CN1898787A - Ic chip mounting body manufacturing method and manufacturing device - Google Patents

Ic chip mounting body manufacturing method and manufacturing device Download PDF

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Publication number
CN1898787A
CN1898787A CNA2004800385579A CN200480038557A CN1898787A CN 1898787 A CN1898787 A CN 1898787A CN A2004800385579 A CNA2004800385579 A CN A2004800385579A CN 200480038557 A CN200480038557 A CN 200480038557A CN 1898787 A CN1898787 A CN 1898787A
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CN
China
Prior art keywords
chip
mentioned
film substrate
mounting body
carrying
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Granted
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CNA2004800385579A
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Chinese (zh)
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CN100447969C (en
Inventor
井上太一
有马纯博
长野和孝
森田将司
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Shinko Electric Co Ltd
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Shinko Electric Co Ltd
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Publication of CN1898787A publication Critical patent/CN1898787A/en
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Publication of CN100447969C publication Critical patent/CN100447969C/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits

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  • Supply And Installment Of Electrical Components (AREA)
  • Credit Cards Or The Like (AREA)

Abstract

The invention relates to a method and an apparatus for manufacturing an IC chip mounted object. A film substrate (3) on whose surface an antenna circuit is formed at a predetermined interval is conveyed at a constant speed. An IC chip is mounted, at the predetermined interval, on the film substrate (3) so as to be connected to the antenna circuit while moving the IC chip along the film substrate (3).

Description

The manufacture method of IC chip mounting body and manufacturing installation
Technical field
The present invention relates to the manufacture method and the manufacturing installation of IC chip mounting body.
Background technology
Recently, (Radio Frequency Identification: wave mode identification) the IC chip mounting body of card comes out to be called as RFID.Its inside has memory and small size antenna, by not contacting the transmission of the information of carrying out with reading in antenna, thereby to the necessary information of memory record, at short notice communication equipments such as read write line is carried out recording of information, rewrites and reads as required.
Manufacturing installation as such IC chip mounting bodies such as rfid card, for example propose to have such scheme, carry the substrate that one side has stickiness by conveyer belt, has the bonding circuit wafer that is formed with antenna circuit and IC chip on the bonding plane of stickiness at this, bonding again one side has the coating sheet of stickiness, and makes IC chip mounting body (for example with reference to patent documentation 1).In addition, also proposing has two kinds of such schemes etc., promptly, scribble the substrate of bonding agent by conveyer belt carrying one side, this there is bonding circuit wafer same as described above on the bonding plane of bonding agent,, thereby makes the IC chip mounting body again by bonding coating sheet on the adhesive bonds; By the film substrate that is formed with antenna circuit on the conveyer belt carrying one side, be connected with this antenna circuit and carry the IC chip, thereby make IC chip mounting body (for example with reference to patent documentation 2,3).
Patent documentation 1: the spy opens the 2003-6596 communique
Patent documentation 2: the spy opens the 2003-58848 communique
Patent documentation 3: the spy opens the 2003-168099 communique
But, in the manufacturing installation of above-mentioned existing IC chip mounting body, have following problem.That is, in the manufacturing installation of existing IC chip mounting body, when on film substrate, carrying the IC chip, temporarily stop substrate or the film substrate can bonding circuit wafer or IC chip.Therefore, the manufacturing speed of raising IC chip mounting body is difficult.
Summary of the invention
The present invention is in view of the above problems and research and development, its purpose be to provide a kind of can be with the manufacture method of the IC chip mounting body of making the IC chip mounting body at a high speed and the manufacturing installation of IC chip mounting body.
The present invention adopts following scheme in order to solve above-mentioned problem.Promptly, the manufacture method of IC chip mounting body of the present invention, with constant speed will be on one side the certain intervals film substrate that is formed with antenna circuit carry, when the IC chip is moved along above-mentioned film substrate, and carry on above-mentioned film substrate and be connected with above-mentioned antenna circuit with above-mentioned certain intervals.
The manufacturing installation of IC chip mounting body of the present invention has: trucking department, and it is formed with the film substrate of antenna circuit at certain intervals on one side with the constant speed carrying; IC chip equipped section, it carries the IC chip on above-mentioned film substrate, above-mentioned IC chip equipped section has: synchronous roller portion, and it is according to by the above-mentioned certain intervals of the above-mentioned film substrate of carrying with constant speed above-mentioned IC chip being moved and it is carried on this film substrate along above-mentioned film substrate; IC chip supply unit, it provides above-mentioned IC chip to above-mentioned synchronous roller portion.
In the manufacture method of the IC chip mounting body of such scheme and the manufacturing installation of IC chip mounting body, when IC chip equipped section was carried the IC chip on the assigned position of the antenna circuit on being formed on film substrate, roller portion was to move and to carry the IC chip with the synchronous speed of the transporting velocity of film substrate synchronously.Therefore, need not temporarily stop film substrate and carry the IC chip, so can improve the manufacturing efficient of IC chip mounting body.
In addition, the quantity of the IC chip mounting body that the unit interval can make increases, and the cost of IC chip mounting body can reduce.
And then, film substrate there is not bad influence with constant speed carrying film substrate.
