22	0.15	0.16
2，2′	A-2，2′	0.55	0.45	1.00	2.0	10.0	15.0	7.5	All the other		3，3′	3.0	A-3，3′	0.50	0.50	1.00	3.0	15.0	22.5	10.0	5.0	All the other	5.0	0.2	0.13	0.12	21.5	0.18	0.11	0.11
4，4′	A-4，4′	0.45	0.55	1.00	1.5	20.0	5.0	2.5	All the other		3，3′	7.0	A-3，3′	0.50	0.50	1.00	3.0	15.0	8.3	10.0	5.0	All the other	5.0	0.15	0.06	0.08	21.5	0.18	0.11	0.11
4，4′	A-4，4′	0.45	0.55	1.00	1.5	20.0	5.0	2.5	All the other		5，5′	7.0	A-5，5′	0.40	0.60	1.00	0.1	5.0	8.3	20.0	18.0	All the other	9.0	0.15	0.06	0.08	8.1	0.25	0.17	0.17
6，6′	A-6，6′	0.60	0.40	1.00	1.0	10.0	15.0	10.5	All the other		5，5′	13.0	A-5，5′	0.40	0.60	1.00	0.1	5.0	6.4	20.0	18.0	All the other	9.0	0.23	0.15	0.15	8.1	0.25	0.17	0.17
6，6′	A-6，6′	0.60	0.40	1.00	1.0	10.0	15.0	10.5	All the other		7，7′	13.0	A-7，7′	0.55	0.45	1.00	2.5	15.0	6.4	10.0	9.0	All the other	3.0	0.23	0.15	0.15	34.0	0.2	0.12	0.1
8，8′	A-8，8′	0.50	0.50	1.00	1.5	20.0	5.0	0.5	All the other		7，7′	5.0	A-7，7′	0.55	0.45	1.00	2.5	15.0	19.8	10.0	9.0	All the other	3.0	0.16	0.08	0.08	34.0	0.2	0.12	0.1
8，8′	A-8，8′	0.50	0.50	1.00	1.5	20.0	5.0	0.5	All the other		9，9′	5.0	A-9，9′	0.45	0.55	1.00	2.0	10.0	19.8	10.0	3.0	All the other	7.0	0.16	0.08	0.08	17.2	0.14	0.06	0.08
10，10′	A-10，10′	0.40	0.60	1.00	3.0	15.0	15.0	1.5	All the other		9，9′	9.0	A-9，9′	0.45	0.55	1.00	2.0	10.0	8.7	10.0	3.0	All the other	7.0	0.1	0.04	0.04	17.2	0.14	0.06	0.08
10，10′	A-10，10′	0.40	0.60	1.00	3.0	15.0	15.0	1.5	All the other		11，11′	9.0	A-1，1′	0.60	0.40	1.00	2.0	5.0	8.7	20.0	18.0	All the other	9.0	0.1	0.04	0.04	29.5	0.21	0.11	0.09
12，12′	A-3，3′	0.55	0.45	1.00	3.0	10.0	30.0	25.0	All the other		11，11′	6.0	A-1，1′	0.60	0.40	1.00	2.0	5.0	14.9	20.0	18.0	All the other	9.0	0.18	0.13	0.09	29.5	0.21	0.11	0.09
12，12′	A-3，3′	0.55	0.45	1.00	3.0	10.0	30.0	25.0	All the other		13，13′	6.0	A-5，5′	0.50	0.50	1.00	1.5	20.0	14.9	20.0	16.5	All the other	4.0	0.18	0.13	0.09	12.5	0.18	0.15	0.07
14，14′	A-7，7′	0.45	0.55	1.00	1.0	10.0	0.5	10.0	All the other		13，13′	5.0	A-5，5′	0.50	0.50	1.00	1.5	20.0	7.4	20.0	16.5	All the other	4.0	0.32	0.03	0.04	12.5	0.18	0.15	0.07
14，14′	A-7，7′	0.45	0.55	1.00	1.0	10.0	0.5	10.0	All the other		15，15′	5.0	A-9，9′	0.40	0.60	1.00	2.5	40.0	7.4	4.0	20.0	All the other	10.0	0.32	0.03	0.04	4.8	0.07	0.18	0.23
16，16′	B-1，1′	0.60	0.40	1.00	3.0	5.0	5.0	2.5	All the other		15，15′	9.0	A-9，9′	0.40	0.60	1.00	2.5	40.0	9.4	4.0	20.0	All the other	10.0	0.12	0.06	0.05	4.8	0.07	0.18	0.23
16，16′	B-1，1′	0.60	0.40	1.00	3.0	5.0	5.0	2.5	All the other		17，17′	9.0	B-2，2′	0.55	0.45	1.00	2.0	10.0	9.4	10.0	5.0	All the other	7.0	0.12	0.06	0.05	12.7	0.14	0.08	0.07
18，18′	B-3，3′	0.50	0.50	1.00	1.5	15.0	15.0	7.5	All the other		17，17′	3.0	B-2，2′	0.55	0.45	1.00	2.0	10.0	27.1	10.0	5.0	All the other	7.0	0.17	0.1	0.11	12.7	0.14	0.08	0.07
18，18′	B-3，3′	0.50	0.50	1.00	1.5	15.0	15.0	7.5	All the other		19，19′	3.0	B-4，4′	0.45	0.55	1.00	1.0	20.0	27.1	20.0	10.0	All the other	13.0	0.17	0.1	0.11	7.8	0.2	0.13	0.13
20，20′	B-5，5′	0.40	0.60	1.00	0.5	10.0	15.0	13.5	All the other		19，19′	1.0	B-4，4′	0.45	0.55	1.00	1.0	20.0	34.6	20.0	10.0	All the other	13.0	0.24	0.16	0.16	7.8	0.2	0.13	0.13
20，20′	B-5，5′	0.40	0.60	1.00	0.5	10.0	15.0	13.5	All the other		21，21′	1.0	B-6，6′	0.50	0.50	1.00	0.1	15.0	34.6	10.0	10.0	All the other	5.0	0.24	0.16	0.16	20.3	0.25	0.17	0.18
22，22′	B-1，1′	0.40	0.60	1.00	2.5	5.0	20.0	18.0	All the other		21，21′	9.0	B-6，6′	0.50	0.50	1.00	0.1	15.0	16.4	10.0	10.0	All the other	5.0	0.18	0.1	0.11	20.3	0.25	0.17	0.18
22，22′	B-1，1′	0.40	0.60	1.00	2.5	5.0	20.0	18.0	All the other		23，23′	9.0	B-3，3′	0.60	0.40	1.00	3.0	10.0	16.4	30.0	25.0	All the other	6.0	0.18	0.1	0.11	8.2	0.13	0.07	0.06
24，24′	B-4，4′	0.56	0.45	1.00	2.0	20.0	20.0	16.5	All the other		23，23′	4.0	B-3，3′	0.60	0.40	1.00	3.0	10.0	22.1	30.0	25.0	All the other	6.0	0.19	0.14	0.09	8.2	0.13	0.07	0.06
24，24′	B-4，4′	0.56	0.45	1.00	2.0	20.0	20.0	16.5	All the other		25，25′	4.0	B-5，5′	0.50	0.50	1.00	1.5	10.0	22.1	0.5	10.0	All the other	5.0	0.19	0.14	0.09	37.4	0.25	0.04	0.04
26，26′	B-6，6′	0.45	0.55	1.00	1.0	40.0	4.0	30.0	All the other		25，25′	10.0	B-5，5′	0.50	0.50	1.00	1.5	10.0	5.8	0.5	10.0	All the other	5.0	0.08	0.21	0.2	37.4	0.25	0.04	0.04

[table 17]

Kind		Superhard matrix number	Connect airtight knitting layer				Lubricity amorphous carbon class overlay film							Flank wear width (mm)
			Connect airtight knitting layer				Lubricity amorphous carbon class overlay film							Flank wear width (mm)			Target is formed (atom %)			Target bed thickness (μ m)	Target is formed (atom %)					Target bed thickness (μ m)	(Ti, Al) (C N) is crystalline particle footpath (nm)	Machining condition A	Machining condition B	Machining condition C
			Ti	Al	N	W	Ti	N	Al	C+ impurity							Target is formed (atom %)				Target is formed (atom %)
			Ti	Al	N	W	Ti	N	Al	C+ impurity	Coating superhard cutting blade of the present invention	27，27′	A-1，1′	0.60	0.40	1.00	0.5	5.0	10.0		15.0	22.5	All the other	3.0	33.6						0.22	0.15	0.15
28，28′	A-2，2′	0.55	0.45	1.00	2.0	10.0	8.0	12.0	12.0	All the other		27，27′	A-1，1′	0.60	0.40	1.00	0.5	5.0	10.0	5.0	15.0	22.5	All the other	3.0	33.6	25.6	0.2	0.13	0.12		0.22	0.15	0.15
28，28′	A-2，2′	0.55	0.45	1.00	2.0	10.0	8.0	12.0	12.0	All the other		29，29′	A-3，3′	0.50	0.50	1.00	3.0	15.0	4.0	5.0	6.0	3.0	All the other	7.0	23.0	25.6	0.2	0.13	0.12	0.18	0.11	0.11
30，30′	A-4，4′	0.45	0.56	1.00	1.5	20.0	10.0	15.0	2.5	All the other		29，29′	A-3，3′	0.50	0.50	1.00	3.0	15.0	4.0	9.0	6.0	3.0	All the other	7.0	23.0	12.2	0.15	0.06	0.08	0.18	0.11	0.11
30，30′	A-4，4′	0.45	0.56	1.00	1.5	20.0	10.0	15.0	2.5	All the other		31，31′	A-5，5′	0.40	0.80	1.00	0.1	5.0	10.0	9.0	10.0	18.0	All the other	1.0	8.7	12.2	0.15	0.06	0.08	0.25	0.17	0.17
32，32′	A-6，6′	0.50	0.40	1.00	1.0	10.0	7.5	7.5	13.5	All the other		31，31′	A-5，5′	0.40	0.80	1.00	0.1	5.0	10.0	3.0	10.0	18.0	All the other	1.0	8.7	5.3	0.23	0.15	0.15	0.25	0.17	0.17
32，32′	A-6，6′	0.50	0.40	1.00	1.0	10.0	7.5	7.5	13.5	All the other		33，33′	A-7，7′	0.55	0.45	1.00	2.5	15.0	5.0	3.0	5.0	3.0	All the other	5.0	29.8	5.3	0.23	0.15	0.15	0.2	0.12	0.1
34，34′	A-8，8′	0.50	0.50	1.00	1.5	20.0	2.5	2.5	0.5	All the other		33，33′	A-7，7′	0.55	0.45	1.00	2.5	15.0	5.0	7.0	5.0	3.0	All the other	5.0	29.8	28.4	0.16	0.09	0.08	0.2	0.12	0.1
34，34′	A-8，8′	0.50	0.50	1.00	1.5	20.0	2.5	2.5	0.5	All the other		35，35′	A-9，9′	0.45	0.55	1.00	2.0	5.0	2.5	7.0	1.6	0.4	All the other	8.0	17.3	28.4	0.16	0.09	0.08	0.14	0.06	0.08
36，36′	A-10，10′	0.40	0.50	1.00	3.0	10.0	8.0	4.0	6.0	All the other		35，35′	A-9，9′	0.45	0.55	1.00	2.0	5.0	2.5	13.0	1.6	0.4	All the other	8.0	17.3	14.8	0.1	0.04	0.04	0.14	0.06	0.08
36，36′	A-10，10′	0.40	0.50	1.00	3.0	10.0	8.0	4.0	6.0	All the other		37，37′	B-1，1′	0.60	0.40	1.00	3.0	15.0	10.0	13.0	6.7	5.0	All the other	13.0	9.7	14.8	0.1	0.04	0.04	0.12	0.06	0.05
38，38′	B-2，2′	0.55	0.45	1.00	2.0	20.0	2.5	1.6	3.7	All the other		37，37′	B-1，1′	0.60	0.40	1.00	3.0	15.0	10.0	9.0	6.7	5.0	All the other	13.0	9.7	12.5	0.14	0.08	0.07	0.12	0.06	0.05
38，38′	B-2，2′	0.55	0.45	1.00	2.0	20.0	2.5	1.6	3.7	All the other		39，39′	B-3，3′	0.50	0.50	1.00	1.5	5.0	10.0	9.0	10.0	10.0	All the other	7.0	22.1	12.5	0.14	0.08	0.07	0.17	0.1	0.11
40，40′	B-4，4′	0.45	0.55	1.00	1.0	10.0	7.5	7.5	7.5	All the other		39，39′	B-3，3′	0.50	0.50	1.00	1.5	5.0	10.0	5.0	10.0	10.0	All the other	7.0	22.1	6.5	0.2	0.13	0.13	0.17	0.1	0.11
40，40′	B-4，4′	0.45	0.55	1.00	1.0	10.0	7.5	7.5	7.5	All the other		41，41′	B-5，5′	0.40	0.60	1.00	0.5	15.0	5.0	5.0	5.0	5.0	All the other	3.0	39.4	6.5	0.2	0.13	0.13	0.24	0.16	0.16
42，42′	B-6，6′	0.50	0.50	1.00	0.1	20.0	7.5	7.5	7.5	All the other		41，41′	B-5，5′	0.40	0.60	1.00	0.5	15.0	5.0	1.0	5.0	5.0	All the other	3.0	39.4	19.6	0.25	0.17	0.18	0.24	0.16	0.16

[table 18]

