CN1840233A - Chemical filter employing metal compound and manufacturing method thereof - Google Patents
Chemical filter employing metal compound and manufacturing method thereof Download PDFInfo
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- CN1840233A CN1840233A CNA2006100714933A CN200610071493A CN1840233A CN 1840233 A CN1840233 A CN 1840233A CN A2006100714933 A CNA2006100714933 A CN A2006100714933A CN 200610071493 A CN200610071493 A CN 200610071493A CN 1840233 A CN1840233 A CN 1840233A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26B—HAND-HELD CUTTING TOOLS NOT OTHERWISE PROVIDED FOR
- B26B9/00—Blades for hand knives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
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Abstract
The present invention provides a chemical filter using a metal compound to increase efficiency of removing poisonous gas and life of the chemical filter without leaking out the gas adsorbed by strong chemical bonding force of the metal compound and the poisonous gas by manufacturing an adsorbent for the chemical filter using metal oxide, metal hydroxide, metallic salt, or a mixture of those and to provide a method for manufacturing the chemical filter. The adsorbent of this chemical filter includes 10-99 wt.% of metal oxides, metal hydroxide, a metal salt or a mixture of those and 1-90 wt.% of an organic or inorganic bonding agent or a mixture of those.
Description
Technical field
The present invention relates to be used to remove by filter the chemical filter of airborne chemical substance, in more detail, relate to the gaseous substance that is used to remove by filter in the clean room that flow into semiconductor, precise electronic parts, pharmaceuticals and food factory, and flow into the adsorbent of containing metal compound of airborne pernicious gas of the air-conditioner of general industrial field and indoor air cleaner and chemical filter and the manufacture method thereof that adopts this adsorbent.
Background technology
Semiconductor manufacturing process and sophisticated product or electronic product manufacturing process etc. generally carry out in the clean room of having got rid of polluter, and therefore, the pollution level in this clean room is the directly related key factor of productive rate with the manufactured product that comes out.
And because nearest semiconductor device Highgrade integration, the wafer bore that is used to make such semiconductor device is also increasing, therefore, and for the reason material that prevents from the bad of above-mentioned wafer and improve productive rate, must cut off to cause substandard product Cl for example
2, HCl, NO
x, SO
x, H
2The NH that exists in sour gas such as S, the gas phase
3, alkaline gas such as NMP, trimethylamine and volatility organic metal compound (VOCs) be present in the air with graininess, and flow in the clean room.
Here, in order to overcome the problems referred to above point, can adopt the whole bag of tricks that is used to remove polluters such as above-mentioned sour gas, alkaline gas and volatility organic metal compound, but as representational method, can enumerate when pollutant concentration is low to moderate the low concentration of ppb, can adopt the chemical filter that is arranged in the clean room, the method for removing polluter.
On the other hand, in order to remove polluters such as the sour gas that contains in the pernicious gas and alkaline gas, when main use active carbon and add when carrying active carbon, existence produces the secondary pollution problem of dust because of collision and abrasion, compare with the chemical bond of active carbon and object gas, adsorption reaction based on physical bond, there is the weak shortcoming of above-mentioned active carbon and gas adhesion, therefore, in the time of in high concentration gas flow into the chemical filter of filling active carbon, because of the concentration difference in inflow gas and the active carbon pore, gas is attracted in the active carbon pore, when low concentration or general air inflow, gas concentration in the active carbon pore is than the gas concentration height that flows into air, so the gas of absorption is drawn out of in the active carbon pore, therefore, the problem that the concentration of the air internal contamination thing by chemical filter increases produces.
Above-mentioned add that to carry that an active carbon means be to add to carry KOH, a KMnO here, in active carbon
4, H
3PO
4Etc. the material of acidity and alkaline chemical, or add a year Fe (NO
3)
2, Cu (NO
3)
2, Mn (NO
3) wait slaine after, calcine in the temperature more than 300 ℃, in the active carbon pore, add and carry a Fe
2O
3, CuO, MnO
2Deng the made material of metallic compound.For example, be dissolved in 10g KOH in the distilled water after, this solution is contacted with active carbon, above-mentioned solution is absorbed in the active carbon pore,, makes the distilled water evaporation the above-mentioned active carbon drying that has absorbed solution, only KOH remains in the active carbon pore whereby, makes to add to carry active carbon.Active carbon is carried in adding of making like this, and concrete the adding of KOH10% that mean carried active carbon.
It is acid-base material or slaine to be added be loaded onto behind the active carbon by physical chemistry in conjunction with the material of removing pernicious gas that adding like this carried active carbon, when adding year amount of substance above certain level, because of reducing absorption property, the active carbon specific area reduces simultaneously, it is limited can adding the amount that is loaded onto the polluter in the above-mentioned active carbon, add loading matter and induce the chemical bond of pernicious gas, but the physical bond of active carbon itself is better than chemical bond, though, when harmful gas concentration is in low concentration, can not bring into play sufficient performance so the removal of high concentration pernicious gas is shown effect.
Particularly, remove pernicious gas by the Acid-Base neutralization reaction adding the situation of carrying active carbon of adding of having carried soda acid, but by above-mentioned Acid-Base neutralization reaction, because H
+And OH
-Ion has activity, so must contain a certain amount of moisture.Therefore, when drying air be constantly supplied to and add when carrying active carbon, produce the water evaporates in the above-mentioned active carbon, add the problem that the activity of carrying active carbon reduces rapidly, add in addition between the active component that carried and polluter by the acid-base neutralization reaction, generate salt on the pore and the surface of active carbon, so produce more increase of reaction time, the performance of filter reduces more, the problem that the pressure loss increases etc. more.
In order to overcome because of this adds a reduction of carrying the absorption property that active carbon produces, produce problems such as the dust and the pressure loss because of abrasion, the someone proposes to adopt the new chemical filter of the ion exchange resin of small-particle shape and NACF etc. recently.