In addition, in the manufacture method of IC chip mounting body of the present invention, preferably, take above-mentioned IC chip, calculate the correction of revising the position of carrying above-mentioned IC chip, revise the position of carrying above-mentioned IC chip according to the image of shooting.
Because in the manufacture method of the IC chip mounting body of this scheme, by taking above-mentioned IC chip, revise the position of carrying above-mentioned IC chip according to the image of shooting, thereby the IC chip can be carried on the loading position of regulation, so the qualification rate of the IC chip mounting body that makes is improved.
The manufacturing installation of IC chip mounting body of the present invention, preferably, above-mentioned IC chip equipped section has a plurality of above-mentioned synchronous roller portion.
Because the manufacturing installation of the IC chip mounting body of this scheme is from the antenna circuit lift-launch IC chip of a plurality of synchronous rollers to film substrate, so can shorten the lift-launch interval of IC chip.Therefore, can make the IC chip mounting body more efficiently.
In addition, the manufacturing installation of IC chip mounting body of the present invention, preferably, in the above-mentioned a plurality of synchronous roller portion at least one specially as standby, its be specifically designed to not by other synchronous roller portion carry on the above-mentioned antenna circuit of above-mentioned IC chip and carry above-mentioned IC chip.
Because in the manufacturing installation of the IC of this scheme chip mounting body, other synchronous rollers can not carry the IC chip under the situation on the antenna circuit of film substrate, standby synchronous roller carries the IC chip.Thus, suppress not install the appearance of the IC chip mounting body of IC chip, improved the manufacturing qualification rate of IC chip mounting body.
In addition, the manufacturing installation of IC chip mounting body of the present invention, have: the trucking department of carrying film substrate and the IC chip carried IC chip equipped section on above-mentioned film substrate, above-mentioned trucking department has surface bearing portion, this surface bearing portion, whole front and back at the loading position that above-mentioned IC chip is carried by above-mentioned IC chip equipped section, to support in the face of above-mentioned film substrate, above-mentioned IC chip equipped section has: synchronous roller portion, and it moves above-mentioned IC chip and it is carried on this film substrate along above-mentioned film substrate with the speed identical with above-mentioned film substrate; IC chip supply unit, it provides above-mentioned IC chip to above-mentioned synchronous roller portion.
According to this scheme, when the IC chip section was carried the IC chip on film substrate, roller portion cooperated the transporting velocity of film substrate and the limit is moved IC chip limit it is carried synchronously.Thus, can temporarily not stop film substrate and carry the IC chip, so can improve the manufacturing efficient of IC chip mounting body.At this, when IC chip loading position carried the IC chip, film substrate was vibrated thereby can suppress film substrate by the supporting of surface bearing portion.Thus, can make the loading position of IC chip stable, improve qualification rate.
In addition, the number of the IC chip mounting body that the unit interval can make increases, and can reduce the cost of IC chip mounting body.
In addition, the manufacturing installation of IC chip mounting body of the present invention, preferred above-mentioned surface bearing portion has the adsorbing mechanism of the above-mentioned film substrate of absorption.
According to this scheme, at the front and back of IC chip loading position adsorbent thin film substrate, so the loading position of IC chip is more stable.
In addition, the manufacturing installation of IC chip mounting body of the present invention, it is characterized in that, have: the trucking department of carrying film substrate and the IC chip carried IC chip equipped section on above-mentioned film substrate, above-mentioned IC chip equipped section has: synchronous roller portion, and it moves above-mentioned IC chip and it is carried on this film substrate along above-mentioned film substrate with identical speed with above-mentioned film substrate; IC chip supply unit, it provides above-mentioned IC chip to above-mentioned synchronous roller portion, above-mentioned synchronous roller portion has that the moving axis that rotates rotates and above-mentioned IC chip is carried roller on above-mentioned film substrate, is formed with protuberance on the side face of above-mentioned roller, and this protuberance keeps above-mentioned IC chip at its leading section.
According to this scheme, with above-mentioned the same, can temporarily do not stop film substrate and carry the IC chip, so can improve the manufacturing efficient of IC chip mounting body.At this, synchronously roller portion is arranged in the roller portion with the protuberance of film substrate butt when the moving axis that rotates rotates, thus can roller be moved up and down and with the lift-launch of IC chip on film substrate.Thus, the loading position of IC chip is stable.
In a word, according to the manufacture method of IC chip mounting body of the present invention and the manufacturing installation of IC chip mounting body, when on being formed with the film substrate of antenna circuit, carrying the IC chip, need not temporarily stop film substrate and carry the IC chip, so can improve the manufacturing efficient of IC chip mounting body.Therefore, can reduce the cost of IC chip mounting body.
