CN109506808A - A kind of SAW temperature sensor and its design method with dullness and linear output character - Google Patents
A kind of SAW temperature sensor and its design method with dullness and linear output character Download PDFInfo
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- CN109506808A CN109506808A CN201811601602.7A CN201811601602A CN109506808A CN 109506808 A CN109506808 A CN 109506808A CN 201811601602 A CN201811601602 A CN 201811601602A CN 109506808 A CN109506808 A CN 109506808A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/22—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects
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Abstract
A kind of SAW temperature sensor and its design method with dullness and linear output character, belongs to surface acoustic wave sensor technical field.The present invention makes the two resonance frequency meet TCF by designing two on same piezoelectric substrate except the arbitrary SAW resonator of parallel external position and carrying out being connected to SAW temperature sensor use in the structural parameters for designing two SAW resonators21f01=TCF22f02, and then design and obtain a kind of SAW temperature sensor with dull linear output character.SAW temperature sensor provided by the invention only needs two calibrating parameters in test, and its output varies with temperature the dull linear change of presentation.Compared to traditional SAW temperature sensor, the calibration process of test is significantly simplified while realizing gamut thermometric, reduces computation complexity.
Description
Technical field
The invention belongs to surface acoustic wave sensor technical fields, and in particular to a kind of with dull and linear output character
SAW temperature sensor and its design method.
Background technique
Surface acoustic wave (Surface Acoustic Wave, abbreviation SAW) is a kind of elasticity propagated along the surface of solids
Wave, SAW temperature sensor are a kind of devices for carrying out sense temperature dependent on the modulation of SAW.SAW temperature sensor has volume
Small, the features such as repeatability is high and function admirable, SAW temperature sensor can be realized using wireless mode and be communicated, and itself nothing
Extraneous power supply is needed, transducing signal can be exported by the energy for consuming itself savings, the characteristic with wireless and passive sensing is especially suitable
Radio detection temperature is realized under adverse circumstances for should not directly contact.
It is sensitive and conversion member that SAW temperature sensor, which is using SAW device (resonator, delay line or combinations thereof device),
Electric excitation signal is converted to mechanical wave using inverse piezoelectric effect in input terminal by part, then utilizes direct piezoelectric effect in output end
SAW is converted into electric signal output, ambient temperature can have an impact to SAW propagation characteristic and then be reflected in SAW during this
The parameters of device measure and monitor temperature with this.There are mainly two types of structures for SAW temperature sensor common at present: prolonging
Slow linear temperature sensor and mode of resonance temperature SAW sensor, every kind of structure are divided into single port and two kinds of dual-port again.With delay
Linear temperature sensor reflects that temperature value institute is different by time lag caused by temperature or phase change, mode of resonance temperature
SAW sensor is using the good frequency selectivity of SAW resonator, and caused frequency variation is after being changed by measurement temperature come body
The variation of existing temperature.The SAW resonator refers to a pair of symmetrical reflecting grating of interdigital transducer (IDT) and its both sides, they
Together form one group of acoustic resonant cavity, external electric signal through IDT since inverse piezoelectric effect can be converted to acoustical signal, generation
The reflecting grating on SAW tradition to both sides forms resonance, this allows for SAW resonator and only generates sound to the radiofrequency signal of specific frequency
It answers, this specific frequency is the resonance frequency of SAW resonator.After acoustical signal passes IDT back, the acoustical signal of specific frequency by
Electric signal output is converted in piezoelectric effect.Thus we see that, when pair established between environment temperature and resonance frequency
After should being related to, SAW resonator can serve as temperature sensor use.The resonance frequency of SAW resonator becomes with the opposite of temperature
Change can be expressed as following formula:
In formula: frAnd f0It is actual temperature T and reference temperature T respectively0When SAW resonator resonance frequency, Δ T=T-T0。
TCF1、TCF2And TCF3It is the single order temperature coefficient, second-order temperature coefficient and three rank temperature systems of SAW resonator resonance frequency respectively
Number.
