CN1381397A - Frequency output type combined microbeam resonator with self temp ecompensation function - Google Patents
Frequency output type combined microbeam resonator with self temp ecompensation function Download PDFInfo
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- CN1381397A CN1381397A CN 02114617 CN02114617A CN1381397A CN 1381397 A CN1381397 A CN 1381397A CN 02114617 CN02114617 CN 02114617 CN 02114617 A CN02114617 A CN 02114617A CN 1381397 A CN1381397 A CN 1381397A
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Abstract
A frequency output type combined microbeam resonator with temp. self-compensation function is composed of the microbridge resonator and the microcantilever resonator, which are simultaneously prepared on a single chip and has same parameters, so that they can synchronously response to the temp. change. The resonant frequency of the said microcantilever resonator as temp.-sensitive element can real-time compensate the cross sensitivity of temp. variation to resonant frequency of microbridge resonator, so lowering its temp. coefficient and widening its working temp. range.
Description
One, technical field
The invention belongs to microelectromechanical systems (MEMS) field, relate to a kind of compound little beam resonator of frequency output type with temperature self-compensation function.
Two, background technology
The micro-resonance type transducer with mechanics resonance frequency based on the silicon micromachining technique manufacturing is the very important transducer of a class.This class transducer has the output of accurate digital signal, antijamming capability is strong, cost of manufacture is low, power consumption is little, volume is little, in light weight, the advantage that is easy to produce in batches.The micro-resonance type transducer utilizes the harmonious amplitude of the resonance frequency, phase place of resonant elements such as micro-cantilever, microbridge (two-end fixed beam) and square film to wait to measure various physical quantitys, as pressure, vacuum degree, angular speed, acceleration, flow, temperature, humidity and gas componant etc.
With respect to the micro-cantilever resonator, micro-bridge resonator is at mechanical measurement and make and to have special advantages aspect the electronic devices such as filter, voltage controlled oscillator, frequency multiplier, but its resonance frequency is subjected to Temperature Influence very big.Variations in temperature causes that the bridge change of resonance frequency has the reason of the following aspects: the difference of thermal coefficient of expansion between the material of (1) composition bridge resonator; (2) difference of the material thermal expansion coefficient of base material and composition bridge resonator; (3) the Young film amount of the material of composition bridge resonator and density are with variation of temperature; (4) bridge length and thickness are with variation of temperature.The temperature variant complicated reason of bridge resonance frequency makes structural compensation be difficult to the result who reaches satisfied.
In the intelligence sensor system, in order to eliminate the interference of temperature, adopt a temperature sensor detected temperatures to change usually, and eliminate temperature to measured influence by the data fusion technology to tested non-temperature parameters.But present existing temperature sensor volume is big, the response time is longer, if the variations in temperature in zone to be measured is very fast, is difficult to guarantee that temperature sensor and measuring transducer are to the variations in temperature sync response.In addition, temperature element and measuring transducer distance is big in this case, if the temperature field skewness, then the measured temperature of temperature element is difficult to the true temperature of reflected measurement point.
And on the other hand, the micro-cantilever resonator has significant advantage aspect temperature survey, according to the result of our research,, can calculate its resonance frequency under the arbitrary temp in the working temperature interval if record the resonance frequency of cantilever beam resonator under a certain temperature of vibration in a vacuum.This micro-cantilever resonant mode temperature sensor has that power consumption is little, volume is little, lightweight advantage, can be used for eliminating in real time the cross sensitivity of temperature to micro-bridge resonator.
Three, summary of the invention
The objective of the invention is to eliminate the cross sensitivity of variations in temperature to the micro-bridge resonator resonance frequency, designed a kind of compound little beam resonator of frequency output type with temperature self-compensation function, the real-Time Compensation variations in temperature is to the temperature cross sensitivity of micro-bridge resonator resonance frequency, thereby reduce the temperature coefficient of micro-bridge resonator resonance frequency, improve the micro-bridge resonator operating temperature range.
