CN1776888A - Cutting device - Google Patents
Cutting device Download PDFInfo
- Publication number
- CN1776888A CN1776888A CNA200510125379XA CN200510125379A CN1776888A CN 1776888 A CN1776888 A CN 1776888A CN A200510125379X A CNA200510125379X A CN A200510125379XA CN 200510125379 A CN200510125379 A CN 200510125379A CN 1776888 A CN1776888 A CN 1776888A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- main shaft
- ultrasonic vibration
- spindle
- collar bush
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001939 inductive effect Effects 0.000 claims description 8
- 230000006698 induction Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/003—Couplings; Details of shafts
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/0094—Structural association with other electrical or electronic devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
Abstract
Provided is an cutting device comprises: a maintaining mechanism for maintaining the processed article; a spindle, a spindle housing for supporting the spindle rotatably, a circle cutting blade fitted to the spindle, a rotating mechanism for rotating the spindle, the electrostrictive vibrator that is provided at the spindle and performs the ultrasonic vibration of the spindle, and circuit supply mechanism for providing alternating current to the electrostrictive vibrator. The ultrasonic vibration cutting device converts the transmission direction of ultrasonic vibration transmitted from the electrostrictive vibrator via the spindle, performs the ultrasonic vibration of the cutting blade in the radial direction, and cuts the work to be machined. The current supply mechanism has a noncontact power feeder with a primary loop fixed on the spindle housing and secondary loop fixed on the spindle.
Description
Technical field
The present invention relates to by making the rotation of circular bite and while making its ultrasonic vibration affact the topping machanism that cuts machined object on the machined object.
Background technology
As the topping machanism that is applicable to the hard fragility machined object of cutting as semiconductor wafer, open 2000-210928 communique and (Japan) spy (Japan) spy and open and disclose a kind of topping machanism in the 2001-162493 communique, while to make circular bite be the center rotation with its central axis and make it do ultrasonic vibration on the direction perpendicular to its axis to affact and cut machined object on the machined object.This topping machanism has: the maintaining body that is used for keeping machined object; Collar bush; Rotation is installed in the main shaft on this collar bush freely; Be fixed on the circular cutter on the main shaft; Be used for making the rotating mechanism of main axis rotation; Be used for making main shaft to carry out the piezoelectric vibrator of ultrasonic vibration; And be used for supplying with the electric current supply mechanism of alternating current to piezoelectric vibrator.The piezoelectric vibrator that has been supplied to alternating current makes main shaft do ultrasonic vibration on the axle line direction therein, and this ultrasonic vibration is transformed the direction perpendicular to the central axis of main shaft, passes to bite.
Be that center rotation acts on the situation of cutting machined object on the machined object and compares with its central axis only by making bite, if to make bite be center rotation with its central axis and affact and cut machined object on the machined object while making it do ultrasonic vibration on the direction perpendicular to its central axis, even be under the situation of hard fragility then at machined object, also can avoid or suppress the generation of so-called fragmentation (チ Star ピ Application グ), can carry out cutting with high efficiency to machined object.
But, in above-mentioned topping machanism, existence and the problem that solves to the relevant following needs of the alternating current supply of piezoelectric vibrator.That is, in above-mentioned topping machanism, be used on the electric current supply mechanism that piezoelectric vibrator is supplied with alternating current comprises the terminal component that is fixed on the main shaft and is fixed on collar bush and the elastic contact chip or the contact brush that contact with above-mentioned terminal component.If terminal component rotates along with the rotation of main shaft, then elastic contact chip or contact brush are with respect to the terminal component sliding friction.Because main shaft is with the rotation of quite high speed, thus elastic contact chip or contact brush with quite high speed with respect to the terminal component sliding friction, so elastic contact chip or contact brush just have the trend of wearing and tearing or damage in the relatively shorter time.In addition, also might be because of the slide relative friction produces chip from elastic contact chip or contact brush or terminal component, because of this chip makes the bearing state variation of main shaft or pollutes machined object.
