KR101847202B1 - Ultrasonic spindle operated by ceramic vibrator to which magentic vibration as energy is provided - Google Patents

Ultrasonic spindle operated by ceramic vibrator to which magentic vibration as energy is provided Download PDF

Info

Publication number
KR101847202B1
KR101847202B1 KR1020160002226A KR20160002226A KR101847202B1 KR 101847202 B1 KR101847202 B1 KR 101847202B1 KR 1020160002226 A KR1020160002226 A KR 1020160002226A KR 20160002226 A KR20160002226 A KR 20160002226A KR 101847202 B1 KR101847202 B1 KR 101847202B1
Authority
KR
South Korea
Prior art keywords
vibration
ultrasonic
magnetic
shaft
inner housing
Prior art date
Application number
KR1020160002226A
Other languages
Korean (ko)
Other versions
KR20170082913A (en
Inventor
김준규
홍성혁
Original Assignee
주식회사 에스티에이
홍성혁
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 에스티에이, 홍성혁 filed Critical 주식회사 에스티에이
Priority to KR1020160002226A priority Critical patent/KR101847202B1/en
Publication of KR20170082913A publication Critical patent/KR20170082913A/en
Application granted granted Critical
Publication of KR101847202B1 publication Critical patent/KR101847202B1/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B37/00Boring by making use of ultrasonic energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

According to one aspect of the present invention, there is provided a magnetic resonance imaging apparatus comprising: a magnetic vibration section in which vibration is generated from a primary coil and a secondary coil wound around a magnetic body; A shaft, one end of which is interlocked with the magnetic vibration part to transmit the magnetic vibration; And an ultrasonic vibrator including a ceramic vibrator provided at the other end of the shaft and generating ultrasonic waves from the transmitted magnetism. The ultrasonic spindle is operated by a ceramic vibrator that is supplied with energy by magnetic vibration. According to the present invention, ultrasonic vibration can be added to a spindle rotating at a high speed of 20,000 rpm or more.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ultrasonic spindle operated by a ceramic oscillator,

[0001] The present invention relates to an ultrasonic spindle which is operated by a ceramic oscillator that receives energy as magnetic vibration, and more particularly to an ultrasonic spindle which is capable of applying ultrasonic vibration to a spindle rotating at a high speed of 20,000 rpm or more, To an ultrasonic spindle operated by a ceramic oscillator.

In the 21st century, various information related industries such as the Internet are rapidly developing. Especially, in the field of communication, R & D for high-speed communication network is actively being studied mainly in developed countries such as USA and Japan. Optical communication is used in such communication field, and optical components using glass are essential for optical communication. The glass used for optical communication parts is a highly resistant material, which facilitates fracture cutting that leaves a crack on the surface during fine cutting. At present, typical methods used in micro-machining include a method using a lithography laser using X-rays, a method using etching, and the like, but these methods have a disadvantage in that they are only secondary processing or their precision is inferior.

Recently, ultrasonic vibration cutting has been actively studied. In the United States, ultrasonic transverse vibration is applied to an organic ceramic tool holder to increase the efficiency of the machined surface and to increase the tool life to 20 times. In Japan, too, superimposed vibration cutting applying low-frequency vibration is applied to ceramic processing, and it is reported that surface roughness is improved and machining efficiency is higher than conventional cutting. Currently, advanced countries including Japan have been able to process more precise and diverse materials in accordance with factory automation and commercialize new special processing machines combining special processing and automation systems. In the case of domestic, as well, it is necessary to develop advanced manufacturing industries such as aircraft, accounting products, pharmaceuticals, video and industrial devices, smart communication devices, and precision processing and special processing technology. However, .

As a prior art related thereto, there is a microcomputer using ultrasound vibration disclosed in Korean Patent Publication No. 10-2004-0044778 (published on May 31, 2004).

The present invention has been made to solve the above-mentioned problems.

Another object of the present invention is to provide an ultrasonic spindle capable of adding ultrasonic vibration to a spindle rotating at a high speed of 20,000 rpm or more.

It is still another object of the present invention to provide an apparatus for processing comprising an ultrasonic spindle which is operated by a ceramic oscillator, the energy of which is supplied by magnetic vibration.

In order to accomplish the above object, a representative structure of the present invention is as follows.