The technical solution used in the present invention is for achieving the above object: be made up of the micro-bridge resonator of making on same chip, micro-cantilever resonator and substrate, micro-bridge resonator is identical with the micro-cantilever resonator material, thickness equates or is close that making and technology are identical simultaneously; The micro-cantilever resonator is as temperature sensing element, by the data fusion technology, the resonance frequency of micro-cantilever resonator can the real-Time Compensation variations in temperature to the cross sensitivity of micro-bridge resonator resonance frequency.
Another characteristics of the present invention are: the distance of micro-bridge resonator and micro-cantilever resonator is in micron dimension, and the micro-cantilever resonator can accurately reflect the temperature of micro-bridge resonator; Micro-bridge resonator and micro-cantilever resonator all have double-decker or sandwich construction; The energisation mode of micro-bridge resonator and micro-cantilever resonator can be electromagnetic excitation, static excitation, contrary piezoelectric excitation, electric heating excitation and photothermal excitation; Its detection mode can be piezoelectricity pick-up, capacitor vibration pick-up, electromagnetism pick-up, light signal pick-up and piezo-resistance pick-up.
Because the present invention makes micro-bridge resonator and micro-cantilever resonator on same silicon chip, the two material is identical, and thickness equates or be close that making and technology are identical simultaneously, thereby can sync response to variations in temperature; Micro-bridge resonator and micro-cantilever resonator distance are in micron dimension, thereby temperature sensing element can accurately reflect the temperature of micro-bridge resonator, the resonance frequency of micro-cantilever resonator energy real-Time Compensation variations in temperature is to the cross sensitivity of micro-bridge resonator resonance frequency like this, thereby reduce the temperature coefficient of micro-bridge resonator resonance frequency, improve the micro-bridge resonator operating temperature range.
Four, description of drawings
Fig. 1 (a) is a structural representation of the present invention, and figure (b) is the A-A cutaway view of figure (a);
Fig. 2 is the compound little beam resonator with resonance frequency temperature self-compensation function of electric heating excitation/piezo-resistance pick-up of one embodiment of the present of invention and the schematic diagram of closed-loop detection circuit.
Five, embodiment
The present invention will be further described below in conjunction with drawings and Examples, but be not limited to this embodiment.
Embodiment, referring to Fig. 1,2, it comprises micro-bridge resonator 1, micro-cantilever resonator 2, substrate 3, lead-in wire 4, differential amplifier 9,12, band pass filter 10,13, phase shifter 11,14, data fusion unit 15 and constant pressure source 16.
Compound little beam resonator is by the silicon/silicon dioxide micro-bridge resonator 1 of the electric heating excitation/voltage-sensitive bridge pick-up of making by microelectronic technique and micromachining technology on same chip with as silicon/silicon dioxide micro-cantilever resonator 2, the substrate 3 of temperature sensing element and go between and 4 form.Micro-bridge resonator 1 is identical with micro-cantilever resonator 2 materials, and thickness equates or be close that manufacture craft is identical, makes micro-cantilever resonator 2 when making micro-bridge resonator 1.Micro-cantilever resonator 2 is as temperature sensing element, by the data fusion technology, as the resonance frequency of the micro-cantilever resonator 2 of temperature sensing element can the real-Time Compensation variations in temperature to the cross sensitivity of micro-bridge resonator 1 resonance frequency.
The middle part of micro-bridge resonator 1 is manufactured with excitation resistance 5 with 1 vibration of excitation micro-bridge resonator; Gu Zhi Duan is manufactured with voltage-sensitive bridge 6 to pick up vibration signal.
The free end of micro-cantilever resonator 2 is manufactured with excitation resistance 7, Gu Zhi Duan is manufactured with voltage-sensitive bridge 8.
