CN109920714A - A kind of Ion Implantation Equipment rotation angle monitoring system - Google Patents
A kind of Ion Implantation Equipment rotation angle monitoring system Download PDFInfo
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- CN109920714A CN109920714A CN201910190627.0A CN201910190627A CN109920714A CN 109920714 A CN109920714 A CN 109920714A CN 201910190627 A CN201910190627 A CN 201910190627A CN 109920714 A CN109920714 A CN 109920714A
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- ion implantation
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- angle monitoring
- implantation equipment
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 25
- 238000005468 ion implantation Methods 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 claims description 9
- 238000004891 communication Methods 0.000 claims description 4
- 239000004973 liquid crystal related substance Substances 0.000 claims description 3
- 240000007594 Oryza sativa Species 0.000 claims 1
- 235000007164 Oryza sativa Nutrition 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 235000009566 rice Nutrition 0.000 claims 1
- 238000011897 real-time detection Methods 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000004291 sulphur dioxide Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of Ion Implantation Equipments to rotate angle monitoring system, including high vacuum cavity portion and atmospheric portion, the lower end of the high vacuum cavity portion is provided with atmospheric portion, the high vacuum cavity portion and atmospheric portion pass through socket connection, the lower end of the atmospheric portion is provided with original machine platform flexible cable, a kind of Ion Implantation Equipment of present invention rotation angle monitoring system using a hardware and software in conjunction with system be transferred to computer system to be detected to the transmission gear of last rotating suction disc and obtain data, different limitations is arranged according to different rotation angles using SPC software in system, software will generate alarm to signal main engine bed if overruning, then engineer goes to check and solve the problems, such as according to alarm, the ROPLAT rotation angle solved in Ion Implantation Equipment rotation angle monitoring can not be Line real time monitoring, caused by avoiding as not having real-time detection the problem of large quantities of wafer loss.
Description
Technical field
The invention belongs to semiconductor crystal wafers to produce correlative technology field, and in particular to a kind of Ion Implantation Equipment (APPLY/
VARIAN E220/500 sequence of ion implanter) Roplat rotation angle monitoring system.
Background technique
Ion Implantation Equipment is produced for semiconductor crystal wafer, is the key machine of wafer production.ROPLAT component is then responsible for
The moving component of four-quadrant injection, four-quadrant injection are also the critical process during chip production, and wafer is being transferred to electrostatic
Sucker rotation is driven to realize that the angle of four quadrants is injected by ROPLAT component after on sucker.
Existing APPLY/VARIAN E220/500 sequence of ion implanter Roplat rotation angle monitoring technology exist with
Lower problem: since ROPLAT component is located in vacuum cavity and nearby more than component and accurate, the angle requirement of rotation is accurate, but
It is to be located at motor side due to this position feedback, and there are also many connecting components among the rotation sucker of motor to the end, one
This any one intermediate component of denier goes wrong or encoder phase shortage etc. will result in the variation of sucker actual rotary position and machine
The problem of the phenomenon that platform does not have real-time detection, will not issue alarm.
Summary of the invention
The purpose of the present invention is to provide a kind of Ion Implantation Equipments to rotate angle monitoring system, to solve above-mentioned background technique
Middle proposition existing Ion Implantation Equipment rotation angle monitoring in ROPLAT rotation angle can not on line real-time monitoring problem,
Caused by avoiding as there is no real-time detection the problem of large quantities of wafer loss.
To achieve the above object, the invention provides the following technical scheme: a kind of Ion Implantation Equipment rotates angle monitoring system,
Including high vacuum cavity portion and atmospheric portion, the lower end of the high vacuum cavity portion is provided with atmospheric portion, the Gao Zhen
By socket connection, the lower end of the atmospheric portion is provided with original machine platform flexible cable, described for cavity body portion and atmospheric portion
The right end of original machine platform flexible cable is provided with connection board original controller, and the right end of the connection board original controller is provided with newly
Increase sensor line, the upper end of the newly-increased sensor line is provided with motor feedback control line, the motor feedback control line
Upper end be provided with control interface, the upper end of the control interface is provided with controller, the outside table of the left end of the controller
End is provided with functional select switch, and the right end of the functional select switch is provided with power outlet, the lower end of the power outlet
It is provided with communication plug, the right end of the controller is provided with Industry Control host, and the controller and Industry Control host are logical
Electric connection is crossed, the lower end of the Industry Control host is provided with mouse, and the mouse is with Industry Control host by electrically connecting
It connects, the lower end of the Industry Control host is provided with keyboard, and the upper end of the Industry Control host is provided with display, described aobvious
Show that device and Industry Control host pass through electric connection.
