JP4110304B2 - Fluid control device and fluid control device assembly method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a fluid control device for semiconductor manufacturing and an assembly method thereof, and in particular, a fluid configured by combining a regulator such as a mass flow controller for adjusting a flow rate or a pressure regulator for adjusting a pressure with an on-off valve. The present invention relates to a control device and a method for assembling such a fluid control device .
[0002]
In this specification, the top and bottom refer to the top and bottom of each figure. This up and down is for convenience, and may be upside down or lying down.
[0003]
[Prior art]
A fluid control device for semiconductor manufacturing is configured by combining a mass flow controller for adjusting a flow rate, a pressure regulator for adjusting a pressure, and an on-off valve, and the like. As a preferred configuration of the present invention, a block-shaped main body is provided with a plurality of fluid control members arranged at the upper stage and a plurality of joints arranged at the lower stage, and at least one fluid control member is attached to the joint so that it can be taken out upward. Have proposed a fluid control device in which a plurality of single function members are integrally provided (see Japanese Patent Application No. 9-278495).
[0004]
4 and 5 show an example of such a fluid control device. In the following description, the left and right refer to the left and right in FIG. 2 and FIG. 5, the front means the chart side, and the rear means the back side of the figure.
[0005]
4 and 5, the fluid control device (1) includes a plurality of block joints (5) (6) (7) (8) (9) (10) attached to the substrate (11), and these blocks. It consists of multiple types of fluid controllers (2), (3), and (4) attached to the joints (5), (6), (7), (8), (9), and (10).
[0006]
The fluid controllers (2), (3), and (4) are, in order from the left, the first block valve (2), the mass flow controller (regulator) (3), and the second block valve (4). ) (6) (7) (8) (9) (10) are, from left to right, a block joint (5) with a first V-shaped passage (5a) having an upward left opening and a right opening, respectively, A block joint (6) with a first L-shaped passage (6a) having an opening and a rearward opening, a block joint (7) with a second V-shaped passage (7a) having an upward left opening and a right opening, respectively. Block joint (8) with a third V-shaped passage (8a) each having an upward left opening and a right opening, Block joint (9) with a second L-shaped passage (9a) having an upward opening and a rear opening A block joint (10) with a third L-shaped passage (10a) having an upward opening and a rightward opening.
[0007]
Through holes (25) and screw holes (26) are provided at predetermined locations on each block joint (5) (6) (7) (8) (9) (10). The passed bolt (not shown) is fixed to the board (11) by being screwed into a screw hole (not shown) of the board (11). In each fluid controller (2) (3) (4), the bolt (27) passed from above is screwed into the screw hole (26) of the block joint (5) (6) (7) (8) (9) (10). ) Is fixed to the corresponding block joint (5) (6) (7) (8) (9) (10).
[0008]
The first block valve (2) includes a rectangular parallelepiped block main body (12) which is long on the left and right sides, a first actuator (13) and a second actuator (14) mounted on the upper surface of the main body (12), and a right side of the main body (12). A right block (15) with an inverted L-shaped passage (15a) attached to the surface and a rear block (16) with an inverted L-shaped passage (not shown) attached to the rear side of the main body, ) The left end is on the right half of the block joint (5) with the first V-shaped passage (5a), and the right block (15) is on the left half of the block joint (2) with the second V-shaped passage (7a) The rear block (16) is attached to the block joint (6) with the first L-shaped passage (6a).
[0009]
The main body (12) of the first block valve (2) has a first inflow passage (31) that opens downward at the left end and communicates with the right opening of the block joint (5) with the first V-shaped passage (5a). ), The first inflow path (31) and the first actuator (13), and the outflow path (32) leading to the right-facing path of the inverted L-shaped path (15a) of the right block (15), and the outflow path There is provided a downward second inflow passage (33) that communicates with the second actuator (14) and communicates with the upward opening of the block joint (6) with the first L-shaped passage (6a). The downward passage of the inverted L-shaped passage (15a) of the right block (15) communicates with the left opening of the block joint (7) with the second V-shaped passage (7a).