A diagonal angle of the voltage-sensitive bridge 6 of micro-bridge resonator 1 root links to each other with two inputs of differential amplifier 9 by lead-in wire 4.The output of differential amplifier 9 links to each other with the input of band pass filter 10 by lead-in wire 4.The output of band pass filter 10 links to each other with the input of phase shifter 11 by lead-in wire 4.The output of phase shifter 11 is connected by the end of lead-in wire 4 with excitation resistance 5.The other end ground connection of excitation resistance 5.Micro-bridge resonator 1, differential amplifier 9, band pass filter 10 and phase shifter 11 are formed the resonance frequency that micro-bridge resonator 1 is detected in the close loop resonance loop.
A diagonal angle of the voltage-sensitive bridge 8 of micro-cantilever resonator 2 roots links to each other with two inputs of differential amplifier 12 by lead-in wire 4.The output of differential amplifier 12 links to each other with the input of band pass filter 13 by lead-in wire 4.The output of band pass filter 13 links to each other with the input of phase shifter 14 by lead-in wire 4.The output of phase shifter 14 is connected by the end of lead-in wire 4 with excitation resistance 7.The other end ground connection of excitation resistance 7.Micro-cantilever resonator 2, amplifier 12, band pass filter 13 and phase shifter 14 are formed the resonance frequency that micro-cantilever resonator 2 is detected in the close loop resonance loop.
The centre frequency of band pass filter 10 is resonance frequencys of bridge resonator 1.The centre frequency of band pass filter 13 is resonance frequencys of cantilever beam resonator 2.Two frequency multiplication components in band pass filter 10 and 13 difference filtering micro-bridge resonators 1 and micro-cantilever resonator 2 output signals.
Angle in the voltage-sensitive bridge 8 remaining diagonal angles is connected with an angle in the voltage-sensitive bridge 6 remaining diagonal angles.Voltage-sensitive bridge 8 remaining last angle are connected with two outputs of constant pressure source 16 respectively with voltage-sensitive bridge 6 remaining last angle.Constant pressure source 16 provides operating voltage for the voltage- sensitive bridge 6,8 of bridge resonator 1 and cantilever beam resonator 2 roots simultaneously.
The output of phase shifter 11,14 is connected with two inputs of data fusion unit 15 by lead-in wire 4.The resonance frequency of 15 pairs of micro-bridge resonators 1 in data fusion unit and cantilever beam resonator 2 is carried out Data Fusion with the cross sensitivity of real-time elimination temperature to micro-bridge resonator 1 resonance frequency.
Claims (4)
1, a kind of compound little beam resonator of frequency output type with temperature self-compensation function, it is characterized in that: form by the micro-bridge resonator of on same chip, making [1], micro-cantilever resonator [2] and substrate [3], micro-bridge resonator [1] is identical with micro-cantilever resonator [2] material, thickness equates or is close, make simultaneously, technology is identical; Micro-cantilever resonator [2] is as temperature sensing element, by the data fusion technology, the resonance frequency of micro-cantilever resonator [2] can the real-Time Compensation variations in temperature to the cross sensitivity of micro-bridge resonator [1] resonance frequency.
2, a kind of compound little beam resonator of frequency output type according to claim 1 with temperature self-compensation function, it is characterized in that: the distance of micro-bridge resonator [1] and micro-cantilever resonator [2] is in micron dimension, and micro-cantilever resonator [2] can accurately reflect the temperature of micro-bridge resonator [1].
3, a kind of compound little beam resonator of frequency output type with temperature self-compensation function according to claim 1, it is characterized in that: micro-bridge resonator [1] and micro-cantilever resonator [2] all have double-decker or sandwich construction.
