CN1291258C - Optical fiber arranging method in optical fiber array assembly, and its appts. - Google Patents
Optical fiber arranging method in optical fiber array assembly, and its appts. Download PDFInfo
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- CN1291258C CN1291258C CN 200410012970 CN200410012970A CN1291258C CN 1291258 C CN1291258 C CN 1291258C CN 200410012970 CN200410012970 CN 200410012970 CN 200410012970 A CN200410012970 A CN 200410012970A CN 1291258 C CN1291258 C CN 1291258C
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Abstract
The present invention further provides a method for etching N parallel grooves which are respectively provided with N optical fibers on a parallel plane glass basal piece and a device used in the method on the basis of a method for positioning one optical fiber on two lateral lines on the surface of one groove. The positioning accuracy of each optical fiber in an optical fiber array assembly can reach 0.2 to 0.5 mu m. The present invention is an optical fiber array assembly with very high positioning accuracy and can be widely applied to active optoelectronic device and passive optoelectronic devices in techniques of optical communication, optical interconnection in parallel processing high-performance computers, etc.
Description
Technical field
The invention belongs to the active and passive light electron device in the fields such as optical communication, parallel processing high-performance computer light interconnection technique, particularly optical fiber discharge method and equipment thereof in the optical-fiber array assembly.
Background technology
In recent years, because the fast development of optical interconnection system in optical communication and the high-performance computer field is used for various new type of passive devices of message area and active device emerge in multitude.Be used for that the passive AWG of surface-emission laser array VCSEL chip, light-receiving PIN chip, the various uses in broadband high-speed field is multiplexing, demultiplexing chip, slab guide beam splitter chip, MEMS micro photo-electro-mechanical switch chip etc. is succeeded in developing in succession.Said chip will encapsulate when being made into practical devices, the input and output coupling interface of the optical-fiber array assembly of very high degree of precision as optoelectronic device must be arranged, with each the bar light-path in the above-mentioned opto chip, aim at accurately with corresponding each bar optical fiber strictness in the optical-fiber array assembly, light signal could be imported, exported, be made into practical devices steady in a long-term.The encapsulation technology of above-mentioned device is to guarantee the gordian technique of the superior optical characteristics of device, simultaneously, also is the highest part in quality-determining, efficient and the cost.Because above chip all adopts photoelectron technology to be developed into, so the encapsulation technology of device must be complementary with the positional precision of photoetching lines to the accuracy requirement of each bar fiber position in the optical-fiber array assembly.Moreover, also need optical fiber head is processed into the shape of various needs simultaneously, as to optical fiber head strictness be processed into 8 °, 45 ° etc.Fiber array all is to adopt on the particular crystal orientation silicon chip at present, corrode some parallel V-shaped grooves, or adopt accurate machine cuts technology on parallel flat glass substrate, to carve some parallel V-shaped grooves, each bar optical fiber is embedded in the V-shaped groove, with the surface of V-shaped groove inside surface as each bar optical fiber of location, be made into optical-fiber array assembly, see the product of United States Patent (USP) 5656120 and Chinese patent 00101007.7 and several companies.What also have is carved into Baltimore groove on substrate, optical fiber is embedded in the Baltimore groove, as each bar optical fiber surface of location, is made into optical-fiber array assembly with the Baltimore groove inside surface, sees United States Patent (USP) 6706371.More than adopt in the localization method of V-shaped groove inside surface as each bar optical fiber of location, though optical fiber discharges easily, the bearing accuracy of optical fiber is relevant with the process precision that the degree of depth and the inside surface of V-shaped groove that corrodes shaping or Baltimore groove are shaped.Particularly the accurate machine cuts technology of employing carves the fiber orientation method of some parallel V-shaped grooves on parallel flat glass substrate, though optical fiber discharges easily, cost is low,, precision is relatively poor, and when device encapsulated, yield rate was low.
Application number: 01133513.0 " optical fibre array positioning assembly ", the method of a kind of high-precision optical fiber location has been proposed, as shown in Figure 1, at first, on parallel flat glass substrate 100, etch the parallel Baltimore groove 110 of N bar, the spatial position precision of each bar Baltimore groove 110 surperficial two side line 120 is the precision of photoetching, about 0.2 μ m.Each bar optical fiber adopts Baltimore groove surface two side lines, 120 localization methods to produce optical-fiber array assembly, its principle as shown in Figure 1, the loam cake substrate is parallel planar substrates, subtegulum is a Baltimore groove etching substrate, each bar nuditing fiber is embedded between Baltimore groove surface two side lines 120 and the parallel planar substrates in the optical-fiber array assembly, adopt each bar Baltimore groove surface two side lines, 120 each bar optical fiber method of location, produce optical-fiber array assembly.But, want each bar optical fiber in the N bar optical fiber, be emitted on like clockwork simultaneously on each bar Baltimore groove surface two side line 120, but be a very difficult thing.