As the one example, a kind of employing ion exchange resin is disclosed in the patent documentation 1, chemical filter by the manufacturing of flexure type chemical constitution, but adopted the chemical filter of above-mentioned ion exchange resin, since chemical treatment become can with the cationic ion-exchange resin of polar gas generation ion-exchange or anion exchange resin attached on the wire netting, guarantee that by the continuous pore effect sufficient gas flows through, so can expect pressure loss decline and remove the effect that efficient rises.
Therefore, adopted the chemical filter of ion exchange resin, remove efficient owing to have good pernicious gas, evenly distribute so the absorption property of ion exchange resin itself rises and ion exchange resin is essential on wire netting, but the thickness of supporting mass of filling above-mentioned ion exchange resin is extremely thin, reach more than several millimeters (mm), so have the problem that is difficult to make the chemical filter that has adopted ion exchange resin.
Another problem points as the chemical filter that has adopted above-mentioned ion exchange resin, in order to make ion exchange resin attached on the supporting mass, use polyvinyl acetate (PVA), ethyl ethyl acetate (EVA), polyurethane, polypropylene, bonding agents such as polyethylene, by above-mentioned bonding agent is coated on the ion exchange resin, blocking ion exchange resin contacts with pernicious gas, be used for above-mentioned ion exchange resin is bonded on the supporting mass or the bonding agent that the bonding screen cloth of ion exchange resin is fixed on the filter frame is made of organo-metallic compound, so, have use, from bonding agent, discharge the problem of volatile ingredient according to above-mentioned bonding agent.
In addition, the chemical filter that has adopted above-mentioned ion exchange resin is if its spherical ion exchange resin is non-uniformly distributed on the metal dictyosome, then fill a few relatively side at ion exchange resin, the inflow air flows through, produce the rapid problem that reduces of absorption property of ion exchange resin, when the transporting and install of the filter that has adopted above-mentioned ion exchange resin, because of vibration or physical impact, adsorbent breaks away from from supporting mass, the quantity of sorbent that can absorb pernicious gas descends, therefore, flow into the mobile of inflow gas that adsorbent breaks away from part and be offset, the pernicious gas that produces the chemical filter that has adopted ion exchange resin is removed the problem that efficient reduces etc.
Outside the deionization exchanger resin, remove the metal oxide powder of deactivation,,, in patent documentation 2, disclose the form a social stratum filter that has adopted metal oxide as an example attached on metal or the ceramic supporting body and make filter having pernicious gas.Adopted the filter of above-mentioned metal oxide, the suspension wet type powderject of containing metal oxide to supporting mass, after suspension is adhered to, solvent is gasified, by follow-up sintering circuit, make metal oxide attached on the supporting mass, owing to adopt pernicious gas to remove active good metal oxide, so can expect to remove the rising of efficient.
Yet, above-mentioned metal oxide is attached on the supporting mass and the filter made with wet type powderject mode, less at air quantity, to be applied under the little condition of physical impact on the filter be effective, but when being used for the manufacturing of semiconductor and precision electronic device, under the condition of the big capacity air quantity, vibration and the physical impact that import clean room, be accompanied by passage of time, the problem of disengaging takes place in the powder that produces metal oxide.In addition, when on supporting mass, adhering to, when the amount of metal oxide surpasses when a certain amount of, the disengaging aggravation of metal oxide, the pressure loss sharply increases, so can be attached to the extremely difficulty control of amount of the metal oxide on the supporting mass, compare with the mode of direct forming metal oxide powder, make metal oxide attached to the mode on the supporting mass, owing to the amount of the metal oxide that can adsorb pernicious gas is few, so there is the short shortcoming of filter life.
[patent documentation 1] Korean Patent goes out to be willing to the 2002-0072666 specification
[patent documentation 2] Korean Patent goes out to be willing to the 2004-007440 specification.
Summary of the invention
The present invention is point in view of the above problems, purpose provides a kind of by the metal ingredient of metallic compound and the chemical bond power of pernicious gas, even low concentration also shows good pernicious gas and remove efficient, can solve the chemical filter adsorbent extraction problem, containing metal compound, metal hydroxides, slaine or their mixture and organic adhesive, inorganic adhesive or their mixture of pernicious gas.
Another object of the present invention provides a kind of chemical filter, wherein, carry above-mentioned chemical filter with adsorbent or on supporting mass the mode of the above-mentioned adsorbent of coating except that adding, it is configured as spherical, granular, be filled in the chemical filter after the shapes such as sheet, make thus and have pernicious gas and remove the active principle of ability and reach very big, improve and remove efficient and filter life, adsorbent is configured as various sizes and shape, when reducing, the pressure loss can solve the adsorbent abrasion that cause because of physical impact and the generation problem of dust, adsorbent is filled to filter interior, replaces using bonding agent with secondary pollution danger.
In order to solve above-mentioned problem, according to certain viewpoint of the present invention, a kind of chemical filter adsorbent is provided, it is characterized in that it comprises: the metallic compound that contains containing metal compound, metal hydroxides, slaine or their mixture of 10～99 weight %; And organic adhesive, inorganic adhesive or their mixture of 1～90 weight %.
In addition,, provide a kind of chemical filter, it is characterized in that it contains: have trapezoidal laciniation, and the adsorption layer supporting mass of chemical filter with adsorbent filled by portion within it according to another viewpoint of the present invention; And being connected above-mentioned adsorption layer supporting mass top and bottom and making above-mentioned adsorption layer supporting mass have 2 of trapezoidal laciniation is 1 pair guide plate; And, upper frame and the lower frame inserting above-mentioned every pair of guide plate respectively and fixed; And, connect the lateral frame more than 2 that is arranged on this upper frame and lower frame.
The chemical filter adsorbent that the present invention relates to, be applicable to chemical filter, this chemical filter be used for removing the gas phase pernicious gas of generations such as general industry factory such as the gas phase pernicious gas that manufacturing processes such as semiconductor, precise electronic parts, pharmaceuticals and food manufacturing take place, petrochemistry, system iron, system steel, power plant and flow into various buildings or industrial field air-conditioning system and air purifier etc. in the gas phase pernicious gas, as long as the adsorbent that can achieve the above object is any.