Open in the flat 11-10420 communique (Japan) spy, disclose the technology of using the magnetostrictive vibrator that does not need to supply with alternating current to replace piezoelectric vibrator.But well-known, magnetostrictive vibrator has expensive more a lot and be difficult to obtain the problem of stable vibration than piezoelectric vibrator.
Summary of the invention
The present invention makes in view of above-mentioned actual conditions, its main purpose is to use the relatively more cheap and piezoelectric vibrator that can access stable ultrasonic vibration as being used for making main shaft to do in the topping machanism of vibrating mechanism of ultrasonic vibration, solving the problem of supplying with about to the alternating current of piezoelectric vibrator as described above.
The present inventor studies with keen determination, found that, the electric current supply mechanism that comprises the form of noncontact inductive power supply mechanism by employing, just can realize above-mentioned main purpose, described noncontact inductive power supply mechanism comprises and is fixed to the primary coil on the collar bush and is fixed to secondary coil on the main shaft.
That is, according to the present invention, as the topping machanism of realizing above-mentioned main purpose, have: maintaining body is used for keeping machined object; Collar bush; Main shaft, rotation is installed on the above-mentioned collar bush freely; Circular bite is fixed on the above-mentioned main shaft; Rotating mechanism is used for making above-mentioned main axis rotation; Piezoelectric vibrator is used for making above-mentioned main shaft to carry out ultrasonic vibration; Electric current supply mechanism is used for supplying with alternating current to above-mentioned piezoelectric vibrator; Ultrasonic vibration when making above-mentioned main axis rotation, ultrasonic vibration when making above-mentioned bite rotation thus and above-mentioned bite is acted on the machined object; It is characterized in that,
Above-mentioned electric current supply mechanism comprises noncontact inductive power supply mechanism, and described noncontact inductive power supply mechanism has the primary coil that is fixed on the above-mentioned collar bush and is fixed on secondary coil on the above-mentioned main shaft.
Preferably, above-mentioned secondary coil integral body is that the central axis with above-mentioned main shaft is the drum of central axis, and above-mentioned primary coil integral body is that the central axis with above-mentioned main shaft is the drum of central axis, and above-mentioned primary coil is surrounded into concentric shape.Preferably above-mentioned main shaft is installed on the above-mentioned collar bush via air bearing.In addition, preferably, above-mentioned rotating mechanism is the induction electric motor, has the permanent magnet that is fixed on the above-mentioned main shaft and is fixed on the above-mentioned collar bush and around the coil of above-mentioned permanent magnet.
Description of drawings
Fig. 1 is the profile of expression according to the major part of the preferred implementation of the topping machanism of the present invention's formation.
Embodiment
Describe the preferred implementation of the topping machanism that constitutes according to the present invention with reference to the accompanying drawings in detail.
Fig. 1 is the figure of expression according to the major part of the preferred implementation of the topping machanism of the present invention's formation.Illustrated topping machanism has the whole main axle unit of representing with label 2, and this main axle unit 2 comprises collar bush 4.Collar bush 4 integral body are drum, have the smaller front portion 8 of external diameter bigger rear portion 6 and external diameter.The through hole 9 that connects collar bush 4 and extend comprises internal diameter bigger rear portion 10 and the smaller front portion 12 of internal diameter.On the rearward end of collar bush 4, be formed with cyclic lug side-prominent in radial direction 14, also be formed with cyclic lug side-prominent in radial direction 16 on the leading section.And then, be formed with endless groove 18 in the front portion of through hole 9.
Rotation is installed with the whole main shaft of representing with label 2 freely in collar bush 4.Illustrated main shaft 20 has the bigger principal part of diameter 22, and has diameter smaller rearward end 24 and the smaller leading section 26 of diameter.Be formed with collar flange 28 in the front portion of principal part 22, it is positioned at the above-mentioned endless groove 18 that is formed on the collar bush 4.Compressed air is supplied between the outer peripheral face of the through hole 9 of collar bush 4 and main shaft 20 by the supply lines (not shown) that is formed on the collar bush 4, main shaft 20 rotations are bearing in the collar bush 4 freely via this compressed air.Front portion 12 performances of the through hole 9 of collar bush 4 are as the function of thrust (thrust) air bearing, and endless groove 18 performances of the through hole 9 of collar bush 4 are as the function of arrangement of axial air bearings.