Description of drawings
Fig. 1 is the plane graph of the ID mark ( グ) of the expression first embodiment of the present invention;
Fig. 2 is the profile of the ID mark of presentation graphs 1;
Fig. 3 is the plane graph of the film substrate of presentation graphs 1;
Fig. 4 is the skeleton diagram of manufacturing installation of the IC chip mounting body of the expression first embodiment of the present invention;
Fig. 5 is the stereogram of the IC chip supply unit of presentation graphs 4;
Fig. 6 is the stereogram of the rotation head of presentation graphs 4;
Fig. 7 is the general positive map of the stop position of chewing assembly under the index of the rotation head of presentation graphs 6 moves;
Fig. 8 is the stereogram of the synchronous roller portion of presentation graphs 4;
Fig. 9 is the summary section of the stop position of the adsorption hole under the index action of synchronous roller portion of presentation graphs 8;
Figure 10 is the block diagram of the control part of presentation graphs 4;
Figure 11 is the flow chart of manufacturing sequence of the ID mark of the expression first embodiment of the present invention;
Figure 12 is the lift-launch flow chart in proper order of the IC chip of expression Figure 11;
Figure 13 is the general positive map of the synchronous roller of the expression second embodiment of the present invention;
Figure 14 is an expression general positive map beyond the second embodiment of the present invention, applicable surface bearing roller of the present invention portion;
Figure 15 is expression general positive map beyond the second embodiment of the present invention, applicable surface bearing roller of the present invention portion equally;
Figure 16 is the stereogram of the synchronous roller portion of the expression third embodiment of the present invention;
Figure 17 is the general positive map of the stop position of chewing assembly under the index of the rotation head of expression Figure 16 moves.
Description of reference numerals
The manufacturing installation of 1IC chip mounting body;
2ID mark (IC chip mounting body);
3 film substrates;
5 coating films;
The 4IC chip;
11 film substrate incorporating sections (trucking department);
13IC chip equipped section;
15 coating film bonding parts;
16 goods coiling portions (trucking department);
The 25CCD video camera;
26IC chip supply unit;
28,130 synchronous roller portions;
71 engagement roller (trucking department);
100,110,120 surface bearing roller portions (surface bearing portion);
101a adsorption hole (adsorbing mechanism);
131 synchronous rollers;
The 131a protuberance;
132 help rolls (trucking department).
Embodiment
Below, with reference to Fig. 1~Figure 10 first embodiment of the manufacturing installation of IC chip mounting body of the present invention is described.
The manufacturing installation 1 of the IC chip mounting body in the present embodiment is to make as the IC chip mounting body manufacturing installation of ID mark 2 for example.
This ID mark 2, as illustrated in fig. 1 and 2, IC chip 4 and the coating sheet 5 on the assigned position on this antenna circuit 3a constitutes by film substrate 3 that forms antenna circuit 3a at assigned position and lift-launch.
Antenna circuit 3a is formed on the film substrate 3 in advance by printing technology or etching etc., as shown in Figure 3, uniformly-spaced is arranged on continuously on the film substrate 3.
The bead 4b that is for example formed by copper or gold that IC chip 4 is formed for being connected with antenna circuit 3a on the 4a of its back side is connected with antenna circuit 3a via the bonding agent 6 that is for example formed by anisotropic conductive cream.
Coating sheet 5, one side has a cementability, cover film substrate 3 and IC chip 4 and dispose.
The manufacturing installation 1 of this IC chip mounting body as shown in Figure 4, comprising: film substrate incorporating section 11, and it takes in film substrate 3; Adhesive printing portion 12 is to the position adhesive-applying 6 of film substrate 3 lift-launch IC chips 4; IC chip equipped section 13 is at the assigned position lift-launch IC of film substrate 3 chip 4; Heater 14, it makes bonding agent 6 dryings; Coating sheet bonding part 15, it is bonded in the surface of the film substrate 3 that is equipped with IC chip 4; Goods coiling portion 16, its film substrate 3 that will be bonded with coating sheet 5 is reeled; Control part 17, it controls above-mentioned each parts.
The roller 21 of film substrate shown in Figure 33 is taken in film substrate incorporating section 11, and Be Controlled portion 17 controls simultaneously make film substrate 3 be constant speed and constant-tension.In addition, form the structure that the film substrate 3 send from film substrate incorporating section 11 is carried continuously towards adhesive printing portion 12.
Adhesive printing portion 12 has ccd video camera 22 and bonding agent 6 is coated in Printing Department 23 on the assigned position of film substrate 3.The position of adhesive-applying 6 is confirmed by ccd video camera 22, by control part 17 controls.In addition, form film substrate 3 that this adhesive printing portion 12 sends towards IC chip equipped section 13 by the along continuous straight runs structure of carrying continuously.
IC chip equipped section 13 has four groups of arrangements of terminals 25 that IC chip 4 is carried on the film substrate 3 that is handled upside down.
This arrangements of terminal 25 comprises Fig. 5~IC chip supply unit 26, rotation head 27 and synchronous roller portion 28 shown in Figure 9.
IC chip supply unit 26 as shown in Figure 5, comprising: and the bowl tube (ボ ウ Le: bowl) 31, it takes in IC chip 4; Linear feeding device 32, it carries IC chip 4 in a certain direction with certain speed; Return to glassware (diagram slightly), it gives bowl tube 31 with IC chip 4 from 32 carryings of linear feeding device; Vibratory driver (diagram slightly), it is to bowl tube 31, linear feeding device 32 and return to glassware and vibrate; Ccd video camera 34,35, they are two ccd video cameras taking IC chip 4.For example use electric and magnetic oscillation as the method for vibrating.
