CN1794028A - Optical fiber arranging and packing equipment in optical fiber array component element - Google Patents
Optical fiber arranging and packing equipment in optical fiber array component element Download PDFInfo
- Publication number
- CN1794028A CN1794028A CN 200510120582 CN200510120582A CN1794028A CN 1794028 A CN1794028 A CN 1794028A CN 200510120582 CN200510120582 CN 200510120582 CN 200510120582 A CN200510120582 A CN 200510120582A CN 1794028 A CN1794028 A CN 1794028A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- substrate
- bar
- subtegulum
- cover plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
A device for laying out and packaging optical fibers in optical fiber array component is prepared as setting reference base plate on adjustable rack, bottom substrate spacing table plane on support column of reference plane; setting flexible top substrate - carry plane on reference base plate, a pair of side direction spacing block on right and left side of bottom substrate spacing table; setting an air suction tube guide system and microscope monitoring system above top cover plate and CCD monitoring system in front of reference base plate.
Description
Technical field
The invention belongs to optical communication, optoelectronic device, light field of interconnect technologies, relate to optical fiber discharging sealed in unit in the optical-fiber array assembly.
Background technology
In recent years, because the fast development of optical communication and light interconnection technique is used for various new type of passive devices of message area and active device emerge in multitude.The array optical electronic chip of various uses particularly, multiplexing as passive AWG, the demultiplexing chip, slab guide beam splitter chip, MEMS micro photo-electro-mechanical switch chip, with surface-emission laser array VCSEL chip, light-receiving PIN chip etc. is succeeded in developing in succession, said chip will encapsulate when being made into practical devices, the input and output coupling interface of the optical-fiber array assembly of very high degree of precision as optoelectronic device must be arranged, with each the bar light-path in the above-mentioned opto chip, aim at accurately with corresponding each bar optical fiber strictness in the optical-fiber array assembly, light signal could be imported, output is made into practical devices steady in a long-term.The encapsulation technology of above-mentioned device is to guarantee the key of the superior optical characteristics of device, simultaneously, also is the highest part in quality-determining, efficient and the cost.Because above chip all adopts photoelectron technology to be developed into, so the encapsulation technology of device must be complementary with the positional precision of photoetching lines to the accuracy requirement of each bar fiber position in the optical-fiber array assembly.Moreover, also need optical fiber head is processed into the shape of various needs such as 8 °, 45 ° simultaneously.Fiber array all is to adopt on the particular crystal orientation silicon chip at present, corrode some parallel V-shaped grooves, or adopt accurate machine cuts technology on parallel planar substrates, to carve some parallel V-shaped grooves, each bar optical fiber is embedded in the V-shaped groove, with the surface of V-shaped groove inside surface, be made into optical-fiber array assembly as each bar optical fiber of location.Adopt in the localization method of V-shaped groove inside surface as each bar optical fiber of location, the bearing accuracy of optical fiber is relevant with the process precision that the degree of depth and the inside surface of the V-shaped groove of corrosion shaping are shaped, and influences the fiber orientation precision.Though optical fiber be easier to the discharging, still, precision is relatively poor, when device encapsulated, yield rate was low.The V-shaped groove substrate precision that carves with precision optical machinery is low, also has one simultaneously how with the problem of N bar optical fiber high precision discharging.
We are at patent " optical fibre array positioning assembly " application number: in 01133513.0, proposed on parallel planar substrates, to etch the parallel Baltimore groove of N bar, precision and the efficient that guarantees the optical fiber discharging adopts each bar Baltimore groove surface two side line and optical fiber upper surface, each bar optical fiber method of the three-way location of upper cover plate lower surface osculatory, in order to have special optical fiber exhaust apparatus.For this reason, we are among the 200410012970.x at patent " optical fiber discharge method and equipment thereof in the fiber array " application number, have given description to the method for optical fiber discharging and the principle of its equipment.The part and this equipment also comes with some shortcomings sometimes, can not make each bar optical fiber can both be positioned on aforesaid three position lines fully.
