CN1851044A - Master-slave integrated control system structure - Google Patents
Master-slave integrated control system structure Download PDFInfo
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- CN1851044A CN1851044A CN 200510066336 CN200510066336A CN1851044A CN 1851044 A CN1851044 A CN 1851044A CN 200510066336 CN200510066336 CN 200510066336 CN 200510066336 A CN200510066336 A CN 200510066336A CN 1851044 A CN1851044 A CN 1851044A
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Abstract
The invention discloses the collective controlling system of the principal and subordinate model, it relates to the ion injecting machine belonging to the semiconductor producing domain. The frame includes; one main control, above one son control and the main controlling computer, the said host control can be connected with the host computer by the one end of the both directional optical fiber, the other end of the both directional optical fiber connects the son control; the said host control is the double ends control; the said son control can include the high electric positional point and the terra electric position son control, the high electric position son control are connected by the optical fiber, the terra electric position control are connected by the optical fiber. The invention has many merits such as the high capability of the anti-jamming, the good stability and the good dependability.
Description
Technical field
The present invention relates to a kind of master-slave mode centralized Control system structure, relate to ion implanter especially, belong to field of manufacturing semiconductor devices.
Background technology
Along with the semiconducter device integrated level is more and more higher, the wafer size is increasing, and the unit component size is more and more littler, and the function of semiconductor manufacturing equipment is also just more and more stronger, and this has proposed more and more higher requirement with regard to the Controlling System of giving equipment.Control techniques always is the core technology and the difficult point of ion beam implanter, particularly to make ion implanter satisfy the requirement of production-line technique, Controlling System is must controlled function perfect, the control command response rapidly, command execution accurately and reliably, abnormality processing rapidly effectively and the complete machine working stability reliable, the level of automation height.
Yet the domestic ion beam implanter of developing only is applicable to laboratory work mostly at present, and its Controlling System adopts distributing local intelligence control scheme mostly, and function is perfect inadequately, command response is rapid inadequately, level of automation is not high enough; Though and external product performance is than good, price is very high again, by domestic most manufacturers unacceptable.
Summary of the invention
The present invention promptly is a kind of master-slave mode centralized Control system structure that proposes at problems of the prior art, and this structure can solve complicated Controlling System and the contradiction between response speed and the reliability preferably.
The present invention is achieved through the following technical solutions:
A kind of master-slave mode centralized Control system structure is characterized in that: principal controller, above sub-controller and main control computer, and described principal controller is connected with main control computer by bidirectional optical fiber one end, and the other end and sub-controller are connected in series.
Described principal controller is a dual-port controller; Described sub-controller can comprise noble potential sub-controller and ground potential sub-controller, with the optical fiber polyphone, contacts with optical fiber between each ground potential sub-controller between each noble potential sub-controller; Described sub-controller adopts the absolute address coding.
The present invention has following remarkable advantage:
(1) the information transmission between principal controller and each sub-controller, adopt the two fiber optic networks of high speed serialization, standard serial port communications protocol, fundamentally eliminate complicated machine line and intercepted influencing each other between each parts, improve the interference free performance of system greatly, thereby improved the stability and the reliability of complete machine;
(2) the next sub-controller accepted standard modular design has significantly reduced the value volume and range of product of sub-controller, makes machine reliable, and maintenance, repair are convenient;
(3) message exchange of each sub-controller and principal controller is only distinguished by address code, thereby the sub-controller of same type can exchange, and the order of connection of sub-controller in optical fiber loop is unrestricted;
(4) this master-slave mode centralized Control system structure, allow main control computer directly to obtain the status information of each parts of machine, if note abnormalities, can react rapidly, make the method that realizes full-automation simplify more, control performance is more efficient, and it is rapider to handle abnormal conditions, and report information is more direct.
Description of drawings
Fig. 1 is the block diagram of a kind of master-slave mode centralized Control system structure of the present invention;
Fig. 2 is the embodiments of the invention workflow diagram.
Embodiment
The invention will be described further below in conjunction with the drawings and specific embodiments, but not as the qualification novel to the present invention.