Kind		Superhard matrix number	The target bed thickness of TiN layer (μ m)	Lubricity amorphous carbon class overlay film						Flank wear width (mm)
				Lubricity amorphous carbon class overlay film						Flank wear width (mm)			Target is formed (atom %)					Target bed thickness (μ m)	Machining condition A	Machining condition B	Machining condition C
				W	Ti	Al	N	C+ impurity					Target is formed (atom %)
				W	Ti	Al	N	C+ impurity	Relatively coat superhard cutting blade	1，1′	A-1，1′	0.5	5.0	-	-	-	All the other					3.0	0.80	0.76	0.75
2，2′	A-2，2′	2.0	10.0	-	-	-	All the other	5.0		1，1′	A-1，1′	0.5	5.0	-	-	-	All the other	0.77	0.72	0.71		3.0	0.80	0.76	0.75
2，2′	A-2，2′	2.0	10.0	-	-	-	All the other	5.0		3，3′	A-3，3′	3.0	15.0	-	-	-	All the other	0.77	0.72	0.71	7.0	0.73	0.69	0.68
4，4′	A-4，4′	1.5	20.0	-	-	-	All the other	9.0		3，3′	A-3，3′	3.0	15.0	-	-	-	All the other	0.71	0.68	0.66	7.0	0.73	0.69	0.68
4，4′	A-4，4′	1.5	20.0	-	-	-	All the other	9.0		5，5′	A-5，5′	0.1	5.0	-	-	-	All the other	0.71	0.68	0.66	1.0	0.83	0.78	0.77
6，6′	A-6，6′	1.0	10.0	-	-	-	All the other	3.0		5，5′	A-5，5′	0.1	5.0	-	-	-	All the other	0.79	0.75	0.74	1.0	0.83	0.78	0.77
6，6′	A-6，6′	1.0	10.0	-	-	-	All the other	3.0		7，7′	A-7，7′	2.5	15.0	-	-	-	All the other	0.79	0.75	0.74	5.0	0.76	0.72	0.72
8，8′	A-8，8′	1.5	20.0	-	-	-	All the other	7.0		7，7′	A-7，7′	2.5	15.0	-	-	-	All the other	0.72	0.70	0.69	5.0	0.76	0.72	0.72
8，8′	A-8，8′	1.5	20.0	-	-	-	All the other	7.0		9，9′	A-9，9′	2.0	5.0	-	-	-	All the other	0.72	0.70	0.69	9.0	0.89	0.67	0.68
10，10′	A-10，10′	3.0	10.0	-	-	-	All the other	13.0		9，9′	A-9，9′	2.0	5.0	-	-	-	All the other	0.64	0.61	0.59	9.0	0.89	0.67	0.68
10，10′	A-10，10′	3.0	10.0	-	-	-	All the other	13.0		11，11′	B-1，1′	3.0	15.0	-	-	-	All the other	0.64	0.61	0.59	13.0	0.65	0.62	0.60
12，12′	B-2，2′	2.0	20.0	-	-	-	All the other	9.0		11，11′	B-1，1′	3.0	15.0	-	-	-	All the other	0.70	0.67	0.67	13.0	0.65	0.62	0.60
12，12′	B-2，2′	2.0	20.0	-	-	-	All the other	9.0		13，13′	B-3，3′	1.5	5.0	-	-	-	All the other	0.70	0.67	0.67	7.0	0.74	0.71	0.70
14，14′	B-4，4′	1.0	10.0	-	-	-	All the other	5.0		13，13′	B-3，3′	1.5	5.0	-	-	-	All the other	0.78	0.73	0.73	7.0	0.74	0.71	0.70
14，14′	B-4，4′	1.0	10.0	-	-	-	All the other	5.0		15，15′	B-5，5′	0.5	15.0	-	-	-	All the other	0.78	0.73	0.73	3.0	0.80	0.74	0.74
16，16′	B-6，6′	0.1	20.0	-	-	-	All the other	1.0		15，15′	B-5，5′	0.5	15.0	-	-	-	All the other	0.83	0.78	0.77	3.0	0.80	0.74	0.74

Embodiment 5

As material powder, prepare to have average grain diameter: the middle coarse grain WC powder of 4.2 μ m, average grain diameter: particulate WC powder, the average grain diameter of 0.7 μ m: TaC powder, the average grain diameter of 1.2 μ m: NbC powder, the average grain diameter of 1.1 μ m: ZrC powder, the average grain diameter of 1.1 μ m: the Cr of 1.6 μ m ₃C ₂Powder, average grain diameter: the VC powder of 1.4 μ m, the average grain diameter: (Ti of 1.1 μ m, W) C (mass ratio is TiC/WC=50/50) powder, and average grain diameter: the Co powder of 1.8 μ m, these material powders are fitted in the cooperation shown in the table 19 respectively to be formed, add paraffin again and in acetone, carry out ball mill mixing in 70 hours, behind the drying under reduced pressure, pressure press forming by 100MPa is the various press-powder bodies of regulation shape, with these press-powder bodies in the vacuum gas environment of 6Pa, be warmed up to the temperature of the regulation in 1375～1475 ℃ the scope with 7 ℃/minute programming rates, after keeping 1 hour under this temperature, under the cold condition of stove, carry out sintering, the formation diameter is 8mm, 13mm, and 3 kinds of superhard matrixes formation pole sintered bodies of 26mm, cut processing by above-mentioned 3 kinds of pole sintered bodies by grinding again, with the combination shown in the table 19, the diameter * length that produces blade part respectively is respectively 6mm * 13mm, 10mm * 22mm, and the size of 20mm * 45mm, and superhard matrix (slotting cutter) C-1～C-8 that all has 4 side's of having tooth shape shapes of torsion angle 30 degree.

Then, these superhard matrixes (slotting cutter) C-1～C-8 is carried out ultrasonic wave in acetone clean, under the dried state, be encased in equally by Fig. 2 A, Fig. 2 B or Fig. 3 A, in the evaporation coating device shown in Fig. 3 B, under the condition identical with the foregoing description 4, form table 20 by evaporation, the target composition shown in the table 21 and the (Ti of target bed thickness, Al) N layer, and equally by table 20, target shown in the table 21 is formed and the lubricity amorphous carbon class overlay film of target bed thickness, produces surface of the present invention as coating sintered carbide tools of the present invention respectively and coats cemented carbide slotting cutter (below be called the superhard slotting cutter of coating of the present invention) 1～19.

In addition, under purpose relatively, above-mentioned superhard matrix (slotting cutter) C-1～C-8 is carried out ultrasonic wave in acetone clean, under the dried state, be encased in equally by Fig. 5 A, in the evaporation coating device shown in Fig. 5 B, under the condition identical with the foregoing description 4, form the TiN layer of the target bed thickness shown in the table 22 by evaporation, and forms by the target shown in the table 22 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produce the comparison surface coating cemented carbide slotting cutter (below be called relatively coat superhard slotting cutter) 1～8 of the coating sintered carbide tools that is equivalent in the past respectively.

Cutting speed: 320m/min,

Axial cutting-in: 4.5mm,

Radially cutting-in: 0.7mm,

Table feed: the 2350mm/ branch, condition under the dry type high speed side machining test of Al alloy (common cutting speed is 180m/min.); For the superhard slotting cutter of coating of the present invention 4～6,10,15～17 and coated superhard slotting cutter 4～6 in the past, carry out

Cutting speed: 320m/min,

Axial cutting-in: 6.5mm,

Radially cutting-in: 1.2mm,

Table feed: the 2185mm/ branch, condition under the dry type high speed side machining test of Cu alloy (common cutting speed is 180m/min.); For the superhard slotting cutter 7,8,11,18,19 of coating of the present invention and relatively coat superhard slotting cutter 7,8 and carry out

Cutting speed: 365m/min,

Axial cutting-in: 8.0mm,

Radially cutting-in: 2.0mm,

Table feed: the 2140mm/ branch, condition under the wet type high speed side machining test of carbon steel (common cutting speed is 200m/min.); Length of cut when the flank wear width of all measuring the peripheral edge of blade part in which side cut processing experiment reaches as the 0.1mm of the normative reference in service life.Its measurement result is illustrated respectively in table 20～table 22.

[table 19]

Kind		Cooperate and form (quality %)								Diameter * the length of blade part (mm)
		Cooperate and form (quality %)									Co	(Ti，W)C	TaC	NbC	ZrC	Cr ₃C ₂	VC	WC
		Superhard matrix (slotting cutter)	C-1	5	-	-	1	-	-		Co	(Ti，W)C	TaC	NbC	ZrC	Cr ₃C ₂	VC	WC	-	Particulate: all the other	6×13
C-2	6		C-1	5	-	-	1	-	-	-	-	1.5	-	-	-	Particulate: all the other	6×13		-	Particulate: all the other	6×13
C-2	6		C-3	6	-	0.5	-	-	0.3	-	-	1.5	-	-	-	Particulate: all the other	6×13	0.3	Particulate: all the other	6×13
C-4	6.5		C-3	6	-	0.5	-	-	0.3	-	-	-	-	0.4	-	Particulate: all the other	10×22	0.3	Particulate: all the other	6×13
C-4	6.5		C-5	7	18	-	5	-	-	-	-	-	-	0.4	-	Particulate: all the other	10×22	-	Middle coarse grain: all the other	10×22
C-6	7.5		C-5	7	18	-	5	-	-	-	-	-	-	-	0.4	Particulate: all the other	10×22	-	Middle coarse grain: all the other	10×22
C-6	7.5		C-7	8	20	-	5	-	-	-	-	-	-	-	0.4	Particulate: all the other	10×22	-	Middle coarse grain: all the other	20×45
C-8	9		C-7	8	20	-	5	-	-	9	1.8	0.2	1	-	-	Middle coarse grain: all the other	20×46	-	Middle coarse grain: all the other	20×45

[table 20]

Kind		Superhard matrix number	Connect airtight knitting layer				Lubricity amorphous carbon class overlay film						Cutting long (m)
			Connect airtight knitting layer				Lubricity amorphous carbon class overlay film							Target is formed (atom %)			Target bed thickness (μ m)	Target is formed (atom %)				Target bed thickness (μ m)	(C N) is crystalline particle footpath (nm) to Ti
			Ti	Al	N	W	Ti	N	C+ impurity					Target is formed (atom %)				Target is formed (atom %)
			Ti	Al	N	W	Ti	N	C+ impurity	The superhard slotting cutter of coating of the present invention	1	C-1		0.40	0.60	1.00		0.5	20.0	20.0	10.0			All the other	5	18.6	231
2	C-2	0.45	0.55	1.00	0.1	10.0	15.0	13.5	All the other		1	C-1	3	0.40	0.60	1.00	15.3	0.5	20.0	20.0	10.0	195		All the other	5	18.6	231
2	C-2	0.45	0.55	1.00	0.1	10.0	15.0	13.5	All the other		3	C-3	3	0.50	0.50	1.00	15.3	1.0	5.0	5.0	1.0	195	All the other	5	11.2	242
4	C-4	0.55	0.45	1.00	1.0	5.0	5.0	0.5	All the other		3	C-3	7	0.50	0.50	1.00	25.4	1.0	5.0	5.0	1.0	247	All the other	5	11.2	242
4	C-4	0.55	0.45	1.00	1.0	5.0	5.0	0.5	All the other		5	C-5	7	0.60	0.40	1.00	25.4	1.5	10.0	10.0	5.0	247	All the other	9	15.9	273
6	C-6	0.45	0.55	1.00	2.0	20.0	20.0	18.0	All the other		5	C-5	7	0.60	0.40	1.00	32.7	1.5	10.0	10.0	5.0	229	All the other	9	15.9	273
6	C-6	0.45	0.55	1.00	2.0	20.0	20.0	18.0	All the other		7	C-7	7	0.50	0.50	1.00	32.7	3.0	15.0	15.0	10.0	229	All the other	11	16.3	89
8	C-8	0.55	0.45	1.00	2.5	10.0	10.0	2.5	All the other		7	C-7	13	0.50	0.50	1.00	7.2	3.0	15.0	15.0	10.0	95	All the other	11	16.3	89
8	C-8	0.55	0.45	1.00	2.5	10.0	10.0	2.5	All the other		9	C-1	13	0.45	0.55	1.00	7.2	1.0	10.0	0.5	10.0	95	All the other	5	5.3	249
10	C-4	0.40	0.60	1.00	2.5	40.0	4.0	30.0	All the other		9	C-1	10	0.45	0.55	1.00	27.7	1.0	10.0	0.5	10.0	238	All the other	5	5.3	249
10	C-4	0.40	0.60	1.00	2.5	40.0	4.0	30.0	All the other		11	C-7	10	0.55	0.45	1.00	27.7	3.0	10.0	30.0	25.0	238	All the other	6	37.3	84

[table 21]

Kind		Superhard matrix number	Connect airtight knitting layer				Lubricity amorphous carbon class overlay film							Cutting long (m)
			Connect airtight knitting layer				Lubricity amorphous carbon class overlay film								Target is formed (atom %)			Target bed thickness (μ m)	Target is formed (atom %)					Target bed thickness (μ m)	(Ti, Al) (C N) is crystalline particle footpath (nm)
			Ti	Al	N	W	Ti	Al	N	C+ impurity					Target is formed (atom %)				Target is formed (atom %)
			Ti	Al	N	W	Ti	Al	N	C+ impurity	The superhard slotting cutter of coating of the present invention	12	C-1		0.40	0.60	1.00		0.5	10.0	10.0	6.7	15.0			All the other	5	14.9	246
13	C-2	0.45	0.55	1.00	0.1	20.0	10.0	10.0	18.0	All the other		12	C-1	3	0.40	0.60	1.00	10.4	0.5	10.0	10.0	6.7	15.0	202		All the other	5	14.9	246
13	C-2	0.45	0.55	1.00	0.1	20.0	10.0	10.0	18.0	All the other		14	C-3	3	0.50	0.50	1.00	10.4	1.0	5.0	10.0	15.0	22.5	202	All the other	5	33.2	252
15	C-4	0.55	0.45	1.00	1.0	10.0	5.0	8.0	6.5	All the other		14	C-3	7	0.50	0.50	1.00	13.8	1.0	5.0	10.0	15.0	22.5	266	All the other	5	33.2	252
15	C-4	0.55	0.45	1.00	1.0	10.0	5.0	8.0	6.5	All the other		16	C-5	7	0.60	0.40	1.00	13.8	1.5	20.0	7.5	7.5	4.5	266	All the other	9	7.4	293
17	C-6	0.45	0.55	1.00	2.0	5.0	2.5	1.6	0.4	All the other		16	C-5	7	0.60	0.40	1.00	19.5	1.5	20.0	7.5	7.5	4.5	245	All the other	9	7.4	293
17	C-6	0.45	0.55	1.00	2.0	5.0	2.5	1.6	0.4	All the other		18	C-7	7	0.50	0.50	1.00	19.5	3.0	10.0	4.5	5.5	0.7	245	All the other	11	12.7	92
19	C-8	0.55	0.45	1.00	2.5	15.0	5.5	4.5	0.6	All the other		18	C-7	13	0.50	0.50	1.00	12.2	3.0	10.0	4.5	5.5	0.7	102	All the other	11	12.7	92

[table 22]

Kind		Superhard matrix number	The target bed thickness of TiN layer (μ m)	Lubricity amorphous carbon class overlay film						Cutting long (m)
				Lubricity amorphous carbon class overlay film							Target is formed (atom %)					Target bed thickness (μ m)
				W	Ti	Al	N	C+ impurity			Target is formed (atom %)
				W	Ti	Al	N	C+ impurity	Relatively coat superhard slotting cutter		1	C-1	0.5	10	-		-	-	All the other	5	83
2	C-2	0.1	20	-	-	-	All the other	3		74	1	C-1	0.5	10	-		-	-	All the other	5	83
2	C-2	0.1	20	-	-	-	All the other	3		74	3	C-3	1	5	-	-	-	All the other	5	88
4	C-4	1	10	-	-	-	All the other	7		93	3	C-3	1	5	-	-	-	All the other	5	88
4	C-4	1	10	-	-	-	All the other	7		93	5	C-5	1.5	20	-	-	-	All the other	9	102
6	C-6	2	5	-	-	-	All the other	7		86	5	C-5	1.5	20	-	-	-	All the other	9	102
6	C-6	2	5	-	-	-	All the other	7		86	7	C-7	3	10	-	-	-	All the other	11	37
8	C-8	2.5	15	-	-	-	All the other	13		41	7	C-7	3	10	-	-	-	All the other	11	37

Embodiment 6

The diameter that utilization is made in the foregoing description 5 is 8mm (superhard matrix C-1～C-3 forms and uses), 13mm (superhard matrix C-4～C-6 forms and uses), and 26mm (superhard matrix C-7, C-8 form with) 3 kinds of pole sintered bodies, cut processing by these 3 kinds of pole sintered bodies by grinding, the diameter * length that produces groove formation portion respectively is respectively 4mm * 13mm (superhard matrix D-1～D-3), 8mm * 22mm (superhard matrix D-4～D-6), and 16mm * 45mm (superhard matrix D-7, D-8) size, and superhard matrix (drill bit) D-1～D-8 that all has 2 tooth shape shapes of torsion angle 30 degree.