Summary of the invention
Purpose of the present invention is invented a kind of optical fiber exhaust apparatus for the method according to patent of invention 01133513.0 " optical fibre array positioning assembly ".Accurately locate on the basis of an optical fiber method at Baltimore groove surface two side lines, proposed on parallel flat glass substrate, to etch the parallel Baltimore groove of N bar, accurately discharge the method and the equipment thereof of N bar optical fiber, this method can be discharged N bar optical fiber like clockwork simultaneously at each bar Baltimore groove surface two side line, accurately locatees each bar optical fiber and is developed into optical-fiber array assembly.
The optical fiber exhaust apparatus comprises four major parts: the left side is the exhaust tube 170 that is fixed on three-dimensional or the five dimension adjustable supporters, the end of gas outlet is polished into a plane, and sealing rubber ring 180 on the viscose glue, sealing rubber ring can firmly hold the upper glass substrate and carry out three peacekeepings, five dimension adjustment.The right is for being fixed on the surface level adjustable supporter 190 benchmark base plate 230, with the spacer 220 of wide, narrow can the be parallel mobile upper and lower substrate of clamping of required two of the discharging optical fiber on it.Have above and can whether accurately be emitted on optical tooling system 200 on each bar Baltimore groove surface two side line for observing each bar optical fiber.And a lower surface that can supply to monitor each bar optical fiber is placed in the front, whether be emitted on the CCD surveillance 210 on each bar Baltimore groove surface two side line like clockwork.
The optical fiber discharge method is as follows, cutting glass substrate 100 in the fiber array fiber orientation assembly and loam cake glass substrate 140 are parallel planar substrates, all can make substrate or subtegulum, upper and lower substrate width is identical, the length of last substrate is smaller than subtegulum length 1-5mm, be the cutting glass substrate below with the subtegulum, illustrated that for row this method may further comprise the steps for the flat glass substrate and go up substrate:
1., cleaned cutting glass substrate 100 and loam cake glass substrate 140, at an end that includes the little band of N bar parallel optical fibre, the plastics covering of each bar optical fiber is peeled off into the little band of nuditing fiber with the parallel optical fibre stripping machine, clean standby;
2., with cutting glass substrate 100 and loam cake glass substrate 140 upper-lower overlappings, be placed in the optical fiber exhaust apparatus, between benchmark plate upper surface 230 and the two removable clamping spacers.
3. adjust three-dimensional or five dimension bracing frames, sealing rubber ring on the exhaust tube is touched the upper glass substrate closely, open the moving switch of bleeding, the glass substrate that sealing rubber ring is held closely, by adjusting five dimension bracing frames, with the surface level adjustment rack that supports the benchmark base plate, make, it is parallel that the lower glass substrate plane keeps, and basically on surface level, and, make, distance h between the subtegulum should satisfy following condition: 125 μ m 〉=h 〉=125 μ m-d, Fig. 2 c wiring layout situation, should satisfy following condition is: 125 μ m 〉=h 〉=125 μ m-2d, and wherein d is the degree of depth that a bare fibre embeds Baltimore groove; Fig. 2 c wiring layout situation,
4., be with 260 to be shelved between the upper and lower substrate with standby nuditing fiber is little from the rear portion, and allow each bar optical fiber is shelved on respectively on corresponding Baltimore groove surface two side lines 100 one by one in the N bar optical fiber, the N bar parallel optical fibre of the little band of optical fiber is pushed away forward simultaneously, make each bar nuditing fiber partly embed one by one respectively between corresponding Baltimore groove surface two side lines 100 and the upper glass substrate;
5., again finely tune light five dimension adjustment racks and make substrate compress each bar nuditing fiber ridge fully, from CCD surveillance 210 strict supervision of front, whether the lower surface of each bar optical fiber is emitted on each bar Baltimore groove surface two side line like clockwork.Until all observe from top optical system 200 with from the CCD system 210 of front, each bar optical fiber is positioned at till each bar Baltimore groove surface two side line (100) goes up fully.Then, annotate ultraviolet glue from behind, carry out photocuring.
The present invention can discharge the N bar optical fiber in the optical-fiber array assembly disposable and locate simultaneously, precision can reach 0.3 μ m-0.5 μ m, this method is the high method of a kind of bearing accuracy in optical-fiber array assembly, can be widely used in optical communication, the parallel processing high-performance computer active and passive light electron device in the technology such as light interconnection.
