CN1767222A - Light emitting diode and process for producing the same - Google Patents
Light emitting diode and process for producing the same Download PDFInfo
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- CN1767222A CN1767222A CNA2004100898726A CN200410089872A CN1767222A CN 1767222 A CN1767222 A CN 1767222A CN A2004100898726 A CNA2004100898726 A CN A2004100898726A CN 200410089872 A CN200410089872 A CN 200410089872A CN 1767222 A CN1767222 A CN 1767222A
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Abstract
Disclosed is a light-emitting diode and its preparing process, wherein the light-emitting diode comprises at least a first electric semiconductor layer, an active layer and a second electric semiconductor layer, wherein the active layer and the second electric semiconductor layer is provided with a side edge having irregular shape and/or at least a groove.
Description
Technical field
The present invention relates to a kind of light-emitting diode (Light Emitting Diode; LED) and manufacture method, particularly a kind of light-emitting diode and manufacture method thereof with erose side.
Background technology
In recent years, because indium gallium nitride LED has excellent properties at blue light and green glow field, make it more and more welcome.The application of indium gallium nitride LED aspect solid state light emitter makes that the importance of indium gallium nitride LED is more and more higher, for example can be used for the photodetector for backside-illuminated, automotive lighting, decoration of miniature keyboard (Keypad), mobile phone, with other field etc.Yet the integral body output luminous efficiency of indium gallium nitride LED is still not enough so that it is used for general illumination.For high brightness LED, but its output luminous efficiency separated into two parts: i.e. internal quantum and external quantum efficiency.Internal quantum is determined by the photon that produces and the electronics of ejaculation and the ratio of holoe carrier.Because business-like organic metal vapour phase epitaxy (Organometallic Vapor Phase Epitaxy recently; OMVPE) reason of equipment, internal quantum almost can reach 100% of theoretical value.Yet for the indium gallium nitride LED device, its external quantum efficiency is usually less than 30%.One of the main reasons is, initiatively quantum layer can absorb the light of generation, and the light that the overwhelming majority produces can be by four sides of chip, upper surface, reflect with lower surface.That is to say that when the angle of light was bigger than the angle of total reflection (becoming 23 degree angles approximately with the axle of surface plane) of chip surface, light can be by chip surface total reflection.
Please also refer to the end view of the shown known luminescence diode of the vertical view of the shown known luminescence diode of Figure 1A and Figure 1B.Light-emitting diode 80 among Figure 1A and Figure 1B can form by following manufacture process.At first, provide substrate 10, wherein the material of substrate 10 can be sapphire, gallium nitride or aluminium nitride etc.Then, successively on substrate 10 extension form the stack architecture of the first electrical semiconductor layer 30, active layers 40, the second electrical semiconductor layer 50 and contact layer 55.Then, utilize the above-mentioned epitaxial loayer of etching technique etching, so that the part first electrical semiconductor layer 30 exposes.Then, utilize thermal evaporation (Thermal Evaporation), electron beam evaporation plating (E-beam) or ion beam sputtering deposition methods such as (Sputtering), respectively the deposit first electrical electrode 60 and the second electrical electrode 70 on exposed part first electrical semiconductor layer 30 and contact layer 55.
As shown in the vertical view of Figure 1A, respectively the light that penetrates of point of the d from the active layers (not shown) and e point by border total reflection several times after, do not inject to outside the light-emitting diode 80.As for, as shown in the end view of Figure 1B, though the light of point of the f from active layers 40 and g point ejaculation can inject to outside the light-emitting diode 80 at last respectively, but since by total reflection several times, therefore most light is absorbed by each layer in the light-emitting diode 80, and only has a spot of light really to inject to outside the light-emitting diode 80.So, be necessary the method for seeking to solve.
Summary of the invention
Therefore purpose of the present invention just provides a kind of light-emitting diode and manufacture method thereof, can reduce the probability that is reflected from the light of active layers ejaculation, and the feasible luminous energy that penetrates from active layers passes through irregular border and injects to outside the light-emitting diode.
