KR20080040331A - A chemical filter and a method for manufacturing the same - Google Patents

A chemical filter and a method for manufacturing the same Download PDF

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Publication number
KR20080040331A
KR20080040331A KR1020060108143A KR20060108143A KR20080040331A KR 20080040331 A KR20080040331 A KR 20080040331A KR 1020060108143 A KR1020060108143 A KR 1020060108143A KR 20060108143 A KR20060108143 A KR 20060108143A KR 20080040331 A KR20080040331 A KR 20080040331A
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South Korea
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frame
chemical filter
filtration member
manufacturing
filter member
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KR1020060108143A
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Korean (ko)
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오현명
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동부일렉트로닉스 주식회사
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Priority to KR1020060108143A priority Critical patent/KR20080040331A/en
Publication of KR20080040331A publication Critical patent/KR20080040331A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2027—Metallic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2068—Other inorganic materials, e.g. ceramics

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Filtering Materials (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

A chemical filter is provided to increase filtration performance by manufacturing an adsorption filter member from porous metal or porous ceramic and installing the adsorption filter member in a triple structure, and prevent the generation of by-products due to an adhesive by installing a fixing unit on a frame, thereby fixing the adsorption filter member, and a method for manufacturing the chemical filter is provided. A chemical filter(100) comprises: a triple adsorption filter member(120) including an inlet part(122), a central part(124) and an outlet part(126); and a frame installed on the edge of the adsorption filter member through a fixing unit. The adsorption filter member is made of porous metal with a bent waveform shape. The adsorption filter member is made of porous ceramic with a bent waveform shape. The fixing unit of the frame includes coupling projections which are arranged on corresponding faces of an upper frame and a lower frame of the frame in a way that the coupling projections engage with one another, and which are coupled with one another by pressing. A method for manufacturing a chemical filter comprises the steps of: preparing a frame which includes an upper frame(112) and a lower frame(114) that are fixed to each other by means of coupling projections(112a,114a) respectively formed on the upper and lower frames; stacking an adsorption filter member in a triple structure of an inlet part, a central part and an outlet part; and fixing the triple adsorption filter member by the frame in a state that the adsorption member is interposed between the upper and lower frames.

Description

케미컬 필터 및 제조방법{A CHEMICAL FILTER AND A METHOD FOR MANUFACTURING THE SAME}Chemical filter and manufacturing method {A CHEMICAL FILTER AND A METHOD FOR MANUFACTURING THE SAME}

도 1은 종래의 케미컬 필터를 보여주는 단면도이고,1 is a cross-sectional view showing a conventional chemical filter,

도 2는 본 발명의 실시예에 따른 케미컬 필터의 분리 사시도이고,2 is an exploded perspective view of a chemical filter according to an embodiment of the present invention;

도 3은 본 발명의 실시예에 따른 케미컬 필터의 단면도이고,3 is a cross-sectional view of a chemical filter according to an embodiment of the present invention,

도 4는 본 발명의 케미컬 필터의 제조방법에 따른 흐름도이다.4 is a flow chart according to the manufacturing method of the chemical filter of the present invention.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

100 : 케미컬 필터 110 : 프레임100: chemical filter 110: frame

112 : 상부프레임 114 : 하부프레임112: upper frame 114: lower frame

112a, 114a : 형합돌기 116 : 메쉬망112a, 114a: shaping protrusion 116: mesh network

120 : 흡착여과부재 120: adsorption filtration member

본 발명은 케미컬 필터 및 제조방법에 관한 것으로서, 보다 상세하게는 반도체 제조공장 등의 클린 룸에서 사용되며 오존, 질소 화합물 및 황산화물과 같은 케미컬 오염물질을 제거할 수 있는 케미컬 필터 및 제조방법에 관한 것이다.The present invention relates to a chemical filter and a manufacturing method, and more particularly, to a chemical filter and a manufacturing method used in a clean room such as a semiconductor manufacturing plant and capable of removing chemical contaminants such as ozone, nitrogen compounds and sulfur oxides. will be.

