CN1766156A - Filming apparatus - Google Patents
Filming apparatus Download PDFInfo
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- CN1766156A CN1766156A CN 200410088450 CN200410088450A CN1766156A CN 1766156 A CN1766156 A CN 1766156A CN 200410088450 CN200410088450 CN 200410088450 CN 200410088450 A CN200410088450 A CN 200410088450A CN 1766156 A CN1766156 A CN 1766156A
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Abstract
The invention relates to a film coating device to form at least one coat on a base plate, which comprises: a power unit with a rotation axes and at least a cantilever, a first gear fixed on said axes, at least a drive unit composed of a second gear joggled with the first one, an axes past a bearing fixed on cantilever, a bearing for base plate, and a clamp arranged on outside of the bearing; a bearing base, and at least one film coating source. This invention can bear base plate with large area to enhance product capacity, and improves evenness of coating layer.
Description
Technical field
The present invention relates to a kind of filming equipment, particularly relate to a kind of filming equipment (COATING APPARATUS) that can carry large-area substrate.
Background technology
Film-plating process is extremely wide in the application of industry member, and general normal use is in metal-processing industry, semi-conductor industry and opto-electronics or the like.In recent years, again because developing rapidly of semi-conductor industry and opto-electronics makes coating technique that great progress also be arranged.
Seeing also shown in Figure 1ly, is the structural representation of an existing known filming equipment, and existing known filming equipment 1 comprises a motor 11, a parachute kit formula load bearing seat 12, a shield 13 and a plating source 14.Wherein, parachute kit formula load bearing seat 12 is located in the axle center of motor 11, and the shape of parachute kit formula load bearing seat 12 is similar umbrellas, and it is made up of four parachute kit formula load bearing seats 12 usually, and therefore, this filming equipment 1 is called parachute kit formula film coating equipment again.Shield 13 is the positions that are arranged at contiguous parachute kit formula load bearing seat 12; And plating source 14 is relative with parachute kit formula load bearing seat 12 and establish; That is shield 13 is to be located between parachute kit formula load bearing seat 12 and the plating source 14.
From the above, when using filming equipment 1 to carry out film-plating process, normally earlier a plurality of substrates 60 are fixed on the parachute kit formula load bearing seat 12, starter motor 11 utilizes modes such as vacuum evaporation mode or sputtering way that plating source 14 is plating on these substrates 60 with rotation parachute kit formula load bearing seat 12 at last more then.The parachute kit formula load bearing seat 12 of filming equipment 1 is to be applicable to the substrate 60 of carrying small area and to form coatings thereon, with the optical element of Production Example such as flat colored filter etc.
Yet, along with the demand to optical articles increases, therefore, optical element manufacturer researches and develops corresponding filming equipment with great concentration invariably to increase the production capacity of optical element, compared to prior art, owing to can only carry the substrate 60 of small area, therefore production capacity is relatively limited, and if need to increase output, relatively need spend the hyperphoric substrate 60 of suitable labour reaching predetermined output, this concerning the operator not less than being a labor service of wasting time and energy.
This shows that above-mentioned existing filming equipment obviously still has inconvenience and defective, and demands urgently further being improved in structure and use.In order to solve the problem that filming equipment exists, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product does not have appropriate structure to address the above problem, this obviously is the problem that the anxious desire of relevant dealer solves.Therefore, how providing a kind of filming equipment that can increase production capacity is one of important topic of current film-plating process technology in fact.
Because the defective that above-mentioned existing filming equipment exists, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and expertise, and the utilization of cooperation scientific principle, actively studied innovation, in the hope of founding a kind of filming equipment of novel texture, can improve general existing filming equipment, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, create the present invention who has practical value finally.
Summary of the invention
The objective of the invention is to, overcome the defective that existing filming equipment exists, and a kind of filming equipment that can the large-area substrate of carrying is provided, reaching the purpose that increases production capacity, thereby be suitable for practicality more, have the utility value on the industry.
