CN1808187A - Regeneration method of glass base plate for color filter - Google Patents

Abstract

Disclosed is a regeneration method of the glass substrate used for the color filter. Compared with the situation in the prior art, the regeneration method can process treatment towards the defective color filters produced in the production process of the color filter used for the LCD and the glass substrate is not discarded and can be used effectively. In the regeneration method (12) of the defective color filter (11) produced in the production process of the color filter (10), a removing-feeding method (20) is used while the defective color filter (11) is stopped temporarily; the formations on the glass substrate (12) is removed in the acid so that the regeneration of the glass substrate (12) is realized. The formations on the glass substrate (12) are removed by the acids with different concentrations or types sequentially during the regeneration process.

Description

The renovation process of glass base plate for color filter

Technical field

The present invention relates to a kind of renovation process of glass base plate for color filter, be used for LCD, for example form the renovation process of the glass base plate for color filter of bad color filter repeat glass substrate by transparency electrode and resin molding.

Background technology

Now, for example, in the color liquid crystal display arrangement that is widely used as the display device of personal computer, mobile phone, TV or navigational system, use color filter.

On glass substrate, form light shield layer (BM), dyed layer (RGB), transparency electrode, alignment film and clearance wall (spacer) successively and make this color filter.In addition, as required, between dyed layer and transparency electrode, also form protective film (overcoat layer) sometimes.

, its present situation is: in the manufacture process of color filter, produce the sneaking into of foreign matter for example, pin hole or the uneven such defective of resist-coating, the color filter yield rate is reduced.It is difficult getting rid of these defectives fully, much less strict control manufacturing process in addition, and it is favourable to industry to get rid of these reasons fully.Therefore, for example in patent documentation 1, disclose in ferric chloride in aqueous solution and sulfuric acid, flood bad color filter successively after, clean the method for regeneration glass base plate for color filter with brush.

[patent documentation 1] spy opens the 2001-91731 communique

Summary of the invention

But disclosed method is to flood bad color filter with batch processing mode in treating fluid in patent documentation 1, removes the needed time of transparency electrode and resin molding long (for example, removing transparency electrode is 1 hour, and removing resin molding is 1 hour).

In addition, because the increase of treatment facility scale increases the comparable present situation of Regeneration Treatment amount of glass substrate, but in this case, needs more equipment investment thereby uneconomical, and needs because a large amount of lands used of equipment construction.

And, there is following problem: the bad glass substrate that damage is for example arranged on glass baseplate surface, or on glass baseplate surface, produce the bad glass substrate of concavo-convex figure vestige when forming resin molding, though use treating fluid and clean with brush, because residual impairment or pattern vestige, and can not be utilized effectively again.

The objective of the invention is to provide in light of this situation a kind of renovation process of the glass base plate for color filter of not abolishing glass substrate and effectively using, the bad color filter that produces in the manufacturing process of the color filter that is used for LCD of Regeneration Treatment effectively in than existing shorter time.

According to the renovation process of the glass base plate for color filter of the present invention of above-mentioned purpose is method by the bad color filter repeat glass substrate that produces in the color filter manufacturing process, in acid, remove the formation thing on the above-mentioned glass substrate by using the above-mentioned bad color filter of conveyance means conveyance on one side that it is temporarily stopped, carrying out above-mentioned glass substrate regeneration.

At this, so-called color filter for example forms transparency electrode and resin molding and forms on glass substrate.

Indium Tin Oxide) or IZO (indium-zinc oxide: Indium Zinc Oxide) form in addition, transparency electrode is by for example ITO (indium tin oxide:.

In addition, resin molding be comprise for example resinous matrix (light shield layer: resin system BM), the color resist (dyed layer: RGB), diaphragm (diaphragm: OC), in alignment film and the clearance wall (resin system) any one or more than or equal to two.

And, the glass substrate of having removed formation thing (for example transparency electrode and resin molding) is under the situation of bad glass substrate, preference carries out the regeneration of spendable glass substrate effectively as using bad glass substrate relatively while being rotated the grinding means of shaking.So-called this bad glass substrate be the glass baseplate surface that produces in the manufacturing process that has by attachment residual on the glass substrate after the acid treatment (for example, forming the residue of thing), color filter concavo-convex (for example: damage and the figure vestige in any one or two kinds of) and the reactant of glass substrate and formation thing in a kind of or more than or equal to two kinds substrate.

When making this color filter, on glass substrate, form for example black matrix (blackmatrix), color resist, diaphragm, transparency electrode, alignment film and clearance wall successively.

Therefore; in the bad color filter that produces by the manufacturing process of color filter, according to each manufacturing process on glass substrate, form for example comprise black matrix, color resist, diaphragm, transparency electrode, alignment film and clearance wall any or more than or equal to two kinds formation thing.

The renovation process of glass base plate for color filter of the present invention, use the means of the bad color filter of conveyance, for example each or a plurality ofly arrange side by side, while carrying out along any direction conveyance of level, inclination and vertical centering control or temporarily stopping to carry out forming on the glass substrate removing of thing with acid, promptly owing to carry out single mode, so it is different with the one-tenth batch mode of the processing of as existing, once carrying out a plurality of bad color filters, because even even the thin of glass substrate can be handled, so the quality of good repeat glass substrate can be arranged.

Use is relatively being carried out under the situation of glass substrate processing while rotating the grinding means of shaking on the glass substrate, can positively remove the formation thing, simultaneously by the new surface that bevel constitutes the repeat glass substrate of grinding, thereby can obtain glass substrate with the new product equal quality.