On the other hand, constitute the chemical filter that the present invention relates to metallic compound of adsorbent, can be separately or mix and constitute metal oxide, metal hydroxides, slaine etc., but specifically the metallic compound that constitutes that mixes more than at least 2 kinds of materials such as above-mentioned metal oxide, metal hydroxides, slaine is called " complex metal compound ".At this moment, described complex metal compound is comprised in metallic compound.
Constitute the material of the metallic compound that the present invention relates to, so long as the normally used metallic compound of this technical field, any getting final product, but preferred the use is selected from Fe
2O
3, Fe
3O
4, CuO, MnO
2, SrO, SrO
2, metal oxide such as CaO, zeolite, FeO (OH), Sr (OH)
2, Ca (OH)
2Deng metal hydroxides, FeSO
4, CuSO
4, SrCO
3, CaCO
3Deng the material in the group of slaine formation, its consumption is 10～99 weight %s of chemical filter with the adsorbent total amount.
In addition, the metallic compound that the present invention relates to can mix the use active carbon as required.At this moment, the mixing ratio of metallic compound and organic-inorganic bonding agent and active carbon, to the unit gross weight of metallic compound and organic-inorganic bonding agent and active carbon, metallic compound and organic-inorganic bonding agent are that 10～90 weight %, active carbon are that 10～90 weight % also can.
As specific scheme, the metallic compound that the present invention relates to is by having mixed the above-mentioned Fe more than 2 kinds at least
2O
3, Fe
3O
4, CuO, MnO
2, SrO, SrO
2, metal oxide such as CaO, zeolite, FeO (OH), Sr (OH)
2, Ca (OH)
2Deng metal hydroxides, FeSO
4, CuSO
4, SrCO
3, CaCO
3Mixture Deng metallic compounds such as slaines constitutes, also can use iron compound with 50: 50 specific weight ratios and strontium mixture, have the copper compound of 80: 20 weight ratios and the mixture of iron compound, or having the zeolite of 60: 40 weight ratios and the mixture of Mn oxide, its consumption reaches 10～99 weight % to chemical filter with the adsorbent total amount and gets final product.
At this moment, the mixture of above-mentioned iron compound and strontium, specifically Cl to containing in the pernicious gas
2, HCl, NOx, SOx, HF, H
2Sour gas such as O remove demonstration excellent results, the NH of the mixture of copper compound and iron compound to containing in the pernicious gas
3, alkaline gas such as NMP, trimethylamine removal show better effect, the 13X type zeolite of the preferred fine pore 1.3mm of above-mentioned zeolite and formaldehyde, benzene, dimethylbenzene, toluene, acetic acid, chloroform, the O of the mixture of Mn oxide to containing in the pernicious gas
3The removal of VOCs such as gas shows better effect, therefore, the mixing ratio of above-mentioned complex metal compound is meant that above-mentioned mixing ratio can change to have the mixture of active metallic compound as the gas of handling object in the possible range that those skilled in the art allow.
The bonding agent that the present invention relates to is that the metallizing thing mixes, increase the bonding agent of adhesion between metallic compound, all can as long as normally used bonding agent is any in this area, the preferred organic adhesives such as methylcellulose, dextrin, polyvinyl alcohol, graphite that use, and/or inorganic adhesive such as alumina sol, cataloid, aerosol, bentonite, it is preferred that its consumption reaches 1～90 weight % to the adsorbent total amount.
Secondly, the chemical filter that the present invention relates to the above-mentioned formation manufacture method with adsorbent is illustrated.
At first, with relative adsorbent total amount be 10～99 weight % separately or at least 2 kinds be selected from by Fe
2O
3, Fe
3O
4, CuO, MnO
2, SrO, SrO
2, metal oxide such as CaO, zeolite, FeO (OH), Sr (OH)
2, Ca (OH)
2Deng metal hydroxides, FeSO
4, CuSO
4, SrCO
3, CaCO
3Deng the metallic compound in the group of slaine formation, and the adsorbent total amount is 10～90 weight % organic adhesive and/or inorganic adhesives relatively, is the ultrapure distilled water of 10～90 weight % with relative adsorbent total amount, mix the back at normal temperatures and stir, make mixture.
Then, with being maintained at about 1～2 hour said mixtures of kiln dried of 100 ℃ of temperature, after preferred 1 hour 30 minutes, in the normal temperature slaking about 4 hours.
Secondly,, be configured as graininess, spherical, ball shape or sheet etc., make adsorbent according to the use and the method for above-mentioned dried mixture.
Here, the chemical filter adsorbent of making is that any shapes such as graininess, spherical, ball shape or sheet get final product, but adsorbent surface does not does not wear and tear, increase with the effective contact area of pernicious gas, and the sheet that absorption property improves is preferred, and the sheet of particle diameter 3～8mm is preferred.
In addition, the manufacturing process of the above-mentioned dry mixture of crossing can use any the getting final product in the normally used manufacturing process in this field, but preferred extrusion molding method more preferably uses tablet press machine the mixture compressing tablet.
On the other hand, the adsorbent that adopts said process to make for adsorbent is coated on the supporting mass, owing to do not use the bonding agent that produces secondary pollution danger, can be filled in other housing, comes the manufacturing chemistry filter.This chemical filter is from the viewpoint of macroscopic view, by the framework that constitutes the chemical filter outward appearance; And that this framework inside has, as to fill adsorbent adsorbent supporting mass determines the guide plate of this adsorbent supporting mass shape to constitute.
The invention effect
The present invention is by adopting metal oxide, metal hydroxides, slaine or their mixture, come manufacturing chemistry filter adsorbent, the effect of the strong chemical bond power by metallic compound and pernicious gas, the gas of absorption is not drawn out of, so have the effect that the life-span of removing efficient and chemical filter of pernicious gas increases.