Then, cutting blade to these superhard matrixes (drill bit) D-1～D-8 is implemented honing, carrying out ultrasonic wave in acetone cleans, under the dried state, be encased in equally by Fig. 2 A, Fig. 2 B or Fig. 3 A, in the evaporation coating device shown in Fig. 3 B, under the condition identical with the foregoing description 4, form table 23 by evaporation, the target composition shown in the table 24 and the (Ti of target bed thickness, Al) N layer, and equally by table 23, target shown in the table 24 is formed and the overlay film of the lubricity carbon class amorphous body of target bed thickness, produces surface of the present invention as coating sintered carbide tools of the present invention respectively and coats cemented carbide drill bit (below be called the superhard drill bit of coating of the present invention) 1～19.

In addition, under purpose relatively, cutting blade to superhard matrix (drill bit) D-1～D-8 is implemented honing, carrying out ultrasonic wave in acetone cleans, under the dried state, be encased in equally by Fig. 5 A, in the evaporation coating device shown in Fig. 5 B, under the condition identical with the foregoing description 4, form the TiN layer of the target bed thickness shown in the table 2 by evaporation, and forms by the target shown in the table 25 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produce the comparison surface coating cemented carbide drill bit (below be called relatively coat superhard drill bit) 1～8 of the coating sintered carbide tools that is equivalent in the past respectively.

Cutting speed: 290m/min,

Feeding: 0.4mm/rev,

Cutting speed: 265m/min,

Feeding: 0.5mm/rev,

Cutting speed: 265m/min,

Feeding: 0.6mm/rev,

Hole depth: 20mm, condition under the wet type high speed perforate machining test of Cu alloy (common cutting speed is 110m/min.); Perforate when the flank wear width of all measuring front end cutting blade face in which wet type perforate machining test (using water-soluble cutting oil) reaches 0.3mm adds number.Its measurement result is illustrated respectively in table 23～table 25.

[table 23]

Kind		Superhard matrix number	Connect airtight knitting layer				Lubricity amorphous carbon class overlay film						Perforate adds number (hole)
			Connect airtight knitting layer				Lubricity amorphous carbon class overlay film							Target is formed (atom %)			Target bed thickness (μ m)	Target is formed (atom %)				Target bed thickness (μ m)	(C N) is crystalline particle footpath (nm) to Ti
			Ti	Al	N	W	Ti	N	C+ impurity					Target is formed (atom %)				Target is formed (atom %)
			Ti	Al	N	W	Ti	N	C+ impurity	Coating Superhard Drill of the present invention	1	D-1		0.45	0.55	1.00		0.1	5.0	5.0	0.5			All the other	3.0	16.5	9305
2	D-2	0.55	0.45	1.00	3.0	15.0	15.0	7.5	All the other		1	D-1	5.0	0.45	0.55	1.00	10.4	0.1	5.0	5.0	0.5	9734		All the other	3.0	16.5	9305
2	D-2	0.55	0.45	1.00	3.0	15.0	15.0	7.5	All the other		3	D-3	5.0	0.50	0.50	1.00	10.4	1.0	20.0	20.0	18.0	9734	All the other	7.0	31.5	10182
4	D-4	0.60	0.40	1.00	1.5	5.0	20.0	14.0	All the other		3	D-3	9.0	0.50	0.50	1.00	24.7	1.0	20.0	20.0	18.0	2641	All the other	7.0	31.5	10182
4	D-4	0.60	0.40	1.00	1.5	5.0	20.0	14.0	All the other		5	D-5	9.0	0.40	0.60	1.00	24.7	2.0	10.0	15.0	4.5	2641	All the other	6.0	15.2	2001
6	D-6	0.50	0.50	1.00	2.5	15.0	10.0	0.1	All the other		5	D-5	9.0	0.40	0.60	1.00	18.9	2.0	10.0	15.0	4.5	2795	All the other	6.0	15.2	2001
6	D-6	0.50	0.50	1.00	2.5	15.0	10.0	0.1	All the other		7	D-7	9.0	0.55	0.45	1.00	18.9	0.5	10.0	15.0	10.5	2795	All the other	13.0	18.5	4218
8	D-8	0.45	0.55	1.00	1.5	20.0	5.0	1.5	All the other		7	D-7	11.0	0.55	0.45	1.00	9.2	0.5	10.0	15.0	10.5	3875	All the other	13.0	18.5	4218
8	D-8	0.45	0.55	1.00	1.5	20.0	5.0	1.5	All the other		9	D-2	11.0	0.55	0.45	1.00	9.2	3.0	10.0	0.5	10.0	3875	All the other	5	9.3	10096
10	D-5	0.60	0.40	1.00	1.5	40.0	4.0	30.0	All the other		9	D-2	10	0.55	0.45	1.00	16.5	3.0	10.0	0.5	10.0	2836	All the other	5	9.3	10096
10	D-5	0.60	0.40	1.00	1.5	40.0	4.0	30.0	All the other		11	D-8	10	0.50	0.50	1.00	16.5	2.5	10.0	30.0	25.0	2836	All the other	6	34.1	3804

[table 24]

Kind		Superhard matrix number	Connect airtight knitting layer				Lubricity amorphous carbon class overlay film							Perforate adds number (hole)
			Connect airtight knitting layer				Lubricity amorphous carbon class overlay film								Target is formed (atom %)			Target bed thickness (μ m)	Target is formed (atom %)					Target bed thickness (μ m)	(Ti, Al) (C N) is crystalline particle footpath (nm)
			Ti	Al	N	W	Ti	Al	N	C+ impurity					Target is formed (atom %)				Target is formed (atom %)
			Ti	Al	N	W	Ti	Al	N	C+ impurity	Coating Superhard Drill of the present invention	12	D-1		0.45	0.55	1.00		0.1	5.0	10.0	15.0	22.5			All the other	3.0	13.8	10002
13	D-2	0.55	0.45	1.00	3.0	10.0	10.0	10.0	14.0	All the other		12	D-1	5.0	0.45	0.55	1.00	10.4	0.1	5.0	10.0	15.0	22.5	10470		All the other	3.0	13.8	10002
13	D-2	0.55	0.45	1.00	3.0	10.0	10.0	10.0	14.0	All the other		14	D-3	5.0	0.50	0.50	1.00	10.4	1.0	15.0	10.0	6.7	8.3	10470	All the other	7.0	7.6	10955
15	D-4	0.60	0.40	1.00	1.5	10.0	5.0	8.0	3.9	All the other		14	D-3	9.0	0.50	0.50	1.00	26.4	1.0	15.0	10.0	6.7	8.3	2838	All the other	7.0	7.6	10955
15	D-4	0.60	0.40	1.00	1.5	10.0	5.0	8.0	3.9	All the other		16	D-5	9.0	0.40	0.60	1.00	26.4	2.0	15.0	7.5	7.5	9.0	2838	All the other	6.0	20.9	2154
17	D-6	0.50	0.50	1.00	2.5	20.0	2.5	1.6	0.4	All the other		16	D-5	9.0	0.40	0.60	1.00	15.3	2.0	15.0	7.5	7.5	9.0	3094	All the other	6.0	20.9	2154
17	D-6	0.50	0.50	1.00	2.5	20.0	2.5	1.6	0.4	All the other		18	D-7	9.0	0.55	0.45	1.00	15.3	0.5	15.0	4.5	5.5	4.0	3094	All the other	13.0	9.6	4545
19	D-8	0.45	0.55	1.00	1.5	10.0	5.5	4.5	7.0	All the other		18	D-7	11.0	0.55	0.45	1.00	30.2	0.5	15.0	4.5	5.5	4.0	4198	All the other	13.0	9.6	4545

[table 25]

Kind		Superhard matrix number	The target bed thickness of TiN layer (μ m)	Lubricity amorphous carbon class overlay film						Perforate adds number (hole)
				Lubricity amorphous carbon class overlay film							Target is formed (atom %)					Target bed thickness (μ m)
				W	Ti	Al	N	C+ impurity			Target is formed (atom %)
				W	Ti	Al	N	C+ impurity	Relatively coat Superhard Drill		1	D-1	0.1	5	-		-	-	All the other	3	4015
2	D-2	3	10	-	-	-	All the other	5		4293	1	D-1	0.1	5	-		-	-	All the other	3	4015
2	D-2	3	10	-	-	-	All the other	5		4293	3	D-3	1	15	-	-	-	All the other	7	4649
4	D-4	1.5	10	-	-	-	All the other	9		1163	3	D-3	1	15	-	-	-	All the other	7	4649
4	D-4	1.5	10	-	-	-	All the other	9		1163	5	D-5	2	15	-	-	-	All the other	6	855
6	D-6	2.5	20	-	-	-	All the other	9		1284	5	D-5	2	15	-	-	-	All the other	6	855
6	D-6	2.5	20	-	-	-	All the other	9		1284	7	D-7	0.5	15	-	-	-	All the other	13	2185
8	D-8	1.5	10	-	-	-	All the other	11		1769	7	D-7	0.5	15	-	-	-	All the other	13	2185

For constituting as the superhard blade 1 of coating of the present invention that has obtained this result's coating sintered carbide tools of the present invention, 1 '～42,42 ', the superhard slotting cutter 1～19 of coating of the present invention, and the superhard drill bit 1～19 of coating of the present invention, and the superhard blade 1 of the relatively coating that is equivalent to coating sintered carbide tools in the past, 1 '～16,16 ', relatively coat superhard slotting cutter 1～8, and relatively coat superhard drill bit 1～8 connect airtight knitting layer and lubricity amorphous carbon class overlay film, utilize the Auger spectroscopy apparatus to measure its composition, utilize scanning electron microscope to measure its bed thickness, expression is all formed and substantially the same composition and the average bed thickness (mean values at 5 places, cross section) of target bed thickness with target then, in addition, after utilizing its tissue of infiltration type electron microscope observation, the coating sintered carbide tools of the invention described above is illustrated in the Ti-Al class (C that is distributed with crystalline in the substrate of carbon class amorphous body, N) tissue of particulate, and above-mentioned in the past coating sintered carbide tools is represented the single tissue that constitutes mutually by carbon class amorphous body.

By the result shown in table 16～table 25 as can be known, lubricity noncrystalline carbon element overlay film has the Ti-Al class (C that is distributed with crystalline in the substrate of carbon class amorphous body, N) even the coating sintered carbide tools of the present invention of the tissue of particulate is all carrying out the Al alloy with high-speed condition, the Cu alloy also has under the situation of machining of steel, also can bring into play advantages of good abrasion, relative therewith, in lubricity noncrystalline carbon element overlay film has coating sintered carbide tools in the past (relatively coating sintered carbide tools) by the single tissue that constitutes mutually of carbon class amorphous body, under the high-speed cutting condition, the wearing and tearing development of above-mentioned lubricity amorphous carbon class overlay film is very fast, will reach service life in the short period of time.

Embodiment 7

As material powder, preparation all has WC powder, TiC powder, VC powder, TaC powder, NbC powder, the Cr of the average grain diameter of 1～3 μ m ₃C ₂Powder, TiN powder, TaN powder, and Co powder, these material powders are fitted in the cooperation shown in the table 26 to be formed, after carrying out 60 hours wet mixed, drying by ball mill, pressure press forming by 100MPa is the press-powder body, with this press-powder body in the vacuum of 6Pa, temperature: keep sintering under 1 hour the condition in 1400 ℃, behind sintering, implement attrition process and superhard matrix A-1～A～10 of making the WC base cemented carbide of plate shape with ISO specification TEGX 160304R.

In addition, as material powder, preparation all has TiCN (mass ratio is TiC/TiN=50/50) powder, the Mo of the average grain diameter of 0.5～2 μ m ₂C powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder, and Ni powder, these material powders are fitted in the cooperation shown in the table 27 to be formed, after carrying out 48 hours wet mixed, drying by ball mill, pressure press forming by 100MPa is the press-powder body, with this press-powder body in the nitrogen gas environment of 2kPa, in temperature: keep sintering under 1 hour the condition in 1500 ℃, behind sintering, implement attrition process and form superhard matrix B-1～B～6 of the superhard matter of TiCN class of plate shape with ISO specification TEGX160304R.

