CN110553774A - Miniature full-quartz optical fiber Fizeau cavity high-frequency dynamic pressure sensor and manufacturing method thereof - Google Patents
Miniature full-quartz optical fiber Fizeau cavity high-frequency dynamic pressure sensor and manufacturing method thereof Download PDFInfo
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- CN110553774A CN110553774A CN201810556740.1A CN201810556740A CN110553774A CN 110553774 A CN110553774 A CN 110553774A CN 201810556740 A CN201810556740 A CN 201810556740A CN 110553774 A CN110553774 A CN 110553774A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/06—Indicating or recording by optical means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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Abstract
The invention discloses an ultra-micro full-quartz optical fiber Fizeau cavity high-frequency dynamic pressure sensor and a manufacturing method thereof, wherein the manufacturing method comprises the following steps: welding a single-mode optical fiber and a quartz glass capillary together by using an optical fiber welding machine; cutting the quartz capillary under a microscope to form an F-P cavity; welding a second prepared single-mode fiber at the other end of the quartz capillary to form an F-P cavity; cutting the second single mode fiber as short as possible under a microscope; grinding the cut single-mode optical fiber into a quartz diaphragm with the required thickness by using a bare fiber grinder; sixthly, etching and texturing the quartz diaphragm, and removing reflected light on the outer surface of the quartz diaphragm to form the Fizeau cavity pressure sensitive sheet. The sensor manufactured by the invention has the advantages of full quartz structure, small volume, electromagnetic interference resistance and high temperature resistance.
Description
Technical Field
the invention relates to an optical fiber F-P cavity, in particular to the field of high-frequency dynamic pressure testing based on a full-quartz and ultra-micro optical fiber Fizeau cavity.
Background
For the test of high frequency response dynamic pressure, piezoelectric sensors and silicon piezoresistive sensors are mainly used at present. Both have a common disadvantage: firstly, the device cannot work normally under the environment of strong electromagnetic interference and high ion radiation; secondly, the device cannot work in a high-temperature environment; and thirdly, remote telemetry is difficult to realize. The optical fiber sensor is essentially anti-electromagnetic interference, the quartz material is high temperature resistant, the temperature expansion coefficient is extremely small, the advantages of sensing and sensing of the optical fiber are exerted, remote distance measurement can be easily realized, the outer diameter of the optical fiber F-P cavity pressure sensor is only 125 micrometers, and extremely high time resolution and spatial resolution are realized. Therefore, the sensor is applicable to the situations where the piezoelectric and piezoresistive sensors cannot be used, such as: the optical fiber F-P cavity pressure sensor has important significance in occasions with strong electromagnetic interference, high temperature, remote distance measurement and extremely small requirement on the sensor.
Disclosure of Invention
The invention aims to manufacture an ultra-micro full-quartz optical fiber Fizeau cavity high-frequency dynamic pressure sensor, which is suitable for strong electromagnetic interference, high-temperature and long-distance remote measurement and extremely tiny occasions requiring sensors.
In order to achieve the purpose, the invention provides a manufacturing method of an ultra-micro all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor, which is characterized by comprising the following steps of:
Welding a single-mode optical fiber and a quartz glass capillary together by using an optical fiber welding machine;
Cutting the quartz capillary under a microscope to form an F-P cavity;
Welding a second prepared single-mode fiber at the other end of the quartz capillary to form an F-P cavity;
Cutting the second single mode fiber as short as possible under a microscope;
Grinding the cut single-mode optical fiber into a quartz diaphragm with the required thickness by using a bare fiber grinder;
Sixthly, etching and texturing the quartz diaphragm, and removing reflected light on the outer surface of the quartz diaphragm to form the Fizeau cavity pressure sensitive sheet.
according to the technical scheme, in the step I, welding parameters are as follows: the discharge intensity is 45mA, the discharge time is 250ms, the pre-melting time is 80ms, and the reflectivity of the end face after welding reaches 2.89%.
According to the technical scheme, in the step II, the length of the cut quartz capillary tubeis composed of
According to the technical scheme, in the step III, welding parameters are as follows: the discharge intensity is 45mA, the discharge time is 250ms, the pre-melting time is 80ms, and the reflectivity of the end face after welding reaches 2.89%.
In the fifth step, the single mode fiber is ground to a thickness ofthe quartz membrane of (1).