Description of drawings
Fig. 1 is emitted on the synoptic diagram of each two side lines location, bar Baltimore groove surface for each bar optical fiber.
Fig. 2 a is a subtegulum for the cutting substrate, and the loam cake substrate is the discharging optical fiber schematic diagram of last substrate.
Fig. 2 b is last substrate for the cutting substrate, and the loam cake substrate is the discharging optical fiber schematic diagram of subtegulum.
Fig. 2 c is last substrate for the cutting substrate, and the loam cake substrate also is the discharging optical fiber schematic diagram of cutting substrate.
Fig. 3 is an optical fiber exhaust apparatus structural representation in the optical-fiber array assembly
Embodiment
Optical-fiber array assembly making apparatus structural representation, as shown in Figure 3, the optical fiber exhaust apparatus comprises four major parts: the left side is the exhaust tube 170 that is fixed on three-dimensional or the five dimension adjustable supporters, the end of gas outlet is polished into a plane, and sealing rubber ring 180 on the viscose glue, sealing rubber ring can firmly hold the upper glass substrate and carry out three peacekeepings, five dimension adjustment.The right is for being fixed on the surface level adjustable supporter 190 benchmark base plate 230 and two required removable clamping spacers 220 of the discharging optical fiber on it.Have above and can whether accurately be emitted on optical tooling system 200 on each bar Baltimore groove surface two side line for observing each bar optical fiber.And a lower surface that can supply to monitor each bar optical fiber is placed in the front, whether be emitted on the CCD surveillance 210 on each bar Baltimore groove surface two side line like clockwork.Have and firmly to hold the gas outlet that the upper glass substrate carries out three peacekeepings, five dimension adjustment sealing rubber rings, be installed in and include one group of X, Y, Z, on the micropositioning stage that front and back and lateral inclination five dimensions are adjustable, make the sealing rubber ring plane of end of gas outlet at X, Y, Z, front and back and lateral inclination five dimension degree of freedom can be regulated, the metal benchmark base plate 230 that surface is the plane places on the three-dimensional bracing frame that can adjust surface level 190, adjustable three-dimensional bracing frame, make the benchmark base plate be adjusted at horizontality, the a pair of clamping locating piece 220 that can walk abreast and move along plane on the benchmark base plate simultaneously, be assemblied on the benchmark base plate, distance between them is narrowed down or relax, its function is that parallel plane cutting substrate and the loam cake substrate that will rest on the benchmark base plate clip, and goes up simultaneously, following alignment.Be assemblied in the exhaust tube of band lute as shown in Figure 2 on the five dimension adjustment racks, its function is to hold substrate, goes up substrate and carries out five dimension fine settings, makes the strict maintenance of upper and lower, substrate walk abreast and certain distance.If assemble by Fig. 2 c, each bar Baltimore groove of last subtegulum must be corresponding one by one.
Adopt the method for each two side lines, 120 location, bar Baltimore groove surface based on each bar optical fiber, as not adopting special method, want N bar optical fiber accurately is emitted on each bar Baltimore groove surface two side line, it is very difficult producing optical-fiber array assembly, the present invention proposes to discharge the schematic diagram of optical fiber, shown in Fig. 2 a, Fig. 2 b and Fig. 2 c.Fig. 2 a cutting substrate is a subtegulum, and the loam cake substrate is flat parallel flat glass and other substrates.Fig. 2 b cutting substrate is last substrate, and the loam cake substrate is a subtegulum.Fig. 2 c be upper and lower all be cutting substrate substrate.Before the discharging optical-fiber array assembly, the Baltimore groove substrate 100 and the parallel planar substrates 140 of at first standby and cleaned etching, the width of two kinds of substrates is identical, by different device requirement, can align or differ certain distance, and two substrate rear portions, it no matter is the wiring layout shown in Fig. 2 a, Fig. 2 b or Fig. 2 c, top substrate is than the short about 1-5mm of following substrate, at an end that includes the little band of N bar parallel optical fibre, with the parallel optical fibre stripping machine plastics covering of each bar optical fiber is peeled off into the nuditing fiber core, its length is L, cleans standby.Gas outlet is put down, suction pipe sealing joint rubber band is contacted with last substrate fully, carry out exhaust then, allow the lute of exhaust tube interface firmly hold substrate.With substrate plane in the five dimension inching frame adjustment, at first, make the substrate very small distance that moves up, the strict space that monitors between the upper and lower substrate, adjust to make upper and lower substrate plane keep fully parallel till, and then little whole five dimension adjustment racks allow distance h between the upper and lower substrate be slightly less than the external diameter 125 μ m of bare fibre.Shown in Fig. 2 a and Fig. 2 b, d is the degree of depth that a bare fibre embeds Baltimore groove, and when upper and lower substrate was adjusted fully, its spacing answered h should satisfy following condition:
d+h＝125μm。
And the wiring layout of Fig. 2 c, its spacing answers h should satisfy following condition:
2d+h＝125μm