In addition, the chemical filter that the present invention relates to is made spherical, ball shape or sheet with adsorbent, whereby, be filled in the chemical filter, it is maximum that the amount of removing active component of pernicious gas reaches, make and remove efficient and improve, the variation by linear velocity can reduce the pressure loss, effectively reduces the particulate matter that the original abrasion because of adsorbent produce.
In addition, adopt the chemical filter adsorbent that the present invention relates to, during the manufacturing chemistry filter,, can effectively prevent because of the generation of the secondary pollution material that escaping gas produced takes place owing to do not use other bonding agent.
Description of drawings
Fig. 1 is the figure of expression chemical filter of the present invention with the manufacture method of adsorbent.
Fig. 2 is adsorbent is used in expression with the sheet chemical filter of embodiment 1 manufacturing of the present invention figure.
Fig. 3 is the stereogram of chemical filter of the present invention.
Fig. 4 is the structure chart of chemical filter of the present invention.
Fig. 5 is the structure chart of the adsorption layer supporting mass of expression chemical filter of the present invention.
Fig. 6 is the sectional drawing of chemical filter of the present invention.
Fig. 7 is the guide plate stereogram of chemical filter of the present invention.
Fig. 8 is that expression adopts the hydrosulphate of chemical filter of the present invention to remove the figure of efficient.
Fig. 9 is that expression adopts the ammonia of chemical filter of the present invention to remove the figure of efficient.
Figure 10 is that expression adopts the formaldehyde of chemical filter of the present invention to remove efficiency chart.
Figure 11 is that expression adopts the ozone of chemical filter of the present invention to remove the figure of efficient.
Figure 12 is the differential pressure experimental result picture of having filled the trapezoidal chemical filter of doublet type of sheet adsorbent of the present invention.
The specific embodiment
With reference to the accompanying drawings chemical filter of the present invention is described in detail.Following explanation is to be used to specify the present invention rather than scope of the present invention is limited.
Fig. 3 is the stereogram of chemical filter of the present invention.Fig. 4 is the structure chart of chemical filter of the present invention.Fig. 5 is the structure chart of the adsorption layer supporting mass of expression chemical filter of the present invention.Fig. 6 is the sectional drawing of chemical filter of the present invention.Fig. 7 is the stereogram of the guide plate of chemical filter of the present invention.
As Fig. 3～shown in Figure 7, chemical filter of the present invention is from the viewpoint of macroscopic view, and its formation is: the framework 2 with dimetric formation chemical filter outward appearance; The adsorption layer supporting mass 6 of the filling adsorbent that said frame 2 inside have; Adsorption layer supporting mass 6 is held in trapezoidal jagged guide plate 8.
, constitute the material of framework 2, screen cloth 12,16 and the guide plate 8 etc. of above-mentioned chemical filter here,, preferably use nonferrous metal system for the corrosion of the sour gas that prevents from handling object gas, to contain etc.
On the other hand, the framework 2 that the present invention relates to is the frameworks that constitute the chemical filter outward appearance, and chemical filter has dimetric structure, considers easily from decomposition, the assembling of above-mentioned chemical filter, by top and the bottom framework 2 ' and lateral frame 2 " constitute.
At this moment, top and the bottom framework 2 ' has guide plate 8 and is inserted into that it is inner and can be carried out fixing space.
The adsorption layer supporting mass 6 that the present invention relates to is to make as the gas of handling object to pass through, and the supporting mass of handling the object material is removed in absorption, the place that can fill chemical filter is provided for the inside at this adsorption layer supporting mass 6, a pair of the 1st screen cloth 12 with diameter littler than above-mentioned adsorbent is set with keeping at a certain distance away, to guarantee the space, filled the chemical filter adsorbent in the above-mentioned space of guaranteeing, form adsorption layer 4, outer surface at above-mentioned a pair of the 1st screen cloth 12 is provided with nonwoven 14 respectively, discharge to the outside from absorbent powder and dust that the adsorption layer 4 of having filled above-mentioned adsorbent produces preventing, be connected with the 2nd screen cloth 16 at the outer surface that is provided with above-mentioned nonwoven 14, to support above-mentioned nonwoven 14.
At this, the mesh diameter of preferred above-mentioned the 2nd screen cloth 16 is bigger than the mesh diameter of above-mentioned the 1st screen cloth 12.
On the other hand, have the adsorption layer supporting mass 6 of above-mentioned formation, make benchmark with the adsorption layer 4 of having filled above-mentioned adsorbent, the 1st screen cloth 12 that forms successively on its two sides, nonwoven 14 and the 2nd screen cloth 16 form trapezoidal zigzag.This trapezoidal zigzag is to form by the guide plate 8 with the trapezoidal jagged lead 10 that connects in the top and the bottom of the 1st screen cloth 12, nonwoven 14 and the 2nd screen cloth 16.
As mentioned above, this guide plate 8 is the guide plates that are used to form and keep the form of adsorption layer supporting mass 6, on 2 guide plates 8 two sides as a pair of top that is configured in adsorption layer supporting mass 6 and bottom.A side that contacts with above-mentioned adsorption layer supporting mass 6 has jagged lead 10.Trapezoidal shape at these 2 leads 10 that form respectively on as a pair of guide plate 8 forms in correspondence with each other.
, have the guide plate 8 fastening upper frame 2 ' of formation framework 2 and the inboards of lower frame 2 ' of being fixed on of above-mentioned lead 10 here, whereby, above-mentioned adsorption layer supporting mass 6 is bonded and is fixed on the framework 2.
On the other hand, the chemical filter that the present invention relates to above-mentioned adsorption layer supporting mass 6 and guide plate 8 connect be arranged on top and lower frame 2 ' and go up after, finally the iron plate by Z-shaped bending (the bent げ of Z) shape is with lateral frame 2 " connect and be arranged on top and lower frame 2 ' and go up also and linked.Above-mentioned Z-shaped curved shape is to be used to improve the physical strength of filter frame and the shape of stability, means the iron plate that bends to " Z " shape.