In addition, because can remove the pattern vestige or the damage of bad glass substrate, so the unrenewable bad glass substrate of present situation of can regenerating.

And, to use when the grinding of glass baseplate surface under the situation of pulpous state lapping compound by the grinding means, the effect of also giving lapping compound except that the effect of grinding means can make the quality of the glass substrate after the Regeneration Treatment more stable.

On the formation thing, blow and pay sour removing under the situation of the formation thing on the glass baseplate surface, the chemical action of acid not only is provided, physical action also is provided, can implement remove operation with the shorter time.

In acid, under the situation of hybrid oxidant, obtain organic oxidative decomposition, with comparing under the acid-treated situation, can in shorter time, remove resin molding with only by oxygenant.

In addition, under the situation of mixed surfactant, acid improves the impregnability of resin molding in acid, and peels off easily owing to interfacial tension because of the resin molding of the swelling by acid, so with only compare by acid-treated situation, can in shorter time, remove resin molding.

In addition, be warmed up in acid under the situation of predefined temperature, the effect of acid is further improved, can further shorten to remove forming the needed time of thing.

Processing with acid is a plurality of operations, by by having concentration or diverse multiple acid in each operation, remove the situation that forms thing on the glass substrate, under in the past the situation of the sulfuric acid that for example uses a kind of concentration as acid, or compare with the situation of using sulfuric acid and other medicament, can carry out effective regeneration with the short time and handle glass substrate, the scrap glass substrate is not used effectively.Thus, the Regeneration Treatment amount of glass substrate can have greatly increased than present situation.

At this, form thing and contain transparency electrode and resin molding, carry out removing under processing and the situation of removing processing respectively by different operations based on this transparency electrode based on resin molding, by in each processing of transparency electrode and resin molding, using the acid that is fit to respectively, further shortened the Regeneration Treatment time of glass substrate.

Description of drawings

(A) of Fig. 1, (B) are respectively the specification figure of renovation process of the glass base plate for color filter of one embodiment of the present invention.

(A) of Fig. 2, (G) show the key diagram of the manufacture process of the color filter that uses respectively in the same regeneration method.

Fig. 3 is the key diagram of the sulfuric acid treatment device that uses in the same regeneration method.

Fig. 4 is the key diagram that uses the sulfuric acid treatment device of variation in the same regeneration method.

[symbol description]

10: color filter; 11: bad color filter; 12; glass substrate; 13: transparency electrode; 14: resin molding; 15: black matrix; 16: the color resist; 17: protective film; 18: alignment film; 19: clearance wall; 20: roller conveyor (conveyance means); 21: the conveyance roller; 22: move into mouth; 23: the sulfuric acid treatment device; 24: Jetspray nozzle; 25: supply with and use pipe arrangement; 26: treating fluid; 27: receptacle; 28: store jar; 29: ebullator; 30: filtrator; 31: the sulfuric acid treatment device; 32: the substrate dipping tank; 33: bad color filter; 34; 35: liquid is cut roller; 36: glass substrate; 37; 38: liquid is cut roller; 39: Jetspray nozzle; 41: lapping device; 42; 43: brush (grinding means); 44: fixed station; 45: turning axle; 46: fixed station; 47: turning axle; 48: nozzle; 49: the single type cleaning machine; 50; 51: glass substrate

Embodiment

Then, with reference to the accompanying drawings, illustrate and specialize embodiments of the present invention, the understanding of the present invention is provided.

At this, (A) of Fig. 1, (B) are respectively the specification figure of renovation process of the glass base plate for color filter of one embodiment of the present invention.(A)-(G) of Fig. 2 shows the key diagram of the manufacture process of the color filter that uses respectively in the same regeneration method.Fig. 3 is the key diagram of the sulfuric acid treatment device that uses in the same regeneration method.Fig. 4 is the key diagram that uses the sulfuric acid treatment device of variation in the same regeneration method.

As shown in Figure 1, the renovation process of the glass base plate for color filter in one embodiment of the present invention (below, only be called renovation process), for example, by the bad color filter 11 that in arbitrary manufacturing process of manufacturing process (Fig. 2 (B)-(G)) of the color filter that is used for LCD 10 shown in Fig. 2 (A)-(G), takes place, the repeat glass substrate (below, only be called substrate) 12 whens regeneration, the bad color filter 11 of conveyance or temporarily stop and handling with sulfuric acid (example of acid) on one side, removing the formation thing from glass substrate 12 is transparency electrode 13 and resin molding 14.It should be noted that the different multiple sulfuric acid (is sulfuric acid A and sulfuric acid B at this) of working concentration is as sulfuric acid successively.

Indium tin oxide) 13, alignment film 18 and clearance wall 19 and make shown in Fig. 2 (A)-(G), color filter 10 is the transparency electrode that forms the black matrix 15 that is made of resin, colored resist (red, green, blue) 16, protective film 17 successively on glass substrate 12, form with metal oxide (ITO:.

In as the arbitrary operation of Fig. 2 (B)-(G), renovation process of the present invention is the method that for example is suitable in the bad color filter that has produced the uneven such defective of the sneaking into of foreign matter, pin hole or resist-coating, by this renovation process, from bad color filter, remove formation thing on the glass substrate and the glass base plate for color filter of regenerating (basic glass).

