CN1821771A - Co-burning method for oxygen sensor electrolyte and palatinum electrode - Google Patents
Co-burning method for oxygen sensor electrolyte and palatinum electrode Download PDFInfo
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- CN1821771A CN1821771A CN200610034507.4A CN200610034507A CN1821771A CN 1821771 A CN1821771 A CN 1821771A CN 200610034507 A CN200610034507 A CN 200610034507A CN 1821771 A CN1821771 A CN 1821771A
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- platinum
- lambda sensor
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- 239000003792 electrolyte Substances 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims abstract description 32
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title abstract description 9
- 239000001301 oxygen Substances 0.000 title abstract description 9
- 229910052760 oxygen Inorganic materials 0.000 title abstract description 9
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 55
- 239000011267 electrode slurry Substances 0.000 claims abstract description 16
- 239000000853 adhesive Substances 0.000 claims abstract description 8
- 230000001070 adhesive effect Effects 0.000 claims abstract description 8
- 239000011521 glass Substances 0.000 claims abstract description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 115
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 14
- 238000005520 cutting process Methods 0.000 claims description 14
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 14
- 239000007767 bonding agent Substances 0.000 claims description 12
- 230000003068 static effect Effects 0.000 claims description 8
- 239000001856 Ethyl cellulose Substances 0.000 claims description 7
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims description 7
- 238000000498 ball milling Methods 0.000 claims description 7
- 239000011230 binding agent Substances 0.000 claims description 7
- 238000005266 casting Methods 0.000 claims description 7
- 229920001249 ethyl cellulose Polymers 0.000 claims description 7
- 235000019325 ethyl cellulose Nutrition 0.000 claims description 7
- 238000007639 printing Methods 0.000 claims description 7
- RBNWAMSGVWEHFP-UHFFFAOYSA-N trans-p-Menthane-1,8-diol Chemical compound CC(C)(O)C1CCC(C)(O)CC1 RBNWAMSGVWEHFP-UHFFFAOYSA-N 0.000 claims description 7
- 230000002829 reductive effect Effects 0.000 claims description 6
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- ZZZCUOFIHGPKAK-UHFFFAOYSA-N D-erythro-ascorbic acid Natural products OCC1OC(=O)C(O)=C1O ZZZCUOFIHGPKAK-UHFFFAOYSA-N 0.000 claims description 2
- 229930003268 Vitamin C Natural products 0.000 claims description 2
- 238000010790 dilution Methods 0.000 claims description 2
- 239000012895 dilution Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims description 2
- 239000004615 ingredient Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- NICDRCVJGXLKSF-UHFFFAOYSA-N nitric acid;trihydrochloride Chemical compound Cl.Cl.Cl.O[N+]([O-])=O NICDRCVJGXLKSF-UHFFFAOYSA-N 0.000 claims description 2
- 239000013049 sediment Substances 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 239000002002 slurry Substances 0.000 claims description 2
- 238000003756 stirring Methods 0.000 claims description 2
- 235000019154 vitamin C Nutrition 0.000 claims description 2
- 239000011718 vitamin C Substances 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 239000000499 gel Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 239000000843 powder Substances 0.000 abstract 2
- 238000010345 tape casting Methods 0.000 abstract 2
- 238000003475 lamination Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 238000007766 curtain coating Methods 0.000 description 7
- 238000009472 formulation Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Measuring Oxygen Concentration In Cells (AREA)
Abstract
This invention discloses a co-burning method for oxygen sensor electrolyte and Pt electrode including the following steps: A, matching materials according to 50-60% ZrO< 2 > base electrolyte of the weight percentage and 40-50% adhesive, grinding and doctor-blading gels to be bladed to 0.1-0.2mm films on a doctor-blading machine to be laminated to 3-6 layers to be equal-static pressed to lamination films to be cut according to sizes, B, matching materials of 65-85% Pt powder, 15-35% bond and 0-2% glass powder to be mixed to a Pt electrode slurry, C, processing printed silk net to print the Pt electrode slurry by step B on the laminated layer film, the Pt electrode is 50-150mum thick to be cut according to the size of the oxygen sensor the gel is blown out and sintered under 1500-1600deg.C for 2-6 hours to integrate the two into one.
Description
Affiliated technical field
The present invention relates to a kind of electrolyte and platinum electrode co-burning method of lambda sensor.