According to one aspect of the present invention, there is provided a magnetic resonance imaging apparatus comprising: a magnetic vibration section in which vibration is generated from a primary coil and a secondary coil wound around a magnetic body; A shaft, one end of which is interlocked with the magnetic vibration part to transmit the magnetic vibration; And an ultrasonic vibrator including a ceramic vibrator provided at the other end of the shaft and generating ultrasonic waves from the transmitted magnetism. The ultrasonic spindle is operated by a ceramic vibrator that is supplied with energy by magnetic vibration.

According to another aspect of the present invention, there is provided a magnetic resonance apparatus comprising: a magnetic vibration section in which vibration is generated from a primary coil and a secondary coil wound around a magnetic body; A shaft, one end of which is interlocked with the magnetic vibration part to transmit the magnetic vibration; And an ultrasonic vibrator including a ceramic vibrator provided at the other end of the shaft and generating ultrasonic waves from the transmitted magnetic vibration, wherein the ultrasonic vibrator is provided with an ultrasonic spindle operated by a ceramic vibrator, to provide.

The present invention can add ultrasonic waves to a spindle which rotates at a high speed of 20,000 rpm or more, differently from a conventional apparatus that generates ultrasonic waves in a stationary state or a low-speed rotation state.

In addition, the AC power applied to the primary coil wound around the magnetic body can be transmitted to the secondary coil by radio, and the secondary coil can convert the AC power applied to the primary coil into the 80-fold square-wave AC power having the same frequency .

Further, the present invention is a double cylindrical structure in which a primary coil and a secondary coil are spaced apart from each other by a predetermined distance and includes a part of a magnetic vibration part, thereby maximizing the efficiency without leakage of the magnetic flux, .

In addition, the present invention can efficiently generate ultrasonic waves by positioning a ceramic vibrator that generates ultrasonic vibration near a processing tool, and can improve the processing speed and production yield even in processing glass and warm color materials due to rotation and ultrasonic vibration , And the machining accuracy can be improved.

FIG. 1 is a plan view of an ultrasonic spindle operated by a ceramic vibrator that receives energy according to the present invention as a magnetic vibration.
2 is a cross-sectional view and a plan view showing a magnetic vibration generating unit in an ultrasonic spindle operated by a ceramic vibrator that receives energy according to the present invention by magnetic vibration.
3 is a schematic view illustrating an ultrasonic vibrator in an ultrasonic spindle operated by a ceramic vibrator that receives energy according to the present invention as a magnetic vibration.
4 is a cross-sectional view of a processing device including an ultrasonic spindle operated by a ceramic vibrator that is provided with energy according to the present invention by magnetic vibration.
FIG. 5 (a) is a micrograph of a quartz processed using an apparatus for processing including an ultrasonic spindle operated by a ceramic vibrator that is supplied with energy according to the present invention by magnetic vibration, and FIG. 5 (b) FIG. 7 is a microscope photograph showing a processed portion after processing a quartz using a conventional processing apparatus. FIG.
6 is a photomicrograph showing a machined portion after machining a zirconium using a machining apparatus including an ultrasonic spindle operated by a ceramic vibrator that receives energy as magnetic vibration according to the present invention.
7 (a) is a micrograph of an aluminum alloy processed using an apparatus for processing including an ultrasonic spindle operated by a ceramic vibrator, the energy of which is provided by self-oscillation according to the present invention, FIG. 7 (b) Is a photomicrograph showing a machined portion after processing an aluminum alloy using a conventional machining apparatus.

The following detailed description of the invention refers to the accompanying drawings, which illustrate, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are different, but need not be mutually exclusive. For example, certain features, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the invention in connection with an embodiment. It is also to be understood that the position or arrangement of the individual components within each disclosed embodiment may be varied without departing from the spirit and scope of the invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is to be limited only by the appended claims, along with the full scope of equivalents to which such claims are entitled, if properly explained. In the drawings, like reference numerals refer to the same or similar functions throughout the several views.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can easily carry out the present invention.

The present invention relates to a magnetic resonance apparatus in which vibrations are generated from a primary coil and a secondary coil wound around a magnetic body;

A shaft, one end of which is interlocked with the magnetic vibration part to transmit the magnetic vibration; And

And an ultrasonic vibrator provided at the other end of the shaft and including a ceramic vibrator for generating ultrasonic waves from the transmitted magnetic vibration.

