KR100907492B1 - Chemical Filters and Use Thereof - Google Patents

Abstract

The present invention is a chemical filter adsorbent; At least two soft nets (10) provided on the left and right sides of the chemical filter adsorbent to prevent the chemical filter adsorbent from being crushed in contact with the mesh net (8); A mesh net 8 connected to the outside of the soft net 10 to prevent the adsorbent powder for the chemical filter from being separated out; A porous metal mesh 6 connected to the outside of each mesh net 8 to support the mesh net 8; And a frame (4) for fixing the adsorbent, soft net (10), mesh net (8) and porous metal net (6) and its use.

Chemical Filters, Soft Nets, Adsorbents, Chemical Filter Devices

Description

Chemical Filters and Use Thereof

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical filter for filtering and removing chemical substances in air, and more particularly, to a gas phase material introduced into a clean room of semiconductors, precision electronic components, pharmaceuticals, and food manufacturing plants, and an air conditioner for general industrial fields. And a chemical filter and its use to filter out harmful gases in the air entering the indoor air purifier.

In general, the semiconductor manufacturing process, the precision product or the electronic product manufacturing process is manufactured in a clean room in which pollutants such as harmful gases are excluded, and the degree of contamination of the clean room is an important factor directly affecting the production efficiency of the manufactured product. Doing.

In addition, recent semiconductor devices have been highly integrated, and the diameter of wafers for manufacturing such semiconductor devices has also increased. In order to prevent defects of the wafers and increase production efficiency, F, Cl ₂ , HCl, Acidic gases such as NOx, SOx, H ₂ S, O ₃ , organic acids, basic gases such as NH ₃ and amines present in the gaseous phase, and volatile organometallic compounds (VOCs) are present in the air in the form of particulates and flow into the clean room. Must be blocked.

Thus, various methods for removing contaminants such as acid gas, basic gas, and volatile organometallic compounds have been used to overcome the above problems. As a representative method, when the concentration of contaminants is low to ppb, clean There is a method of removing contaminants using a chemical filter installed in a room.

On the other hand, activated carbon and impregnated activated carbon, which are mainly used to remove contaminants such as acid gas and basic gas among the substances contained in the harmful gas, have a problem of secondary pollution in which dust is generated by impact and abrasion. The adsorption reaction is based on physical bonding rather than chemical bonding between activated carbon and the gas to be treated. When the activated carbon and gas are weakly bound, the high concentration of gas flows into the activated carbon-filled chemical filter. Gas is adsorbed into the gas, but when a low concentration or general air is introduced, the gas concentration in the activated carbon pores becomes higher than the gas concentration of the incoming air, so that the gas adsorbed in the activated carbon pores is degassed and is rather contaminated in the air passing through the chemical filter. There is a problem of increasing the concentration.

Here, the impregnated activated carbon is obtained by impregnating acidic and alkaline chemicals such as KOH, KMnO ₄ , H ₃ PO ₄ on activated carbon, or Fe (NO ₃ ) ₂ , Cu (NO ₃ ) ₂ , Mn (NO ₃ ), and the like. It means that metal compounds such as Fe ₂ O ₃ , CuO, MnO ₂ are deposited in the pores of activated carbon by impregnating metal salts and then calcining at a temperature of 300 ° C. or higher. For example, after dissolving a certain amount of KOH in distilled water, the solution Is adsorbed into the pores of activated carbon to absorb the solution, the activated carbon absorbed by the solution is dried, distilled water is evaporated to leave only KOH in the pores of the activated carbon, and thus impregnated activated carbon is prepared. It is called KOH impregnated activated carbon.

In particular, in the case of impregnated activated carbon impregnated with acid and alkali, harmful gases are removed by acid-base neutralization reactions, and according to the acid-base neutralization reactions, ions of H ⁺ and OH ^- have a certain amount of moisture to be active. However, if the dry air is continuously supplied to the impregnated activated carbon, there is a problem that the activity of the impregnated activated carbon is rapidly reduced by evaporation of moisture in the activated carbon, as well as acid and alkali between the impregnated active component and the pollutant. As the salt is generated in the pores and the surface of the activated carbon by the neutralization reaction, the performance of the filter decreases and the pressure loss increases as the reaction time increases.