According to above-mentioned purpose of the present invention, a kind of light-emitting diode is proposed.In a preferred embodiment of the present invention, described light-emitting diode comprises: one first electrical semiconductor layer; An active layers is positioned on the first electrical semiconductor layer; And one second electrical semiconductor layer, be positioned on the active layers, wherein at least one side of the active layers and the second electrical semiconductor layer has irregularly shaped at least, the probability that the light that penetrates from active layers with reduction is reflected, and the feasible luminous energy that penetrates from active layers passes through this side and injects to outside the light-emitting diode.In addition, above-mentioned side irregularly shaped can be triangle, semicircle or parabola shaped etc.Moreover, also have at least one groove in the active layers and the second electrical semiconductor layer at least, extend through a lower surface of active layers from a upper surface of the second electrical semiconductor layer, inject to efficient outside the light-emitting diode to improve the light that penetrates from active layers.
According to above-mentioned purpose of the present invention, another kind of light-emitting diode is proposed.In another preferred embodiment of the present invention, described light-emitting diode comprises: one first electrical semiconductor layer; An active layers is positioned on the first electrical semiconductor layer; And one second electrical semiconductor layer, be positioned on the active layers, wherein has at least one groove in the active layers and the second electrical semiconductor layer at least, extend through a lower surface of active layers from a upper surface of the second electrical semiconductor layer, inject to efficient outside the light-emitting diode to improve the light that penetrates from active layers.In addition, at least one side of the active layers and the second electrical semiconductor layer can be irregularly shaped at least, the probability that the light that penetrates from active layers with reduction is reflected, and the feasible luminous energy that penetrates from active layers passes through side and injects to outside the light-emitting diode.In addition, above-mentioned side irregularly shaped can be triangle, semicircle or parabola shaped etc.
According to above-mentioned purpose of the present invention, a kind of manufacturing method for LED is proposed.In a preferred embodiment of the present invention, described manufacturing method for LED may further comprise the steps at least.At first, provide one first electrical semiconductor layer.Then, on the first electrical semiconductor layer, form an active layers.Then, on active layers, form one second electrical semiconductor layer, wherein the side of the active layers and the second electrical semiconductor layer is irregularly shaped at least, the probability that the light that penetrates from active layers with reduction is reflected, and the feasible luminous energy that penetrates from active layers passes through side and injects to outside the light-emitting diode.In addition, the shape of above-mentioned side can be triangle, semicircle or parabola shaped etc.In addition, also have at least one groove in the active layers and the second electrical semiconductor layer at least, extend through a lower surface of active layers, inject to efficient outside the light-emitting diode to improve the light that penetrates from active layers from a upper surface of the second electrical semiconductor layer.
According to above-mentioned purpose of the present invention, another kind of manufacturing method for LED is proposed.In a preferred embodiment of the present invention, described method for manufacturing light-emitting may further comprise the steps at least.At first, provide one first electrical semiconductor layer.Then, on the first electrical semiconductor layer, form an active layers.Then, on active layers, form one second electrical semiconductor layer, wherein has at least one groove in the active layers and the second electrical semiconductor layer at least, extend through a lower surface of active layers from a upper surface of the second electrical semiconductor layer, inject to efficient outside the light-emitting diode to improve the light that penetrates from active layers.In addition, the side of the active layers and the second electrical semiconductor layer is irregularly shaped at least, the probability that the light that penetrates from active layers with reduction is reflected, and the feasible luminous energy that penetrates from active layers passes through side and injects to outside the light-emitting diode.In addition, above-mentioned side irregularly shaped can be triangle, semicircle or parabola shaped etc.
Therefore, use the present invention and can reduce the probability that is reflected from the light of active layers ejaculation, and the feasible luminous energy that penetrates from active layers passes across the border and injects to outside the light-emitting diode.
Description of drawings
Figure 1A is the vertical view that shows the known luminescence diode.
Figure 1B is the end view that shows the known luminescence diode.
Fig. 2 A is the vertical view that shows according to the light-emitting diode of a preferred embodiment of the present invention.
Fig. 2 B is the end view that shows according to the light-emitting diode of a preferred embodiment of the present invention.
Fig. 3 A is the vertical view that shows according to the light-emitting diode of another preferred embodiment of the present invention.
Fig. 3 B is along the formed profile of a-a ' section among the displayed map 3A.
Fig. 4 is the vertical view that shows according to the light-emitting diode of another preferred embodiment of the present invention.