The invention technology
The present invention is in the optical fiber discharge process, guarantee fully each bar optical fiber all be positioned at Baltimore groove surface two side lines and optical fiber upper surface, upper cover plate lower surface osculatory three-way on, a kind of new optical fiber discharging sealed in unit is provided.In the process of discharging optical fiber, equipment guarantees that fully each bar optical fiber all is positioned on aforesaid three position lines, the V-shaped groove substrate that carves with precision optical machinery, guarantee that fully each bar optical fiber all is positioned at the osculatory of V-shaped groove two inside surfaces, upper cover plate and optical fiber, has improved the qualification rate of product greatly.
Technical scheme of the present invention is:
Optical fiber discharging sealed in unit in the optical-fiber array assembly, comprise with the lower part: the substrate table-board components is carried on the top on the flexibility, removable side direction limited block 015, pump-line 007, the visible system 020 of downward high definition microscope surveillance 021 and monitoring fiber array end face, 019 of adjustable tripod, benchmark base plate 018 is formed, benchmark base plate 018 places on the adjustable tripod 019, a top year substrate table-board components is placed on the benchmark base plate 018 on the flexibility, subtegulum limiting stand 014 plane of top year substrate table-board components is shelved on the support column of reference plane on the flexibility, left and right sides at subtegulum limiting stand 014, assemble a pair of side direction limited block 015 that walks abreast mobile, above upper cover plate 003, assemble an exhaust tube guiding systems 007, a surface-mounted lute 008 of its port closely contacts with upper cover plate 003 upper surface, the downward high definition microscope surveillance 021 of assembling above upper cover plate 003, the front of benchmark base plate 018 are placed one and are observed the whether strict CCD surveillance 020 that is supported on straight line Baltimore groove surface two side lines and optical fiber and three lines of cover plate osculatory of each bar optical fiber.
Top year substrate table-board components is formed by moving catch bar 012 on steel ball 011 and the flexibility in last substrate limited block 016, subtegulum limiting stand 014, year substrate table top 009, the sleeve pipe on the described flexibility, carrying below the substrate table top 009 center has the garden post and places in the sleeve pipe, garden post lower surface is selected with the upper surface of steel ball 011 and is contacted, steel ball 011 lower surface with on move catch bar 012 the top end millet cake contact, carry and paste the anti-stress rubber 013 of one deck on the substrate 009, subtegulum 001 is placed on the anti-stress rubber 013.
Because of the present invention year substrate 009 and steel ball 011, steel ball 011 and last top screw rod 012 end face are to contact, on when screwing on top screw rod 012, make a substrate 009 power that moves up of carrying, and the support of carrying 009 pair of subtegulum of substrate is the flexible top power that goes up, it can make each the bar optical fiber in the lip-deep N bar optical fiber of subtegulum, fully strictly is supported on each bar Baltimore groove two side line and optical fiber and three lines of cover plate osculatory.Use equipment of the present invention the bearing accuracy of each bar optical fiber in the optical-fiber array assembly can be able to be reached 0.35 μ m, can produce a kind of optical-fiber array assembly of high bearing accuracy.The present invention can be widely used in optical communication, the parallel processing high-performance computer manufacturing of active and passive light electron device in the technology such as light interconnection.
Description of drawings
Fig. 1 locatees the synoptic diagram of each bar optical fiber for Baltimore groove.
Fig. 2 locatees the synoptic diagram of each bar optical fiber for V-shaped groove.
Fig. 3 is for locating the exhaust apparatus figure of each bar optical fiber based on three Support Level.
Fig. 4 is the optical fiber exhaust apparatus figure with flexible uplifting pressure.