FIG. 1 is a plan view of an ultrasonic spindle operated by a ceramic vibrator that receives energy according to the present invention as a magnetic vibration. Referring to FIG. 1, the ultrasonic spindle according to the present invention includes a magnetic vibration unit 110, a shaft 120, and an ultrasonic vibration unit 130. Specifically, the magnetic vibration unit 110 includes a first inner housing 111 including a primary coil wound around a magnetic body, and a second inner housing 112 including a secondary coil wound around the magnetic body And includes an outer housing 140 that receives the first inner housing 111.

The shaft 120 may transmit the magnetic vibration generated from the magnetic field formed by the primary coil and the secondary coil to the ultrasonic vibration unit 130. A motor 121 is provided at one side of the shaft 120 to rotate the shaft 120. As shown in FIG. 1, a second inner housing 112 including a secondary coil may be mounted on one end of the shaft 120.

The other end of the shaft 120 is provided with an ultrasonic vibration unit 130 that generates ultrasonic vibration from the magnetic vibration transmitted to the shaft 120. The ultrasonic vibrator 130 may include a ceramic vibrator 131, a connecting member 132 and a tool 133. The ceramic vibrator 131 may be connected to the other end of the shaft 120 by a connecting member 132 . A tool 133 is provided at one end of the ceramic vibrator 131 and ultrasonic waves generated in the ceramic vibrator 131 are transmitted to the tool 133 to improve processing speed and production yield and precision processing in processing glass and warm- Do.

FIG. 2 is a plan view and a cross-sectional view illustrating a magnetic vibration generating unit in an ultrasonic spindle operated by a ceramic vibrator that receives energy according to the present invention by magnetic vibration. 2, the magnetic vibration unit 110 includes a first inner housing 111 and a second inner housing 112. The first inner housing 111 includes a primary coil 111 'wound on a magnetic body, And the second inner housing 112 includes therein a secondary coil 112 'wound on the magnetic body. At this time, the primary coil 111 'and the secondary coil 112' are spaced apart at regular intervals. The second inner housing 112 can be mounted on one end of the shaft and the second inner housing 112 can rotate with the shaft. On the other hand, the first inner housing 111 is fixed to the outer housing and does not rotate. The AC power is applied to the primary coil 111 'through the first inner housing 111 and the energy from the AC power is transmitted to the secondary coil 112' in the second inner housing 112, It is possible to eliminate the leakage of the liquid.

In FIG. 2, a plurality of circles are sectional views showing a magnetic vibration generating portion in an ultrasonic spindle operated by a ceramic vibrator that is provided with energy according to the present invention by magnetic vibration. The circle 150 indicated by the dotted line on the innermost side represents the magnetic body 150 and the circles indicated by the second dotted line from the innermost side represent the primary coil 111 'and the secondary coil 112' 111 and the second inner housing 112 include a primary coil 111 'and a secondary coil 112', respectively. The third circle at the center of the circle represents the second inner housing 112 and the outermost circle represents the first inner housing 111. [ As shown in Fig. 2, it may have a double cylindrical structure including a part of the magnetic vibration part in the shaft. At this time, the magnetic body may be ferritic, and the primary coils 111 'may exist in pairs in which the coils are wound the same number of times.

The number of turns of the secondary coil 112 'relative to the primary coil 111' is preferably 100 times, and the number of turns of the primary coil 111 'and the secondary coil 112' Is converted into an AC power having the same frequency as that of the coil 111 'but increased by 80 times as compared with the primary coil 111'. Due to the structure as described above, leakage of the magnetic flux can be minimized and the efficiency can be maximized. At this time, the magnetic vibration formed from the primary coil and the secondary coil is 16 kHz or more.

3 is a schematic view illustrating an ultrasonic vibrator in an ultrasonic spindle operated by a ceramic vibrator that receives energy according to the present invention as a magnetic vibration. 3, the ultrasonic vibration unit 130 includes a pair of ceramic oscillators 131, a connection member 132 for connecting the ceramic oscillator 131 and the shaft 120, and a ceramic oscillator 131 And a horn 134 resonating with the ultrasound waves. The connecting member 132 connecting the ceramic vibrator 131 and the shaft 120 may be a flange type. In addition, the ceramic vibrators 131 are provided in pairs to form a high voltage and a ground to induce vibration. The magnetic vibration transmitted from the shaft 120 can be converted into an ultrasonic vibration of 40 kHz or more by the ceramic vibrator 131.