Preferably, the display is ten eight points five inch liquid crystal screens, and resolution ratio 1366 multiplies 768, the ruler of the display
Very little is that width is 44 centimetres and height is 34 centimetres.
Preferably, the newly-increased sensor line is provided with two altogether, and two newly-increased sensor lines are in pair respectively
Claim the right end that connection board original controller is set, the external shell of two newly-increased sensor lines uses PP environment-friendly materials
It is manufactured, and using the high soft drag chain shielded signal line of industry.
Preferably, the controller is cuboid structure, and the size of the controller is that length is 26 centimetres, width
For 15 centimetres and height is eight centimetres.
Preferably, the functional select switch is to dial to turn round cylindrical structure, and the size of the functional select switch is maximum
Diameter is six millimeters, and the functional select switch and power switch are electrically connected.
Preferably, the material that the original machine platform flexible cable obtains external shell is to use made of PP environment-friendly materials, described
Original machine platform flexible cable is provided with three groups altogether, and the diameter of section of original machine platform flexible cable described in three groups is 40 millimeters.
Preferably, the keyboard uses wired connection, the keyboard and Industry Control host by being electrically connected, the key
Disk and display pass through electric connection.
Compared with prior art, the present invention provides a kind of Ion Implantation Equipments to rotate angle monitoring system, and having following has
Beneficial effect: a kind of Ion Implantation Equipment of present invention rotation angle monitoring system using a hardware and software in conjunction with system come to last
The transmission gear of rotating suction disc detected and obtain data and be transferred to computer system, system is using SPC software come basis
Different limitations is arranged in different rotation angles, and software will generate alarm to signal main engine bed if overruning, then work
Cheng Shi goes to check and solve the problems, such as according to alarm, solves the ROPLAT rotation in existing Ion Implantation Equipment rotation angle monitoring
Angle can not on line real-time monitoring problem, caused by avoiding as there is no real-time detection the problem of large quantities of wafer loss.
Detailed description of the invention
Fig. 1 is that Ion Implantation Equipment of the invention rotates angle monitoring structure schematic diagram；
Fig. 2 is the working principle of the invention structural schematic diagram；
Fig. 3 is controller architecture schematic diagram of the invention；
Fig. 4 is workflow schematic diagram of the invention；
In figure: 1, high vacuum cavity portion；2, atmospheric portion；3, original machine platform flexible cable；4, board original controller is connected；
5, sensor line is increased newly；6, motor feedback control line；7, control interface；8, functional select switch；9, controller；10, power supply
Socket；11, communication plug；12, keyboard；13, mouse；14, Industry Control host；15, display.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-4 is please referred to, the present invention provides a kind of technical solution: a kind of Ion Implantation Equipment rotation angle monitoring system, packet
High vacuum cavity portion 1 and atmospheric portion 2 are included, the lower end of high vacuum cavity portion 1 is provided with atmospheric portion 2, high vacuum cavity
Part 1 and atmospheric portion 2 are connected, so that integrally-built stability is mentioned by socket connection by socket
Height, the lower end of atmospheric portion 2 are provided with original machine platform flexible cable 3, and it is former that the right end of original machine platform flexible cable 3 is provided with connection board
The right end of controller 4, connection board original controller 4 is provided with newly-increased sensor line 5, and the upper end of newly-increased sensor line 5 is set
It is equipped with motor feedback control line 6, the upper end of motor feedback control line 6 is provided with control interface 7, the upper end setting of control interface 7
There is controller 9, the outside table end of the left end of controller 9 is provided with functional select switch 8, the right end setting of functional select switch 8
There is power outlet 10, the lower end of power outlet 10 is provided with communication plug 11, and the right end of controller 9 is provided with Industry Control host
14, by being electrically connected, the lower end of Industry Control host 14 is provided with mouse 13, mouse for controller 9 and Industry Control host 14
13 pass through electric connection with Industry Control host 14, and the lower end of Industry Control host 14 is provided with keyboard 12, Industry Control host
14 upper end is provided with display 15, and display 15 and Industry Control host 14 pass through electric connection.
