CN1841049A - Welding disk pattern inspection method and inspection device - Google Patents
Welding disk pattern inspection method and inspection device Download PDFInfo
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- CN1841049A CN1841049A CNA200610005927XA CN200610005927A CN1841049A CN 1841049 A CN1841049 A CN 1841049A CN A200610005927X A CNA200610005927X A CN A200610005927XA CN 200610005927 A CN200610005927 A CN 200610005927A CN 1841049 A CN1841049 A CN 1841049A
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- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
- E01F8/00—Arrangements for absorbing or reflecting air-transmitted noise from road or railway traffic
- E01F8/0005—Arrangements for absorbing or reflecting air-transmitted noise from road or railway traffic used in a wall type arrangement
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Abstract
This present invention provides a land pattern inspection method and inspection device capable of detecting a minute defect of a land which can not be detected by a method for measuring diameters of a through hole with a radial length measuring instrument. A controller 21 reads out the coordinates of the land on a printed board to be an object of inspection and a master image of the land from a land coordinate file 30. Next, an image of the land at the read-out land coordinates is picked up, and a binarized land image is formed. Moreover, coordinates of a land portion in the land image are extracted, and are stored in a file 31 of 1-pixel part coordinates. Next, a predetermined circle image is read out from a table 29 of hole-plugging circle patterns, and contraction processing is applied to the circle image only a predetermined number of times. On this occasion, if the coordinates of a pixel to be an observing point correspond to the coordinates of the land portion, contraction processing is not applied with respect to the observing point. Existence of minute defects in the land is inspected by comparing the circle image after the contraction with the master image.
Description
Technical field
The present invention relates to a kind of inspection method and testing fixture of printed base plate, particularly relate to the inspection method and the testing fixture of the welding disk pattern on a kind of printed base plate.
Background technology
Form on the surface of the printed base plate that electronic component etc. is installed with pattern is formed with the required conductor wirings of circuit that is used to constitute regulation.As one of this pattern, have a kind of be called pad, be used to install or the pattern of link.And, as the defective that takes place at this pad, " pad disconnection " (with reference to Figure 16 (A)) and " pad is damaged " (with reference to Figure 16 (B)) are arranged.If there is such defective, then conduct electricity insufficient, thereby might cause the maloperation of the product that uses this substrate etc.Therefore, detecting of aforesaid pad defective is one of inspection item important in printed base plate is checked.
As the general method of using of defective, the method (for example with reference to patent documentation 1) that long head is measured the diameter of through hole of surveying of using is arranged for checking aforesaid pad.Figure 17 is the figure of expression by the defect detecting method of the measuring diameter of this through hole.Shown in Figure 17 (A), use long 171 of radial survey to measure diameter of a circle.And, if whole equal diameters (with reference to Figure 17 (A)) thinks that then pad does not have defective.On the other hand, shown in Figure 17 (B), when there was disconnection in pad, the diameter of the long head of the survey of corresponding breaking part was compared with other diameters and is become longer.That is, because all diameters are unequal, so think that there is defective in pad this moment.
Patent documentation 1:JP spy opens the 2001-267722 communique
Yet, in aforesaid above-mentioned patent documentation 1, there is such problem points in the disclosed method, that is, when having minute defects, pad can not detect this defective.For example, shown in Figure 17 (C), when the disconnection of pad is trickleer, surveys long head and do not measure defect part, its result can think whole equal diameters.Its result even there is defective, also is judged to be normal.For fear of such problem, though the method that increases the radical of surveying long 171 is arranged,, shown in Figure 17 (D), then still can't detect if there is minute defects more this moment.This at the damaged situation of pad too.
Summary of the invention
Therefore, the objective of the invention is to, provide a kind of can detect use the long head of radial survey to measure the method for the diameter of through hole can not be detected, the welding disk pattern inspection method and the testing fixture of the minute defects of pad.
In order to achieve the above object, the present invention has adopted following structure.
A first aspect of the present invention is a kind of welding disk pattern inspection method, it compares having taken the object images that is formed on the welding disk pattern on the checked property and the standard picture of this welding disk pattern, and the welding disk pattern shape of this checked property is checked, it is characterized in that, have: object images makes step, it is taken the welding disk pattern that is formed on the checked property, and carries out binaryzation and make object images taking the image that obtains; The hole identification step, it is measured the diameter that is formed on the through hole on the welding disk pattern from object images; The filling perforation circular image generates step, and it is the filling perforation circular image based on the image that the diameter of measuring generates the circle bigger than the pad diameter of welding disk pattern; Filling perforation circular image collapse step, it repeats shrink process more than the predefined number of times for the filling perforation circular image; Composograph generates step, and it synthesizes filling perforation circular image and object images after shrinking, thereby generates composograph; Welding disk pattern is checked step, it compares above-mentioned standard picture and above-mentioned composograph, and check the pattern form of the pad of this checked property, in filling perforation circular image collapse step, carrying out object images on same coordinate axis overlaps with the position of filling perforation circular image, and judge as shrink object pixels gaze at a little corresponding to the pad portion in the object images time, this is gazed at is not a little carried out above-mentioned contraction.
A second aspect of the present invention is at the welding disk pattern inspection method described in the first aspect, it is characterized in that, in filling perforation circular image collapse step, the number of times that repeats shrink process equals to make the filling perforation circular image to become than the littler required number of times of through hole at least.In addition, so-calledly here equal to become, be meant when hypothesis is also proceeded shrink process under gazing at a little corresponding to the situation of pad, make the filling perforation circular image become the image required number of processes littler than through hole than the littler required number of times of through hole.
A third aspect of the present invention is a kind of welding disk pattern inspection method, it compares having taken the object images that is formed on the welding disk pattern on the checked property and the standard picture of this welding disk pattern, and the welding disk pattern shape of this checked property is checked, it is characterized in that, have: object images makes step, it is taken the welding disk pattern that is formed on the checked property, and carries out binaryzation and make object images taking the image that obtains; The hole identification step, it is measured the diameter that is formed on the through hole on the welding disk pattern from object images; The filling perforation circular image generates step, and it is the filling perforation circular image based on the image that the diameter of measuring generates the circle bigger than the pad diameter of welding disk pattern; Filling perforation circular image collapse step, it repeats shrink process more than the predefined number of times for the filling perforation circular image; Shear circular image and generate step, it covers the filling perforation circular image that is retracted by filling perforation circular image collapse step with object images, and by shear out the zone corresponding to the pad portion of this object images from this filling perforation circular image, shears circular image and generate; Shear circular image convergent-divergent step, it only carries out the contraction of stipulated number to shearing circular image, only carries out the expansion of this stipulated number then; Composograph generates step, and it is by synthesizing shearing circular image and object images after expanding, and the generation composograph; Welding disk pattern is checked step, it compares standard picture and composograph, and check the pattern form of the pad of this checked property, in filling perforation circular image collapse step, carrying out object images on same coordinate axis overlaps with the position of filling perforation circular image, and judge as shrink object pixels gaze at a little corresponding to the pad portion in the object images time, this is gazed at is not a little shunk.