Background technology
Existing oxygen sensor in use for car mostly is tubular-shaped structures, and its manufacture craft is: at first moulding and burn till ZrO
2The base electrolyte matrix, blackening Pt electrode carries out plasma sputtering or chemical impregnation in the above again, and fired porous layer; Secondly, make the heater element.The two is fitted together into lambda sensor, because ZrO
2Base electrolyte matrix, platinum electrode etc. are through firing process repeatedly, make tube element, and two subelements are combined into lambda sensor, and its technology is loaded down with trivial details, ZrO
2Base electrolyte matrix and platinum electrode are that contact conducts heat, low-response, and it is long to reach the working temperature time.
Summary of the invention
Technical matters to be solved by this invention: electrolyte and platinum electrode co-burning method that a kind of lambda sensor is provided, this method technology is simple, solid to electrolyte that makes lambda sensor and platinum electrode compact conformation, reduced volume, microminiaturized, reduce power consumption, the heating physical efficiency makes lambda sensor reach working temperature rapidly, and response is fast.
The present invention solves the technical scheme that its technical matters adopts: the electrolyte of lambda sensor and platinum electrode co-burning method comprise the steps:
A, 50～60% ZrO by weight percentage
2Base electrolyte, 40～50% adhesive proportion batching, the ball milling casting slurry, on casting machine casting film-forming thick be the diaphragm of 0.1～0.2mm, and superposition becomes 3～6 layers, waits static pressure to become laminated diaphragm, by the design size cutting;
B, 65～85% platinum powder by weight percentage, 15～35% bonding agent, 0～2% glass dust proportion ingredient stir and make platinum electrode slurry;
C, press electrode size and make printing screen, on the laminated diaphragm that steps A is made, stamp the platinum electrode slurry that step B makes with thick-film technique, platinum electrode thickness 50～150um, press the size cutting of lambda sensor, through binder removal and 1500～1600 ℃ of sintering, be incubated 2-6 hour, the two is combined into one.
Employed bonding agent is polyvinyl alcohol (PVA) or butyral in the described steps A, preferably polyethylene alcohol.
Employed ZrO in the described steps A
2Base electrolyte is the ZrO of doping Y5～10mol%
2
Platinum powder among the described step B is ultra-fine platinum powder, and the preparation method of described ultra-fine platinum powder comprises the steps: metal platinum is dissolved in HNO
3In+HCl the chloroazotic acid, after the dilution, splash into reductive agent, sediment undergoes washing, dry ultra-fine platinum powder.
Described reductive agent is a vitamin C.
Bonding agent among the described step B is that percentage by weight is the potpourri of the terpinol of 20～50% ethyl cellulose and 50～80%.
Beneficial effect of the present invention:
1, the present invention is on ZrO2 base electrolyte casting films, prints platinum electrode with thick-film technique, and electrolyte and platinum electrode burn till an integral body altogether at 1500～1600 ℃, and both couplings are closely solid, in lambda sensor stable work in work below 1000 ℃.
2, electrolyte curtain coating of the present invention becomes film, the curtain coating perforated membrane, heater film, the various scantlings of design lambda sensor, accurately locate, the multilayer superposition adopts thick-film technique to print platinum electrode, covers the porous rete on electrode, and integration thick-film resistor heater, Deng the static pressure extrusion forming, make the chip base substrate, through being fired into the chip multilayer lambda sensor.The automobile chip multilayer lambda sensor of making through oxygen sensor electrolyte of the present invention and platinum electrode co-burning method, integrate ZrO2 electrolyte, perforated membrane, heater and porous platinum electrode, compact conformation is solid, reduced volume, microminiaturized, reduce power consumption, the heating physical efficiency makes lambda sensor reach working temperature rapidly, response is fast, in electrode application voltage, because the restriction of porous layer oxygen permeating amount, oxonium ion produces limiting current in electrolytical diffusion, and is linear at working temperature smallest limit electric current and oxygen concentration.This lambda sensor is used for automobile control combustion ratio, (air-fuel ratio λ=0.6) to the oil-poor zone in the rich oil zone (air-fuel ratio go into=1.4) wide area operate as normal.
Describe the present invention in detail below in conjunction with the drawings and specific embodiments.
