CN1788174A - Fluid control device with heater - Google Patents

Fluid control device with heater Download PDF

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Publication number
CN1788174A
CN1788174A CNA2004800131322A CN200480013132A CN1788174A CN 1788174 A CN1788174 A CN 1788174A CN A2004800131322 A CNA2004800131322 A CN A2004800131322A CN 200480013132 A CN200480013132 A CN 200480013132A CN 1788174 A CN1788174 A CN 1788174A
Authority
CN
China
Prior art keywords
fluid control
warming plate
control device
heating equipment
protuberance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2004800131322A
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Chinese (zh)
Other versions
CN100357647C (en
Inventor
四方出
田中林明
山路道雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of CN1788174A publication Critical patent/CN1788174A/en
Application granted granted Critical
Publication of CN100357647C publication Critical patent/CN100357647C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6606—With electric heating element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Resistance Heating (AREA)
  • Details Of Valves (AREA)
  • Instantaneous Water Boilers, Portable Hot-Water Supply Apparatuses, And Control Of Portable Hot-Water Supply Apparatuses (AREA)
  • Valve Housings (AREA)

Abstract

A heater (11) has planar heaters (12) arranged on both sides of at least one line and used to heat fluid control equipment (2, 3, 4) and a joint member (5). Heat retaining plates (13, 14) made from engineering plastic are respectively in contact with the outer sides of the planar heaters (12). The heat retaining plates (13, 14) are joined together with screw members (15), so that the planar heaters (12) are prevented from falling out of position.