Therefore, the advantage that adopts Z-shaped curved shape fixed frame 2 of the present invention to be had is, than to bend to flat iron plate or to bend to the framework that the shape of " L " word shape is processed, the intensity of its anti-physical impact and excellent in stability, so even air blast flows into above-mentioned chemical filter, the skeleton of chemical filter also can former state keep.Owing to do not use used before this bonding agent, for example polyurethane, epoxies chemicals etc. to fix framework 2, can suppress generation because of the secondary pollutions such as escaping gas of bonding agent generation.
On the other hand, chemical filter of the present invention can be arranged on separately on the mobile route of object gas to be processed and use, but also a plurality of the use is set as required hypocrateriform.
Below, specify the present invention by embodiment.But the following example only is to be used for specific description the present invention, rather than limits scope of the present invention by these embodiment.
Embodiment 1
The manufacturing of adsorbent
Use agitator at normal temperatures, will contain iron compound (FeO (OH), Fe
2O
3) [KOCAT makes, Korea S] 180g, strontium compound (Sr (OH)
2) [inside and outside business manufacturing, Korea S] 100g, calcium compound (Ca (OH)
2) 80g, copper compound (CuSO
4) [evergreen chemistry is made Korea S] 180g, manganese compound (MnO
2) [inside and outside business manufacturing, Korea S] 180g and zeolite [inside and outside business manufacturing, Korea S] 180g the pernicious gas active material and contain methylcellulose [the Samsung precision chemical made, Korea S] 40g, alumina sol [inside and outside business manufacturing, Korea S] 50g and graphite [inside and outside business manufacturing, Korea S] the organic-inorganic bonding agent of 10g, mix with ultrapure distilled water 40g.
Then, with drying oven [continent science make, Korea S] in making said mixture after dry about 1 hour 30 minutes under 100 ℃ the temperature, about 4 hours of natural slaking.
Secondly, after above-mentioned natural slaking stops,, carry out the granulating operation and make it become the granular of 16～20 meshes bigger than initial particle in order to improve the formability of sheet adsorbent.
Thereafter, the above-mentioned adsorbent of making particle, tablet press machine [generation ancestor's Off ァ マ テ ッ Network manufacturing with 35～40pin structure, Korea S], after being configured as the sheet adsorbent of particle diameter 3～8mm, making its dry about about 3 hours under 120 ℃ the temperature conditions, make final chemical filter adsorbent with drying oven.
Fig. 2 illustrates the chemical filter adsorbent of making.
Except using iron compound (FeO (OH), Fe
2O
3) [KOCAT makes, Korea S], strontium compound (Sr (OH)
2) [inside and outside business manufacturing, Korea S], methylcellulose [Samsung precision chemical make, Korea S] with the mixture that 45: 45: 1 weight ratio is mixed, replace operating similarly to Example 1 beyond pernicious gas active material and the organic-inorganic bonding agent.
Embodiment 3
Except using copper compound (CuSO
4) [evergreen chemistry is made Korea S], iron compound (FeO (OH), Fe
2O
3) [KOCAT make, Korea S], methylcellulose [the Samsung precision chemical is made, Korea S] with the mixture that 70: 20: 10 weight ratio is mixed, replace operating similarly to Example 1 beyond pernicious gas active material and the organic-inorganic bonding agent.
Embodiment 4
Except using zeolite [inside and outside business manufacturing, Korea S], Mn oxide [inside and outside business manufacturing, Korea S], aerosol [inside and outside business manufacturing, Korea S] and graphite [inside and outside business manufacturing, Korea S] with 60: 30: 8: the mixture that 2 weight ratio is mixed, replace operating similarly to Example 1 beyond pernicious gas active material and the organic-inorganic bonding agent.
Embodiment 5
The manufacturing of chemical filter
[デ ボ makes the screen cloth of 3640 * 560 * 0.2mm size with 0.85mm (20 order) diameter, Korea S] 1 pair and with the nonwoven of screen cloth same size [デ ボ makes, Korea S] connect be arranged on the two sides of screen cloth after, connect and be arranged between trapezoidal jagged 1 pair of guide plate.
Then, fill 3.2 liters in the adsorbent of making among the embodiment 1 of chemical filter, constitute the adsorption layer supporting mass in above-mentioned inside with screen cloth [デ ボ makes, Korea S] of 3640 * 560 * 0.2mm size of 0.85mm (20 order) diameter.
Secondly, the guide plate that top and bottom had of above-mentioned adsorption layer supporting mass is separately fixed at the top of 1164 * 18mm size and the inside of lower frame [ウ ギ ョ Application industry is made, Korea S].
Secondly, above-mentioned upper frame and lower frame are bent to Z-shaped being fixed respectively on left frame and correct frame, make the chemical filter of 1200 * 600 * 80mm size.
Constitute framework, the screen cloth of above-mentioned chemical filter here,, the material of guide plate is used the aluminium of nonferrous metal system.
Comparative example 1
In granular active carbon, add the manufacturing of carrying active carbon of adding of having carried chemical substance
At first; be equivalent to 1kg diameter 4mm, long 1～2mm, granular granulation active carbon [make by three a thousand li active carbons; Korea S] the 50g potassium hydroxide (KOH) [DUKSAN medicine make, inside and outside business manufacturing] of 5wt% be dissolved among the distilled water 500mL, make to add and carry solution.
Then, the above-mentioned year solution 500mL that adds that makes is dripped to granulation active carbon 1kg, make precipitation solution be absorbed in active carbon inside with pipette.At this moment, when dripping this precipitation solution, the stirring active charcoal makes to add and carries solution and evenly be absorbed in active carbon inside.
Secondly, placed about about 3 hours, make adding of in having absorbed the active carbon that adds year solution, having existed carry the pore inside that solution evenly is absorbed in activated carbon surface and active carbon,, remove the moisture in the active carbon then in about 150 ℃ temperature drying.