Bowl tube 31 perisporium within it is formed with spiral carrying road 36, and the IC chip that is contained 4 is carried to the carrying road 37 of linear feeding device 32 with certain speed on carrying road 36 by vibration.
Linear feeding device 32 will be carried to the front end on carrying road 36 by the IC chip 4 of bowl tube 31 carryings by vibration equally.
Two ccd video cameras 34,35 are configured in the substantial middle and the front end on the carrying road 37 of linear feeding device 32 respectively, and the sub image signal supplementary biography of shooting is given control part 17.
Air blast is configured on the carrying road 37 between ccd video camera 34 and the ccd video camera 35, and control part 17 judges that this IC chip 4 is discharged to and returns to glassware under the situation of IC chip 4 for table (bead 4b down) that ccd video cameras 34 take.
Return to glassware and form the structure that will be discharged to bowl tube 31 by the IC chip 4 that air blast is discharged.
Rotation head 27 as shown in Figure 6, has: drive motor 41, and it rotates disc plate 42; Disc plate 42, it is configured in below the drive motor 41, can be that center of rotation is rotated with the central shaft of drive motor 41; Chew assembly 43 for four, the week that uniformly-spaced is configured in disc plate 42 makes progress; A pair of Z shaft assembly 44, the side of drive motor 41 is provided with relatively.
Disc plate 42 is for example formed by aluminium, be configured to can be by drive motor 41 be that center of rotation is rotated with the central shaft of drive motor 41.In addition, on circumferentially, uniformly-spaced form four through hole 42a on the disc plate 42, dispose and chew assembly 43.
Chew assembly 43 and have the post portion 46 of chewing main body 45 and movably being provided with on perpendicular to the direction of disc plate 42 of general cylindrical shape shape.
Post portion 46 front ends are provided with the adsorption section 47 of absorption IC chip 4, and cardinal extremity is provided with the disc plate 48 that engages with the holding section 53 of Z shaft assembly 44 described later.
This is chewed in the assembly 43, and adsorption section 47 when disc plate 42 is rotated, is seen from above to be configured in the front end on the carrying road 37 of linear feeding device 32 to overlap, and with position that the adsorption hole 61a of synchronous roller 61 described later overlaps on.
It is the θ axle transmitting gear (diagram slightly) that rotation axis makes post portion 46 and rotates that the inside of chewing main body 45 is provided with the central shaft of chewing assembly 43.This θ axle transmitting gear formation control part 17 makes the structure of IC chip 4 to the prescribed direction rotation according to the photographic images of the IC chip 4 that ccd video camera 35 is taken.
In addition, drive motor 41 forms the structure of carrying out so-called index (イ Application デ Star Network ス) action, and in this mechanism, it is that center of rotation is intermittently rotated that control part 17 makes disc plate 42 per 90 ° of central shafts with drive motor 41.Because this index action, chew assembly 43 as shown in Figure 7, see in the above to be formed on position Sa, the position Sb that overlaps with the front end on the carrying road 37 of linear feeding device 32, the position Sc that overlaps with the adsorption hole 61a of synchronous roller 61 described later, structure that position Sd temporarily stops.
In addition, post portion 46 when disc plate 42 is rotated, carries out vacuum suction at position Sa to the IC chip 4 that is positioned on the carrying road 36, discharges IC chip 4 at position Sc.
Two of the side of Z shaft assembly 44 relative drive motors 41 configurations, and being provided with: Z shaft assembly main body 51, can be sliding part 52 movable on the Z-direction with respect to disc plate 42 vertical directions.
Sliding part 52 is movable on Z-direction by being configured in Z shaft assembly main body 51 interior AC servomotors (diagram slightly).In addition, the outstanding holding section 53 that engages the round plate 48 of chewing assembly 43 towards the week of disc plate 42 laterally that is provided with in the side of sliding part 52.By this holding section 53 engaging round plates 48, by the AC servomotor sliding part 52 is slided on Z-direction, thereby form post portion 46 movable structure on Z-direction.
Synchronous roller portion 28, as shown in Figure 8, have: synchronously roller 61, the drive motor 62 that makes synchronous roller 61 actions, alignment tool 63, the ccd video camera 64 of taking the IC chip 4 on the synchronous roller 61 utilizing loading position that synchronous roller 61 carries IC chips 4 to revise.
On synchronous roller 61, be formed on five positions that make progress in its week and uniformly-spaced form adsorption hole 61a, the IC chip 4 by 27 carryings of rotation head is adsorbed the structure of maintenance.
Drive motor 62 forms the structure that index moves, and in this mechanism, it is that center of rotation is carried out the index action that control part 7 makes synchronous roller 6 per 72 ° of central shafts with synchronous roller 6.Because this index action, the adsorption hole 61a of roller 61 as shown in Figure 9, sees that in the side position Se, the position Sf~Si that overlap at position Sc temporarily stop synchronously.
Alignment tool 63 has X-axis motor 65 and Y-axis motor 66.The correction that the positional information of the IC chip 4 that this alignment tool 63 is obtained according to the positional information of the antenna circuit 3a on the film substrate 3 that is obtained by ccd video camera 22 with by ccd video camera 64 by control part 17 is calculated suitably drives also modified chi axle motor 65 and Y-axis motor 66.