Description

The fluid control device that has heating equipment
Technical field
The present invention relates to the middle fluid control devices that use such as a kind of semiconductor manufacturing facility, particularly relate to the fluid control device that has heating equipment.
Background technique
In the fluid control device that uses in semiconductor manufacturing facility, various fluid controls become the multiple row configuration, and connect by controller bindiny mechanism on appointed positions between the stream of adjacent two row fluid controls.Yet in recent years, this class fluid control device is towards the integrated direction development that by pipe mass flow controller, switching valve is not coupled together.
In this class fluid control device, in order to prevent dewfall, and for fear of normal temperature down for liquefaction once more in the liquid flow process of fluid after gasification, need to be equipped with heating equipment sometimes.As this fluid control device that has heating equipment, Japanese Patent Application Publication communique spy opens and discloses a kind of like this device for 2002-267100 number: dispose left and right strip heater in the both sides of a pipeline at least, and hold them on the corresponding connector element by a plurality of metal holders.
The advantage of the above-mentioned fluid control device that has heating equipment in the past is can suppress because of having the increase that area is set that heating equipment causes.But only the elastic force by clip can not make heater and fluid control main body etc. fully be adjacent to.For example, can realize by about heater heats to 50 ℃, but can not be heated to more than 80 ℃, that is to say to occur the situation of heating efficiency deficiency sometimes at desired temperature.Though can consider that bonding sponge silicon is as thermal insulating material on heater, again with the method for clip on sponge silicon, but can cause the thickness of the heater of the thickness that comprises sponge silicon to increase like this, therefore, such heater is unsuitable for being used in the integrated fluid control device of above-mentioned needs.Certainly also can promote heating efficiency by improving heater power, but so electric power consumption will increase, thereby produce uneconomical and problem energy loss.
Summary of the invention
The purpose of this invention is to provide a kind of fluid control device that has heating equipment, it both can suppress can promote heating efficiency again because of having the increase that area is set that heating equipment causes.
The fluid control device that has heating equipment of the present invention, in fluid control device, set up heating equipment, each pipeline of this fluid control device is configured on the base component side by side, this pipeline is formed by a plurality of fluid controls that are configured in top and a plurality of block connector element that is configured in the bottom, wherein, at least at the both sides of pipeline configuration planar heater, and the outside of these planar heaters is respectively against warming plate is arranged, be bonded together by bolt component between the warming plate, thereby prevent coming off of planar heater.
The material of preferred warming plate is made by the material with good heat resistance and thermal insulation, is for example made by engineering plastics.The pyroconductivity of warming plate preferably below 1.0 (W/mK), is preferably lower than 0.3 (W/mK).
According to fluid control device of the present invention, the both sides of the pipeline that heats at need dispose planar heater, and the outside of these planar heaters is respectively against warming plate is arranged, can be bonded together by bolt component between the warming plate, therefore can suppress because of having the increase that area is set that heating equipment causes, and only spend seldom time and just can realize heating the expection of pipeline.In addition, because the warming plate of engineering plastics is littler than the pyroconductivity of metal holder (stainless pyroconductivity is 16.3W/mK), institute is so that effect of heat insulation improves, like this, even under the situation of using identical heater, also pipeline can be heated to higher temperature.
Be provided with the protuberance that at least one stretches out towards the warming plate of opposite side on the top of each warming plate, and preferably make between the front end of these protuberances and dock.In addition, preferably the protuberance of a side warming plate is provided with the screw jack that inserts usefulness for connecting bolt, and the protuberance of opposite side warming plate is provided with the internal thread that is screwed into usefulness for connecting bolt.
So, the interval between the warming plate can be remained necessarily, be easy to carry out the bolt attended operation.
Description of drawings
Fig. 1 is an exploded perspective view, and it has represented the fluid control device that has heating equipment of the present invention.
Fig. 2 is a stereogram, and it has represented the fluid control device that has heating equipment of the present invention.
Embodiment
Below with reference to accompanying drawing embodiments of the present invention are described.
Fig. 1 and Fig. 2 have showed the part that has the fluid control device of heating equipment of the present invention.Pipeline is configured in base component (omitting among the figure) side by side and go up forms fluid control device (1), and wherein, this pipeline is by being configured in) a plurality of fluid controls (2), (3), (4) on top and a plurality of block connector element (5) that is configured in the bottom form.
Heating equipment (11) has planar heater (12), and this planar heater (12) is configured in the and arranged on left and right sides of a pipeline at least, and it is used for convection cell controller (2), (3), (4) and connector element (5) and heats.In the outside of these planar heaters (12) respectively against the left and right warming plate (13), (14) that have engineering plastics to make, the bolt (screw member) (15) by the band hexagon ring links together between left and right warming plate (13), (14) toward each other, thereby avoids planar heater (12) to come off from fluid control (2), (3), (4) and connector element (5).
Planar heater (12) the height of middle body can covering fluid controller (2), the main body and connector element (5) integral body of (3), (4), and its middle body of aspect ratio at this planar heater (12) two ends is also higher, makes it roughly become the U font on the whole.Certainly, the shape of planar heater is not limited only to roughly U font, also can be highly identical band shape.
The height of the height of left and right warming plate (13), (14) and planar heater (12) middle body is roughly the same, and its part near two ends is outstanding towards the top.These towards above on the outstanding position, be respectively arranged with towards the warming plate (13) of opposite side, protuberance (13a), (13b), (14a), (14b) that stretch out (14), the front end of these protuberances (13a), (13b), (14a), (14b) docks each other.Protuberance (13a), (13b) of left side warming plate (13) are bigger than protuberance (14a) overhang (14b) of right warming plate (14).
Each protuberance (13a), (13b), (14a), (14b) are supported by the upper surface of the main body of fluid control (2), (3), (4), the protuberance (13a) of the side among these protuberances (13a), (13b), (14a), (14b), (14a) are configured between the highly higher fluid control (3), and the protuberance of opposite side (13b), (14b) are configured between the highly shorter fluid control (4).Interfere for avoiding being configured between left warming plate (13) protuberance (13a) between the highly higher fluid control (3) and the fluid control (3), (13a) makes such shape with protuberance: the shape that cuts a part from the opposite side protuberance (13b) of left warming plate (13).
As shown in Figure 1, the protuberance (14a) of right warming plate (14), (14b) are provided with the screw jack (16) that inserts usefulness for connecting bolt (15), are respectively arranged with the internal thread (17) that is screwed into usefulness for connecting bolt (15) on the protuberance (13a) of left warming plate (13), (13b).
Kind for the engineering plastics that constitute above-mentioned warming plate (13), (14) is not made special qualification, but its pyroconductivity is preferably lower than 0.3 (W/mK), for example, it can be that pyroconductivity is the PEEK of 0.25 (W/mK), pyroconductivity is the ULTEM of 0.22 (W/mK), and pyroconductivity is the MC nylon of 0.18 (W/mK) etc.In addition, the material that forms warming plate (13), (14) is also optional certainly with the material beyond the engineering plastics, but its pyroconductivity should be preferably lower than 0.3 (W/mK) below 1.0 (W/mK).
The present invention can be suppressed in the fluid control device of use such as semiconductor manufacturing facility because of having the caused increase that area is set of heating equipment, can improve heating efficiency simultaneously.Therefore, the present invention can provide and can prevent dewfall and avoid normal temperature under liquefying once more in the flow process of fluid after gasification for liquid state and have the fluid control device of high-performance and high universalizable.