At this stage the study found that for most of piezoelectric material, the opposite changes delta f of resonance frequencyr/f0With temperature
Spending change Delta T is in quadratic function relation.Therefore, TCF must be retained in actual design process1And TCF2, and can be omitted TCF3
With high-order temperature coefficient.But Δ fr/f0A resonance frequency is caused to correspond to two temperature with the quadratic function relation of Δ T
Point, this, which allows for traditional SAW temperature sensor, to work in some monotony interval of quadratic function, which limit
The temperature limit of SAW temperature sensor, while also inconvenience is brought to the test of temperature.Technical staff asks to solve this
Topic, research obtain it is a kind of using two SAW resonators and form acoustic surface wave propagation direction less than 180 in angle and
The SAW temperature sensor of composition.But the SAW temperature sensor based on this building needs to demarcate many ginsengs during the test
Number, while needing complicated calculating that could obtain temperature, practical operation difficulty is big.
Summary of the invention
Problem more for prior art SAW temperature sensor test process calibrating parameters, calculating is many and diverse, the present invention propose
A kind of SAW temperature sensor and its design method.Temperature sensor of the present invention only needs two calibrating parameters in test, and
It, which is exported, varies with temperature the dull linear change of presentation, and then can be used for the test within the scope of total temperature.
To solve the above-mentioned problems, the present invention adopts the following technical scheme:
A kind of SAW temperature sensor with dullness and linear output character, the SAW temperature sensor includes piezoelectricity base
Piece and two SAW resonators being arranged on the piezoelectric substrate, which is characterized in that between described two SAW resonators mutually
It does not contact through circuit connection, and the acoustic surface wave propagation direction of two SAW resonators forms angle α, 0 180 ° of ﹤ α ﹤；It is described
The resonance frequency ratio of two SAW resonators meets following relationship:
In formula: f01And f02It is two SAW resonators respectively in reference temperature T0When resonance frequency, TCF21And TCF22Point
Not Wei two SAW resonators second order frequency temperature coefficient.
Further, the mode of the circuit connection is serial or parallel connection.
A kind of design method with dull and linear output character SAW temperature sensor, which is characterized in that including such as
Lower step:
Step 1: successively making two SAW resonators on same piezoelectric substrate, between described two SAW resonators mutually not
Contact, and the acoustic surface wave propagation direction of two SAW resonators is made to form angle α, 0 180 ° of ﹤ α ﹤；Described two SAW resonance
The resonance frequency ratio of device meets following relationship:
In formula: f01And f02It is two SAW resonators respectively in reference temperature T0When resonance frequency, TCF21And TCF22Point
Not Wei two SAW resonators second order frequency temperature coefficient；
Step 2: two SAW resonators that step 1 is obtained carry out circuit connection by the way of serial or parallel connection.
The principle of the present invention is specific as follows: the opposite resonance frequency shift variation with temperature of two SAW resonators can table
Up to for following formula:
Δfr1/f01=TCF11ΔT+TCF21ΔT2 (1)
Δfr2/f02=TCF12ΔT+TCF22ΔT2 (2)
In formula: fr1And fr2It is resonance frequency of two SAW resonators in actual temperature T, Δ f respectivelyr=fr-f0,
TCF11And TCF12The fundamental frequency temperature coefficient of respectively two SAW resonators, TCF21And TCF22Respectively two SAW resonance
The second order frequency temperature coefficient of device；
It can thus be appreciated that:
Although needing to demarcate in test at this point, having obtained the linear relationship of temperature variation and resonance frequency shift
f01, TCF11, TCF21, f02, TCF12, TCF22These coefficients, and work as and measure resonance frequency fr1And fr2Afterwards, it is still desirable to
The complicated available temperature of calculating.For this purpose, we through further research, it has been found that, when design two SAW resonators joining
Examine temperature T0Resonance frequency ratio meet TCF21f01=TCF22f02When, formula (3) can be expressed as following formula:
Wherein:
C=K (f02-f01)
From simplified expression formula it is found that K and C are two relevant to piezoelectric substrate materials and device architecture parameter
Coefficient.Therefore, when piezoelectric substrate determines, i.e., material parameter determines, and the structure of two SAW resonators and its on piezoelectric substrate
Placement position determine after, K and C are constants.Thus it was found that the difference of the resonance frequency of two SAW resonators is proportional to
Temperature.Therefore, in conjunction with common sense in the field, when the direction of the piezoelectric substrate materials of selection and two SAW resonators, determination (is being pressed
Position on electric substrate determines) when, the velocity of sound of two SAW resonators just can determine, TCF21And TCF22Also it determines therewith
(TCF21And TCF22Determined by the material property of piezoelectric substrate), by TCF21f01=TCF22f02It can determine f01And f02Ratio.It is false
If two SAW resonators are denoted as SAW resonator 1 and SAW resonator 2 respectively, by the interdigital transducing for designing SAW resonator 1
Device (IDT), available SAW resonator 1 is in reference temperature T0When resonance frequency f01, f from the above analysis01And f02
Ratio determine that therefore SAW resonator 2 is in reference temperature T0When resonance frequency f02It determines, and then passes through resonance frequency f02It can be with
Determine the structure of SAW resonator 2.Thus the SAW temperature sensor with dull and linear output character is designed.Compared to tradition
Temperature sensor is constituted using two SAW resonators and obtains temperature data, and this invention simplifies the calibration process of test, effectively drop
The low complexity calculated, and then realize SAW sensor simply, easily thermometric.