4 is a cross-sectional view of a processing device including an ultrasonic spindle operated by a ceramic vibrator that is provided with energy according to the present invention by magnetic vibration. 4, the processing device 400 includes a self-vibrating part 410, a shaft 420, and an ultrasonic vibrating part 430. As shown in Fig. The magnetic vibration part 410 includes a first inner housing 411, a second inner housing 412, a power supply part 413, an outer housing 414 and a magnetic body 415. The primary coil 411 'and the secondary coil 412' are wound around the magnetic body 415 and spaced apart from each other by a predetermined distance so that the first inner housing 411 is separated from the magnetic body 415 'wound with the primary coil 411' And the second inner housing 412 includes the magnetic body 415 around which the secondary coil 412 'is wound). The second inner housing 412 is mounted on one end of the shaft 420 and can rotate together with the shaft 420. The first inner housing 411 is fixed to the outer housing 414 and does not rotate. The first inner housing 411 is configured such that the AC power is applied by the power supply unit 413 and the energy by the AC power is transmitted to the second coil 412 'in the second inner housing 412, Can be prevented and the efficiency can be maximized.

The magnetic vibration generated in the magnetic vibration unit 410 is transmitted to the shaft 420, and the shaft 420 transmits the magnetic vibration to the ultrasonic vibration unit 430.

The ultrasonic vibration section 430 includes a ceramic vibrator 431, a connecting member 432, a horn 433, and an ultrasonic vibration section housing 433. The magnetic vibration transmitted from the shaft 420 is transmitted to the ceramic vibrator 431 to transmit ultrasonic wave vibration to the tool 440. The ceramic vibrator 431 can be connected to the shaft 420 by a flange-type connecting member 432. Between the ceramic vibrator 431 and the machining tool 440, a horn 433 that resonates with the ceramic vibrator may be included. The ultrasonic vibration unit 430 may be housed in the ultrasonic vibration housing 434.

Example 1: Preparation of ultrasonic spindle

The ferrite core was wound with an enamel wire to produce a coil having strong magnetic vibration. In order to manufacture a current-carrying coil and a current-carrying coil for making the N pole, a 0.45 mm diameter enameled wire was wound 20 times on the primary coil to form two layers with a width of 4.5 mm, Two winding layers were formed to cross 40000 currents per second. The secondary coil was wound up with a 0.02 mm enamel wire 2000 times. The coil thus manufactured can convert a 12 V external AC power source into an 960 V internal AC power source having the same frequency.

The secondary coil wound on the ferrite core is accommodated in the first inner housing and fixed by the outer housing and the secondary coil wound on the ferrite core is accommodated in the second inner housing and is designed to rotate with the shaft Respectively. Magnetic vibrations formed by the primary coil and the secondary coil are transmitted to the shaft and the magnetic vibration is transmitted to the ceramic vibrator as described above.

Two ceramic oscillators with a thickness of 5 mm were used to induce vibration by forming high voltage and ground. On one side of the ceramic vibrator, a horn made of an aluminum material for resonance is provided. The aluminum horn was designed as a cylindrical shape having a length of 18 mm and a diameter of 20 mm. The connecting parts connecting the ceramic vibrator and the shaft were designed and connected to a flange type of 5.5 mm thick.

The machining apparatus including the above-described ultrasonic spindle was manufactured to have a maximum ultrasonic frequency of 40 kHz or more, a maximum rotation speed of 24,000 rpm, and a cutting speed of 15%.

Experimental Example 1: Performance Analysis of Ultrasonic Spindle

Quartz, Zirconium and aluminum alloys were processed to examine the performance of the processing apparatus comprising the ultrasonic spindle according to the present invention, and the results are shown in FIGS. 5, 6 and 7 .

FIG. 5 is a graph showing the results of the processing after a quartz is processed using a processing apparatus including an ultrasonic spindle operated by a ceramic vibrator, which is provided with energy according to the present invention, 5 (a) is a micrograph of a quartz processed using a processing apparatus including an ultrasonic spindle according to the present invention, and FIG. 5 (b) is a micrograph of quartz processed using a conventional processing apparatus. 2 is a photomicrograph showing a processed portion after processing.