반도체 장치와 같은 정밀 제품은 일반적으로 규정 크기 이상의 오염 물질들이 제거된 청정실 내에서 제조된다. 특히, 반도체 제조를 위한 청정실의 오염 정도는 반도체 제조 수율에 직결되는 중요한 요소이다. 더구나, 최근의 반도체 장치는 고집적화되고 있으며 상기 반도체 장치를 제조하기 위한 웨이퍼의 구경은 더욱 커지고 있다. 때문에, 크린룸 내의 미세한 오염 물질에 의해서도 반도체 장치에는 불량이 유발될 수 있어서 크린룸 내의 청정지수는 더욱 엄격히 관리되고 있다. 크린룸 내의 오염 물질은 미세 먼지와 같은 입자성 오염물들과 유해 가스와 같은 케미컬 오염물들을 포함한다.Precision products, such as semiconductor devices, are typically manufactured in clean rooms that are free of contaminants larger than specified sizes. In particular, the degree of contamination of the clean room for semiconductor manufacturing is an important factor directly related to the semiconductor manufacturing yield. Moreover, recent semiconductor devices have been highly integrated, and the diameter of the wafer for manufacturing the semiconductor device has become larger. Therefore, even a minute contaminant in the clean room may cause a defect in the semiconductor device, so that the clean index in the clean room is more strictly managed. Contaminants in cleanrooms include particulate contaminants such as fine dust and chemical contaminants such as noxious gases.

반도체 장치를 제조하는 청정실 내에서 발생하는 케미컬 오염물들은 케미컬 필터에 의해 제어한다. 케미컬 필터는 일반적으로 첨착 활성탄(impregnated activated carbon)을 필터 미디엄으로 사용하여 유해 가스를 포집하는 방식으로 상기 유해 가스를 제거한다. 첨착 활성탄은 기존의 활성탄 표면 및 세공 내벽에 금속 또는 특정한 금속염을 첨착시킨 것이다. 따라서, 첨착 활성탄은 상기 금속 또는 금속염에 의해 촉매적 기능 즉, 화학적 활성이 증가하고 특정 성분에 대한 선택적 흡착성이 증가된다. 첨착 활성탄을 필터 미디엄으로 사용하는 케미컬 필터는 크린룸 내에서 발생하는 케미컬 오염물들 중에서 오존, 암모니아를 비교적 잘 제거할 수 있다.Chemical contaminants generated in the clean room that manufactures semiconductor devices are controlled by chemical filters. Chemical filters generally use impregnated activated carbon as a filter medium to remove the harmful gases by trapping them. Impregnated activated carbon is an impregnated metal or a specific metal salt on the surface of the existing activated carbon and the inner wall of the pore. Therefore, the impregnated activated carbon has an increase in catalytic function, ie, chemical activity and selective adsorption to specific components, by the metal or metal salt. A chemical filter using impregnated activated carbon as a filter medium can relatively remove ozone and ammonia among chemical contaminants generated in a clean room.

도 1에서는 종래의 케미컬 필터를 보여주는 단면도로서, 전면과 후면에 메쉬망(12)을 포함하며 틀을 형성하는 프레임(10)과, 프레임(10)의 내부에 설치되어 가스상 불순물을 제거하는 흡착여과제(20)로 구성된다.1 is a cross-sectional view showing a conventional chemical filter, including a mesh 10 on the front and rear frame 10 and forming a frame, and the adsorption filter installed in the frame 10 to remove gaseous impurities It consists of the subject 20.

흡착여과제(20)는 파형이 반복되는 굴곡형 여과제로서, 섬유간 공극율을 가지는 섬유기지 즉, 부직포와 가스 흡착제, 그리고 철망으로 이루어져 있다.The adsorption filter 20 is a curved filter having a repeated wave, and is composed of a fiber base having a porosity between fibers, that is, a nonwoven fabric, a gas adsorbent, and a wire mesh.