In the renovation process of present embodiment, on the glass substrate 12 of bad color filter 11, there are black matrix 15, colored resist 16, protective film 17, transparency electrode 13, alignment film 18 and clearance wall 19 as forming thing.In addition, constitute resin molding 14 by black matrix 15, colored resist 16, protective film 17, alignment film 18 and clearance wall 19.This resin molding 14 be by for example polyimide be resin, acrylic resin, epoxy be resin and novolaks be resin any or constitute more than or equal to two kinds.

Shown in Fig. 1 (A), (B), when bad color filter 11 is regenerated, bad color filter 11 is positioned on a plurality of conveyance rollers 21 that are provided with in the roller conveyor 20 (examples of conveyance means) 20, every horizontal conveyance on one side, in each zone carry out bad color filter and move into various processing that operation, sulfuric acid treatment operation, liquid cutting process, secondary sulfuric acid treatment operation, liquid cutting process, a soup remove operation, grinding step, matting on one side.

At first, shown in Fig. 1 (A), moving in the operation of bad color filter, from moving into mouthfuls 22 pack into bad color filters 11 and being positioned on a plurality of conveyance rollers 21.

Then, in sulfuric acid treatment operation, on one side by the bad color filter 11 of conveyance roller 21 conveyances, on one side on the face side (the formation side of transparency electrode 13 and resin molding 14) of bad color filter 11 or the two sides with for example more than or equal to 5 seconds, to blow pair concentration about smaller or equal to 5 minutes be the sulfuric acid A of 1 quality %～95 quality % (is 50 quality % at this).

Blow when paying sulfuric acid A to bad color filter 11, carry out as Fig. 1 (A) and use sulfuric acid treatment device 23 shown in Figure 3.

This sulfuric acid treatment device 23 have above the bad color filter 11 configuration a plurality of Jetspray nozzles (below, simply be called nozzle) 24, each nozzle 24 roughly equally spaced is set, with the device of a plurality of supplies of disposing on the direction of the conveyance direction orthogonal of bad color filter 11 with pipe arrangements 25 in the bottom.In addition, not special limits nozzle 24 the position is set, for example being provided with at interval of nozzle can be set to more than or equal to 10mm, smaller or equal to 500mm, preferred lower limit is 30mm, 50mm more preferably, on be limited to 300mm, 200mm more preferably.

In addition, be limited to 90 degree (with respect to the vertical direction at the surface or the back side of bad color filter 11) on the nozzle angle degree with respect to bad color filter 11, be limited to 10 degree down, be preferably 30 degree, more preferably 45 degree.At this moment, the amount of blowing the sulfuric acid A that pays from a nozzle be for example more than or equal to 0.1 liter/minute, smaller or equal to 30 liters/minute.

Like this, because each nozzle 24 is installed in towards the state (or plumbness) that rear side (upstream side) tilts downwards and supplies with on the pipe arrangement 25, so the surface of the bad color filter 11 that conveyance is come is blown from the top rake top of bad color filter 11 (or directly over) and to be paid the sulfuric acid A (with reference to figure 1 (A)) that the discharge opening by each nozzle 24 blows out.

In addition, sulfuric acid treatment device 23 is configured in the below of conveyance roller 21, be the below of bad color filter 11, have the recyclable receiving vessel 27 that blows the reduced width downwards of paying the treating fluid 26 that falls after on the bad color filter 11, in this receiving vessel 27, store the hold-up tank 28 of the treating fluid 26 that reclaims.

At this, the circulation of supplying with sulfuric acid A by circulation connects with pump 29 to be supplied with pipe arrangement 25 and hold-up tank 28, in supplying with pipe arrangement 25 filtrator 30 of removing impurity is set.

Thus, be adjusted to the concentration of above-mentioned setting after, with the treating fluid of storing in the hold-up vessel 28 26, deliver to filtrator 30 by the pump 29 of circulation usefulness, remove from forming residue or the impurity that thing is peeled off by this filtrator 30.Then, the sulfuric acid A that will remove residue or impurity once more with pipe arrangement 25 by supply delivers to Jetspray nozzle 24, blows and pays to bad color filter 11.Like this, because can reuse sulfuric acid A, thus economical, also prevent ecological deterioration simultaneously along with the discarded generation for the treatment of fluid 26.

In addition, by by circulation with pump 29 with treating fluid 26 force feeds (pressurization) stored in the hold-up vessel 28 to nozzle 24 sides, can supply with a plurality of nozzles 24 that use pipe arrangement 25 from each and spray sulfuric acid A.Thus,,, pay on transparency electrode 13 and resin molding 14, the part of transparency electrode 13 and resin molding 14 is removed from glass substrate 12 so sulfuric acid A blows owing to form from the flow of liquid of the sulfuric acid A of oblique upper outflow for the bad color filter 11 that conveyance comes.

In addition, blowing pair sulfuric acid to bad color filter 11 also can be to use sulfuric acid treatment device shown in Figure 4 31 to carry out.It should be noted that, award identical number with above-mentioned sulfuric acid treatment device 23 identical materials.

This sulfuric acid treatment device 31, to the position that the discharge opening of said nozzle 24 floods in sulfuric acid (treating fluid 26), have the substrate dipping tank 32 that can store sulfuric acid, configuration is used for the conveyance roller 21 of the bad color filter 11 of conveyance on the downside in this substrate dipping tank 32.

In addition, be connected with pump 29 by circulation with pipe arrangement 25 with each nozzle 24 set a plurality of supply because be provided with the bottom of substrate dipping tank 32, so, can reuse sulfuric acid by the operation of circulation with pump 29.