Comparative example 2
Except using phosphoric acid (H
3PO
4) [DUKSAN medicine, Korea S] 50g replaces similarly operating with comparative example 1 beyond potassium hydroxide (KOH) 50g of comparative example 1.
Comparative example 3
Except using potassium permanganate (KMnO
4) [DUKSAN medicine, Korea S] 50g replaces similarly operating with comparative example 1 beyond potassium hydroxide (KOH) 50g of comparative example 1.
Experiment
The compressive strength of adsorbent
For the intensity of the adsorbent of measuring embodiments of the invention 1 and comparative example 1 manufacturing, adopt compressive strength analyzer [Model 1308, and AIKOH makes, Japan] to measure compressive strength.
The compressive strength of table 1 adsorbent
| Embodiment 1 | Comparative example 1 | |
| Compressive strength (kgf/cm 2) | 205 | 69 |
As shown in table 1, better in according to the intensity of the sheet adsorbent of embodiment 1 compressing tablet by the resulting ball shape of the extrusion molding of comparative example 1 adsorbent, so can solve the abrasion of the adsorbent that causes because of vibration and physical impact and produce the problem of dust.
The absorption property of sour gas
The adsorbent powder that adsorbent that embodiment 2 is made and comparative example 1 are made is broken to 10～14 order sizes, fills 100cm respectively in the reactor of inflow entrance that the side of subtend mutually has and the diameter 36mm of flow export, high 200mm
3About.
Then, make chlorine (Cl as the concentration 1vol% of inflow gas
2), hydrogen chloride (HCl), nitrogen oxide (NOx), hydrosulphate (SOx), hydrogen sulfide (H
2S) and the hydrogen fluoride (HF) of 0.01vol% (100ppm) flow into respectively in the above-mentioned adsorptive reactor.
Here, the temperature of inflow gas is that 20～25 ℃, linear velocity are that 98cm/min, space velocity are 600hr
-1
Secondly, measure from the concentration of the sour gas of adsorptive reactor flow export outflow with detector tube [Gastech makes, Japan].At this moment, the time that the sour gas concentration of leaking is reached 10ppm sees through the time as desorb.
It the results are shown in table 2.
Table 2 sour gas adsorption capacity
| Sour gas treating capacity (mmol-sour gas/g-adsorbent) | ||
| | Comparative example 2 | |
| Cl 2 | 3.57 | 2.68 |
| HCl | 8.93 | 2.5 |
| NOx | 2.38 | 1.61 |
| SOx | 2.80 | 1.79 |
| H 2S | 11.9 | 2.95 |
| HF | 7.14 | 3.13 |
As shown in table 2, than the active carbon that adds the alkaline matter that has carried comparative example 2, sour gas adsorption capacity with adsorbent that the metallic compound of embodiment 2 forms is better, so it is longer to have filled life-span of chemical filter of the adsorbent made from metal oxide.
The absorption property of alkaline gas
The adsorbent powder of the adsorbent of embodiment 3 manufacturings and comparative example 2 manufacturings is broken to 10～14 order sizes, in adsorptive reactor, fills 100cm respectively
3About.
Then, spherical 0.3～1.2mm with-SO
3 -(sulphite) in return the storng-acid cation exchange resin of base [three support society makes Korea S] fills 100cm in other adsorptive reactor
3About.
Secondly, ammonia (NH as the concentration 0.5vol% of inflow gas
3), NMP (N-methyl-pyrrolidones), trimethylamine (TMA) flow into respectively in the above-mentioned adsorptive reactor.Here, the gas temperature of inflow is that 20～25 ℃, linear velocity are that 98cm/min, space velocity are 600hr
-1
Secondly, measure the alkaline gas concentration that flows out from the flow export of adsorptive reactor with detector tube [Gastech makes, Japan].At this moment, the time that the alkaline gas concentration of leaking is reached 20ppm sees through the time as desorb.
It the results are shown in table 3.
Table 3 alkaline gas adsorption capacity
| Alkaline gas treating capacity (mmol-alkaline gas/g-adsorbent) | |||
| Embodiment 3 | Comparative example 3 | Ion exchange resin | |
| NH 3 | 8.84 | 1.39 | 7.30 |
| NMP | 7.37 | 3.75 | 6.00 |
| TMA | 8.04 | 4.46 | 6.26 |
As shown in table 3, than adding the active carbon (comparative example 3 and ion exchange resin) that has carried strong-acid ion exchange resin and acidic materials, alkaline gas adsorption capacity with adsorbent that the metallic compound of embodiment 3 forms is better, so it is longer to have filled life-span of chemical filter of the adsorbent made from metal oxide.
Volatility organic metal compound and ozone absorption property
The adsorbent powder of the adsorbent of embodiment 4 manufacturings and comparative example 3 manufacturings is broken to 10～14 order sizes, in adsorptive reactor, fills 100cm respectively
3About.
Then, make formaldehyde (HCHO), acetaldehyde (CH as the concentration 0.1vol% of inflow gas
3CHO), benzene,toluene,xylene, acetic acid (CH
3COOH), chloroform (CH
3Ozone (the O of volatility organic metal compound (VOC) and 0.04vol% (400ppm) such as Cl)
3) flow into respectively in the above-mentioned adsorptive reactor.
Here, the temperature of inflow gas is that 20～25 ℃, linear velocity are that 98cm/min, space velocity are 600hr
-1
Secondly, measure volatility organic metal compound and the ozone gas concentration that flows out from the flow export of adsorptive reactor with detector tube [Gastech makes, Japan].At this moment, the volatility organic metal compound concentration of leaking is reached the time that 50ppm, concentration of ozone gas reach 3ppm and see through the time as desorb.
It the results are shown in table 4.