그런데, 흡착여과제는 섬유간 두께가 수 mm 이상으로 매우 얇기 때문에 제조가 어려운 단점이 있으며, 더욱이 프레임에 흡착여과제를 고정함에 있어서 휘발성이 높은 에폭시 수지와 같은 접착제를 사용함으로써, 이 접착제로부터 다양한 유해가스가 부생성물로 생성되어 2차 오염원을 배출하게 되는 문제점이 있었다.  However, the adsorption filter has a disadvantage in that it is difficult to manufacture because the interfiber thickness is very thin, more than a few mm, and furthermore, by using an adhesive such as an epoxy resin having a high volatility in fixing the adsorption filter to the frame, There was a problem that harmful gas is generated as a by-product to discharge a secondary pollutant.

본 발명은 상기한 바와 같은 결점을 해소시키기 위하여 안출된 것으로서, 흡착여과부재를 다공성 금속 또는 다공성 세라믹으로 제작하고, 이 흡착여과부재를 3중으로 설치하여 여과 능력을 증대시킨 케미컬 필터 및 제조방법을 제공하는 것을 그 목적으로 한다.The present invention has been made in order to solve the above-mentioned drawbacks, and the adsorption filtration member is made of a porous metal or a porous ceramic, and the adsorption filtration member is installed in triplicate to provide a chemical filter and a manufacturing method to increase the filtration capacity. It is for that purpose.

또한, 본 발명의 다른 목적은, 흡착여과부재를 고정시킬 수 있도록 프레임에 고정수단을 설치함으로써, 종래에 접착제에 의하여 부생성물이 생성되는 것을 방지한 케미컬 필터 및 제조방법을 제공하는 것을 그 목적으로 한다.In addition, another object of the present invention is to provide a chemical filter and a manufacturing method that prevents the formation of by-products by the adhesive in the past by providing a fixing means to the frame to fix the adsorption filtration member. do.

상술한 목적을 달성하기 위한 본 발명은, 케미컬 필터에 있어서, 입구부와 중앙부 유출부로 이루어지는 3중의 흡착여과부재와, 흡착여과부재의 테두리에 고정수단을 통하여 설치되는 프레임을 포함하는 케미컬 필터를 제공한다. The present invention for achieving the above object, in the chemical filter, provides a chemical filter comprising a triple adsorption filtration member consisting of the inlet portion and the central outlet portion, and a frame installed on the rim of the adsorption filtration member through the fixing means. do.

또한, 본 발명은, 케미컬 필터 제조방법에 있어서, 상부프레임과 하부프레임을 포함하고 상부프레임과 하부프레임에 각각 형성된 형합돌기로 하여 서로 고정될 수 있는 프레임을 준비하는 단계와, 입구부와 중앙부 유출부의 3중으로 흡착여과부재를 적층하는 단계와, 3중의 흡착여과부재를 중앙에 포함하여 프레임으로 고정시키는 단계를 포함하는 케미컬 필터 제조방법을 제공한다.In addition, the present invention, in the method for manufacturing a chemical filter, comprising the steps of preparing a frame including a top frame and a lower frame and can be fixed to each other by a forming projection formed on each of the upper frame and the lower frame, the inlet and the central portion outflow It provides a chemical filter manufacturing method comprising the step of stacking the adsorption filtration member in the negative triple, and the step of fixing the adsorption filtration member in the center to the frame.

이하 첨부된 도면을 참조하여 본 발명의 바람직한 실시 예에 대하여 상세하게 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 발명의 실시예에 따른 케미컬 필터의 분리 사시도이고, 도 3은 본 발명의 실시예에 따른 케미컬 필터의 단면도이고, 도 4는 본 발명의 케미컬 필터의 제조방법에 따른 흐름도이다.Figure 2 is an exploded perspective view of the chemical filter according to an embodiment of the present invention, Figure 3 is a cross-sectional view of the chemical filter according to an embodiment of the present invention, Figure 4 is a flow chart according to the manufacturing method of the chemical filter of the present invention.

도 2 및 도 3에 도시된 케미컬 필터(100)는, 크게 프레임(110)과 흡착여과부재(120)로 구성되어 진다.The chemical filter 100 shown in FIGS. 2 and 3 is largely composed of a frame 110 and an adsorption filtration member 120.