(a) then, at Fig. 4 A, arc ions electroplanting device shown in Fig. 4 B, promptly install central portion superhard matrix installation rotary table is set, across above-mentioned rotary table, in a side the higher Al-Ti alloy of Al amount relatively is installed respectively, the higher Ti-Al alloy of Ti amount relatively is installed as negative electrode (evaporation source) at opposite side, utilize again and revolving the arc ions electroplanting device that Metal Cr is installed as negative electrode (evaporation source) on the position that turn 90 degrees with respect to above-mentioned two negative electrodes, above-mentioned superhard matrix A-1～A-10 and B-1～B-6 are carried out the ultrasonic wave cleaning respectively in acetone, under the dried state, the central shaft that is installed on the rotary table in the above-mentioned evaporation coating device along peripheral part leaves on the position of predetermined distance to radial direction;

(b) at first, to install on one side interior vacuum exhaust and remain vacuum below the 0.1Pa, be heated to after 500 ℃ in will installing with heater on one side, the above-mentioned superhard matrix that rotation on one side on above-mentioned rotary table is rotated on one side applies-the dc bypass voltage of 1000V, and the electric current that makes 100A flows through between the above-mentioned Metal Cr of installing as negative electrode and the anode and arc discharge takes place, thus, impact the superhard matrix surface of cleaning by above-mentioned Metal Cr;

(c) then, nitrogen is imported in the device as reacting gas, form the reacting gas environment of 3Pa, and the superhard matrix that rotation on one side on above-mentioned rotary table is rotated on one side applies-the dc bypass voltage of 70V, and the electric current that makes 100A flow through respectively two negative electrodes of arranged opposite (above-mentioned Ti is the highest contain a bit form with Ti-Al alloy and Al the highest contain a bit to form use the Al-Ti alloy) and anode between and the generation arc discharge, thus, on the surface of above-mentioned superhard matrix, along the bed thickness direction alternately with equally by table 28, there is table 28 repeatedly in target interval shown in the table 29, the Al that target shown in the table 29 is formed is the highest to be contained a bit and Ti has a few the highest containing, and, have from above-mentioned Al and state upwards a bit that Ti is the highest to be contained a bit the highest containing, state upwards a bit that Al is the highest to be contained a bit the highest containing from above-mentioned Ti, the composition varied configurations that Al and Ti amount change respectively continuously, and as the lower layer of surface coating layer and evaporation forms equally by table 28, (Al/Ti) N layer of the target bed thickness shown in the table 29;

(d) then, use is across rotary table and arranged opposite has purity: the Ti target of 99.9 quality % is as the evaporation coating device shown in Fig. 2 A, Fig. 2 B, the i.e. negative electrode (evaporation source) and the purity of the magnetron sputtering catching device of a side: the WC target of 99.6 quality % is as the evaporation coating device of the negative electrode (evaporation source) of the magnetic control sputtering device of opposite side, on the rotary table in device, the superhard matrix of above-mentioned lower layer formation is installed in ring-type leaves on the position of predetermined distance to radial direction from its central shaft;

(e) will be made as voltage to the condition that solenoid applies: the setting in the scope of 50～100V, electric current: 10～20A, the flux density of the installation portion of the superhard matrix that above-mentioned lower layer is formed is made as the setting in the scope of 100～300G (Gauss), heating-up temperature in the above-mentioned evaporation coating device is made as 400 ℃, above-mentioned superhard matrix is applied-the bypass voltage of 100V, on the other hand, with C ₂H ₂(hydrocarbon), nitrogen and Ar as reacting gas with C ₂H ₂The flow of the regulation in the scope of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 150～250sccm imports in the above-mentioned evaporation coating device, makes the reacting gas environment become the C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and apply for example power: 1～3kW (frequency: the sputter electric power of the regulation in scope 40kHz) at negative electrode (evaporation source) to the WC target of above-mentioned two magnetic control sputtering devices, on its Ti target, apply simultaneously power: 3～8kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz), as upper layer and evaporation forms and is made up of the target shown in the table 28 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produce surface coating cemented carbide throw away chip of the present invention as coating sintered carbide tools of the present invention (below be called coating blade of the present invention) 1～26 thus respectively.

(f) and then, replace above-mentioned record (d), use across rotary table and arranged opposite by the Ti-Al alloy target of forming with regulation as Fig. 3 A, evaporation coating device shown in Fig. 3 B, the i.e. negative electrode (evaporation source) of the magnetron sputtering catching device of a side, and purity: the WC target of 99.6 quality % is as the evaporation coating device of the negative electrode (evaporation source) of the magnetic control sputtering device of opposite side, on the rotary table in device, will be installed in ring-type by the superhard matrix that above-mentioned (c) formed lower layer and leave on the position of predetermined distance to radial direction from its central shaft;

(g) will be made as voltage to the condition that solenoid applies: the setting in the scope of 50～100V, electric current: 10～20A, the flux density of the installation portion of above-mentioned superhard matrix is made as the setting in the scope of 100～300G (Gauss), heating-up temperature in the above-mentioned evaporation coating device is being made as 400 ℃, above-mentioned superhard matrix is being applied-state of the bypass voltage of 100V under, with C ₂H ₂(hydrocarbon), nitrogen and Ar as reacting gas with C ₂H ₂The flow of the regulation in the scope of flow: 25～100sccm, nitrogen flow: 200～300sccm, Ar flow: 150～250sccm imports in the above-mentioned evaporation coating device, makes the reacting gas environment become the C of 1Pa ₂H ₂Decomposition gas, the mist of nitrogen and Ar, and apply for example power: 1～3kW (frequency: the sputter electric power of the regulation in scope 40kHz) at negative electrode (evaporation source) to the WC target of above-mentioned two magnetic control sputtering devices, on its Ti target, apply power: 3～8kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz) simultaneously, evaporation forms to be made up of the target shown in the table 29 equally and the lubricity amorphous carbon class overlay film of target bed thickness, produces surface coating cemented carbide throw away chip of the present invention as coating sintered carbide tools of the present invention (below be called the superhard blade of coating of the present invention) 27～42 thus respectively.

(a) in addition, under purpose relatively, above-mentioned superhard matrix A-1～A-10 and B-1～B-6 are carried out in acetone respectively under ultrasonic wave cleaning, the dried state, be respectively charged into evaporation coating device shown in Figure 6, promptly possess in the electric lonely electric discharge device and the evaporation coating device of WC target of Ti-Al alloy with regulation composition as the sputter equipment of negative electrode (evaporation source) as negative electrode (evaporation source);

(b) at first, to install on one side interior vacuum exhaust and remain vacuum below the 0.1Pa, be heated to after 500 ℃ in will installing with heater on one side, above-mentioned superhard matrix is applied-the dc bypass voltage of 1000V, and the electric current that makes 100A flows through between the above-mentioned Ti-Al alloy of negative electrode and the anode and arc discharge takes place, and impacts by above-mentioned Ti-Al alloy thus and cleans superhard matrix surface;

(c) nitrogen is imported in the said apparatus as reacting gas, and the reacting gas environment of formation 3Pa, and the bypass voltage that will impose on above-mentioned superhard matrix is reduced to-100V, make between the negative electrode of above-mentioned Ti-Al alloy and the anode arc discharge takes place, thus on each surface of above-mentioned superhard matrix A-1～A-10 and B-1～B-6 evaporation form that the target shown in the table 30 is formed and the target bed thickness (Ti, Al) the N layer is as the lower layer of surface coating layer;

(d) then, the heating-up temperature in making above-mentioned evaporation coating device is under 200 ℃ the state, with C ₂H ₂With Ar with C ₂H ₂The flow of the regulation in the scope of flow: 40～80sccm, Ar flow: 250sccm imports, form 1Pa by C ₂H ₂Decomposition gas and the reacting gas environment that constitutes of the mist of Ar, and be made as-20V at the bypass voltage that will apply to the superhard matrix that above-mentioned lower layer forms, negative electrode (evaporation source) to the WC target has applied power: 4～6kW (frequency: under the condition of the sputter electric power of the regulation in scope 40kHz), evaporation forms and is made up of the target of table 30 expression equally and the amorphous carbon class lubricating layer of target bed thickness on above-mentioned lower layer, produces the comparison surface coating cemented carbide throw away chip (below be called relatively coat superhard blade) 1～16 of the coating sintered carbide tools that is equivalent in the past thus respectively.

Then, under the state on the leading section that above-mentioned various coating blades all is fixed on instrument steel cutter by the stationary fixture screw, to coating blade 1～42 of the present invention and relatively coat blade 1～16, carry out

Be cut material: the pole of JISA5052,

Cutting speed: 800m/min,

Cutting-in: 7.3mm,

Feeding: 0.1mm/rev,

Cutting time: 20 minutes, condition (machining condition A) under the high cutting-in machining test of the dry type continuous high speed of Al alloy (common cutting speed and cutting-in are 400m/min and 2mm);

Be cut material: the pole of JISC3710,

Cutting speed: 380m/min,

Cutting-in: 6.8mm,

Feeding: 0.13mm/rev,

Cutting time: 20 minutes, condition (machining condition B) under the high cutting-in machining test of the dry type continuous high speed of Cu alloy (common cutting speed and cutting-in are 200m/min and 2mm);

Be cut material: the pole of JISTB340H,

Cutting speed: 150m/min,

Cutting-in: 6.4mm,

Feeding: 0.11mm/rev,

Cutting time: 15 minutes, condition (machining condition C) under the high cutting-in machining test of the dry type continuous high speed of Ti alloy (common cutting speed and cutting-in are 100m/min and 1.5mm); In which machining test, all measure the flank wear width of cutting blade.Its measurement result is represented in table 28, table 29.

[table 26]

Kind		Cooperate and form (quality %)
		Cooperate and form (quality %)										Co	TiC	ZrC	VC	TaC	NbC	Cr ₃C ₂	TiN	TaN	WC
		Superhard matrix	A-1	10.5	8	-	-	8	1.5	-	-	Co	TiC	ZrC	VC	TaC	NbC	Cr ₃C ₂	TiN	TaN	WC	-	All the other
A-2	7		A-1	10.5	8	-	-	8	1.5	-	-	-	-	-	-	-	-	-	-	All the other		-	All the other
A-2	7		A-3	5.7	-	-	-	1.5	0.5	-	-	-	-	-	-	-	-	-	-	All the other	-	All the other
A-4	5.7		A-3	5.7	-	-	-	1.5	0.5	-	-	-	-	-	-	-	1	-	-	All the other	-	All the other
A-4	5.7		A-5	8.5	-	0.5	-	-	-	0.5	-	-	-	-	-	-	1	-	-	All the other	-	All the other
A-6	9		A-5	8.5	-	0.5	-	-	-	0.5	-	-	-	-	2.5	1	-	-	-	All the other	-	All the other
A-6	9		A-7	9	8.5	-	-	8	3	-	-	-	-	-	2.5	1	-	-	-	All the other	-	All the other
A-8	11		A-7	9	8.5	-	-	8	3	-	-	8	-	-	4.5	-	-	1.5	-	All the other	-	All the other
A-8	11		A-9	12.5	2	-	-	-	-	-	1	8	-	-	4.5	-	-	1.5	-	All the other	2	All the other
A-10	14		A-9	12.5	2	-	-	-	-	-	1	-	-	0.2	-	-	0.8	-	-	All the other	2	All the other

[table 27]

Kind		Cooperate and form (quality %)
		Cooperate and form (quality %)								Co	Ni	ZrC	TaC	NbC	Mo ₂C	WC	TiCN
		Blade tool	B-1	13	5	-	10	-	10	Co	Ni	ZrC	TaC	NbC	Mo ₂C	WC	TiCN	16	All the other
B-2	8		B-1	13	5	-	10	-	10	7	-	5	-	7.5	-	All the other		16	All the other
B-2	8		B-3	5	-	-	-	-	6	7	-	5	-	7.5	-	All the other	10	All the other
B-4	10		B-3	5	-	-	-	-	6	5	-	11	2	-	-	All the other	10	All the other
B-4	10		B-5	9	4	1	8	-	10	5	-	11	2	-	-	All the other	10	All the other
B-6	12		B-5	9	4	1	8	-	10	5.5	-	10	-	9.5	14.5	All the other	10	All the other

[table 28]