Embodiment
" optical fibre array positioning assembly " patent No.: 01133513.0 patent has proposed the method for a kind of high-precision optical fiber location, as shown in Figure 1, at first, on parallel planar substrates 001, etch the parallel Baltimore groove 002 of N bar, for in injecting glue, encapsulation process, avoid the generation of bubble, in the patented claim 200510019455.9 Baltimore groove is modified into the straight line Baltimore groove of band guide channel.The spatial position precision of each bar Baltimore groove 002 surperficial two side line 005 is the precision of photoetching, about 0.2 μ m.In order to guarantee in encapsulation injecting glue process, between UV glue smooth and easy inflow optical fiber lower surface and the Baltimore groove, bar-shaped trough corrects the Baltimore groove for the band guide channel, each bar optical fiber still adopts straight shape Baltimore groove surface two side line 005 and optical fiber, cover plate osculatory 006 three-way localization method is produced optical-fiber array assembly, its principle as shown in Figure 1, the loam cake substrate is parallel planar substrates, subtegulum is band Baltimore groove etching substrate, each bar nuditing fiber is supported on Baltimore groove surface two side line 005 and optical fiber in the optical-fiber array assembly, between cover plate osculatory 006 is three-way, locatees each bar optical fiber fabrication and go out optical-fiber array assembly.But, want each bar optical fiber in the n bar optical fiber, be emitted on like clockwork simultaneously on each bar Baltimore groove surface two side line 005, but be a very difficult thing.The present invention is on the basis of each bar Baltimore groove surface two side line 005 of employing that above-mentioned patent proposes and optical fiber, each bar optical fiber method of cover plate osculatory 006 three-way location, or the V-shaped groove substrate that carves with precision optical machinery, guarantee that each bar optical fiber all is positioned at the principle of the osculatory of V-shaped groove two inside surfaces, upper cover plate and optical fiber, as shown in Figure 2.Further propose on the parallel Baltimore groove substrate of n bar and on the n bar V groove substrate, to discharge the method for n bar optical fiber and the schematic diagram of optical-fiber array assembly sealed in unit like clockwork simultaneously.
Because Fig. 1 adopts three Support Level localization methods based on each bar optical fiber, as not adopting special method, want each bar optical fiber accurately is emitted on each bar Baltimore groove surface two side line, it is very difficult producing optical-fiber array assembly, must propose a kind of accurate method of discharging n bar optical fiber simultaneously, just can produce this high-precision optical-fiber array assembly.Our application for a patent for invention of application number be among the 200410012970.x, proposes to discharge the schematic diagram of optical fiber, as shown in Figure 2.The cutting substrate is a subtegulum among Fig. 3, and the loam cake substrate can certainly be last substrate with the cutting substrate for parallel planar substrates, and parallel planar substrates places subtegulum.Before the discharging optical-fiber array assembly, the band guide channel straight line Baltimore groove substrate 001 of at first standby and cleaned etching is identical with the width of 003, two kind of substrate of parallel plane cover plate, and the length of upper cover plate is smaller than the about 5mm of subtegulum length.At an end that includes the little band of n bar parallel optical fibre, with the parallel optical fibre stripping machine plastics covering of each bar optical fiber is peeled off into the nuditing fiber core, its length is L, cleans standby.The optical fiber exhaust apparatus includes a pump drainage tracheae, and the end of its gas outlet is polished into a plane, and sealing rubber ring on the viscose glue.Gas outlet is installed in and includes on the adjustable micropositioning stage of a group of X, Y, Z and degree of tilt five dimensions, make gas outlet the end the sealing rubber ring plane five the dimension degree of freedom can regulate, it is parallel keeping upper and lower two substrates, and the clearance distance h between the upper and lower substrate is slightly larger than the external diameter 125 μ m of bare fibre.Make n bar optical fiber insert the slit swimmingly, and be emitted on separately Baltimore groove two side lines, as shown in Figure 2.Then, the adjustment upper cover plate moves down and adds a suitable point pressure, and each bar bare fibre is embedded on Baltimore groove surface two side lines and optical fiber and three Support Level of cover plate osculatory.When upper and lower substrate was adjusted fully, the slit h between the upper and lower substrate should satisfy following condition:
h＝125μm-δ。
δ is the degree of depth that bare fibre is imbedded Baltimore groove, and then, ultraviolet glue is annotated in the cover plate back from subtegulum, carries out photocuring.