Further, display 15 is liquid crystal display, so that the data of display are more clear, the ruler of display 15
Very little width is 44 centimetres and height is 34 centimetres.
Further, it increases sensor line 5 newly and is provided with two altogether, two newly-increased sensor lines 5 are symmetrical set respectively
In the right end of connection board original controller 4, the external shell of two newly-increased sensor lines 5 is used made of PP environment-friendly materials,
So that newly-increased sensor line 5 can will not have the characteristics that pollution.
Further, controller 9 is cuboid structure, the size of controller 9 cun be length be 26 centimetres, width ten
Five centimetres and height be eight centimetres so that more preferably working under the action of controller 9.
Further, functional select switch 8 is to dial to turn round cylindrical structure, and the size of functional select switch 8 is that maximum gauge is
Six millimeters, so that feeling more comfortable when pressing, functional select switch 8 and power switch are electrically connected.
Further, it is to use made of PP environment-friendly materials that original machine platform flexible cable 3, which obtains the material of external shell, so as to
So that the effect being preferably attached, original machine platform flexible cable 3 is provided with three groups altogether, section of three groups of original machine platform flexible cables 3
Face diameter is 40 millimeters.
Further, keyboard 12 uses wired connection, keyboard 12 and Industry Control host 14 by being electrically connected, keyboard 12 with
Display 15 is by being electrically connected, so as to can preferably carry out the operation of control display 15 by keyboard 12.
The working principle of the invention and process for using: it after the present invention installs, first checks for such machine and whether can
It works normally, checks that the plug on electric wire is finished with whether socket connect, if there is abnormal noise, should close immediately such
Machine waits the maintenance of professional, and when the production of semiconductor to be carried out circle, controller 9 believes the pulse of sensor first
It number is counted, controller 9 and power switch are electrically connected, the model HRTC-03A of controller 9, due to not extra sky
Between additional sensor is installed, so carrying out processing to ROPLAT ontology is transformed out the installation connection board original control of one small space
Device 4, connection board original controller 4 are used to incude the number of teeth of transmission gear, comprising high vacuum cavity portion 1 and atmospheric portion 2
Connecting line is connected to controller 9, and every primary rotation of completion just generates a data value and is sent to host, and system software utilizes
Formula is converted into angular values record, and host system analyzes software sharing by a SPC, and the angle value rotated every time constitutes data
Chain generates alarm, and 89 degree of lower limit be arranged, the upper limit 91 using the alarm rule of setting upper and lower bound etc.
Degree, if the upper limit or lower range in multiple samplings there are two sample beyond setting, then software just will call the police.When continuous several
Secondary rotation angle goes beyond the scope software extremely then can be to signal controller, the Do relay termination of acquisition module in controller 9
Coil output, software are acted to Do low level commands relays, and motor power circuit connects the normally-closed contact of relay, electric in this way
Electromechanical resource loop is just disconnected, so that host end will generate alarm.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (7)
1. a kind of Ion Implantation Equipment rotates angle monitoring system, including high vacuum cavity portion (1) and atmospheric portion (2), special
Sign is: the lower end of the high vacuum cavity portion (1) is provided with atmospheric portion (2), the high vacuum cavity portion (1) and big
By socket connection, the lower end of the atmospheric portion (2) is provided with original machine platform flexible cable (3), the original machine platform for gas part (2)
The right end of flexible cable (3) is provided with connection board original controller (4), the right end setting of connection board original controller (4)
There is newly-increased sensor line (5), the upper end of the newly-increased sensor line (5) is provided with motor feedback control line (6), the electricity
The upper end of machine feedback control line (6) is provided with control interface (7), and the upper end of the control interface (7) is provided with controller (9),
The outside table end of the left end of the controller (9) is provided with functional select switch (8), the right end of the functional select switch (8)
It is provided with power outlet (10), the lower end of the power outlet (10) is provided with communication plug (11), the right side of the controller (9)
End is provided with Industry Control host (14), and the controller (9) and Industry Control host (14) are by being electrically connected, the industry
The lower end of control host (14) is provided with mouse (13), and the mouse (13) and Industry Control host (14) pass through electric connection,
The lower end of the Industry Control host (14) is provided with keyboard (12), and the upper end of the Industry Control host (14) is provided with display
Device (15), the display (15) and Industry Control host (14) pass through electric connection.