Table 4 volatility organic metal compound and ozone adsorption capacity
| Volatility organic metal compound and ozone treatment amount (mmol-gas/g-adsorbent) | ||
| Embodiment 4 | Comparative example 3 | |
| HCHO | 0.23 | 0.06 |
| CH 3CHO | 0.48 | 0.18 |
| Benzene | 0.85 | 1.39 |
| Toluene | 1.70 | 2.48 |
| Dimethylbenzene | 1.14 | 2.01 |
| CH 3COOH | 3.12 | 1.98 |
| CH 3Cl | 0.17 | 0.10 |
| O 3 | 5.96 | 2.45 |
As shown in table 4, have to add and carried the strong KMnO of oxidizing force
4The adsorbent VOCs and the ozone adsorption capacity of composition of active carbon metallizing thing as described below.The molecule that particle diameters such as benzene,toluene,xylene are big adopts the adsorption capacity of active carbon of comparative example 3 good, but when for formaldehyde, acetic acid and ozone etc., the absorption capacitive energy of the metallic compound of embodiment 4 is good.Particularly when the time for VOCs and ozone, with acid, alkaline gas is different, add the absorption property that carries active carbon and do not add the absorption property minimizing of carrying active carbon (not adding the general active carbon that carries chemical substance), so, adopt adding of metallic compound to carry active carbon, more effective when removing VOCs and ozone.
Yet, to a part of volatility organic metal compounds such as above-mentioned benzene,toluene,xylenes, comparative example 3 is than the function admirable of embodiment 4, but the metallic compound absorption property of the foregoing description 4 is compared with the active carbon of comparative example 3, do not decline to a great extent, so when handling above-mentioned specific volatility organic metal compound, can consider mixed active charcoal in chemosorbent of the present invention.
The oxysulfide of chemical filter is removed efficient
In the chemical filter that embodiment 5 makes, the adsorbent that embodiment 2 and comparative example 1 make is set respectively after, oxysulfide is flowed into respectively in the above-mentioned chemical filter, confirm the oxysulfide (SO of chemical filter
2) remove efficient.
Here, the thickness of chemical filter is 40mm, oxysulfide (SO
2) concentration of [ソ Application カ Application special gas make, Korea S] is 20ppm, the inflow gas temperature of sulfur-containing oxide is that 20～25 ℃, relative humidity are 40～50%, linear velocity is 0.2m/s.
Here, passed through the gas concentration of chemical filter and made, イ リ ア with FT-IR[MIDAC] measure.
It the results are shown in Fig. 8.
The ammonia of chemical filter is removed efficient
Employing is removed the same method of efficient experiment with the oxysulfide of chemical filter and is carried out, but the adsorbent that uses embodiment 3 and comparative example 2 replaces the adsorbent of embodiment 2 and comparative example 1, [ソ Application カ Application special gas is made with the ammonia that flows into, Korea S] replace the inflow gas of sulfur-containing oxide, measure the ammonia (NH of chemical filter
3) remove efficient.Here, the concentration of ammonia is 20ppm.
It the results are shown in Fig. 9.
The formaldehyde of chemical filter is removed efficient
Employing is removed the same method of efficient experiment with the oxysulfide of chemical filter and is carried out, but the adsorbent that uses embodiment 4 and comparative example 3 replaces the adsorbent of embodiment 2 and comparative example 1, [the DUKSAN medicine is made with the formaldehyde that flows into, Korea S] replace the inflow gas of sulfur-containing oxide, measure the formaldehyde of chemical filter and remove efficient.Here, the concentration of formaldehyde is 20ppm.
It the results are shown in Figure 10.
The ozone of chemical filter is removed efficient
Employing is removed the same method of efficient experiment with the oxysulfide of chemical filter and is carried out, but the adsorbent that uses embodiment 4 and comparative example 3 replaces the adsorbent of embodiment 2 and comparative example 1, [ソ Application カ Application special gas is made with the ozone that flows into, Korea S] replace the inflow gas of sulfur-containing oxide, measure the ozone of chemical filter and remove efficient.Here, the concentration of ozone is 20ppm.
It the results are shown in Figure 11.
The mensuration of the pressure loss of chemical filter
The chemical filter that adopts method similarly to Example 5 to make, be installed on the pressure loss experimental provision, behind the adsorbent that embodiment 1 and comparative example 1 manufacturing are set respectively on the chemical filter of making 600 * 440 * 40mm size, pass air into above-mentioned chemical filter, confirm the pressure loss (pressure reduction) of chemical filter by the change of line speed that flows into air.The chemical filter that is provided with adsorbent, be installed in and make horizontal 610mm, vertically on the pressure loss experimental provision of the acrylate quadrangular prism shape of 450mm, long 1000mm after, the inflow entrance of air injection experiments device, measure the pressure reduction of chemical filter front and back end.The linear velocity that flows into air is 0.2～1.0m/s, and the mensuration of the pressure loss adopts differential pressure transducer [ウ Le パ technology is made, Korea S].
It the results are shown in Figure 12.
As mentioned above, so long as, under the situation of the feature that does not change technological thought of the present invention or necessity, can adopt various concrete scheme implementations the personnel that have common knowledge in the technical field of the invention.Yet above embodiment can not be interpreted as limitation of the invention for example.Scope of the present invention is compared with detailed explanation, and the implication of technical scheme, scope and the various modifications or the variation that derive from its equivalent concepts all can be regarded as within the scope of the present invention.
Claims (15)
1. a chemical filter adsorbent is characterized in that, it contains the metallic compound of containing metal oxide, metal hydroxides, slaine or their mixture of 10～99 weight %; And organic adhesive, inorganic adhesive or their mixture of 1～90 weight %.
2. according to the described chemical filter adsorbent of claim 1, it is characterized in that above-mentioned chemical filter adsorbent is spherical, ball shape or sheet.
3. according to claim 1 or 2 described chemical filter adsorbents, it is characterized in that, above-mentioned metallic compound for from by metal oxide, metal hydroxides, and the group that constitutes of slaine at least a kind of material selecting, described metal oxide is selected from Fe
2O
3, Fe
3O
4, CuO, MnO
2, SrO, SrO
2, CaO, zeolite, described metal hydroxides is selected from FeO (OH), Sr (OH)
2, Ca (OH)
2, described slaine is selected from FeSO
4, CuSO
4, SrCO
3, CaCO
3
4. according to the described chemical filter adsorbent of claim 1, it is characterized in that it is the active carbon of 10～90 weight % that above-mentioned metallic compound further contains with respect to the metallic compound gross weight.