A very big shortcoming is arranged in the method recited above, be difficult to exactly guarantee that fully upper and lower substrate is in parallel state fully.That is to say that be difficult to guarantee that each the bar optical fiber in the fiber array can both place on three Support Level, the qualification rate of product is lower.In order to overcome its shortcoming, the qualification rate of product is reached more than 90%, the present invention will number be on the basis of 200410012970.x in our application for a patent for invention of application, further be corrected, as shown in Figure 4.In this optical fiber exhaust apparatus crucial a bit, it is after optical fiber discharges fortunately on separately three Support Level fully, below the objective table of the upper and lower substrate of carrying, add a pressure that pushes up on can flexibility, so just can guarantee that each bar optical fiber can be supported on three Support Level fully in the fiber array.Based on above principle, the principle diagram design of its optical fiber exhaust apparatus is as follows.
According to as mentioned above, based on each bar Baltimore groove surface two side lines, 005 each bar optical fiber method of location, the principle of discharging n bar optical fiber is simultaneously developed the schematic diagram of corresponding optical-fiber array assembly making apparatus, as shown in Figure 4.Surface is that planar metal benchmark base plate 018 places on the adjustable tripod 019, and adjustable tripod is adjusted at horizontality with the benchmark base plate.Subtegulum limiting stand 014 plane is shelved on the support column of reference plane.On subtegulum limiting stand 014 plane, the substrate 009 that carries that the substrate table-board components is carried on the top on the flexibility is shelved on 014 of the subtegulum limiting stand.Carry and shelve the anti-stress rubber 013 of a slice on substrate 009 reference plane, place the straight line Baltimore groove substrate 001 of band guide channel on anti-stress rubber 013, upper cover plate 003 is shelved on straight line Baltimore groove substrate 001 substrate of band guide channel.To align in order making about 003 liang of substrate of Baltimore groove substrate 001 and upper cover plate,, to assemble a pair of side direction limited block 015 that walks abreast mobile at the left and right sides of subtegulum limiting stand 014.In order to make things convenient for discharge diameter between Baltimore groove substrate 001 and 003 liang of substrate of upper cover plate is the bare fibre of 125 μ m, above upper cover plate 003, assemble an exhaust tube guiding systems 007, a surface-mounted lute 008 of its port closely contacts with the upper cover plate upper surface, pipe is led when bleeding and upper cover plate can be carried a very small distance (h+ Δ) on concurrently, and this distance is subjected to upper limit position block 016 restriction.Must strictness be supported on straight line Baltimore groove surface two side lines and optical fiber and three lines of cover plate osculatory according to each bar bare fibre of fiber array patent, at this moment, the distance h between 003 liang of substrate of Baltimore groove substrate 001 and upper cover plate must satisfy following condition:
h＝125μm-δ
δ is the degree of depth that bare fibre is imbedded Baltimore groove, discharges optical fiber easily in order to make operating personnel, and at first, the distance adjustment between 003 liang of substrate of Baltimore groove substrate 001 and upper cover plate is the h+ Δ, and Δ is approximately greater than δ.Whether this distance can be from fiber end face between special supervision two substrates of placing previously, observe each bar optical fiber and can estimate on the strict CCD surveillance 020 that is supported on straight line Baltimore groove surface two side lines and optical fiber and three lines of cover plate osculatory.Whether a high definition microscopic system 021 is assembled in the top of optical fiber exhaust system, can clearly observe each bar optical fiber from microscopic system and be emitted on corresponding each bar Baltimore groove.After as operating personnel optical fiber being emitted on surface two side lines of corresponding Baltimore groove, can adjusting exhaust tube and lead port and slightly descend and go up substrate, each bar optical fiber is positioned substantially on surface two side lines and optical fiber and three lines of cover plate osculatory of corresponding Baltimore groove.