For each the bar optical fiber in the N bar optical fiber can be inserted simultaneously between each bar Baltimore groove surface two side line 120 and the upper surface substrate, and strict with Baltimore groove surface two side lines, 120 each bar optical fiber of location.Keeping fully under the parallel situation of upper and lower substrate, allow upper and lower two substrates between spacing be:
125μm≥h≥125μm-d。
And the wiring layout situation of Fig. 2 c, allow upper and lower two substrates between spacing be:
125μm≥h≥125μm-2d。
Then, the plastics covering of the end of the standby little band of parallel optical fibre is peeled off into the little band of nuditing fiber, its nuditing fiber length L is slightly larger than the length of substrate, its nuditing fiber is shelved between the upper and lower substrate from the rear portion, and allow each bar optical fiber is shelved on respectively on corresponding Baltimore groove surface two side lines 120 one by one in the N bar optical fiber, then, the N bar parallel optical fibre of the little band of optical fiber is pushed away forward simultaneously, make each bar nuditing fiber partly embed one by one respectively between corresponding Baltimore groove surface two side lines 120 and the last substrate.At last, little more whole five dimension adjustment racks will be gone up substrate and compress each bar nuditing fiber ridge fully, make each bar optical fiber be positioned at fully on each bar Baltimore groove surface two side line 120.Then, annotate ultraviolet glue from behind, carry out photocuring.
Said process carries out strictness by the CCD surveillance and monitors.The overall process of discharging N bar bare fibre, observe by top optical instrument observing system, nuditing fiber is shelved on from the rear portion, between the subtegulum, and allow each bar optical fiber be shelved on respectively one by one on corresponding Baltimore groove surface two side lines 120, then, the N bar parallel optical fibre of the little band of optical fiber is pushed away forward simultaneously, make each bar nuditing fiber partly embed one by one respectively between corresponding Baltimore groove surface two side lines 120 and the last substrate, the discharging overall process of this optical fiber all up the optical instrument observing system and the CCD surveillance of front carry out carrying out under the strict surveillance scenarios, at last, allow each bar bare fibre all fully one by one seamless be emitted on closely between corresponding Baltimore groove surface two side lines 120 and the last substrate.In order when annotating ultraviolet, not allow ultraviolet glue and clamping spacer be fixed together, before annotating ultraviolet glue, the clamping spacer of both sides is removed, then, from the nuditing fiber part of the little magnetic tape trailer of parallel optical fibre portion, point is annotated ultraviolet glue, is solidified with UV-irradiation again.Because the nuditing fiber of the little magnetic tape trailer of parallel optical fibre portion has a short very fraction to be shelved on the subtegulum, in order to protect this nuditing fiber, so, need coat protection glue at the optical fiber interface place of nuditing fiber and unstripped glue-line.Securely afterbody nuditing fiber and subtegulum are fixed together.At last, as required, end face is processed into 8 °, and 45 °, 90 °, or other shapes, polishing is made into the 1xN optical-fiber array assembly.
Claims (5)
1, in the optical-fiber array assembly based on the optical fiber method in Baltimore groove surface two side lines location, optical fiber discharge method, optical fibre array positioning assembly comprises cutting substrate (100) and loam cake substrate (140), cutting substrate (100) can be made substrate or subtegulum, and have at least one to be cutting substrate (100) in the upper and lower substrate, this method may further comprise the steps:
1., cleaned cutting substrate (100) and loam cake substrate (140), at an end that includes the little band of N bar parallel optical fibre, the plastics covering of each bar optical fiber is peeled off into the little band of nuditing fiber with the parallel optical fibre stripping machine, clean standby;
2., cutting substrate (100) and loam cake substrate (140) are placed in respectively on the benchmark base plate on the optical fiber exhaust apparatus, through the adjustment of five dimension adjustment racks and horizontal adjustment frame in the optical fiber exhaust apparatus, make upper and lower substrate plane keep parallel;
3., under the strictness of optical system and front end CCD system monitors above in equipment, the little band of standby nuditing fiber is shelved on from the rear portion, between the subtegulum, and allow each bar optical fiber is shelved on respectively on corresponding Baltimore groove surface two side lines (120) one by one in the N bar optical fiber, the N bar parallel optical fibre of the little band of optical fiber is pushed away forward simultaneously, make each bar nuditing fiber partly embed face between corresponding Baltimore groove surface two side lines (120) and the loam cake substrate respectively one by one, strict seamless closely being shelved on corresponding Baltimore groove surface two side lines (120) of the lower surface of each optical fiber;
4., again finely tune the dimension of five on the optical fiber exhaust apparatus adjustment rack loam cake substrate is compressed each bar nuditing fiber ridge fully, make each bar optical fiber be positioned at fully on each bar Baltimore groove surface two side line (120); Then, two packaged folder spacers (220) about opening, ultraviolet glue is annotated in the back from subtegulum, carries out photocuring.