Recently, in order to overcome problems such as deterioration of adsorption performance caused by the impregnated activated carbon, dust generation and pressure loss due to abrasion, chemical filters using ion exchange resins and activated carbon fibers, which are small particles, have been proposed. .

As an example, Korean Patent No. 0464816 discloses a chemical filter manufactured in the form of a curved chemical structure using an ion exchange resin, and the chemical filter using the ion exchange resin is chemically treated to allow ion exchange with a polar gas. A cation exchange resin or an anion exchange resin can be attached to the metal mesh to secure sufficient gas flow through continuous pores, thereby reducing the pressure loss and increasing the removal efficiency. Korean Patent No. 0488410 can remove basic gas. A first adsorption layer made of impregnated activated carbon having an acid substance selected from phosphoric acid or sulfuric acid, a second adsorption layer made of impregnated activated carbon having KI, which is a basic substance capable of removing acid gas, and the first adsorption layer. One or more cation or anion exchange resins between the adsorption layer and the second adsorption layer Which has the chemical filter is disclosed configured including an ion-exchange resin net body.

However, the chemical filter using the ion exchange resin has to be uniformly distributed in the metal mesh as well as the adsorption performance of the ion exchange resin itself in order to have excellent harmful gas removal efficiency, but the thickness of the support filling the ion exchange resin Since it is very thin in the range of several millimeters (mm), it is difficult to manufacture a chemical filter using an ion exchange resin.

In addition, another problem of the chemical filter using the ion exchange resin is an adhesive such as polyvinyl acetate (PVA), ethyl vinyl acetate (EVA), urethane, polypropylene, polyethylene, urethane, etc. to attach the ion exchange resin to the support. As the adhesive is coated on the ion exchange resin, the adhesive blocks the contact between the ion exchange resin and the noxious gas, adheres the ion exchange resin to the support, or attaches the ion exchange resin to the filter case. Since the adhesive used for fixing is made of an organometallic compound, there is a problem in that volatile gas components are discharged from the adhesive according to the use of the adhesive.

In addition, in the chemical filter using the ion exchange resin, if the ball-type ion exchange resin is not uniformly distributed in the metal mesh, the inflow air flows toward the relatively less filled ion exchange resin, so that the adsorption of the ion exchange resin is carried out. A problem may occur that the performance is sharply reduced, the amount of the adsorbent that can adsorb the harmful gas is desorbed from the support by vibration or physical shock during transport and installation of the filter using the ion exchange resin, As a result, the flow of the inflow gas to the part from which the adsorbent is detached increases the harmful gas removal efficiency of the chemical filter using the ion exchange resin.

In addition, the adsorbent filled in the above-mentioned chemical filter vibrates the filter in accordance with the flow of air, and the adsorbent is in contact with the metal mesh to lose a part of the adsorbent, thereby making it difficult to remove the contaminants flowing to the part where the adsorbent is lost. There is a problem.

In addition, when the adsorbent filled in the chemical filter is distributed to be concentrated in one direction of the chemical filter according to the gravity and the filling method, there is a problem in that the adsorbent rarely removes contaminants passing through the filled part.

Therefore, in order to overcome the breakage of the adsorbent due to the contact between the adsorbent and the metal mesh, a nonwoven fabric or an ion exchange nonwoven fabric may be installed between the adsorbent and the mesh filled in the chemical filter, but in this case, the breakage of the adsorbent may be partially prevented. There is, but the effect is insignificant, there is a problem that the pressure drop occurs by preventing the flow of air containing contaminants by the nonwoven fabric installed.

The present invention prevents the adsorbent for the chemical filter provided in the chemical filter from being damaged while contacting the metal mesh of the chemical filter, and when the adsorbent is filled in the chemical filter, the adsorbent is uniformly distributed in the chemical filter, and the chemical filter There is a problem to be solved in order to prevent the phenomenon that the adsorbent is concentrated and distributed to one side of the chemical filter during the use of.

In addition, the present invention is to solve the problem to reduce the pressure drop of air containing contaminants passing through the chemical filter by changing the pore shape of the porous metal mesh constituting the chemical filter.

In addition, the present invention has a problem to solve the problem to shorten the filling time by opening the front of the chemical filter to fill the adsorbent when replacing the filler of the chemical filter.