Because the accuracy requirement of fiber array is very high, be difficult to lead port and hold substrate by the adjustment exhaust tube, make upper and lower substrate parallel fully, thereby guarantee on surface two side lines and optical fiber and three lines of cover plate osculatory of each bar optical fiber entirely accurate ground discharging Baltimore groove.In order to guarantee that fully each bar optical fiber entirely accurate ground discharges surface two side lines of Baltimore groove and the purpose on optical fiber and three lines of cover plate osculatory, the substrate table-board components is carried on the top on the assembling one cover flexibility below subtegulum.Top year substrate table-board components is formed by moving catch bar 012 on steel ball 011 and the flexibility in last substrate limited block 016, subtegulum limiting stand 014, year substrate table top 009, the sleeve pipe on this flexibility, carrying below the substrate table top 009 center has the garden post and places in the sleeve pipe, garden post lower surface is selected with the upper surface of steel ball 011 and is contacted, steel ball 011 lower surface with on move catch bar 012 the top end millet cake contact, carry and paste the anti-stress rubber 013 of one deck on the substrate 009, subtegulum 001 is placed on the anti-stress rubber 013.Distance between rubber 013 surface and last substrate banking stop 016 lower surface is slightly larger than upper and lower substrate thickness sum+(125 μ m-δ), one very small distance _, this _ approximately less than δ.That is to say that after bare fibre was placed between the subtegulum, optical fiber may be limited between a Baltimore groove and the last substrate loosening, and can not move out outside the Baltimore groove.At this moment, the program that operating personnel discharge optical fiber is as follows: two substrates are shelved on and carry on substrate 009 table top at first up and down, upper and lower substrate end face alignment, and adjustment CCD surveillance 020 makes upper and lower substrate end face high-visible.Mobile side direction limited block 015 makes upper and lower substrate side carry on substrate 009 table top to neatly being shelved on, because the width of last substrate is slightly less than subtegulum, the adjustment exhaust tube is led port and is held substrate, and make and mention substrate banking stop 016 lower surface on the substrate, make the distance between upper and lower two substrates be (125 μ m-δ+Δ), this distance can make bare fibre insert in it, and is limited in the Baltimore groove.At this moment, by the high definition microscopic system of top, bare fibre can be inserted and go up between the subtegulum, and be emitted on corresponding each bar Baltimore groove.After N bar optical fiber inserts corresponding Baltimore groove, make the every end face of each bar optical fiber end same in one plane with last subtegulum.By adjusting CCD surveillance 020, can clearly observe each bar bare fibre port whether on two side lines of corresponding Baltimore groove.At last, adjust top screw rod 012 on the flexible flexibility that goes up in year substrate table-board components of top, each bar optical fiber strictness is supported on the both sides linear light optical fiber and three lines of cover plate osculatory of corresponding Baltimore groove.Owing to carry a substrate 009 and a steel ball 011, steel ball 011 and last top screw rod 012 end face are to contact.On when screwing on top screw rod 012, make a substrate 009 power that moves up of carrying.And carry substrate 009 and steel ball 011 is to contact, support to subtegulum is the flexible top power that goes up, it can make each the bar optical fiber in the lip-deep N bar optical fiber of subtegulum, fully strictly is supported on each bar Baltimore groove two side line and optical fiber and three lines of cover plate osculatory.
In order when annotating ultraviolet glue, not allow ultraviolet glue and side direction banking stop stick together, before annotating ultraviolet glue, two side direction banking stops are removed, then, the nuditing fiber part of the little magnetic tape trailer of parallel optical fibre portion above subtegulum is annotated ultraviolet glue again, and solidifies with UV-irradiation.At last, as required, end face is processed into 8 °, and 45 °, 90 °, or other shapes, polishing is made into the 1xN optical-fiber array assembly.
