CN1821049A - 光敏微机电系统结构 - Google Patents

光敏微机电系统结构 Download PDF

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Publication number
CN1821049A
CN1821049A CNA2006100036757A CN200610003675A CN1821049A CN 1821049 A CN1821049 A CN 1821049A CN A2006100036757 A CNA2006100036757 A CN A2006100036757A CN 200610003675 A CN200610003675 A CN 200610003675A CN 1821049 A CN1821049 A CN 1821049A
Authority
CN
China
Prior art keywords
rectangular
plate
mems structure
upper plate
twin crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006100036757A
Other languages
English (en)
Chinese (zh)
Inventor
弗拉迪米尔·安娜托列维奇·阿克斯尤克
玛利亚·艾利娜·西蒙
理查特·埃里奥特·斯拉舍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Publication of CN1821049A publication Critical patent/CN1821049A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N10/00—Electric motors using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/38—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids
    • G01J5/40—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids using bimaterial elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Micromachines (AREA)
  • Radiation Pyrometers (AREA)
CNA2006100036757A 2005-01-13 2006-01-11 光敏微机电系统结构 Pending CN1821049A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/036,438 US7324323B2 (en) 2005-01-13 2005-01-13 Photo-sensitive MEMS structure
US11/036,438 2005-01-13

Publications (1)

Publication Number Publication Date
CN1821049A true CN1821049A (zh) 2006-08-23

Family

ID=36652578

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006100036757A Pending CN1821049A (zh) 2005-01-13 2006-01-11 光敏微机电系统结构

Country Status (4)

Country Link
US (2) US7324323B2 (https=)
JP (1) JP2006212770A (https=)
CN (1) CN1821049A (https=)
CA (1) CA2530252A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1619495A1 (en) * 2004-07-23 2006-01-25 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Method and Apparatus for inspecting a specimen surface and use of fluorescent materials
US7324323B2 (en) * 2005-01-13 2008-01-29 Lucent Technologies Inc. Photo-sensitive MEMS structure
US7495199B2 (en) * 2006-02-10 2009-02-24 Stmicroelectronics, Inc. MEMS radiometer
US20070246665A1 (en) * 2006-04-20 2007-10-25 Lafond Peter H Mechanical isolation for mems devices
US7485870B2 (en) * 2006-09-12 2009-02-03 Alcatel-Lucent Usa Inc. Pneumatic infrared detector
US7851759B2 (en) * 2007-06-21 2010-12-14 Alcatel-Lucent Usa Inc. Infrared imaging apparatus
US7580175B2 (en) * 2007-06-21 2009-08-25 Alcatel-Lucent Usa Inc. Detector of infrared radiation having a bi-material transducer
DE102008011175B4 (de) * 2008-02-26 2010-05-12 Nb Technologies Gmbh Mikromechanischer Aktuator und Verfahren zu seiner Herstellung
US7842923B2 (en) * 2008-07-28 2010-11-30 Alcatel-Lucent Usa Inc. Thermal actuator for an infrared sensor
TW201243287A (en) * 2011-04-28 2012-11-01 Hon Hai Prec Ind Co Ltd Laser range finder
WO2013026006A2 (en) 2011-08-17 2013-02-21 Public Service Solutions, Inc Passive detectors for imaging systems
JP6892727B2 (ja) * 2016-09-26 2021-06-23 カンタツ株式会社 パターン製造装置、パターン製造方法およびパターン製造プログラム
US11043444B2 (en) 2018-08-10 2021-06-22 Frore Systems Inc. Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices
US12089374B2 (en) 2018-08-10 2024-09-10 Frore Systems Inc. MEMS-based active cooling systems
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
WO2021086873A1 (en) 2019-10-30 2021-05-06 Frore System Inc. Mems-based airflow system
US12193192B2 (en) 2019-12-06 2025-01-07 Frore Systems Inc. Cavities for center-pinned actuator cooling systems
US11510341B2 (en) * 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US12033917B2 (en) 2019-12-17 2024-07-09 Frore Systems Inc. Airflow control in active cooling systems
CN113661568A (zh) 2019-12-17 2021-11-16 福珞尔系统公司 用于封闭和开放设备的基于mems的冷却系统
WO2022072286A1 (en) 2020-10-02 2022-04-07 Frore Systems Inc. Active heat sink

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4241045C1 (de) 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
US6392221B1 (en) * 1997-12-22 2002-05-21 Agere Systems Guardian Corp. Micro-electro-mechanical optical device
US6242989B1 (en) * 1998-09-12 2001-06-05 Agere Systems Guardian Corp. Article comprising a multi-port variable capacitor
US6140646A (en) 1998-12-17 2000-10-31 Sarnoff Corporation Direct view infrared MEMS structure
US6201631B1 (en) 1999-10-08 2001-03-13 Lucent Technologies Inc. Process for fabricating an optical mirror array
US6229684B1 (en) * 1999-12-15 2001-05-08 Jds Uniphase Inc. Variable capacitor and associated fabrication method
US6708491B1 (en) * 2000-09-12 2004-03-23 3M Innovative Properties Company Direct acting vertical thermal actuator
US6698201B1 (en) 2001-08-16 2004-03-02 Zyvex Corporation Cascaded bimorph rotary actuator
US6858911B2 (en) * 2002-02-21 2005-02-22 Advanced Micriosensors MEMS actuators
JP2005518746A (ja) * 2002-02-26 2005-06-23 ザ リージェンツ オブ ザ ユニバーシティ オブ ミシガン Ｍｅｍベースのコンピュータシステム、及びそれに用いるクロック生成発振器回路及びｌｃタンク装置
US7146014B2 (en) * 2002-06-11 2006-12-05 Intel Corporation MEMS directional sensor system
US7015885B2 (en) * 2003-03-22 2006-03-21 Active Optical Networks, Inc. MEMS devices monolithically integrated with drive and control circuitry
US6781744B1 (en) 2003-06-11 2004-08-24 Lucent Technologies Inc. Amplification of MEMS motion
US7324323B2 (en) * 2005-01-13 2008-01-29 Lucent Technologies Inc. Photo-sensitive MEMS structure

Also Published As

Publication number Publication date
US20080068123A1 (en) 2008-03-20
CA2530252A1 (en) 2006-07-13
JP2006212770A (ja) 2006-08-17
US20060152105A1 (en) 2006-07-13
US7324323B2 (en) 2008-01-29
US7616425B2 (en) 2009-11-10

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Application publication date: 20060823