The present invention was derived to solve the above-described problems, and when the chemical filter is used, both walls of the adsorbent filled in the chemical filter in order to prevent the adsorbent from contacting and destroying the metal mesh or the mesh net by vibration of the chemical filter or the like. A soft mesh is provided, and at least one support member perpendicular to the length direction of the soft mesh of the chemical filter is provided to prevent the adsorbent from being concentrated to one side of the chemical filter, and the porous metal mesh constituting the chemical filter. The air gap is formed into a hexagonal shape of square or honeycomb to reduce the pressure drop.

In addition, the present invention can be configured to open the front of the chemical filter when filling the chemical filter with the adsorbent, it is possible to shorten the filling time.

The present invention has an effect that the soft mesh is provided on both walls of the adsorbent filled in the chemical filter to prevent the adsorbent from contacting and destroying the metal mesh or the mesh net by vibration of the chemical filter when the chemical filter is used.

In addition, the present invention is provided with at least one support member perpendicular to the longitudinal direction of the soft filter of the chemical filter, preferably the chemical filter in the space filled with the adsorbent provided in the chemical filter so that the adsorbent is concentrated to one side of the chemical filter. There is an effect that can prevent the distribution.

In addition, the present invention forms a pore shape of the porous metal mesh constituting the chemical filter in the form of a square or honeycomb hexagon to increase the area through which contaminants can pass than the open area of the conventional circular perforation method, thereby reducing the pressure drop. Has the effect of reducing

In addition, the present invention is configured to open the front of the chemical filter, there is an effect that can be easily filled with the adsorbent for a short time by opening the front of the chemical filter.

In one aspect, the present invention is an adsorbent for chemical filters; At least two soft nets provided on the left and right sides of the chemical filter adsorbent to prevent the chemical filter adsorbent from being crushed in contact with the mesh network; A mesh net connected to the outside of the soft net to prevent the adsorbent powder for the chemical filter from being separated out; A porous metal mesh connected to the outside of each mesh network to support the mesh network; And it provides a chemical filter comprising a frame for fixing the adsorbent, soft mesh, mesh network and porous metal mesh.

In another aspect, the invention provides a case for providing a space for the chemical filter is mounted therein; At least one guide part formed to have a predetermined slope to correspond to each other on an inner wall surface of the case and the other inner wall surface opposite to the chemical filter so as to be accommodated in the case; And a fixing member connected to end portions of the guide parts formed on both inner surfaces of the case and connected to cross the side of the case to fix the chemical filter stored in the guide part.

The adsorbent according to the present invention, preferably the chemical filter adsorbent, is used in general industrial plants such as gaseous harmful gases, petrochemicals, steelmaking, steelmaking, power plants, etc. generated during manufacturing processes of semiconductors, precision electronic components, pharmaceuticals, and food manufacturing. It is to be applied to the chemical filter used to remove the harmful gas in the gaseous phase and the gaseous harmful gas flowing into the air conditioning system and air purifier in various buildings or industrial fields, and is commonly used in the art for this purpose. Any adsorbent, preferably an adsorbent consisting of activated carbon, impregnated activated carbon, zeolite, a metal compound or a mixture thereof, corresponds to the adsorbent of the present invention.

Here, the form of the chemical filter adsorbent is not particularly limited, such as a granular, ball, pellet or tablet form, but there is no wear of the adsorbent surface, increasing the effective contact area with harmful gases It is preferable that the tablet is formed in the form of a tablet capable of improving the adsorption performance, and the size of the tablet is preferably in the form of a tablet having a particle diameter of 2 to 8 mm, preferably a particle size of about 3 to 5 mm.

The soft net according to the present invention provides a place where a chemical filter adsorbent is filled, and at the same time, the adsorbent is crushed by vibration and / or flow rate, or the like, and is crushed in contact with the mesh network by vibration and / or flow rate, and the like to generate powder. In order to prevent this, any soft material commonly used in the art for this purpose, such as sponge, cloth, vinyl or plastic, and particularly soft plastic, may be used. More preferably, a sponge having 10 to 80 PPI (Pores per inch), a mesh net cloth, a mesh net having 8 to 40 mesh, or the like may be used.