At this, use circulation with pump 29,, can supply with a plurality of Jetspray nozzles 24 with pipe arrangement 25 from each sulfuric acid is ejected into the interior sulfuric acid of basic dipping tank 32 to Jetspray nozzle 24 sides by force feed sulfuric acid.Thus,, pay on transparency electrode 13 and resin molding 14, can remove the part of transparency electrode 13 and resin molding 14 from glass substrate 12 so sulfuric acid blows because the bad color filter 11 next with respect to conveyance forms the sulfuric acid liquid stream from oblique upper.

In addition, because in the sulfuric acid that bad color filter 11 is stored in the substrate dipping tank 32 by conveyance, pay so be not only Jetspray nozzle 24 blowing of ejection sulfuric acid, and bad color filter 11 integral body floods the contact processing in sulfuric acid.

In addition, because the sulfuric acid that uses is a large amount of,, but, the hold-up tank of adjusting concentration may be set also as required as above-mentioned sulfuric acid treatment device 23 so the change of concentration is little.

Sulfuric acid A is the highly acid acid of dissolving transparency electrode, and when its concentration surpassed 95 quality %, sulfuric acid A did not almost have as the effect of acid, and removing transparency electrode needs the time long.On the other hand, when concentration is lower than 1 quality %, can not expect almost that removing transparency electrode equally needs the time long as the effect of acid.

Therefore, sulfuric acid A has the effect as acid, in order to remove transparency electrode in shorter time, the concentration limit value of sulfuric acid A is 1 quality %, is preferably 10 quality %, more preferably 20 quality %, be limited to 95 quality % on it, be preferably 70 quality %, more preferably 50 quality %.

In addition, this sulfuric acid A be warmed up to predetermined temperature promptly more than or equal to 20 ℃ smaller or equal to boiling point (is 80 ℃ at this), but also can be in room temperature.

At this, the temperature by sulfuric acid A more than or equal to 20 ℃ smaller or equal to boiling point, can further improve the effect of sulfuric acid A as acid.

Therefore, in order to improve the efficient of removing of transparency electrode, the lowest temperature value of sulfuric acid A is 20 ℃, is preferably 50 ℃, and more preferably 70 ℃, its higher limit is a boiling point, is preferably 95 ℃, more preferably 90 ℃.

In addition, also can adjust this intensification by the sulfuric acid A that heats above-mentioned concentration, the exothermic reaction that produces when still preferably utilizing by the water dilute sulphuric acid is adjusted.

Thus, with part or all dissolving that sulfuric acid A makes the transparency electrode 13 that is exposed to be covered on outside transparency electrode 13 and its surface alignment film 18 or clearance wall 19, remove from glass substrate 12.

Secondly, in the liquid cutting process, remove the sulfuric acid A that adheres on the surface of the bad color filter 33 that has been removed attached to part or all of transparency electrode 13.

At this, cut between the roller 34,35 by liquid by making bad color filter 33, remove attached to the sulfuric acid A on the bad color filter 33.It is that conveyance roller 21 above-below directions that are configured to the bad color filter 33 of clamping conveyance dispose relatively that described liquid is cut roller 34,35 configuration modes.

Then, in secondary sulfuric acid treatment operation, on the face side of the bad color filter 33 of having removed most sulfuric acid A, concentration than sulfuric acid A is higher, with the concentration difference of sulfuric acid A be smaller or equal to 80 quality % more than or equal to 5 quality %, preferred lower limit is 20 quality %, 30 quality % more preferably, higher limit is 70 quality % on the other hand, 60 quality % more preferably, with the concentration of sulfuric acid A corresponding more than or equal to 50 quality % smaller or equal to the sulfuric acid B of 100 quality % (is 98 quality % at this) blown for example pay more than or equal to 5 seconds, smaller or equal to 5 minutes about.In addition, do not limit especially sulfuric acid B Jetspray nozzle 24 the position is set, preferably with the Jetspray nozzle 24 of above-mentioned sulfuric acid A that the position is set is identical.At this moment, from 1 nozzle blow the sulfuric acid B amount of paying be for example more than or equal to 0.1 liter/minute, smaller or equal to 30 liters/minute.

At this, blow the sulfuric acid B that pays bad color filter 33 and use above-mentioned sulfuric acid treatment device 23 shown in Figure 3 or sulfuric acid treatment device 31 shown in Figure 4 to carry out.

This sulfuric acid B has dewatered dehydration from resin, when its concentration is lower than 50 quality %, almost can not expect dehydration, and removing resin needs long-time.

Therefore, sulfuric acid B has dehydration, and in order to remove resin in shorter time, the lower limit of the concentration of sulfuric acid B is 50 quality %, is preferably 90 quality %, 96 quality % more preferably, and its higher limit is 100 quality %, is preferably 98 quality %.

In addition, the identical predetermined temperature that is warmed up to of sulfuric acid B with above-mentioned sulfuric acid A, promptly more than or equal to 20 ℃, smaller or equal to boiling point (is 80 ℃ at this), but also can be room temperature.Thus, can further improve the dehydration of sulfuric acid B.

By above-mentioned processing, it is resin molding 14 that processed is removed the resinous black matrix 15, colored resist 16, protective film 17, alignment film 18 and the clearance wall 19 that form on the bad color filter 33.

At this, for the bad color filter 33 that conveyance comes, sulfuric acid B is blown to be paid on resin molding 14, by this impact, can remove resin molding 14 from glass substrate 12.