Kind		Superhard matrix number	Lower layer [(Al/Ti) N layer]								Lubricity amorphous carbon class overlay film						Machining condition A	Machining condition B	Machining condition C
			Lower layer [(Al/Ti) N layer]								Lubricity amorphous carbon class overlay film									The highest amount of Al			The highest amount of Ti			The target interval of point-to-point transmission (μ m)	Target bed thickness (μ m)	Target is formed (atom %)				Target bed thickness (μ m)	(C N) is crystalline particle footpath (nm) to Ti
			Target is formed (atom %)			Target is formed (atom %)			W	Ti	N	C+ impurity								The highest amount of Al			The highest amount of Ti					Target is formed (atom %)
			Target is formed (atom %)			Target is formed (atom %)							Al	Ti	N	Ti				Al	N
			Coating superhard cutting blade of the present invention	1	A-1	0.95	0.05	1.00					Al	Ti	N	Ti				Al	N	0.95	0.05	1.00	0.01			8.0	5.0	20.0	10.0			All the other	7.0	38.4	0.13	0.13	0.23
2	A-2	0.90		1	A-1	0.95	0.05	1.00	0.10	1.00	0.85	0.15	1.00	0.06	5.0	10.0	15.0	7.5	All the other	9.0	22.7	0.95	0.05	1.00	0.01	0.17	0.18	8.0	5.0	20.0	10.0	0.26		All the other	7.0	38.4	0.13	0.13	0.23
2	A-2	0.90		3	A-3	0.85	0.15	1.00	0.10	1.00	0.85	0.15	1.00	0.06	5.0	10.0	15.0	7.5	All the other	9.0	22.7	0.70	0.30	1.00	0.03	0.17	0.18	7.0	15.0	10.0	5.0	0.26	All the other	8.0	21.9	0.16	0.17	0.24
4	A-4	0.80		3	A-3	0.85	0.15	1.00	0.20	1.00	0.90	0.10	1.00	0.10	9.0	20.0	5.0	2.5	All the other	6.0	8.1	0.70	0.30	1.00	0.03	0.11	0.12	7.0	15.0	10.0	5.0	0.21	All the other	8.0	21.9	0.16	0.17	0.24
4	A-4	0.80		5	A-5	0.75	0.25	1.00	0.20	1.00	0.90	0.10	1.00	0.10	9.0	20.0	5.0	2.5	All the other	6.0	8.1	0.75	0.25	1.00	0.07	0.11	0.12	6.0	5.0	20.0	16.0	0.21	All the other	8.0	7.4	0.16	0.16	0.25
6	A-6	0.60		5	A-5	0.75	0.25	1.00	0.30	1.00	0.80	0.20	1.00	0.02	7.0	10.0	15.0	10.5	All the other	7.0	6.8	0.75	0.25	1.00	0.07	0.14	0.14	6.0	5.0	20.0	16.0	0.23	All the other	8.0	7.4	0.16	0.16	0.25
6	A-6	0.60		7	A-7	0.65	0.35	1.00	0.30	1.00	0.80	0.20	1.00	0.02	7.0	10.0	15.0	10.5	All the other	7.0	6.8	0.65	0.35	1.00	0.04	0.14	0.14	6.0	15.0	10.0	9.0	0.23	All the other	7.0	34.2	0.15	0.15	0.24
8	A-8	0.90		7	A-7	0.65	0.35	1.00	0.10	1.00	0.90	0.10	1.00	0.09	8.0	20.0	5.0	0.5	All the other	6.0	20.3	0.65	0.35	1.00	0.04	0.12	0.13	6.0	15.0	10.0	9.0	0.22	All the other	7.0	34.2	0.15	0.15	0.24
8	A-8	0.90		9	A-9	0.80	0.20	1.00	0.10	1.00	0.90	0.10	1.00	0.09	8.0	20.0	5.0	0.5	All the other	6.0	20.3	0.80	0.20	1.00	0.05	0.12	0.13	5.0	10.0	10.0	3.0	0.22	All the other	10.0	17.2	0.17	0.18	0.26
10	A-10	0.70		9	A-9	0.80	0.20	1.00	0.30	1.00	0.75	0.25	1.00	0.08	10.0	15.0	15.0	1.5	All the other	5.0	8.5	0.80	0.20	1.00	0.05	0.1	0.11	5.0	10.0	10.0	3.0	0.2	All the other	10.0	17.2	0.17	0.18	0.26
10	A-10	0.70		11	A-1	0.60	0.30	1.00	0.30	1.00	0.75	0.25	1.00	0.08	10.0	15.0	15.0	1.5	All the other	5.0	8.5	0.80	0.20	1.00	0.02	0.1	0.11	8.0	5.0	20.0	18.0	0.2	All the other	9.0	29.6	0.2	0.11	0.11
12	A-3	0.70		11	A-1	0.60	0.30	1.00	0.30	1.00	0.75	0.25	1.00	0.06	9.0	10.0	30.0	25.0	All the other	6.0	14.8	0.80	0.20	1.00	0.02	0.18	0.13	8.0	5.0	20.0	18.0	0.09	All the other	9.0	29.6	0.2	0.11	0.11
12	A-3	0.70		13	A-5	0.75	0.25	1.00	0.30	1.00	0.75	0.25	1.00	0.06	9.0	10.0	30.0	25.0	All the other	6.0	14.8	0.75	0.25	1.00	0.07	0.18	0.13	5.0	20.0	20.0	16.5	0.09	All the other	4.0	12.3	0.17	0.15	0.09
14	A-7	0.85		13	A-5	0.75	0.25	1.00	0.15	1.00	0.70	0.30	1.00	0.03	8.0	10.0	0.5	10.0	All the other	5.0	7.8	0.75	0.25	1.00	0.07	0.33	0.03	5.0	20.0	20.0	16.5	0.05	All the other	4.0	12.3	0.17	0.15	0.09
14	A-7	0.85		15	A-9	0.95	0.05	1.00	0.15	1.00	0.70	0.30	1.00	0.03	8.0	10.0	0.5	10.0	All the other	5.0	7.8	0.95	0.05	1.00	0.01	0.33	0.03	6.0	40.0	4.0	30.0	0.05	All the other	10.0	5.2	0.06	0.21	0.23
16	B-1	0.80		15	A-9	0.95	0.05	1.00	0.10	1.00	0.95	0.05	1.00	0.04	7.0	5.0	5.0	2.5	All the other	8.0	9.9	0.95	0.05	1.00	0.01	0.16	0.18	6.0	40.0	4.0	30.0	0.24	All the other	10.0	5.2	0.06	0.21	0.23
16	B-1	0.80		17	B-2	0.85	0.15	1.00	0.10	1.00	0.95	0.05	1.00	0.04	7.0	5.0	5.0	2.5	All the other	8.0	9.9	0.65	0.35	1.00	0.10	0.16	0.18	5.0	10.0	10.0	5.0	0.24	All the other	10.0	13.4	0.18	0.17	0.26
18	B-3	0.80		17	B-2	0.85	0.15	1.00	0.20	1.00	0.80	0.20	1.00	0.01	6.0	15.0	15.0	7.5	All the other	7.0	27.2	0.65	0.35	1.00	0.10	0.13	0.13	5.0	10.0	10.0	5.0	0.23	All the other	10.0	13.4	0.18	0.17	0.26
18	B-3	0.80		19	B-4	0.75	0.25	1.00	0.20	1.00	0.80	0.20	1.00	0.01	6.0	15.0	15.0	7.5	All the other	7.0	27.2	0.90	0.10	1.00	0.06	0.13	0.13	10.0	20.0	20.0	10.0	0.23	All the other	5.0	7.6	0.11	0.12	0.21
20	B-5	0.70		19	B-4	0.75	0.25	1.00	0.30	1.00	0.75	0.25	1.00	0.02	6.0	10.0	15.0	13.5	All the other	9.0	35.3	0.90	0.10	1.00	0.06	0.17	0.18	10.0	20.0	20.0	10.0	0.25	All the other	5.0	7.6	0.11	0.12	0.21
20	B-5	0.70		21	B-6	0.65	0.35	1.00	0.30	1.00	0.75	0.25	1.00	0.02	6.0	10.0	15.0	13.5	All the other	9.0	35.3	0.85	0.15	1.00	0.06	0.17	0.18	9.0	15.0	10.0	1.0	0.25	All the other	6.0	20.5	0.12	0.11	0.22
22	B-1	0.95		21	B-6	0.65	0.35	1.00	0.05	1.00	0.95	0.05	1.00	0.01	7.0	5.0	20.0	18.0	All the other	9.0	15.8	0.85	0.15	1.00	0.06	0.12	0.1	9.0	15.0	10.0	1.0	0.13	All the other	6.0	20.5	0.12	0.11	0.22
22	B-1	0.95		23	B-3	0.80	0.30	1.00	0.05	1.00	0.95	0.05	1.00	0.01	7.0	5.0	20.0	18.0	All the other	9.0	15.8	0.80	0.20	1.00	0.02	0.12	0.1	5.0	10.0	30.0	25.0	0.13	All the other	6.0	8.3	0.11	0.07	0.07
24	B-4	0.80		23	B-3	0.80	0.30	1.00	0.20	1.00	0.80	0.20	1.00	0.01	6.0	20.0	20.0	16.5	All the other	4.0	22.6	0.80	0.20	1.00	0.02	0.16	0.13	5.0	10.0	30.0	25.0	0.11	All the other	6.0	8.3	0.11	0.07	0.07
24	B-4	0.80		25	B-5	0.70	0.30	1.00	0.20	1.00	0.80	0.20	1.00	0.01	6.0	20.0	20.0	16.5	All the other	4.0	22.6	0.75	0.25	1.00	0.02	0.16	0.13	10.0	10.0	0.5	10.0	0.11	All the other	5.0	28.3	0.19	0.04	0.05
26	B-6	0.65		25	B-5	0.70	0.30	1.00	0.35	1.00	0.65	0.35	1.00	0.04	8.0	40.0	4.0	30.0	All the other	10.0	5.2	0.75	0.25	1.00	0.02	0.1	0.2	10.0	10.0	0.5	10.0	0.21	All the other	5.0	28.3	0.19	0.04	0.05

[table 29]

Kind		Superhard matrix number	Lower layer [(Al/Ti) N layer]								Upper layer (noncrystalline carbon element lubricating film)							Machining condition A	Machining condition B	Machining condition C
			Lower layer [(Al/Ti) N layer]																		The highest amount of Al			The highest amount of Ti			The target interval of point-to-point transmission (μ m)	Target bed thickness (μ m)	Target is formed (atom %)					Target bed thickness (μ m)	(Ti, Al) (C N) is crystalline particle footpath (nm)
			Target is formed (atom %)			Target is formed (atom %)															The highest amount of Al			The highest amount of Ti
			Target is formed (atom %)			Target is formed (atom %)			Al	Ti	N	Ti	Al	N	W	Ti	Al				N	C+ impurity
			Coating superhard cutting blade of the present invention	27	A-1	0.95	0.05	1.00	Al	Ti	N	Ti	Al	N	W	Ti	Al				N	C+ impurity	0.05	0.05	1.00	0.01			8.0	5.0	10.0	15.0	22.5			All the other	7.0	33.4	0.1	0.11	0.22
28	A-2	0.90		27	A-1	0.95	0.05	1.00	0.10	1.00	0.85	0.15	1.00	0.06	5.0	10.0	8.0	12.0	12.0	All the other	9.0	25.3	0.05	0.05	1.00	0.01	0.14	0.15	8.0	5.0	10.0	15.0	22.5	0.25		All the other	7.0	33.4	0.1	0.11	0.22
28	A-2	0.90		29	A-3	0.85	0.15	1.00	0.10	1.00	0.85	0.15	1.00	0.06	5.0	10.0	8.0	12.0	12.0	All the other	9.0	25.3	0.70	0.30	1.00	0.03	0.14	0.15	7.0	15.0	4.0	6.0	3.0	0.25	All the other	8.0	22.1	0.13	0.14	0.23
30	A-4	0.80		29	A-3	0.85	0.15	1.00	0.20	1.00	0.90	0.10	1.00	0.10	9.0	20.0	10.0	15.0	2.5	All the other	6.0	12.5	0.70	0.30	1.00	0.03	0.09	0.1	7.0	15.0	4.0	6.0	3.0	0.2	All the other	8.0	22.1	0.13	0.14	0.23
30	A-4	0.80		31	A-5	0.75	0.25	1.00	0.20	1.00	0.90	0.10	1.00	0.10	9.0	20.0	10.0	15.0	2.5	All the other	6.0	12.5	0.75	0.25	1.00	0.07	0.09	0.1	5.0	5.0	10.0	10.0	18.0	0.2	All the other	8.0	8.6	0.13	0.14	0.24
32	A-6	0.60		31	A-5	0.75	0.25	1.00	0.30	1.00	0.80	0.20	1.00	0.02	7.0	10.0	7.5	7.5	13.5	All the other	7.0	5.9	0.75	0.25	1.00	0.07	0.11	0.12	5.0	5.0	10.0	10.0	18.0	0.22	All the other	8.0	8.6	0.13	0.14	0.24
32	A-6	0.60		33	A-7	0.65	0.35	1.00	0.30	1.00	0.80	0.20	1.00	0.02	7.0	10.0	7.5	7.5	13.5	All the other	7.0	5.9	0.85	0.35	1.00	0.04	0.11	0.12	6.0	15.0	5.0	5.0	3.0	0.22	All the other	7.0	29.3	0.12	0.13	0.23
34	A-8	0.90		33	A-7	0.65	0.35	1.00	0.10	1.00	0.90	0.10	1.00	0.09	8.0	20.0	2.5	2.5	0.5	All the other	6.0	26.4	0.85	0.35	1.00	0.04	0.1	0.11	6.0	15.0	5.0	5.0	3.0	0.21	All the other	7.0	29.3	0.12	0.13	0.23
34	A-8	0.90		35	A-9	0.80	0.20	1.00	0.10	1.00	0.90	0.10	1.00	0.09	8.0	20.0	2.5	2.5	0.5	All the other	6.0	26.4	0.80	0.20	1.00	0.06	0.1	0.11	5.0	5.0	2.5	1.5	0.4	0.21	All the other	10.0	15.9	0.14	0.15	0.25
36	A-10	0.70		35	A-9	0.80	0.20	1.00	0.30	1.00	0.75	0.25	1.00	0.08	10.0	10.0	6.0	4.0	6.0	All the other	5.0	14.3	0.80	0.20	1.00	0.06	0.08	0.09	5.0	5.0	2.5	1.5	0.4	0.18	All the other	10.0	15.9	0.14	0.15	0.25
36	A-10	0.70		37	B-1	0.90	0.10	1.00	0.30	1.00	0.75	0.25	1.00	0.08	10.0	10.0	6.0	4.0	6.0	All the other	5.0	14.3	0.95	0.05	1.00	0.04	0.08	0.09	7.0	15.0	10.0	6.7	5.0	0.18	All the other	8.0	9.6	0.13	0.15	0.23
38	B-2	0.85		37	B-1	0.90	0.10	1.00	0.15	1.00	0.85	0.25	1.00	0.10	5.0	20.0	2.5	1.6	3.7	All the other	10.0	11.8	0.95	0.05	1.00	0.04	0.14	0.14	7.0	15.0	10.0	6.7	5.0	0.25	All the other	8.0	9.6	0.13	0.15	0.23
38	B-2	0.85		39	B-3	0.80	0.20	1.00	0.15	1.00	0.85	0.25	1.00	0.10	5.0	20.0	2.5	1.6	3.7	All the other	10.0	11.8	0.80	0.20	1.00	0.01	0.14	0.14	8.0	5.0	10.0	10.0	10.0	0.25	All the other	7.0	20.6	0.1	0.11	0.22
40	8-4	0.75		39	B-3	0.80	0.20	1.00	0.25	1.00	0.90	0.10	1.00	0.04	10.0	10.0	7.5	7.5	7.5	All the other	5.0	6.4	0.80	0.20	1.00	0.01	0.09	0.1	8.0	5.0	10.0	10.0	10.0	0.2	All the other	7.0	20.6	0.1	0.11	0.22
40	8-4	0.75		41	B-5	0.70	0.30	1.00	0.25	1.00	0.90	0.10	1.00	0.04	10.0	10.0	7.5	7.5	7.5	All the other	5.0	6.4	0.75	0.25	1.00	0.02	0.09	0.1	6.0	15.0	5.0	5.0	5.0	0.2	All the other	9.0	39.9	0.14	0.15	0.24
42	B-6	0.65		41	B-5	0.70	0.30	1.00	0.35	1.00	0.85	0.15	1.00	0.08	9.0	20.0	7.5	7.5	7.5	All the other	6.0	19.6	0.75	0.25	1.00	0.02	0.1	0.09	6.0	15.0	5.0	5.0	5.0	0.21	All the other	9.0	39.9	0.14	0.15	0.24