A fourth aspect of the present invention is at the welding disk pattern inspection method described in the third aspect, it is characterized in that, in filling perforation circular image collapse step, the number of times that repeats shrink process equals to make the filling perforation circular image to become than the littler required number of times of above-mentioned through hole at least.
A fifth aspect of the present invention is a kind of welding disk pattern testing fixture, and its welding disk pattern shape to checked property is checked, it is characterized in that having: image pickup part, and it takes the image of the welding disk pattern of checked property; Storage part, the standard picture of its storage welding disk pattern; Object images makes portion, and its image of doing paired image pickup part shooting has carried out the object images of binaryzation; The identification part, hole, it is measured the diameter that is formed on the through hole on the welding disk pattern from object images; Filling perforation circular image generating unit, it is the filling perforation circular image based on the image that the diameter of measuring generates the circle bigger than the pad diameter of welding disk pattern; Filling perforation circular image contraction flow region, it repeats shrink process more than the predefined number of times for the filling perforation circular image; The composograph generating unit, it is by synthesizing filling perforation circular image and object images after shrinking, thus the generation composograph; Welding disk pattern inspection portion, it compares standard picture and the composograph that has read from storage part, and check the pattern form of the pad of this checked property, in above-mentioned filling perforation circular image contraction flow region, carrying out object images on same coordinate axis overlaps with the position of filling perforation circular image, and judge as shrink object pixels gaze at a little corresponding to the pad portion in the object images time, this is gazed at is not a little shunk.
A sixth aspect of the present invention is the welding disk pattern testing fixture described in aspect the 5th, it is characterized in that in filling perforation circular image contraction flow region, the number of times that repeats shrink process equals to make the filling perforation circular image to become than the littler required number of times of through hole at least.
A seventh aspect of the present invention is a kind of welding disk pattern testing fixture, and its welding disk pattern shape to checked property is checked, it is characterized in that having: image pickup part, and it takes the image of the welding disk pattern of checked property; Storage part, the standard picture of its storage welding disk pattern; Object images makes portion, and its image of doing paired image pickup part shooting has carried out the object images of binaryzation; The identification part, hole, it is measured the diameter that is formed on the through hole on the welding disk pattern from object images; Filling perforation circular image generating unit, it is the filling perforation circular image based on the image that the diameter of measuring generates the circle bigger than the pad diameter of welding disk pattern; Filling perforation circular image contraction flow region, it repeats shrink process more than the predefined number of times for the filling perforation circular image; Shear the circular image generating unit, it covers the filling perforation circular image that is retracted by filling perforation circular image contraction flow region with object images, and by shear out the zone corresponding to the pad portion of this object images from this filling perforation circular image, shears circular image and generate; Shear circular image convergent-divergent portion, it only carries out the contraction of stipulated number to shearing circular image, only carries out the expansion of this stipulated number then; The composograph generating unit, it is by synthesizing shearing circular image and object images after expanding, and the generation composograph; Welding disk pattern inspection portion, it compares standard picture and the composograph that has read from storage part, and check the pattern form of the pad of this checked property, in filling perforation circular image contraction flow region, carrying out object images on same coordinate axis overlaps with the position of filling perforation circular image, and judge as shrink object pixels gaze at a little corresponding to the pad portion in the object images time, this is gazed at is not a little shunk.
A eighth aspect of the present invention is the welding disk pattern testing fixture described in aspect the 7th, it is characterized in that in filling perforation circular image contraction flow region, the number of times that repeats shrink process equals to make the filling perforation circular image to become than the littler required number of times of through hole at least.
According to above-mentioned first aspect, by on the circular image bigger than pad except with the equitant part of pad part shrink, and can generate the image in the hole that is filled with through hole, thereby can compare inspection with standard picture.Thus, also can detect defective by can't the be detected trickle pad of the inspection method of using the long head of survey in the past.In addition, needn't increase the radical of surveying long head in order to detect minute defects.Therefore, can prevent the load that calculation that the increase because of the radical of surveying long head causes is handled and the reduction of processing speed.And then, because need not increase the radical of surveying long head, so when can either suppress hardware cost, can also constitute defective and detect the high testing fixture of precision.
According to above-mentioned second aspect, equal the number of times that makes the filling perforation circular image become littler because the number of times of shrink process proceeded to, so the defective part that can make pad more obviously and detect than through hole.
According to the above-mentioned third aspect, cover the filling perforation circular image after the contraction and shear with object images, and expand again after in a single day it shunk.And, by image after this expansion and object images are synthesized, and can generate the image of the pad that only is filled with through hole.Therefore, as long as this image and standard picture are compared inspection, the invention that then yet can detect first aspect can't periphery detected, pad have the defective (pad is damaged) of the pad of breach yet.Its result can further improve the precision that detects of pad defective.
According to above-mentioned fourth aspect, can access the effect same with second aspect.
In addition, according to welding disk pattern testing fixture of the present invention, can access and the above-mentioned same effect of pad inspection method of the present invention.
Description of drawings
Fig. 1 is the figure of all structures that schematically shows the optical type appearance testing device of embodiments of the present invention.
Fig. 2 is the functional block diagram of the optical type appearance testing device of expression first embodiment of the present invention.
Fig. 3 is the figure of an example of data structure of the filling perforation circle pattern table 29 of presentation graphs 2.
Fig. 4 is the figure of relation of diameter of a circle of diameter, the filling perforation circular image of expression diameter of pad and through hole.
Fig. 5 is the figure of an example of data structure of the pad coordinate file 30 of presentation graphs 2.
Fig. 6 is the figure of an example of data structure of the 1-pixel portion coordinate file 31 of presentation graphs 2.
Fig. 7 is the process flow diagram that the welding disk pattern inspection of expression first embodiment of the present invention is handled.
Fig. 8 is illustrated in the detailed process flow diagram of meeting the shrink process that pad stops shown in the step S6 of Fig. 7.
Fig. 9 is the figure that is illustrated in the variation of meeting the filling perforation circular image 292 in the shrink process that pad stops shown in the step S6 of Fig. 7.
Figure 10 is the figure that expression audit by comparison is handled.
Figure 11 is the functional block diagram of the optical type appearance testing device of expression second embodiment of the present invention.