Claims (5)

1. fluid control device that has heating equipment, set up heating equipment in this fluid control device, each pipeline is configured on the base component side by side, and this pipeline is formed by a plurality of fluid controls that are configured in top and a plurality of block connector element that is configured in the bottom, it is characterized in that
Heating equipment has planar heater, this planar heater is configured in the both sides of a pipeline at least, thereby convection cell controller and connector element heat, and the outside of these planar heaters is respectively against warming plate is arranged, be bonded together by bolt component between the warming plate, thereby prevent coming off of planar heater.
2. the fluid control device that has heating equipment as claimed in claim 1 is characterized in that,
Be provided with the protuberance that at least one stretches out towards the warming plate of opposite side on the top of each warming plate, and the front end of these protuberances docks mutually.
3. the fluid control device that has heating equipment as claimed in claim 2 is characterized in that,
The protuberance of one side warming plate is provided with the screw jack that inserts usefulness for connecting bolt, and the protuberance of opposite side warming plate is provided with the internal thread that is screwed into usefulness for connecting bolt.
4. as each described fluid control device that heating equipment is arranged that has in the claim 1 to 3, it is characterized in that,
Warming plate is made by engineering plastics.
5. as each described fluid control device that has heating equipment in the claim 1 to 3, it is characterized in that,
The pyroconductivity of warming plate is smaller or equal to 0.3W/mK.
CNB2004800131322A 2003-05-14 2004-04-19 Fluid control device with heater Expired - Fee Related CN100357647C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003135541A JP2004340199A (en) 2003-05-14 2003-05-14 Fluid control device with heater
JP135541/2003 2003-05-14

Publications (2)

Publication Number Publication Date
CN1788174A true CN1788174A (en) 2006-06-14
CN100357647C CN100357647C (en) 2007-12-26

Family

ID=33447187

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004800131322A Expired - Fee Related CN100357647C (en) 2003-05-14 2004-04-19 Fluid control device with heater

Country Status (9)

Country Link
US (1) US7677265B2 (en)
EP (1) EP1624236A4 (en)
JP (1) JP2004340199A (en)
KR (1) KR101049205B1 (en)
CN (1) CN100357647C (en)
CA (1) CA2525706A1 (en)
IL (1) IL171936A0 (en)
TW (1) TWI345259B (en)
WO (1) WO2004102054A1 (en)

Cited By (1)

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CN101937834A (en) * 2009-06-30 2011-01-05 Ckd株式会社 Air supply unit and feeder

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JP5274518B2 (en) * 2009-06-30 2013-08-28 Ｃｋｄ株式会社 Gas supply unit and gas supply device
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US8327879B2 (en) * 2010-03-10 2012-12-11 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8746284B2 (en) * 2011-05-11 2014-06-10 Intermolecular, Inc. Apparatus and method for multiple symmetrical divisional gas distribution
US9696727B2 (en) * 2013-03-08 2017-07-04 Fujikin Incorporated Fluid control apparatus and thermal sensor installation structure with respect to fluid control apparatus
JP6475950B2 (en) 2014-10-29 2019-02-27 株式会社フジキン Heating device for fluid controller and fluid control device
JP6484497B2 (en) * 2015-04-24 2019-03-13 株式会社フジキン Thermal insulation cover and fluid control device
JP6596025B2 (en) * 2015-07-01 2019-10-23 ニチアス株式会社 HEATER DEVICE AND METHOD OF HEATING A HEATED BODY USING THE SAME
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Also Published As

Publication number Publication date
US7677265B2 (en) 2010-03-16
WO2004102054A1 (en) 2004-11-25
TWI345259B (en) 2011-07-11
EP1624236A1 (en) 2006-02-08
CN100357647C (en) 2007-12-26
CA2525706A1 (en) 2004-11-25
KR101049205B1 (en) 2011-07-14
JP2004340199A (en) 2004-12-02
EP1624236A4 (en) 2006-05-17
IL171936A0 (en) 2006-04-10
TW200504799A (en) 2005-02-01
KR20060007430A (en) 2006-01-24
US20070169819A1 (en) 2007-07-26

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Granted publication date: 20071226

Termination date: 20100419