In addition, in four groups of loading devices 25, farthest locational one group of scrapping off film substrate reception portion 11, be to be used for going up carrying the standby of IC chip 4 by the antenna circuit 3a that IC chip 4 is not carried in other three groups of 13 pairs of IC chip equipped sections.Promptly form such structure, discharge or be not arranged on the adsorption hole 61a of synchronous roller 61 to returning to glassware when being that the back side is former owing to IC chip 4 owing to defective item occurs, and can not carry on antenna circuit 3a the time, from a group of supporting usefulness, supply with IC chip 4, carry on the antenna circuit 3a.
14 pairs of bonding agents 6 that carry the film substrate 3 of IC chip 4 of heater carry out drying, heat treated.
Bonding part 15 has: will be equipped with bonding engagement roller 71 of the film substrate 3 of IC chip 4 and cap rock film 5 and the cap rock film incorporating section 73 of taking in the roller 72 of cap rock film 5.
Engagement roller 71 becomes the trucking department with goods coiling portion 16 11 carrying film substrates 3 from the film substrate incorporating section, forms the 73 extraction cap rock films from cap rock film incorporating section, the structure of adhesive film substrate 3 and cap rock film 5.
Goods coiling portion 16 forms coiling adhesive cover layer films 5 and the ID mark 2 that makes and with its structure of taking in as roller 75.
Control part 17 as shown in figure 10, has: drive control part 81, and its driving to film substrate incorporating section 11, engagement roller 71 and goods coiling portion 74 is controlled; Printing control unit 82, its driving to adhesive printing portion 12 is controlled; Heater control part 83, its driving to heater 14 is controlled; Vibration control portion 84, its vibration to IC chip supply unit 26 is controlled; Operation control part 85, its index action to synchronous roller portion 28 and rotation head 27 is controlled; Image processing part 86,87,88,89, it carries out image processing to each image of being taken by ccd video camera 22,34,35,64; Rotate Correction and Control portion 91, the θ axle transmitting gear of head 27 is rotated in its image control of handling according to image processing part 88; Spin Control portion 92, the image after it is handled according to image processing part 89 sends to correction the alignment tool 63 of synchronous roller portion 28; Table is betrayed bonding part 93, and it comes control IC chip supply unit 26 according to the table back side of the spectral discrimination IC chip 4 after being handled by image processing part 87.
Below, the manufacture method of IC mark is described with reference to Figure 11.
At first, engagement roller 71 and goods coiling portion 16 give adhesive printing portion 12 (step ST1) from film substrate incorporating section 11 with certain speed with film substrate 3 carryings.
Then, the ccd video camera 22 of adhesive printing portion 12 is taken the antenna circuit 3a of film substrate 3, and image processing part 86 confirms to be formed on the position of the antenna circuit 3a on the film substrate 3 according to the image of taking.Then, Printing Department 26 for example utilizes applying device adhesive-applyings 6 (step ST2) such as rotor machine according to the position of this positional information to the IC chip 4 that will carry film substrate 3 under the state that does not stop film substrate 3.
Secondly, chip equipped section 13 is with the assigned position (step ST3) of IC chip 4 lift-launchs at antenna circuit 3a.
Then, the film substrate 3 that 14 pairs of heaters are equipped with IC chip 4 heats, and bonding agent 6 is solidified, thereby make IC chip 4 be fixed on (step ST4) on the film substrate 3.
Afterwards, bonding part 15 is with the mode adhesive cover layer film 5 (step ST5) of cover antenna circuit 3a and IC chip 4.
At last, goods coiling portion 16 reels and is bonded with the film substrate 3 (step ST6) of cap rock film 5.
Below, describe the method for loading that utilizes chip equipped section 13 to carry IC chip 4 in detail with reference to Figure 12.
At first, drive vibratory drive portion, thereby IC chip supply unit 26 utilizes on carrying road 37 uniformly-spaced the vibration conveyance to be arranged in the IC chip 4 of bowl tube 31 with constant speed by vibration control portion 84.At this moment, ccd video camera 34 is taken the IC chip of carrying on the carrying road 37 of linear dispenser 32 4 from upper face side, and the image processing part 87 of control part 17 is judged the table back side (step ST11) of the IC chip of taking 4 according to the photographic images of ccd video camera 34.At this, be the back side with the face that is provided with bead 4b.
In step ST11, when image processing part 87 judged that IC chip 4 is the surface, table was betrayed bonding part 93 this IC chip 4 is discharged to returning to glassware.The IC chip of discharging is carried to bowl tube 31 (step ST12) by returning to glassware.
In addition, in step ST11, when image processing part 87 judges that IC chip 4 is the back side, return to glassware 32 IC chip 4 is further carried towards the front end on carrying road 37.At this, 35 pairs of ccd video cameras are transported to the IC chip 4 of the front end that returns to glassware 32 and take (step ST13).
Then, be positioned at the IC chip 4 of the front end of chewing assembly 43 absorption carrying roads 37 of position Sa shown in Figure 7.That is, under the round plate 48 of chewing assembly 43 and the state that the holding section 53 of Z shaft assembly 44 engages, make sliding part 52 to Z axle slid underneath.Then, post portion 46 moves to Z axle below, and adsorption section 47 is adsorbed on the IC chip of carrying on the carrying road 37 of linear feeding device 32 4 (step ST14).
