CN1865492A - Method for surface metal coating of flexible strip-like articles and dedicated device therefor - Google Patents
Method for surface metal coating of flexible strip-like articles and dedicated device therefor Download PDFInfo
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- CN1865492A CN1865492A CN 200610044769 CN200610044769A CN1865492A CN 1865492 A CN1865492 A CN 1865492A CN 200610044769 CN200610044769 CN 200610044769 CN 200610044769 A CN200610044769 A CN 200610044769A CN 1865492 A CN1865492 A CN 1865492A
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Abstract
The invention discloses a flexible strip-typed surface metal deposition method and specific equipment, which is characterized by the following: the deposited material is started from scroll, which is coiled on the material received shaft through guide shaft and drawing shaft; the deposited material is sprayed and deposited on two surfaces by two target electrodes through target electrode spraying region; the specific equipment comprises vacuum chamber and vacuum system in connection with vacuum chamber; the target electrode moving door and driving moving door are set on the vacuum chamber; the magnetic control spraying target electrode is set on the target electrode moving door, which contains coiling structure for the deposited material.
Description
(1) technical field under
The present invention relates to a kind of method and specific equipment thereof of surface metal coating of flexible strip-like articles, be a kind of spirally wound magnetic sputter coating machine specifically and adopt this coating equipment to carry out the technology of surface metal coating of flexible strip-like articles.
(2) background technology
Flexible strip-like articles metal product and metal-coated surface product are of many uses in the middle of modern industry, for example: utilize nickel foam, nickel plated steel strip to make the battery lead plate of high performance store battery, because nickel foam is originally as vesicular, the surface-area that forms is big, so can fully contact with accumulator liquid, thereby make the performance of store battery improve greatly.For another example: plated film cloth is used in aluminum foil paper for packing, shielding, all has a wide range of applications at aspects such as daily life and electron and electricians.
In the middle of the flexible strip-like articles film coating manufacturing process, the step of most critical is the evenly firm film forming that makes the flexible strip-like articles surface, and in all kinds of coating equipments, the winding magnetic control sputtering coating equipment has characteristics such as coating temperature is low, efficient is high, cost is low.By the disclosed devices of coiled vacuum coating machine of domestic and foreign literature and market evaporating coating equipment and magnetron sputtering film device are arranged now, the product that can be coated with is high-tensile poly-bright, polyester mylar, it is atresia, densification, transparent and translucent material, by material self high-tensile, linear velocity can reach when obtaining to curl: v 〉=340m/min in the process of being coated with.But for some flexible strip material, be not allow the tension distortion in the process of being coated with, can not bear higher temperature simultaneously, so existing spirally wound evaporation coating machine and magnetron sputtering coater all are not suitable for being coated with this class material.
(3) summary of the invention
The method and the specific equipment thereof that the purpose of this invention is to provide a kind of surface metal coating of flexible strip-like articles, it can overcome existing shortcoming in the prior art, is suitable for being coated with all kinds of flexible strip material, and the production efficiency height, low production cost.
The object of the present invention is achieved like this:
A kind of method of surface metal coating of flexible strip-like articles, its special character is: plated body is set out by unreeling shaft, via the axis of guide, again by axis of traction, and then be wound on the collecting shaft via transition axis, let slip Cheng Dangzhong at this volume, plated body is through the sputtering zone of the target utmost point, simultaneously sputter coating is carried out on the two sides of plated body by two groups of target utmost points, disposablely finish being coated with the double-sided metal coating of plated body.
A kind of specific equipment of surface metal coating of flexible strip-like articles, comprise vacuum chamber and the vacuum system that is connected with vacuum chamber, vacuum chamber is provided with target utmost point moving door and transmission moving door, on the target utmost point moving door magnetron sputtering target utmost point is installed, and the winding mechanism of plated body is installed on the transmission moving door.
The specific equipment of surface metal coating of flexible strip-like articles of the present invention, the parallel in two separate ranks installation of the described magnetron sputtering target utmost point, every row adopt the fixed or rotary combination target utmost point.
Described winding mechanism comprises unreeling shaft, Scroll and two axis of traction that dragged by motor respectively, between described unreeling shaft and the axis of traction, the transition axis of a plurality of stationkeeping is installed between axis of traction and the Scroll, the rolling end is equipped with the speed governing axle of the constant airspeed that is used for controlling Scroll.
Flexible strip-like articles carries out the processing parameter of metal coating and is among the present invention: power=80～100 kilowatt, voltage=400～600 volt, the linear velocity of plated body=0.5～10m/min.The thickness of plated body=0.05～10mm, inert gas flow 100ml～1000ml/h.
