CN210414083U - Air spindle device of grinding machine - Google Patents
Air spindle device of grinding machine Download PDFInfo
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- CN210414083U CN210414083U CN201920988837.XU CN201920988837U CN210414083U CN 210414083 U CN210414083 U CN 210414083U CN 201920988837 U CN201920988837 U CN 201920988837U CN 210414083 U CN210414083 U CN 210414083U
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- graphite bearing
- micropore
- bearing
- microporous
- assembly
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Abstract
The utility model belongs to the grinder field, concretely relates to grind quick-witted air spindle unit, including installation cover, drive arrangement and micropore graphite bearing subassembly, drive arrangement reaches micropore graphite bearing subassembly fixed mounting is in the installation cover, drive arrangement's rotation portion with micropore graphite bearing subassembly fixed connection, drive arrangement reaches micropore graphite bearing subassembly is longitudinal symmetry structure, be equipped with the ring channel on the micropore graphite bearing subassembly, be provided with micropore graphite bearing frame in the ring channel, be provided with the air vent on the micropore graphite bearing frame, micropore graphite bearing subassembly's right-hand member still is connected with grinding wheel assembly, grinding wheel assembly's the end of polishing sets up outside the installation cover. The air spindle device of the grinding machine has the advantages that the grinding precision of the product can be improved on the premise that the bearing is not abraded.
Description
Technical Field
The utility model belongs to the grinder field, concretely relates to grind quick-witted air spindle unit.
Background
In industrial applications of grinding machines, a main shaft connected with a grinding wheel rotating at high speed is a core component of the grinding machine, and directly influences the grinding precision and surface quality of a workpiece. With the development of the dynamic and static pressure main shaft structure, the protection of the main shaft rotating at high speed is particularly important. The inertia of the high-speed rotating main shaft has great damage to the dynamic and static pressure bearing of the main shaft. In the use process of the grinding machine, the main shaft is in direct contact with the bearing, the main shaft rotates at a high speed to drive other parts to rotate, but the main shaft and the bearing structure are inevitably abraded in the working process, the main shaft is damaged, and the grinding precision of a product is affected.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the not enough and defect of prior art, providing one kind can not cause under the prerequisite of bearing wear, can also improve the grinding machine air spindle unit of the grinding precision of product.
The purpose of the utility model is realized through the following technical scheme:
the air spindle device of the grinding machine comprises an installation cover, a driving device and a microporous graphite bearing assembly, wherein the driving device and the microporous graphite bearing assembly are fixedly installed in the installation cover, a rotating part of the driving device is fixedly connected with the microporous graphite bearing assembly, the driving device and the microporous graphite bearing assembly are both in an up-down symmetrical structure, an annular groove is formed in the microporous graphite bearing assembly, a microporous graphite bearing seat is arranged in the annular groove and fixed with the installation cover, an air vent leading to the microporous graphite bearing assembly is formed in the microporous graphite bearing seat, the right end of the microporous graphite bearing assembly is further connected with a grinding wheel assembly, and a grinding end of the grinding wheel assembly is arranged outside the installation cover.
Specifically, the microporous graphite bearing assembly comprises: first micropore graphite bearing, swivel bearing and second micropore graphite bearing, install first pivot on the first micropore graphite bearing, install the second pivot on the second micropore graphite bearing, first pivot with the second pivot all with the swivel bearing transmission is connected, the swivel bearing diameter is less than first micropore graphite bearing and second micropore graphite bearing, and first micropore graphite bearing lateral wall, swivel bearing outer wall and second micropore graphite bearing lateral wall form the annular groove, micropore graphite bearing frame sets up in the annular groove, the gas outlet of air vent accesss to the swivel bearing outer wall, and the gas outlet of air vent equals to the distance of first micropore graphite bearing lateral wall outer wall and to the distance of second micropore graphite bearing lateral wall outer wall.
Specifically, a third rotating shaft is further mounted on the grinding wheel assembly, and the end of the third rotating shaft is rotatably connected with the second microporous graphite bearing.
Specifically, the driving device includes: mount pad, motor stator, motor rotor subassembly and installation axle sleeve, the mount pad is fixed on the installation cover, the installation axle sleeve rotates to be connected on the mount pad, motor rotor subassembly fixed mounting be in install the axle sleeve, motor stator fixed mounting is in the installation cover that sets up with the electron rotor relatively.
Specifically, the bottom of installation cover still is provided with the base, the bottom one end of installation cover through the adjusting pin with base fixed connection, the bottom other end of installation cover through the pivot with the base rotates and is connected.
Specifically, the air inlet of the vent hole is communicated with the air pump through an air inlet joint.
Compared with the prior art, the utility model following advantage and beneficial effect are included:
first micropore graphite bearing, second micropore graphite bearing, first pivot, swivel bearing, second pivot and third pivot combine together, make swivel bearing drive grinding wheel assembly and rotate, during operation swivel bearing does not produce mechanical contact with first micropore graphite bearing, second micropore graphite bearing and micropore graphite bearing frame, not only can guarantee that grinding wheel assembly can not produce the vibration when high-speed operation, thereby increase the grinding precision of silicon chip, can also prevent that swivel bearing from taking place wearing and tearing, consequently, need not maintain the swivel bearing, it is lower to realize grinding machine air spindle unit energy consumption in the course of the work, the longer purpose of life.