[table 30]

Kind		Superhard matrix number	Surface coating layer
			Surface coating layer									Lower layer [(Ti, Al) N layer]				Upper layer (amorphous carbon prime system lubricating layer)
			Target is formed (atomic ratio)			Target bed thickness (μ m)	Target is formed (atomic ratio)				Target bed thickness (μ m)	Lower layer [(Ti, Al) N layer]
			Target is formed (atomic ratio)				Target is formed (atomic ratio)					Ti	Al	N	W	Ti	N	C+ impurity
			Relatively coat superhard cutting blade	1	A-1		0.50	0.50	1.00	8		Ti	Al	N	W	Ti	N	C+ impurity	5	-	-	All the other	7
2	A-2	0.55		1	A-1	0.45	0.50	0.50	1.00	8	1.00	5	10	-	-	All the other	9		5	-	-	All the other	7
2	A-2	0.55		3	A-3	0.45	0.60	0.40	1.00	7	1.00	5	10	-	-	All the other	9	15	-	-	All the other	8
4	A-4	0.40		3	A-3	0.60	0.60	0.40	1.00	7	1.00	9	20	-	-	All the other	6	15	-	-	All the other	8
4	A-4	0.40		5	A-5	0.60	0.45	0.55	1.00	6	1.00	9	20	-	-	All the other	6	5	-	-	All the other	8
6	A-6	0.60		5	A-5	0.40	0.45	0.55	1.00	6	1.00	7	10	-	-	All the other	7	5	-	-	All the other	8
6	A-6	0.60		7	A-7	0.40	0.50	0.50	1.00	6	1.00	7	10	-	-	All the other	7	15	-	-	All the other	7
8	A-8	0.55		7	A-7	0.45	0.50	0.50	1.00	6	1.00	8	20	-	-	All the other	8	15	-	-	All the other	7
8	A-8	0.55		9	A-9	0.45	0.40	0.60	1.00	5	1.00	8	20	-	-	All the other	8	10	-	-	All the other	10
10	A-10	0.45		9	A-9	0.55	0.40	0.60	1.00	5	1.00	10	15	-	-	All the other	5	10	-	-	All the other	10
10	A-10	0.45		11	B-1	0.55	0.60	0.40	1.00	7	1.00	10	15	-	-	All the other	5	5	-	-	All the other	8
12	B-2	0.50		11	B-1	0.60	0.60	0.40	1.00	7	1.00	5	10	-	-	All the other	10	5	-	-	All the other	8
12	B-2	0.50		13	B-3	0.60	0.45	0.65	1.00	8	1.00	5	10	-	-	All the other	10	15	-	-	All the other	7
14	B-4	0.55		13	B-3	0.45	0.45	0.65	1.00	8	1.00	10	20	-	-	All the other	5	15	-	-	All the other	7
14	B-4	0.55		15	B-5	0.45	0.50	0.50	1.00	6	1.00	10	20	-	-	All the other	5	10	-	-	All the other	9
16	B-6	0.60		15	B-5	0.40	0.50	0.50	1.00	6	1.00	9	15	-	-	All the other	6	10	-	-	All the other	9

Embodiment 8

As material powder, prepare to have average grain diameter: the middle coarse grain WC powder of 4.6 μ m, average grain diameter: particulate WC powder, the average grain diameter of 0.8 μ m: TaC powder, the average grain diameter of 1.3 μ m: NbC powder, the average grain diameter of 1.2 μ m: ZrC powder, the average grain diameter of 1.2 μ m: the Cr of 2.3 μ m ₃C ₂Powder, average grain diameter: the VC powder of 1.5 μ m, the average grain diameter: (Ti of 1.0 μ m, W) the C[mass ratio is TiC/WC=50/50] powder, and average grain diameter: the Co powder of 1.8 μ m, these material powders are fitted in the cooperation shown in the table 31 respectively to be formed, add paraffin again and in acetone, carry out ball mill mixing in 24 hours, behind the drying under reduced pressure, pressure press forming by 100MPa is the various press-powder bodies of regulation shape, with these press-powder bodies in the vacuum gas environment of 6Pa, be warmed up to the temperature of the regulation in 1370～1470 ℃ the scope with 7 ℃/minute programming rates, after keeping 1 hour under this temperature, under the cold condition of stove, carry out sintering, the formation diameter is 8mm, 13mm, and 3 kinds of superhard matrixes formation pole sintered bodies of 26mm, cut processing by above-mentioned 3 kinds of pole sintered bodies by grinding again, with the combination shown in the table 31, the diameter * length that produces blade part respectively is respectively 6mm * 13mm, 10mm * 22mm, and the size of 20mm * 45mm, and superhard matrix (slotting cutter) C-1～C-8 of WC base cemented carbide that all has 4 square tooth shape shapes of torsion angle 30 degree.

Then, ultrasonic wave is carried out on the surface of these superhard matrixes (slotting cutter) C-1～C-8 in acetone clean, under the dried state, be encased in equally by Fig. 4 A, in the arc ions electroplanting device shown in Fig. 4 B, under the condition identical with the foregoing description 7, as the lower layer (hard layer) of surface coating layer and evaporation forms along the bed thickness direction alternately to have table 32 repeatedly by the target interval shown in the table 7 equally, the Al that target shown in the table 33 is formed is the highest to be contained a bit and Ti has a few the highest containing, and have from above-mentioned Al and state upwards a bit that Ti is the highest to be contained a bit the highest containing, state upwards a bit that Al is the highest to be contained a bit the highest containing from above-mentioned Ti, the composition varied configurations that Al and Ti amount change respectively continuously, and by table 32, (Al/Ti) N layer of the target bed thickness shown in the table 33, then the superhard matrix that above-mentioned lower layer is formed is encased in equally by Fig. 2 A, Fig. 2 B, Fig. 3 A, in the evaporation coating device shown in Fig. 3 B, as its upper layer and evaporation forms equally by table 32, target shown in the table 33 is formed and the amorphous carbon class lubricating layer of target bed thickness, produces surface of the present invention as coating sintered carbide tools of the present invention thus respectively and coats cemented carbide slotting cutter (below be called the superhard slotting cutter of coating of the present invention) 1～19.

In addition, under purpose relatively, ultrasonic wave is carried out on the surface of above-mentioned superhard matrix (slotting cutter) C-1～C-8 in acetone clean, under the dried state, be encased in same by in the evaporation coating device shown in Figure 6, under the condition identical with the foregoing description 7, evaporation forms and is made up of the target of table 34 expression equally and (the Ti of target bed thickness respectively, Al) N layer and amorphous carbon class lubricating layer be as the lower layer and the upper layer of surface coating layer, and the comparison surface that produces the coating sintered carbide tools that is equivalent in the past thus respectively coats superhard slotting cutter (below be called relatively coat slotting cutter) 1～8.

Then, for the coating slotting cutter 1～19 of the invention described above and relatively coat the coating slotting cutter of the present invention 1～3,9,12～14 in the slotting cutter 1～8 and relatively coat slotting cutter 1～3, carry out

Cutting speed: 180m/min,

Groove depth (cutting-in): 5mm,

Table feed: the 485mm/ branch, condition under the high cutting-in groove cutting of the dry type high speed processing experiment (common cutting speed and groove depth are 150m/min and 2mm) of Cu alloy; For coating slotting cutter 4～6,10,15～17 of the present invention and relatively coat slotting cutter 4～6, carry out

Be cut material: planar dimension: the sheet material of the JISTP340H of 100mm * 250mm, thickness: 50mm,

Cutting speed: 185m/min,

Groove depth (cutting-in): 8.1mm,

Table feed: the 455mm/ branch, condition under the high cutting-in groove cutting of the dry type high speed processing experiment (common cutting speed and groove depth are 150m/min and 4mm) of Ti alloy; For coating slotting cutter 7,8,11,18,19 of the present invention and relatively coat slotting cutter 7,8, carry out

Cutting speed: 205m/min,

Groove depth (cutting-in): 16mm,

Table feed: the 500mm/ branch, condition under the high cutting-in groove cutting of the dry type high speed processing experiment (common cutting speed and groove depth are 180m/min and 8mm) of Ti alloy; Length of cut when the flank wear width of all measuring the peripheral edge of blade part in which groove cutting processing experiment reaches as the 0.1mm of the normative reference in service life.Its measurement result is illustrated respectively in table 32～table 34.

[table 31]

Kind		Cooperate and form (quality %)								Diameter * the length of blade part (mm)
		Cooperate and form (quality %)									Co	(Ti，W)C	TaC	NbC	ZrC	Cr ₃C ₂	VC	WC
		Superhard matrix (slotting cutter)	C-1	5	5	-	-	-	-		Co	(Ti，W)C	TaC	NbC	ZrC	Cr ₃C ₂	VC	WC	-	Middle coarse grain: all the other	6×13
C-2	6		C-1	5	5	-	-	-	-	-	1	0.5	-	-	-	Particulate: all the other	6×13		-	Middle coarse grain: all the other	6×13
C-2	6		C-3	6	-	1	-	1	0.5	-	1	0.5	-	-	-	Particulate: all the other	6×13	0.5	Particulate: all the other	6×13
C-4	8		C-3	6	-	1	-	1	0.5	-	-	-	-	0.5	0.5	Particulate: all the other	10×22	0.5	Particulate: all the other	6×13
C-4	8		C-5	9	25	10	1	-	-	-	-	-	-	0.5	0.5	Particulate: all the other	10×22	-	Middle coarse grain: all the other	10×22
C-6	10		C-5	9	25	10	1	-	-	-	-	-	-	1	-	Particulate: all the other	10×22	-	Middle coarse grain: all the other	10×22
C-6	10		C-7	12	17	9	1	-	-	-	-	-	-	1	-	Particulate: all the other	10×22	-	Middle coarse grain: all the other	20×45
C-8	16		C-7	12	17	9	1	-	-	-	10	5	10	-	-	Middle coarse grain: all the other	20×45	-	Middle coarse grain: all the other	20×45

[table 32]

Kind		Superhard matrix number	Lower layer [Al/Ti) the N layer]								Lubricity amorphous carbon class overlay film						Cutting long (m)
			Lower layer [Al/Ti) the N layer]								Lubricity amorphous carbon class overlay film							The highest amount of Al			The highest amount of Ti			The target interval of point-to-point transmission (μ m)	Target bed thickness (μ m)	Target is formed (atom %)				Target bed thickness (μ m)	(C N) is crystalline particle footpath (nm) to Ti
			Target is formed (atom %)			Target is formed (atom %)												The highest amount of Al			The highest amount of Ti
			Target is formed (atom %)			Target is formed (atom %)			Al	Ti	N	Ti	Al	N	W	Ti		N	C+ impurity
			The superhard slotting cutter of coating of the present invention	1	C-1	0.85	0.15	1.00	Al	Ti	N	Ti	Al	N	W	Ti		N	C+ impurity	0.80	0.20	1.00	0.09			1.5	20.0	20.0	10.0			All the other	1	25.4	117
2	C-2	0.70		1	C-1	0.85	0.15	1.00	0.30	1.00	0.90	0.10	1.00	0.06	3.0	10.0	15.0	13.5	All the other	0.80	0.20	1.00	0.09	3	23.6	1.5	20.0	20.0	10.0	143		All the other	1	25.4	117
2	C-2	0.70		3	C-3	0.95	0.05	1.00	0.30	1.00	0.90	0.10	1.00	0.06	3.0	10.0	15.0	13.5	All the other	0.70	0.30	1.00	0.02	3	23.6	2.0	5.0	5.0	1.0	143	All the other	2	18.8	129
4	C-4	0.85		3	C-3	0.95	0.05	1.00	0.35	1.00	0.95	0.05	1.00	0.01	4.0	5.0	5.0	0.5	All the other	0.70	0.30	1.00	0.02	4	32.5	2.0	5.0	5.0	1.0	68	All the other	2	18.8	129
4	C-4	0.85		5	C-5	0.90	0.10	1.00	0.35	1.00	0.95	0.05	1.00	0.01	4.0	5.0	5.0	0.5	All the other	0.85	0.15	1.00	0.05	4	32.5	2.0	10.0	10.0	5.0	68	All the other	2	24.1	53
6	C-6	0.80		5	C-5	0.90	0.10	1.00	0.20	1.00	0.65	0.35	1.00	0.01	3.0	20.0	20.0	18.0	All the other	0.85	0.15	1.00	0.05	3	39.1	2.0	10.0	10.0	5.0	64	All the other	2	24.1	53
6	C-6	0.80		7	C-7	0.75	0.25	1.00	0.20	1.00	0.65	0.35	1.00	0.01	3.0	20.0	20.0	18.0	All the other	0.70	0.30	1.00	0.03	3	39.1	5.0	15.0	15.0	10.0	64	All the other	4	24.6	148
8	C-8	0.90		7	C-7	0.75	0.25	1.00	0.10	1.00	0.90	0.10	1.00	0.07	5.0	10.0	10.0	2.5	All the other	0.70	0.30	1.00	0.03	2	16.5	5.0	15.0	15.0	10.0	140	All the other	4	24.6	148
8	C-8	0.90		9	C-1	0.95	0.05	1.00	0.10	1.00	0.90	0.10	1.00	0.07	5.0	10.0	10.0	2.5	All the other	0.70	0.30	1.00	0.02	2	16.5	2.0	10.0	0.5	10.0	140	All the other	5	7.9	144
10	C-4	0.90		9	C-1	0.95	0.05	1.00	0.10	1.00	0.65	0.15	1.00	0.05	2.0	40.0	4.0	30.0	All the other	0.70	0.30	1.00	0.02	4	13.6	2.0	10.0	0.5	10.0	65	All the other	5	7.9	144
10	C-4	0.90		11	C-7	0.75	0.25	1.00	0.10	1.00	0.65	0.15	1.00	0.05	2.0	40.0	4.0	30.0	All the other	0.70	0.30	1.00	0.03	4	13.6	5.0	10.0	30.0	25.0	65	All the other	6	38.6	108

[table 33]