The integrated design of transmission door and transmission system, target utmost point door and target electrode systems makes this equipment possess superior practicality.The parallel in two separate ranks installation of the magnetron sputtering target utmost point, every row adopt the fixed or rotary combination target utmost point, have improved the saturating property of plating and the homogeneity of plated film.Winding mechanism comprises retractable material axle and axis of traction, between retractable material axle and axis of traction the axis of guide is installed, and linear velocity and the tension pick-up that connects the speed governing axle is housed.
Advantage of the present invention is: plated body is via the sputter area of the target utmost point time, because two groups of magnetron sputtering combination target utmost points carry out sputter coating to the two sides of plated body simultaneously, the rete that can disposablely finish the two sides is coated with, the target electrode systems adopts unique temperature control unit to eliminate temperature rise influence in the extremely continuous use of target, can work continuously, so the production efficiency height, cost is low, is suitable for suitability for industrialized production; Because two groups of target utmost points adopt to fix with the rotary target utmost point and are used in combination, thus the even film layer that is coated with, and plating property is good.
(4) description of drawings
The present invention is further illustrated below in conjunction with accompanying drawing.
Fig. 1 is an overall structure synoptic diagram of the present invention.
Fig. 2 is the arrangement synoptic diagram of the winding mechanism of the present invention and the magnetron sputtering target utmost point.
Fig. 3 is a rotary target utmost point synoptic diagram of the present invention.
Among the figure, 1 axis of traction, 2 transition axises, 3 baffle plates, the 4 target utmost points, 5 unreeling shafts, 6 Scrolls, 7 speed governing axles, 8 plated bodies, 9 lobe pumps, 10 mechanical pumps, 11 diffusion pump, 12 target utmost point moving doors, 13 vacuum chambers, 14 transmission moving doors, 15 rotation axiss, 16 stationary shaft, 17 mandrels.
(5) embodiment
Embodiment 1:
As seen from Figure 1, the present invention mainly is made up of following several major parts: vacuum chamber 13, target utmost point door, transmission door and vacuum system.
The present invention reaches vacuum tightness rapidly and requires to keep vacuum tightness even simultaneously for making in the vacuum chamber 13, respectively establish a cover vacuum system in the both sides of housing, the high vacuum system of the routine that it is made up of annexes such as mechanical pump 10, lobe pump 9, diffusion pump 11 and valves.
As seen from Figure 1, housing of the present invention is except that both sides are equipped with vacuum system, also have transmission moving door 14 and target utmost point moving door 12, for the convenience of operating, the magnetron sputtering target utmost point is installed on the target utmost point moving door 12, the winding mechanism of plated body then is installed on the transmission moving door 14, and housing is provided with the tongued and grooved flanges of forward and backward door, and the door body of target utmost point moving door 12, transmission moving door 14 is provided with the wheel shaft movable mechanism.
The overall structure that is installed in the plated body winding mechanism on the transmission moving door 14 as shown in Figure 2, it comprises unreeling shaft 5, Scroll 6, Scroll 6 is dragged by a motor, unreels and then adopts slave state.Also have two axis of traction 1 that drag by motor, between unreeling shaft 5 and the axis of traction 1, between axis of traction 1 and the Scroll 6 a plurality of transition axises 2 are installed, the stationkeeping of transition axis 2, and speed governing axle 7 is installed at the rolling end, speed governing axle 7 wire speed and tension pick-ups are used for controlling the constant airspeed of Scroll 6.
As seen from Figure 2, the parallel installation of file in 4 minutes two of four target utmost points of magnetic control sputtering cathode, two target utmost points 4 of every row are relative with baffle plate 3, when plated body 7 by the two row target utmost points 4 in the middle of row out-of-date, the two sides is simultaneously by coated with metalized coated.
As seen from Figure 3, this rotary target utmost point comprises stationary shaft 16, the magnetic conduction mandrel 17 that is connected with stationary shaft 16, stationary shaft 16 external fixation have target utmost point door 12, the driven by motor driving chain wheel makes target rotate around mandrel 17 through rotation axis 15, target utmost point joint flange, target joint flange in the plated film production process, realized the rotation of target by closely combining of above-mentioned parts, reach surperficial even sputter, improved the utilization ratio of target.
A plurality of target utmost points 4 of the magnetic control sputtering cathode among the present invention can be independently-powered respectively, and the several target utmost points 4 that also can choose wantonly are wherein powered simultaneously.
Embodiment 2:
Plated body 8 is set out by unreeling shaft 5, via the axis of guide, again by axis of traction 1, and then be wound on the Scroll 5 via transition axis 2, let slip Cheng Dangzhong at this volume, plated body 8 carries out sputter coating to the two sides of plated body 8 through the sputtering zone of the target utmost points 4 simultaneously by two groups of target utmost points 4, disposablely finishes being coated with the double-sided metal coating of plated body 8.
The power of embodiments of the invention=80～100 kilowatt, voltage=400～600 volt, the linear velocity of plated film=0.5～10m/min.Can be coated with fabric width=500～2000mm, the banded class material of all kinds of flexibilities of thickness=0.05～10mm.
