CN1779996A - 在金属热沉上的激光剥离功率型led芯片及其制备方法 - Google Patents
在金属热沉上的激光剥离功率型led芯片及其制备方法 Download PDFInfo
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- CN1779996A CN1779996A CNA2004100098415A CN200410009841A CN1779996A CN 1779996 A CN1779996 A CN 1779996A CN A2004100098415 A CNA2004100098415 A CN A2004100098415A CN 200410009841 A CN200410009841 A CN 200410009841A CN 1779996 A CN1779996 A CN 1779996A
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- heat sink
- electrode
- metal heat
- reflector
- led chip
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 238000001465 metallisation Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 238000001704 evaporation Methods 0.000 claims abstract description 20
- 238000001020 plasma etching Methods 0.000 claims abstract description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 45
- 239000010931 gold Substances 0.000 claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 239000010936 titanium Substances 0.000 claims description 30
- 239000010949 copper Substances 0.000 claims description 26
- 229910052594 sapphire Inorganic materials 0.000 claims description 15
- 239000010980 sapphire Substances 0.000 claims description 15
- 230000008020 evaporation Effects 0.000 claims description 14
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 239000011133 lead Substances 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000001413 cellular effect Effects 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000010944 silver (metal) Substances 0.000 claims description 3
- 238000005275 alloying Methods 0.000 claims description 2
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims 1
- 238000010276 construction Methods 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 239000003595 mist Substances 0.000 claims 1
- 238000009832 plasma treatment Methods 0.000 claims 1
- 238000009713 electroplating Methods 0.000 abstract description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 description 8
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000007598 dipping method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 238000003776 cleavage reaction Methods 0.000 description 1
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- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910001751 gemstone Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
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- Led Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2004100098415A CN100383989C (zh) | 2004-11-23 | 2004-11-23 | 在金属热沉上的激光剥离功率型led芯片及其制备方法 |
Applications Claiming Priority (1)
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CNB2004100098415A CN100383989C (zh) | 2004-11-23 | 2004-11-23 | 在金属热沉上的激光剥离功率型led芯片及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN1779996A true CN1779996A (zh) | 2006-05-31 |
CN100383989C CN100383989C (zh) | 2008-04-23 |
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CNB2004100098415A Expired - Fee Related CN100383989C (zh) | 2004-11-23 | 2004-11-23 | 在金属热沉上的激光剥离功率型led芯片及其制备方法 |
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CN (1) | CN100383989C (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009005477A1 (en) * | 2007-07-04 | 2009-01-08 | Tinggi Technologies Private Limited | Separation of semiconductor devices |
CN101351887B (zh) * | 2005-10-19 | 2010-11-03 | 霆激技术有限公司 | 晶体管的制造 |
CN102148139A (zh) * | 2010-12-31 | 2011-08-10 | 东莞市中镓半导体科技有限公司 | 改进的激光准剥离消除GaN外延片残余应力的方法 |
CN102157649A (zh) * | 2011-01-31 | 2011-08-17 | 杭州士兰明芯科技有限公司 | 垂直结构氮化镓发光二极管芯片及其制备方法 |
CN102447015A (zh) * | 2010-10-01 | 2012-05-09 | 陈祖辉 | 一种垂直结构发光二极管 |
US8507367B2 (en) | 2007-07-04 | 2013-08-13 | Tinggi Technologies Pte Ltd. | Separation of semiconductor devices |
CN101939860B (zh) * | 2008-10-16 | 2014-10-29 | Lg伊诺特有限公司 | 半导体发光器件及其制造方法 |
CN108281527A (zh) * | 2018-01-25 | 2018-07-13 | 映瑞光电科技(上海)有限公司 | 一种led芯片的制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5724376A (en) * | 1995-11-30 | 1998-03-03 | Hewlett-Packard Company | Transparent substrate vertical cavity surface emitting lasers fabricated by semiconductor wafer bonding |
JP4122785B2 (ja) * | 2002-01-30 | 2008-07-23 | 日亜化学工業株式会社 | 発光素子 |
CN100336234C (zh) * | 2003-03-03 | 2007-09-05 | 诠兴开发科技股份有限公司 | 裸晶式发光二极管 |
-
2004
- 2004-11-23 CN CNB2004100098415A patent/CN100383989C/zh not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101351887B (zh) * | 2005-10-19 | 2010-11-03 | 霆激技术有限公司 | 晶体管的制造 |
WO2009005477A1 (en) * | 2007-07-04 | 2009-01-08 | Tinggi Technologies Private Limited | Separation of semiconductor devices |
US8507367B2 (en) | 2007-07-04 | 2013-08-13 | Tinggi Technologies Pte Ltd. | Separation of semiconductor devices |
CN101939860B (zh) * | 2008-10-16 | 2014-10-29 | Lg伊诺特有限公司 | 半导体发光器件及其制造方法 |
CN102447015A (zh) * | 2010-10-01 | 2012-05-09 | 陈祖辉 | 一种垂直结构发光二极管 |
CN102447015B (zh) * | 2010-10-01 | 2015-11-25 | 陈祖辉 | 一种垂直结构发光二极管 |
CN102148139A (zh) * | 2010-12-31 | 2011-08-10 | 东莞市中镓半导体科技有限公司 | 改进的激光准剥离消除GaN外延片残余应力的方法 |
CN102148139B (zh) * | 2010-12-31 | 2012-06-13 | 东莞市中镓半导体科技有限公司 | 改进的激光准剥离消除GaN外延片残余应力的方法 |
CN102157649A (zh) * | 2011-01-31 | 2011-08-17 | 杭州士兰明芯科技有限公司 | 垂直结构氮化镓发光二极管芯片及其制备方法 |
CN108281527A (zh) * | 2018-01-25 | 2018-07-13 | 映瑞光电科技(上海)有限公司 | 一种led芯片的制备方法 |
Also Published As
Publication number | Publication date |
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CN100383989C (zh) | 2008-04-23 |
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