Ion beam implanter Controlling System complexity, its Controlling System comprises traditional ion source power supply control, the control of bunch system power supply, the inflation system of supplying gas control, flow promoter system control and vacuum system control, and single target disc angular setting control of the wide-angle that comprises uniqueness and target disc motion control, the control that the intrasystem disk of target chamber transmits in valut and between target disc back and forth automatically, in addition, more comprise the control that ionic fluid implantation dosage heterogeneity detects and revises automatically automatically, the reference mark reaches more than 200, nearly 70 of controlled part, but sum up controlled quatity and can be divided into power supply control, switching value control, electric machine control, sweeping generator control and implantation dose uniformity are controlled five classes, and then sub-controller also can correspondingly be elected five kinds as.If adopt the master-slave mode centralized control technique, five kinds of sub-controllers of classification selection standard are controlled parts, can simplification so that Controlling System becomes, can also reach command response rapidly, command execution accurately and reliably, abnormality processing rapidly effectively and the requirement of complete machine stable and reliable operation, realized full-automatic control.
With reference to figure 1, master-slave mode centralized Control system structure, comprise a principal controller 1, above sub-controller 2 and main control computer 3, wherein principal controller 1 is a dual-port controller, be connected with main control computer 3 by bidirectional optical fiber one end, the other end is connected with sub-controller 2, sub-controller 2 is performer of order, comprise some noble potential sub-controllers and some ground potential sub-controllers, each sub-controller all has independently geocoding, contact with optical fiber polyphone back and principal controller 1 between each noble potential sub-controller, between each ground potential sub-controller with behind the optical fiber polyphone also with principal controller 1 polyphone, sub-controller 2 is carried out the order that main control computer 3 is sent, the operation of going to function unit topworks; Otherwise sub-controller 2 is uploaded to main control computer 3 with the status signal of each parts topworks by principal controller 1, makes judgement by 3 pairs of status signals of main control computer, determines the order that next step sends again.That is: all controls are coordinated to finish by the main control computer.
Embodiment: in the target chamber system control of ion implanter, the setting control of left and right directed motor.
In the target chamber system control of ion implanter, the location of left and right directed motor is a comparatively complicated accurate position fixing process, and it is then comparatively simple and reliable to utilize this master-slave mode centralized monitoring system to realize.
Referring to Fig. 2, when motor need be located, main control computer 3 sends directed motor positioning command (step 101), pass to principal controller 2 by optical fiber, principal controller 2 is selected corresponding motor sub-controller according to predetermined geocoding, carry out one section locating procedure, utilize optical fiber to pass to corresponding motor sub-controller 3 (step 102) again, the motion of motor sub-controller 3 control motors, positional information with motor feeds back to main control computer 3 (step 103) by principal controller 1 simultaneously, main control computer 3 is made motor stop motion decision instruction (step 104) or is continued positioning instruction (step 105) according to practical situation, thereby the repetition above-mentioned steps sends motor sub-controller 2 to by principal controller 1, the kinestate of control motor, accurately locate the accurate location of the directed motor of target chamber that quits work until motor.
Specific embodiment of the present invention elaborates content of the present utility model.For persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from the utility model spirit it being done all constitutes the infringement to the utility model patent, with corresponding legal responsibilities.
Claims (4)
1. master-slave mode centralized Control system structure is characterized in that: principal controller, above sub-controller and main control computer, and described principal controller is connected with main control computer by bidirectional optical fiber one end, and the other end and sub-controller are connected in series.
2. a kind of master-slave mode centralized Control system structure as claimed in claim 1, it is characterized in that: described principal controller is a dual-port controller.
3. a kind of master-slave mode centralized Control system structure as claimed in claim 1, it is characterized in that: described sub-controller can comprise noble potential sub-controller and ground potential sub-controller, with the optical fiber polyphone, contact with optical fiber between each ground potential sub-controller between each noble potential sub-controller.
4. a kind of master-slave mode centralized Control system structure as claimed in claim 1 is characterized in that: described sub-controller adopts the absolute address coding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510066336 CN1851044A (en) | 2005-04-22 | 2005-04-22 | Master-slave integrated control system structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510066336 CN1851044A (en) | 2005-04-22 | 2005-04-22 | Master-slave integrated control system structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1851044A true CN1851044A (en) | 2006-10-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510066336 Withdrawn CN1851044A (en) | 2005-04-22 | 2005-04-22 | Master-slave integrated control system structure |
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| CN (1) | CN1851044A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103137412A (en) * | 2011-11-30 | 2013-06-05 | 中国科学院微电子研究所 | modular ion implanter control system |
-
2005
- 2005-04-22 CN CN 200510066336 patent/CN1851044A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103137412A (en) * | 2011-11-30 | 2013-06-05 | 中国科学院微电子研究所 | modular ion implanter control system |
| CN103137412B (en) * | 2011-11-30 | 2016-09-28 | 中国科学院微电子研究所 | modular ion implanter control system |
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