Here, at least one support member is provided between the pair of soft nets providing a place where the adsorbent is filled, and is installed perpendicularly to the longitudinal direction of the soft net to support the adsorbents filled between the soft nets. By gravity or the like, it is possible to prevent the adsorbent from being distributed so as to be concentrated in one side of the chemical filter, that is, in one direction.

At this time, the support member may be used as long as it is a support member that is commonly used in the art for the above-mentioned purposes, but it is preferable to use a support member having a plate shape extending in the longitudinal direction.

The mesh network according to the present invention is connected to the outside of the soft net to prevent the chemical filter adsorbent or the adsorbent powder from escaping to the outside, and is particularly limited as long as it is a mesh net commonly used in the art for this purpose. Although not preferably, it is preferable to use a mesh network composed of 8 to 40 mesh.

Metal mesh, in particular porous metal mesh according to the present invention is connected to the outside of the mesh network to support the mesh at the same time to provide the appearance of the chemical filter, for this purpose, a conventional porous metal mesh in the art Any ramen may be used, but it is preferable to have a plate shape, a rectangular shape in particular, and a shape in which a plurality of voids are perforated therein, and the material may be plastic, reinforced paper, metal, or the like. However, in view of durability and corrosion, it is preferable to use a metal such as aluminum or SUS.

At this time, the plurality of pores provided in the porous metal mesh is not particularly limited in form, but perforated so that a plurality of hexagonal shapes of the square or honeycomb form at regular intervals for easy movement of air containing contaminants. It is good to be. In addition, the porous metal mesh according to the present invention is filled with the adsorbent by opening the porous metal mesh when the adsorbent is filled in the chemical filter.

The frame according to the present invention is to provide an appearance of the chemical filter by fastening the soft net, mesh net and metal net which are sequentially connected to the left and right sides of the adsorption layer, preferably the chemical filter adsorption layer. Any frame may be used as long as it is commonly used in the art for this purpose, but preferably, a plate-shaped frame having a size corresponding to the thickness of the chemical filter is connected to the top / bottom / left / right of the chemical filter. After installation, the edge of the metal mesh is bent to contact the frame at each side interface of the chemical filter, and then one side of the frame and the metal mesh is fixed by a separate fixing means such as screws or nails. .

Therefore, when the chemical filter according to the present invention removes the fixing means for connecting and fixing the metal mesh and the frame to each other, the entire metal mesh is separated from the chemical filter and opened to absorb the adsorbent, preferably for the chemical filter. Not only can the adsorbent be replaced quickly and easily, but it is also possible to ensure that the adsorbent replaced is evenly distributed throughout the chemical filter upon replacement of the adsorbent.

On the other hand, the chemical filter according to the present invention having the above-described configuration is mounted on a chemical filter device that can accommodate a plurality of chemical filters and then installed in a moving path through which air containing contaminants flows to a semiconductor manufacturing process or a precision product or Pollutants emitted from the electronics manufacturing process, for example, acidic gases such as F, Cl ₂ , HCl, NOx, SOx, H ₂ S, O ₃ , organic acids, basic gases such as NH ₃ and amines present in the gas phase; Remove volatile organometallic compounds (VOCs).

The chemical filter device according to the present invention having such an object includes a case providing a space for mounting the chemical filter therein; At least one guide part formed to have a predetermined slope to correspond to each other on an inner wall surface of the case and the other inner wall surface opposite to the chemical filter so as to be accommodated in the case; It is composed of a fixing member connected to be installed across the side of the case so as to be connected to the end of the guide portion formed on both inner surfaces of the case to fix the chemical filter stored in the guide portion.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. However, the following description is only for describing the present invention in detail and does not limit the scope of the present invention by the following description.

1 is a perspective view of a chemical filter according to the present invention, Figure 2 is a block diagram showing the configuration of the chemical filter according to the present invention, Figure 3 is a side cross-sectional view of the chemical filter according to the present invention, Figure 4 is a present invention 5 is a block diagram showing the configuration of the metal mesh of the chemical filter according to the present invention, Figure 6 is a block diagram showing the configuration of the case is mounted with a chemical filter according to the present invention, Figure 6 is a block diagram showing the inside of the case is mounted with a chemical filter according to the present invention 7 is a view illustrating a cross section of a case in which a chemical filter according to the present invention is mounted.