Figure 12 is the process flow diagram that the welding disk pattern inspection of expression second embodiment of the present invention is handled.
Figure 13 is the figure of the processing shown in the step S26～S30 that is illustrated in Figure 10.
Figure 14 is the figure that is illustrated in the processing shown in the step S28 of Figure 10.
Figure 15 is the figure that expression audit by comparison is handled.
Figure 16 is the figure of the damaged example of expression pad.
Figure 17 is the figure that represents the pad defect detecting method that in the past used.
Embodiment
(first embodiment)
Below, at first embodiment of the present invention, describe with reference to accompanying drawing.Fig. 1 is the figure that schematically shows all structures of optical type appearance testing device 1.That is, Fig. 1 (A) is the vertical view of optical type appearance testing device, and Fig. 1 (B) is the side view of optical type appearance testing device.In Fig. 1, optical type appearance testing device 1 has objective table portion 11, objective table support portion 12, objective table driving mechanism 13, pedestal part 14, video camera 15, supporting member 16, camera support portion 17 and camera driver mechanism 18.
Objective table portion 11 constitutes the loading table top of level topmost.Checked property is that printing distributing board S is loaded on the loading table top of objective table portion 11.The bottom of objective table portion 11 is supported by objective table support portion 12.Objective table support portion 12 be fixed on objective table driving mechanism 13 above.In addition, pedestal part 14 is parallel with above-mentioned loading table top and go up to extend be provided with and be fixed to the direction (main scanning direction) of diagram Y-axis.Objective table driving mechanism 13 is slidably disposed on this guide rail along guide rail, this guide rail with the mode of extending to Y direction be arranged on pedestal part 14 above.In other words, objective table driving mechanism 13 and objective table support portion 12 and objective table portion 11 fixed thereon can move along Y direction.
Supporting member 16 is erected at the upper space of objective table portion 11.On supporting member 16, be provided with parallel and to the camera driver mechanism 18 of extending perpendicular to the diagram X-direction (sub scanning direction) of above-mentioned Y direction with above-mentioned loading table top.Camera support portion 17 is connected with camera driver mechanism 18, and is configured movably along camera driver mechanism 18.Video camera 15 is supported by camera support portion 17, so that its shooting direction (illustrates the downward direction of Z axle) vertically downward.Video camera 15 for example is made of ccd video camera, and the light of incident is converted to the electric signal of this color of expression and intensity, and generates the image of captured printing distributing board S.
Optical type appearance testing device 1 is taken by 15 couples of printing distributing board S of video camera, and obtains the image of pad.At this moment, in order to obtain whole pad images of printing distributing board S, optical type appearance testing device 1 makes objective table portion 11 move along Y direction, and video camera 15 is moved along X-direction.Specifically, under the state of the X-direction position of having fixed video camera 15,, objective table portion 11 carries out main sweep by being moved along Y direction.Here, during each main sweep that finishes from the end to end of the inspection area of substrate S, video camera 15 only moves the distance of regulation along sub scanning direction (X-direction).Thus, can obtain image by video camera 15 about all pads in the inspection area of printing distributing board S.
Fig. 2 is the block diagram of functional structure of expression optical type appearance testing device 1.In Fig. 2, optical type appearance testing device 1 has video camera 15, control part 21, object images generating unit 22, identification part, hole 23, filling perforation image production part 24, image contraction flow region 25, the synthetic portion 26 of image, audit by comparison portion 27, storage part 28.
Control part 21 for example is made of cpu motherboard.Control part 21 is connected to each structural portion of the following stated.In addition, all inspection of reading the present embodiment of the action control of pad coordinate file, video camera 15, various Flame Image Process etc. of 21 pairs of control parts is handled and is controlled.
The image that 22 pairs of video cameras of object images generating unit 15 are taken in carries out binaryzation.Here, carry out binaryzation like this, that is, in each pixel of the image that constitutes video camera 15 absorptions, will be changed to 1 than the high pixel of threshold concentration of regulation, and remaining pixel is changed to 0.Certainly, also the higher pixel of threshold concentration than regulation can be changed to 0, and remaining pixel is changed to 1.And, generate object images, and it is exported to identification part, hole 23 as the image of pad portion.The pixel count of this object images is equated here, with the pixel count of the filling perforation circular image of the following stated.And then object images generating unit 22 is created in this object images and extracts the 1-pixel portion coordinate file that its value is the coordinate of 1 pixel (hereinafter referred to as the 1-pixel) part, and it is stored in the storage part 28.In addition, in the accompanying drawings, represent the 1-pixel, and represent 0-pixel (value is 0 pixel) with white with black.
Identification part, hole 23 is for object images, uses the long head of radial survey to measure the pad hole (hereinafter referred to as through hole: diameter through-hole) (with reference to Figure 17).And, with the diameter measured to 24 outputs of filling perforation circular image generating unit.
Filling perforation circular image generating unit 24 is with reference to filling perforation circle pattern table 29, and reads the corresponding circular image (hereinafter referred to as the filling perforation circular image) of diameter with the through hole of having been measured by identification part, hole 23.And, the filling perforation circular image 292 that reads is exported to image contraction flow region 25.
The image of 25 pairs of regulations of image contraction flow region carries out eight neighborhood shrink process.That is, it is for carrying out the processing (shrink process) of 1 layer of refinement, as long as and if in eight neighborhoods 0-pixel is arranged, then just carry out this pixel is changed to the processing of 0-pixel to the 1-pixel on the border of 1-pixel in binary image and 0-pixel.In addition, image contraction flow region 25 is exported contracted image to the synthetic portion 26 of image.
The image and the object images of 26 pairs of regulations of image synthesising part are synthesized, and generate composograph.So-called composograph is exactly that audit by comparison portion 27 is in order to compare the image of checking and adopting with standard picture 302.Image synthesising part 26 outputs to audit by comparison portion 27 with this composograph.
27 pairs of above-mentioned composographs of audit by comparison portion compare with the standard picture 302 that reads from pad coordinate file 30.And, if above different of regulation arranged, just be judged as in this pad portion and have defective.
Storage part 28 is mediums of semiconductor memory or hard disk etc. for example, and store filling perforation circle pattern table 29, pad coordinate file 30 and 1-pixel portion coordinate file 31, other handle required data.