Drawings
FIG. 1 is a cross-sectional view of a grinder air spindle assembly.
1-a base; 2-adjusting the pin; 3-mounting a base; 4-a rotating shaft; 5-a motor stator; 6-a motor rotor assembly; 7-mounting a shaft sleeve; 8-a first rotating shaft; 9-a first microporous graphite bearing; 10-a microporous graphite bearing seat; 11-a rotational bearing; 12-a second shaft; 13-a second microporous graphite bearing; 14-a third rotating shaft; 15-a grinding wheel assembly; 16-a vent hole; 17-an air inlet joint; 18-mounting the cover.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, but the present invention is not limited thereto.
As shown in fig. 1, a grinder air spindle device comprises a mounting cover 18, a driving device and a microporous graphite bearing assembly, and is characterized in that the driving device and the microporous graphite bearing assembly are fixedly mounted in the mounting cover 18, a rotating part of the driving device is fixedly connected with the microporous graphite bearing assembly, so that the driving device rotates to drive the microporous graphite bearing assembly to rotate, the driving device and the microporous graphite bearing assembly are both in an up-and-down symmetrical structure, an annular groove is formed in the microporous graphite bearing assembly, a microporous graphite bearing seat 10 is arranged in the annular groove, the microporous graphite bearing seat 10 is fixed with the mounting cover 18, a vent hole 16 leading to the microporous graphite bearing assembly is formed in the microporous graphite bearing seat 10, an air inlet pipe is further arranged in the vent hole 16, and high-pressure air is introduced into the vent hole 16, so that the microporous graphite bearing seat 10 and the microporous graphite And mechanical contact is avoided, so that the grinding wheel assembly 15 cannot vibrate during rotation, a high rotating speed is generated, and the grinding precision of the silicon wafer is improved.
Further, the microporous graphite bearing assembly comprises: a first microporous graphite bearing 9, a rotary bearing 11 and a second microporous graphite bearing 13, wherein the first microporous graphite bearing 9 is provided with a first rotating shaft 8, the second microporous graphite bearing 13 is provided with a second rotating shaft 12, the first rotating shaft 8 and the second rotating shaft 12 are in transmission connection with the rotary bearing 11, so that the first microporous graphite bearing 9 can drive the rotary bearing 11 to rotate, thereby driving the second microporous graphite bearing 13 to rotate, the diameter of the rotary bearing is smaller than that of the first microporous graphite bearing and the second microporous graphite bearing, the first microporous graphite bearing side wall, the rotary bearing outer wall and the second microporous graphite bearing side wall form an annular groove, the microporous graphite bearing seat is arranged in the annular groove, the air outlet of the vent 16 is led to the rotary bearing outer wall, and the distance from the air outlet of the vent 16 to the first microporous graphite bearing side wall is equal to the distance from the air outlet of the second microporous graphite bearing side wall, when high-pressure gas is introduced through the vent hole 16, the rotary bearing 11, the first microporous graphite bearing 9 and the second microporous graphite bearing 13 are all in clearance with the microporous graphite bearing seat 10, and mechanical contact cannot be generated, so that the grinding wheel assembly 15 cannot vibrate when rotating, and further a high rotating speed is generated, the grinding precision of the silicon wafer is increased, the right end of the microporous graphite bearing assembly is further connected with the grinding wheel assembly 15, the microporous graphite bearing assembly can drive the grinding wheel assembly 15 to rotate, the grinding end of the grinding wheel assembly 15 is arranged outside the mounting cover 18, and the silicon wafer is conveniently ground by the air spindle device of the grinding machine. The device is not only suitable for 12-inch grinders, but also suitable for 4-inch, 5-inch, 6-inch, 8-inch or 16-inch grinders.
Further, still install third pivot 14 on grinding wheel assembly 15, the tip of third pivot 14 with second micropore graphite bearing 13 rotates and is connected for second micropore graphite bearing 13 rotates and drives third pivot 14 and rotate, thereby further drives grinding wheel assembly 15 and rotates.
Further, the driving device includes: mount pad 3, motor stator 5, motor rotor subassembly 6 and installation axle sleeve 7, mount pad 3 is fixed on the installation cover 18, installation axle sleeve 7 rotates to be connected on mount pad 3, motor rotor subassembly 6 fixed mounting be in on the installation axle sleeve 7, motor stator 5 fixed mounting is in the installation cover that sets up with the electron rotor is relative.
Further, the bottom of the mounting cover 18 is further provided with a base 1, one end of the bottom of the mounting cover 18 is fixedly connected with the base 1 through an adjusting pin 2, and the other end of the bottom of the mounting cover 18 is rotatably connected with the base 1 through a rotating shaft 4, so that the position of the grinding machine air spindle device is adjusted.