On the leading section 26 of main shaft 20, fixing ring-type bite 30.More particularly, on main shaft 20, fixing annular hub (hub) 32 with flat front surface.On the other hand, the inner peripheral portion of bite 30 is fixed in the outer peripheral edges portion of smooth rear surface of annular hub 34.And, annular hub 34 covers are embedded on the leading section 26 of main shaft 20, by the suitable fixed mechanism (not shown) as trip bolt annular hub 34 is fixed on the annular hub 32, thereby bite 30 is fixed on the main shaft 20.Bite 30 is preferably the very thin annular blade that is formed by the suitable bond combination as electroforming metal by with diamond particles.
Go on to say with reference to Fig. 1, on the rearward end 24 of main shaft 20, set up the rotating mechanism 36 that is used for making main shaft 20 high speed rotating.In the illustrated embodiment, rotating mechanism 36 is by permanent magnet on the rearward end that is provided in main shaft 20 38 and the induction electric motor that is fixed in the rear portion 10 of through hole 9 and constitutes around the coils 40 of permanent magnet 38.Via suitable connecting line (not shown) coil 40 is supplied with alternating currents, make permanent magnet 38 rotations thus, thereby make main shaft 20 and be fixed in bite 30 rotations on the main shaft 20.
Connecting piezoelectric vibrator 42 in the rear end of main shaft 20.This piezoelectric vibrator 42 is made of piezoelectrics 44 and the battery lead plate 46 that is equipped on piezoelectrics 44 both sides.On main axle unit 2, also be equipped with the electric current supply mechanism 48 that is used for to oscillator 42 supply alternating currents.It is very important that this electric current supply mechanism 48 is made of noncontact inductive power supply mechanism.More particularly, connecting at the rear of the piezoelectric vibrator 42 that is connected with main shaft 20 to the support unit 50 of rear extension more, being installed with on the path rearward end of this support unit 50 and being subjected to electric coil is secondary coil 52.Need form support unit 50 itself or secondary coil 52 is installed on the support unit 50 by insulating material via the appropriate insulation parts.On the other hand, fixing the cup part 54 with cylindric perisporium and aft bulkhead on the rear end of collar bush 4, it is primary coil 56 that the power supply coil is installed on the inner peripheral surface of this cup part 54.Need form cup part 54 itself or primary coil 56 is installed on the cup part 54 by insulating material via the appropriate insulation parts.Primary coil 56 is connected with AC power via suitable connecting line (not shown).If make main shaft 20 rotations, supply with alternating current to primary coil 56, then in secondary coil 52, induce alternating current.The two-terminal of secondary coil 52 is connected with the battery lead plate 46 of each piezoelectric vibrator 42 by connecting line (not shown) respectively.Thereby the alternating current that induces in secondary coil 52 is fed into piezoelectric vibrator 42, makes piezoelectric vibrator 42 do ultrasonic vibration along the central axial direction of main shaft 20 thus, thereby makes main shaft 20 do ultrasonic vibration along its central axial direction.This vibration of main shaft 20 is transformed direction (being the above-below direction among Fig. 1) perpendicular to the central axis of main shaft 20 by above-mentioned annular hub 32 and 34, and passes to bite 30, and bite 30 is done ultrasonic vibration on the direction perpendicular to its central axis.Above-mentioned annular hub 32 and 34 performances are as ultrasonic vibration is transformed to function perpendicular to the vibration mapping device of the direction of the central axis of main shaft 20 from the central axial direction of main shaft 20.The detailed description of the ultrasonic vibration of the bite 30 that brings about piezoelectric vibrator 42, open 2000-210928 communique and (Japan) spy above-mentioned (Japan) spy and open in the 2001-162493 communique and put down in writing, omit its explanation in this manual so quote these records.