[0010]
A left block (17) having an inverted L-shaped passage (17a) communicating with an inflow passage (not shown) of the adjuster (3) projects to the left at the lower end of the left side surface of the adjuster (3). The right block (18) having an inverted L-shaped passage (18a) communicating with the outflow passage (not shown) of the regulator is provided at the lower end of the right side surface of the regulator (3). Overhangs. The left passage block (17) is attached to the right half of the block joint (7) with the second V-shaped passage, so that the inverted L-shaped passage (17a) of the left block (17) and the first block valve ( The reverse L-shaped passage (15a) of the right block (15) of 2) is communicated with a block joint (7) with a second V-shaped passage (7a). The right block (18) of the adjuster (3) is attached to the left half of the block joint (8) with the third V-shaped passage (8a).
[0011]
The second block valve (4) includes a rectangular parallelepiped block main body (19) which is long to the left and right, a third actuator (20) and a fourth actuator (21) mounted on the upper surface of the main body (19), and a right side of the main body (19). It consists of a right block (22) with an inverted L-shaped passage (22a) attached to the surface and a rear block (23) with an inverted L-shaped passage attached to the rear side of the main body, and the left end of the main body (19) is In the right half of the block joint (8) with the third V-shaped passage (8a), the right block (22) is in the block joint (10) with the third L-shaped passage (10a) and the rear block (23) is in the second L Each is attached to a block joint (9) with a letter-shaped passage (9a). A fluid outflow portion (24) is provided in the rightward opening of the block joint (10) with the third L-shaped passage (10a).
[0012]
The main body (19) of the second block valve (4) has an inflow passage (34) that opens downward at the left end and communicates with the right opening of the block joint (8) with the third V-shaped passage (8a). A first outflow path (35) connected to the inflow path (34) via the third actuator (20) and leading to the right-hand passage of the inverted L-shaped path (22a) of the right block (22), and the first outflow path There is provided a downward second outflow passage (36) that communicates with (35) and the fourth actuator (21) and communicates with the upward opening of the block joint (9) with the second L-shaped passage (9a). The right block (22) with the inverted L-shaped passage (22a) of the second block valve (4) and the block joint (10) with the third L-shaped passage (10a) communicate with each other.
[0013]
Each member (5) (2) (6) (15) (7) (17) (18) (8) (4) (9) (22) (10) has a fluid coupling (30 ) Is provided.
[0014]
According to this fluid control device (1), the first and second block valves (fluid control members) (2) and (4) are respectively connected to a block-shaped body (12) and (19) with a plurality of actuators (blocking of fluid passages). (Single function member that opens) (13) (14) (20) (21) is integrated and configured, so the number of parts such as block main body and seal member can be reduced, Further, when any one of the plurality of single function members needs to be replaced, the fluid control member can be taken out and replaced with the required single function member, so that the maintenance is easy. have.
[0015]
[Problems to be solved by the invention]
In the above fluid control device, there was no problem when taking out only the mass flow controller or only the block valve. However, the shut-off of the inlet / outlet of the mass flow controller cannot be removed in a state that can be controlled by the block valve. There was a problem that sometimes I felt inconvenience. Also, when assembling this fluid control device, each block joint is finally tightened to the substrate with a screw member, and then the fluid control member is attached so as to straddle them, and when the positioning accuracy of each block joint is poor, There was also a problem that it was difficult to install the fluid control member.
[0016]
The object of the present invention is to improve the maintainability by making it possible not only to take out only the mass flow controller or the valve alone but also to remove the mass flow controller at the inlet / outlet in a state that can be controlled by the valve. It is another object of the present invention to provide a fluid control device that can improve the workability of assembly.
[0017]
[Means for Solving the Problems and Effects of the Invention]
The fluid control device according to the present invention includes a plurality of fluid control members arranged in an upper stage and a plurality of block joints arranged in a lower stage, wherein each fluid control member is screwed from above. optionally with attached across the block couplings adjacent to allow upward extraction, passage between the upper adjacent fluid control member is communicated with the passage of the lower block couplings, each block joint, the flow body control member And is attached to the substrate by a screw member that is passed through a through hole provided in a surface that does not protrude from the installation surface of the fluid control member when viewed from above and is not covered with the fluid control member when viewed from above. It is characterized by that.
[0018]
As the fluid control member, an on-off valve, a pressure regulator, a filter, a pressure sensor, one block-shaped body integrally provided with two or three on-off valves, one pressure-regulator on one block-shaped body, and one For example, one pressure sensor is integrally provided.