According to the technical scheme, in the step of sixthly, the etching time is 2min, the etching rate is 1.5 mu m/min, the reflection rate of reflected light on the outer surface of the quartz diaphragm is reduced to 0.00012% after etching, and meanwhile, the thickness of the quartz diaphragm is reduced by 3 mu m on the original basis.
according to the technical scheme, in the step of sixthly, the quartz membrane is corroded and roughened by using 40% HF solution
The invention also provides the ultra-miniature full-quartz optical fiber Fizeau cavity high-frequency dynamic pressure sensor manufactured according to the technical scheme.
according to the technical scheme, the quartz capillary of the formed F-P cavity body has the outer diameter of 125 micrometers and the inner diameter of 75 micrometers.
drawings
FIG. 1 is a flow chart of the fabrication of a sensor.
Fig. 2 is a cutting control system used in the sensor manufacturing process.
Fig. 3 is a light path diagram of the sensor.
FIG. 4 is a schematic diagram of the Fizeau chamber key parameter testing.
In the figure: 1. single mode fiber, 2 quartz capillary, 3 quartz diaphragm, 4 cutter, 5 fiber grinder, 6.40% HF solution, 7 five-dimensional fiber fine tuning frame, 8 fiber clamp, 9 two-dimensional translation stage, 10 fiber clamp, 11 five-dimensional fiber fine tuning frame, 12.F-P cavity, 13 broadband light source, 14 fiber circulator, 15 flange, 16 APC joint, 17 PC joint: namely, the reflectivity is 3.16% of a standard Fresnel reflection surface, 18. a fiber optic spectrometer, 19. a Fizeau cavity; .
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention mainly adopts a special micro-arc welding process of an optical fiber welding machine to weld a conducting optical fiber 1 with the outer diameter of 125 microns, a quartz glass capillary tube 2 and a quartz diaphragm 3 to form a low-fineness Fizeau cavity interferometer. A high-precision cutting control system built under a stereoscopic microscope is adopted by the two-dimensional translation table and the two five-dimensional optical fiber fine tuning frames, so that the length (F-P cavity length) of the quartz capillary tube and the thickness of the quartz diaphragm can be effectively cut and controlled. The precision control of the micron-sized thickness of the pressure sensitive quartz diaphragm can be realized by adopting a special bare fiber grinder for grinding. The reverse transmission function of the Fizeau cavity is measured by a comparison method, and data fitting is carried out by using a cascade double F-P cavity interference output formula, so that key characteristic parameters (the reflectivity of each end face, the cavity length and the thickness of the membrane are measured, the interference of reflected light on the outer surface of the quartz membrane is eliminated by using a corrosion process, the reverse detection interference output of the Fizeau cavity is ensured to be close to the ideal sinusoidal double-beam interference output, and the high-speed demodulation of the transient speed-variable phase of the F-P cavity is conveniently carried out by using a passive homodyne technology with three-wavelength excitation and any deterministic phase interval.
The preferred embodiment is as follows: the invention relates to a manufacturing method of an ultra-micro full-quartz optical fiber Fizeau cavity high-frequency dynamic pressure sensor, which comprises the following specific steps:
First, a single mode optical fiber and a quartz glass capillary are welded together by an optical fiber fusion splicer, as shown in fig. 1 (a). The welding parameters are as follows: the discharge intensity is 45mA, the discharge time is 250ms, the pre-melting time is 80ms, and the reflectivity of the end face after welding can reach 2.89%.
Cutting a quartz capillary tube with a proper length (25-50) mu m under a microscope, as shown in a figure 1 (b);
Welding a second prepared single-mode optical fiber at the other end of the quartz capillary tube, as shown in figure 1 (c). The welding parameters are as follows: the discharge intensity is 45mA, the discharge time is 250ms, the pre-melting time is 80ms, and the reflectivity of the end face after welding can reach 2.89%.
And fourthly, cutting the second single mode fiber as short as possible under a microscope to reduce the grinding time, and the figure is shown in figure 1 (d).
and fifthly, grinding the cut short single-mode optical fiber into a quartz diaphragm with the required thickness of 5-23 mu m by using a bare fiber grinder, wherein the quartz diaphragm is shown in a figure 1 (e). Wherein the model of the grinding paper is 5 μm.
sixthly, etching and texturing the quartz diaphragm by using 40% HF to remove the reflected light on the outer surface of the quartz diaphragm, and showing in figure 1 (f). The etching time is 2min, the etching rate is about 1.5 mu m/min, finally the reflection rate of the reflected light on the outer surface of the quartz diaphragm is reduced to 0.00012%, and meanwhile, the thickness of the diaphragm is reduced by 3 mu m on the original basis.
in the figure 1, the connection mode among the single-mode optical fiber 1, the quartz capillary tube 2 and the quartz diaphragm 3 is micro-arc welding of an optical fiber welding machine; the cutting method of the middle cutting knife 4 in the steps (b) and (d) adopts the cutting control system in fig. 2.