5. last, the little band nuditing fiber of the optical fiber of back is partly coated protection glue on subtegulum, is cured.
2, method according to claim 1 is characterized in that: upper and lower substrate width is identical, and the length of last substrate is smaller than subtegulum length 1-5mm.
3, method according to claim 1 and 2, it is characterized in that: when upper and lower substrate all is cutting substrate (100), five dimension adjustment racks and horizontal adjustment frame are adjusted upper and lower substrate respectively, make upper and lower substrate plane keep parallel, and make each bar Baltimore groove of upper and lower substrate corresponding one by one, and the distance h between the upper and lower substrate should satisfy following condition: 125 μ m 〉=h 〉=125 μ m-2d, wherein d is the degree of depth that a bare fibre embeds Baltimore groove.
4, method according to claim 1 and 2, it is characterized in that: when last substrate is loam cake substrate (140), when subtegulum is cutting substrate (100), five dimension adjustment racks and horizontal adjustment frame are adjusted upper and lower substrate respectively, make upper and lower substrate plane keep parallel, and make each bar Baltimore groove of upper and lower substrate corresponding one by one, and the distance h between the upper and lower substrate should satisfy following condition: 125 μ m 〉=h 〉=125 μ m-d, wherein d is the degree of depth that a bare fibre embeds Baltimore groove.
5, the optical fiber exhaust apparatus, comprise four major parts: the left side is the exhaust tube (170) that is fixed on three-dimensional or the five dimension adjustable supporters, the end of gas outlet is polished into a plane, an and sealing rubber ring (180) on the viscose glue, sealing rubber ring can firmly hold the upper glass substrate and carry out three peacekeepings, five dimension adjustment, the right is for being fixed on the benchmark base plate (230) of (190) on the surface level adjustable supporter, required two of discharging optical fiber are wide with having on it, narrow can parallel mobile clamping on, the spacer of subtegulum (220), have above the benchmark base plate and can whether accurately be emitted on optical tooling system (200) on each bar Baltimore groove surface two side line for observing each bar optical fiber, and the benchmark base plate is placed a lower surface that can supply to monitor each bar optical fiber, whether be emitted on the CCD surveillance (210) on each bar Baltimore groove surface two side line like clockwork.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410012970 CN1291258C (en) | 2004-04-05 | 2004-04-05 | Optical fiber arranging method in optical fiber array assembly, and its appts. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410012970 CN1291258C (en) | 2004-04-05 | 2004-04-05 | Optical fiber arranging method in optical fiber array assembly, and its appts. |
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| Publication Number | Publication Date |
|---|---|
| CN1564040A CN1564040A (en) | 2005-01-12 |
| CN1291258C true CN1291258C (en) | 2006-12-20 |
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| CN 200410012970 Expired - Fee Related CN1291258C (en) | 2004-04-05 | 2004-04-05 | Optical fiber arranging method in optical fiber array assembly, and its appts. |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100356220C (en) * | 2005-09-21 | 2007-12-19 | 武汉海博光技术有限公司 | Optical fibre array positioning assembly |
| CN102073100B (en) * | 2010-12-06 | 2012-11-28 | 福州高意通讯有限公司 | Fiber holding structure capable of adjusting intervals and method for adjusting intervals |
| CN102692683A (en) * | 2011-03-25 | 2012-09-26 | 上海坤腾光电科技有限公司 | Fiber array positioning assembly |
| CN103871946B (en) * | 2014-01-09 | 2016-08-17 | 山东师范大学 | Large-area graphene based on small size target substrate transfer bracing frame and method |
| CN113290467A (en) * | 2021-07-26 | 2021-08-24 | 武汉光谷航天三江激光产业技术研究院有限公司 | Optical fiber array alignment grinding clamping system and method |
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