[0019]
By removing the screw member that attaches each fluid control member to the block joint, each fluid control member can be removed independently, and the screw member that attaches each fluid control member to the block joint and the block joint are formed on the substrate. By removing a predetermined one of the screw members attached to the fluid member, the fluid control members can be removed in a connected state. Therefore, various removal methods can be taken according to the situation at the time of maintenance, and the maintainability is improved.
[0020]
When assembling the fluid control device according to the present invention, first, each block joint is temporarily fastened to the substrate with a screw member, and the fluid control member is attached so as to straddle them, and finally, each block joint is temporarily fastened. What is necessary is just to fully tighten a screw member. By doing so, each block joint can be moved slightly compared to the conventional device in which each block joint is finally tightened to the substrate with a screw member and then the fluid control member is attached so as to straddle them. This makes it easier to install the fluid control member.
[0021]
The fluid control device assembling method according to the present invention includes a plurality of fluid control members arranged at the upper stage and a plurality of block joints arranged at the lower stage, and adjacent blocks so that the screw members screwed from above can be taken out upward. is attached over the joint, each block joint, from the flow body control member receiving viewed from OriKatsu plane passes through a through hole provided in the surface not protrudes from the installation surface of the fluid control member and the upper It is a method of assembling a fluid control device that is attached to a substrate by a screw member that is not covered by the fluid control member as seen and the passages of adjacent fluid control members in the upper stage are connected to each other by the passages of the lower block joint. The first step of temporarily fastening each block joint to the substrate with a screw member, and each fluid control member being connected to adjacent block joints. A second step of attaching Therefore, one in which each block joint and a third step of the tightening of the screw member are temporarily tightened.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0023]
1 to 3 show a fluid control apparatus according to the present invention. The fluid control device (40) according to the present invention is different from the fluid control device (1) shown in FIGS. 4 and 5 only in the shape of a block joint with a V-shaped passage. The same components as those shown in FIGS. 4 and 5 are denoted by the same reference numerals and description thereof is omitted.
[0024]
1 and 2, the block joint (41) with the first V-shaped passage (41a) to which the left end of the main body (12) of the first block valve (2) is attached, and the first block valve (2) Block joint (42) with the second V-shaped passage (42a) to which the right block (15) of the mass flow controller and the left block (17) of the mass flow controller (3) are attached, and the right block (18) of the mass flow controller (3) The block joint (43) with the third V-shaped passage (43a) to which the left end of the main body (19) of the second block valve (4) is attached is the first V-shaped as shown in FIGS. Compared to block joint (5) with passage (5a), block joint (7) with second V-shaped passage (7a) and block joint (8) with third V-shaped passage (8a) Yes. Therefore, the left and right central portions of the block joints (41), (42), and (43) are not covered with the fluid controllers (2), (3), and (4). Each V-shaped passage (41a) (42a) (43a) has an intersection angle larger than the intersection angle of the V-shaped passages (5a) (7a) (8a) shown in FIGS. The pressure loss at the intersection is small.
[0025]
Screw holes (26) corresponding to the screw holes (26) of the block joints (5), (7) and (8) shown in FIGS. 4 and 5 are provided at the four corners of each block joint (41), (42) and (43). And a through hole corresponding to the through hole (25) of the block joints (5), (7) and (8) shown in FIGS. 44) is provided. Then, the bolts (45) passed through these through holes (44) are screwed into screw holes (not shown) of the substrate (11), so that each of the block joints (41), (42), (43) 11) and bolts (27) passed from above each fluid controller (2) (3) (4) are screwed into the screw holes (26) of each block joint (41) (42) (43) As a result, the fluid controllers (2), (3), and (4) are attached across the adjacent block joints (41), (42), and (43).
[0026]
A procedure for performing maintenance of the fluid control device (40) configured as described above will be described with reference to FIG. In the figure, the screw (27) is represented by (A1) to (A6), and the screw (45) is represented by (B1) to (B7).
[0027]
In FIG. 3, the procedure for taking out only the mass flow controller (3) or only the block valves (2) and (4) is the same as the conventional one. That is, by removing the screws with the symbols (A1) and (A2), the first block valve (2) can be taken out upward, and the screws with the symbols (A3) and (A4) are attached. By removing it, the mass flow controller (3) can be taken out upward, and by removing the screws with the symbols (A5) and (A6), the second block valve (4) can be taken out upward. It becomes. When taking out with the first block valve (2) and the second block valve (4) attached to the left and right of the mass flow controller (3), (A1), (B4), (B5) and By removing the screw labeled (A6), the mass flow controller (3) and the first block valve (2) are connected by the second block joint (42), and the mass flow controller (3) and the second block valve are connected. (4) can be removed while being connected by the third block joint (43). Similarly, it is possible to take out the mass flow controller (3) with the second block valve (4) attached. In this way, various removal methods can be taken according to the situation at the time of maintenance.