In fig. 2, the optical fiber clamp 8 is fixed to the five-dimensional optical fiber fine adjustment frame 7 by bolts, the optical fiber clamp 10 is fixed to the five-dimensional optical fiber fine adjustment frame 11 by bolts, and the cutting knife 4 is fixed to the two-dimensional displacement table 9 by bolts.
The main purposes of the cutting control system shown in fig. 2 are: cutting the quartz glass capillary tube according to the step II to form an F-P cavity and cutting the quartz glass capillary tube according to the step IV to form the pressure sensitive membrane. The cutting control method comprises the following steps:
Firstly, placing a guide optical fiber welded with a quartz glass capillary on an optical fiber cutter, and fixing two ends of the guide optical fiber and the quartz glass capillary which are welded together on five-dimensional optical fiber fine adjustment frames at two sides of the cutter (see figure 2); and adjusting the two five-dimensional optical fiber trimming frames to enable the optical fiber/quartz glass capillary to be cut to be in a horizontal and collimated state. The method comprises the steps of pushing a blade of an optical fiber cutting knife of a special mechanical clamp to be right below an optical fiber, then moving the optical fiber by utilizing two five-dimensional optical fiber trimming frames on two sides, enabling a welding joint of the optical fiber and a quartz capillary tube to be located near the cutting knife, and enabling the length of the quartz capillary tube between the welding joint and a cutting knife edge to be the length of the developed Fizeau cavity length, wherein the length can be calculated by reading the magnification of a stereomicroscope and the scale number of the length in the field of view of the microscope. Finally, in order to avoid the change of the relative position between the welding point and the cutting knife caused by the tension generated by the sagging of the two ends of the optical fiber, the cover of the cutting knife must be closed to fix the optical fiber to be cut, then the two five-dimensional optical fiber trimming frames at the two ends are loosened to fix the optical fiber, and the required F-P cavity length can be obtained after cutting. The method is simple to operate and has good repeatability.
FIG. 3 shows an F-P cavity of an optical fiber formed by a planar ultra-miniature circular thin plate structure, which is called an optical fiber Fizeau cavity 12. Guiding fiber end-face reflected light (R) within a circular cavity1) As a reference beam, the reflected light (R) of the inner surface of the pressure-sensitive sheet2) This forms an extrinsic intrinsic Fizeau cavity pressure sensor as the sensing beam. It is based on the vibration of pressure sensitive film under the action of shock wave to modulate the sensing light beam (R)1) And a reference beam (R)2) The phase of interference between the two sensors is used for sensing the external dynamic pressure. Based on the pressure sensitive thin plate being made of quartz glass material, reflected light (R) is formed on the outer surface of the pressure sensitive thin plate3) When the pressure sensitive thin plate is ground and thinned, the reflected light provides useful information for measuring the thickness of the pressure sensitive thin plate in real time; under the condition that the thickness of the pressure-sensitive thin plate is basically controlled and determined, the reflected light is weakened or even eliminated as much as possible through hydrofluoric acid corrosion texturing, so that a fully-closed Fizeau cavity is formed.
the all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor manufactured by the manufacturing method of the ultra-micro all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor according to the embodiment has the characteristics that: full quartz construction, small volume (only 125 microns), intrinsically electromagnetic interference resistance, high temperature resistance. The dynamic pressure is sensed by a pressure sensitive silicon cup consisting of a quartz capillary tube and a quartz diaphragm, the sensitivity of the pressure sensitive silicon cup is determined by the thickness and the effective diameter of the quartz diaphragm, and the bandwidth of the pressure sensitive silicon cup is determined by the resonant frequency of the sensitive diaphragm. The sensor is made of all-quartz material, and the conducting optical fiber, the quartz capillary cavity and the quartz diaphragm which form the F-P cavity are arranged in the sensorthe micro-arc welding process of the optical fiber welding machine is integrated, the reliability and firmness are greatly improved, and the optical fiber welding machine can work in a high-temperature environment; the Fizeau cavity length of the optical fiber is obtained by controlling and cutting an optical fiber cutter under a microscope, and the cavity length range isThe inner part can be adjusted freely according to the requirement; the quartz sensitive diaphragm is also cut by an optical fiber cutter, ground and thinned by a bare fiber grinder and etched by HF, and has a thickness The range can be adjusted freely according to requirements, the manufacturing process of the sensor is simple, and the outer diameter is only 125 mu m.