Optical fiber exhaust apparatus of the present invention and optical fiber discharge process are suitable for as shown in Figure 2 fully, the V-shaped groove substrate that adopts precision optical machinery to carve, locate the method for each bar optical fiber with V-shaped groove, guarantee that fully each bar fiber orientation is in the osculatory of each bar V-shaped groove two inside surface, upper cover plate and optical fiber.
Claims (3)
1, optical fiber discharging sealed in unit in the optical-fiber array assembly, comprise with the lower part: the substrate table-board components is carried on the top on the flexibility, removable side direction limited block (015), pump-line (007), the visible system (020) of downward high definition microscope surveillance (021) and monitoring fiber array end face, adjustable tripod (019) frame, benchmark base plate (018) is formed, it is characterized in that: benchmark base plate (018) places on the adjustable tripod (019), a top year substrate table-board components is placed on the benchmark base plate (018) on the flexibility, subtegulum limiting stand (014) plane of top year substrate table-board components is shelved on the support column of reference plane on the flexibility, left and right sides in subtegulum limiting stand (014), assemble a pair of side direction limited block (015) that walks abreast mobile, in upper cover plate (003) top, assemble an exhaust tube guiding systems (007), a surface-mounted lute (008) of its port closely contacts with upper cover plate (003) upper surface, in upper cover plate (003) top assembling downward high definition microscope surveillance (021), the front of benchmark base plate (018) is placed one and is observed the whether strict CCD surveillance (020) that is supported on straight line Baltimore groove surface two side lines and optical fiber and three lines of cover plate osculatory of each bar optical fiber.
2, optical fiber discharging sealed in unit according to claim 1, it is characterized in that: the substrate table-board components is carried by last substrate limited block (016) in the top on the described flexibility, subtegulum limiting stand (014), carry substrate table top (009), moving catch bar (012) in the sleeve pipe on steel ball (011) and the flexibility forms, carrying below the substrate table top (009) center has the garden post and places in the sleeve pipe, garden post lower surface contacts with the upper surface point of steel ball (011), steel ball (011) lower surface with on move catch bar (012) the top end millet cake contact, carry substrate (009) and go up the anti-stress rubber (013) of subsides one deck, subtegulum (001) is placed on the anti-stress rubber (013).
3, optical fiber discharging sealed in unit according to claim 2, the spacing of the lower surface of last substrate limited block (016) and subtegulum limiting stand (014) upper surface, be slightly larger than, subtegulum thickness sum is added (125 μ m-δ), δ is the degree of depth that optical fiber embeds Baltimore groove, that is to say, after bare fibre is placed between the subtegulum, each bar optical fiber may be limited between a Baltimore groove and the last substrate loosening, and can not move out outside the Baltimore groove, under the superincumbent like this high definition microscope surveillance (021), each bar optical fiber can be inserted on respective concave groove or V-shaped groove surface two side lines smoothly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101205828A CN100356221C (en) | 2005-12-30 | 2005-12-30 | Optical fiber arranging and packing equipment in optical fiber array component element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101205828A CN100356221C (en) | 2005-12-30 | 2005-12-30 | Optical fiber arranging and packing equipment in optical fiber array component element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1794028A true CN1794028A (en) | 2006-06-28 |
| CN100356221C CN100356221C (en) | 2007-12-19 |
Family
ID=36805579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101205828A Expired - Fee Related CN100356221C (en) | 2005-12-30 | 2005-12-30 | Optical fiber arranging and packing equipment in optical fiber array component element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100356221C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809789A (en) * | 2012-07-17 | 2012-12-05 | 南京航空航天大学 | Fiber coupling and packaging method of distributed feedback laser array |