Like this, the processing of carrying out with acid has a plurality of operations, and sulfuric acid A, B are promptly used in the different multiple acid of working concentration in each operation, handle bad color filter 11, remove transparency electrode 13 and resin molding 14 successively from glass substrate 12.

In addition, while the conveyance that can carry out bad color filter to the processing of bad color filter with sulfuric acid carry out, Yi Bian temporarily stop also can to handle in addition the time.

In addition, as acid, also may use mineral acid and organic acid any one or two kinds of.At this, so-called mineral acid be based on sulfuric acid, nitric acid, hydrochloric acid, phosphoric acid, hydrobromic acid acid and hydroiodic acid acid any or more than or equal to two kinds acid, so-called organic acid be based on oxalic acid, acetate and formic acid any or more than or equal to two kinds acid.At this moment, in working concentration different multiple whens acid in each operation, the kind of acid can be identical, also can change in addition, and acid concentration also can be identical.

In addition, preferably in an above-mentioned sulfuric acid treatment operation, replace sulfuric acid A to use mineral acid or organic acid to carry out the processing of removing of transparency electrode 13, in secondary sulfuric acid treatment operation, replace sulfuric acid B, use the acid that contains sulfuric acid at least to carry out the processing of removing of resin molding 14.

At this, for example be formed under the situation of the acid that removing of transparency electrode 13 use in the processing with sulfuric acid and hydrochloric acid, can in the metal oxide film that transparency electrode contained, add reduction reaction, for example with only compare, can in shorter time, remove transparency electrode by the situation of sulfuric acid treatment.At this moment, the higher limit of sulfuric acid concentration of acid is 95 quality %, is preferably 70 quality %, 50 quality % more preferably, and lower limit is 1 quality % on the other hand, is preferably 10 quality %, more preferably 20 quality %.In addition, the higher limit of concentration of hydrochloric acid of acid is 30 quality %, is preferably 20 quality %, 10 quality % more preferably, and lower limit is 0.1 quality % on the other hand, is preferably 1 quality %, more preferably 2 quality %.

In addition, for example be formed under the situation of the acid that removing of resin molding 14 use in the processing, can attachedly give the resin molding decomposition reaction, for example with only compare, can in shorter time, remove resin molding with the situation of sulfuric acid treatment by sulfuric acid and nitric acid.At this moment, the higher limit of sulfuric acid concentration of acid is 95 quality %, is preferably 50 quality %, 30 quality % more preferably, and lower limit is 1 quality % on the other hand, is preferably 5 quality %, more preferably 10 quality %.In addition, the higher limit of concentration of nitric acid of acid is 35 quality %, is preferably 33 quality %, 30 quality % more preferably, and lower limit is 1 quality % on the other hand, is preferably 5 quality %, more preferably 10 quality %.

Though the situation of sulfuric acid and hydrochloric acid, sulfuric acid and nitric acid is used in explanation respectively here, even under other sour situation of use, also can be used with same concentration adjustment.

In sulfuric acid treatment operation and secondary sulfuric acid treatment operation, can in any acid of using, mix and use oxygenant, use oxygenant but mix in the acid of preferably in secondary sulfuric acid treatment operation, using.As this oxygenant, can use any of for example hydrogen peroxide, ammonium persulfate and Ozone Water or more than or equal to two kinds.Thus, carried out organic oxidative decomposition, and only compared, can in shorter time, be removed resin molding by acid-treated situation by oxygenant.

At this, the mixed liquor that mixes as the hydrogen peroxide of oxygenant is described in sulfuric acid.

The higher limit of sulfuric acid concentration is 99 quality % in the mixed liquor, is preferably 96 quality %, 94 quality % more preferably, and lower limit is 50 quality % on the other hand, is preferably 70 quality %, more preferably 90 quality %.In addition, the higher limit of the concentration of hydrogen peroxide in the mixed liquor is 20 quality %, is preferably 10 quality %, 5 quality % more preferably, and lower limit is 0.1 quality % on the other hand, is preferably 1 quality %, more preferably 2 quality %.

In addition, mix the situation of other oxygenant, also can be used with the concentration adjustment identical with hydrogen peroxide.

In addition, mixed surfactant in any acid that can use in sulfuric acid treatment operation and secondary sulfuric acid treatment operation uses but mix in the acid of preferably using in secondary sulfuric acid treatment operation.As this surfactant, for example can use the surfactant of fluorine class.In addition, the surfactant as this fluorine class has for example perfluoroalkyl carboxylate, perfluoroalkyl ammonium salt or perfluoroalkyl front three ammonium second lactone (betaine).

At this, the mixed liquor that has mixed fluorine class surfactant in sulfuric acid is described.

The higher limit of sulfuric acid concentration is 99 quality % in the mixed liquor, is preferably 96 quality %, 94 quality % more preferably, and lower limit is 50 quality % on the other hand, is preferably 90 quality %, more preferably 92 quality %.In addition, in the mixed liquor fluorine class surfactant concentration on be limited to 10 quality %, be preferably 5 quality %, 3 quality % more preferably, lower limit is 0.1 quality % on the other hand, is preferably 0.5 quality %, more preferably 1 quality %.Thus, the impregnability of soup improves, and owing to improve fissility by interfacial tension, thus with only compare with the acid cleaning, can in shorter time, remove resin molding.

In the liquid cutting process that then carries out, identical with said method, removed by the clamping conveyance resin molding 14 glass substrate 36 conveyance roller 21 and cut between the roller 37,38 to relatively being configured in liquid with upper and lower, glass substrate 36 is passed through, remove attached to the sulfuric acid B on the glass substrate 36.