Fig. 1 is the platinum electrode microphoto of embodiments of the invention 1;
Fig. 2 is that the resistivity of embodiments of the invention 1 is with variation of temperature;
Fig. 3 is the E～t relation of the sample of embodiments of the invention 1;
Fig. 4 is the E-Po of the sample of embodiments of the invention 1
2Relation.
Embodiment
By weight percentage, the ZrO of 55% doping Y8mol%
2The adhesive formulations ball milling of base electrolyte and 45% polyvinyl alcohol (PVA), curtain coating becomes the film of 0.15mm, and superposition becomes 5 layers, waits static pressure to become laminated diaphragm, by the design size cutting; The percentage by weight of platinum electrode slurry consists of 71.8% Pt, 28% bonding agent (composition be 30% ethyl cellulose and 70% terpinol), and 0.2% glass is made platinum electrode slurry.Press electrode size and make printing screen, the platinum electrode that stamps on the laminated diaphragm with thick-film technique, the platinum electrode thickness is 50～150um, presses the size cutting diaphragm of lambda sensor, through binder removal, burns to 1560 ℃, is incubated 4 hours, the two is combined into one.
The sample of the electrolyte of the lambda sensor of the method for preparing of learning from else's experience and the preparation of platinum electrode co-burning method is observed electrode structure at electron microscope SEM, and as shown in Figure 1, electric face is mesh structural porous structure.At the electrical property of 900 ℃ of measuring sensors, electrode performance is stable.Electrode performance: with three electrode surface resistance measuring instruments, three electrodes are contacted with on the Pt electrode surface of sample, the resistance value of measurement is calculated to be resistivity, and resistivity is less than 10-4, and resistance value varies with temperature as Fig. 2.As shown in Figure 3, electrolytical electromotive force E and temperature relation, sample is placed in the temperature control furnace, and the sample both sides feed the oxygen and the nitrogen of variable concentrations, with the concentration difference on mass flowmeter and Flow Measurement Display Meter control both sides, measure electromotive force with voltage table.As shown in Figure 4, electrolytical electromotive force and oxygen concentration relation, measuring method is identical with the measurement electromotive force.
By weight percentage, the ZrO of 50% doping Y 5mol%
2The adhesive formulations ball milling of base electrolyte and 50% polyvinyl alcohol (PVA), curtain coating becomes the film of 0.10mm, and superposition becomes 6 layers, waits static pressure to become laminated diaphragm, by the design size cutting; The percentage by weight of platinum electrode slurry consists of 85% Pt, and 15% bonding agent (composition be 20% ethyl cellulose and 80% terpinol) is made platinum electrode slurry.Press electrode size and make printing screen, the platinum electrode that stamps on the laminated diaphragm with thick-film technique, the platinum electrode thickness is 50～120um, presses the size cutting diaphragm of lambda sensor, through binder removal, burns to 1600 ℃, is incubated 2 hours, the two is combined into one.
The method of pressing embodiment 1 detects, and sample is observed electrode structure at electron microscope SEM, visible holey, and at the electrical property of 1000 ℃ of measuring sensors, electrode performance is stable.
By weight percentage, the ZrO of 60% doping Y 10mol%
2The adhesive formulations ball milling of base electrolyte and 40% butyral, curtain coating becomes the film of 0.20mm, and superposition becomes 3 layers, waits static pressure to become laminated diaphragm, by the design size cutting; The percentage by weight of platinum electrode slurry consists of 65% Pt, 33% bonding agent (composition be 40% ethyl cellulose and 60% terpinol), and 2% glass is made platinum electrode slurry.Press electrode size and make printing screen, the platinum electrode that stamps on the laminated diaphragm with thick-film technique, the platinum electrode thickness is 80～150um, presses the size cutting diaphragm of lambda sensor, through binder removal, burns to 1500 ℃, is incubated 6 hours, the two is combined into one.
The method of pressing embodiment 1 detects, and sample is observed electrode structure at electron microscope SEM, visible holey, and at the electrical property of 1000 ℃ of measuring sensors, electrode performance is stable.