As shown in FIGS. 1 to 7, the chemical filter 2 according to the present invention is provided inside the frame 4 and the frame 4 constituting the external appearance of the chemical filter having a quadrangular shape and filled with an adsorbent. It consists of the adsorption layer support body 16 which becomes.

Here, the material of the frame 2 and the adsorption layer support 16, etc. constituting the chemical filter 2 may be used as long as it is a conventional material in the art applied to the chemical filter 2, but is preferable. Preferably, a material having good corrosion resistance against acid gas or the like contained in the target gas to be treated, preferably, non-ferrous metal or metal, for example, aluminum or SUS.

On the other hand, the frame 4 according to the present invention constitutes the external appearance of the chemical filter 2, the chemical filter 2 is configured to have a rectangular shape as a whole, so that the decomposition and assembly of the chemical filter 2 to facilitate Frames 4 that are conventional in the art are used.

Specifically, the frame 4 according to the present invention is a soft net 10 which is sequentially connected to the left / right around the adsorption layer 14, preferably a chemical filter adsorption layer 14 filled with the adsorbent (10). ), The mesh net 8 and the metal mesh 6 are fastened to provide an appearance of the chemical filter 2, more specifically, a plate-shaped frame 4 having a size corresponding to the thickness of the chemical filter 2. To the top / bottom / left / right side of the chemical filter 2, bend the edges of the metal mesh 6 into contact with the frame 4 at each side boundary of the chemical filter 2, and then the frame 4 ) And one side of the metal mesh 6 is fixed by a separate fixing means 18, for example, fixing means 18 such as screws and nails.

The chemical filter 2 according to the present invention having such a configuration, when the fixing means 18 for connecting and fixing the metal mesh 6 and the frame 4 with each other, is removed from the chemical filter 2, the metal By opening the entire net 6, the adsorbent filled in the chemical filter 2, preferably the adsorbent for the chemical filter, can be easily replaced, and the adsorbent that is replaced and filled when the adsorbent is replaced is replaced by the chemical filter 2 It can be distributed evenly throughout.

Adsorption layer support 16 according to the present invention is to pass the target gas to be treated to remove the material to be treated, the place where the chemical filter adsorbent can be filled in the adsorption layer support (16). In order to provide a space by installing a pair so as to space the mesh net (8) having a diameter smaller than the size of the adsorbent at regular intervals to secure space, the adsorbent and the mesh net (8) filled in the inside of the secured space ) Is connected to each other and the soft net 10 is connected as a buffer for preventing the adsorbent from being crushed, and the adsorbent for chemical filter is filled in the space where the soft net 10 is connected to form the adsorption layer 14 The porous metal mesh 6 is connected to the outer surface of the mesh net 8 to support the mesh net 8.

Thus, in the form of the adsorption layer support 16 having the above-described configuration, the soft mesh 10, the mesh network 8, and the metal mesh 6 are sequentially formed on both sides of the adsorption layer 14 filled with the adsorbent. It is constructed by connecting automatically.

Therefore, the chemical filter 2 according to the present invention in more detail, the chemical filter 2 is a chemical filter adsorbent; At least two soft nets (10) provided on the left and right sides of the chemical filter adsorbent to prevent the chemical filter adsorbent from being crushed in contact with the mesh net (8); A mesh net 8 connected to the outside of the soft net 10 to prevent the adsorbent powder for the chemical filter from being separated out; A porous metal mesh 6 connected to the outside of each mesh net 8 to support the mesh net 8; And a frame 4 for fixing the adsorbent, the soft net 10, the mesh net 8 and the porous metal net 6.

Here, the soft net 10 according to the present invention is to provide a place where the adsorbent for the chemical filter is filled, and at the same time to prevent the adsorbent from being crushed in contact with the mesh net (8), it is conventional in the art for this purpose As long as the soft net 10 to be used as may be used.

In addition, at least one support member 12 is installed between the pair of soft nets 10 that provide a place where the adsorbent is filled in a vertical direction with respect to the longitudinal direction of the soft net 10 is provided with the soft nets It is possible to prevent the concentration of the adsorbent from being concentrated in one side, that is, in one direction, of the chemical filter 2 by gravity or the like by supporting the adsorbent filled between the 10 to form the adsorption layer 14.

