CN1851853A - Device and method for reducing thin-film type capacitance vacuum gauge zero-point drift - Google Patents
Device and method for reducing thin-film type capacitance vacuum gauge zero-point drift Download PDFInfo
- Publication number
- CN1851853A CN1851853A CN 200510126344 CN200510126344A CN1851853A CN 1851853 A CN1851853 A CN 1851853A CN 200510126344 CN200510126344 CN 200510126344 CN 200510126344 A CN200510126344 A CN 200510126344A CN 1851853 A CN1851853 A CN 1851853A
- Authority
- CN
- China
- Prior art keywords
- vacuum gauge
- vacuum
- isolating valve
- switch
- film type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005101263448A CN100362621C (en) | 2005-12-07 | 2005-12-07 | Device and method for reducing thin-film type capacitance vacuum gauge zero-point drift |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005101263448A CN100362621C (en) | 2005-12-07 | 2005-12-07 | Device and method for reducing thin-film type capacitance vacuum gauge zero-point drift |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1851853A true CN1851853A (en) | 2006-10-25 |
CN100362621C CN100362621C (en) | 2008-01-16 |
Family
ID=37133328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101263448A Active CN100362621C (en) | 2005-12-07 | 2005-12-07 | Device and method for reducing thin-film type capacitance vacuum gauge zero-point drift |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100362621C (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101928924A (en) * | 2010-05-11 | 2010-12-29 | 赫得纳米科技(昆山)有限公司 | Vacuum sputtering coating equipment |
CN107841730A (en) * | 2017-11-23 | 2018-03-27 | 滁州国凯电子科技有限公司 | A kind of method of extension ALD vacuum meter service lifes |
CN109411385A (en) * | 2017-08-17 | 2019-03-01 | 北京北方华创微电子装备有限公司 | Vacuum gauge connection component and semiconductor equipment |
CN114486062A (en) * | 2022-03-31 | 2022-05-13 | 季华实验室 | Capacitance film vacuum gauge for eliminating film stress |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0831745A (en) * | 1994-07-12 | 1996-02-02 | Kokusai Electric Co Ltd | Semiconductor manufacturing equipment |
JPH10116825A (en) * | 1996-10-15 | 1998-05-06 | Kokusai Electric Co Ltd | Semiconductor manufacturing device |
JPH10153510A (en) * | 1996-11-21 | 1998-06-09 | Nec Kansai Ltd | Vacuum apparatus and diaphragm vacuum gauge |
JP2004239770A (en) * | 2003-02-06 | 2004-08-26 | Nhv Corporation | Piping structure for attaching ionization vacuum gage |
US7363807B2 (en) * | 2004-04-28 | 2008-04-29 | Sid Harvey Industries, Inc. | Pump testing apparatus and method |
-
2005
- 2005-12-07 CN CNB2005101263448A patent/CN100362621C/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101928924A (en) * | 2010-05-11 | 2010-12-29 | 赫得纳米科技(昆山)有限公司 | Vacuum sputtering coating equipment |
CN109411385A (en) * | 2017-08-17 | 2019-03-01 | 北京北方华创微电子装备有限公司 | Vacuum gauge connection component and semiconductor equipment |
CN107841730A (en) * | 2017-11-23 | 2018-03-27 | 滁州国凯电子科技有限公司 | A kind of method of extension ALD vacuum meter service lifes |
CN114486062A (en) * | 2022-03-31 | 2022-05-13 | 季华实验室 | Capacitance film vacuum gauge for eliminating film stress |
Also Published As
Publication number | Publication date |
---|---|
CN100362621C (en) | 2008-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1851853A (en) | Device and method for reducing thin-film type capacitance vacuum gauge zero-point drift | |
CN106644183B (en) | Measuring method of variable-stroke flexible force sensor based on pneumatic variable stiffness | |
CN210923596U (en) | Analysis system for disilane in silane | |
CN205665060U (en) | Four -channel VOC gas production device | |
CN200975956Y (en) | Sampling device | |
WO2020224004A1 (en) | Serpentine mass spectrometer continuous variable-pressure sampling device and method | |
CN209984969U (en) | High-position fractionation system | |
CN213474706U (en) | Positive and negative pressure switching device | |
CN201096667Y (en) | Adjustment and control device for keeping positive pressure at inlet | |
CN214288273U (en) | Simple anhydrous and oxygen-free experimental device | |
CN208966738U (en) | A kind of pneumatic control system of linear voltage decreasing | |
CN202884205U (en) | Pneumatic control system for stepless regulation of opening of water-sealed valve | |
CN208719522U (en) | A kind of linkage valve | |
CN220505952U (en) | Double-acting adjusting type module | |
CN213121028U (en) | Unloading valve air tightness detection system | |
CN205280413U (en) | Online liquid sampling device device of single driving piping erection formula of cylinder | |
CN102927351A (en) | Stepless regulation pneumatic control system for opening degree of water-sealing valve | |
CN2798154Y (en) | Improvmen of venturi tube | |
CN2881237Y (en) | Electromagnetic fluid control valve | |
CN200949578Y (en) | Distributor | |
CN1265442C (en) | Buffer of manometer inductor for dry etch reaction chamber | |
CN217868719U (en) | Instrument control box of pressure monotonous system of coke oven carbonization chamber | |
CN209705388U (en) | Pneumatic gate valve with pressure detecting | |
CN219035723U (en) | Electric proportion micro-pressure relief valve with self-pressure relief structure | |
CN109826979B (en) | Multifunctional combined type vacuum valve and vacuum equipment using same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Chinalight Solar Co. Ltd. Assignor: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing Contract fulfillment period: 2009.4.10 to 2015.4.9 Contract record no.: 2009110000095 Denomination of invention: Device and method for reducing thin-film type capacitance vacuum gauge zero-point drift Granted publication date: 20080116 License type: Exclusive license Record date: 2009.5.14 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.4.10 TO 2015.4.9; CHANGE OF CONTRACT Name of requester: CHINA LIGHT SOLAR CO., LTD Effective date: 20090514 |
|
CP03 | Change of name, title or address |
Address after: No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone, 100176 Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
|
CP03 | Change of name, title or address |