Then, remove in the operation, cut the upper and lower surface of the glass substrate 36 behind the sulfuric acid B, blow Fu Shangshui or pure water by a plurality of Jetspray nozzles 39 for liquid at soup.Though sulfuric acid and water contact heating, because the sulfuric acid B that adheres on the glass substrate 36 removes its major part by the liquid cutting process, so the sulfuric acid B adhesion amount of glass substrate 36 is deniers.Therefore, even blow Fu Shangshui or pure water on the glass substrate after liquid is cut 36, but the rising rapidly of glass substrate 36 temperature is relaxed, according to circumstances, also can compare and on glass substrate 36, blow the sulfuric acid of paying low concentration successively with the sulfuric acid B that uses, after the sulfuric acid B that adheres on the glass substrate 36 is fully diluted, blow Fu Shangshui or pure water.

The processing of bad glass substrate then, is described.

At this, so-called bad glass substrate is meant to have in color filter manufacturing process, for example because the contact of the improper generation of conveyance wound, the pattern vestige that etch produces in the alkali imaging liquid (more than be the concavo-convex example that glass baseplate surface produces in color filter manufacturing process), residual attachment on the glass substrate, and the product that combines with glass substrate of the coupling agent that contains in the resist (glass substrate and form an example of the reactant of thing) any or two or more glass substrate.

Shown in Fig. 1 (B), in grinding step, removing bad glass substrate after operation finishes from soup, to be that glass substrate 36 is removed above-mentioned bad.When this grinding, use lapping device 41 to carry out.

It is a plurality of upside brushes 42 that this lapping device 41 has while an example of the grinding means of rotating the uper side surface that shakes glass substrate 36, configuration is a plurality of downside brushes 43 while rotate an example of the grinding means of the downside surface that shakes glass substrate 36 between the conveyance roller 21 adjacent with glass substrate 36 conveyance directions.In addition, while also can rotate for a plurality of upside brushes 42 and downside brush 43 and to shake glass substrate 36.

If to not damage of glass substrate 36, the material of this each brush 42,43 is not particularly limited, and can use for example carbamate, nylon, polypropylene.In addition, each brush also can use the brush of the lapping compound that for example contains cerium oxide and aluminium oxide.

Upside brush 42 can be removably mounted on the turning axle 45 that the bottom of the fixed station 44 that shakes on the Width of glass substrate 36 is mounted revolvably.Downside brush 43 also can be removably mounted on the rotation axis 47 that the top of the fixed station 46 that shakes on the Width of glass substrate 36 is mounted revolvably in addition.

In addition, on the length direction of each fixed station 44,46, can dispose a plurality of each rotation axis 45,47 as required, and can the multiple row configuration.

On the conveyance direction of glass substrate 36, the upstream side of each brush 42,43 be provided for from above blow and pay the lip-deep nozzle 48 of lapping compound at glass substrate 36.At this, can use for example cerium oxide (CeO) as lapping compound, in use, use in water, added cerium oxide (concentration of cerium oxide be for example more than or equal to 1 quality %, smaller or equal to 30 quality %) slurry.

Use this lapping device 41, with glass substrate 36 conveyances to each nozzle 48 the position is set the time, blow the lapping compound of paying pulpous state from 48 pairs of glass substrates 36 of each nozzle, and conveyance to each brush 42,43 the position is set the time, by shaking each brush 42,43 while rotating, to the uper side surface of glass substrate 36 or up and down the surface, two sides grind.In addition, when grinding, grind cut glass substrate 36 for example be ground to more than or equal to 0.001 μ m, smaller or equal to about 5 μ m.

Thus, can remove concavo-convex (damage and the pattern vestige any or two kinds) on glass substrate 36 surfaces that produce in residual attachment (for example forming the residue and the pollution of thing) on the glass substrate 36, the color filter manufacturing process, and the reactant of resin molding and glass substrate 36.

Secondly, in matting,, for example water is blown and pay to the two sides of having removed attachment or concavo-convex glass substrate 50, remove the lapping compound that adheres on glass substrate 50 surfaces by a plurality of Jetspray nozzles 39 of single type cleaning machine 49.At this, can for example use the water that contains gas or surfactant, use to add hyperacoustic water, and can and use the brush with above-mentioned brush 42,43 identical formations.

In addition, above-mentioned grinding step and matting repeat repeatedly (at this twice) respectively carries out, and also can be 1 time.

In order to the glass substrate 51 of last method cleaning, by for example removing the moisture of attachment removal, the basic glass of regenerating with air knife or exsiccator.

Embodiment

Below, the embodiment that carries out in order to confirm action effect of the present invention is described.

At first, moving in the operation of bad color filter, the bad color filter that has formed transparency electrode and resin molding on the glass substrate is positioned on the conveyance roller of roller conveyor, in sulfuric acid treatment operation, be warmed up to 80 ℃ treating fluid X with official hour blow pay after, wash processing.

Then, the bad color filter after handling for washing, in secondary sulfuric acid treatment operation, be warmed up to 80 ℃ treating fluid Y with official hour blow pay after, wash processing.

Then, in grinding step, the cerium oxide concentration that will in water, add cerium oxide adjust to 10 quality % for the lapping compound limit of pulpous state is added on the bad glass substrate, the grinding of bad glass substrate is carried out by the poly-resinous disk brush of propylhomoserin (grinding means) in the limit.