Compared with prior art, the invention has the benefit that
The present invention is by designing two except the arbitrary SAW resonator of parallel external position on same piezoelectric substrate and connecting
It connects and is used as SAW temperature sensor, make the two resonance frequency more special than meeting in the structural parameters for designing two SAW resonators
Different relationship, so that the SAW temperature sensor that design obtains has dull and linear output character.SAW temperature provided by the invention
Sensor only needs two calibrating parameters in test, and its output varies with temperature the dull linear change of presentation.Compared to tradition
SAW temperature sensor significantly simplifies the calibration process of test while realizing gamut thermometric, and it is complicated to reduce calculating
Degree.
Detailed description of the invention
Fig. 1 is parallel-connection structure schematic diagram of the present invention.
Fig. 2 is the present embodiment sample sterogram.
Fig. 3 is the Δ T and (f of the present embodiment fittingr1-fr2) between relational graph.
Specific embodiment
Technical solution of the present invention is described in detail with specific embodiment with reference to the accompanying drawings of the specification: embodiment:
(1) preparation of SAW temperature sensor:
Two SAW resonators are denoted as SAW resonator 1 and SAW resonator 2, the main body of SAW resonator by the present embodiment respectively
Structure is as shown in Figure 1, include interdigital transducer (referred to as interdigital electrode, English are abbreviated as IDT) and symmetrically reflecting about IDT
Grid carry out circuit connection, surface acoustic wave in SAW resonator to SAW resonator 1 and SAW resonator 2 using parallel way in Fig. 1
The direction of propagation is as illustrated by the arrows in fig. 1.
In the present embodiment the Eulerian angles of SAW resonator 1 and SAW resonator 2 be respectively set to (0 °, 138.5 °, 26.6 °) and
(0 °, 138.5 °, 86.6 °), in both directions, the velocity of sound and second order frequency temperature coefficient of SAW resonator be it is known,
In: on (0 °, 138.5 °, 26.6 °) direction, the velocity of sound 2716m/s, TCF21=4.27 × 10-8℃-2；(0 °, 138.5 °,
86.6 °) on direction, the velocity of sound 2466m/s, TCF22=6.4 × 10-8℃-2.It is possible thereby to be calculated, SAW resonator 1 with
The ratio between resonance frequency of SAW resonator 2 is about 3:2, and the ratio between wavelength is about 3: 4.It is pitched at equal intervals in conjunction with ability domain knowledge to design
The structural parameters for referring to the SAW resonator of electrode, select the wavelength of SAW resonator 1 and SAW resonator 2 for 12 μm and 16 μm, then
The width of the interdigital electrode of SAW resonator 1 is 3 μm, and the width of the interdigital electrode of SAW resonator 2 is 4 μm.
After determining the structural parameters of SAW resonator, the present embodiment is based on microelectronics photoetching process in LGS piezoelectric substrate
Upper production SAW resonator 1 and SAW resonator 2, it is specific that figure is carried out to electrode using contact ultraviolet photolithographic technology and stripping technology
Change processing, it is preferred that, the interdigital electrode of SAW resonator 1 is made of double layer of metal film in the present embodiment, and concrete operations are such as
Under: the Ti film of 10nm thickness is first deposited on LGS substrate as adhesive layer, then using electron beam evaporation method on Ti buffer layer
The Au film for sputtering 100nm thickness, it is as shown in Figure 2 to be prepared sample object figure.