Go on to say with reference to Fig. 1, illustrated topping machanism has the maintaining body 60 that for example is used for keeping to the machined object 58 of semiconductor wafer.Maintaining body 60 also can be the mode of vacuum suction.When the machined object 58 that cutting is kept by maintaining body 60, main axle unit 2 is relatively descended with respect to maintaining body 60, be positioned at and make bite 30 with respect to the position of machined object 58 for the cutting depth be scheduled to.Then, make main shaft 20 high speed rotating and do ultrasonic vibration along its central axial direction, making bite 30 thus is the center high speed rotating with its central axis, and does ultrasonic vibration on the direction perpendicular to its central axis.Then, maintaining body 60 and main axle unit 2 are relatively moved on the direction perpendicular to paper in Fig. 1, and bite 30 is acted on the machined object 58.
In the illustrated execution mode of the topping machanism that constitutes according to the present invention, except the noncontact inductive power supply mechanism by the parts that do not have mutual sliding friction constitutes the electric current supply mechanism 52, also be configured to make the rotating mechanism 36 of main shaft 20 rotations by the induction electric motor, described induction electric motor is made of permanent magnet 38 that can not be in contact with one another and coil 40.Thereby, in main axle unit 2, when not having main shaft 20 rotation and the parts of miscellaneous part sliding friction.Therefore, illustrated topping machanism is operating stably for a long time, and in fact can not pollute machined object.
Abovely describe the preferred implementation of the topping machanism that constitutes according to the present invention in detail, but the present invention is not limited to this execution mode, it will be appreciated that to make various distortion or modification not departing from the scope of the present invention with reference to accompanying drawing.
For example, in the illustrated embodiment, the primary coil 56 and the secondary coil 52 that constitute electric current supply mechanism 52 are arranged in concentric shape, if but wish, also can make the primary coil that is fixed on the collar bush 4 and be fixed on secondary coil on the main shaft 20 and be in opposed position on the axis direction of main shaft 20.
Claims (4)
1, a kind of topping machanism has: maintaining body is used for keeping machined object; Collar bush; Main shaft; Rotation is installed on the above-mentioned collar bush freely; Circular bite is fixed on the above-mentioned main shaft; Rotating mechanism is used for making above-mentioned main axis rotation; Piezoelectric vibrator is used for making above-mentioned main shaft to carry out ultrasonic vibration; And electric current supply mechanism, be used for supplying with alternating current to above-mentioned piezoelectric vibrator; Ultrasonic vibration when making above-mentioned main axis rotation, ultrasonic vibration when making above-mentioned bite rotation thus and above-mentioned bite is acted on the machined object; It is characterized in that,
Above-mentioned electric current supply mechanism comprises noncontact inductive power supply mechanism, and described noncontact inductive power supply mechanism has the primary coil that is fixed on the above-mentioned collar bush and is fixed on secondary coil on the above-mentioned main shaft.
2, topping machanism as claimed in claim 1, it is characterized in that, above-mentioned secondary coil integral body is that the central axis with above-mentioned main shaft is the drum of central axis, above-mentioned primary coil integral body is that the central axis with above-mentioned main shaft is the drum of central axis, and above-mentioned primary coil is surrounded into concentric shape.
3, topping machanism as claimed in claim 1 is characterized in that, above-mentioned main shaft is installed on the above-mentioned collar bush via air bearing.