Behind the absorption IC chip 4, post portion 46 is moved to Z axle top by Z shaft assembly 44.Then, disc plate 42 carries out in the index action of upwards rotating 90 ° week, makes to chew assembly 43 and move on the position Sb shown in Figure 7.
At this moment, the image processing part 88 of the control part 17 IC chip 4 whether good (step ST15) of in step ST13, judging shooting according to the photographic images of ccd video camera 35.
In step ST15, image processing part 88 is judged when IC chip 4 is defective item, chews assembly 43, by being discharged above-mentioned IC chip 4 and it is discharged (step ST16) as defective item by post portion 46.
In addition, in step ST15, image processing part 88 judges that IC chip 4 is qualified product, and then disc plate 42 carries out the index action.In this index action, the image that image processing part 88 is taken according to ccd video camera 35 is calculated the direction that is fit to carry action IC chip 4, and θ axle transmitting gear makes IC chip 4 rotate (step ST17) on the direction of regulation.
Chewing assembly 43 moves to position Sc shown in Figure 7 by described index action.
Rotation head 27 makes sliding part 52 to Z axle slid underneath, and post portion 46 is moved to Z axle below.Then, adsorption section 47 discharges IC chip 4 by the adsorption hole 61a butt with synchronous roller 61, goes up (step ST18) thereby 4 absorption of IC chip are positioned at the adsorption hole 61a of the synchronous roller 61 of position Se shown in Figure 9.
Roller 61 is rotated 72 ° index action by drive motor 62 synchronously.IC chip 4 moves to position Sf shown in Figure 9 thus.At this, the IC chip 4 (step ST19) that ccd video camera 64 is taken on the synchronous roller 61.Then, the positional information of the IC chip 4 that obtains according to the positional information of the antenna circuit 3a that is obtained by image processing part 86 with by image processing part 89 of Correction and Control portion 92 is calculated the correction of the position of synchronous roller 61.
Roller 61 further carries out the index action synchronously, and alignment tool 63 is revised the position (step ST20) of synchronous roller 61 by Spin Control portion 92.
Roller 61 further carries out the index action synchronously, makes film substrate 3 and IC chip 4 butts between position Sg shown in Figure 9 and position Sh, discharges IC chip 4 from adsorption hole 61a, carries IC chip 4 (step ST21) on film substrate 3.In addition, in the roller 61, be positioned at the relative position, position that discharges IC chip 4 from rotation head 27 to synchronous roller 61 synchronously with the contact position of film substrate 3.Therefore, with the contact position of film substrate 3, IC chip 4 is not configured on the film substrate 3 because of the index action with being stopped.
In addition, be the back side so discharge and returned to glassware because of IC chip 4, or because of IC chip 4 is that defective item is discharged, so have the situation that the adsorption hole 61a of certain synchronous roller 61 does not adsorb IC chip 4 in three groups of arrangements of terminals 25.Do not carrying on the antenna circuit 3a under the situation of IC chip 4 like this, standby loading device 25 carries IC chip 4.
According to the manufacturing installation of the IC chip mounting body of such formation and the manufacture method of IC chip mounting body, roller 61 synchronously, with the synchronous speed of speed of carrying film substrate 3, make IC chip 4 move lift-launch on film substrate 3.Therefore, carry IC chip 4, so the quantity of the IC chip mounting body that can make of unit interval increases owing to film substrate can temporarily do not stopped.
In addition, owing to the unit interval can make a plurality of ID marks 2, so can reduce the cost of ID mark 2.In addition, because with constant speed carrying film substrate 3, so film substrate 3 is not had bad influence.
In addition, ccd video camera 34,35 is taken antenna circuit 3a and IC chip 4, and alignment tool 63 is carried the loading position of IC chip 4 by synchronous roller 61 according to the image correction of taking.The delivery precision of film substrate 3 is provided thus.In addition, because the loading position that IC chip 4 can be carried in regulation, so can improve the manufacturing qualification rate of ID mark 2.
In addition, these three loading devices 25 can not carry IC chip 4 under the situation on the antenna circuit 3a of film substrate 3, and the loading device 25 that is assigned in scrapping off film substrate reception portion 11 position farthest carries IC chip 4.Thus, the manufacturing qualification rate of ID mark 2 further improves.
Below, with reference to Figure 13 second embodiment is described.
In addition, identical at the embodiment of this explanation with the first embodiment basic structure, be the key element that above-mentioned first embodiment has been increased other.Therefore, in Figure 13, give identical Reference numeral to the structural element identical with Fig. 9, it illustrates omission.
The point that second embodiment is different with first embodiment is: among second embodiment, the surface bearing roller portion (surface bearing portion) 100 of tread support membrane substrate 3 is set on the whole front and back of the loading position of IC chip 4.
That is, as shown in figure 13, surface bearing roller portion 100 constitutes with a pair of pony roll 102A, the 102B that big roller 101 is oppositely arranged by the big roller 101 of roller 61 settings relatively synchronously with via film substrate 3.