Then, describe at the various data that adopt in the present embodiment.Fig. 3 is the figure of the data structure of the above-mentioned filling perforation circle of expression pattern table 29.In Fig. 3, filling perforation circle pattern table 29 is made of with the set of the combination of filling perforation circular image 292 diameter value 291.Diameter value 291 is corresponding to the diameter of the through hole of identification part, above-mentioned hole 23 measurements.Filling perforation circular image 292 is images (having carried out binaryzation) of the circle bigger slightly than the pad with this through hole.For example, as shown in Figure 4, when the diameter of pad is the diameter of 1mm, through hole when being 0.8mm, with the circular image data of diameter 1.2mm as store (with reference to Fig. 4) corresponding to the filling perforation circular image 292 of diameter 0.8mm.In addition, the pixel count of this filling perforation circular image 292 is consistent with the pixel count of above-mentioned object images.
Fig. 5 is the figure of the data structure of expression pad coordinate file 30.As shown in Figure 5, pad coordinate file 30 is to be made of with the set of the combination of the standard picture 302 of this pad pad coordinate 301.Pad coordinate 301 is the coordinates as each pad on the printed base plate of inspected object.For example, centre coordinate of each pad of obtaining from cad data etc. in advance etc.Standard picture 302 is images of the pad made by cad data.This standard picture 302 is owing to being made by cad data, so become the image of the pad of atresia state.
Fig. 6 is the figure of the data structure of expression 1-pixel portion coordinate file 31.As shown in Figure 6,1-pixel portion coordinate file 31 is to be made of the set that is illustrated on the above-mentioned object images to the 1-pixel coordinate 311 of the locations of pixels of 1-pixel.
Then, the action summary at the optical type appearance testing device 1 of present embodiment describes.Here, be that example describes when detecting the disconnection of the pad shown in Figure 16 (A).At first, control part 21 is visited above-mentioned pad coordinate file 30 successively, and reads pad coordinate 301 and standard picture 302.Next, to the pad coordinate mobile camera 15 that has read.Next, take the pad image, and generate the image (hereinafter referred to as object images) that has carried out binaryzation.Simultaneously, in object images, extract the coordinate of 1-pixel, and generate 1-pixel portion coordinate file 31.Next, from the diameter of the determining image through hole that carried out binaryzation.Next, justify the filling perforation circular image 292 that reads the pattern table 29 corresponding to this diameter from filling perforation.Next, with above-mentioned 1-pixel portion coordinate file 31 contrast on one side, 292 of above-mentioned filling perforation circular images are carried out eight neighborhood shrink process of stipulated number on one side.And, compare with the above-mentioned standard picture 302 that has read by filling perforation circular image after will shrinking, and check that this pad has or not disconnection.Carry out this a series of processing repeatedly, till not having inspected object (arriving the last of pad coordinate file 30).
Below, the detailed action that the welding disk pattern inspection that optical type appearance testing device 1 is carried out is handled utilizes Fig. 7～Figure 10 to describe.Fig. 7 is the process flow diagram that the welding disk pattern inspection of expression first embodiment of the present invention is handled.At first, control part 21 reads pad coordinate 301 and standard picture 302 (step S1) from pad coordinate file 30.
Next, the control part 21 pad coordinate 301 that video camera 15 moved to read.And control part 21 usefulness video cameras 15 are taken pad image (step S2).
If taken the pad image, then control part 21 makes object images generating unit 22 formation object images (step S3).In step S3, the image that object images generating unit 22 pairs of video cameras 15 have been taken carries out binary conversion treatment, and the formation object image.And then object images generating unit 22 extracts the coordinate group of 1-pixel portion in this object images, and this coordinate group's 1-pixel portion coordinate file 31 has been stored in generation.
Next, control part 21 makes identification part, hole 23 measure the diameter (step S4) of through hole.In step S4, the object images that identification part, hole 23 generates for object images generating unit 22 similarly uses the long head of radial survey to measure the diameter (with reference to Figure 17) of through hole with above-mentioned technology in the past.
If measured the diameter of through hole, then next control part 21 makes filling perforation circular image generating unit 24 generate filling perforation circular image 292 (step S5).In step S5, filling perforation circular image generating unit 24 based on said determination diameter, and filling perforation circular image 292 is read in retrieval from filling perforation circle pattern table 29, thereby generates filling perforation circular image 292 (step S5).
Next, if generated filling perforation circular image 292, control part 21 shrink process (step S6) that makes image contraction flow region 25 meet pad to stop next then.In step S6, though filling perforation circular image 292 is carried out eight neighborhood shrink process, before this moment each pixel (gazing at a little) being shunk, with reference to above-mentioned 1-pixel portion coordinate file 31.And, gaze at a little with object images on the coordinate consistent (that is, the part of pad) of 1-pixel the time, this is gazed at is not a little carried out shrink process.
Fig. 8 is the detailed process flow diagram of meeting the shrink process that pad stops shown in the expression above-mentioned steps S6.The pixel in outer week Monday of filling perforation circular image (below, be called boundary pixel) is carried out the shrink process (hereinafter referred to as boundary treatment) of stipulated number here.And, for the number of times that carries out this boundary treatment, preestablish the periphery that makes filling perforation circular image 292 at least and arrive the interior required sufficient number of processes in position of through hole that is equivalent on the object images.Promptly, in the process of meeting the shrink process that pad stops, even the periphery of filling perforation circular image arrives the periphery of pad, but the breaking part for pad has also preestablished the boundary treatment number of times, so that the periphery of filling perforation circular image 292 further surpasses ring width (pad diameter and drill bit diameter poor) and arrives in the through hole.Below, in order to be easy to explanation, the situation of carrying out 10 boundary treatment is described.
In Fig. 8, at first, image contraction flow region 25 extracts the coordinate group (hereinafter referred to as the boundary coordinate group) (step S11) of the boundary pixel of filling perforation circular image 292.Next, image contraction flow region 25 from the boundary coordinate group who has extracted decision as gazing at the coordinate (hereinafter referred to as gazing at coordinate) (step S12) of pixel a little.Next, image contraction flow region 25 is retrieved (step S13) based on gazing at coordinate to 1-pixel portion coordinate file 31.Next, image contraction flow region 25 is judged this result for retrieval (step S14).Its result if the coordinate consistent with gazing at coordinate is present in the 1-pixel portion coordinate file 31, then because above-mentioned object images is consistent with the pixel count of above-mentioned filling perforation circular image 292, is equivalent to pad portion on the above-mentioned object images so this gazes at coordinate.Therefore, 25 pairs of image contraction flow regions this gaze at coordinate and do not carry out eight neighborhood shrink process.That is,, do not have consistent coordinate (in step S14, being "No") if as the result of determination of step S14, then 25 pairs of image contraction flow regions this gaze at coordinate and carry out eight neighborhood shrink process (step 815).On the other hand, if there is consistent coordinate (being "Yes") in step S14, image contraction flow region 25 does not carry out the processing of step S15, enters into step 16 and handle.