4, a kind of compound little beam resonator of frequency output type with temperature self-compensation function according to claim 1 is characterized in that: the energisation mode of micro-bridge resonator [1] and micro-cantilever resonator [2] can be electromagnetic excitation, static excitation, contrary piezoelectric excitation, electric heating excitation and photothermal excitation; Its detection mode can be piezoelectricity pick-up, capacitor vibration pick-up, electromagnetism pick-up, light signal pick-up and piezo-resistance pick-up.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 02114617 CN1202984C (en) | 2002-06-07 | 2002-06-07 | Frequency output type combined microbeam resonator with self temp ecompensation function |
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| CN 02114617 CN1202984C (en) | 2002-06-07 | 2002-06-07 | Frequency output type combined microbeam resonator with self temp ecompensation function |
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| CN1381397A true CN1381397A (en) | 2002-11-27 |
| CN1202984C CN1202984C (en) | 2005-05-25 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100411969C (en) * | 2003-08-20 | 2008-08-20 | 台达电子工业股份有限公司 | Detecting method for micromachinery structure, micro electromechanical assembly and microdetecting structure |
| CN101294824B (en) * | 2007-04-25 | 2010-08-18 | 中国科学院电子学研究所 | Electromagnetic micro-torsional pendulum resonant vibration type sensor based on micro-electronic mechanical skill |
| CN102435774A (en) * | 2011-12-07 | 2012-05-02 | 浙江大学 | Temperature compensation system and method for capacitance type micro-mechanical accelerometer |
| CN102507982A (en) * | 2011-11-02 | 2012-06-20 | 重庆理工大学 | Silicon micro-resonance type two-dimensional acceleration transducer based on photo-thermal effect |
| CN106788316A (en) * | 2015-11-25 | 2017-05-31 | 中国科学院上海微系统与信息技术研究所 | Pressure resistance type Oven Controlled Oscillator and preparation method thereof |
| CN106936334A (en) * | 2017-01-18 | 2017-07-07 | 中国电子科技集团公司信息科学研究院 | A kind of vibrational energy collector and method |
| CN110361445A (en) * | 2019-07-30 | 2019-10-22 | 西安交通大学 | A kind of highly selective CMUTs gas sensor of multi-parameter and its use and preparation method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7868522B2 (en) * | 2005-09-09 | 2011-01-11 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Adjusted frequency temperature coefficient resonator |
-
2002
- 2002-06-07 CN CN 02114617 patent/CN1202984C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100411969C (en) * | 2003-08-20 | 2008-08-20 | 台达电子工业股份有限公司 | Detecting method for micromachinery structure, micro electromechanical assembly and microdetecting structure |
| CN101294824B (en) * | 2007-04-25 | 2010-08-18 | 中国科学院电子学研究所 | Electromagnetic micro-torsional pendulum resonant vibration type sensor based on micro-electronic mechanical skill |
| CN102507982A (en) * | 2011-11-02 | 2012-06-20 | 重庆理工大学 | Silicon micro-resonance type two-dimensional acceleration transducer based on photo-thermal effect |
| CN102507982B (en) * | 2011-11-02 | 2013-09-04 | 重庆理工大学 | Silicon micro-resonance type two-dimensional acceleration transducer based on photo-thermal effect |
| CN102435774A (en) * | 2011-12-07 | 2012-05-02 | 浙江大学 | Temperature compensation system and method for capacitance type micro-mechanical accelerometer |
| CN106788316A (en) * | 2015-11-25 | 2017-05-31 | 中国科学院上海微系统与信息技术研究所 | Pressure resistance type Oven Controlled Oscillator and preparation method thereof |
| CN106788316B (en) * | 2015-11-25 | 2019-04-16 | 中国科学院上海微系统与信息技术研究所 | Pressure resistance type Oven Controlled Oscillator and preparation method thereof |
| CN106936334A (en) * | 2017-01-18 | 2017-07-07 | 中国电子科技集团公司信息科学研究院 | A kind of vibrational energy collector and method |
| CN110361445A (en) * | 2019-07-30 | 2019-10-22 | 西安交通大学 | A kind of highly selective CMUTs gas sensor of multi-parameter and its use and preparation method |
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| CN1202984C (en) | 2005-05-25 |
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