CN1876320A - 常压等离子体抛光装置 - Google Patents
常压等离子体抛光装置 Download PDFInfo
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- CN1876320A CN1876320A CN 200610010296 CN200610010296A CN1876320A CN 1876320 A CN1876320 A CN 1876320A CN 200610010296 CN200610010296 CN 200610010296 CN 200610010296 A CN200610010296 A CN 200610010296A CN 1876320 A CN1876320 A CN 1876320A
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CNB2006100102960A CN100406197C (zh) | 2006-07-17 | 2006-07-17 | 常压等离子体抛光装置 |
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Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100462199C (zh) * | 2007-04-11 | 2009-02-18 | 哈尔滨工业大学 | 常压等离子体抛光方法 |
CN102172851A (zh) * | 2011-03-03 | 2011-09-07 | 李子恒 | 等离子脱膜抛光机 |
CN103213172A (zh) * | 2013-05-14 | 2013-07-24 | 哈尔滨工业大学 | 水电极大气等离子体加工大口径非球面光学零件的装置 |
CN103227093A (zh) * | 2013-05-14 | 2013-07-31 | 哈尔滨工业大学 | 适用于大口径非球面光学零件的大气等离子体加工装置 |
CN103237405A (zh) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | 一体化等离子体发生装置 |
CN103236391A (zh) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | 成型电极大气等离子体加工回转零件装置 |
CN103236393A (zh) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | 单电极大气等离子体加工碳化硅密封环类零件的方法 |
CN103258709A (zh) * | 2013-05-14 | 2013-08-21 | 哈尔滨工业大学 | 多个电极大气等离子体加工碳化硅密封环类零件的方法 |
CN103258710A (zh) * | 2013-05-14 | 2013-08-21 | 哈尔滨工业大学 | 大气等离子体成形电极加工碳化硅密封环类零件的方法 |
CN103264414A (zh) * | 2013-05-14 | 2013-08-28 | 哈尔滨工业大学 | 大气等离子体加工碳化硅密封环类零件的装置 |
CN103286641A (zh) * | 2012-03-05 | 2013-09-11 | 鸿富锦精密工业(深圳)有限公司 | 框架结构 |
CN103465113A (zh) * | 2013-09-06 | 2013-12-25 | 西安工业大学 | 用于光学材料去除、抛光的装置及其使用方法和应用 |
CN104108054A (zh) * | 2014-06-19 | 2014-10-22 | 华中科技大学 | 大型复杂金属表面等离子体与脉冲放电复合抛光加工装置 |
CN106826404A (zh) * | 2016-12-19 | 2017-06-13 | 中国石油天然气股份有限公司 | 一种岩石样品的抛光方法及装置 |
CN108581794A (zh) * | 2018-04-02 | 2018-09-28 | 浙江工业大学 | 常压等离子喷射辅助气压砂轮随形抛光装置及方法 |
CN108857588A (zh) * | 2018-06-22 | 2018-11-23 | 中国建筑材料科学研究总院有限公司 | 抛光装置和抛光方法 |
CN110911314A (zh) * | 2019-11-29 | 2020-03-24 | 河海大学常州校区 | 一种硅片表面研磨装置 |
CN114619296A (zh) * | 2022-03-24 | 2022-06-14 | 哈尔滨理工大学 | 一种碳化硅大气等离子体抛光设备及其抛光方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013075312A1 (zh) * | 2011-11-24 | 2013-05-30 | 中国科学院长春光学精密机械与物理研究所 | 一种抛光装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0129603A4 (en) * | 1982-12-17 | 1985-06-10 | Inoue Japax Res | CUTTING DEVICE WITH LASER. |