At this time, the support member 12 is not particularly limited as long as it is a support member 12 commonly used in the art for the above-mentioned purposes, but preferably has a plate-like form extended in the longitudinal direction.

The mesh net 8 according to the present invention is connected to the outside of the soft net 10 so as to prevent the chemical filter adsorbent or the crushed adsorbent powder from being separated to the outside, which is conventional in the art. If the mesh net 8 to be used as is not particularly limited, it is preferable to use a mesh net 8 consisting of 8 to 40 mesh.

The porous metal mesh 6 according to the present invention is connected to the outside of the mesh net 8 to support the mesh net 8 and at the same time provide the appearance of the chemical filter 2, for this purpose. Any conventional porous metal mesh 6 may be used, but it is preferable to have a plate shape, a rectangular plate shape in particular, and a shape in which a plurality of pores are perforated therein. It is preferable to use a metal such as aluminum or SUS.

At this time, the plurality of pores provided in the porous metal mesh 6 is not particularly limited in shape, but in order to prevent a pressure drop through easy movement of air containing contaminants, a rectangular or hexagonal shape, specifically Hexagonal honeycomb shape is preferably perforated to be provided with a plurality of intervals.

On the other hand, the chemical filter 2 according to the present invention having the above-described configuration may be installed and used alone in the movement path of the target gas to be treated, but a plurality of the filter filter is installed to be accommodated in the chemical filter device in the form of a tray if necessary. Pollutants, which are installed in the air flow paths containing contaminants and are discharged from semiconductor manufacturing processes, precision products or electronics manufacturing processes, for example, F, Cl ₂ , HCl, NOx, SOx, H ₂ S, O ₃ , acidic gases such as organic acids, NH ₃ present in the gas phase, basic gases such as amines, volatile organometallic compounds (VOCs) and the like are removed.

The chemical filter device according to the present invention includes a case 20 which provides a space for mounting the chemical filter 2 therein; At least one guide part 22 formed to have a constant slope so as to correspond to each other inner wall surface of the case 20 and the other inner wall surface opposite thereto so that the chemical filter 2 can be accommodated inside the case 20. ); It is connected to the end of the guide portion 22 formed on both inner surfaces of the case 20 and connected to cross the side of the case 20 to fix the chemical filter 2 housed in the guide portion 22. It consists of a fixing member 24 that is.

Here, when a plurality of the guide portion 22 is provided, the jig so that the other guide portion 22 extending in the longitudinal direction from one end of one guide portion 22 extending in the longitudinal direction has a predetermined inclination It is formed in the shape, the end of the other guide portion 22 is connected to the one guide portion 22 to the other guide portion 22 to be formed in a jig shape to have a certain inclination, so that a plurality of guide portions 22 The guide portion 22 may be configured such that the inner wall surface of the case 20 having the inner side is formed in a zigzag shape as a whole.

Hereinafter, the present invention will be described in detail through examples. However, the following examples are only for illustrating the present invention in detail and are not intended to limit the scope of the present invention by these examples.

<Example 1>

4 g of potassium hydroxide [KOH (95.0%), Samchun Chemicals, South Korea] was dissolved in 100 g of distilled water, and then uniformly mixed with a stirrer for about 30 minutes to prepare a KOH solution.

Then, 50 g of palm-based activated carbon [SGF-100, Samchully, South Korea] having a pore size of 20 mm or less was added to KOH solution and left at room temperature for 24 hours.

Then, to remove impurities of the activated carbon impregnated with K + ions, the palm-based activated carbon was washed with distilled water and dried at 120 ° C. for 24 hours.

Then, to activate the palm-based activated carbon, the palm-based activated carbon was purged with nitrogen for about 3 hours to prepare an adsorbent for the final chemical filter.

<Example 2>

Sponge having 25 PPI as a soft net [25PPI, FOAMEX, USA], mesh net having 16 mesh [SUS 16mesh, Shinil Geum Network, Korea] And 300mm X 300mm X 30mm, porous metal meshes made of a plurality of circles (diameter 4mm, 10mm spacing 10mm) with a 22.68% open area are sequentially stacked and the outer 300mm X A chemical filter was manufactured by connecting and installing a square SUS frame having a size of 300 mm × 30 mm.

Here, the packing density of the adsorbent filled in the chemical filter was 0.47.