As shown in FIG. 5, it can be seen that the holes are uniformly formed using the ultrasonic spindle according to the present invention.

6 is a photomicrograph showing a machined portion after machining a zirconium by using a machining apparatus including an ultrasonic spindle operated by a ceramic vibrator that receives energy according to the present invention as a magnet vibration.

As shown in FIG. 6, zirconia having a Mohs hardness of 8.5 can be relatively easily processed using the ultrasonic spindle according to the present invention, and it can be seen that the processed state is also reversed.

FIG. 7 is a graph showing the results of processing after an aluminum alloy is processed using an apparatus for processing including an ultrasonic spindle operated by a ceramic vibrator that is supplied with energy according to the present invention by magnetic vibration, and an aluminum alloy is processed using a conventional processing apparatus Fig. 7 (a) is a micrograph of an aluminum alloy processed by using a processing apparatus including an ultrasonic spindle according to the present invention, and Fig. 7 (b) is a micrograph of a conventional processing apparatus FIG. 3 is a microscope photograph showing a machined portion after processing an aluminum alloy. FIG.

As shown in Fig. 7, it can be seen that the precision machining is improved by about 20 to 30% at the time of applying machining and the machining speed is improved by about 20% when the ultrasonic machining is compared with the non-machining.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, Those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.

Therefore, the spirit of the present invention should not be construed as being limited to the above-described embodiments, and all of the equivalents or equivalents of the claims, as well as the following claims, I will say.

110: magnetic vibrator 111: first inner housing
111 ': Primary coil 112: Second inner housing
112 ': Secondary coil 120: Shaft
121: Motor 130: Ultrasonic vibration section
131: ceramic oscillator 132: connecting member
133: tool 134: horn
140: outer housing 150: magnetic body
400: Machining device
410: magnetic vibration section 411: first inner housing
411 'Primary coil 412: Second inner housing
412 ': Secondary coil 413: Power supply unit
414: outer housing 415: magnetic body
420: shaft 430: ultrasonic vibration section
431: Ceramic vibrator 432: Connecting member
433: Horn 434: Ultrasonic vibration housing
440: Tools

Claims (16)

A magnetic vibration section in which vibration is generated by the primary coil and the secondary coil wound around the ferrite magnetic body;
A shaft, one end of which is interlocked with the magnetic vibration part to transmit the magnetic vibration; And
And an ultrasonic vibrator provided at the other end of the shaft and including a ceramic vibrator for generating ultrasonic waves from the transmitted magnetic vibration,
The number of turns of the secondary coil relative to the primary coil is 100 times,
The primary coil is wound about 0.45 mm enameled wire 20 times and the secondary coil is wound about 0.02 mm enameled wire about 2000 times,
Wherein the shaft has a double cylindrical structure including a part of the magnet vibrating part,
The secondary coil converts a square-wave AC power source applied to the primary coil having coils wound in the same number of times into an 80-fold square-wave AC power source having the same frequency,
The connecting member connecting the ceramic vibrator having the horn for resonance to one side thereof is a flange type,
The ceramic vibrators are provided in pairs to form a high voltage and a ground to induce vibration,
The magnetic oscillation formed from the primary coil and the secondary coil is 16 kHz or more,
And the magnetic vibration transmitted from the shaft is converted into an ultrasonic vibration of 40 kHz or more by the ceramic vibrator. The ultrasonic spindle as claimed in claim 1,
The method according to claim 1,
Wherein the primary coil and the secondary coil are spaced apart from each other by a predetermined distance, wherein the first inner housing includes a magnetic body around which the primary coil is wound, and the second inner housing includes a magnetic body around which the secondary coil is wound, Wherein the ultrasonic spindle is operated by a ceramic oscillator that receives energy as self-oscillation.
3. The method of claim 2,
And the second inner housing is mounted on one end of the shaft. The ultrasonic spindle of claim 1, wherein the second inner housing is mounted on one end of the shaft.
The method of claim 3,
And the second inner housing rotates together with the shaft. The ultrasonic spindle of claim 1, wherein the second inner housing rotates together with the shaft.
3. The method of claim 2,
Wherein the first inner housing is fixed to an outer housing and is not rotated. The ultrasonic spindle of claim 1, wherein the first inner housing is fixed to an outer housing and is not rotated.
3. The method of claim 2,
Wherein AC power is applied to the primary coil through the first inner housing and energy from the AC power is transmitted to the secondary coil in the second inner housing to eliminate leakage of the magnetic flux. An ultrasonic spindle driven by a ceramic oscillator that receives energy as self-oscillating.
delete delete delete delete delete The method according to claim 1,
Characterized in that the shaft further comprises a motor for rotation, the ultrasonic spindle being operated by a ceramic oscillator, the energy of which is provided by magnetic vibration.

