CN1828817A - 一种扫描式离子枪 - Google Patents
一种扫描式离子枪 Download PDFInfo
- Publication number
- CN1828817A CN1828817A CN 200610024805 CN200610024805A CN1828817A CN 1828817 A CN1828817 A CN 1828817A CN 200610024805 CN200610024805 CN 200610024805 CN 200610024805 A CN200610024805 A CN 200610024805A CN 1828817 A CN1828817 A CN 1828817A
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- magnetic field
- type ion
- ion gun
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- arc chamber
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Abstract
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Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100248055A CN100389476C (zh) | 2006-03-17 | 2006-03-17 | 一种扫描式离子枪 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100248055A CN100389476C (zh) | 2006-03-17 | 2006-03-17 | 一种扫描式离子枪 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1828817A true CN1828817A (zh) | 2006-09-06 |
CN100389476C CN100389476C (zh) | 2008-05-21 |
Family
ID=36947120
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2006100248055A Expired - Fee Related CN100389476C (zh) | 2006-03-17 | 2006-03-17 | 一种扫描式离子枪 |
Country Status (1)
Country | Link |
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CN (1) | CN100389476C (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101276010B (zh) * | 2008-05-14 | 2011-01-26 | 中国科学技术大学 | 具有刻蚀深度在线检测机构的衍射光学元件扫描刻蚀装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01239744A (ja) * | 1988-03-18 | 1989-09-25 | Nec Corp | 電子ビーム加工装置 |
JPH0499978A (ja) * | 1990-08-17 | 1992-03-31 | Fujitsu Ltd | 電子ビーム装置 |
CN2879416Y (zh) * | 2006-03-17 | 2007-03-14 | 上海市七宝中学 | 一种扫描式离子枪 |
-
2006
- 2006-03-17 CN CNB2006100248055A patent/CN100389476C/zh not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101276010B (zh) * | 2008-05-14 | 2011-01-26 | 中国科学技术大学 | 具有刻蚀深度在线检测机构的衍射光学元件扫描刻蚀装置 |
Also Published As
Publication number | Publication date |
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CN100389476C (zh) | 2008-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI ELECTRIC HYDRAULIC PNEUMATIC CO., LTD. Free format text: FORMER OWNER: SHANGHAI QIBAO MIDDLE SCHOOL Effective date: 20080905 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20080905 Address after: No. 2188 Xin Zhu Road, Shanghai, Minhang District Patentee after: Shanghai Electric Hydraulics and Pneumatics Co., Ltd. Address before: No. seven middle 1 road, Qibao town, Shanghai, Minhang District Patentee before: Qibao Middle School, Shanghai |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080521 Termination date: 20140317 |