Table 1 shows the configuration of the chemical filter.

<Example 3>

The same method as in Example 2 was used, but instead of the porous metal mesh having a large number of circular holes with an open area of 22.68%, a porous metal mesh having a large number of circular perforated areas with an open area of 34.43% was used.

Table 1 shows the configuration of the chemical filter.

<Example 4>

In the same manner as in Example 2, but instead of a porous metal mesh having a size of 300 mm X 300 mm X 30 mm and having 22.68% of the open area, a plurality of circular perforated 552 mm X 487 mm X 30 mm and having a plurality of 40.14% of the open area A porous metal mesh made of a square (10 mm wide, 10 mm long, and 5 mm spacing) was used, and two support members (horizontal) perpendicular to the longitudinal direction of the soft net were placed inside a pair of soft nets. 550 mm wide, 30 mm long, and 2 mm thick).

Table 1 shows the configuration of the chemical filter.

Comparative Example 1

Based on the adsorbent prepared according to Example 1, two pairs were used as non-woven fabrics [CX-2, Samsung non-woven fabrics, Republic of Korea] and 300 mm x 300 mm x 30 mm in size, with 22.68% open area. Four circular perforated porous metal meshes (diameter 4mm, interval between the center 10mm) were manufactured and laminated sequentially, and the outside was connected to the square SUS frame having a size of 300mm X 300mm X 30mm to install a chemical filter.

Here, the packing density of the adsorbent filled in the chemical filter was 0.47.

Table 1 shows the configuration of the chemical filter.

Comparative Example 2

In the same manner as in Comparative Example 1, but instead of the nonwoven fabric [CX-2, Samsung nonwoven fabric, South Korea] a mesh mesh having a 16 mesh [SUS 16mesh, Shinilum gold network, South Korea] was used.

Table 1 shows the configuration of the chemical filter.

Comparative Example 3

In the same manner as in Comparative Example 1, but instead of the nonwoven fabric [CX-2, Samsung nonwoven fabric, South Korea] using a mesh mesh having 16 mesh [SUS 16mesh, Shinilum gold network, South Korea], 300mm X 300mm X 30mm size Instead of the porous metal mesh (4mm in diameter, 10mm spacing 10mm) with 22.68% open area, and has a size of 552mm x 487mm x 30mm and multiple circular holes with 22.68% open area. Porous metal mesh (diameter 4 mm, spacing 10 mm) was used.

In addition, two support members (diameter 4 mm, intervals 10 mm between centroids) were provided inside the mesh net having the 16 mesh in parallel with the longitudinal direction (vertical).

Table 1 shows the configuration of the chemical filter.

Chemical filter composition Example 2 Example 3 Example 4 Comparative Example 1 Comparative Example 2 Comparative Example 3 Packing density 0.47 0.47 0.47 0.47 0.47 0.47 Non-woven - - - Model CX-2 - - Mesh SUS 16 mesh SUS 16 mesh SUS 16 mesh SUS 16 mesh SUS 16 mesh SUS 16 mesh Soft net Sponge 25PPI Sponge 25PPI Sponge 25PPI - - - Support member - - 2 rows - - 2 columns Open Area 22.68% (Hole: ○) 34.43% (Perforation: ○) 40.14% (Hole: □) 22.68% (Hole: ○) 34.43% (Perforation: ○) 22.68% (Hole: ○) Size (HxWxDmm) 300x300x30 300x300x30 552x487x30 300x300x30 300x300x30 552x487x30

<Example 5>

Eight chemical filters prepared according to Example 4 were mounted on a tray 8EA / Moule [Cocat, South Korea] having a size of 600 mm × 600 mm × 500 mm to prepare a case equipped with a chemical filter.

Comparative Example 4

Eight chemical filters prepared according to Comparative Example 3 were mounted on a Tray 8EA / Moule [Cocat, South Korea] having a size of 600 mm × 600 mm × 500 mm to prepare a case equipped with a chemical filter.

<Experiment>

Differential pressure test

First, a rectangular test apparatus having a height of 600 mm, a width of 600 mm, and a length of 1,000 mm made of SUS 304 was manufactured, and then alternately installed chemical filters according to Examples 1 to 4 and Comparative Examples 1 to 3 therein. The experiment was carried out by separately installing a case equipped with a chemical filter according to Example 5 or Comparative Example 4.