Kind		Superhard matrix number	Lower layer [(Al/Ti) N layer]								Upper layer (noncrystalline carbon element lubricating film)							Cutting long (m)
			Lower layer [(Al/Ti) N layer]																The highest amount of Al			The highest amount of Ti			The target interval of point-to-point transmission (μ m)	Target bed thickness (μ m)	Target is formed (atom %)					Target bed thickness (μ m)	(Ti, Al) (C N) is crystalline particle footpath (nm)
			Target is formed (atom %)			Target is formed (atom %)													The highest amount of Al			The highest amount of Ti
			Target is formed (atom %)			Target is formed (atom %)			Al	Ti	N	Ti	Al	N	W	Ti	Al		N	C+ impurity
			The superhard slotting cutter of coating of the present invention	12	C-1	0.85	0.15	1.00	Al	Ti	N	Ti	Al	N	W	Ti	Al		N	C+ impurity	0.80	0.20	1.00	0.09			1.5	10.0	10.0	8.7	1.5			All the other	1	14.3	128
13	C-2	0.70		12	C-1	0.85	0.15	1.00	0.30	1.00	0.90	0.10	1.00	0.06	3.0	20.0	10.0	10.0	18.0	All the other	0.80	0.20	1.00	0.09	3	10.5	1.5	10.0	10.0	8.7	1.5	156		All the other	1	14.3	128
13	C-2	0.70		14	C-3	0.95	0.05	1.00	0.30	1.00	0.90	0.10	1.00	0.06	3.0	20.0	10.0	10.0	18.0	All the other	0.70	0.30	1.00	0.02	3	10.5	2.0	5.0	10.0	15.0	22.5	156	All the other	2	32.6	139
15	C-4	0.65		14	C-3	0.95	0.05	1.00	0.35	1.00	0.95	0.05	1.00	0.01	4.0	10.0	5.0	8.0	8.5	All the other	0.70	0.30	1.00	0.02	4	12.4	2.0	5.0	10.0	15.0	22.5	76	All the other	2	32.6	139
15	C-4	0.65		16	C-5	0.90	0.10	1.00	0.35	1.00	0.95	0.05	1.00	0.01	4.0	10.0	5.0	8.0	8.5	All the other	0.85	0.15	1.00	0.05	4	12.4	2.0	20.0	7.5	7.5	4.5	76	All the other	2	7.6	56
17	C-6	0.80		16	C-5	0.90	0.10	1.00	0.20	1.00	0.55	0.35	1.00	0.01	3.0	5.0	2.5	1.6	0.4	All the other	0.85	0.15	1.00	0.05	3	21.6	2.0	20.0	7.5	7.5	4.5	71	All the other	2	7.6	56
17	C-6	0.80		18	C-7	0.75	0.25	1.00	0.20	1.00	0.55	0.35	1.00	0.01	3.0	5.0	2.5	1.6	0.4	All the other	0.70	0.30	1.00	0.03	3	21.6	5.0	10.0	4.5	5.5	0.7	71	All the other	4	11.6	158
19	C-8	0.90		18	C-7	0.75	0.25	1.00	0.10	1.00	0.90	0.10	1.00	0.07	5.0	15.0	5.5	4.5	0.6	All the other	0.70	0.30	1.00	0.03	2	10.7	5.0	10.0	4.5	5.5	0.7	153	All the other	4	11.6	158

[table 34]

Kind		Superhard matrix number	Surface coating layer									The cutting ditch is long
			Surface coating layer										Lower layer [(Ti, Al) N layer]				Upper layer (amorphous carbon prime system lubricating layer)
			Target is formed (atomic ratio)			Target bed thickness (μ m)	Target is formed (atomic ratio)				Target bed thickness (μ m)		Lower layer [(Ti, Al) N layer]
			Target is formed (atomic ratio)				Target is formed (atomic ratio)						Ti	Al	N	W	Ti	N	C+ impurity
			Relatively coat superhard cutting blade	1	C-1		0.45	0.55	1.00	1.5			Ti	Al	N	W	Ti	N	C+ impurity	20	-	-	All the other	1	36m※
2	C-2	0.55		1	C-1	0.45	0.45	0.55	1.00	1.5	1.00	3	10	-	-	All the other	3	48m※		20	-	-	All the other	1	36m※
2	C-2	0.55		3	C-3	0.45	0.40	0.60	1.00	2	1.00	3	10	-	-	All the other	3	48m※	5	-	-	All the other	2	41m※
4	C-4	0.60		3	C-3	0.40	0.40	0.60	1.00	2	1.00	4	5	-	-	All the other	4	22m※	5	-	-	All the other	2	41m※
4	C-4	0.60		5	C-5	0.40	0.50	0.50	1.00	2	1.00	4	5	-	-	All the other	4	22m※	10	-	-	All the other	2	14m※
6	C-6	0.40		5	C-5	0.60	0.50	0.50	1.00	2	1.00	3	20	-	-	All the other	3	18m※	10	-	-	All the other	2	14m※
6	C-6	0.40		7	C-7	0.60	0.55	0.45	1.00	5	1.00	3	20	-	-	All the other	3	18m※	15	-	-	All the other	4	56m※
8	C-8	0.45		7	C-7	0.55	0.55	0.45	1.00	5	1.00	5	10	-	-	All the other	2	51m※	15	-	-	All the other	4	56m※

Embodiment 9

The diameter that utilization is made in the foregoing description 8 is 8mm (superhard matrix C-1～C-3 forms and uses), 13mm (superhard matrix C-4～C-6 forms and uses), and 26mm (superhard matrix C-7, C-8 form with) 3 kinds of pole sintered bodies, cut processing by these 3 kinds of pole sintered bodies by grinding, the diameter * length that produces groove formation portion respectively is respectively 4mm * 13mm (superhard matrix D-1～D-3), 8mm * 22mm (superhard matrix D-4～D-6), and 16mm * 45mm (superhard matrix D-7, D-8) size, and superhard matrix (drill bit) D-1～D-8 of WC base cemented carbide that all has 2 tooth shape shapes of torsion angle 30 degree.

Then, cutting blade to these superhard matrixes (drill bit) D-1～D-8 is implemented honing, carrying out ultrasonic wave in acetone cleans, under the dried state, be encased in equally by Fig. 4 A, in the evaporation coating device shown in Fig. 4 B, under the condition identical with the foregoing description 7, as the lower layer (hard layer) of surface coating layer and evaporation forms along the bed thickness direction alternately with equally by table 35, there is table 35 repeatedly in target interval shown in the table 36, the Al that target shown in the table 36 is formed is the highest to be contained a bit and Ti has a few the highest containing, and have from above-mentioned Al and state upwards a bit that Ti is the highest to be contained a bit the highest containing, state upwards a bit that Al is the highest to be contained a bit the highest containing from above-mentioned Ti, the composition varied configurations that Al and Ti amount change respectively continuously, and by table 35, (Al/Ti) N layer of the target bed thickness shown in the table 36, then the superhard matrix that above-mentioned lower layer is formed is encased in equally by Fig. 2 A, Fig. 2 B, or Fig. 3 A, in the evaporation coating device shown in Fig. 3 B, as its upper layer and evaporation forms equally by table 35, target shown in the table 36 is formed and the amorphous carbon class lubricating layer of target bed thickness, produces surface of the present invention as coating sintered carbide tools of the present invention thus respectively and coats superhard system drill bit (below be called coating drill bit of the present invention) 1～19.

In addition, under purpose relatively, honing is implemented on surface to above-mentioned superhard matrix (drill bit) D-1～D-8, carrying out ultrasonic wave in acetone cleans, under the dried state, be encased in same by in the evaporation coating device shown in Figure 6, under the condition identical with the foregoing description 7, evaporation forms and is made up of the target of table 37 expression equally and (the Ti of target bed thickness respectively, Al) N layer and amorphous carbon class lubricating layer be as the lower layer and the upper layer of surface coating layer, and the comparison surface that produces the coating sintered carbide tools that is equivalent in the past thus respectively coats superhard system drill bit (below be called relatively coat drill bit) 1～8.

Then, for the coating drill bit 1～19 of the invention described above and relatively coat the coating drill bit of the present invention 1～3,9,12～14 in the drill bit 1～8 and relatively coat drill bit 1～3, carry out

Cutting speed: 115m/min,

Feeding: 0.52mm/rev,

Hole depth: 6mm, condition under the high feeding perforate of the wet type high speed machining test (common cutting speed and feeding are 80m/min and 0.2mm/rev) of Al alloy; For the superhard drill bit 4～6,10,15～17 of coating of the present invention and relatively coat drill bit 4～6, carry out

Cutting speed: 110m/min,

Feeding: 0.57mm/rev,

Hole depth: 12mm, condition under the high feeding perforate of the wet type high speed machining test (common cutting speed and feeding are 80m/min and 0.25mm/rev) of Cu alloy; For coating drill bit 7,8,11,18,19 of the present invention and relatively coat drill bit 7,8, carry out

Cutting speed: 65m/min,

Feeding: 0.52mm/rev,

Hole depth: 20mm, condition under the high feeding perforate of the wet type high speed machining test (common cutting speed and feeding are 40m/min and 0.2mm/rev) of Ti alloy; Perforate when the flank wear width of all measuring front end cutting blade face in the high feeding perforate of which wet type high speed machining test (water-soluble cutting oil use) reaches 0.3mm adds number.Its measurement result is illustrated respectively in table 35～table 37.

[table 35]

Kind		Superhard matrix number	Lower layer [(Al/Ti) N layer]								Lubricity amorphous carbon class overlay film						Perforate adds number (hole)
			Lower layer [(Al/Ti) N layer]								Lubricity amorphous carbon class overlay film							The highest amount of Al			The highest amount of Ti			The target interval of point-to-point transmission (μ m)	Target bed thickness (μ m)	Target is formed (atom %)				Target bed thickness (μ m)	(C N) is crystalline particle footpath (nm) to Ti
			Target is formed (atom %)			Target is formed (atom %)												The highest amount of Al			The highest amount of Ti
			Target is formed (atom %)			Target is formed (atom %)			Al	Ti	N	Ti	Al	N	W	Ti		N	C+ impurity
			Coating Superhard Drill of the present invention	1	D-1	0.75	0.15	1.00	Al	Ti	N	Ti	Al	N	W	Ti		N	C+ impurity	0.75	0.15	1.00	0.10			5.0	5.0	5.0	0.5			All the other	5.0	14.9	10305
2	D-2	0.90		1	D-1	0.75	0.15	1.00	0.05	1.00	0.70	0.25	1.00	0.04	4.0	15.0	15.0	7.5	All the other	0.75	0.15	1.00	0.10	4.0	9.8	5.0	5.0	5.0	0.5	9764		All the other	5.0	14.9	10305
2	D-2	0.90		3	D-3	0.65	0.25	1.00	0.05	1.00	0.70	0.25	1.00	0.04	4.0	15.0	15.0	7.5	All the other	0.80	0.05	1.00	0.01	4.0	9.8	3.0	20.0	20.0	18.0	9764	All the other	3.0	30.2	8926
4	D-4	0.75		3	D-3	0.65	0.25	1.00	0.20	1.00	0.75	0.20	1.00	0.03	7.0	5.0	20.0	14.0	All the other	0.80	0.05	1.00	0.01	4.0	23.8	3.0	20.0	20.0	18.0	5839	All the other	3.0	30.2	8926
4	D-4	0.75		5	D-5	0.80	0.10	1.00	0.20	1.00	0.75	0.20	1.00	0.03	7.0	5.0	20.0	14.0	All the other	0.65	0.25	1.00	0.06	4.0	23.8	6.0	10.0	15.0	4.5	5839	All the other	3.0	14.2	5423
6	D-6	0.80		5	D-5	0.80	0.10	1.00	0.05	1.00	0.75	0.10	1.00	0.09	5.0	15.0	10.0	0.1	All the other	0.65	0.25	1.00	0.06	3.0	17.4	6.0	10.0	15.0	4.5	5289	All the other	3.0	14.2	5423
6	D-6	0.80		7	D-7	0.80	0.10	1.00	0.05	1.00	0.75	0.10	1.00	0.09	5.0	15.0	10.0	0.1	All the other	0.65	0.25	1.00	0.02	3.0	17.4	5.0	10.0	15.0	10.5	5289	All the other	3.0	17.9	3028
8	D-8	0.60		7	D-7	0.80	0.10	1.00	0.25	1.00	0.90	0.05	1.00	0.07	7.0	20.0	5.0	1.5	All the other	0.65	0.25	1.00	0.02	5.0	7.6	5.0	10.0	15.0	10.5	3304	All the other	3.0	17.9	3028
8	D-8	0.60		9	D-2	0.95	0.05	1.00	0.25	1.00	0.90	0.05	1.00	0.07	7.0	20.0	5.0	1.5	All the other	0.70	0.30	1.00	0.02	5.0	7.6	2.0	10.0	0.5	10.0	3304	All the other	5	8.1	8877
10	0-5	0.80		9	D-2	0.95	0.05	1.00	0.10	1.00	0.85	0.15	1.00	0.05	2.0	40.0	4.0	30.0	All the other	0.70	0.30	1.00	0.02	4	14.6	2.0	10.0	0.5	10.0	5055	All the other	5	8.1	8877
10	0-5	0.80		11	D-8	0.75	0.25	1.00	0.10	1.00	0.85	0.15	1.00	0.05	2.0	40.0	4.0	30.0	All the other	0.70	0.30	1.00	0.03	4	14.6	5.0	10.0	30.0	25.0	5055	All the other	6	31.6	3175

[table 36]