2. a kind of Ion Implantation Equipment according to claim 1 rotates angle monitoring system, it is characterised in that: the display
It (15) is ten eight points five inch liquid crystal screens, resolution ratio 1366 multiplies 768, and it is 44 lis that the size of the display (15), which is width,
Rice and height are 34 centimetres.
3. a kind of Ion Implantation Equipment according to claim 1 rotates angle monitoring system, it is characterised in that: the newly-increased biography
Sensor line (5) is provided with three groups altogether, increases sensor line (5) described in three groups newly and is symmetrical set respectively in connection board original control
The external shell of the right end of device (4) processed, two newly-increased sensor lines (5) uses made of PP environment-friendly materials, and uses
Industrial high soft drag chain shielded signal line.
4. a kind of Ion Implantation Equipment according to claim 1 rotates angle monitoring system, it is characterised in that: the controller
(9) be cuboid structure, the size of the controller (9) be length be 26 centimetres, width be 15 centimetres and height
It is eight centimetres.
5. a kind of Ion Implantation Equipment according to claim 1 rotates angle monitoring system, it is characterised in that: the function choosing
Selecting switch (8) is to dial to turn round cylindrical structure, and it is six millimeters that the size of the functional select switch (8), which is maximum gauge, the function
It can selection switch (8) and power switch electric connection.
6. a kind of Ion Implantation Equipment according to claim 1 rotates angle monitoring system, it is characterised in that: the original machine platform
The material that flexible cable (3) obtains external shell is using made of PP environment-friendly materials, and the original machine platform flexible cable (3) is arranged altogether
There are two, the diameter of section of two original machine platform flexible cables (3) is 40 millimeters.
7. a kind of Ion Implantation Equipment according to claim 1 rotates angle monitoring system, it is characterised in that: the keyboard
(12) wired connection is used, the keyboard (12) and Industry Control host (14) are by being electrically connected, the keyboard (12) and aobvious
Show that device (15) passes through electric connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910190627.0A CN109920714A (en) | 2019-03-13 | 2019-03-13 | A kind of Ion Implantation Equipment rotation angle monitoring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910190627.0A CN109920714A (en) | 2019-03-13 | 2019-03-13 | A kind of Ion Implantation Equipment rotation angle monitoring system |
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| Publication Number | Publication Date |
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| CN109920714A true CN109920714A (en) | 2019-06-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910190627.0A Pending CN109920714A (en) | 2019-03-13 | 2019-03-13 | A kind of Ion Implantation Equipment rotation angle monitoring system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI823533B (en) * | 2021-08-27 | 2023-11-21 | 大陸商北京北方華創微電子裝備有限公司 | Power supply assembly, plasma immersion ion implantation device and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090283705A1 (en) * | 2008-05-16 | 2009-11-19 | Thomas Parrill | Ion implanter for photovoltaic cell fabrication |
| JP2010034004A (en) * | 2008-07-31 | 2010-02-12 | Sumco Corp | Ion implanting device and ion implanting method |
| CN104409307A (en) * | 2014-11-12 | 2015-03-11 | 中国电子科技集团公司第四十八研究所 | Ion implanter scanning device and scanning method |
| CN209747447U (en) * | 2019-03-13 | 2019-12-06 | 无锡际盟信息科技有限公司 | Ion implanter rotation angle monitoring system |
-
2019
- 2019-03-13 CN CN201910190627.0A patent/CN109920714A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090283705A1 (en) * | 2008-05-16 | 2009-11-19 | Thomas Parrill | Ion implanter for photovoltaic cell fabrication |
| JP2010034004A (en) * | 2008-07-31 | 2010-02-12 | Sumco Corp | Ion implanting device and ion implanting method |
| CN104409307A (en) * | 2014-11-12 | 2015-03-11 | 中国电子科技集团公司第四十八研究所 | Ion implanter scanning device and scanning method |
| CN209747447U (en) * | 2019-03-13 | 2019-12-06 | 无锡际盟信息科技有限公司 | Ion implanter rotation angle monitoring system |
Non-Patent Citations (1)
| Title |
|---|
| 袁卫华;钟新华;彭立波;: "单晶圆注入机注入角度测量与补偿系统设计", 电子工业专用设备, no. 02, 20 April 2017 (2017-04-20) * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI823533B (en) * | 2021-08-27 | 2023-11-21 | 大陸商北京北方華創微電子裝備有限公司 | Power supply assembly, plasma immersion ion implantation device and method |
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