Then, after installing a blower [KC-70, Hanytech, South Korea] with an air flow rate of 70 Nm ³ / min in front of the test apparatus, it was tested while adjusting the air flow rate from 0 to 70 Nm ³ / min. At this time, the dynamic pressure for each flow rate was measured at the front end of the chemical filter, the differential pressure of the filter was measured at the front end and the rear end of the position where the chemical filter is mounted.

Here, the dynamic pressure analyzer was used to measure the pressure by using a pitot tube [H-11, Dwyer, USA] and Inclined Manometer [MM80, Dwyer, USA]. USA].

As a result, the differential pressure performance of the Example and the comparative example was shown to FIGS.

As shown in Figure 8, it can be seen that the filter differential pressure performance of the present Example 1 and Example 2 was high compared to Comparative Example 1 and Comparative Example 2 composed of a conventional chemical filter.

In addition, as shown in FIG. 9, the filter differential pressure performance of Example 4 of the present invention, in which the open area is increased by using a rectangular metal perforated mesh, compared to Comparative Example 3 using a circularly perforated metal mesh, is high. It was revealed.

In addition, as shown in Figure 10, Example 5 represented a differential pressure of 12mmAq, Comparative Example 4 represented a differential pressure of 14mmAq at 2.5m / s, the flow rate used in the actual semiconductor field, Example 5 in all flow ranges Showed better differential pressure performance than Comparative Example 4.

1 is a perspective view of a chemical filter according to the present invention,

2 is a block diagram showing a configuration of a chemical filter according to the present invention;

3 is a side cross-sectional view of the chemical filter according to the present invention;

4 is a block diagram showing a metal mesh of the chemical filter according to the present invention,

5 is a configuration diagram showing the configuration of a case equipped with a chemical filter according to the present invention,

Figure 6 is a block diagram showing the inside of the case in which the chemical filter according to the present invention,

7 is a view showing a cross section of the case is mounted with a chemical filter according to the present invention,

8 is a view showing the differential pressure performance results of Examples 2 and 3 and Comparative Example 1 and Comparative Example 2 according to the present invention,

9 is a view showing the differential pressure performance of Example 4 and Comparative Example 3 according to the present invention,

10 is a view showing the differential pressure performance of Example 5 and Comparative Example 4 according to the present invention,

<Description of the symbols for the main parts of the drawings>

2: chemical filter 4: frame

6: metal mesh 8: mesh mesh

10: soft mesh 12: support member

14 adsorption layer 16 adsorption layer support

18: fixing means 20: case

22: guide portion 24: fixing member

Claims (8)

Adsorbents for chemical filters; At least two soft nets provided on the left and right sides of the chemical filter adsorbent to prevent the chemical filter adsorbent from being crushed in contact with the mesh network; At least one support member connected vertically to the longitudinal direction of the soft net between the two or more soft nets; A mesh net connected to the outside of the soft net to prevent the adsorbent powder for the chemical filter from being separated out; A porous metal mesh connected to the outside of each mesh network to support the mesh network; And a frame fixing the adsorbent, the soft net, the mesh net, and the porous metal net. delete The method of claim 1, Chemical filter, characterized in that the soft net is a sponge, cloth, vinyl or plastic. The method of claim 1, Chemical filter, characterized in that the porous of the porous metal mesh is a rectangular or hexagonal hole. The method of claim 1, The chemical filter adsorbent is activated carbon, impregnated activated carbon, zeolite, metal compound or a mixture thereof. The method of claim 1, Chemical filter to easily replace the adsorbent for the chemical filter by separating the frame and the metal mesh constituting the chemical filter from each other to fill the adsorbent provided in the chemical filter. A chemical filter device provided with the chemical filter according to any one of claims 1 and 3. The method of claim 7, wherein A case in which the chemical filter device provides a space for mounting the chemical filter therein; At least one guide part formed to have a predetermined slope to correspond to each other on an inner wall surface of the case and the other inner wall surface opposite to the chemical filter so as to be accommodated in the case; And a fixing member connected to end portions of the guide parts formed on both inner surfaces of the case, the fixing members being connected across the side of the case to fix the chemical filter stored in the guide part.

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