| CN110049930A (en) * | 2017-11-14 | 2019-07-23 | 株式会社荏原制作所 | Clean the preservation container and its packaging of component |
| CN110553774A (en) * | 2018-06-01 | 2019-12-10 | 武汉理工大学 | Miniature full-quartz optical fiber Fizeau cavity high-frequency dynamic pressure sensor and manufacturing method thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1302758C (en) * | 1986-11-15 | 1992-06-09 | Sumitomo Electric Industries, Ltd. | Optical connector and process for producing the same |
| FR2716012B1 (en) * | 1994-02-09 | 1996-04-12 | Corning Inc | Method and device for assembling ends of optical fibers arranged in a sheet. |
| JP2972584B2 (en) * | 1996-07-30 | 1999-11-08 | 東北日本電気株式会社 | Optical connector and method of assembling the same |
| KR19980066890A (en) * | 1997-01-29 | 1998-10-15 | 김광호 | Optical waveguide and optical fiber coupling device and method |
| JP3697580B2 (en) * | 2000-12-14 | 2005-09-21 | 日本碍子株式会社 | Fiber array and waveguide device |
| CN1150414C (en) * | 2001-09-29 | 2004-05-19 | 华中科技大学 | Locating module for optical fibre array |
-
2005
- 2005-12-30 CN CNB2005101205828A patent/CN100356221C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809789A (en) * | 2012-07-17 | 2012-12-05 | 南京航空航天大学 | Fiber coupling and packaging method of distributed feedback laser array |
| CN110049930A (en) * | 2017-11-14 | 2019-07-23 | 株式会社荏原制作所 | Clean the preservation container and its packaging of component |
| US11180303B2 (en) | 2017-11-14 | 2021-11-23 | Ebara Corporation | Storage container of scrubbing member and package of same |
| CN110553774A (en) * | 2018-06-01 | 2019-12-10 | 武汉理工大学 | Miniature full-quartz optical fiber Fizeau cavity high-frequency dynamic pressure sensor and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100356221C (en) | 2007-12-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1050906C (en) | Assembling method and device for arranged sheet optical fiber end | |
| KR100418842B1 (en) | Passive alignment connection for fiber optics | |
| WO2018022319A1 (en) | Waveguide connector elements and optical assemblies incorporating the same | |
| US11852870B2 (en) | Optical fiber photonic integrated chip connector interfaces, photonic integrated chip assemblies, and methods of fabricating the same | |
| CN100356221C (en) | Optical fiber arranging and packing equipment in optical fiber array component element | |
| CN106547053A (en) | A kind of joints of optical fibre lock pin of MEMS technology and MPO optical fiber connector | |
| US20050025430A1 (en) | Apparatus and methods for passive alignment of optical elements | |
| JP2005062886A (en) | Ferrule assembly for optical fibers | |
| US20210041626A1 (en) | Athermal arrayed waveguide grating using precise parallel movement module, and manufacturing method therefor | |
| CN103605197B (en) | Two dimensional optical fiber precision positioning coupling mechanism | |
| CN1291258C (en) | Optical fiber arranging method in optical fiber array assembly, and its appts. | |
| CN1346993A (en) | Locating module for optical fibre array | |
| CN1252499C (en) | Parallel optical fiber array coupling componen element | |
| JP6268918B2 (en) | Optical fiber connection structure, optical fiber connection method, and optical module | |
| CN1878035A (en) | Hybrid integrated silicon-based photosignal processing chip | |
| KR101245416B1 (en) | Multi-core optical fiber ferrule body for hermetic packaging of optical switch | |
| EP2031427A1 (en) | Optical terminal | |
| CN201096924Y (en) | V-shape slot base plate for multi-optical connector | |
| EP0933012B1 (en) | Device for positioning and retaining micro-building-blocks | |
| KR20060096029A (en) | Multichannel optical path changing device and its production method | |
| CN2557968Y (en) | Mechanical type light switch | |
| CN102062910A (en) | GPON (Gigabit-Capable PON) module basic unit and manufacturing method thereof | |
| US11880071B2 (en) | Optical assembly for interfacing waveguide arrays, and associated methods | |
| CN102608698B (en) | High-reliability optical fiber array U-groove and manufacturing method thereof | |
| CN215769111U (en) | Optical fiber array |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071219 Termination date: 20100201 |