Embodiment
The present invention relates to a kind of light-emitting diode and manufacture method thereof with irregular border.Please also refer to the end view of the light-emitting diode of the shown preferred embodiment of the present invention of the vertical view of light-emitting diode of the shown preferred embodiment of the present invention of Fig. 2 A and Fig. 2 B.Light-emitting diode 180 among Fig. 2 A and Fig. 2 B can form by following manufacture process.At first, provide substrate 110, wherein the material of substrate 110 for example can be sapphire, gallium nitride or aluminium nitride etc.Then, the stack architecture of the extension first electrical semiconductor layer 130, active layers 140, the second electrical semiconductor layer 150 and contact layer 155 on substrate 110 successively, wherein the material of the first electrical semiconductor layer 130 and the second electrical semiconductor layer 150 can be a gallium nitride etc., and the material of active layers 140 can be an InGaN etc.Then, in developing process, carry out the definition step etc. of the part that desire is removed in the subsequent etch process with the mask of figure with triangle border 190.Then, utilize mode such as reactive ion etching to remove contact layer 155, the second electrical semiconductor layer 150, and the outer part in triangle border 190 of material layers such as active layers 140 from top to bottom successively, to expose the part upper surface of the first electrical semiconductor layer 130.Simultaneously, if etching period is enough long, then can in described etching process, further remove the segment thickness of the first electrical semiconductor layer 130, thereby form contact layer 155, the second electrical semiconductor layer 150 as Fig. 2 B as shown in, active layers 140, and the side-glance shape of each layer such as the first electrical semiconductor layer 130.Then, utilize methods such as thermal evaporation, electron beam evaporation plating or ion beam sputtering deposition, respectively the deposit first electrical electrode 160 and the second electrical electrode 170 on exposed part first electrical semiconductor layer 130 and contact layer 155.What deserves to be mentioned is, among the present invention mentioned all first electrically with second electrically different each other electrically.For example, if first be the P type electrically, then second electrical be the N type; If first is the N type electrically, then second is the P type electrically.
The invention is characterized in, contact layer 155, the second electrical semiconductor layer 150 among Fig. 2 A and Fig. 2 B, with active layers 140 (even can comprise the part first electrical semiconductor layer 130) have triangle border 190.The figure on this triangle border 190 can be defined with same mask in the developing process before the described etching process.Wherein, the distortion size on triangle border 190 is greater than the emission wavelength of light-emitting diode 180, and the light that penetrates from active layers 140 is mapped to the reflection critical angle of the incidence angle on triangle border 190 less than triangle border 190.Therefore, use light-emitting diode 180 and the manufacture method thereof with triangle border 190 of the present invention and can reduce the probability that is reflected by triangle border 190 from the light of active layers 140 ejaculations, and the feasible luminous energy that penetrates from active layers 140 passes through triangle border 190 and injects to outside the light-emitting diode 180.
In addition, 155, the second electrical semiconductor layer 150 of the contact layer among the present invention, also can have at least one vertical ejaculation groove with active layers 140 (even can comprise the part first electrical semiconductor layer 130).Please refer to Fig. 3 A shown according among the shown Fig. 3 A of the vertical view of the light-emitting diode of another preferred embodiment of the present invention and Fig. 3 B along the formed generalized section of a-a ' section.As shown among Fig. 3 A and Fig. 3 A, contact layer 155, the second electrical semiconductor layer 150, with active layers 140 (even can comprise the part first electrical semiconductor layer 130) in have groove 202, groove 204, groove 206, and groove 208 etc., extend through the lower surface of active layers 140 and reach in the first electrical semiconductor layer 130 of part from the upper surface of contact layer 155, inject to efficient outside the light-emitting diode 180 to improve from the light of active layers 140 ejaculations.In addition, groove 202, groove 204, groove 206, do not need in principle to be limited, and can adopt as the irregularly shaped border on triangle border 190 yet and further reduce the chance that light is reflected with the shape of the medial surface of groove 208 etc.
In addition, the irregularly shaped triangle that is not defined as on the border of light-emitting diode among the present invention.As shown in Figure 4, contact layer 155 assemblies such as grade of light-emitting diode 180 also can have semicircle border 210 or parabola shaped border of waiting other shape.As long as can reduce light by the border of the Any shape of this border total reflection all in protection scope of the present invention.