5. according to claim 1 or 2 described chemical filter adsorbents, it is characterized in that, above-mentioned metallic compound for from by metal oxide, metal hydroxides, and the group that constitutes of slaine mixture, the copper compound of 80: 20 weight ratios and the mixture of iron compound of the iron compound of at least two kinds of mixtures, 50: 50 weight ratios selected and strontium compound, or the mixture of the zeolite of 60: 40 weight ratios and Mn oxide; Described metal oxide is selected from Fe
2O
3, Fe
3O
4, CuO, MnO
2, SrO, SrO
2, CaO, zeolite, described metal hydroxides is selected from FeO (OH), Sr (OH)
2, Ca (OH)
2, described slaine is selected from FeSO
4, CuSO
4, SrCO
3, CaCO
3
6. according to claim 1 or 2 described chemical filter adsorbents, it is characterized in that above-mentioned organic adhesive is methylcellulose, dextrin, polyvinyl alcohol, graphite or their mixture.
7. according to claim 1 or 2 described chemical filter adsorbents, it is characterized in that above-mentioned inorganic adhesive is alumina sol, cataloid, aerosol, bentonite or their mixture.
8. according to claim 1 or 2 described chemical filter adsorbents, it is characterized in that, above-mentioned chemical filter with adsorbent in order to remove the gas phase pernicious gas that flows in the manufacturing processes such as semiconductor, precise electronic parts, pharmaceuticals and food manufacturing, and the air-conditioner of various building, general industrial field or be used for the gas phase pernicious gas that the air cleaner of indoor air purification flows into and use.
9. a chemical filter wherein contains claim 1 or 2 described chemical filter adsorbents.
10. according to the described chemical filter of claim 9, it is characterized in that above-mentioned chemical filter contains: have trapezoidal laciniation, and the adsorption layer supporting mass of chemical filter with adsorbent filled by portion within it; And linking, make above-mentioned adsorption layer supporting mass to have 2 of trapezoidal laciniation in the top and bottom of this adsorption layer supporting mass is 1 pair guide plate; And, make every pair of above-mentioned guide plate respectively Inserted go into and fixing upper frame and lower frame; And, on above-mentioned upper frame and above-mentioned lower frame, connect the lateral frame more than 2 that is provided with.
11., it is characterized in that to fill chemical filter be 1 pair the 1st screen cloth with 2 of the place of adsorbent to above-mentioned adsorption layer supporting mass by being used to provide according to the described chemical filter of claim 10; In the outer setting of above-mentioned each the 1st screen cloth and be used to prevent that chemical filter is with the nonwoven of absorbent powder to external leaks; And, constitute in above-mentioned nonwoven outer setting and the 2nd screen cloth that supports nonwoven.
12., it is characterized in that the upper frame of above-mentioned chemical filter and lower frame and lateral frame are finished assembling by Z-shaped crooked the binding according to the described chemical filter of claim 10.
13., it is characterized in that said frame, above-mentioned the 1st screen cloth, the 2nd screen cloth and guide plate are made of nonferrous metal according to any described chemical filter in the claim 10～12.
14. the chemical filter manufacture method of adsorbent is characterized in that this method comprises: be the metallic compound that contains metal oxide, metal hydroxides, slaine or their mixture of 10～99 weight % with relative adsorbent gross weight; And the organic adhesive of 1～90 weight %, inorganic adhesive or their mixture, be the blend step that the ultrapure distilled water of 1～20 weight % mixes with relative adsorbent total amount;
Then, with said mixture with after the kiln dried 1～2 hour that is maintained at about 100 ℃ of temperature, the about 4 hours maturation stage of slaking under normal temperature.
15. according to the manufacture method of the described chemical filter of claim 14, it is characterized in that with adsorbent, as the back operation of above-mentioned maturation stage further contain the shaping slaking the forming step of mixture.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050025842A KR100653431B1 (en) | 2005-03-29 | 2005-03-29 | Chemical Filters Using Metallic compounds and Preparation Method Thereof |
| KR1020050025842 | 2005-03-29 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100742345A Division CN101306299A (en) | 2005-03-29 | 2006-03-29 | Chemical filters using metallic compounds and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1840233A true CN1840233A (en) | 2006-10-04 |
Family
ID=37029526
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100742345A Pending CN101306299A (en) | 2005-03-29 | 2006-03-29 | Chemical filters using metallic compounds and preparation method thereof |
| CNA2006100714933A Pending CN1840233A (en) | 2005-03-29 | 2006-03-29 | Chemical filter employing metal compound and manufacturing method thereof |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100742345A Pending CN101306299A (en) | 2005-03-29 | 2006-03-29 | Chemical filters using metallic compounds and preparation method thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2006271966A (en) |
| KR (1) | KR100653431B1 (en) |
| CN (2) | CN101306299A (en) |
| TW (1) | TW200633754A (en) |
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-
2005
- 2005-03-29 KR KR1020050025842A patent/KR100653431B1/en not_active IP Right Cessation
-
2006
- 2006-03-03 TW TW095107110A patent/TW200633754A/en unknown
- 2006-03-10 JP JP2006066745A patent/JP2006271966A/en active Pending
- 2006-03-29 CN CNA2008100742345A patent/CN101306299A/en active Pending
- 2006-03-29 CN CNA2006100714933A patent/CN1840233A/en active Pending
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Also Published As
| Publication number | Publication date |
|---|---|
| KR100653431B1 (en) | 2006-12-01 |
| JP2006271966A (en) | 2006-10-12 |
| TW200633754A (en) | 2006-10-01 |
| CN101306299A (en) | 2008-11-19 |
| KR20060104030A (en) | 2006-10-09 |
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