CN1835128B - 悬臂固定器及扫描探测显微镜 - Google Patents
悬臂固定器及扫描探测显微镜 Download PDFInfo
- Publication number
- CN1835128B CN1835128B CN2006100591609A CN200610059160A CN1835128B CN 1835128 B CN1835128 B CN 1835128B CN 2006100591609 A CN2006100591609 A CN 2006100591609A CN 200610059160 A CN200610059160 A CN 200610059160A CN 1835128 B CN1835128 B CN 1835128B
- Authority
- CN
- China
- Prior art keywords
- cantilever
- main part
- fixed
- assembled portion
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/02—Probe holders
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
- G09B23/00—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes
- G09B23/06—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics
- G09B23/18—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics for electricity or magnetism
- G09B23/183—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics for electricity or magnetism for circuits
- G09B23/186—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics for electricity or magnetism for circuits for digital electronics; for computers, e.g. microprocessors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
- F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nanotechnology (AREA)
- Radiology & Medical Imaging (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Health & Medical Sciences (AREA)
- Algebra (AREA)
- Mathematical Optimization (AREA)
- Pure & Applied Mathematics (AREA)
- Business, Economics & Management (AREA)
- Educational Administration (AREA)
- Educational Technology (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Mathematical Analysis (AREA)
- Computational Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005072262 | 2005-03-15 | ||
JP2005-072262 | 2005-03-15 | ||
JP2005072262 | 2005-03-15 | ||
JP2006-012859 | 2006-01-20 | ||
JP2006012859A JP4732903B2 (ja) | 2005-03-15 | 2006-01-20 | カンチレバーホルダ及び走査型プローブ顕微鏡 |
JP2006012859 | 2006-01-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1835128A CN1835128A (zh) | 2006-09-20 |
CN1835128B true CN1835128B (zh) | 2010-05-26 |
Family
ID=37069191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006100591609A Expired - Fee Related CN1835128B (zh) | 2005-03-15 | 2006-03-15 | 悬臂固定器及扫描探测显微镜 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7375322B2 (zh) |
JP (1) | JP4732903B2 (zh) |
KR (1) | KR101235982B1 (zh) |
CN (1) | CN1835128B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100761059B1 (ko) * | 2006-09-29 | 2007-09-21 | 파크시스템스 주식회사 | 오버행 샘플 측정이 가능한 주사 탐침 현미경 |
TW201013963A (en) * | 2008-08-15 | 2010-04-01 | Ulvac Inc | Method and apparatus for manufacturing solar battery |
US20100102673A1 (en) * | 2008-10-24 | 2010-04-29 | Nokia Corporation | Kinetic harvesting frequency optimizer |
JP5461917B2 (ja) * | 2009-08-12 | 2014-04-02 | 株式会社日立ハイテクサイエンス | 軟化点測定装置および熱伝導測定装置 |
JP2013113727A (ja) * | 2011-11-29 | 2013-06-10 | Hitachi High-Technologies Corp | ヘッド素子検査機 |
CN103529245B (zh) * | 2013-10-16 | 2016-08-24 | 西南交通大学 | 一种可应用于酸碱环境中的原子力显微镜液下针尖支架 |
CN105092900B (zh) * | 2014-05-20 | 2018-01-02 | 中国科学院沈阳自动化研究所 | 一种用于原子力显微镜的扫描探针夹持装置 |
CN104155479B (zh) * | 2014-07-15 | 2016-08-17 | 大连理工大学 | 模块式扫描探针显微镜用探针架 |
JP2016065800A (ja) * | 2014-09-25 | 2016-04-28 | 国立大学法人金沢大学 | 走査型プローブ顕微鏡 |
AT517809B1 (de) | 2015-08-19 | 2017-11-15 | Anton Paar Gmbh | Mit Masterkraft werkzeuglos betätigbarer und eine Messsonde lösbar fixierender Fixiermechanismus für Rastersondenmikroskop |
JP6885585B2 (ja) * | 2017-03-28 | 2021-06-16 | 株式会社日立ハイテクサイエンス | 走査型プローブ顕微鏡、及びその走査方法 |
CN109061232B (zh) * | 2018-08-29 | 2020-03-10 | 河南大学 | 原子力显微镜探针装置 |