FIG. 4 shows the measurement method of the thickness of the pressure sensitive diaphragm and other key characteristic parameters of the sensor in the fifth step:
By a comparison method, the developed F-P cavity reverse detection output transfer function and key performance parameters thereof can be directly measured by a spectrometer. FIG. 4 is a schematic diagram of a test method, comprising the following steps:
firstly, an APC joint of a standard APC/PC conversion jumper is connected into a port 1 of the circulator by a flange plate. Based on the optical Fresnel reflection effect of the PC joint of the conversion jumper, when an etalon with the reflectivity of 3.16 percent is accessed, a relation curve between the reverse detection optical power density and the scanning wavelength of the system can be obtained by scanning with a spectrometer, and the relation curve comprises the spectral density of a broadband light source, the fluctuation characteristic of each optical performance index of a circulator along with the change of the wavelength and the loss of each connector. It will be used as the reference standard for the normalization process of the F-P cavity reflectivity.
And secondly, replacing an APC/PC standard jumper with an F-P cavity with one end provided with an APC joint for access. And similarly, the relationship curve between the reverse probe optical power density and the scanning wavelength of the F-P cavity of the developed optical fiber is measured by a spectrometer.
and thirdly, the optical power spectral density measured by the standard jumper is used as a reference value, the normalized processing is carried out on the optical power density test value of the developed F-P cavity point by point along the scanning wavelength according to the formula (1), and the developed F-P cavity reverse detection output transmission function curve can be obtained.
Fourthly, adopting a cascade double F-P cavity interference output formula (2) or a double-beam interference sine output standard formula (3):
(2) And (3) in the formula: and n is the optical refractive index of the quartz diaphragm. The various characteristics of the F-P chamber can be obtained by curve fitting the data: optical cavity length L, three end face reflectivities R1, R2, and R3, and pressure diaphragm thickness d.
It will be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.
Claims (9)
1. A manufacturing method of an ultra-micro full-quartz fiber Fizeau cavity high-frequency dynamic pressure sensor is characterized by comprising the following steps:
Welding a single-mode optical fiber and a quartz glass capillary together by using an optical fiber welding machine;
Cutting the quartz capillary under a microscope to form an F-P cavity;
Welding a second prepared single-mode fiber at the other end of the quartz capillary to form an F-P cavity;
Cutting the second single mode fiber as short as possible under a microscope;
Grinding the cut single-mode optical fiber into a quartz diaphragm with the required thickness by using a bare fiber grinder;
Sixthly, etching and texturing the quartz diaphragm, and removing reflected light on the outer surface of the quartz diaphragm to form the Fizeau cavity pressure sensitive sheet.
2. The manufacturing method of the ultra-miniature all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor according to claim 1, wherein in the step (r), welding parameters are as follows: the discharge intensity is 45mA, the discharge time is 250ms, the pre-melting time is 80ms, and the reflectivity of the end face after welding reaches 2.89%.
3. the method for manufacturing an ultra-miniature all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor according to claim 1, wherein in step two, the length of the quartz capillary after being cut short is equal to
4. The manufacturing method of the ultra-miniature all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor according to claim 1, wherein in the third step, the welding parameters are as follows: the discharge intensity is 45mA, the discharge time is 250ms, the pre-melting time is 80ms, and the reflectivity of the end face after welding reaches 2.89%.
5. The method for manufacturing an ultra-miniature all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor according to claim 1, wherein in the fifth step, the single-mode fiber is ground to a thickness ofThe quartz membrane of (1).
6. The method for manufacturing an ultra-micro all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor according to claim 1, wherein in the step (sixthly), the etching time is 2min, the etching rate is 1.5 μm/min, the reflection rate of the reflected light on the outer surface of the quartz diaphragm is reduced to 0.00012% after etching, and the thickness of the quartz diaphragm is reduced by 3 μm again on the original basis.
7. the method for manufacturing an ultra-micro all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor according to claim 1, wherein in step (sixth), a 40% HF solution is used to etch and roughen the silica membrane.
8. An ultra-miniature all-silica fiber Fizeau cavity high frequency dynamic pressure sensor, characterized in that the sensor is manufactured according to the manufacturing method of any one of claims 1-7.
9. The ultra-miniature all-silica fiber Fizeau cavity high-frequency dynamic pressure sensor according to claim 8, wherein the quartz capillary of the F-P cavity is formed to have an outer diameter of 125 μm and an inner diameter of 75 μm.
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Application publication date: 20191210 |