여기서 프레임(110)은, 바람직하게 금속재로 사각의 틀 형상을 가지면서 결합이 가능한 상부프레임(112)과 하부프레임(114)으로 이루어지고, 이들 상부프레임(112)과 하부프레임(114)의 중앙에는 금속재의 메쉬망(116)이 포함된다.Here, the frame 110 is preferably made of a metal frame having a rectangular frame shape, which can be coupled to the upper frame 112 and the lower frame 114, and the center of the upper frame 112 and the lower frame 114 This includes the mesh network 116 made of metal.

또한, 본 발명의 특징에 따라 프레임(110)에는 고정수단이 설치되며, 이 고정수단은 상부프레임(112)과 하부프레임(114)의 마주하는 대응면 각각에 형합돌기(112a)(114a)가 돌출 형성되는 것이다. In addition, in accordance with a feature of the present invention, the fixing means is installed in the frame 110, and the fixing means has a fitting protrusion 112a and 114a on each of the corresponding surfaces of the upper frame 112 and the lower frame 114 facing each other. It is formed to protrude.

상부프레임(112) 상의 형합돌기(112a)에 대하여 맞물려서 형합이 가능하도록 하부프레임(114)의 형합돌기(114a)는 엇갈리게 배열을 이루게 된다.The fitting protrusions 114a of the lower frame 114 are staggered so as to be engaged with the fitting protrusions 112a on the upper frame 112.

이들 상부프레임(112)과 하부프레임(114)의 압착 고정은 별도의 지그(미도시)를 통하여 이루어질 수 있다.Pressing and fixing the upper frame 112 and the lower frame 114 may be made through a separate jig (not shown).

한편, 상부프레임(112)과 하부프레임(114)의 압착 고정시 테두리가 물려 고정되는 흡착여과부재(120)는, 전면에 배치되어 유해가스가 유입되는 입구부(122)와 후면에 배치되어 여관된 가스가 배출되는 유출부(126), 그리고 입구부(122)와 유출부(126)의 사이에 위치되어 유해가스에 대한 여과 능력을 배가시키는 중앙부(124)로 이루어지도록 3중으로 적층 설치된다.On the other hand, the adsorption filtration member 120 is fixed to the rim when the upper frame 112 and the lower frame 114 is fixed by crimping, is arranged on the front and inlet 122 and the rear inlet harmful gas is introduced in the inn The stacked gas is disposed in three layers so as to consist of an outlet portion 126 through which the gas is discharged, and a central portion 124 positioned between the inlet portion 122 and the outlet portion 126 to double the filtration capacity for harmful gases.

입구부(122)와 중앙부(124), 유출부(126)로 이루어지는 흡착여과부재(120)는 굴곡진 파형 형태로 이루어지며, 각 파형 형상이 맞물려 배치되는 것이 바람직하다.Adsorption filtration member 120 composed of the inlet portion 122, the central portion 124, the outlet portion 126 is formed in a curved waveform, it is preferable that the respective waveform shapes are arranged in engagement.

이러한 흡착여과부재(120)는 바람직하게 다공성 금속 또는 다공성 세락믹으로 이루어지는 구성을 가진다.The adsorption filtration member 120 preferably has a configuration made of a porous metal or porous ceramics.

이와 같이 구성된 본 발명에서 케미컬 필터의 제조방법을 설명하면 다음과 같다.Referring to the manufacturing method of the chemical filter in the present invention configured as described above are as follows.

도 4를 참고하면, 상부프레임과 하부프레임을 포함하고 상부프레임과 하부프레임에 각각 형성된 형합돌기로 하여 서로 분리 및 고정될 수 있는 프레임을 준비하는 단계(200)와, 입구부와 중앙부, 유출부의 3중으로 흡착여과부재를 적층하는 단계(210)와, 3중의 흡착여과부재를 중앙에 포함하여 프레임으로 고정시키는 단계(220)를 포함한다.Referring to FIG. 4, a step of preparing a frame including an upper frame and a lower frame and separated and fixed to each other by using a mold bump formed on each of the upper frame and the lower frame, the inlet, the center, and the outlet portion Stacking the adsorption filtration member in triplicate (210), and including a triple adsorption filtration member in the center to secure the frame 220 (220).