delete delete delete delete
KR1020160002226A 2016-01-07 2016-01-07 Ultrasonic spindle operated by ceramic vibrator to which magentic vibration as energy is provided KR101847202B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160002226A KR101847202B1 (en) 2016-01-07 2016-01-07 Ultrasonic spindle operated by ceramic vibrator to which magentic vibration as energy is provided

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160002226A KR101847202B1 (en) 2016-01-07 2016-01-07 Ultrasonic spindle operated by ceramic vibrator to which magentic vibration as energy is provided

Publications (2)

Publication Number Publication Date
KR20170082913A KR20170082913A (en) 2017-07-17
KR101847202B1 true KR101847202B1 (en) 2018-04-09

Family

ID=59442956

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160002226A KR101847202B1 (en) 2016-01-07 2016-01-07 Ultrasonic spindle operated by ceramic vibrator to which magentic vibration as energy is provided

Country Status (1)

Country Link
KR (1) KR101847202B1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3784391B2 (en) * 2004-02-24 2006-06-07 京セラ株式会社 Ultrasonic processing vibrator and processing apparatus
JP4549822B2 (en) * 2004-11-17 2010-09-22 株式会社ディスコ Ultrasonic vibration cutting equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3784391B2 (en) * 2004-02-24 2006-06-07 京セラ株式会社 Ultrasonic processing vibrator and processing apparatus
JP4549822B2 (en) * 2004-11-17 2010-09-22 株式会社ディスコ Ultrasonic vibration cutting equipment

Also Published As

Publication number Publication date
KR20170082913A (en) 2017-07-17

Similar Documents

Publication Publication Date Title
TWI445583B (en) Processing device
JP4842936B2 (en) Tool with vibrating head
CN107008959B (en) Non-contact inductive power supply elliptical ultrasonic machining device
CN101223013B (en) Cutting tool and cutting machine with disc-shaped cutting tool
CN102151867B (en) Rotary ultrasonic head based on machine tool attachment
CN107835723B (en) Device for generating ultrasonic vibrations of a tool and measuring vibration parameters
JPH07100753A (en) Rotary working device, rotary tool therefor and device body therefor
WO2007004515A1 (en) Ultrasonic machining spindle device
US10919121B2 (en) Machining device
CN102642157A (en) Machining device with wireless transmission ultrasonic power signals
CN107408849A (en) The manufacture method of the rotor of electric rotating machine and the rotor of electric rotating machine
KR101847202B1 (en) Ultrasonic spindle operated by ceramic vibrator to which magentic vibration as energy is provided
JP2017104936A (en) Vibration Spindle
CN112621551B (en) Ultra-precise wafer grinding equipment capable of being positioned quickly
JP4549822B2 (en) Ultrasonic vibration cutting equipment
TWI669185B (en) Non-contact electric energy transmission high-frequency vibration main shaft system and restraint manufacturing method
JP2007111803A (en) Ultrasonic vibration cutting device
CN112658818B (en) Ultrasonic vibration auxiliary grinding device for ultra-precision machining of wafer
TWI703009B (en) Ultrasonic cutter handle structure
JPH08136375A (en) Rotary tool, bush supporting the rotary tool and torque sensor and machine tool system
CN104441259A (en) Rotating ultrasonic tool shank structure supported by magnetic force of annular magnets
CN210588730U (en) Electromagnetic permanent magnet vibration auxiliary magnetic grinding system
JP2007015099A (en) Cutting apparatus with disc-like cutting blade
CN115566813A (en) Magnetic coupling resonant wireless energy transmission device and method
SU942951A1 (en) Apparatus for vibration grinding

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
AMND Amendment
X701 Decision to grant (after re-examination)
GRNT Written decision to grant