4, topping machanism as claimed in claim 1 is characterized in that, above-mentioned rotating mechanism is the induction electric motor, has the permanent magnet that is fixed on the above-mentioned main shaft and is fixed on the above-mentioned collar bush and around the coil of above-mentioned permanent magnet.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004333519A JP4549822B2 (en) | 2004-11-17 | 2004-11-17 | Ultrasonic vibration cutting equipment |
| JP333519/2004 | 2004-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1776888A true CN1776888A (en) | 2006-05-24 |
| CN100429751C CN100429751C (en) | 2008-10-29 |
Family
ID=36627070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200510125379XA Active CN100429751C (en) | 2004-11-17 | 2005-11-16 | Cutting device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4549822B2 (en) |
| CN (1) | CN100429751C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101197316B (en) * | 2006-12-08 | 2010-10-27 | 株式会社迪思科 | Processing device |
| CN103097096A (en) * | 2010-07-15 | 2013-05-08 | 西门子公司 | Sawing apparatus and process for producing a scintillator structured into scintillator elements and scintillator having scintillator elements |
| CN105437067A (en) * | 2015-12-04 | 2016-03-30 | 北京中电科电子装备有限公司 | Ultrasonic air static pressure main shaft device and dicing saw |
| CN106182476A (en) * | 2015-06-01 | 2016-12-07 | 株式会社迪思科 | Blade with base station |
| CN111257168A (en) * | 2020-02-27 | 2020-06-09 | 清华大学 | Electrorheological property testing device and method |
| CN112573276A (en) * | 2020-12-22 | 2021-03-30 | 深圳亚士德科技有限公司 | Slitting and winding equipment and slitting and winding method for copper foil production and processing |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5523088B2 (en) * | 2009-12-25 | 2014-06-18 | 株式会社キラ・コーポレーション | Ultrasonic vibration processing equipment |
| CN104441259B (en) * | 2014-12-02 | 2016-08-24 | 华侨大学 | Annular magnet magnetic supporting rotary ultrasonic Knife handle structure |
| KR101847202B1 (en) * | 2016-01-07 | 2018-04-09 | 주식회사 에스티에이 | Ultrasonic spindle operated by ceramic vibrator to which magentic vibration as energy is provided |
| DE102018123836A1 (en) * | 2018-09-27 | 2020-04-02 | Steffen Nitschke | Coil for an energy transfer |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1021027C (en) * | 1989-10-10 | 1993-06-02 | 吉林工业大学 | Ultrasonic vibration turning device |
| JPH05208349A (en) * | 1992-01-29 | 1993-08-20 | Mitsubishi Heavy Ind Ltd | Spindle unit |
| EP1364618A1 (en) * | 1996-09-19 | 2003-11-26 | United States Surgical Corporation | Ultrasonic dissector |
| JP3469488B2 (en) * | 1999-01-21 | 2003-11-25 | 株式会社アルテクス | Ultrasonic vibration cutting device |
| JP2000260642A (en) * | 1999-03-09 | 2000-09-22 | Harness Syst Tech Res Ltd | Electromagnetic induction type connector |
| CN2573141Y (en) * | 2002-08-23 | 2003-09-17 | 汕头市金士达超声机器有限公司 | Floral wheel drive mechanism of ultrasonic fusing and cutting embossing device |
| JP4620370B2 (en) * | 2003-03-13 | 2011-01-26 | 一正 大西 | Disk-shaped blade and cutting device |
| JP2004288961A (en) * | 2003-03-24 | 2004-10-14 | Tokyo Seimitsu Co Ltd | Method for dicing |
-
2004
- 2004-11-17 JP JP2004333519A patent/JP4549822B2/en active Active
-
2005
- 2005-11-16 CN CNB200510125379XA patent/CN100429751C/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101197316B (en) * | 2006-12-08 | 2010-10-27 | 株式会社迪思科 | Processing device |
| CN103097096A (en) * | 2010-07-15 | 2013-05-08 | 西门子公司 | Sawing apparatus and process for producing a scintillator structured into scintillator elements and scintillator having scintillator elements |
| CN106182476A (en) * | 2015-06-01 | 2016-12-07 | 株式会社迪思科 | Blade with base station |
| CN105437067A (en) * | 2015-12-04 | 2016-03-30 | 北京中电科电子装备有限公司 | Ultrasonic air static pressure main shaft device and dicing saw |
| CN111257168A (en) * | 2020-02-27 | 2020-06-09 | 清华大学 | Electrorheological property testing device and method |
| CN112573276A (en) * | 2020-12-22 | 2021-03-30 | 深圳亚士德科技有限公司 | Slitting and winding equipment and slitting and winding method for copper foil production and processing |
| CN112573276B (en) * | 2020-12-22 | 2021-07-20 | 深圳亚士德科技有限公司 | Slitting and winding equipment and slitting and winding method for copper foil production and processing |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006147717A (en) | 2006-06-08 |
| JP4549822B2 (en) | 2010-09-22 |
| CN100429751C (en) | 2008-10-29 |
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