[0028]
When assembling the fluid control device according to the present invention, each block joint (41) (42) (43) is attached to the substrate (11) with screws (B1) (B4) (B5), and the mass flow controller so as to straddle them. (3) and block valves (2) and (4) will be installed. In this case, the block joints (41), (42) and (43) are not temporarily tightened but temporarily tightened in the first stage. It is preferable to keep it. Then, in the second stage, the mass flow controller (3) and the block valve (2) (4) are installed, and in the final stage, the screws (B1) that temporarily tighten the block joints (41) (42) (43) (B4) (B5) may be finally tightened. In this way, when installing the mass flow controller (3) or block valve (2) (4), each block joint (41) (42) (43) can be moved slightly, and each block joint (41 ) (42) (43) Even if the positioning accuracy is slightly reduced, there will be no hindrance to the mass flow controller (3) and block valve (2) (4) installation work.
[0029]
As shown in FIG. 3, the screws (B1), (B4), and (B5) for attaching the block joints (41), (42), and (43) to the substrate (11) are provided with counterbores for accommodating their heads. However, the heads of these screws (B1), (B4), and (B5) may protrude above the upper surfaces of the block joints (41), (42), and (43). .
[Brief description of the drawings]
FIG. 1 is an exploded perspective view of a fluid control apparatus according to the present invention.
FIG. 2 is a longitudinal sectional view of the same.
FIG. 3 is a front view of the same.
FIG. 4 is an exploded perspective view of a conventional fluid control device corresponding to the fluid control device of the present invention.
FIG. 5 is a longitudinal sectional view of the same.
[Explanation of symbols]
(2) (3) (4) Fluid control member
(11) Board
(31) (15a) (17a) (18a) (34) Passage
(41) (42) (43) Block fitting
(41a) (42a) (43a) Passage
(B4) (B5) Screw member

Claims (2)

In the fluid control device comprising a plurality of fluid control members (2) (3) (4) arranged in the upper stage and a plurality of block joints (41) (42) (43) arranged in the lower stage, each fluid control Adjacent block joints (41) so that members (2), (3), and (4) can be taken out upward by screw members (A1) (A2) (A3) (A4) (A5) (A6) screwed from above ) (42) (43), and the passages (31) (15a) (17a) (18a) (34) of the upper adjacent fluid control members (2) (3) (4) block couplings (41) (42) (43) passage (41A) (42a) (43a) is communicated with the respective block joint (41) (42) (43), the flow body control member (2) (3) The fluid that has been received by (4) and passed through the through-hole provided on the surface of the fluid control member (2), (3), (4) that does not protrude from the installation surface when viewed from above and viewed from above It is characterized by being attached to the substrate (11) by screw members (B1) (B4) (B5) that are not covered by the control members (2), (3), and (4). That the fluid control device. Screw member (A1) screwed from above with a plurality of fluid control members (2) (3) (4) arranged in the upper stage and a plurality of block joints (41) (42) (43) arranged in the lower stage ) (A2) (A3) (A4) (A5) (A6) are installed across the adjacent block joints (41) (42) (43) so that they can be taken out upward, and each block joint (41) (42) (43), the flow body control member (2) (3) (4) when viewed from OriKatsu plane receiving the fluid control member (2) (3) (4) not protrudes from the installation surface plane And is attached to the substrate (11) by screw members (B1) (B4) (B5) which are passed through the through-holes formed in the cover and not covered with the fluid control members (2) (3) (4) when viewed from above. In addition, the passages (31) (15a) (17a) (18a) (34) of the adjacent upper fluid control members (2), (3), and (4) are connected to the lower block joints (41) (42) (43). Each of the block joints (41), (42), and (43). The first step of temporarily tightening the substrate (11) with the members (B1), (B4), and (B5); ) And a third step of final tightening of the screw members (B1), (B4) and (B5) temporarily tightening the block joints (41), (42) and (43). Control device assembly method.

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