Then, Yi Bian blow pair clean-out system that contains surfactant to the glass baseplate surface that finishes to grind, Yi Bian remove attached to the lapping compound on the glass substrate by the disk brush of nylon system.

And, after in the cleaning machine of single mode, cleaning, obtain glass substrate by air knife drying (moisture is removed operation).

Observe the glass substrate of this regeneration by visual, optical microscope and high brightness lamp, observe the transparency electrode that on glass base plate for color filter, forms and the Restzustand of resin molding.

By the order shown in above, the treatment conditions and the result of bad color filter has been shown in the embodiment of table 1 1-7.

In addition, as treatment conditions, set the composition for the treatment of fluid X, Y respectively, it blows the method for paying (in the liquid: blow by above-mentioned sulfuric acid treatment device 31 and to pay; Spray: blow by above-mentioned sulfuric acid treatment device 23 and pay), and the processing time, confirm that respectively result is residual situation and other (for example, the damage of glass substrate, reactant and the pattern vestige) of the residual situation of transparency electrode, resin molding.

At this, carry out with the conveyance mode of embodiment 1-7, be the different conveyance in batch of single conveyance, the result who handles behind the bad color filter has been shown in table 1 as a comparative example.

[table 1]

Shown in embodiment 1-7, by carrying out the processing of bad color filter in single mode, not residual transparency electrode and resin molding do not have damage, shortcoming and the fuzzy defective of glass substrate, can confirm to obtain the plain glass substrate of better quality.

On the other hand, because comparative example carries out the processing of a plurality of bad color filters by becoming batch mode, so can not handle the thin of glass substrate, residual transparency electrode, resin molding and pattern vestige can not have good quality on the glass substrate after the regeneration.

Like this, by adopting renovation process of the present invention, the glass substrate that the quality of regenerating is good, and because can in shorter time, handle bad color filter than situation about having, so can carry out a large amount of processing of bad color filter.

More than, the reference implementation mode illustrates the present invention, but the present invention does not limit the formation of putting down in writing in above-mentioned any embodiment, also is included in other embodiment or the variation considered in the item scope of record in the scope of patent request.For example, the combination of part or all of above-mentioned each embodiment and variation, and the situation that constitutes the renovation process of glass base plate for color filter of the present invention is also contained in the interest field of the present invention.

In addition, in the above-described embodiment, successively to using the sulfuric acid of two kinds of concentration, removing the transparency electrode that is formed on the glass substrate and the situation of resin molding respectively is illustrated, but, according to the material of transparency electrode that forms on the glass substrate and resin molding, the concentration of sulfuric acid also can be for more than or equal to three kinds.In addition, as mineral acid, use any of sulfuric acid, nitric acid, hydrochloric acid, phosphoric acid, hydrobromic acid acid and hydroiodic acid acid or,, use any of oxalic acid, acetate and formic acid or two or more situation too too in addition as organic acid more than or equal to two kinds situation.

In the above-described embodiment, the sulfuric acid that uses two kinds of concentration is described, on glass substrate, having formed the situation that the bad color filter of black matrix, colored resist, diaphragm, transparency electrode, alignment film and clearance wall for example carries out Regeneration Treatment.But also can use two kinds or more than or equal to the sulfuric acid of two kinds of concentration; to the bad color filter that in manufacture process, produces, promptly form any of for example black matrix, colored resist, diaphragm, transparency electrode, alignment film and clearance wall on the glass substrate or carry out Regeneration Treatment more than or equal to two kinds bad color filter.

And, illustrated that in the above-described embodiment each the horizontal conveyance of bad color filter carries out the situation of Regeneration Treatment, but also can a plurality of horizontal conveyances arranged side by side carry out Regeneration Treatment, can not the bad color filter of horizontal conveyance in addition, but carry out Regeneration Treatment with vergence direction or vertical direction (the 90 degree directions that surpass 0 degree) the bad color filter of conveyance.In addition, the maintenance angle during bad color filter conveyance can be level, inclination with vertical any.

[table 1]

		The conveyance mode	A sulfuric acid treatment operation			Secondary sulfuric acid treatment operation			The high brightness lamp check result (zero: noresidue, *: have residual)
												Treating fluid X	Method	Processing time	Treating fluid Y	Method	Processing time	Transparency electrode	Resin molding	Other
			Embodiment	1	Individual	50 quality % sulfuric acid	In the liquid	30 seconds	98 quality % sulfuric acid	In the liquid	30 seconds										○	○	○
2	Individual	50 quality % sulfuric acid										Spraying	30 seconds	98 quality % sulfuric acid	Spraying	30 seconds	○	○	○
				3	Individual	50 quality % sulfuric acid	Spraying	30 seconds	92 quality % sulfuric acid, 2 quality % aquae hydrogenii dioxidis	Spraying	20 seconds									○	○	○
4	Individual	50 quality % sulfuric acid										Spraying	30 seconds	95 quality % sulfuric acid, 1 quality % surfactant	Spraying	20 seconds	○	○	○
				5	Individual	50 quality % sulfuric acid	Spraying	30 seconds	91 quality % sulfuric acid, 5 quality % nitric acid	Spraying	20 seconds									○	○	○
6	Individual	23 quality % sulfuric acid, 27 quality % hydrochloric acid										Spraying	20 seconds	98 quality % sulfuric acid	Spraying	20 seconds	○	○	○
				7	Individual	23 quality % sulfuric acid, 27 quality % hydrochloric acid	Spraying	20 seconds	95 quality % sulfuric acid, 1 quality % surfactant	Spraying	20 seconds									○	○	○
Comparative example		In batch										98 quality % sulfuric acid	Dipping	10 minutes	-	-	-	×	×				×

Claims (21)

1, a kind of renovation process of glass base plate for color filter,

In the method for the bad color filter repeat glass substrate that in by color filter manufacturing process, produces, it is characterized in that:

In acid, remove the formation thing on the above-mentioned glass substrate by using the above-mentioned bad color filter of conveyance means conveyance on one side temporarily to stop above-mentioned bad color filter on one side, carry out above-mentioned glass substrate regeneration.