Furthermore, the vent hole 16 is communicated with the air pump through an air inlet joint 17, so that high-pressure air can be introduced into the vent hole 16 by the air pump more conveniently.
The utility model discloses a concrete implementation process as follows:
introducing high-pressure gas into an air inlet joint 17, introducing the high-pressure gas into an air vent 16, wherein a gap is formed between each of a first microporous graphite bearing 9, a second microporous graphite bearing 13 and a microporous graphite bearing pedestal 10 and the end surface of a rotating bearing 11, the rotating bearing 11 is in an air floatation state, introducing current into a motor stator 5, a motor rotor assembly 6 rotates under the action of a magnetic field, a mounting shaft sleeve 7 rotates along with the rotating bearing, the mounting shaft sleeve 7 drives the first microporous graphite bearing 9 fixed with the mounting shaft sleeve 7 to rotate, the first rotating shaft rotates along with the first rotating shaft, so as to drive the rotating bearing 11 in the air floatation state to rotate, the rotating bearing 11 drives a second rotating shaft 12 fixed on the second microporous graphite bearing 13 to rotate, the second rotating shaft 12 drives the second microporous graphite bearing 13 to rotate, the second microporous graphite bearing 13 drives a third rotating shaft 14 to rotate, and one end of the third rotating shaft 14 is, so that the third rotating shaft 14 rotates the grinding wheel assembly 15.
The above-mentioned embodiments only express the embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (6)
1. The air spindle device of the grinding machine comprises an installation cover, a driving device and a microporous graphite bearing assembly, and is characterized in that the driving device and the microporous graphite bearing assembly are fixedly installed in the installation cover, a rotating part of the driving device is fixedly connected with the microporous graphite bearing assembly, the driving device and the microporous graphite bearing assembly are both in an up-down symmetrical structure, an annular groove is formed in the microporous graphite bearing assembly, a microporous graphite bearing seat is arranged in the annular groove and fixed with the installation cover, an air vent leading to the microporous graphite bearing assembly is formed in the microporous graphite bearing seat, a grinding wheel assembly is further connected to the right end of the microporous graphite bearing assembly, and a grinding end of the grinding wheel assembly is arranged outside the installation cover.
2. A grinder air spindle assembly as claimed in claim 1, in which the micro-porous graphite bearing assembly comprises: first micropore graphite bearing, swivel bearing and second micropore graphite bearing, install first pivot on the first micropore graphite bearing, install the second pivot on the second micropore graphite bearing, first pivot with the second pivot all with the swivel bearing transmission is connected, the swivel bearing diameter is less than first micropore graphite bearing and second micropore graphite bearing, and first micropore graphite bearing lateral wall, swivel bearing outer wall and second micropore graphite bearing lateral wall form the annular groove, micropore graphite bearing frame sets up in the annular groove, the gas outlet of air vent accesss to the swivel bearing outer wall, and the gas outlet of air vent equals to the distance of first micropore graphite bearing lateral wall outer wall and to the distance of second micropore graphite bearing lateral wall outer wall.
3. A grinder air spindle unit as claimed in claim 2, in which a third shaft is mounted on the grinding wheel assembly, the end of the third shaft being rotatably connected to the second microporous graphite bearing.
4. A grinder air spindle assembly as claimed in claim 1, in which the drive means comprises: mount pad, motor stator, motor rotor subassembly and installation axle sleeve, the mount pad is fixed on the installation cover, the installation axle sleeve rotates to be connected on the mount pad, motor rotor subassembly fixed mounting be in install the axle sleeve, motor stator fixed mounting is in the installation cover that sets up with the electron rotor relatively.
5. A grinder air spindle unit as claimed in claim 1, wherein the bottom of the mounting cover is further provided with a base, one end of the bottom of the mounting cover is fixedly connected with the base through an adjusting pin, and the other end of the bottom of the mounting cover is rotatably connected with the base through a rotating shaft.
6. A grinder air spindle unit as claimed in claim 1, in which the air inlet of the air vent is connected to an air pump via an air inlet connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920988837.XU CN210414083U (en) | 2019-06-28 | 2019-06-28 | Air spindle device of grinding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920988837.XU CN210414083U (en) | 2019-06-28 | 2019-06-28 | Air spindle device of grinding machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210414083U true CN210414083U (en) | 2020-04-28 |
Family
ID=70377580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920988837.XU Active CN210414083U (en) | 2019-06-28 | 2019-06-28 | Air spindle device of grinding machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210414083U (en) |
-
2019
- 2019-06-28 CN CN201920988837.XU patent/CN210414083U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210330 Address after: 518000 Room 201, building 34, block B, Yuanshan Industrial Zone, Shangcun community, Gongming street, Guangming District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Mengqi Semiconductor Equipment Co.,Ltd. Address before: 518106 1ST-2ND floor, building 1, Baotang hi tech Industrial Park, Tangwei village, Gongming street, Guangming New District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Fonda Semiconductor Equipment Co.,Ltd. |