Kind		Superhard matrix number	Lower layer [(Al/Ti) N layer]								Lubricity amorphous carbon class overlay film						(Ti, Al) (C N) is crystalline particle footpath (nm)	Perforate adds number (hole)
			Lower layer [(Al/Ti) N layer]								Lubricity amorphous carbon class overlay film								The highest amount of Al			The highest amount of Ti			The target interval of point-to-point transmission (μ m)	Target bed thickness (μ m)	Target is formed (atom %)					Target bed thickness (μ m)
			Target is formed (atom %)			Target is formed (atom %)													The highest amount of Al			The highest amount of Ti
			Target is formed (atom %)			Target is formed (atom %)			Al	Ti	N	Ti	Al	N	W	Ti			Al	N	C+ impurity
			Coating Superhard Drill of the present invention	12	D-1	0.75	0.15	1.00	Al	Ti	N	Ti	Al	N	W	Ti			Al	N	C+ impurity	0.75	0.15	1.00			0.10	5.0	5.0	10.0	15.0		22.5	All the other	5.0	13.8	10698
13	D-2	0.90		12	D-1	0.75	0.15	1.00	0.05	1.00	0.70	0.25	1.00	0.04	4.0	10.0	10.0	10.0	14.0	All the other	4.0	0.75	0.15	1.00	10.5	10045	0.10	5.0	5.0	10.0	15.0		22.5	All the other	5.0	13.8	10698
13	D-2	0.90		14	D-3	0.65	0.25	1.00	0.05	1.00	0.70	0.25	1.00	0.04	4.0	10.0	10.0	10.0	14.0	All the other	4.0	0.60	0.05	1.00	10.5	10045	0.01	3.0	15.0	10.0	6.7	8.3	All the other	3.0	7.1	9204
15	D-4	0.75		14	D-3	0.65	0.25	1.00	0.20	1.00	0.75	0.20	1.00	0.03	7.0	10.0	5.0	8.0	3.9	All the other	4.0	0.60	0.05	1.00	24.8	5073	0.01	3.0	15.0	10.0	6.7	8.3	All the other	3.0	7.1	9204
15	D-4	0.75		16	d-5	0.80	0.10	1.00	0.20	1.00	0.75	0.20	1.00	0.03	7.0	10.0	5.0	8.0	3.9	All the other	4.0	0.65	0.25	1.00	24.8	5073	0.06	5.0	15.0	7.5	7.5	9.0	All the other	3.0	21.6	5632
17	D-6	O.80		16	d-5	0.80	0.10	1.00	0.05	1.00	0.75	0.10	1.00	0.08	5.0	20.0	2.5	1.6	0.4	All the other	3.0	0.65	0.25	1.00	18.3	5496	0.06	5.0	15.0	7.5	7.5	9.0	All the other	3.0	21.6	5632
17	D-6	O.80		18	D-7	0.80	0.10	1.00	0.05	1.00	0.75	0.10	1.00	0.08	5.0	20.0	2.5	1.6	0.4	All the other	3.0	0.55	0.25	1.00	18.3	5496	0.02	5.0	15.0	4.5	5.5	4.0	All the other	3.0	10.2	3140
19	D-8	0.80		18	D-7	0.80	0.10	1.00	0.25	1.00	0.90	0.05	1.00	0.07	7.0	10.0	5.5	4.5	7.0	All the other	5.0	0.55	0.25	1.00	32.4	3429	0.02	5.0	15.0	4.5	5.5	4.0	All the other	3.0	10.2	3140

[table 37]

Kind		Superhard matrix number	Surface coating layer									Perforate adds number
			Surface coating layer										Lower layer [(Ti, Al) N layer]				Upper layer (amorphous carbon prime system lubricating layer)
			Target is formed (atomic ratio)			Target bed thickness (μ m)	Target is formed (atomic ratio)				Target bed thickness (μ m)		Lower layer [(Ti, Al) N layer]
			Target is formed (atomic ratio)				Target is formed (atomic ratio)						Ti	Al	N	W	Ti	N	C+ impurity
			Relatively coat superhard cutting blade	1	D-1		0.55	0.45	1.00	5			Ti	Al	N	W	Ti	N	C+ impurity	5	-	-	All the other	5	4122 hole ※
2	D-2	0.45		1	D-1	0.55	0.55	0.45	1.00	5	1.00	4	15	-	-	All the other	4	4081 hole ※		5	-	-	All the other	5	4122 hole ※
2	D-2	0.45		3	D-3	0.55	0.50	0.50	1.00	3	1.00	4	15	-	-	All the other	4	4081 hole ※	20	-	-	All the other	3	3659 hole ※
4	D-4	0.60		3	D-3	0.40	0.50	0.50	1.00	3	1.00	7	5	-	-	All the other	4	2336 hole ※	20	-	-	All the other	3	3659 hole ※
4	D-4	0.60		5	D-5	0.40	0.50	0.50	1.00	6	1.00	7	5	-	-	All the other	4	2336 hole ※	10	-	-	All the other	3	2223 hole ※
6	D-6	0.40		5	D-5	0.60	0.50	0.50	1.00	6	1.00	5	15	-	-	All the other	3	2115 hole ※	10	-	-	All the other	3	2223 hole ※
6	D-6	0.40		7	D-7	0.60	0.55	0.45	1.00	5	1.00	5	15	-	-	All the other	3	2115 hole ※	10	-	-	All the other	3	1211 hole ※
8	D-8	0.45		7	D-7	0.55	0.55	0.45	1.00	5	1.00	7	20	-	-	All the other	5	1359 hole ※	10	-	-	All the other	3	1211 hole ※

For constituting as the superhard blade 1～42 of coating of the present invention that has obtained this result's coating sintered carbide tools of the present invention, the superhard slotting cutter 1～19 of coating of the present invention, and the superhard drill bit 1～19 of coating of the present invention, and the superhard blade 1～16 of relatively coating of conduct coating sintered carbide tools in the past, relatively coat superhard slotting cutter 1～8, reach (Al/Ti) N layer and the (Ti of the lower layer of the surface coating layer that relatively coats superhard drill bit 1～8, Al) N layer, utilize the amount of Auger spectroscopy apparatus along bed thickness orientation measurement Al and Ti composition, utilize scanning electron microscope to measure its bed thickness, then in (Al/Ti) N layer of the coating sintered carbide tools of the invention described above, confirm respectively with the composition substantially the same and have repeatedly alternately at interval that Al is the highest to be contained a bit and Ti has a few the highest containing with desired value, and have from above-mentioned Al and have a few the highest containing to Ti the highest containing a bit, state upwards a bit that Al is the highest to be contained a bit the highest containing from above-mentioned Ti, the composition varied configurations that Al and Ti amount change respectively continuously, and then average bed thickness also demonstrates the value substantially the same with the target bed thickness.On the other hand, above-mentioned coating sintered carbide tools in the past (Ti, Al) in the N layer, though shown with target form substantially the same composition and with the substantially the same average bed thickness of target bed thickness, but can not see along the composition of thickness direction changing that expression spreads all over whole layer and is the composition of homogeneous.

And then, also utilize the Auger spectroscopy apparatus to measure its composition for the amorphous carbon class lubricating layer that constitutes its upper layer, utilize scanning electron microscope to measure its bed thickness, all demonstrate with target and form and substantially the same composition and the average bed thickness (mean values at 5 places, cross section) of target bed thickness, and, utilize the infiltration type electron microscope observation its when organizing, the coating sintered carbide tools of the invention described above demonstrates the Ti (C that is distributed with crystalline in the substrate of the carbon class amorphous body that contains the W composition like that shown in Figure 1A, N) tissue of compounds particulate, on the other hand, above-mentioned coating sintered carbide tools in the past demonstrates the single tissue that constitutes mutually by carbon class amorphous body.

By the result shown in table 28～table 37 as can be known, even coating sintered carbide tools of the present invention is under the situation of the high speed heavy cut of the nonferrous material that all is accompanied by very high heating and high mechanical shock, because (Al/Ti) N layer as the lower layer of surface coating layer has good high-temperature hardness and hear resistance, also has good high-temperature intensity, and the amorphous carbon class lubricating layer as its upper layer has the Ti (C that is distributed with crystalline in the substrate of the carbon class amorphous body that contains the W composition, N) tissue of compounds particulate, possesses good high-temperature intensity, so in surface coating layer, can not produce chip, can bring into play advantages of good abrasion for a long time, relative therewith, lower layer at surface coating layer is (Ti, Al) N, in the coating sintered carbide tools in the past that its upper layer is made of the amorphous carbon class lubricating layer that has by the single tissue that constitutes mutually of carbon class amorphous body, under the high speed heavy cut processing conditions of nonferrous material, the wearing and tearing development of surface coating layer is all very fast, and also produce chip, so will reach service life in the short period of time.

Preferred embodiment of the present invention more than has been described, but the present invention is not limited to these embodiment.In the scope that does not break away from purport of the present invention, can carry out adding, omit, replacing and other changes of structure.The present invention is not limited by above-mentioned explanation, and the scope of the claims that only added limits.

Industrial applicibility

As mentioned above, certainly no problem in the machining of coating sintered carbide tools of the present invention under common condition, especially in the situation of carrying out the various machining that are cut material with the high-speed cutting condition, also can bring into play good mar proof, so can tackle fully contentedly the Labor-saving of machining and energy-saving, also have cost degradation.

In addition, coating sintered carbide tools of the present invention is especially certainly no problem in the machining under the common machining condition of various nonferrous materials etc., in the high speed heavy cut processing that is accompanied by high heating and mechanical shock, also can bring into play good mar proof especially, demonstrate for a long time good cutting ability, thus can tackle fully contentedly the high performance of cutting apparatus and automation and machining Labor-saving and energy-saving, also have cost degradation.

Claims

1. surface-coated cutting tool possesses:

Hard substrate;

Lower layer is formed on the surface of above-mentioned hard substrate, contains by at least a kind of complex chemical compound that constitutes among at least a kind among Ti, the Al and N, the C, and has the average bed thickness of 0.1～3 μ m;

Upper layer is formed on the above-mentioned lower layer, demonstrates in the substrate of the carbon class amorphous body that contains W and is distributed with crystalline Ti (C; N) compounds particulate or crystalline (Ti; Al) (C, the N) tissue of compounds particulate, and have the average bed thickness of 1～13 μ m.

2. surface-coated cutting tool as claimed in claim 1, above-mentioned upper layer by contain W:5～20 atom %, Ti:5～30 atom %, N:0.5～30 atom %, all the other have the amorphous carbon class lubricating layer of forming that is made of C and unavoidable impurities and constitute.

3. surface-coated cutting tool as claimed in claim 1, above-mentioned upper layer by contain W:5～20 atom %, Ti:5～20 atom %, N:0.5～18 atom %, all the other have the amorphous carbon class lubricating layer of forming that is made of C and unavoidable impurities and constitute.

4. surface-coated cutting tool as claimed in claim 1, above-mentioned upper layer by contain W:10～40 atom %, Ti:0.5～4 atom %, N:10～30 atom %, all the other have the amorphous carbon class lubricating layer of forming that is made of C and unavoidable impurities and constitute.

5. surface-coated cutting tool as claimed in claim 1, above-mentioned upper layer by contain W:5～20 atom %, Ti:2.5～10 atom %, N:0.4～22.5 atom %, Al:1.6～15 atom %, all the other have the amorphous carbon class lubricating layer of forming that is made of C and unavoidable impurities and constitute.

6. surface-coated cutting tool as claimed in claim 1; above-mentioned upper layer contains carbon class amorphous body; crystalline Ti (C in the substrate of above-mentioned carbon class amorphous body; N) compounds particulate or crystalline (Ti; Al) (C, N) particle mean size of compounds particulate is below the 40nm when the observation by the infiltration type electron microscope.

7. surface-coated cutting tool as claimed in claim 1; above-mentioned upper layer contains carbon class amorphous body; crystalline Ti (C in the substrate of above-mentioned carbon class amorphous body; N) compounds particulate or crystalline (Ti; Al) (C, N) particle mean size of compounds particulate is below the 20nm when the observation by the infiltration type electron microscope.

8. surface-coated cutting tool as claimed in claim 1; above-mentioned upper layer contains carbon class amorphous body; crystalline Ti (C in the substrate of above-mentioned carbon class amorphous body; N) compounds particulate or crystalline (Ti; Al) (C, N) particle mean size of compounds particulate is below the 10nm when the observation by the infiltration type electron microscope.

9. surface-coated cutting tool as claimed in claim 1, above-mentioned lower layer is made of Ti layer and at least a of TiCN layer.

10. surface-coated cutting tool as claimed in claim 1, above-mentioned lower layer is by satisfying composition formula (Ti _1-X, Al _X) Ti of N (wherein X is an atomic ratio, expression 0.40～0.60) and the complex nitride layer of Al constitute.

11. surface-coated cutting tool as claimed in claim 1, above-mentioned lower layer by have along film thickness direction separate predetermined distance and alternately exist repeatedly Al the highest contain a bit and Ti the highest contain a bit and from above-mentioned Al the highest contain a bit to Ti the highlyest contain a bit, from above-mentioned Ti the highest contain state upwards a bit that Al the highlyest contains a bit, Al and Ti amount respectively continuously the CONCENTRATION DISTRIBUTION of forming of variation construct and have above-mentioned Al and satisfy composition formula (Al a little the highest containing _1-X) N (wherein X is an atomic ratio, expression 0.05～0.35), above-mentioned Ti satisfy composition formula (Ti a little the highest containing _1-X, Al _X) N (wherein X is an atomic ratio, expression 0.05～0.35) and the adjacent the highest complex nitride layer formation that contains the Ti and the Al of the composition varied configurations that is spaced apart 0.01～0.1 μ m a bit of Al.

12. surface-coated cutting tool as claimed in claim 1, above-mentioned hard substrate is made of the tungsten carbide-base superhard alloy.

13. surface-coated cutting tool as claimed in claim 1, above-mentioned hard substrate is made of the titanium carbide base cermet.

14. the manufacture method of a surface-coated cutting tool comprises:

Prepare the stage of hard substrate;

Utilize magnetic control sputtering device, utilize Ti target or Ti-Al alloy target as negative electrode, in the reacting gas environment that the mist by decomposition gas, nitrogen and the Ar of the mist of nitrogen and Ar or hydrocarbon constitutes and in magnetic field, will contain by at least a kind of complex chemical compound that constitutes among at least a kind among Ti, the Al and N, the C and lower layer with average bed thickness of 0.1～3 μ m and be formed on the lip-deep stage of above-mentioned hard substrate;

Utilize above-mentioned magnetic control sputtering device; utilize tungsten carbide target and Ti target or Ti-Al alloy target as negative electrode; in the reacting gas environment that the mist by decomposition gas, nitrogen and the Ar of hydrocarbon constitutes and in magnetic field; be distributed with crystalline Ti (C with demonstrating in the substrate of the carbon class amorphous body that contains W; N) compounds particulate or crystalline (Ti; Al) (C, N) tissue of compounds particulate and upper layer with average bed thickness of 1～13 μ m are formed on the stage on the above-mentioned lower layer.