2, the renovation process of glass base plate for color filter according to claim 1, the conveyance that it is characterized in that above-mentioned bad color filter are one or more arranged side by side, along level, inclination and vertical this bad color filter of any one direction conveyance.

3, the renovation process of glass base plate for color filter according to claim 2, the black matrix (black matrix) that it is characterized in that above-mentioned bad color filter with resin as main body, remove the formation thing on the above-mentioned glass substrate that contains this black matrix with above-mentioned acid, with the basic glass of this glass substrate regeneration.

4, the renovation process of glass base plate for color filter according to claim 3 is characterized in that forming thing and carrying out on this formation thing by above-mentioned acid being blown pay removing on the above-mentioned glass substrate.

5, the renovation process of glass base plate for color filter according to claim 4, it is characterized in that blowing of above-mentioned acid paid by pressurization and sprayed this acid carries out.

6, the renovation process of glass base plate for color filter according to claim 5, Yi Bian it is characterized in that use the reactant that rotates concavo-convex and above-mentioned glass substrate that the grinding means of shaking remove the above-mentioned glass baseplate surface that produces in attachment residual on the above-mentioned glass substrate with above-mentioned acid treatment, the manufacturing process at above-mentioned color filter and above-mentioned formation thing on the above-mentioned relatively glass baseplate surface any or more than or equal to two kinds.

7, the renovation process of glass base plate for color filter according to claim 6 is characterized in that by above-mentioned grinding means also using the lapping compound of pulpous state when above-mentioned glass baseplate surface grinds.

8, the renovation process of glass base plate for color filter according to claim 7 is characterized in that hybrid oxidant in above-mentioned acid.

9, the renovation process of glass base plate for color filter according to claim 7 is characterized in that mixed surfactant in the above-mentioned acid.

10, the renovation process of glass base plate for color filter according to claim 9 is characterized in that above-mentioned surfactant is the surfactant of fluorine system.

11, the renovation process of glass base plate for color filter according to claim 10 is characterized in that above-mentioned acid is warmed up to predetermined temperature.

12, the renovation process of glass base plate for color filter according to claim 11, it is characterized in that said temperature be more than or equal to 20 ℃, smaller or equal to boiling point.

13, the renovation process of glass base plate for color filter according to claim 12 is characterized in that the processing with above-mentioned acid is a plurality of operations, and each operation has concentration or diverse multiple acid, removes the above-mentioned formation thing on the above-mentioned glass substrate thus.

14, the renovation process of glass base plate for color filter according to claim 13, it is characterized in that above-mentioned formation thing contains transparency electrode and resin molding, in each operation, carry out handling and based on the processing of removing of above-mentioned resin molding based on removing of this transparency electrode.

15, according to the renovation process of any one described glass base plate for color filter of claim 1-14, it is characterized in that above-mentioned acid is that mineral acid and organic acid are any or two kinds, above-mentioned mineral acid is with containing any of sulfuric acid, nitric acid, hydrochloric acid, phosphoric acid, hydrobromic acid and hydroiodic acid or constitute more than or equal to two kinds acid, and above-mentioned organic acid is with containing any of oxalic acid, acetate and formic acid or constituting more than or equal to two kinds acid.

16, the renovation process of glass base plate for color filter according to claim 14 is characterized in that above-mentioned resin molding removes the above-mentioned acid of using in the processing and contain sulfuric acid.

17, the renovation process of glass base plate for color filter according to claim 16 is characterized in that the above-mentioned acid that removing of above-mentioned transparency electrode used in the processing is with any of sulfuric acid, nitric acid, hydrochloric acid, phosphoric acid, hydrobromic acid and hydroiodic acid or more than or equal to two kinds of mineral acids as main body.

18, the renovation process of glass base plate for color filter according to claim 16 is characterized in that it is based on any in oxalic acid, acetate and the formic acid or more than or equal to two kinds organic acid that above-mentioned transparency electrode is removed employed above-mentioned acid in the processing.

19, the renovation process of glass base plate for color filter according to claim 14, it is characterized in that sulfuric acid A, B that above-mentioned a plurality of acid is two kinds of concentration, because the concentration difference of this sulfuric acid A, B is more than or equal to 5 quality %, smaller or equal to 80 quality %, and the concentration height of this sulfuric acid of concentration ratio A of this sulfuric acid B, use this sulfuric acid A carry out above-mentioned transparency electrode remove processing after, use above-mentioned sulfuric acid B to carry out the processing of removing of above-mentioned resin molding.

20, the renovation process of glass base plate for color filter according to claim 19, the concentration that it is characterized in that above-mentioned sulfuric acid A are more than or equal to 1 quality %, smaller or equal to 95 quality %.

21, the renovation process of glass base plate for color filter according to claim 19, the concentration that it is characterized in that above-mentioned sulfuric acid B are more than or equal to 50 quality %, smaller or equal to 100 quality %.

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