The object of the invention to solve the technical problems realizes by the following technical solutions.According to a kind of filming equipment that the present invention proposes, it is in order to forming at least one coatings on a substrate, and it comprises: a power unit, and it has an axis of rotation and at least one cantilever, and an end of this cantilever is fixedly arranged on this axis of rotation; One first gear, it is to be central shaft with this axis of rotation, set collar is located at this axis of rotation; At least one gear unit, it comprises one second gear, an axle center, a bearing and anchor clamps, and wherein this second gear is and this first toothing, and this second gear and this anchor clamps are located in this axle center respectively, this bearing is fixedly arranged on the other end of this cantilever, and this axle center is to wear this bearing; One load bearing seat, it carries this substrate, and these anchor clamps are linked to the periphery of this load bearing seat; And at least one coating source, it is in order to form this coatings on this substrate.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid filming equipment, it more comprises a backboard, and it is arranged on this load bearing seat, and this backboard is arranged on this substrate.
Aforesaid filming equipment, wherein said anchor clamps have a plurality of jig arm, and these jig arm are to establish with the radial edge of the junction that is located in this axle center, and these anchor clamps are the peripheries that are linked to this load bearing seat with an end of these jig arm.
Aforesaid filming equipment, wherein said load bearing seat has an opening, and the area of this opening is less than the area of this substrate, and this substrate card places on this load bearing seat.
Aforesaid filming equipment, wherein said substrate are to be an optical element.
Aforesaid filming equipment, wherein said second gear, this axle center and this anchor clamps are to be synchronous rotation.
Aforesaid filming equipment, wherein said cantilever and this bearing are to be that central shaft rotates synchronously with this axis of rotation.
Aforesaid filming equipment, it more comprises: at least one shield, it is connected in a side of this cantilever, and the part of this shield is arranged between this coating source and this load bearing seat, in order to revise the thickness of this coatings.
Aforesaid filming equipment, wherein said axle center are parallel with this axis of rotation.
The object of the invention to solve the technical problems also adopts following technical scheme to realize.According to a kind of filming equipment that the present invention proposes, it is in order to forming at least one coatings on a substrate, and it comprises: a power unit, and it has an axis of rotation and at least one cantilever, and an end of this cantilever is fixedly arranged on this axis of rotation; One first gear, it is to be central shaft with this axis of rotation, set collar is located at this axis of rotation; At least one gear unit, it comprises one second gear, an axle center, a bearing and anchor clamps, wherein this second gear is and this first toothing, this second gear and this anchor clamps are located in this axle center respectively, this bearing is fixedly arranged on the other end of this cantilever, this axle center wore this bearing, and these anchor clamps have a plurality of jig arm, and these jig arm are established with the radial edge of the junction that is located in this axle center; One load bearing seat, it is this substrate of carrying, and an end of these jig arm is the peripheries that are linked to this load bearing seat; And at least one coating source, it is in order to form this coatings on this substrate.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid filming equipment, it more comprises: a backboard, it is arranged on this load bearing seat, and this backboard is to be arranged on this substrate, and this load bearing seat has an opening, and the area of this opening is less than the area of this substrate, and this substrate card places on this load bearing seat.
Aforesaid filming equipment, wherein said substrate are to be an optical element.
Aforesaid filming equipment, wherein said second gear, this axle center and this anchor clamps are to be synchronous rotation.
Aforesaid filming equipment, wherein said cantilever and this bearing are to be that central shaft rotates synchronously with this axis of rotation.
Aforesaid filming equipment, it more comprises: at least one shield, it is connected in a side of this cantilever, and the part of this shield is arranged between this coating source and this load bearing seat, in order to revise the thickness of this coatings.