In step S16, image contraction flow region 25 judges whether whole coordinates of above-mentioned boundary coordinate group were carried out the processing of above-mentioned S12～S15, judges promptly whether a boundary treatment finishes (step S16).Its result, if a boundary treatment does not also finish (being "No") in step S16, then image contraction flow region 25 turns back to above-mentioned steps S12 and repeats its processing.On the other hand, if a boundary treatment finishes, then image contraction flow region 25 makes to handle and enters into next procedure S17.
In step S17, image contraction flow region 25 is judged the boundary treatment of whether carrying out predetermined number of times, promptly judges whether carried out boundary treatment 10 times.Its result, if do not carry out 10 boundary treatment (being "No" in step S17), then image contraction flow region 25 turns back to above-mentioned steps S11 and repeats its processing.On the other hand, if carried out 10 boundary treatment (being "Yes" in step S17), then image contraction flow region 25 finishes this and meets the shrink process that pad stops.
Utilize Fig. 9 that above-mentioned flow process of meeting the shrink process that pad stops to be remarked additionally.At first, Fig. 9 (A) expression begins to meet shrink process object images and the filling perforation circular image 292 in the past that pad stops.The pixel count of two images is identical.In addition, the pad portion of object images though in fact this its coordinate is stored in the above-mentioned 1-pixel portion coordinate file 31, in order to be easy to explanation, just directly describes with object images here.
Next, Fig. 9 (B) is the expression figure of the process object of boundary treatment for the first time.Shown in figure below of Fig. 9 (B), the boundary pixel of filling perforation circular image 292 (pixel that is equivalent to the part of periphery) becomes the object of boundary treatment.And, this boundary pixel is carried out eight neighborhood shrink process.Its result, owing to do not have pad portion (1-pixel) in zone corresponding to the object images of this boundary pixel, so this borderline region all is replaced into the 0-pixel.That is filling perforation circular image 292 circle that diminished.
The figure of the state when next, Fig. 9 (C) is the 4th boundary treatment of expression end.The expression boundary pixel is the periphery (figure below of Fig. 9 (C)) of filling perforation circular image and the consistent state of periphery (the last figure of Fig. 9 (C)) of pad image in Fig. 9 (C).That is the expression situation that the diameter of filling perforation circle and pad identifies by the 4th contraction.
The figure of the state when next, Fig. 9 (D) is the 5th boundary treatment of expression beginning.After the 5th boundary treatment, for no longer further shrinking with the corresponding part of pad portion in the boundary pixel, and just the pixel K of breaking part is retracted.Its result shown in Fig. 9 (E) and Fig. 9 (F), has only breaking part K to be retracted.State during the 6th shrink process of Fig. 9 (E) expression beginning, the state during the 8th shrink process of Fig. 9 (F) expression beginning.And, when finally proceeding to the 10th boundary treatment, shown in Fig. 9 (G), become the filling perforation circular image 292 of the state that has only shunk breaking part.In addition, about the number of times of boundary treatment, owing to till the periphery that proceeds to filling perforation circular image 292 surpasses ring width and arrive number of times in the through hole, so a part that is equivalent to throughhole portions is also shunk.Its result, the shape of breaking part becomes more obvious.
Get back to Fig. 7, after the processing of step S6, control part 21 makes the synthetic portion 26 of image generate composograph (step S7).In step S7, the synthetic portion 26 of image is by synthesizing filling perforation circular image after the above-mentioned shrink process 292 and object images, and generates composograph (Fig. 9 (H)).
Next, control part 21 compares audit by comparison portion 27 and checks processing (step S8).In step S8, as shown in figure 10,27 pairs of standard pictures that read in above-mentioned steps S1 of audit by comparison portion 302 compare with above-mentioned composograph.Its result if there be above different of the threshold value of regulation, then is judged to be the pad defectiveness as this inspected object.
The processing of step S8 if be through with, then control part 21 judges whether all read pad coordinate file 30, judges that promptly whether also residual have will be as the pad (step S9) of inspected object.Its result, during the also residual pad that inspected object arranged (being "Yes" in step S9), control part 21 turns back to above-mentioned steps S1 and repeats its processing.On the other hand, (be not "No" in step S9) when having the pad of residual inspected object, control part 21 finishes this welding disk pattern inspections to be handled.More than, finish the pad image inspection of first embodiment and handle.
Like this, in the first embodiment, when preparing the circular image bigger and carrying out shrink process, carry out the contraction of eight neighborhoods when judging the 1-pixel portion of gazing at the object images that a little whether is equivalent to carry out binaryzation than pad.And, by this circular image and object images are synthesized, and generate the pad image that through hole is filled state.By itself and standard picture 302 are compared, can detect the disconnection of surveying in the inspection method of long head can't be detected trickle pad in the past use.In addition, do not need to increase the radical of surveying long head for detecting this trickle disconnection.Therefore, the load handled of the calculation that can prevent to cause and the reduction of processing speed because of radical that increase to survey long head.And then, because do not need to increase the radical of surveying long head, so when can suppress hardware cost, can constitute again and detect the high testing fixture of precision.
In addition, in the shrink process of above-mentioned embodiment, though used eight neighborhood shrink process, instrument is not limited to this, can use neighbours territory shrink process etc. to shrink yet.In addition, at reading of the filling perforation circular image among the above-mentioned steps S5, can replace the filling perforation circular image 292 of filling perforation circle pattern table 29, and only store the diameter value of this image, and image generated circle based on this diameter at every turn, and carry out binaryzation and generate the filling perforation circular image.Thus, also can not need the image file that has a tendency bigger than normal for the required capacity of storage is stored, and capacity that can conserve memory portion 28, thereby can reduce cost.
(second embodiment)
Then, with reference to Figure 11 to Figure 15, and describe at second embodiment of the present invention.In the first above-mentioned embodiment, the meeting after the shrink process that pad stops of the filling perforation circular image 292 that is through with uses the filling perforation circular image after shrinking and compares inspection.With respect to this, in second embodiment, be through with and meet after the shrink process that pad stops, generating with object images and cover filling perforation circular image 292 and the image sheared is promptly sheared circular image.And then, this shearing circular image is carried out image contraction → expansion process.Afterwards, by this shearing circular image and object images are synthesized, and generate composograph.And, this generation image and standard picture 302 are compared inspection.In addition, the optical type appearance testing device 40 of this embodiment, be equivalent in the first above-mentioned embodiment, to utilize on the functional structure of the optical type appearance testing device 1 that Fig. 2 illustrates, increased shearing circular image generating unit 41 and image expansion portion 42, and other structural portion are identical with first embodiment.Therefore, enclose identical reference marks for the structure except shearing circular image generating unit 41 and image expansion portion 42, and omit its detailed explanation.