Big roller 101 is at the upstream side that more leans on the upstream than the loading position of IC chip 4, with pony roll 102A clamping film substrate 3, in the downstream of more leaning on the downstream than the loading position of IC chip 4, with pony roll 102B clamping film substrate 3, in the whole front and back of the loading position of IC chip 4, along the side face carrying film substrate 3 of big roller 101.
In addition, big roller 101 its circumferentially on uniformly-spaced many places form adsorption hole (adsorbent equipment) 101a, form the structure of film substrate 3 being carried out vacuum suction.
According to the manufacturing installation of the IC chip mounting body of such formation, film substrate 3 in the whole front and back of IC chip loading position by surface bearing, and by vacuum suction, so the vibration of film substrate 3 can suppress IC chip 4 and carry the time.Thus, the loading position of IC chip 4 is stable, and the qualification rate of ID parts 2 improves.
In addition, in above-mentioned second embodiment, surface bearing roller portion 100 carries film substrates 3 in the whole front and back of the loading position of IC chip 4 along big roller 101 by big roller 101 and pony roll 102A, 102B, but its surface bearing roller portion 110 also shown in Figure 14.
This surface bearing roller portion 110 is made of three carrying transferring belt 111A, 111B, 111C.
Carrying transferring belt 111A is by pair of rolls 112A, 112B and be with 113 to constitute, and is provided with the plate 114 of tread support membrane substrate 3 at the loading position of IC chip 4.
Carrying transferring belt 111B, 111C are the same with carrying transferring belt 111A by pair of rolls 115A, 115B be with 116 to constitute.
Form film substrate 3 in the whole front and back of the loading position of IC chip 4 along structures with 113 carryings.
In such structure,,, also be that film substrate 3 is by plate 114 supportings, so the loading position of IC chip 4 is stable at the loading position of IC chip 4 with above-mentioned same.
In addition, also can be surface bearing roller portion 120 shown in Figure 15.
This surface bearing roller portion 120 is made of big roller 101 and carrying transferring belt 111B, 111C.
In such structure, with above-mentioned same, also be in the whole front and back of the loading position of IC chip 4, also be film substrate 3 is by big roller 101 supportings, so the loading position of IC chip 4 is stable.
Secondly, with reference to Figure 16 and 17 explanations the 3rd embodiment.
In addition, identical in its basic structure of the embodiment of this explanation with the first above-mentioned embodiment, just above-mentioned first embodiment has been increased new key element.Therefore, in Figure 16 and 17, give identical Reference numeral, omit its explanation the structural element identical with Fig. 8 and 9.
The place that the 3rd embodiment is different with first embodiment is, among first embodiment, roller portion 28 has columned synchronous roller 61 synchronously, and among the 3rd embodiment, and the synchronous roller 131 of roller portion 130 has and is formed on the protuberance 131a that makes progress in its week synchronously.
That is, roller portion 130 shown in Figure 16 and 17, has synchronous roller 131, drive motor 62, alignment tool 63, ccd video camera 64 synchronously.
Synchronously on the roller 131 its circumferentially on uniformly-spaced five places be formed with protuberance 131a and the adsorption hole 131b that keeps IC chip 4.This protuberance 131a makes its front end and film substrate 3 butts when synchronous roller 131 is rotated.In addition, with synchronous roller 61 help roll 132 of carrying film substrate 3 is being set on the relative position across film substrate 3.
Have the manufacturing installation of IC chip mounting body of the synchronous roller portion 130 of such formation, the same with above-mentioned first embodiment, IC chip 4 is adsorbed on the adsorption hole 131b that is arranged in the synchronous roller 131 on the position Se shown in Figure 17 from rotation head 27.
Then, roller 131 carries out the action of two secondary indexs by drive motor 62 synchronously, makes IC chip 4 move to position Sg shown in Figure 17.And then, carry out the index action, then between position Sg shown in Figure 17 and position Sh IC chip loading position, protuberance 111a butt film substrate 3.Then, IC chip 4 is discharged, IC chip 4 is carried on film substrate 3.At this, by protuberance 131a is set, thereby synchronous roller 111 is moved up and down, and still make the rotation axis of synchronous roller 111 keep carrying consistently IC chip 4.
Afterwards, make the ID mark by the order the same with above-mentioned first embodiment.
According to the manufacturing installation of the synchronous roller portion 130 of such formation, by forming protuberance 131a on the roller 131 synchronously, thereby need not synchronous roller 131 be moved downwards at the loading position of IC chip 4.Thus, eliminate moving up and down of synchronous roller 131, make the loading position of IC chip 4 stable.
In addition, the present invention does not limit in the above-described embodiments, can carry out all changes in the scope that does not break away from aim of the present invention.
For example, in the above-described embodiments, be the manufacturing installation of ID mark, but also can be the card that the IC chip has been installed.
In addition, IC chip equipped section has four groups of loading devices, but also can be one group, or many groups of other numbers.
In addition, standby loading device is one, but also many, also this device not.
In addition, form antenna circuit on the film substrate in advance, but also can be to be configured in the front of adhesive printing device by the device that will make antenna circuit, and provide the film substrate that does not form antenna circuit such device.