The present invention compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, in order to reach aforementioned goal of the invention, major technique of the present invention thes contents are as follows:
The present invention proposes a kind of filming equipment, comprises a power unit, one first gear, at least one gear unit, a load bearing seat and at least one coating source.Wherein, power unit has an axis of rotation and at least one cantilever, and an end of this cantilever is fixedly arranged on axis of rotation; First gear is a central shaft with the axis of rotation, and set collar is located at axis of rotation; Gear unit comprises one second gear, an axle center, a bearing and anchor clamps, second gear and first toothing, and second gear and anchor clamps then are located in the axle center respectively, and the axle center is the bearing that wore the other end that is fixedly arranged on cantilever; Load bearing seat is a bearing substrate, and anchor clamps are the peripheries that are linked to load bearing seat; And coating source is in order to form coatings on substrate.
The present invention also proposes another kind of filming equipment, comprises a power unit, one first gear, at least one gear unit, a load bearing seat and at least one coating source.Wherein, power unit has an axis of rotation and at least one cantilever, and an end of cantilever is fixedly arranged on axis of rotation; First gear is a central shaft with the axis of rotation, and set collar is located at axis of rotation; Gear unit comprises one second gear, an axle center, a bearing and anchor clamps, second gear and first toothing, second gear and anchor clamps are located in the axle center respectively, and the axle center wore the bearing of the other end that is fixedly arranged on cantilever, anchor clamps have a plurality of jig arm, and each jig arm is to establish with the radial edge of the junction that is located in the axle center; Load bearing seat is a bearing substrate, and an end of each jig arm is the periphery that is linked to load bearing seat; And coating source is in order to form coatings on substrate.
By technique scheme, filming equipment of the present invention has following advantage at least: because filming equipment of the present invention is to utilize anchor clamps to be linked to the periphery of load bearing seat, more particularly, anchor clamps are to have a plurality of jig arm, be linked to the periphery of load bearing seat with each jig arm, because physical construction of the present invention makes load bearing seat fully use the utilizability of area to carry large-area substrate, after coating process is finished, impose the substrate that cuts into than small area, for example: the optical elements such as spectral filter of fan type, compared to the flat-shaped substrate that existing known techniques can only be carried small area, the present invention has the effect that can increase production capacity effectively.
In sum, the invention provides a kind of filming equipment that can carry large-area substrate, can effectively utilize the loaded area of load bearing seat to carry large-area substrate, and can reach the purpose that increases production capacity; Because load bearing seat drives rotation by anchor clamps, add the rotation of the gear unit relative rotation axi heart in addition, and can increase the homogeneity of the coatings of substrate.It has above-mentioned many advantages and practical value, and in like product, do not see have similar structure design to publish or use and really genus innovation, no matter it structurally or bigger improvement all arranged on the function, have technically than much progress, and produced handy and practical effect, and more existing filming equipment has the multinomial effect of enhancement, thus be suitable for practicality more, and have the extensive utility value of industry, really be a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technique means of the present invention, and can be implemented according to the content of specification sheets, and for above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is the structural representation of an existing known filming equipment.
Fig. 2 is the structural representation of the filming equipment of preferred embodiment of the present invention.
Fig. 3 is the local enlarged diagram of the filming equipment of preferred embodiment of the present invention shown in Figure 2, comprises power unit, first gear, gear unit and load bearing seat.
Fig. 4 is the exploded perspective synoptic diagram of gear unit of the filming equipment of preferred embodiment of the present invention.
1: filming equipment 11: motor
12: parachute kit formula load bearing seat 13: shield
14: plating source 2: filming equipment
21: power unit 211: axis of rotation
212: 22: the first gears of cantilever
23: 231: the second gears of gear unit
232: axle center 233: bearing
234: anchor clamps 234A: jig arm
24: load bearing seat 241: square aperture
25: coating source 26: cavity
27: backboard 28: shield
60: substrate 70: substrate
80: motor
Embodiment
Reach technique means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to its embodiment of filming equipment, structure, feature and the effect thereof that foundation the present invention proposes, describe in detail as after.