Claims (4)
1. the method for a surface metal coating of flexible strip-like articles, it is characterized in that: plated body (8) is set out by unreeling shaft (5), via the axis of guide, again by axis of traction (1), and then be wound on the Scroll (5) via transition axis (2), let slip Cheng Dangzhong at this volume, plated body (8) is through the sputtering zone of the target utmost point (4), simultaneously sputter coating is carried out on the two sides of plated body (8) by two groups of target utmost points (4), disposablely finish being coated with the double-sided metal coating of plated body (8).
2. the specific equipment of a surface metal coating of flexible strip-like articles, comprise vacuum chamber (13) and the vacuum system that is connected with vacuum chamber (13), it is characterized in that: vacuum chamber (13) is provided with target utmost point moving door (12) and transmission moving door (14), the magnetron sputtering target utmost point (4) is installed on the target utmost point moving door (12), the winding mechanism of plated body is installed on the transmission moving door (14).
3. the specific equipment of surface metal coating of flexible strip-like articles according to claim 2 is characterized in that: the parallel in two separate ranks installation of the described magnetron sputtering target utmost point (4), the fixed or rotary combination target utmost point of every row employing.
4. the specific equipment of surface metal coating of flexible strip-like articles according to claim 2, it is characterized in that: described winding mechanism comprises unreeling shaft (5), Scroll (6) and two axis of traction (1) that dragged by motor respectively, between described unreeling shaft (5) and the axis of traction (1), the transition axis (2) of a plurality of stationkeeping is installed between axis of traction (1) and the Scroll (6), the rolling end is equipped with the speed governing axle (7) of the constant airspeed that is used for controlling Scroll (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610044769 CN1865492A (en) | 2006-06-14 | 2006-06-14 | Method for surface metal coating of flexible strip-like articles and dedicated device therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610044769 CN1865492A (en) | 2006-06-14 | 2006-06-14 | Method for surface metal coating of flexible strip-like articles and dedicated device therefor |
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| CN1865492A true CN1865492A (en) | 2006-11-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200610044769 Pending CN1865492A (en) | 2006-06-14 | 2006-06-14 | Method for surface metal coating of flexible strip-like articles and dedicated device therefor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102427119A (en) * | 2011-12-02 | 2012-04-25 | 中国科学院上海微系统与信息技术研究所 | Method for continuously coating on lithium ion battery membrane |
| CN101684546B (en) * | 2008-09-25 | 2012-05-23 | 鸿富锦精密工业（深圳）有限公司 | Soft substrate film coating fixture |
| CN101861410B (en) * | 2008-01-21 | 2013-01-02 | 株式会社爱发科 | Sputtering film forming method and sputtering film forming apparatus |
| CN111118469A (en) * | 2020-01-20 | 2020-05-08 | 纳狮新材料(浙江)有限公司 | Rotary frame of film coating machine |
| CN111593302A (en) * | 2020-06-01 | 2020-08-28 | 肇庆宏旺金属实业有限公司 | Method for processing stainless steel coil with colored frosted film layer |
| CN111663111A (en) * | 2020-06-01 | 2020-09-15 | 肇庆宏旺金属实业有限公司 | Method for processing stainless steel coil with colorful snowflake sand wire drawing film layer |
| CN113718224A (en) * | 2021-11-01 | 2021-11-30 | 苏州睿锂物联科技有限公司 | Lithium battery cathode material preparation device |
-
2006
- 2006-06-14 CN CN 200610044769 patent/CN1865492A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101861410B (en) * | 2008-01-21 | 2013-01-02 | 株式会社爱发科 | Sputtering film forming method and sputtering film forming apparatus |
| CN101684546B (en) * | 2008-09-25 | 2012-05-23 | 鸿富锦精密工业（深圳）有限公司 | Soft substrate film coating fixture |
| CN102427119A (en) * | 2011-12-02 | 2012-04-25 | 中国科学院上海微系统与信息技术研究所 | Method for continuously coating on lithium ion battery membrane |
| CN111118469A (en) * | 2020-01-20 | 2020-05-08 | 纳狮新材料(浙江)有限公司 | Rotary frame of film coating machine |
| CN111593302A (en) * | 2020-06-01 | 2020-08-28 | 肇庆宏旺金属实业有限公司 | Method for processing stainless steel coil with colored frosted film layer |
| CN111663111A (en) * | 2020-06-01 | 2020-09-15 | 肇庆宏旺金属实业有限公司 | Method for processing stainless steel coil with colorful snowflake sand wire drawing film layer |
| CN113718224A (en) * | 2021-11-01 | 2021-11-30 | 苏州睿锂物联科技有限公司 | Lithium battery cathode material preparation device |
| CN113718224B (en) * | 2021-11-01 | 2022-01-18 | 苏州睿锂物联科技有限公司 | Lithium battery cathode material preparation device |
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