Figure 11 is the process flow diagram of structure of the optical type appearance testing device 40 of expression second embodiment of the present invention.In Figure 11, shear the filling perforation circular image 292 after circular image generating unit 41 usefulness object images cover shrink process, and shear filling perforation circular image 292.Method with molding generates the shearing circular image that is equivalent to through hole in other words.In addition, this shearing circular image carries out binaryzation and is generated.Image expansion portion 42 makes the image expansion of regulation by carrying out eight neighborhood expansion process.That is, on the border of the 1-of binary image pixel and 0-pixel, make the 1-pixel thicken the processing (expansion process) of one deck,, just carry out this pixel is changed to the processing of 1-pixel as long as on eight neighborhoods, there is a 1-pixel.In addition, the image after image expansion portion 42 will expand is to 26 outputs of the synthetic portion of image.
Below, utilize Figure 12 to Figure 15, to being described in detail that the welding disk pattern inspection of second embodiment of the present invention is handled.Here, be example to detect the damaged situation of the pad shown in Figure 16 (B).Figure 12 is the process flow diagram that the optical type appearance testing device 40 pad defective of being carried out of expression second embodiment detects processing.In Figure 12 and since processing from step S21 to step S25 with utilize Fig. 7 to illustrate in the above-described first embodiment identical from step S1 to the processing of step S5, so omit its detailed description here.In addition and since processing from step S31 to step S32 also with utilize Fig. 7 to illustrate in the above-described first embodiment identical from step S8 to the processing of step S9, so omit its detailed description here.
Next, at the processing of step S26～S30, utilize Figure 12～Figure 14 to describe.Figure 13 is filling perforation circular image among expression step S26～S30 and the figure that shears the variation of circular image.In addition, Figure 14 is the figure of the variation of the shearing circular image among expression step S28 and the S29.At first, control part 21 makes image contraction flow region 25 carry out the shrink process (step S26) that pad stops of meeting of filling perforation circular image 292.In step S26, image contraction flow region 25 is same with the processing of the step S6 that utilizes Fig. 7 to illustrate in the above-described first embodiment, and filling perforation circular image 292 is met the shrink process that pad stops.Its result for example supposes to make filling perforation circular image 292 become the size identical with the diameter of pad (with reference to Figure 13 (A)) after the 4th contraction.Here, the damaged interior perimembranous that is present in pad of the pad in the present embodiment, and its periphery does not have barbed portion.Therefore, even proceed to shrink, filling perforation circular image 292 also no longer shrinks from the 4th time state.Its result, even meet moment of the shrink process that pad stops to the end of step S26, the size of filling perforation circular image 292 becomes the identical size (with reference to Figure 13 (A)) of periphery circle with pad.
Next, control part 21 makes shearing circular image generating unit 41 shear circular image and generates processing (step S27).In step S27, shear circular image generating unit 41 usefulness object images and cover filling perforation circular image 292 (with reference to Figure 13 (B)), and, shear circular image (with reference to Figure 13 (C)) and generate by filling perforation circular image 292 is sheared.Its result, this shears circular image with respect to through hole, constitutes damaged part with pad as " prominent point " and the image of existence.
Next, control part 21 is the above-mentioned prominent point of elimination, and shrinks → expansion process.(step S28, S29).Here the shrink process of being carried out with in above-mentioned steps S26, carry out to meet the shrink process that pad stops different, do not use 1-pixel portion coordinate file 31 and carry out.Promptly, owing to be the processing that is used to eliminate " the prominent point " of above-mentioned shearing circular image, so just merely judge 1-pixel, the 0-pixel of shearing circular image self, carry out eight neighborhood shrink process (in order to distinguish, and hereinafter referred to as impartial shrink process) with meeting the shrink process that pad stops.
In step S28,25 pairs of image contraction flow regions are sheared number of times that circular image stipulates, are for example only carried out once impartial shrink process.In Figure 14, at first, Figure 14 (A) expression carrying out perisystolic shearing circular image (" " is equivalent to the 1-pixel).The pixel 141 (prominent point) (being equivalent to Figure 13 (C)) that in Figure 14 (A), has the part that is equivalent to the damaged portion of pad.Shrink if carry out eight neighborhoods for this image, then as Figure 14 (B) shown in, the pixel of having " " that to have only on every side 8 pixels are 1-pixels be left behind (being equivalent to Figure 13 (D)).More than, the processing of the step that is through with S28.
Next, in step S29, image expansion portion 42 only carries out the expansion process with the number of times same number of carrying out shrinking for the shearing circular image that carried out impartial shrink process in step S28 (with reference to Figure 14 (B)) in step S28.That is, because in above-mentioned steps S28, only carried out once impartial shrink process, so only carry out one time expansion process here.Its result shown in Figure 14 (C), has constituted the shearing circular image (being equivalent to Figure 13 (E)) that eliminates " the prominent point " that be equivalent to the damaged portion of pad.In addition, because the number of contractions among the step S28 is equated with the expansion number of times of step S29, return to original size so shear circular image.Its result can constitute the image of only through hole seamlessly being filled.
Get back to Figure 12, next, control part 21 makes the synthetic portion 26 of image generate composograph (step S30).In step S30, shown in Figure 13 (F), the synthetic portion 26 of image is by synthesizing shearing circular image and object images after the above-mentioned expansion process, and the generation composograph.
As mentioned above, by shearing out the shearing circular image, and in case carry out carrying out expansion process again after the impartial shrink process, and can access image with the identical size of interior circle of pad from the filling perforation circular image.And, generate composograph with this image, if compare (step S31) with standard picture 302 as shown in Figure 15, it is damaged then can to detect pad.More than, the welding disk pattern inspection of second embodiment that is through with is handled.
Like this, in second embodiment, by shearing the filling perforation circular image with object images, and in case carry out equalization and expand again after shrinking, and can eliminate the noise (point of dashing forward) of the image that is equivalent to the damaged portion of pad.And, if this image and object images are synthesized, then can generate the pad image of only having filled through hole, and if this image and standard picture 302 compared inspection, then also can detect in the first embodiment can't detected defective.That is, in the first embodiment, (pad disconnects: Figure 16 (A)), can not detect does not have the defective in crack in the periphery of pad (pad is damaged: Figure 16 (B)) in the crannied defective of the periphery of pad though can detect.On the other hand, according to second embodiment, can not only detect pad and disconnect, it is damaged to detect pad.Its result can further improve the precision that detects of pad defective.