See also shown in Figure 2, the filming equipment 2 of preferred embodiment of the present invention, be in order to forming at least one coatings on a substrate 70, filming equipment 2 comprises a power unit 21, one first gear 22, at least one gear unit 23, a load bearing seat 24 and at least one coating source 25.Wherein, substrate 70 is a glass, also or an optical element.
Each load bearing seat 24 is in order to bearing substrate 70, Coating Materials is formed on the substrate 70 with the evaporation or the mode of sputter by the coating source 25 that is positioned at cavity 26 bottoms, and form required coatings, certainly, also can be according to actual needs, a plurality of coating sources 25 are set, in order to form the plural layer coatings on substrate 70.
Seeing also shown in Figure 3ly, is the local enlarged diagram of the filming equipment of preferred embodiment of the present invention shown in Figure 2, with the relative position and the connection relationship of explanation power unit 21, first gear 22, gear unit 23 and load bearing seat 24.
This power unit 21 has an axis of rotation 211 and at least one cantilever 212, and an end of each cantilever 212 is fixedly arranged on axis of rotation 211; In the present embodiment, axis of rotation 211 is to connect four cantilevers 212, and axis of rotation 211 is to be driven and rotated by motor 80, makes each cantilever 212 along with axis of rotation 211 rotates and driven rotary simultaneously.
This first gear 22 is to be central shaft with axis of rotation 211, set collar be located at axis of rotation 211 around; One what carry is that first gear 22 is for maintaining static at this.
Please consult Fig. 2 again to shown in Figure 4, this each gear unit 23, it is the other end that is linked to each cantilever 212, and each gear unit 23 comprises one second gear 231, an axle center 232, a bearing 233 and anchor clamps 234 respectively, wherein second gear 231 and 22 engagements of first gear, bearing 233 is the other ends that wore cantilever 212 and be fixed in cantilever 212,232 in axle center wore bearing 233, second gear 231 and 234 two ends that are located in axle center 232 respectively of anchor clamps, and be positioned at the relative both sides of cantilever 212, wherein second gear 231 is the upsides that are positioned at cantilever 212.
Because the axle center 232 of second gear 231 is a dual bearing structure, be that outer bearing is fixedly arranged on the cantilever 212, and neck bearing is to pass cantilever 212 and link with anchor clamps 234, therefore drive by cantilever 212 and during when second gear 231 along 22 rollings of first gear, anchor clamps 234 can not move with respect to cantilever 212, and only can be driven and be rotated by second gear 231 relative to cantilever 212.
The substrate 70 of plated film is desired in 24 carryings of load bearing seat, be linked to the periphery of load bearing seat 24 by anchor clamps 234, in the present embodiment, anchor clamps 234 have a plurality of jig arm 234A, each jig arm 234A is to be that establish on radial edge, center with the junction that is located in axle center 232, and anchor clamps 234 are the peripheries that are linked to load bearing seat 24 with the end of each jig arm 234A.In the present embodiment, anchor clamps 234 have three jig arm 234A, be to be 120 degree angles between each jig arm 234A, and link load bearing seat 24 with the clamping locking mode, wherein load bearing seat 24 has a square aperture 241, and the area of square aperture 241 is the areas less than substrate 70, so that substrate 70 is placed on the load bearing seat 24, and exposes the desire plated film face (as shown in Figure 2) of substrate 70 with respect to coating source 25.
In addition, filming equipment 2 more comprises a backboard 27, and it is arranged on the load bearing seat 24, and substrate 70 is to be carried between backboard 27 and the load bearing seat 24, and the non-plated film face that is arranged so that substrate 70 of backboard 27 can cover and prevent the pollution of coating process.
Again, filming equipment 2 more comprises at least one shield 28, shield 28 is sides that are connected in cantilever 212, and be positioned at an end of cantilever 212, the part of shield 28 is arranged between coating source 25 and the load bearing seat 24 (as shown in Figure 2), in order to revise the thickness of coatings, what these needs one were carried is, the shape of shield 28 can determine according to the specific thicknesses of the material that is plated on the substrate 70, and shield 28 to the distance of load bearing seat 24 is to adjust with the coatings of specific thicknesses.In sum, the anchor clamps 234 of gear unit 23, backboard 27 and load bearing seat 24 are the downsides that are positioned at cantilever 212 with respect to second gear 231.