US5795493A (en) * | 1995-05-01 | 1998-08-18 | Motorola, Inc. | Laser assisted plasma chemical etching method |
JP3217274B2 (ja) * | 1996-09-02 | 2001-10-09 | 株式会社日立製作所 | 表面波プラズマ処理装置 |
JP4020679B2 (ja) * | 2002-04-09 | 2007-12-12 | シャープ株式会社 | プラズマプロセス装置 |
US7297892B2 (en) * | 2003-08-14 | 2007-11-20 | Rapt Industries, Inc. | Systems and methods for laser-assisted plasma processing |
-
2006
- 2006-07-17 CN CNB2006100102960A patent/CN100406197C/zh active Active - Reinstated
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100462199C (zh) * | 2007-04-11 | 2009-02-18 | 哈尔滨工业大学 | 常压等离子体抛光方法 |
CN102172851A (zh) * | 2011-03-03 | 2011-09-07 | 李子恒 | 等离子脱膜抛光机 |
CN102172851B (zh) * | 2011-03-03 | 2013-03-27 | 李子恒 | 等离子脱膜抛光机 |
CN103286641B (zh) * | 2012-03-05 | 2016-03-09 | 鸿富锦精密工业(深圳)有限公司 | 框架结构 |
CN103286641A (zh) * | 2012-03-05 | 2013-09-11 | 鸿富锦精密工业(深圳)有限公司 | 框架结构 |
CN103264414A (zh) * | 2013-05-14 | 2013-08-28 | 哈尔滨工业大学 | 大气等离子体加工碳化硅密封环类零件的装置 |
CN103264414B (zh) * | 2013-05-14 | 2015-04-01 | 哈尔滨工业大学 | 大气等离子体加工含微结构的碳化硅密封环类零件的装置 |
CN103236393A (zh) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | 单电极大气等离子体加工碳化硅密封环类零件的方法 |
CN103258709A (zh) * | 2013-05-14 | 2013-08-21 | 哈尔滨工业大学 | 多个电极大气等离子体加工碳化硅密封环类零件的方法 |
CN103258710A (zh) * | 2013-05-14 | 2013-08-21 | 哈尔滨工业大学 | 大气等离子体成形电极加工碳化硅密封环类零件的方法 |
CN103237405A (zh) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | 一体化等离子体发生装置 |
CN103227093A (zh) * | 2013-05-14 | 2013-07-31 | 哈尔滨工业大学 | 适用于大口径非球面光学零件的大气等离子体加工装置 |
CN103213172A (zh) * | 2013-05-14 | 2013-07-24 | 哈尔滨工业大学 | 水电极大气等离子体加工大口径非球面光学零件的装置 |
CN103258709B (zh) * | 2013-05-14 | 2016-01-06 | 哈尔滨工业大学 | 多个电极大气等离子体加工碳化硅密封环类零件的方法 |
CN103236391A (zh) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | 成型电极大气等离子体加工回转零件装置 |
CN103465113A (zh) * | 2013-09-06 | 2013-12-25 | 西安工业大学 | 用于光学材料去除、抛光的装置及其使用方法和应用 |
CN104108054A (zh) * | 2014-06-19 | 2014-10-22 | 华中科技大学 | 大型复杂金属表面等离子体与脉冲放电复合抛光加工装置 |
CN106826404A (zh) * | 2016-12-19 | 2017-06-13 | 中国石油天然气股份有限公司 | 一种岩石样品的抛光方法及装置 |
CN108581794A (zh) * | 2018-04-02 | 2018-09-28 | 浙江工业大学 | 常压等离子喷射辅助气压砂轮随形抛光装置及方法 |
CN108857588A (zh) * | 2018-06-22 | 2018-11-23 | 中国建筑材料科学研究总院有限公司 | 抛光装置和抛光方法 |
CN110911314A (zh) * | 2019-11-29 | 2020-03-24 | 河海大学常州校区 | 一种硅片表面研磨装置 |
CN114619296A (zh) * | 2022-03-24 | 2022-06-14 | 哈尔滨理工大学 | 一种碳化硅大气等离子体抛光设备及其抛光方法 |
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