CN1858555A - Double resonator sensitive structure resonant sensor - Google Patents
Double resonator sensitive structure resonant sensor Download PDFInfo
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- CN1858555A CN1858555A CN 200610012109 CN200610012109A CN1858555A CN 1858555 A CN1858555 A CN 1858555A CN 200610012109 CN200610012109 CN 200610012109 CN 200610012109 A CN200610012109 A CN 200610012109A CN 1858555 A CN1858555 A CN 1858555A
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Abstract
A resonate sensor of a double-resonator sensing structure includes a sensing structure composed of two resonators in the same parameter or small difference and a closed ring control system, in which, the response signal of resonator 1 is amplified as the exciting signal of resonator 2 and the response signal of resonator 2 is amplified and inverted to be the exciting signal of resonator 1, the total phase shift corresponding to the resonating frequency of the two serial resonators is 180deg., only one inverter is needed to satisfy the phase condition of a closed loop sensor and simplify the closed loop.
Description
Technical field
The present invention relates to the resonant transducer of a kind of resonant transducer, particularly a kind of double resonator sensitive structure.
Background technology
Resonant transducer is under measured effect, and the natural frequency of its sensitive element changes, and can record measured value by the natural frequency of measuring the resonant transducer sensitive element.Performance index such as the repeatability of resonant transducer, resolving power and stability are outstanding, are suitable for the measurement as multiple parameters such as pressure, acceleration, power, density.
Existing resonant transducer, the sensitive structure that is mostly the single resonance device of employing, difference is structure, shape and parameter different of resonator just.For example the micromachine resonant pressure transducer of Britain De Luke company adopts be single resonance beam as sensitive element, the sensitive element of the resonant tube type compression transducer of Taiyuan aircraft instrument company is single cantilever tube.
The sensitive structure needs of resonant transducer and closed-loop system are in conjunction with the ability operate as normal, common closed-loop system comprises amplitude controller and phase shift link, amplitude controller is used for regulating the gain of whole closed loop, to satisfy the amplitude conditions of resonant transducer self-excitation closed loop, the phase shift link is used for regulating the phase shift of whole closed loop, to satisfy the phase condition of resonant transducer self-excitation closed loop.Because resonant transducer is operated in the certain frequency scope, the phase shift link can not guarantee that the characteristic in this frequency range is all consistent, and the influence that the characteristic of phase shift link is subjected to factors such as temperature also can produce drift.The phase drift that the phase shift link produces will make the resonance frequency of whole closed-loop system produce drift by the phase in-migration compensation of the sensitive structure of resonant transducer, the natural frequency that can not follow the tracks of resonant transducer sensitive structure accurately, thus produce measuring error.And the phase shift link is comparatively complicated on circuit is realized, the phase drift that compensation phase shift link produces in circuit also compares difficulty.
Summary of the invention
Technology of the present invention is dealt with problems and is: for solving the phase shift link in the above-mentioned resonant transducer closed-loop system, and provide a kind of resonant transducer of double resonator sensitive structure.
Technical solution of the present invention: the resonant transducer of double resonator sensitive structure, its characteristics are: comprise sensitive structure and closed-loop control system, wherein sensitive structure is made up of exciting element 1, exciting element 2, resonator 1, resonator 2, detecting element 1 and detecting element 2; Closed-loop control system is made of amplitude controller 1, amplitude controller 2 and phase inverter, the vibration signal of resonator 1 is detected by detecting element 1, act on exciting element 2 through amplitude controller 1, excitation resonator 2, the vibration signal of resonator 2 is detected by detecting element 2, act on exciting element 1 excitation resonator 1 through amplitude controller 2 and phase inverter, constitute closed loop.
The structural parameters of described device 1 resonator 2 of shaking are identical or differ less, and two resonators have single harmonic peak near being connected on the resonator natural frequency, and the Q value of two resonator series connection is higher than the Q value of single resonator; Exciting element 1 is identical with the structural parameters of exciting element 2; Detecting element 1 is identical with the structural parameters of detecting element 2; Amplitude controller 1 is identical with the structural parameters of amplitude controller 2; The gain of phase inverter is 1.
Principle of the present invention: the phase shift on its natural frequency of the frequency characteristic of the sensitive structure resonator of resonant transducer is 90 °, two structural parameters resonators identical or that differ less have single resonance frequency near being connected on the resonator natural frequency, and corresponding total phase shift is 180 °.Two structural parameters same resonator series connection, phase shift is exactly 180 ° on the resonator natural frequency.Sinusoidal signal is through phase inverter, and the phase shift with producing 180 adds a phase inverter in closed-loop system, total the phase shift of the closed loop of whole resonant transducer is exactly 360 °, satisfied the phase condition of resonant transducer self-excitation closed loop.
The present invention's advantage compared with prior art: owing to adopted two structural parameters resonators identical or that differ less to connect, in the closed-loop system of resonant transducer, needn't adopt the phase shift link, not only simplify the structure of resonant transducer closed-loop control system, also avoided the measuring error that produces by the phase shift link.In addition, the Q value of two resonator series connection is higher than the Q value of single resonator, thereby has further improved the measuring accuracy of resonant transducer.
Description of drawings
Fig. 1 is the structural representation of double resonator sensitive structure resonant sensor of the present invention;
Fig. 2 is the structural representation of traditional resonant transducer.