From the above, second gear 231, axle center 232 and the anchor clamps 234 of each gear unit 23 are to be synchronous rotation, and cantilever 212 and bearing 233 are to be central shaft and rotation synchronously with axis of rotation 211, therefore substrate 70 can rotate effectively and moves along with the load bearing seat 24 that is linked to anchor clamps 234, and reaches the purpose of even plated film.Wherein, the axle center 232 of each gear unit 23 is that axis of rotation 211 with power unit 21 be arranged in parallel.
In sum, because the filming equipment according to preferred embodiment of the present invention is the rotation that utilizes the second gear driven anchor clamps, because anchor clamps are to have the periphery that each jig arm of plural number is linked to load bearing seat, therefore can effectively utilize the loaded area of load bearing seat to carry large-area substrate, and effectively increase production capacity, in addition, because load bearing seat is driven by anchor clamps and rotates, add the rotation of the gear unit relative rotation axi heart, can increase the homogeneity of the coatings of substrate thus.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (15)
1, a kind of filming equipment, it is in order to forming at least one coatings on a substrate, it is characterized in that it comprises:
One power unit, it has an axis of rotation and at least one cantilever, and an end of this cantilever is fixedly arranged on this axis of rotation;
One first gear, it is to be central shaft with this axis of rotation, set collar is located at this axis of rotation;
At least one gear unit, it comprises one second gear, an axle center, a bearing and anchor clamps, and wherein this second gear is and this first toothing, and this second gear and this anchor clamps are located in this axle center respectively, this bearing is fixedly arranged on the other end of this cantilever, and this axle center is to wear this bearing;
One load bearing seat, it carries this substrate, and these anchor clamps are linked to the periphery of this load bearing seat; And
At least one coating source, it is in order to form this coatings on this substrate.
2, filming equipment according to claim 1 is characterized in that it more comprises a backboard, and it is arranged on this load bearing seat, and this backboard is arranged on this substrate.
3, filming equipment according to claim 1, it is characterized in that wherein said anchor clamps have a plurality of jig arm, these jig arm are to establish with the radial edge of the junction that is located in this axle center, and these anchor clamps are the peripheries that are linked to this load bearing seat with an end of these jig arm.
4, filming equipment according to claim 1 is characterized in that wherein said load bearing seat has an opening, and the area of this opening is less than the area of this substrate, and this substrate card places on this load bearing seat.
5, filming equipment according to claim 1 is characterized in that wherein said substrate is to be an optical element.
6, filming equipment according to claim 1 is characterized in that wherein said second gear, this axle center and this anchor clamps are to be synchronous rotation.
7, filming equipment according to claim 1 is characterized in that wherein said cantilever and this bearing are is that central shaft rotates synchronously with this axis of rotation.
8, filming equipment according to claim 1 is characterized in that it more comprises:
At least one shield, it is connected in a side of this cantilever, and the part of this shield is arranged between this coating source and this load bearing seat, in order to revise the thickness of this coatings.
9, filming equipment according to claim 1 is characterized in that wherein said axle center is parallel with this axis of rotation.
10, a kind of filming equipment, it is in order to forming at least one coatings on a substrate, it is characterized in that it comprises:
One power unit, it has an axis of rotation and at least one cantilever, and an end of this cantilever is fixedly arranged on this axis of rotation;
One first gear, it is to be central shaft with this axis of rotation, set collar is located at this axis of rotation;
At least one gear unit, it comprises one second gear, an axle center, a bearing and anchor clamps, wherein this second gear is and this first toothing, this second gear and this anchor clamps are located in this axle center respectively, this bearing is fixedly arranged on the other end of this cantilever, this axle center wore this bearing, and these anchor clamps have a plurality of jig arm, and these jig arm are to establish with the radial edge of the junction that is located in this axle center;
One load bearing seat, it is this substrate of carrying, and an end of these jig arm is the peripheries that are linked to this load bearing seat; And
At least one coating source, it is in order to form this coatings on this substrate.