(2) temperature test:
SAW temperature sensor made from the present embodiment is subjected to test calibration at different temperatures, sets room temperature as reference
Temperature T0, SAW temperature sensor is placed in high temperature furnace make its temperature be successively increased to from room temperature 50 DEG C, 100 DEG C, 150 DEG C,
200 DEG C, 250 DEG C, 300 DEG C, 350 DEG C until 400 DEG C, it is humorous at each temperature using vector network analyzer to measure two SAW
The difference Δ f of the resonance frequency of vibration devicer12(Δfr12=fr1-fr2), and establish Δ T and (fr1-fr2) between relationship, such as Fig. 3 institute
Show.Constant K and C can be obtained after linear fit, the constant K and C of SAW temperature sensor are respectively -0.00011 DEG C/Hz
With 7988 DEG C, to obtain temperature and Δ fr12Between simple linear relationship:
Δ T=K (fr1-fr2)+C；
As long as at this point, measuring the resonance frequency f of two devicesr1And fr2, complicated calculating is needed not move through, can be obtained
To a unique Δ T value, to realize the measurement to temperature.
The embodiment of the present invention is elaborated in conjunction with attached drawing above, but the invention is not limited to above-mentioned
Specific embodiment, above-mentioned specific embodiment is only schematical, rather than restrictive, the ordinary skill people of this field
Member under the inspiration of the present invention, can also make many in the case where not departing from present inventive concept and claimed range
Deformation, these belong to protection of the invention.
Claims (3)
1. a kind of with dull and linear output character SAW temperature sensor, the SAW temperature sensor includes piezoelectric substrate
And two SAW resonators on the piezoelectric substrate are set, which is characterized in that between described two SAW resonators mutually not
Contact is by circuit connection, and the acoustic surface wave propagation direction of two SAW resonators forms angle α, 0 ﹤ α ﹤, 180 wave；It is described
The resonance frequency ratio of two SAW resonators meets following relationship:
In formula: f01And f02It is two SAW resonators respectively in reference temperature T0When resonance frequency, TCF21And TCF22Respectively
The second order frequency temperature coefficient of two SAW resonators.
2. SAW temperature sensor according to claim 1, which is characterized in that the mode of the circuit connection be series connection or
It is in parallel.
3. a kind of design method with dull and linear output character SAW temperature sensor, which is characterized in that including as follows
Step:
Step 1: successively making two SAW resonators on same piezoelectric substrate, do not connect mutually between described two SAW resonators
Touching, and the acoustic surface wave propagation direction of two SAW resonators is made to form angle α, 0 180 ° of ﹤ α ﹤；Described two SAW resonators
Resonance frequency ratio meet following relationship:
In formula: f01And f02It is two SAW resonators respectively in reference temperature T0When resonance frequency, TCF21And TCF22Respectively
The second order frequency temperature coefficient of two SAW resonators；
Step 2: two SAW resonators that step 1 is obtained carry out circuit connection by the way of serial or parallel connection.
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| CN201811601602.7A CN109506808B (en) | 2018-12-26 | 2018-12-26 | SAW temperature sensor with monotone and linear output characteristics and design method thereof |
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| CN201811601602.7A CN109506808B (en) | 2018-12-26 | 2018-12-26 | SAW temperature sensor with monotone and linear output characteristics and design method thereof |
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| CN109506808B CN109506808B (en) | 2020-12-18 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111366111A (en) * | 2020-03-30 | 2020-07-03 | 电子科技大学 | Strain sensor composed of three LGS surface acoustic wave resonators and testing method |
| CN113155305A (en) * | 2021-01-18 | 2021-07-23 | 国网吉林省电力有限公司长春供电公司 | Passive surface acoustic wave temperature measurement reader for high-voltage power cable connector |
| CN114112102A (en) * | 2021-11-24 | 2022-03-01 | 之江实验室 | Surface acoustic wave temperature sensor with linear output characteristic and preparation method |
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| CN111366111A (en) * | 2020-03-30 | 2020-07-03 | 电子科技大学 | Strain sensor composed of three LGS surface acoustic wave resonators and testing method |
| CN113155305A (en) * | 2021-01-18 | 2021-07-23 | 国网吉林省电力有限公司长春供电公司 | Passive surface acoustic wave temperature measurement reader for high-voltage power cable connector |
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