Embodiment 4
By weight percentage, the adhesive formulations ball milling of the ZrO2 base electrolyte of 57% doping Y 9mol% and 43% polyvinyl alcohol (PVA), curtain coating becomes the film of 0.20mm, and superposition becomes 3 layers, waits static pressure to become laminated diaphragm, by the design size cutting; The percentage by weight of platinum electrode slurry consists of 65% Pt, and 35% bonding agent (composition be 50% ethyl cellulose and 50% terpinol) is made platinum electrode slurry.Press electrode size and make printing screen, the platinum electrode that stamps on the laminated diaphragm with thick-film technique, the platinum electrode thickness is 50～150um, presses the size cutting diaphragm of lambda sensor, through binder removal, burns to 1520 ℃, is incubated 3 hours, the two is combined into one.
The method of pressing embodiment 1 detects, and sample is observed electrode structure at electron microscope SEM, visible holey, and at the electrical property of 1000 ℃ of measuring sensors, electrode performance is stable.
By weight percentage, the adhesive formulations ball milling of the ZrO2 base electrolyte of 52% doping Y 6mol% and 48% polyvinyl alcohol (PVA), curtain coating becomes the film of 0.18mm, and superposition becomes 4 layers, waits static pressure to become laminated diaphragm, by the design size cutting; The percentage by weight of platinum electrode slurry consists of 72.5% Pt, and 25% bonding agent (composition be 32% ethyl cellulose and 68% terpinol) is made platinum electrode slurry.Press electrode size and make printing screen, the platinum electrode that stamps on the laminated diaphragm with thick-film technique, the platinum electrode thickness is 50～150um, presses the size cutting diaphragm of lambda sensor, through binder removal, burns to 1560 ℃, is incubated 3.5 hours, the two is combined into one.
The method of pressing embodiment 1 detects, and sample is observed electrode structure at electron microscope SEM, visible holey, and at the electrical property of 1000 ℃ of measuring sensors, electrode performance is stable.
Claims (7)
1, the electrolyte of lambda sensor and platinum electrode co-burning method is characterized in that: it comprises the steps,
A, 50～60% ZrO by weight percentage
2Base electrolyte, 40～50% adhesive proportion batching, the ball milling casting slurry, on casting machine casting film-forming thick be the diaphragm of 0.1～0.2mm, and superposition becomes 3～6 layers, waits static pressure to become laminated diaphragm, by the design size cutting;
B, 65～85% platinum powder by weight percentage, 15～35% bonding agent, 0～2% glass dust proportion ingredient stir and make platinum electrode slurry;
C, press electrode size and make printing screen, on the laminated diaphragm that steps A is made, stamp the platinum electrode slurry that step B makes with thick-film technique, platinum electrode thickness 50～150um, press the size cutting of lambda sensor, through binder removal and 1500～1600 ℃ of sintering, be incubated 2-6 hour, the two is combined into one.
2, the electrolyte of lambda sensor according to claim 1 and platinum electrode co-burning method is characterized in that: employed bonding agent is polyvinyl alcohol (PVA) or butyral in the described steps A.
3, the electrolyte of lambda sensor according to claim 2 and platinum electrode co-burning method is characterized in that: employed bonding agent is a polyvinyl alcohol (PVA) in the described steps A.
4, the electrolyte of lambda sensor according to claim 1 and platinum electrode co-burning method is characterized in that: employed ZrO in the described steps A
2Base electrolyte is the ZrO of doping Y5～10mol%
2
5, the electrolyte of lambda sensor according to claim 1 and platinum electrode co-burning method is characterized in that: the platinum powder among the described step B is ultra-fine platinum powder, and the preparation method of described ultra-fine platinum powder comprises the steps: metal platinum is dissolved in HNO
3In+HCl the chloroazotic acid, after the dilution, splash into reductive agent, sediment undergoes washing, dry ultra-fine platinum powder.
6, the electrolyte of lambda sensor according to claim 5 and platinum electrode co-burning method is characterized in that: described reductive agent is a vitamin C.