각 단계를 통하여 좀 더 자세히 제조방법을 설명하면, 먼저, 상부프레임(112)과 하부프레임(114)이 분리된 준비 상태에서 다공성 금속 또는 다공성 세라믹으로 이루어지는 굴곡진 파형 형태의 흡착여과부재(120)를 3중으로 밀착 중첩시 켜서 전면측으로부터 차례로 입구부(122)와 중앙부(124), 유출부(126)를 구성하게 된다.Referring to the manufacturing method in more detail through each step, first, the adsorption filtration member 120 in the form of a curved waveform made of porous metal or porous ceramic in a state in which the upper frame 112 and the lower frame 114 are separated from each other Is overlapped in triplicate to form the inlet portion 122, the central portion 124, the outlet portion 126 in order from the front side.

그리고 3중의 흡착여과부재(120) 일체를 하부프레임(114)의 상면에 안착시킨 후, 하부프레임(114)의 상부측에서 상부프레임(112)을 겹쳐지도록 밀착 압착시키게 된다. 이때, 하부프레임(114)의 형합돌기(114a)와 상부프레임(112)의 형합돌기(112a)가 서로 맞물리면서 형합 고정을 이루게 되며, 상부프레임(112)과 하부프레임(114)의 고정으로 그 사이에 위치되어 있는 흡착여과부재(120)의 테두리도 고정을 이루게 된다.Then, the triple adsorption filtration member 120 is seated on the upper surface of the lower frame 114, and then pressed closely to overlap the upper frame 112 on the upper side of the lower frame 114. At this time, the forming protrusion 114a of the lower frame 114 and the forming protrusion 112a of the upper frame 112 are engaged with each other to form a fixing fixing, and between the fixing of the upper frame 112 and the lower frame 114 therebetween. The edge of the adsorption filtration member 120 which is located at is also fixed.

이처럼 종래에 프레임과 흡착여과재의 결합이 접착제를 통하여 이루어졌던 것을 프레임 상의 고정수단으로 흡착여과부재의 고정이 이루어짐으로써, 본 발명에서는 접착제에 의한 부생성물이 생성을 방지할 수 있으며, 3중을 이루고 다공성 금속 또는 다공성 세라믹으로 이루어지는 흡착여과부재로 하여 유해가스에 대한 여과 능력의 증대를 가져왔다.In this way, by fixing the adsorption filtration member to the fixing means on the frame that the conventional bonding of the frame and the adsorption filter material is made through the adhesive, in the present invention, by-products by the adhesive can be prevented, and the triple The adsorption filtration member made of porous metal or porous ceramics has increased the filtration capacity for harmful gases.

이상에서 설명한 것은 본 발명에 따른 을 실시하기 위한 하나의 실시예에 불과한 것으로서, 본 발명은 상기한 실시예에 한정되지 않고, 이하의 특허청구범위에서 청구하는 바와 같이 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변경 실시가 가능한 범위까지 본 발명의 기술적 정신이 있다고 할 것이다. What has been described above is only one embodiment for practicing according to the present invention, and the present invention is not limited to the above-described embodiment, without departing from the gist of the present invention as claimed in the following claims. Anyone with ordinary knowledge in the field of the present invention will have the technical spirit of the present invention to the extent that various modifications can be made.

이상에서 설명한 바와 같이, 본 발명에 의한 케미컬 필터 및 제조방법은, 흡 착여과부재를 다공성 금속 또는 다공성 세라믹으로 제작하고, 이 흡착여과부재를 3중으로 설치하여 유해가스의 여과 능력을 증대시켰으며, 또한, 흡착여과부재를 고정시킬 수 있도록 프레임에 고정수단을 설치함으로써, 종래에 접착제에 의하여 부생성물이 생성되는 것을 방지하는 효과를 가지고 있다.As described above, in the chemical filter and the manufacturing method according to the present invention, the adsorption filtration member is made of a porous metal or a porous ceramic, and the adsorption filtration member is installed in triplicate to increase the filtration capacity of the harmful gas. In addition, by providing a fixing means to the frame to fix the adsorption filtration member, it has the effect of preventing the by-products generated by the adhesive in the prior art.