CN111077347B (zh) * | 2019-12-25 | 2022-05-03 | 北京航空航天大学 | 原子力显微术探针夹持装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2465175Y (zh) * | 2001-02-26 | 2001-12-12 | 中国科学院长春应用化学研究所 | 原子力显微镜多探针针座 |
CN2488061Y (zh) * | 2001-05-25 | 2002-04-24 | 中国科学院长春应用化学研究所 | 原子力显微镜可调多探针针座 |
CN1397010A (zh) * | 2000-11-26 | 2003-02-12 | 大研化学工业株式会社 | 导电性扫描型显微镜用探针及使用该探针的加工方法 |
CN2587043Y (zh) * | 2002-03-27 | 2003-11-19 | 上海卓伦微纳米设备有限公司 | 扫描探针显微镜的智能针尖连接结构 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2853585B2 (ja) * | 1994-11-18 | 1999-02-03 | 株式会社島津製作所 | 走査型プローブ顕微鏡 |
JPH11153609A (ja) * | 1997-11-21 | 1999-06-08 | Seiko Instruments Inc | プローブ顕微鏡 |
JP3539867B2 (ja) * | 1998-05-28 | 2004-07-07 | セイコーインスツルメンツ株式会社 | 走査型プローブ顕微鏡 |
JP2000090872A (ja) | 1998-09-16 | 2000-03-31 | Seiko Epson Corp | 微細加工装置、微細加工方法および微細加工装置の製造方法 |
JP3592572B2 (ja) * | 1999-03-01 | 2004-11-24 | 日本電子株式会社 | カンチレバーホルダおよびカンチレバー装着器 |
JP3387846B2 (ja) * | 1999-03-04 | 2003-03-17 | セイコーインスツルメンツ株式会社 | 走査型プローブ顕微鏡 |
JP2001074635A (ja) * | 1999-08-31 | 2001-03-23 | Jeol Ltd | 走査プローブ顕微鏡 |
JP2003121335A (ja) * | 2001-10-10 | 2003-04-23 | Jeol Ltd | カンチレバ保持機構および走査形プローブ顕微鏡 |
JP4190936B2 (ja) * | 2002-09-17 | 2008-12-03 | エスアイアイ・ナノテクノロジー株式会社 | 走査型プローブ顕微鏡およびその操作法 |
JP2004325075A (ja) * | 2003-04-21 | 2004-11-18 | Sii Nanotechnology Inc | 走査型プローブ顕微鏡 |
JP4446929B2 (ja) * | 2004-08-24 | 2010-04-07 | エスアイアイ・ナノテクノロジー株式会社 | 走査型プローブ顕微鏡用カンチレバーホルダおよびそれを用いた走査型プローブ顕微鏡 |
JP2006184079A (ja) * | 2004-12-27 | 2006-07-13 | Tohoku Univ | 原子間力顕微鏡 |
-
2006
- 2006-01-20 JP JP2006012859A patent/JP4732903B2/ja active Active
- 2006-03-13 KR KR1020060023078A patent/KR101235982B1/ko active IP Right Grant
- 2006-03-14 US US11/374,841 patent/US7375322B2/en not_active Expired - Fee Related
- 2006-03-15 CN CN2006100591609A patent/CN1835128B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1397010A (zh) * | 2000-11-26 | 2003-02-12 | 大研化学工业株式会社 | 导电性扫描型显微镜用探针及使用该探针的加工方法 |
CN2465175Y (zh) * | 2001-02-26 | 2001-12-12 | 中国科学院长春应用化学研究所 | 原子力显微镜多探针针座 |
CN2488061Y (zh) * | 2001-05-25 | 2002-04-24 | 中国科学院长春应用化学研究所 | 原子力显微镜可调多探针针座 |
CN2587043Y (zh) * | 2002-03-27 | 2003-11-19 | 上海卓伦微纳米设备有限公司 | 扫描探针显微镜的智能针尖连接结构 |
Non-Patent Citations (3)
Title |
---|
JP特开2000-249714A 2000.09.14 |
JP特开2003-121335A 2003.04.23 |
JP特开平11-337560A 1999.12.10 |
Also Published As
Publication number | Publication date |
---|---|
KR20060101267A (ko) | 2006-09-22 |
US7375322B2 (en) | 2008-05-20 |
JP4732903B2 (ja) | 2011-07-27 |
JP2006292722A (ja) | 2006-10-26 |
KR101235982B1 (ko) | 2013-03-19 |
CN1835128A (zh) | 2006-09-20 |
US20060219916A1 (en) | 2006-10-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
CI02 | Correction of invention patent application |
Correction item: Priority Correct: 2006.01.20 JP 2006-012859 False: Lack of priority second Number: 38 Page: The title page Volume: 22 |
|
COR | Change of bibliographic data |
Free format text: CORRECT: PRIORITY; FROM: MISSING THE SECOND ARTICLE OF PRIORITY TO: 2006.1.20 JP 2006-012859 |
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C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: HITACHI HIGH TECH SCIENCE CORP. Free format text: FORMER NAME: SEIKO NANOTECHNOLOGY INC. |
|
CP03 | Change of name, title or address |
Address after: Tokyo, Japan, Japan Patentee after: Hitachi High Tech Science Corp. Address before: Chiba, Chiba, Japan Patentee before: Seiko Nanotechnology Inc. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100526 Termination date: 20200315 |
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CF01 | Termination of patent right due to non-payment of annual fee |