11, filming equipment according to claim 10 is characterized in that it more comprises:
One backboard, it is arranged on this load bearing seat, and this backboard is to be arranged on this substrate, and this load bearing seat has an opening, and the area of this opening is less than the area of this substrate, and this substrate card places on this load bearing seat.
12, filming equipment according to claim 10 is characterized in that wherein said substrate is to be an optical element.
13, filming equipment according to claim 10 is characterized in that wherein said second gear, this axle center and this anchor clamps are to be synchronous rotation.
14, filming equipment according to claim 10 is characterized in that wherein said cantilever and this bearing are is that central shaft rotates synchronously with this axis of rotation.
15, filming equipment according to claim 10 is characterized in that it more comprises:
At least one shield, it is connected in a side of this cantilever, and the part of this shield is arranged between this coating source and this load bearing seat, in order to revise the thickness of this coatings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100884507A CN100415928C (en) | 2004-10-29 | 2004-10-29 | Filming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100884507A CN100415928C (en) | 2004-10-29 | 2004-10-29 | Filming apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1766156A true CN1766156A (en) | 2006-05-03 |
| CN100415928C CN100415928C (en) | 2008-09-03 |
Family
ID=36742267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100884507A Expired - Fee Related CN100415928C (en) | 2004-10-29 | 2004-10-29 | Filming apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100415928C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102211853A (en) * | 2010-04-09 | 2011-10-12 | 鸿富锦精密工业（深圳）有限公司 | Film coating jig |
| CN102234781A (en) * | 2010-04-28 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Coating umbrella stand |
| CN103295941A (en) * | 2013-05-31 | 2013-09-11 | 国电光伏有限公司 | Hetero-junction plate-type PECVD (plasma enhanced chemical vapor deposition) carrier plate |
| CN105911624A (en) * | 2016-06-20 | 2016-08-31 | 三明福特科光电有限公司 | Rectangular linear variable optical filter manufacturing method and device |
| CN111139442A (en) * | 2019-12-31 | 2020-05-12 | 中山市博顿光电科技有限公司 | Rotary clamp and vacuum coating equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0835065A (en) * | 1994-07-22 | 1996-02-06 | Murata Mfg Co Ltd | Vacuum film forming device |
| CN1216180C (en) * | 2002-07-26 | 2005-08-24 | 中国科学院上海光学精密机械研究所 | Equipment for in-line exchange of substrate in vacuum chamber |
| CN2573508Y (en) * | 2002-09-05 | 2003-09-17 | 精碟科技股份有限公司 | Film coating apparatus |
| CN1234906C (en) * | 2003-04-11 | 2006-01-04 | 精碟科技股份有限公司 | Deposition equipment |
-
2004
- 2004-10-29 CN CNB2004100884507A patent/CN100415928C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102211853A (en) * | 2010-04-09 | 2011-10-12 | 鸿富锦精密工业（深圳）有限公司 | Film coating jig |
| CN102234781A (en) * | 2010-04-28 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Coating umbrella stand |
| CN103295941A (en) * | 2013-05-31 | 2013-09-11 | 国电光伏有限公司 | Hetero-junction plate-type PECVD (plasma enhanced chemical vapor deposition) carrier plate |
| CN105911624A (en) * | 2016-06-20 | 2016-08-31 | 三明福特科光电有限公司 | Rectangular linear variable optical filter manufacturing method and device |
| CN111139442A (en) * | 2019-12-31 | 2020-05-12 | 中山市博顿光电科技有限公司 | Rotary clamp and vacuum coating equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100415928C (en) | 2008-09-03 |
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Granted publication date: 20080903 Termination date: 20091130 |