Embodiment
As shown in Figure 1, double resonator sensitive structure resonant sensor of the present invention comprises sensitive structure and closed-loop control system, wherein sensitive structure is made up of exciting element 1, exciting element 2, resonator 1, resonator 2, detecting element 1 and detecting element 2, and closed-loop control system is made of amplitude controller 1, amplitude controller 2 and phase inverter.
Resonator 1 resonator 2 is responsive same measured simultaneously, will guarantee that structural parameters are identical or differ less man-hour adding.When the structural parameters of resonator 1 resonator 2 differ big, near the natural frequency of resonator 1 resonator 2,2 series connection of resonator 1 resonator, two harmonic peaks will appear, the characteristic that does not have single resonance frequency can not be applied to double resonator sensitive structure resonant sensor of the present invention.
Exciting element 1 and exciting element 2 adopts static, electric heating, piezoelectricity, electromagnetism equal excitation modes usually, and it is 0 ° proportional component that exciting element can be regarded as phase shift usually, guarantees that structural parameters are identical man-hour adding as far as possible.
Pick-up modes such as detecting element 1 and detecting element 2 sampling capacitances, piezoelectricity, electromagnetism, resistance, it is 0 ° proportional component that detecting elements such as electric capacity, piezoelectricity, resistance can be regarded as phase shift usually, and the phase shift of electromagnetic detection element is 90 °, so when sampling electromagnetic detection element, without phase inverter, only constitute in the closed-loop control system of double resonator sensitive structure resonant sensor of the present invention by amplitude controller 1 and amplitude controller 2.Guarantee that detecting element 1 is identical with the structural parameters of detecting element 2 man-hour adding as far as possible.
Amplitude controller 1 and amplitude controller 2 both can be realized with mimic channel, can realize that also the automatic gain of double resonator sensitive structure resonant sensor closed-loop system is regulated with the mode of digital and analog circuit combination.When circuit design and components and parts apolegamy, guarantee that as far as possible amplitude controller 1 is identical with the structural parameters of amplitude controller 2.
Phase inverter can realize that its gain will be 1 by operational amplifier.
Claims (3)
1, double resonator sensitive structure resonant sensor is characterized in that: comprise sensitive structure and closed-loop control system, wherein sensitive structure is made up of exciting element 1, exciting element 2, resonator 1, resonator 2, detecting element 1 and detecting element 2; Closed-loop control system is made of amplitude controller 1, amplitude controller 2 and phase inverter, the vibration signal of resonator 1 is detected by detecting element 1, act on exciting element 2 through amplitude controller 1, excitation resonator 2, the vibration signal of resonator 2 is detected by detecting element 2, act on exciting element 1 excitation resonator 1 through amplitude controller 2 and phase inverter, constitute closed loop.
2, double resonator sensitive structure resonant sensor according to claim 1, it is characterized in that: the structural parameters of described resonator 1 resonator 2 are same or similar, two resonators have single resonance frequency near being connected on the resonator natural frequency, corresponding total phase shift is 180 °, and the Q value of two resonator series connection is higher than the Q value of single resonator.
3, double resonator sensitive structure resonant sensor according to claim 1 is characterized in that: the gain of described phase inverter is 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100121092A CN100451552C (en) | 2006-06-06 | 2006-06-06 | Double resonator sensitive structure resonant sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100121092A CN100451552C (en) | 2006-06-06 | 2006-06-06 | Double resonator sensitive structure resonant sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1858555A true CN1858555A (en) | 2006-11-08 |
| CN100451552C CN100451552C (en) | 2009-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100121092A Expired - Fee Related CN100451552C (en) | 2006-06-06 | 2006-06-06 | Double resonator sensitive structure resonant sensor |
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| CN (1) | CN100451552C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108801534A (en) * | 2017-05-03 | 2018-11-13 | 珠海全志科技股份有限公司 | Based on the sensitive resonant mode gas pressure sensor of damping |
| CN111486995A (en) * | 2020-04-08 | 2020-08-04 | 清华大学 | Method and device for monitoring micro force in real time |
| CN113917838A (en) * | 2021-09-29 | 2022-01-11 | 华中科技大学 | Resonant sensor based on sideband excitation |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1235027C (en) * | 2003-11-28 | 2006-01-04 | 太原航空仪表有限公司 | Pressure sensor of piezoelectric excitation vibrating cylinder |
| JP2005293650A (en) * | 2004-03-31 | 2005-10-20 | Matsushita Electric Ind Co Ltd | Optical disk device |
| JP2005333392A (en) * | 2004-05-19 | 2005-12-02 | Sony Corp | Resonator filter |
| EP1784653A2 (en) * | 2004-08-24 | 2007-05-16 | Eidgenössische Technische Hochschule Zürich | Resonator-based magnetic field sensor |
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2006
- 2006-06-06 CN CNB2006100121092A patent/CN100451552C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108801534A (en) * | 2017-05-03 | 2018-11-13 | 珠海全志科技股份有限公司 | Based on the sensitive resonant mode gas pressure sensor of damping |
| CN111486995A (en) * | 2020-04-08 | 2020-08-04 | 清华大学 | Method and device for monitoring micro force in real time |
| CN113917838A (en) * | 2021-09-29 | 2022-01-11 | 华中科技大学 | Resonant sensor based on sideband excitation |
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| Publication number | Publication date |
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| CN100451552C (en) | 2009-01-14 |
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Granted publication date: 20090114 Termination date: 20120606 |