By the invention described above preferred embodiment as can be known, use the present invention and can reduce the probability that is reflected from the light of active layers ejaculation, and the feasible luminous energy that penetrates from active layers passes across the border and injects to outside the light-emitting diode.
Though the present invention discloses as above by preferred embodiment; yet be not in order to limit the present invention; any those of ordinary skill in the art; without departing from the spirit and scope of the present invention; can do various changes and retouching, so protection scope of the present invention should be as the criterion with defining of claims.
The reference numeral explanation
10: substrate
30: the first electrical semiconductor layers
40: active layers
50: the second electrical semiconductor layers
55: contact layer
60: the first electrical electrodes
70: the second electrical electrodes
80: light-emitting diode
110: substrate
130: the first electrical semiconductor layers
140: active layers
150: the second electrical semiconductor layers
155: contact layer
160: the first electrical electrodes
170: the second electrical electrodes
180: light-emitting diode
190: the triangle border
202: groove
204: groove
206: groove
208: groove
210: semicircle border
Claims (20)
1. light-emitting diode comprises:
The first electrical semiconductor layer;
Active layers is positioned on the described first electrical semiconductor layer; And
The second electrical semiconductor layer, be positioned on the described active layers, at least one side of the wherein described at least active layers and the described second electrical semiconductor layer is irregularly shaped, the probability that the light that penetrates from described active layers with reduction is reflected, and the feasible luminous energy that penetrates from described active layers passes through described at least one side and injects to outside the described light-emitting diode.
2. light-emitting diode comprises:
The first electrical semiconductor layer;
Active layers is positioned on the described first electrical semiconductor layer; And
The second electrical semiconductor layer, be positioned on the described active layers, has at least one groove in the wherein described at least active layers and the described second electrical semiconductor layer, extend through the lower surface of described active layers from the upper surface of the described second electrical semiconductor layer, inject to efficient outside the described light-emitting diode to improve the light that penetrates from described active layers.
3. light-emitting diode as claimed in claim 2, it is characterized in that, at least one side of the described active layers and the described second electrical semiconductor layer is irregularly shaped, the probability that the light that penetrates from described active layers with reduction is reflected, and the feasible luminous energy that penetrates from described active layers passes through described at least one side and injects to outside the described light-emitting diode.
4. as one of them described light-emitting diode of claim 1 to 3, it is characterized in that the material of the described first electrical semiconductor layer is a gallium nitride.
5. as one of them light-emitting diode as described in the claim 1 to 3, it is characterized in that the material of described active layers is an InGaN.
6. as one of them described light-emitting diode of claim 1 to 3, it is characterized in that the material of the described second electrical semiconductor layer is a gallium nitride.
7. as claim 1 or 3 described light-emitting diodes, it is characterized in that the shape of described at least one side is selected from by one of triangle, semicircle and parabola shaped group that forms.
8. as claim 1 or 3 described light-emitting diodes, it is characterized in that the distortion size of described at least one side is greater than the emission wavelength of described light-emitting diode.
9. as claim 1 or 3 described light-emitting diodes, it is characterized in that the light that penetrates from described active layers is mapped to the reflection critical angle of the incidence angle of described at least one side less than described at least one side.
10. as claim 1 or 3 described light-emitting diodes, it is characterized in that described at least one side forms by reactive ion etching.
11. a manufacturing method for LED comprises:
The first electrical semiconductor layer is provided;
Form active layers on the described first electrical semiconductor layer; And
Form the second electrical semiconductor layer on described active layers, at least one side of the wherein described at least active layers and the described second electrical semiconductor layer is irregularly shaped, the probability that the light that penetrates from described active layers with reduction is reflected, and the feasible luminous energy that penetrates from described active layers passes through described at least one side and injects to outside the described light-emitting diode.
12. a manufacturing method for LED comprises:
The first electrical semiconductor layer is provided;
Form active layers on the described first electrical semiconductor layer; And
Form the second electrical semiconductor layer on described active layers, has at least one groove in the wherein described at least active layers and the described second electrical semiconductor layer, extend through the lower surface of described active layers from the upper surface of the described second electrical semiconductor layer, also comprise from the upper surface of the described second electrical semiconductor layer and extend through substrate surface, inject to efficient outside the described light-emitting diode to improve the light that penetrates from described active layers.