7, the electrolyte of lambda sensor according to claim 1 and platinum electrode co-burning method is characterized in that: the bonding agent among the described step B is that percentage by weight is the potpourri of the terpinol of 20～50% ethyl cellulose and 50～80%.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100345074A CN100405052C (en) | 2006-03-23 | 2006-03-23 | Co-burning method for oxygen sensor electrolyte and palatinum electrode |
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|---|---|---|---|
| CNB2006100345074A CN100405052C (en) | 2006-03-23 | 2006-03-23 | Co-burning method for oxygen sensor electrolyte and palatinum electrode |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101408525B (en) * | 2008-09-09 | 2010-06-23 | 深圳市日理江澍实业有限公司 | Method for preparing oxygen sensor external platinum electrode |
| CN102910903A (en) * | 2012-11-08 | 2013-02-06 | 中国科学院上海硅酸盐研究所 | Low-temperature cofiring method of zirconia-based sensor |
| CN101498682B (en) * | 2009-02-27 | 2013-05-08 | 深圳市日理江澍实业有限公司 | Coating apparatus and method for platinum electrode in oxygen sensor |
| CN103207227A (en) * | 2013-03-21 | 2013-07-17 | 无锡隆盛科技股份有限公司 | Manufacturing method for oxygen sensor chips |
| CN106996952A (en) * | 2017-04-24 | 2017-08-01 | 东北大学 | The preparation method of lambda sensor dielectric substrate and fine and close diffusion layer double-decker |
| CN108241015A (en) * | 2016-12-26 | 2018-07-03 | 现代自动车株式会社 | By using the method for co-sintering manufacture solid electrolyte type carbon dioxide sensor |
| CN110407578A (en) * | 2019-08-28 | 2019-11-05 | 中国原子能科学研究院 | ZrO2The preparation method of base oxygen sensing element co-sintering platinum electrode |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56111460A (en) * | 1980-02-07 | 1981-09-03 | Matsushita Electric Ind Co Ltd | Manufacture of detecting element of oxygen concentration |
| CN1007837B (en) * | 1987-07-07 | 1990-05-02 | 首都钢铁公司 | Coating for tubular zirconium-oxide electrode |
| JP3018925B2 (en) * | 1994-11-09 | 2000-03-13 | 松下電器産業株式会社 | Electrochemical element |
| JP3052860B2 (en) * | 1996-12-09 | 2000-06-19 | 松下電器産業株式会社 | Manufacturing method of electrochemical element |
| CN1241822A (en) * | 1998-11-13 | 2000-01-19 | 康达（成都）电子有限公司 | Manufacture of oxygen sensor |
| CN1103448C (en) * | 1998-12-11 | 2003-03-19 | 天津大学 | Oxygen sensive film used for air-fuel ratio sensor, and method for preparing same |
| CN1306207A (en) * | 2000-01-17 | 2001-08-01 | 毛红艳 | Oxygen sensor with ceramic electrode and its preparing process |
| US20030146093A1 (en) * | 2002-02-05 | 2003-08-07 | Kyocera Corporation | Oxygen sensor |
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2006
- 2006-03-23 CN CNB2006100345074A patent/CN100405052C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101408525B (en) * | 2008-09-09 | 2010-06-23 | 深圳市日理江澍实业有限公司 | Method for preparing oxygen sensor external platinum electrode |
| CN101498682B (en) * | 2009-02-27 | 2013-05-08 | 深圳市日理江澍实业有限公司 | Coating apparatus and method for platinum electrode in oxygen sensor |
| CN102910903A (en) * | 2012-11-08 | 2013-02-06 | 中国科学院上海硅酸盐研究所 | Low-temperature cofiring method of zirconia-based sensor |
| CN102910903B (en) * | 2012-11-08 | 2015-03-25 | 中国科学院上海硅酸盐研究所 | Low-temperature cofiring method of zirconia-based sensor |
| CN103207227A (en) * | 2013-03-21 | 2013-07-17 | 无锡隆盛科技股份有限公司 | Manufacturing method for oxygen sensor chips |
| CN108241015A (en) * | 2016-12-26 | 2018-07-03 | 现代自动车株式会社 | By using the method for co-sintering manufacture solid electrolyte type carbon dioxide sensor |
| CN106996952A (en) * | 2017-04-24 | 2017-08-01 | 东北大学 | The preparation method of lambda sensor dielectric substrate and fine and close diffusion layer double-decker |
| CN106996952B (en) * | 2017-04-24 | 2019-05-07 | 东北大学 | The preparation method of lambda sensor electrolyte layer and fine and close diffusion layer double-layer structure |
| CN110407578A (en) * | 2019-08-28 | 2019-11-05 | 中国原子能科学研究院 | ZrO2The preparation method of base oxygen sensing element co-sintering platinum electrode |
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