Claims (7)

케미컬 필터에 있어서,In the chemical filter, 입구부와 중앙부, 유출부로 이루어지는 3중의 흡착여과부재와,Triple adsorption filtration member which consists of an inlet part, a center part, and an outlet part, 상기 흡착여과부재의 테두리에 고정수단을 통하여 설치되는 프레임,Frame installed through the fixing means on the edge of the suction filtration member, 을 포함하는 케미컬 필터.Chemical filter comprising a. 제 1 항에 있어서,The method of claim 1, 상기 흡착여과부재는, 굴곡진 파형 형태의 다공성 금속으로 이루어지는 것을 특징으로 하는 케미컬 필터.The adsorption filtration member is a chemical filter, characterized in that made of a porous metal of the curved wave form. 제 1 항에 있어서,The method of claim 1, 상기 흡착여과부재는, 굴곡진 파형 형태의 다공성 세락믹으로 이루어지는 것을 특징으로 하는 케미컬 필터.The adsorption filtration member is a chemical filter, characterized in that made of porous ceramics of the curved wave form. 제 1 항에 있어서,The method of claim 1, 상기 프레임의 고정수단은,The fixing means of the frame, 상기 프레임을 구성하는 상부프레임과 하부프레임의 대응면 각각에 맞물림이 가능하도록 배열되어 압착으로 형합될 수 있는 형합돌기를 가지는 것을 특징으로 하는 케미컬 필터.And a mating protrusion which is arranged to be engaged with each of the corresponding surfaces of the upper frame and the lower frame constituting the frame so as to be joined by pressing. 케미컬 필터 제조방법에 있어서,In the chemical filter manufacturing method, 상부프레임과 하부프레임을 포함하고 상기 상부프레임과 하부프레임에 각각 형성된 형합돌기로 하여 서로 고정될 수 있는 프레임을 준비하는 단계와,Preparing a frame including an upper frame and a lower frame and can be fixed to each other by a forming projection formed in the upper frame and the lower frame, respectively; 입구부와 중앙부, 유출부의 3중으로 흡착여과부재를 적층하는 단계와,Stacking the adsorption filtration member into the inlet, the center, and the outlet in triplicates; 상기 3중의 흡착여과부재를 중앙에 포함하여 상기 프레임으로 고정시키는 단계,Including the triple adsorption filtration member in the center to fix the frame, 를 포함하는 케미컬 필터 제조방법.Chemical filter manufacturing method comprising a. 제 5 항에 있어서,The method of claim 5, wherein 상기 흡착여과부재는, 굴곡진 파형 형태의 다공성 금속으로 이루어지는 것을 특징으로 하는 케미컬 필터 제조방법.The adsorption filtration member is a chemical filter manufacturing method, characterized in that made of a porous metal in the form of a curved wave. 제 5 항에 있어서,The method of claim 5, wherein 상기 흡착여과부재는, 굴곡진 파형 형태의 다공성 세락믹으로 이루어지는 것을 특징으로 하는 케미컬 필터 제조방법.The adsorption filtration member is a chemical filter manufacturing method, characterized in that made of porous ceramics of the curved wave form.
KR1020060108143A 2006-11-03 2006-11-03 A chemical filter and a method for manufacturing the same KR20080040331A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100907492B1 (en) * 2007-11-14 2009-07-13 주식회사 코캣 Chemical Filters and Use Thereof
WO2017007094A1 (en) * 2015-07-07 2017-01-12 (주)에코에너지 기술연구소 Metal filter
KR20180001917U (en) 2016-12-19 2018-06-27 홍용희 Frame for filter and filter unit comprisinng the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100907492B1 (en) * 2007-11-14 2009-07-13 주식회사 코캣 Chemical Filters and Use Thereof
WO2017007094A1 (en) * 2015-07-07 2017-01-12 (주)에코에너지 기술연구소 Metal filter
KR20180001917U (en) 2016-12-19 2018-06-27 홍용희 Frame for filter and filter unit comprisinng the same

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