13. manufacturing method for LED as claimed in claim 12, it is characterized in that, at least one side of the described at least active layers and the described second electrical semiconductor layer is irregularly shaped, the probability that the light that penetrates from described active layers with reduction is reflected, and the feasible luminous energy that penetrates from described active layers passes through described at least one side and injects to outside the described light-emitting diode.
14., it is characterized in that the material of the described first electrical semiconductor layer is a gallium nitride as one of them described manufacturing method for LED of claim 11 to 13.
15., it is characterized in that the material of described active layers is an InGaN as one of them described manufacturing method for LED of claim 11 to 13.
16., it is characterized in that the material of the described second electrical semiconductor layer is a gallium nitride as one of them described manufacturing method for LED of claim 11 to 13.
17., it is characterized in that the shape of described at least one side is selected from by one of triangle, semicircle and parabola shaped group that forms as claim 11 or 13 described manufacturing method for LED.
18., it is characterized in that a distortion size of described at least one side is greater than the emission wavelength of described light-emitting diode as claim 11 or 13 described manufacturing method for LED.
19., it is characterized in that the light that penetrates from described active layers is mapped to the reflection critical angle of the incidence angle of described at least one side less than described at least one side as claim 11 or 13 described manufacturing method for LED.
20., it is characterized in that described at least one side forms by reactive ion etching as claim 11 or 13 described manufacturing method for LED.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100898726A CN100481534C (en) | 2004-10-28 | 2004-10-28 | Light emitting diode and process for producing the same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100898726A CN100481534C (en) | 2004-10-28 | 2004-10-28 | Light emitting diode and process for producing the same |
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|---|---|
| CN1767222A true CN1767222A (en) | 2006-05-03 |
| CN100481534C CN100481534C (en) | 2009-04-22 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102903813A (en) * | 2012-09-29 | 2013-01-30 | 海迪科（苏州）光电科技有限公司 | Fabrication method of high-voltage LED device with integrated graphic array |
| CN103094445A (en) * | 2011-11-08 | 2013-05-08 | 鼎元光电科技股份有限公司 | Light emitting diode structure with uneven side edges |
| CN103107258A (en) * | 2011-11-14 | 2013-05-15 | 鼎元光电科技股份有限公司竹南分公司 | Light-emitting diode (LED) structure with wavy side edge |
| WO2014048014A1 (en) * | 2012-09-29 | 2014-04-03 | 海迪科（苏州）光电科技有限公司 | High-efficiency and high-voltage led chip |
| CN105870284A (en) * | 2016-05-09 | 2016-08-17 | 青岛杰生电气有限公司 | Light-emitting diode structure and processing method thereof |
-
2004
- 2004-10-28 CN CNB2004100898726A patent/CN100481534C/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103094445A (en) * | 2011-11-08 | 2013-05-08 | 鼎元光电科技股份有限公司 | Light emitting diode structure with uneven side edges |
| CN103107258A (en) * | 2011-11-14 | 2013-05-15 | 鼎元光电科技股份有限公司竹南分公司 | Light-emitting diode (LED) structure with wavy side edge |
| CN102903813A (en) * | 2012-09-29 | 2013-01-30 | 海迪科（苏州）光电科技有限公司 | Fabrication method of high-voltage LED device with integrated graphic array |
| CN102903813B (en) * | 2012-09-29 | 2014-04-02 | 海迪科（南通）光电科技有限公司 | Fabrication method of high-voltage LED device with integrated graphic array |
| WO2014048014A1 (en) * | 2012-09-29 | 2014-04-03 | 海迪科（苏州）光电科技有限公司 | High-efficiency and high-voltage led chip |
| CN105870284A (en) * | 2016-05-09 | 2016-08-17 | 青岛杰生电气有限公司 | Light-emitting diode structure and processing method thereof |
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| Publication number | Publication date |
|---|---|
| CN100481534C (en) | 2009-04-22 |
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Effective date of registration: 20060310 Address after: Hsinchu science industry zone, Taiwan, Hsinchu, five 5 Li Li Road Applicant after: Jingyuan Optoelectronics Co., Ltd. Address before: 9 floor, No. 10, walking road, Hsinchu Science Industrial Park, Taiwan, China Applicant before: Guolian Photoelectric Science and Technology Co., Ltd. |
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