In addition, the cap rock film also can form the structure that covers clamping antenna circuit and IC chip.
In addition, the roller 21 of film substrate also can rotate freely.
In addition, drive motor 41 is contained in the basket in also can being.
Utilizability on the industry: according to manufacture method and the IC of the IC chip fixing body of above-mentioned scheme The manufacturing installation of chip fixing body can make at a high speed IC chip fixing body, recognizes that it industrially Utilizability.
The application advocates the priority of the Japanese patent application (special Willing) 2004-188114 number of the Japanese patent application (special Willing) 2003-435441 number of on December 26th, 2003 application and application on June 25th, 2004, and its content is quoted at this.

Claims (8)

1. the manufacture method of an IC chip mounting body, it is characterized in that, on one side, be formed with the film substrate of antenna circuit at certain intervals with the constant speed carrying, the IC chip is moved along above-mentioned film substrate, and carry on above-mentioned film substrate and be connected with above-mentioned antenna circuit with above-mentioned certain intervals.
2. the manufacture method of IC chip mounting body as claimed in claim 1 is characterized in that, takes above-mentioned IC chip, calculates the correction of revising the position of carrying above-mentioned IC chip according to the image of shooting, and revises the position of carrying above-mentioned IC chip.
3. the manufacturing installation of an IC chip mounting body is characterized in that, has: trucking department, and it is formed with the film substrate of antenna circuit at certain intervals on one side with the constant speed carrying; IC chip equipped section, it carries the IC chip on above-mentioned film substrate,
Above-mentioned IC chip equipped section has: synchronous roller portion, and it is according to by the above-mentioned certain intervals of the above-mentioned film substrate of carrying with constant speed above-mentioned IC chip being moved and it is carried on this film substrate along above-mentioned film substrate; IC chip supply unit, it provides above-mentioned IC chip to above-mentioned synchronous roller portion.
4. the manufacturing installation of IC chip mounting body as claimed in claim 3 is characterized in that, above-mentioned IC chip equipped section has a plurality of above-mentioned synchronous roller portion.
5. the manufacturing installation of IC chip mounting body as claimed in claim 4, it is characterized in that, in the above-mentioned a plurality of synchronous roller portion at least one as standby, be specifically designed to not by other synchronous roller portion carry on the above-mentioned antenna circuit of above-mentioned IC chip and carry above-mentioned IC chip.
6. the manufacturing installation of an IC chip mounting body is characterized in that, has: the trucking department of carrying film substrate and the IC chip carried IC chip equipped section on above-mentioned film substrate,
Above-mentioned trucking department has surface bearing portion, this surface bearing portion, and in the whole front and back of the loading position that above-mentioned IC chip is carried by above-mentioned IC chip equipped section, in the face of above-mentioned film substrate supports,
Above-mentioned IC chip equipped section has: synchronous roller portion, and it moves above-mentioned IC chip and it is carried on this film substrate along above-mentioned film substrate with identical speed with above-mentioned film substrate; IC chip supply unit, it provides above-mentioned IC chip to above-mentioned synchronous roller portion.
7. the manufacturing installation of IC chip mounting body as claimed in claim 6 is characterized in that, above-mentioned surface bearing portion has the adsorbing mechanism of the above-mentioned film substrate of absorption.
8. the manufacturing installation of an IC chip mounting body is characterized in that, has: the trucking department of carrying film substrate and the IC chip carried IC chip equipped section on above-mentioned film substrate,
Above-mentioned IC chip equipped section has: synchronous roller portion, and it moves above-mentioned IC chip and it is carried on this film substrate along above-mentioned film substrate with identical speed with above-mentioned film substrate; IC chip supply unit, it provides above-mentioned IC chip to above-mentioned synchronous roller portion,
Above-mentioned synchronous roller portion has that the moving axis that rotates rotates and above-mentioned IC chip is carried roller on above-mentioned film substrate, is formed with protuberance on the side face of above-mentioned roller, and this protuberance keeps above-mentioned IC chip at its leading section.
CNB2004800385579A 2003-12-26 2004-12-22 Ic chip mounting body manufacturing method and manufacturing device Expired - Fee Related CN100447969C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003435441 2003-12-26
JP435441/2003 2003-12-26
JP188114/2004 2004-06-25

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CN1898787A true CN1898787A (en) 2007-01-17
CN100447969C CN100447969C (en) 2008-12-31

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102308308A (en) * 2009-02-10 2012-01-04 昕芙旎雅有限公司 Apparatus for producing Ic chip mounter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136938A (en) * 1984-07-30 1986-02-21 Toshiba Corp Bonding device for semiconductor device
FR2793054B1 (en) * 1999-04-29 2001-06-29 Schlumberger Systems & Service METHOD FOR MANUFACTURING CONTACTLESS CARDS BY LAMINATION AND CONTACTLESS CARD MANUFACTURED ACCORDING TO SUCH A PROCESS
JP4729794B2 (en) * 2001-02-07 2011-07-20 凸版印刷株式会社 IC chip mounting method and IC chip mounting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102308308A (en) * 2009-02-10 2012-01-04 昕芙旎雅有限公司 Apparatus for producing Ic chip mounter

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