In addition, about inspection method of the present invention, wish to carry out as the subsequent examination with the inspection of surveying long head of carrying out in the past.That is,, then avoid this operation if wish to have found the disconnection of pad by surveying long head inspection, and if implement inspection method of the present invention when long head fails to note abnormalities in checking surveying.
In addition, in the above-described embodiment, although understand and to specify in the inspection of welding disk pattern shape, take and check situation successively based on the pad coordinate, yet carry out the inspection of welding disk pattern in the whole audit by comparison of pattern that also can be on substrate simultaneously as the pad of object.Promptly, also can carry out such inspection, promptly, read whole substrate images in advance, and by Flame Image Process of the present invention, convert the object images of the pad coordinate neighbo(u)rhood of object to the disconnection that can differentiate pad and the object images of damaged ground of pad filling perforation, and comprise the audit by comparison of whole pattern of pad.In addition, under above-mentioned situation,, also can not use design data such as CAD and use the image of taking the certified products substrate and obtaining for the standard picture of object as a comparison.
The possibility of industrial utilization
Pad inspection method of the present invention and pad testing fixture, can detect with the method for surveying long head does not have The detected trickle pad defective of method, thus printed base plate testing fixture etc. can be applicable to.
Claims (8)
1. welding disk pattern inspection method, it compares having taken the object images that is formed on the welding disk pattern on the checked property and the standard picture of this welding disk pattern, and the welding disk pattern shape of this checked property is checked, it is characterized in that having:
Object images makes step, and it is taken the welding disk pattern that is formed on the above-mentioned checked property, and carries out binaryzation and make object images taking the image that obtains;
The hole identification step, it is measured the diameter that is formed on the through hole on the welding disk pattern from above-mentioned object images;
The filling perforation circular image generates step, and the image that its diameter based on above-mentioned measurement generates the circle bigger than the pad diameter of above-mentioned welding disk pattern is the filling perforation circular image;
Filling perforation circular image collapse step, it repeats shrink process more than the predefined number of times to above-mentioned filling perforation circular image;
Composograph generates step, and its filling perforation circular image and above-mentioned object images after to above-mentioned contraction is synthesized, thus the generation composograph;
Welding disk pattern is checked step, and it compares above-mentioned standard picture and above-mentioned composograph, and checks the pattern form of the pad of this checked property,
In above-mentioned filling perforation circular image collapse step, carrying out above-mentioned object images on same coordinate axis overlaps with the position of above-mentioned filling perforation circular image, and judge as above-mentioned contraction object pixels gaze at a little corresponding to the pad portion in the above-mentioned object images time, this is gazed at is not a little carried out above-mentioned contraction.
2. welding disk pattern inspection method as claimed in claim 1 is characterized in that, in above-mentioned filling perforation circular image collapse step, the number of times that repeats above-mentioned shrink process equals to make above-mentioned filling perforation circular image to become than the littler required number of times of above-mentioned through hole at least.
3. welding disk pattern inspection method, it compares having taken the object images that is formed on the welding disk pattern on the checked property and the standard picture of this welding disk pattern, and the welding disk pattern shape of this checked property is checked, it is characterized in that having:
Object images makes step, and it is taken the welding disk pattern that is formed on the above-mentioned checked property, and carries out binaryzation and make object images taking the image that obtains;
The hole identification step, it is measured the diameter that is formed on the through hole on the welding disk pattern from above-mentioned object images;
The filling perforation circular image generates step, and the image that its diameter based on above-mentioned measurement generates the circle bigger than the pad diameter of above-mentioned welding disk pattern is the filling perforation circular image;
Filling perforation circular image collapse step, it repeats shrink process more than the predefined number of times to above-mentioned filling perforation circular image;
Shear circular image and generate step, it covers the filling perforation circular image that is retracted by above-mentioned filling perforation circular image collapse step with object images, and by shear out the zone corresponding to the pad portion of this object images from this filling perforation circular image, shears circular image and generate;
Shear circular image convergent-divergent step, it only carries out the contraction of stipulated number to above-mentioned shearing circular image, only carries out the expansion of this stipulated number then;
Composograph generates step, and it is by synthesizing the shearing circular image after the above-mentioned expansion and above-mentioned object images, and the generation composograph;
Welding disk pattern is checked step, and it compares above-mentioned standard picture and above-mentioned composograph, and checks the pattern form of the pad of this checked property,
In above-mentioned filling perforation circular image collapse step, carrying out above-mentioned object images on same coordinate axis overlaps with the position of above-mentioned filling perforation circular image, and judge as above-mentioned contraction object pixels gaze at a little corresponding to the pad portion in the above-mentioned object images time, this is gazed at is not a little carried out above-mentioned contraction.
4. welding disk pattern inspection method as claimed in claim 3 is characterized in that, in above-mentioned filling perforation circular image collapse step, the number of times that repeats above-mentioned shrink process equals to make above-mentioned filling perforation circular image to become than the littler required number of times of above-mentioned through hole at least.
5. welding disk pattern testing fixture, its welding disk pattern shape to checked property is checked, it is characterized in that having:
Image pickup part, it takes the image of the welding disk pattern of checked property;
Storage part, it stores the standard picture of above-mentioned welding disk pattern;
Object images makes portion, and its image of doing paired above-mentioned image pickup part shooting has carried out the object images of binaryzation;
The identification part, hole, it is measured the diameter that is formed on the through hole on the welding disk pattern from above-mentioned object images;
The image that filling perforation circular image generating unit, its diameter based on above-mentioned measurement generate the circle bigger than the pad diameter of above-mentioned welding disk pattern is the filling perforation circular image;
Filling perforation circular image contraction flow region, it repeats shrink process more than the predefined number of times to above-mentioned filling perforation circular image;
The composograph generating unit, it is by synthesizing filling perforation circular image after the above-mentioned contraction and above-mentioned object images, thereby generates composograph;
Welding disk pattern inspection portion, it compares standard picture and the above-mentioned composograph that has read from above-mentioned storage part, and checks the pattern form of the pad of this checked property,
In above-mentioned filling perforation circular image contraction flow region, carrying out above-mentioned object images on same coordinate axis overlaps with the position of above-mentioned filling perforation circular image, and judge as above-mentioned contraction object pixels gaze at a little corresponding to the pad portion in the above-mentioned object images time, this is gazed at is not a little carried out above-mentioned contraction.
6. welding disk pattern testing fixture as claimed in claim 5 is characterized in that, in above-mentioned filling perforation circular image contraction flow region, the number of times that repeats above-mentioned shrink process equals to make above-mentioned filling perforation circular image to become than the littler required number of times of above-mentioned through hole at least.
7. welding disk pattern testing fixture, its welding disk pattern shape to checked property is checked, it is characterized in that having:
Image pickup part, it takes the image of the welding disk pattern of checked property;
Storage part, it stores the standard picture of above-mentioned welding disk pattern;
Object images makes portion, and its image of doing paired above-mentioned image pickup part shooting has carried out the object images of binaryzation;
The identification part, hole, it is measured the diameter that is formed on the through hole on the welding disk pattern from above-mentioned object images;
The image that filling perforation circular image generating unit, its diameter based on above-mentioned measurement generate the circle bigger than the pad diameter of above-mentioned welding disk pattern is the filling perforation circular image;
Filling perforation circular image contraction flow region, it repeats shrink process more than the predefined number of times for above-mentioned filling perforation circular image;
Shear the circular image generating unit, it covers the filling perforation circular image that is retracted by above-mentioned filling perforation circular image contraction flow region with object images, and by shear out the zone corresponding to the pad portion of this object images from this filling perforation circular image, shears circular image and generate;
Shear circular image convergent-divergent portion, it only carries out the contraction of stipulated number to above-mentioned shearing circular image, only carries out the expansion of this stipulated number then;
The composograph generating unit, it is by synthesizing shearing circular image after the above-mentioned expansion and above-mentioned object images, and generates composograph;
Welding disk pattern inspection portion, it compares standard picture and the above-mentioned composograph that has read from above-mentioned storage part, and checks the pattern form of the pad of this checked property,
In above-mentioned filling perforation circular image contraction flow region, carrying out above-mentioned object images on same coordinate axis overlaps with the position of above-mentioned filling perforation circular image, and judge as above-mentioned contraction object pixels gaze at a little corresponding to the pad portion in the above-mentioned object images time, this is gazed at is not a little carried out above-mentioned contraction.
8. welding disk pattern testing fixture as claimed in claim 7 is characterized in that, in above-mentioned filling perforation circular image contraction flow region, the number of times that repeats above-mentioned shrink process equals to make above-mentioned filling perforation circular image to become than the littler required number of times of above-mentioned through hole at least.
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| JP2005091990A JP4518494B2 (en) | 2005-03-28 | 2005-03-28 | Land pattern inspection method and inspection apparatus |
| JP2005091990 | 2005-03-28 |
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| CN1841049A true CN1841049A (en) | 2006-10-04 |
| CN100507530C CN100507530C (en) | 2009-07-01 |
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| Country | Link |
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| JP (1) | JP4518494B2 (en) |
| KR (1) | KR100660400B1 (en) |
| CN (1) | CN100507530C (en) |
| TW (1) | TWI271505B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102301225A (en) * | 2009-01-31 | 2011-12-28 | 玛机统丽公司 | Apparatus for inspecting through hole |
| CN102595024A (en) * | 2011-12-16 | 2012-07-18 | 飞狐信息技术（天津）有限公司 | Method and device for restoring digital video images |
| CN101995223B (en) * | 2009-08-25 | 2013-05-08 | 比亚迪股份有限公司 | Chip appearance detection method and system |
| CN104020222A (en) * | 2014-06-18 | 2014-09-03 | 长春光华微电子设备工程中心有限公司 | Welding quality detecting system of full-automatic ultrasonic aluminium wire press welder |
| CN104535587A (en) * | 2014-12-23 | 2015-04-22 | 安徽科鸣三维科技有限公司 | PCBA solder joint inspection method based on machine vision |
| CN105911065A (en) * | 2015-02-23 | 2016-08-31 | 株式会社思可林集团 | Pattern inspection apparatus and pattern inspection method |
| CN106204517A (en) * | 2015-04-17 | 2016-12-07 | 铭传大学 | Automatic optical detection method for periodic pattern |
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| CN106651989B (en) * | 2016-12-21 | 2020-04-21 | 北京信息科技大学 | Nested circle fitting method and device for micro-hole centering |
| CN109950165B (en) * | 2019-02-19 | 2021-06-04 | 长江存储科技有限责任公司 | Test structure and test method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH01269035A (en) * | 1988-04-21 | 1989-10-26 | Ibiden Co Ltd | Instrument for inspecting printed circuit board |
| JP2001267722A (en) * | 2000-03-23 | 2001-09-28 | Ngk Spark Plug Co Ltd | Method for inspecting printed wiring board |
| JP3589424B1 (en) * | 2003-12-22 | 2004-11-17 | 株式会社メガトレード | Board inspection equipment |
-
2005
- 2005-03-28 JP JP2005091990A patent/JP4518494B2/en not_active Expired - Fee Related
- 2005-12-21 TW TW094145474A patent/TWI271505B/en not_active IP Right Cessation
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2006
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102301225A (en) * | 2009-01-31 | 2011-12-28 | 玛机统丽公司 | Apparatus for inspecting through hole |
| CN101995223B (en) * | 2009-08-25 | 2013-05-08 | 比亚迪股份有限公司 | Chip appearance detection method and system |
| CN102595024A (en) * | 2011-12-16 | 2012-07-18 | 飞狐信息技术（天津）有限公司 | Method and device for restoring digital video images |
| CN102595024B (en) * | 2011-12-16 | 2014-10-22 | 飞狐信息技术（天津）有限公司 | Method and device for restoring digital video images |
| CN104020222A (en) * | 2014-06-18 | 2014-09-03 | 长春光华微电子设备工程中心有限公司 | Welding quality detecting system of full-automatic ultrasonic aluminium wire press welder |
| CN104535587A (en) * | 2014-12-23 | 2015-04-22 | 安徽科鸣三维科技有限公司 | PCBA solder joint inspection method based on machine vision |
| CN105911065A (en) * | 2015-02-23 | 2016-08-31 | 株式会社思可林集团 | Pattern inspection apparatus and pattern inspection method |
| CN105911065B (en) * | 2015-02-23 | 2018-11-30 | 株式会社思可林集团 | Inspection apparatus for pattern and pattern checking mehtod |
| CN106204517A (en) * | 2015-04-17 | 2016-12-07 | 铭传大学 | Automatic optical detection method for periodic pattern |
| CN106204517B (en) * | 2015-04-17 | 2019-03-12 | 铭传大学 | Automatic optical detection method for periodic pattern |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI271505B (en) | 2007-01-21 |
| CN100507530C (en) | 2009-07-01 |
| KR100660400B1 (en) | 2006-12-22 |
| JP4518494B2 (en) | 2010-08-04 |
| KR20060103823A (en) | 2006-10-04 |
| JP2006275612A (en) | 2006-10-12 |
| TW200636207A (en) | 2006-10-16 |
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